519722, 820 PM .3P2001205600A - Fine structure and is manufacture - Google Patents
Patents JP2001205600A.coogle
Fine structure and its manufacture
Abstract
JP2001205600A
haa inh carole se sconce, SOLUTION Te alin nanosbe fred an °
falter sane The nh of shmina ranoeube carlo the phat of alia naobes St F
srajed ap togethorn burch
Inver Tetsuya nas 33, Tor Den
2000
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2000-01-27 Appice ted by Canon ne, #7 AAR
nected y (5), Stir documents Poy en Reed
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Claims (1) ide Depencet =
[oti ester compriingsuin avn eluate shape with ices o S00 oe bang clin pres perl othe colin shape.2.The
vores searing toca where then oft cokmnar por ar open 3 One ert he cokers pore pen
Themicostucure azotng a clin wherein he ote erie caeed A microsucure where a laly of si icosbucues ae raged an asserted inabunde 5
“hamieesttre acne oc whan he heres othe irene Is} ym ries 6 The most secdng tam wert proededin he
clue! pote ofthe micesbucure. 7. The msastuctve aeargta lam where a mete fla We clr pote of he mioatuetve 8, Amati raed 8
ricrostueture made of ama having 2colmrar shape and havigelunea pores paral the colar shape, wien ast At tp of forming more than one lod
‘peering pin and ang ich pores ee provid ecorance wth he Kid of the peeling pon byaneding apron he meee rainy containg
Shinar soars sie offorming aminaahsste of elmnatng at fhe aoszed alrna aoa te ype ofthe pare sacra pont ne isaesing the anedeed
shinne tothe auto cba amos Aether er prcng amicosuce comping forthe. 9, The pre tating pot has a concave shape a2
‘came wit te saeungs ad te fet step offing he pore staring pat forms atleast woo more yes of poe staring Dons taning ferent cance shapes. The
hod for producing a microstruc aoring techn when the method ia ie of 10 The fet tap o foming the pore staring pit a tp forming at ast wo cr
rare types pore starng poets hav tet depts of the concave shape 3. The method for produiga merece aceorengo dam 7.17. Themcrostucre
‘cording to hie 8 hr he peering pout ia frmed by radiating apron nin creed ef lumina ith aceon bar. anf met. 12. A
retod fo produong aie stucre made of uring having a come shape and Nevin cola ors paral the clue shape, he ateas 2 st tp of
forming regiors hag ferent pest pore string pnt arangerents and aneding a prion ofthe wakpece many cataning mina oar pores in accordance wth
*herepons havng fern pare staring pant arangement seed step of fring aroazed aurin prone wth ati step of eminatng apart te apogee luring
step of dsocatng bt af struct 13 The st steps step of forming atleast we ore yes oregon havo eet ore stat ol ena
hawng ferent pore star por neva 14. The mead fe producing a most ust eccordng teal 12, wheren te pte larg pols poduedby edge focused
lon bean to portn ran compoced of siirum. 15.8 miostuetr produce bythe manfactiing methed code oda 8 Deesiptn
Description tateeed om Japanese
tooo
arteuth oe nano material mee of aoa whic canbe wey Used as afurctonal materia eecnic deves, etal dees, mit dels, te The present
(ooo)
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2 Desert o he Related At Meal an sericordictr hi fins, els. dos ane eae eget ate ate mar han cain characte egh
nen te maven eens is conned, may ex urau eral opt. ar cherclpoperts. om such aWewpont. thre 8 growing meres n
‘tere saowtacizes hing suture ner than over! 00 ra fen malar
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[ooo Aca method for roduc such ananasivee,
For exampl potslthgraghy lecton bea exposure
‘Theels emebod of recy maruacurg enanostuctueby a sericeadute processing econ such
cerporue Oihernnssrstreabrznion metho rls:
(tve-ive parce materes ate erp ied. Suchen uate petele meters manufactured a method such as evaporation a gas ose
inept ong ehnolgy ash eb Ke0y
[oo] on ene thes ann asta o such manfectung metbos. an ates been mace tora arovelnanesntire based on arouse forme
rua hati.» setre‘omed se reo Bere. Mary suses have begun a these enigueeDecauve Dre a pasa tat ae! ad api auc
‘canbe prsucas veh careeonl matossdeenang ona merous ured ae base
(oo05 An exaroe of such asleeglrmetode anode oration whch can cal posice a rarartucue hag nanesize pre nace anes ot
‘xample anda aluring produced by enedngahumium aris loys nen 2182 Bhs krown.
When anedrg a pitein an ace alecr,
‘porous oxde i rede alumina) formed (fr exept, A Funeau, WR by)
EA P Dod MATURE Vl
397,147 (188) ). Ths poros onde hat ope eam setenv emi ce ae tsb and aang uting a col auricle
sunt srt, The cate f each shri cl haa sete of etl mtn seealunced
‘having extemal re eee pes nae ols
‘The dstanes Eewoonthe pre eresponde the el hl the dee of the slum ee ndrarge om svralemn t sevral handed, Thea
enor pore ave high epee oad re excelent in ui ern sctonal iret. Te Grete atl pacing te pres re contigo sre exe
by ajntng he oer nate orig ae oxen and he hsenes oft one fim athe aephaf he pes arecentaledycanoing he rede
idan tne posse,
‘sa, the erty othe pores of anoiz04 amine,
Inosdertaimprovenesty ar indepecenca,amthad af perloming o-stage ans dt that nie evi te pau ade flamed yearning
{ano nse, performing nace oan agai eban beter versal. A meta frrdkcing anoeze luring ordered rantoles having pees exng
Teast arindeensenc hasbeen proposed ip, Jounal spa).
oped Physics vo. 35,
Pan, No. 1p. LI264128,
15 January 1936). Heres method uses that he depression onthe sua ofthe aluminum pl
formed when removing he anode oie fim formed byte est
nedesion,« metre of eming epee starting so byes patering tia depression fey pressing esubsbelehevng 2 pay of pjetns on be
‘race of aimirum plate a3 pre staring pont ore, Artie of producing porous de lm ang pores etbsrg betes cotel ofthe hap, pace
‘sd ptier by petonming ode xt tt hanes buen proposed (JPA 1012292),
‘rou apliatans hve ban steed focusing onthe pee gamer srchie ft anode luni. The xp hntonby Masse dete, tthe
sppeaionxanples ae lstelow For expe bere appeton a ln zg the wear tetance idinslatn reaitae of he adic fin sah
Speen toa ker bypelng ten, Furthermore, oy vengatectniqs a Fang arantole wha mtalorssicendvtor ers rela tecnige a he nacho,
Calor 2 magnetic resrdng medium an Ight erie emer a decvorlvor element a optzl element 2 ob cla ga senate Various options
have been ate, Woreove,
chemical eect el. (a5 ‘Sls Phys,
43101958)
tooto,
‘he arect abseation of rarastncired mately th semicon rea tshique desorbed bows aie probs sch oot elt andish ear
coe ndiesnoleand as goodrereduiy. A method tat an be mance se.
‘on te otarhand nthe production of ane partes, eer,
Soe aproere sch as quer or aggregation ie uae It ic produce a anosucurehavng atl epee shape nda completed str. In
don ie etouk ture a maeralhaeg high anormly setwe and sion hhtemparatr progests sich ge repre re genera ured
Fabrcaton a loemperaure process aes
‘The setirdong matoddescced shove partly te aed ouétn metod can produce a nanostructured materal eal rath oodcortal However sce
shenanosmutred materelis grea fomes as ef onthe surece ofthe mata use Was ed. Aaugh Defi use alr asoeston colt
‘the oer hand sa nanosized matithavng sync shape, carbon nanotubes ont thee ae ew pet of prods # nical nano stred
rater vengotharmaterale Sree ath oni! anorrtred mateal opens ahve varios faretors by Fang sallow portant a afer mstersh
‘ealzaton ofan males ese Ft erp ati ile lca aterseal ade of ning mate an nur coated naronte canbe
fore
requred to eanon ne octon of te sagegt.iperant.
raforcing materi oa cela materalexcetenunformitynthe fn uct ard ize ie
notes te preentnvntanis to ae these oben. That stat othe presat invention tpg cynical nanostuctredmatralhavng a hy
convo ze ene structure, and in gett, peduce eine nanotubes en alanine nate avis, Rete! bjt he pest veto a pov
rathod for producng sch a nnosrctred ater Fatherare, anovelanesturued mati rdnanostetred de av Selzag bed on luring
raretuse oreduedy apg ths teeny, nnenceles can be use as fete ater vaouedectns,
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loorel
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‘The sboveebets can be taney the floning constuon an manufacturing meted of he preset averton Tht te fst ewenton of he preset nents
[oor Amicon checerzein ta bth eno the clunoer pores ae ope peered A mitosnucure carcezed in ta one ed of he clue! pote
lsoponardine oes end lass A micosutre shancarzee nia splay ofthe micostaetre ae arange andacsombl in bundles prefesle
povsofthe mirstwstreperened, Arirostnetue nuhich metal lle inh con paes ote morose peal.
‘The sesonainenin fhe patent enon ees os metho for producg an ature mace fsninahvig 2 column hap antag ealurae pres
ual te clunaa hep, wheres linus main se AHL step of forming teas wo of more ype of ote starting pols on a Worle having
orion ad anoszngthealuminurased prion ofthe workpece and s.jecing the portion andar acording ts he type of the pore staring pot. second
Step forming ane alumina provided th pres, atid step of minting pat oe anozedaurineztrdng och ype of De ete staring pont ahd And
‘The pore string pairthus a concave shape a compared wih he surcundgs ed eis sep fering We ote start oti sep fering test tao
rmaretipes por saring ponte hang ifr cansave tapes is peters fate a method for prac xe sare charateroea byte flowing
“Theft of omg the poe staring pot i te of omg at ae or ote nds of pore staring pots having diferet depth of th concave shape. The
rsthode prefered. Te mead for producing amlostucure le haacerzed nha the pore starg pots procuedby editing focused on beam ote
rainy composed af rar,
urea inettn ofthe preset ivenons amet fer produc fire suc made of umn having columnar shape end having clue pes petal
poms o a erkpecenevig a porte, and aredig te elunur-sesed orton fhe wolece fom the poe starr pot secur ste of ming anced
lumina proves wth oer aodng ath rar regione fhe atangemen, and te atp of ering part of the araczas alana searing the
“tern tens the targa erangemeno the pees Ard fou se of useage ended eumia mth subgvate lo bien ane svete
‘ha fest sop ina topo forming at est wo ora ype of eins haing ferent ween ha slartng pol of os athe thd snp i ie of
{orming aneized hein acer oe gins having eet eras bebven Be staring pbs of pores Pee, a metod fr pod ene cies 8
step of elminatnga partf refi structs
(0024 A mathe or praducng fe structure characte ah pore staring Fb paced yada a facased io bear ox pron my compass
of ake,
Fart fourth aspect of the patent invent 8 mirostuetre produc fe sbovedecesbed manufacturing method
econ othe reser vention a ie stucure particu an ain anole, fa lumina aroube bundle whic
sre ararges canbe poses fete,
“Therese! estonia nanostuctred taal wthtigh wiley nse ad shape by lw temperate processes sucha aon
‘large amaurtof alumina nanotubes ean be roses
speci number feairanaatabes
rare, nenesrctured mater having new fuicton canbe obtaned Far xangh,by enbecing 2 metain a aur nanetube sa sletg-neted rane
Furth fist fhe preset vein patos ht io anbe ath ing ante led wh th econ tel maybe ued et ab
cotentachemisl acon veel lt esereg bay srenoreng teal arabes, 3 unreal an inslting mater acosmet canbe apple
‘aos ide ele such as chercl pats, magnetic maeviae, decvonc meters, ad eptcal nate
(ooze)
‘Asa preeredenbodren ofthe micostuctue fhe presertinverion an aura nanotube wile partly describes
Suture af Aira Naraube 16. toms an example of teste fhe sinnanaatbe ofthe preset vertion 16
Ine above 5112 ana paotbe 52s elunib 53's pore ranche), tis an open en 56
lea cosed en ard Si ing
‘Themircatutae (lumina ratte) 5 ofthe preset enon compose af dinar S2hvrg eur shape rau Shaving a cempositen may
composed of oxen,
thas ¢cotinar pte 5 parte ove shape, That it hae ayia shape ang ales covered wit
Ie sevnrat9 500
{erg sinthrangeof 101m to 100m. he aluminate luring enti of te preser invention ml centans uminum ane oxypen Bt ny coisa
au purty loners sch Mar an
‘The amin rarlue cf th reset inventions show FG.
[Asshown in (0 the ater bape anther: shape ae bo substantial cynic the cuter shape lea hevapol alr ota querer cara a shawn
15. Compa shapes repose Nee tat he colunna shape olde shape having an arbre aspect toute lareter/ rg) es ng este above ses
‘As ahown i FIGS.1(0),1(8) ae) an darinaneote having both pen eas,
‘As shown in (and) thre tan alira nate faving oe end open arb ther nto
Fur a shown FIGS. 1 (an (ction tel uch a ral ora econdtr canbe embedded nthe slarina nance. Fo exe by og a
stalin an alumna nanctne, an slg coed ranwire can be cba
hitpssipaterts.google.compaterlJP2001205600Aen?0q=1P7001205600A_ Google amt519722, 820 PM .3P2001205600A - Fine structure and is manutactu
FG. 2ahows an ere af he tr the icroebuctue akin antube bul) o the presen inversion. A shown nF. 2 he alina nate bund ot
‘he pect ivetion as a srt n which alumin nanctube 1 (luring cele 5) are asserted anc arange, Alumina nenoubes having colina pores
(paroles) atthe center are ls that ath pre SS
Cane aranged substan praelo one aster end at equleetl
rs several to severethuneed re Also isthe height fhe alia panotbe bul, nc he depth eng) ete pores 53s, or example, between 10 nm and
1004. nthe gue the ina cel is ran a hergoral clue and he pores are dawn 3.2 der Nowe the pest ero ot ed tothe
epeaing onthe manufacturing onde, nd ayhave an etary colunna’ sepe sch ae an eltialcalumn or prem
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‘The arargerent ofthe liming nnotbes inthe amin nnotbe banal of he preset iventon mayb forsale we