Calculation Formula of Vacuum in common use 1 Boyle Law 2.Cay-Lussac Law 3.Charles Law 4.Average free lift S.Suction capacity 6.Communication conductor 9.Estimation of the suction capacity 7:Prmping time of vacmum § Maintain pump's selection pine Pump’ of the diffusion vacuum pump 1OThe fore stage suction capacity 154 ase ste 12Rough vacuum pumps suction of the Roots pump . capacity selection 14Calculation formula of the | 15.Gcometry calculation formula suction capacity of the diffusion of the Rotary vacuum pump's pump suetion capacity 13.Selection of the fore pump's suction capacity 17Square shape rubber groove 16.0-ring rubber groove depth L.Boyle law Volume express by V, Pressure by P, P Definite amount of air, while the saue temperature, the relation of the air pressure and volune is reverse proportion, Tt is: PP: 2.Cay * Lussac law While the pressure isn’t changed, the relation of the definite amount of air’ s volume and absolute temperature is reverse proportion: constant Waile the same pressure to the definite anount of air, its volume would increase (or decrease) 1/273 of its initial volume if the tenperature was improved (or reduce)1'C. 3.Charles law To the definite amount of air, while the air keeps its volume not to change, the relation of its pressure intensity and temperature is reverse proportion:To the definite quatity aiz, while the same volume, the temperature increases (or decreases)1'C, its pressure intensity vould improve (or reduce )1/273 of the initial volune. 4, Average free lift: (5x10) /P (ca) 5, Suction capacity: S=dvd(Lis) or S=QP Q=Flow volume(TorL/s) P—Pressure Intensity(Torr) Yolume(L) Time(s) 6. Communication Conductor; C=0/(P=P.) (L/s) 7. Pumping time of vacuum + “The calculation formula of the pumping time from ATM to LTosr: {=8V/S (experience fommula) ‘V represents the volume, S reprensents the suction capacity, the sinutes, is usally selected during the S~10 8.Maintain pump selection: S sean =S Fore/10 9.Eltimation suction capacity of the diffusion pump: (D=Diameter em) 10. Suction capacity of the fore pump of Roots pump: S=(0.1-0.2)8 Roots (U's) 11. Leakage rate: QLeakage=V(P»PiVi(tet) Qleakaze—system leakage rate(umFlz l/s) ‘V—system volume()) P,—the system pressure intensity when stop the vacuum pump(nmFg) P.~the pressure intensity of the vacuum pump after passing the time "t"(mmlTz) ‘tthe pressure expends the time(s) from IL to 2L 12. Rough vacuum pump’ s suction capacity selection:S=QuP ne (/8) S-23V1a(PP pe)t ‘S—the efficient suction capacity of the chemical pump Qs the vacuum system leakawe rate(TorrL/s) PPre—need reach to the preparation vacuum (Tort) ‘V—vactmm system volume(L) ‘tthe expending time to reach at the preparation pressure P,—ATM(Torr) 13,Fore pump suction capacity selection: The convery pump that exhaust port pressure is lower than the ATM such as Diffusion pump, oi] add-preseure pump, the Roots, molecule pusp ete. They need the fare pump to keep ‘the preparation presstire is lower than the critical date. The selected fore pump aust discharge the suction capacity of the main pump. According to the pipe path, every cross flow volume is equal by bellow condition: P,SPP,S oF SEPPa S_the efficient suction capacity of the fore pump(l/s) P,—the main pump’s critical pressure intensity (the max suetion capacity)(V/s) P,—the highest working pressure of vacmum(Tort) S—the efficient suction capacity of the main pump at P,(/s) 14, Suction capacity calculation formule of the diffusion pump: S=QP=Kny(PtjLis) in equation: S—experiment pump's suction capacity(is) ‘nthe oil postin the burete increase scale tthe expending time to increase n scale forthe oil post(s) P—the measure pressure intensity near the casing mouth(Tor) K—the burette coefficient(Tom-L/s) K= VoL (WY PAV: thereinto Vo initial volume of the burette and vacuum rub pipe(L) L~the length of the bureiteseale part(mm) nthe scale number of the bureter scale part ‘Yospecific aravity of oil(g/em?) ‘Yr~ the specific gravity of Hydrargyrum(g/em’) P,the local ATM(Torr) AVeone seale ofthe burette is corresponding volume (L/Scale) 15.Geometry calcutaltion formula of the Rotary pump's suction capaity: S=nZnLK(D*-d°)(2410°) Us) in formula: Zi the vane number, 1 i the rotated speedrpm), Lis the casing cavity leugth,D is thediameter of casing cavity, d is the Rotor diameter(cm). Kv is the volume using coefficient(usally is 95, 6). 16. ring rubber groove depth B: Dis the diameter of the rubber, the groove wide C= 1.6B 17. Square shape rubber groove depth B=! ‘Ais the side length of the square shape rubber, the groove wide C= 1.67B