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CIRCUIT DIAGRAMS Model S-2460N Seanning Electron Microscope Copyright © Hitachi, Ltd. 1993. All rights reserved. Printed in Japan. Part No. 50E-9105-1 KSTH (ST-NK36002) 1 2 10. 11. 12, 13. 14. 15. 16. 7. 18. BREBSBRNBS PN OMA TABLE OF CONTENTS DISPLAY WIRING DIAGRAM MAINA) 241 CPU BUS REGISTER 2.2 VIDEO 23 SG 2-4 CRT DEF 2.5 COLUM DEF 26 STIGMA 2-7 CONNECTORS WIRING (1/2,2/2) . MAIN(B) 3-1 CPU BUS REGISTER 3-2 LENS CONTROL 3:3 CHARACTER 3-4 VIDEO CONTROL 35 HV CONTROL 36 CONNECTORS WIRING 1. PANEL, cpu DC POWER SUPPLY (1/2,2/2) 7. GUN -ALINGMENT iF . SBC ( 1/2,2/2) CONT 1 (12,212) CONT 2 MEM VIDEO-N COLUM WIRING DIAGRAM SEQ EVAC Hvc 10KV NVC . SE AMP |. BSE AMP 2. GROUND WIRING DIAGRAM |. X-RAY MODE . DUAL MAG. RASTER ROTATION PHOTO UNIT 26-1 HR 26-2 HR-TM 26-3 HRVA |* VIDEO AMP UNTT CNS) PRS PB EpUAL Ha ez? [cvs leony (Cece HOD Ken uoz - e = X-RAY RASTER FEP CONNECTOR P-¢RT UNIT. Freszec.8] MODE UT ROTATION _ , fae POS] _ [cusz ena [ewio (cws4] | ent | [ewe ” } lok. 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DC POWER SUPPLY (2/2) 3 HORTZOUTAL 5) ey cwerz x | 4 3 X UPPER or 9) aE-oor @— | ~ NYA HoRTEONTAL i 3 ¥ ols x-ouT 1 4 7 | Y upee X-IN 2 ly 3 R y-our 3]o Y-IN 4lot aeout slot BR-IN 6 loF skovt ot SE-IN Blot i wes 7 +IUT GND o ug} x | } X LOWER w2it | A | awd atlo | BE-OUT AS 1 BE-TN Ablot eee FE 1 Bo - Re t Be-0UT 7\0} a | Sh fee LIN ABlot ey 7 (-OUT A3|O7 Mo = : FIL. IMAGE | De | Bee eee sw La ed N77 ~ Al +0 rer 68 Z — eels az ~Vret Alo| oF— xs 43,63. 418% alot —— | ans, Peco 6 5, | fil Me (0,8% GND af . ie 1 |, ihe Te | an AS.85 ~18T ete, bak LE! | wee +87 | way WR Rie Ye1n AGlol x 20 EY Pe bT™ [re ee 2 Lio) gt OK a eee Hing oe EU REET OF Beer Ae Re] Lb lace 169 ps Bee BF foe Zoe 76k 7. GUN ALINGMENT cHbzA ‘VIDED Sit, 3 }o; ——— 4 4 of 1 3a, z|ol Fees, Lo} 2 Slop Eee ey jo} s [ole eras BAS 6 Patay 7/0} — Y glo, cws00 J fo] 6 BSE sx. cN305, 16 Hr ows OG |s eras Ta Rawr 3 - U Lol 4 paar cN303 [ol +50 10 a Tee ge —Lolie Wir Ream 7 aL Dh res casas Vs Taree 6 -= fee p> BE 107 of res | see ew “pra i Pg em}. [scar re) = = oe : ere u = asso * as 4 : an 2 eo ma See ee He et a De ee ; i WAL ey iovs,, BaF S 4 > I. +7 free els Bee - i aa b Bh rev op U woh ous y ‘ 382 |¢g IE Z 8/5 ‘BTR Pe ee l [oy Sak ||? a oe 2 jest = é. wre Goa i: cur a SC) tam gto] SE 13] bet ist ih ar | be weo8t | ele het + ere ore tf res 1 Spy open thy a mp ria ot LP ber exo = z sree ars wh | THofarer — > Pp a carps) st a2 laa : waa ae B(x ae #4] g (a aie eo {3/48 g la wens flan er "0 9. SBC (1/2) cr Ste a “fe 7 Ba a 7 be} a osMhe wae. | z q | 2lplp aa FERRER REESE oe Poe bioEDLZAH ane Be ue axe, eon) Kona) ' 1" ain xine BE jrews BE ce, 8 fis [8 z TRESS ke] fe | & marr | ie ie ie aH as [Sa Ee Ri A g & cas TBA ee 5990900 2 asie| a wal ale Py mA] — oe aaa S > SSREREEI Cen SLrry | i | pon ais pene oe a Coes 9. SBC (22) Hees TSE SRI OPEN Rg PAL: Rt 10K ezLaal wlibokbl "oe, . su © | exprarcn EB FR [an Te pee en E | SF i g 1 dod fede] TTT ages pee el LL 7 j ye ye wapeprye ree SN? ye ben i Seo Te Ale [Tp fseotanse Colyer of fear see7 "she Oe Sd Py Eley 2] aaa i aL seine TF RG3 $e a] xeve| ¢. oft S|V Vi Mea Bey ee El her I gly se re ae Fal xa SPFees Q {ol oree.y & Or ¥. TORT cn le2s eee ws Jeo as 45 sur IE ese 13438 aa fi Ss, sean es 3s 7 i 2 A ae 38 as "ee 7 a ae eo, 3 gt Bice oe : i n Ie zi a “Bo Fhe “pr gro Bh Bas ee | Se ee ao BE an spclot ad ay fona? vy saculo} aa i” O.SMibe—to |e2u a Done? , pe far 0 P2 S| 2c 1) le y to is oe % 7 ore 2) BP a ww aa we Egtolazcr SEE lees or EE cele, os 10. CONT 1 (1/2) we eee % mp ea lz So, “> ig 35 2 2] 20800) ener yr SY Hee “hve peel Sue xewit BEE SEF oun F ces colt BBE Rann cee, Sfiooshe | ah ven ak oi Le a A ed Or! ee at sm tee srk peetidega, e rene, rm ae heal + som ae — * 2 Feu 2h sept scofpeer | rr fae cow [OTL " TGs] SEY / He Is ae [He Jbl ; gh ! : ave | pay PS. Lo lst el[efef Sol, Ge Se o> wane al al 2Lbf ld ol : % kanal 2 | ree? 63BrO 2&ed, AT | : 7 ea # _—4 PERRET on07 wl ana? TFs peels as BY aces fae a a EEF ute 2h [fesetareme dena ort aa 10. CONT 1 (272) 88 S$ 2 CN) zavaeezs geesssey 2bessZey cus 999999 9999900 ¢ oy z a} [pgp ky Fe aus zeri fi Mgjzcer fe we Fas HN, | Pan 467 TTR "eat AGHA = Siceia ICFs. pact C42 e337 |v ey cs37u Tess plicz ausse bu PTY 1 olelelelsL dae fo rege 24s WME2256 5 TE zl ie altel 2} Doe md e848 Eee beccer: fey oo Eee Udet sese “of re.bie 7 TEE sew OL LoA.bie xc Hee smetk 2p 18/66 ewhiS, rree2p 4516 seu is = a cone pti Boo Ee ry + mE lh Sap css” pe rar of tam te bs Ee a Ti eek: og az 4 ree TD Ics? p® "lta be See ren 11. CONT 2 28 Aisne - Rocio og Fi {oz PRE. oe HEL BCE rane | FS 3635 p2uy Ty | | ==a4 | TES pews t aebaaaa ped etme fee | TRS [ae me FS EER 1 FTES . a | EEA ¢ : Ls} rons swvecsvee 5 — Has, ake ay my BY ibe Hmezaiee bee i—# Ee Ee ay a || aa as is i & (— lalate! we _ 2 , Bd aah ski sew poe Tp 1eM papy 2 cppee Ea ES TAS Ba ele THE pew TEAS rape eng ASE 8 ST TH some poe cory ee ree M6 pany beet “ee 0-CRT HO \Ok R¢.B}-——+ P-cRT HT HU “TRANS: (5A WATER / AIR OK | WA ODER HEAT 138 WARM UP A 4 SENCE Wh 01 SENCE Re coMP, 74 09 6A Vb AciooT, SA vs EARTH a ve 3A aR 1a vt HEATER| szyy CNIS L Bw over THERMO { vs i Re 2 ve CNID6 1 UT OPEN 2 2 Vi OPEN « N07 AIR WATER 16, EVAC Rag, ict FERN 367 + nie, t 2] 101 Rnb ql £8 oi +107 0% Ru wl - set REY oy oe peg hOB Sy ee y cnr, aie srt Joe 1 ]oF | ar eo, a Ps Ed mie Te Geo! «De # rat RS 3: = Ris Ho 5 jew Terr [cz |recopay RZ me) [F™ | feria RB, \00k: £ RS DON Fok Fi, 7S, 5 @ ae tet w - ae = 2 ser vo =] al Tl Talore ENTSSION 7 2 wie d Feo teens Sh, 2 ee BY aT Die Oe ez 24 or *Bhy Sars le oo ee 8] ae Ry Re pir e actin re T 1 oo! Roig wot oe eke aes 7 ae Ga A Ke Be ie yoyo s 3 | FIL, A u fz, frm E corr. E fa — 5 6 fea] | [ew fe i Reon] Sf 1 | Re ole cee | : i & es ae Hz HUT RC.B Com FILLED *# SD e 7 a (ai GUN ~ Blas me AS emg 487 Be eer yy ES are se 3g [ay 3, ca Ete meme Sf ‘ |~ ve Ee? ceo, 34k phe 1 Mv oat 3 ree a3 si ( mas ou ' mis ni i ay on 2vER 2 | Bereny ae] wre ' = HEL! ae a ate [™ ak : res oS P we Reavy as +t er i . f fen ae + lcweo VU oe oA Ste HOA ae de ay Ir sey : oh ee ec poo Be I UPS cnet +67 Ge a Ss, Tia | Bee “a rear We a oa z 7 Fron z FILTER A og F es ; R ww F~ abr ° ting Tex Ru 3th 220ee. ' sf ron R66 m Ys nse ce hen, TE, He "6. Tue des or cleo os | oh 5 : FE Tel sree Ney om on Ih ‘s te | me Cc Ee e : ous Y NG 1OkP.C.B “ee cs 28. oc > eno (ee ~ ner ame ee iz 3” tes cu e wep, sh Rp eim 284 17. Hv 12ND @9zH : a on sflomy :2a “00 pues 121 oid Vaud Lo. ((##9ho 1804) MS ane 1xd-d L49-A AH AS0d 9 > ap op 92 8 ND 22-91A? Md~ ba (Ayn) dookn +19 ~ 6? 18. 10KV 19. NVC Wee wre Wee ieee 7 Ne & 20. SE AMP zeo—fo}—t can ma) ve % t 0 % >e J yore! zy pe woee ! pares Livery As % pend 76.048: 2a'14 a A aap J jel —— fort 6) 78 a) And —— De : + A hogy Yor ano 2/4} : us Jee fis za 7 F STS DIbNI 70°24 | do, _| age ; 44, : re | eae aT 3a : Bs 1A sr Ft 2d 45-9 : 51 ane Lo t ast 8 - asie ssamnorig 5 z aoen> ad 21. BSE AMP lpRoTO. UNIT WETGAT EARTH DISPLAY OLIN CASE, 22. GROUND WIRING DIAGRAM ewnox W190 nna coreny Di om tdaen de x worisos dore~o 203 370 Aven ssamanoeye © wesemns— 0, ae 6 MOE 37018 Cevie x14) t70 93018 4709 9 47 49018 o10%8 2 aveue 4 2193 sll 23, X-RAY MODE "ec 0512-5 “he s00n2-8 eva. Lisad x + Baa Land Laws x: 2ela Petisad & : 1a AINE: sas % Tae + te an ee aoeeae 24, DUAL MAG X-IN 7 & ba Dz Dt Do et AGO ws at los Ee. 6 Rk 6 [+cos H} la Your a8. 87 the eo mee a ie z ee = fae 30 vz aa an] 86 As au are are ei e7 1678 323 |, lee. at |o- 25. RASTER ROTATION P-cRTCHN>———t val ca MAIN(A) Actor a By oY Tease PHOTO GND ent cn2 15 exo) fewa] in) B&88 e996 5)f ext 26. PHOTO UNIT etic tayg~ono. sel ~ 891 “ f as gs uy ea o at isu ele ay et] of $88 $34) xox asic 2191 wT wen LE ay 2 Fi at iat ye fe aby ¥ ost awe te | ht i wwe Al fat x ' In i ole X ol? ; ¥ Loft ae ilo 28 bs Eve ist 4 waivan oe 4 waivan p> et aut ye AOL SBA~2NA ana ye g0lss! 9td-eld ue | 4 " i ve wenteue OF] BS a "h ud est] Tw, ¥ vane oa , | asace| ol vozel, ed sai Sa + aeep | a yd m1 i ‘i Hol: alm tole wt om fea | | fa apa Te a al] a aol Hye of i sopnaget ae Si Tae ane Wei ea ze 10 ! a [5] aeiony 1 ws 82 Toor ae ela si4x1-HS! ga~ia aefigoro:2ia~so HP ox L. an 26-1 HR ne cx206 ch206 cNZ205, i vrz| 2nd out 10] © ci > 1 Pak 5-2500 ee 3° ase I Is2300 ale 100K ' oo 10 Be sue Ri tl ott yet 6 fo. ERE LO t 1 $2500 12 wei SP nas® p28" 18-2300 ez, CN3,cH206 ih 06006 6 tO |? "Ole TO |23 | 8 6] of aut to |17 a 7 +O |i6 2} oo FO [it (CN205. cN207, CNL 26-2 HR-TM 26-3 HR-VA

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