URBATIAMEESS Vol.17 No.6 2008. 12, Transactions of the Korean Society of Machine Tool Engineers FELINE lS ARs a oa", aaa’, 2 S STE AA BA AT ze CEEAEA 2008. 7. 7, JAE 2008. 10. 21) Design of Ultrasonic Vibration Tool Horn for Micromachining Using FEM Bong-Gu Lee*, Kwang-Lae Kim’, Kang Eun Kim’* Abstract ALAN), Modal analysis( 53] Conical horn is used in many high frequency ultrasonic homs, to achieve a longitudinal vibration mode across a wide ultrasonic tool hom output surface. Modal analysis is method for designing tuned ultrasonic tool hom and for the prediction natural frequency of ultrasonic tool hom vibration mode. The design of ultrasonic hom is based on prototype estimate obtained by FEM analysis. The FEM simulated ultrasonic tool hom is built and characterized experimentally through laser vibrometer and electrical impedance analysis. In this paper, FEM analysis is developed to predict the natural frequency of ultrasonic tool hom and use of in the optimal design of ultrasonic horn shape. ‘Key Words ; ultrasonic machining -22}75%), Resonant Frequency 4173445), Tool hom(-Z"), Amplitude <15), FEMCH TE LAB ASAD Geel Maat od AS] LAL, aL wabh aasldd WEN YE, U4 Bas ae AQ aul DAS, WHY, WIS 24h aa A AG Ae ART AAs), ols} veo] VARA Ve WAM AB 7HB1eS) Ae] als) RFS] get a BPH] HBame Aes UE Atal + alditist 714 F}2} (grimbec@yonsei.ac.ir) 120-749 N@N) AdEH AEE 134 + adae aagat +e Caaledte 63 Ab ARR Alet|(Ceramic), pate glass), Hela Wafery$o] ch. lye ARES Awe stead NEEL 2h54, Bb, A SEN, gst os i AS, D753 tASolet. Usa ASS] BH AFA BARS AbBtOL AS WHA Weeprs22 HPI fee EMO] a 7) MEO OVS AR 7H AolAl THB, LEWES, AS, BA SS] GARE Sete iel ee01s? - aaa - ae EH. Te lel 7EWSS 2 BA] Sol opp BE ARO] ASS]2] ROK Aa SS Hs ES igs} ate) Be) Basch: a]Is 74D Me A Belch. 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ALG SEEN AOh lel DHS ASS FEM Bays Sqa 23 us Be ga B49 US REVISE HebArvg] REINS Boia} ASSL AA ASS AE BTR Vl 48 Be NES Bate 2.1 BU B(Conical horn) 4a Wile Ase Ae Beh: BUS a 7A Ae] 2 APA: AMIS AC. 1S Bah ARSE ME BUS Bo] SSRIs Aols Fake AS hs 3 -BA Fig. 334 Zo} Welstol] 742\7} xa] gel cha BS, $9] Young Al Ee} 3}9i, 12491 she de Qvia ach atu a. oe 05, es BES) @ Input Fig. 3 Design of Conical hom 65 SO ps US us we A S olgatel che) Aah 2, 3) oe Fig. 33) #0] BUS Y £9] SAGES BALA Ish OF xO} x=LolA} GEO] “O° S]7] uM om ear=1o Rao & oleate}, $4] ZANS ole} ule yale] let. whe(D, ~ DP FD DF HDD, tana = @) tama = @ Ay (S\7} MA. 9] 9} Zo] E S| ig Be ea y Basal} galale Boyce] Faye. UZ £9] YAS AAD))e 20mm, ext] 4B (Dj 10mmS E44 LEIS ASA] Ze} do] F 85mmz £9 ASS VPslaeh. EY IS 2S Fig. 4 FEM model of Conical homO18? ava: Be Bt FEI} 1BSHS $AFCongitudinaly'= 9} $2 Ap Sol SEM, SSSI Nal AVE BATS FEI HY so] Fig. 44 Yep y si} 2s Buz Bo] AG BEL OAH Bale Set OA) ad So] Walol Bt. 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Taj B AF] BH Sob 7B] 2] MAI7}ofA] o}s}t= 7}x) An} 30kHizz DASTO| 9) EL BFE De 2a SAS 30kH22 $3 (tuning)d}oF Ich. 2.3 FEMOH O1St Te THE+ si £9] BUa] SPE Yael) he sal Sey ays Ee SUSI ABLES] Me} Spl etsfol & 25} ASS Be Ho] Teast Meh. oles £9) VS Fig. 2(@)2} 0} BIE] SAY 4 aIch aS] 0} ehgafor eich. 24 Bo} 1b as weal Aloy Sjalo} BAG Zo) 4} ele] 21aD)-20mm, S822) 44(D}-10mm, £2) Uol= SSmm)z LNBs 9} MA E9) SAF Longitudina 2E2} TE WES FEM A4S S2ol ASAD, SE FFL] Basel Aga FEM HAO AGE LAS Ej BIFoF Z Aas] ee S04 sale ade Bol det ae QE} ANSYSS| BAAS] BoE Fig. Sol EHS PURASY Ua DERE Sete] Sy wg 7 | Say HeRs AS el D+ alae. chebay ees Ff BAF2] Bo] c| SHE AS T+ Yer} S47 AY AAS} UI} gle} FEM a4] 23} Suh Zo] SAA] HH Hloady} Bele] AE SIS mel Balch ately aad HE Bebo 2} Bao whe} Lo} S t+ asic. SERA ANA) ASS FEM Bao} Element type solid 1863 A143}4} solid the] = 4-g-a}o] Alajo] Bap “Mechanical properties Table 2 Natural frequency in 20~40kHz range(without . too) Material Poisson's at) ee ratio No | Natural ffequency(H2) | Vibration mode THanium Ista) 30,341 Transverse (Ti6Ai4V) “et 2nd-{b) 30,938 ‘Aluminium oo 3rd0) 33,382 Longitudinal 7075) ahd) 33,384RBA LA Vol.17 No.6 2008. 12. 7 BA Bel VIBhol HAsho] TR WEES 3 AF NLS} sch. so} ALG solid MA free meshs 1gs}o} AA wabsfo} ah44gb Az}4t0] Table 2eH eh WALA] Fol2]% 7h) Ah} 30kHz O}7] HEA SLR 14 SAM Flt: 20-4OkH Ze Bf} St PASTS HAC. ABI 124 1G BEE al a 30kHz4] U7}8 Ou, AEHE BAIS] v|atzsh 1 A BEE SHE SAO VA Ftransverse) EF} Bole] Sah shales F UE VRS vA jue $a FRE} MAE She AY SS 2S} HIS AU] Ges ot + Nach sepa 2a} Beal SAE BES AM] SSS Assia. Fig. 6% 444) 2Ut FHS Sesto oye S STV TFS HI Ale Aa) 2oah AE ABA SFES BATH URAGHA ASHES F AA BAG AHS Yep. elg}zto] Bree] Se Pol FP] Ble so} FPS] ARS Ho] F FE WS BS THEY DRAG} ASRERAO] oa & A (©) Mode 3: 33,3824 67 HS BS ele H slaket BGu} wdalsEo) AH Fel BRAN G2 SG UA Ah BP We BFA) BAAS 30938 Kei BLE] Seidel aHALso] esas, Bet BAY BLES ABLEL BIS) Estol Asse] goto] AY 7719] SAS BE AN BE ay SABRE 4 SIsIeD. Saat 30,704 7AM oo age AREAS SF ste we AEECY 4&4 B79] Ewe Aamo] Waste Sas BEE ‘Table 3 Natural frequency in 20-40kHz range(with tool) ‘No | Natural frequency(H12) | Vibration mode Ise(a) 29,988 Transverse 2n(b) 30,704 Longitudinal 3rd 31,967 “9 Lateral ahd) 32,059 (@) Mode 4: 33,384H Fig. 5 Vibration mode shape for conical hom without toolols Baal ae (@) Mode Fig. 6 Vibration mode shape for conical hom with tool Impasanee analyzar TH a191A} . Pac | ae /. Fig. 7 Measurement system for electrical impedance and phase analyzer B28 OAV 7 ARE ABRETHTS a 4 She}. FEM a4} S2}oj 22 SHES Fig 73 Ze] Q1sIeLAfimpedance) 2418 Gate} qsfeaz 23 Aisi. alate SAtransducer), IE, Bt 68 Fig, 8 Hectrical impedance and phase angle as function of frequeney for the ultrasonic conical hom ES BF AA ASA Aas] MEAS Saataiet. SABO AGS elapele: S47 HPAIOHA ALES Ab Selo Ate a4 SSE 20~40kHz. BAYS Sade oa sin, FFE) Maoh GFeRea intel! 'E Vol17 No.6 2008. 12 ret) Fig, 9 measurement system for ultrasonic vibration properties i Fig. 10 Vibration properties of the ultrasonic hom BoA] 2 Ao} Fish espa ¥ al ach. ole & FEM 2 a4 FALL 30,000Hz2) A qag aa a2 Fig, 82} Zep to} AL DURE EO] esha BE aslo] 7t PBA Set. 6} ah | #3 ¢7 30KHz e¢ a a}+27b 30kHZ7} QT eRo}s| AES) 39 HoH ANS. 500 3 Htate 7A E+ SIA Slo} 371 aiBoleh 1 el 04 ESF INES 7 A) 8134} Laser vibromet Habach Fig, 92 £20} Zo] $ ale AAG Akzo ysl} et ig. 100% Uehulgie} SPASM 3oktIZ 7H41 Fakes uh SFE] VES] Se} oA] Sale SE 4a)47) 3.28 apa ep SPH OL She 283 71 also} 17} ERAS 18 POET Bal Aah 30ktHz9] B71 BRE AAA sol SHES) aA aut £8 Aaa. S4)% FEM 4 Ege Wd BAS) aaa AMIS Sepa. EWS Zea ASH: BEWARE L2H] $A ai 219) Alo) wg So] ABRE YE asigieh. So] Tz aah 2g A skch. SHE Aa so44| FEM 344 SH-YoH ARE SA ASHE 30,704KH9} azro| whl eal Fah 1 30kHz9] 2zSHE AOE Mo} ZO] AA) OS 2.3% ohHS LAD} aH, SHES) ala 9! Ato 78h Che AS a+ asic a4 all Agree # aay helio] 2} ypDTeH (1) Amin, S. G., M. 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