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519722, 820 PM .3P2001205600A - Fine structure and is manufacture - Google Patents Patents JP2001205600A.coogle Fine structure and its manufacture Abstract JP2001205600A haa inh carole se sconce, SOLUTION Te alin nanosbe fred an ° falter sane The nh of shmina ranoeube carlo the phat of alia naobes St F srajed ap togethorn burch Inver Tetsuya nas 33, Tor Den 2000 -ppeatonsP2000019245 evens 2000-01-27 Appice ted by Canon ne, #7 AAR nected y (5), Stir documents Poy en Reed Apples ‘teal inks: Escort clo Dossier Dsus Claims (1) ide Depencet = [oti ester compriingsuin avn eluate shape with ices o S00 oe bang clin pres perl othe colin shape.2.The vores searing toca where then oft cokmnar por ar open 3 One ert he cokers pore pen Themicostucure azotng a clin wherein he ote erie caeed A microsucure where a laly of si icosbucues ae raged an asserted inabunde 5 “hamieesttre acne oc whan he heres othe irene Is} ym ries 6 The most secdng tam wert proededin he clue! pote ofthe micesbucure. 7. The msastuctve aeargta lam where a mete fla We clr pote of he mioatuetve 8, Amati raed 8 ricrostueture made of ama having 2colmrar shape and havigelunea pores paral the colar shape, wien ast At tp of forming more than one lod ‘peering pin and ang ich pores ee provid ecorance wth he Kid of the peeling pon byaneding apron he meee rainy containg Shinar soars sie offorming aminaahsste of elmnatng at fhe aoszed alrna aoa te ype ofthe pare sacra pont ne isaesing the anedeed shinne tothe auto cba amos Aether er prcng amicosuce comping forthe. 9, The pre tating pot has a concave shape a2 ‘came wit te saeungs ad te fet step offing he pore staring pat forms atleast woo more yes of poe staring Dons taning ferent cance shapes. The hod for producing a microstruc aoring techn when the method ia ie of 10 The fet tap o foming the pore staring pit a tp forming at ast wo cr rare types pore starng poets hav tet depts of the concave shape 3. The method for produiga merece aceorengo dam 7.17. Themcrostucre ‘cording to hie 8 hr he peering pout ia frmed by radiating apron nin creed ef lumina ith aceon bar. anf met. 12. A retod fo produong aie stucre made of uring having a come shape and Nevin cola ors paral the clue shape, he ateas 2 st tp of forming regiors hag ferent pest pore string pnt arangerents and aneding a prion ofthe wakpece many cataning mina oar pores in accordance wth *herepons havng fern pare staring pant arangement seed step of fring aroazed aurin prone wth ati step of eminatng apart te apogee luring step of dsocatng bt af struct 13 The st steps step of forming atleast we ore yes oregon havo eet ore stat ol ena hawng ferent pore star por neva 14. The mead fe producing a most ust eccordng teal 12, wheren te pte larg pols poduedby edge focused lon bean to portn ran compoced of siirum. 15.8 miostuetr produce bythe manfactiing methed code oda 8 Deesiptn Description tateeed om Japanese tooo arteuth oe nano material mee of aoa whic canbe wey Used as afurctonal materia eecnic deves, etal dees, mit dels, te The present (ooo) hitpssipaterts.google.compaterlJP2001205600Aen?0q=1P7001205600A_ Google amt 519722, 820 PM .3P2001205600A - Fine structure and is manutactu 2 Desert o he Related At Meal an sericordictr hi fins, els. dos ane eae eget ate ate mar han cain characte egh nen te maven eens is conned, may ex urau eral opt. ar cherclpoperts. om such aWewpont. thre 8 growing meres n ‘tere saowtacizes hing suture ner than over! 00 ra fen malar Google Patents [ooo Aca method for roduc such ananasivee, For exampl potslthgraghy lecton bea exposure ‘Theels emebod of recy maruacurg enanostuctueby a sericeadute processing econ such cerporue Oihernnssrstreabrznion metho rls: (tve-ive parce materes ate erp ied. Suchen uate petele meters manufactured a method such as evaporation a gas ose inept ong ehnolgy ash eb Ke0y [oo] on ene thes ann asta o such manfectung metbos. an ates been mace tora arovelnanesntire based on arouse forme rua hati.» setre‘omed se reo Bere. Mary suses have begun a these enigueeDecauve Dre a pasa tat ae! ad api auc ‘canbe prsucas veh careeonl matossdeenang ona merous ured ae base (oo05 An exaroe of such asleeglrmetode anode oration whch can cal posice a rarartucue hag nanesize pre nace anes ot ‘xample anda aluring produced by enedngahumium aris loys nen 2182 Bhs krown. When anedrg a pitein an ace alecr, ‘porous oxde i rede alumina) formed (fr exept, A Funeau, WR by) EA P Dod MATURE Vl 397,147 (188) ). Ths poros onde hat ope eam setenv emi ce ae tsb and aang uting a col auricle sunt srt, The cate f each shri cl haa sete of etl mtn seealunced ‘having extemal re eee pes nae ols ‘The dstanes Eewoonthe pre eresponde the el hl the dee of the slum ee ndrarge om svralemn t sevral handed, Thea enor pore ave high epee oad re excelent in ui ern sctonal iret. Te Grete atl pacing te pres re contigo sre exe by ajntng he oer nate orig ae oxen and he hsenes oft one fim athe aephaf he pes arecentaledycanoing he rede idan tne posse, ‘sa, the erty othe pores of anoiz04 amine, Inosdertaimprovenesty ar indepecenca,amthad af perloming o-stage ans dt that nie evi te pau ade flamed yearning {ano nse, performing nace oan agai eban beter versal. A meta frrdkcing anoeze luring ordered rantoles having pees exng Teast arindeensenc hasbeen proposed ip, Jounal spa). oped Physics vo. 35, Pan, No. 1p. LI264128, 15 January 1936). Heres method uses that he depression onthe sua ofthe aluminum pl formed when removing he anode oie fim formed byte est nedesion,« metre of eming epee starting so byes patering tia depression fey pressing esubsbelehevng 2 pay of pjetns on be ‘race of aimirum plate a3 pre staring pont ore, Artie of producing porous de lm ang pores etbsrg betes cotel ofthe hap, pace ‘sd ptier by petonming ode xt tt hanes buen proposed (JPA 1012292), ‘rou apliatans hve ban steed focusing onthe pee gamer srchie ft anode luni. The xp hntonby Masse dete, tthe sppeaionxanples ae lstelow For expe bere appeton a ln zg the wear tetance idinslatn reaitae of he adic fin sah Speen toa ker bypelng ten, Furthermore, oy vengatectniqs a Fang arantole wha mtalorssicendvtor ers rela tecnige a he nacho, Calor 2 magnetic resrdng medium an Ight erie emer a decvorlvor element a optzl element 2 ob cla ga senate Various options have been ate, Woreove, chemical eect el. (a5 ‘Sls Phys, 43101958) tooto, ‘he arect abseation of rarastncired mately th semicon rea tshique desorbed bows aie probs sch oot elt andish ear coe ndiesnoleand as goodrereduiy. A method tat an be mance se. ‘on te otarhand nthe production of ane partes, eer, Soe aproere sch as quer or aggregation ie uae It ic produce a anosucurehavng atl epee shape nda completed str. In don ie etouk ture a maeralhaeg high anormly setwe and sion hhtemparatr progests sich ge repre re genera ured Fabrcaton a loemperaure process aes ‘The setirdong matoddescced shove partly te aed ouétn metod can produce a nanostructured materal eal rath oodcortal However sce shenanosmutred materelis grea fomes as ef onthe surece ofthe mata use Was ed. Aaugh Defi use alr asoeston colt ‘the oer hand sa nanosized matithavng sync shape, carbon nanotubes ont thee ae ew pet of prods # nical nano stred rater vengotharmaterale Sree ath oni! anorrtred mateal opens ahve varios faretors by Fang sallow portant a afer mstersh ‘ealzaton ofan males ese Ft erp ati ile lca aterseal ade of ning mate an nur coated naronte canbe fore requred to eanon ne octon of te sagegt.iperant. raforcing materi oa cela materalexcetenunformitynthe fn uct ard ize ie notes te preentnvntanis to ae these oben. That stat othe presat invention tpg cynical nanostuctredmatralhavng a hy convo ze ene structure, and in gett, peduce eine nanotubes en alanine nate avis, Rete! bjt he pest veto a pov rathod for producng sch a nnosrctred ater Fatherare, anovelanesturued mati rdnanostetred de av Selzag bed on luring raretuse oreduedy apg ths teeny, nnenceles can be use as fete ater vaouedectns, hitpssipaterts.google.compaterlJP2001205600Aen?0q=1P7001205600A_ Google amt 519722, 820 PM .3P2001205600A - Fine structure and is manutactu loorel Google Patents ‘The sboveebets can be taney the floning constuon an manufacturing meted of he preset averton Tht te fst ewenton of he preset nents [oor Amicon checerzein ta bth eno the clunoer pores ae ope peered A mitosnucure carcezed in ta one ed of he clue! pote lsoponardine oes end lass A micosutre shancarzee nia splay ofthe micostaetre ae arange andacsombl in bundles prefesle povsofthe mirstwstreperened, Arirostnetue nuhich metal lle inh con paes ote morose peal. ‘The sesonainenin fhe patent enon ees os metho for producg an ature mace fsninahvig 2 column hap antag ealurae pres ual te clunaa hep, wheres linus main se AHL step of forming teas wo of more ype of ote starting pols on a Worle having orion ad anoszngthealuminurased prion ofthe workpece and s.jecing the portion andar acording ts he type of the pore staring pot. second Step forming ane alumina provided th pres, atid step of minting pat oe anozedaurineztrdng och ype of De ete staring pont ahd And ‘The pore string pairthus a concave shape a compared wih he surcundgs ed eis sep fering We ote start oti sep fering test tao rmaretipes por saring ponte hang ifr cansave tapes is peters fate a method for prac xe sare charateroea byte flowing “Theft of omg the poe staring pot i te of omg at ae or ote nds of pore staring pots having diferet depth of th concave shape. The rsthode prefered. Te mead for producing amlostucure le haacerzed nha the pore starg pots procuedby editing focused on beam ote rainy composed af rar, urea inettn ofthe preset ivenons amet fer produc fire suc made of umn having columnar shape end having clue pes petal poms o a erkpecenevig a porte, and aredig te elunur-sesed orton fhe wolece fom the poe starr pot secur ste of ming anced lumina proves wth oer aodng ath rar regione fhe atangemen, and te atp of ering part of the araczas alana searing the “tern tens the targa erangemeno the pees Ard fou se of useage ended eumia mth subgvate lo bien ane svete ‘ha fest sop ina topo forming at est wo ora ype of eins haing ferent ween ha slartng pol of os athe thd snp i ie of {orming aneized hein acer oe gins having eet eras bebven Be staring pbs of pores Pee, a metod fr pod ene cies 8 step of elminatnga partf refi structs (0024 A mathe or praducng fe structure characte ah pore staring Fb paced yada a facased io bear ox pron my compass of ake, Fart fourth aspect of the patent invent 8 mirostuetre produc fe sbovedecesbed manufacturing method econ othe reser vention a ie stucure particu an ain anole, fa lumina aroube bundle whic sre ararges canbe poses fete, “Therese! estonia nanostuctred taal wthtigh wiley nse ad shape by lw temperate processes sucha aon ‘large amaurtof alumina nanotubes ean be roses speci number feairanaatabes rare, nenesrctured mater having new fuicton canbe obtaned Far xangh,by enbecing 2 metain a aur nanetube sa sletg-neted rane Furth fist fhe preset vein patos ht io anbe ath ing ante led wh th econ tel maybe ued et ab cotentachemisl acon veel lt esereg bay srenoreng teal arabes, 3 unreal an inslting mater acosmet canbe apple ‘aos ide ele such as chercl pats, magnetic maeviae, decvonc meters, ad eptcal nate (ooze) ‘Asa preeredenbodren ofthe micostuctue fhe presertinverion an aura nanotube wile partly describes Suture af Aira Naraube 16. toms an example of teste fhe sinnanaatbe ofthe preset vertion 16 Ine above 5112 ana paotbe 52s elunib 53's pore ranche), tis an open en 56 lea cosed en ard Si ing ‘Themircatutae (lumina ratte) 5 ofthe preset enon compose af dinar S2hvrg eur shape rau Shaving a cempositen may composed of oxen, thas ¢cotinar pte 5 parte ove shape, That it hae ayia shape ang ales covered wit Ie sevnrat9 500 {erg sinthrangeof 101m to 100m. he aluminate luring enti of te preser invention ml centans uminum ane oxypen Bt ny coisa au purty loners sch Mar an ‘The amin rarlue cf th reset inventions show FG. [Asshown in (0 the ater bape anther: shape ae bo substantial cynic the cuter shape lea hevapol alr ota querer cara a shawn 15. Compa shapes repose Nee tat he colunna shape olde shape having an arbre aspect toute lareter/ rg) es ng este above ses ‘As ahown i FIGS.1(0),1(8) ae) an darinaneote having both pen eas, ‘As shown in (and) thre tan alira nate faving oe end open arb ther nto Fur a shown FIGS. 1 (an (ction tel uch a ral ora econdtr canbe embedded nthe slarina nance. Fo exe by og a stalin an alumna nanctne, an slg coed ranwire can be cba hitpssipaterts.google.compaterlJP2001205600Aen?0q=1P7001205600A_ Google amt 519722, 820 PM .3P2001205600A - Fine structure and is manutactu FG. 2ahows an ere af he tr the icroebuctue akin antube bul) o the presen inversion. A shown nF. 2 he alina nate bund ot ‘he pect ivetion as a srt n which alumin nanctube 1 (luring cele 5) are asserted anc arange, Alumina nenoubes having colina pores (paroles) atthe center are ls that ath pre SS Cane aranged substan praelo one aster end at equleetl rs several to severethuneed re Also isthe height fhe alia panotbe bul, nc he depth eng) ete pores 53s, or example, between 10 nm and 1004. nthe gue the ina cel is ran a hergoral clue and he pores are dawn 3.2 der Nowe the pest ero ot ed tothe epeaing onthe manufacturing onde, nd ayhave an etary colunna’ sepe sch ae an eltialcalumn or prem Google Patents ‘The arargerent ofthe liming nnotbes inthe amin nnotbe banal of he preset iventon mayb forsale we

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