SMC Brochlr

Partners in plastics !
High Purity Fluorpolymer Komponenten

W
EU
NI
Strategic Alliance
between SMC and Profilplast
In order to support our customer needs in offering a one-stop-shopping
solution for engineered plastic products with unprecedented services the
companies Profilplast and SMC are pleased to inform our most valued
customers that we have formed a sales and marketing alliance for PFA
products. This agreement joins SMC as the innovation leader in PFA and
Profilplast as the market supplier in fluid handling systems for micro-elec-
tronics, biotechnology, pharmaceutical and chemical processing indus-
tries.
For further information please contact info@profilplast.nl

SMC is pursuing customer satisfaction worldwide and supporting
automation, through the most advanced pneumatic technology.
The 21st century – with revolution in global IT, Information Technology, business methods are undergoing
great changes. In these quickly developing ever changing times, customer satisfaction can only be
achieved by a clear understanding of our customers goals and objectives. Therefore, SMC has built an
organization that listens carefully to our customers and responds quickly and specifically to their needs.
SMC has established a widspread global network of locations in all major countries of America, Europe
and Asia showing our active commitment to the world market. SMC supports this global network with a
stable supply chain of global products, a high level of technical service and solid communication network
to meet our customers needs and expectations.
Technical
Development
Our engineering staff now exceed 1,200 and is
located in Technical centres in Japan,
United States and Europe.
Sales and Production and

Communication Supply
Network Our product line offers 11,000 basic models
with over 610,000 variations. Global production
With 260 sales offices in 67 countries worldwide,
facilities provide a stable supply of products
our sales force of over 5,300 maintains close
to customers in all markets.
communications with customers.
Features 1
PFA Tubing PFA Fittings PFA Valves
TL/TIL LQ3 Series LVQ Series
from 1/8” to 1” from 1/8” to 1” from 1/4” to 1”

Dimension
from 4 mm to 19 mm (other dimensions on request) (other dimensions on request)
(other dimensions on request)
Pressure Rating from –98 KPa (–0.98 bar) from –98 KPa (–0.98 bar) LVQ 20 to 40: from –98KPa
to 1.0 MPa (10 bar) to 1.0 MPa (10 bar) (–0.98 bar) to 0.5MPa (5 bar)
LVQ 50 to 60: from –98KPa
(–0.98 bar) to 0.4 MPa (4 bar)
Temperature Rating from 0 to 260 °C Nut PFA: from 0 to 200 °C fluid Temperature: from 0 to 180 °C
ambient Temperature: from 0 to 60 °C
Production Extrusion: Produced under Injection Molding: Produced and Injection Molding: Produced and
clean room class 10.000 (U.S. Fed. assembled under clean room class assembled under clean room class
Std. 209E) conditions 10.000 (U.S. Fed. Std. 209E) 10.000 (U.S. Fed. Std. 209E)
conditions or better conditions or better
Surface Finish Ra max ⬉ 0.2 ␮m In conformity with SEMI F57 In conformity with SEMI F57
(as a guaranteed value) Ra max ⬉ 0.38 ␮m Ra max ⬉ 0.38 ␮m
Ra = 0.04 ␮m*
(typical representative value)
* not guaranteed
Marking Tube laser marked during Die – sinking Die – sinking

the production process to ensure full Size and Lot Number Size and Lot Number
traceability
Brand Name (PFA)
Lot Number
Material, Dimension,
Pressure Rating
Labeling Brand Name (PFA) Brand Name (PFA) Brand Name (PFA)
Product Description (PFA Tube) Product Description (PFA Fitting) Product Description (PFA Valve)
Model Number (e.g. TIL-xx) Model Number (e.g. LQ3-xx) Model Number (e.g. LVQ-xx)
Material (DuPont 451 HP-J) Material (DuPont 440 HP-J) Material (DuPont 440 HP-J)
Lot Number Lot Number Lot Number
Length Dimension Dimension
Testing and Inspection Visual Inspection Visual Inspection Visual Inspection

Dimensional Inspection Dimensional Inspection Dimensional Inspection
Pressure Testing Pressure Testing Operation Inspection
Surface Finish Surface Finish Valve Leakage Testing
Periodic Leach-out per Periodic Leach-out per Back Pressure Leakage Testing
Semi F40/F57 Semi F40/F57 Pilot Pressure Leakage Testing
Inclusions Inclusions External Leakage Testing
Inclusions
Approvals / Conformance FDA 21 CFR 177.1550 ( as a material) FDA 21 CFR 177.1550 (as a material) FDA 21 CFR 177.1550 (as a material)
Flammability UL-94 V-0 SEMI F57 (Conformity) SEMI F57 (Conformity)
SEMI F57 (Conformity)
Documentation (1) Certificate of Conformance with FDA Certificate of Conformance with FDA Certificate of Conformance with FDA
EN 10204 2.2 EN 10204 2.2 EN 10204 2.2
EN 10204 3.1 EN 10204 3.1 EN 10204 3.1
Packing Tube capped and double bagged in Each Fitting double bagged in a Each Valve double bagged in a
a specified inner and outer bag under specified inner and outer bag under specified inner and outer bag under
cleanroom class cleanroom class cleanroom class
10.000 (U.S. Fed. Std. 209E) 10.000 (U.S. Fed. Std. 209E) 10.000 (U.S. Fed. Std. 209E)
conditions conditions conditions
Main Applications Fluid compatibility: Inert gas, DI Water, Chemical fluids according to chemical resistance data sheet
(1)
on Request
Features 2
High Purity Fluoropolymer Fittings
Flare Type
Flare type
collet
construction
Triple-seal
Ease of
Excellent installation
heat
resistance
200°C
compatible Excellent
flow-through
character-
istics
Model LQ310 LQ320 LQ330 LQ340 LQ350 LQ360

Feature
Material 440 HP-J
Maximum operating pressure (at 20°C) 1.0 MPa
Operating Nut material PVDF 0 to 150°C

temperature Nut material PFA 0 to 200°C
Applicable Metric ø3 to ø25
tubing size Inch 1/8 to 1
1
Why SMC Flare Type Is Better Solution
1. No special tools — Whether hot or cold Flare, use your existing Flare assembly tools.
2. Greater swept flow characteristics than standard Flare — Achieved by the

radius you see added to the end of the pipe nipple.
3. Unique collet design offers more robust connection, producing 3X~5X

performance for temperature, pressure, side-load, and tensile load
4. No gap means no guesswork — Bottom the nut against the body by hand-tightening,
producing a highly repeatable connection. Design your valve-sticks with +/-- 1mm distance
tolerance along a 24” span.
5. Acme thread means no cross-threading — Fine pitch threads eliminated.
6. Molded “Spring-lock” at base of compression nut combined with tapered

surfaces inside compression nut eliminate cold-flow issues
7. PFA Compression Nuts Standard
8. Heat resistant up to 200 °C
2
Triple-Seal Construction
B
C
Seal 1
Seal 2
Seal 3
Seal 3
Tube support Trapezoidal thread

Provides additional strength Collet
Prevents the nut from loosening
against possible tube bending at a high tightening torque, and
or deformation from installing in a tilted position.
A Corrugated tube
retainer
shape
Nut
Body
The nut has corrugated tube retainer shape that is made
from a two-stage structure, enabling it to hold the tube firmly.
The fitting's sealing surface with the tubing adopts a unique
Seal surface design to increase the surface pressure, resulting in
Tubing
improved sealing performance.
B Protrusion
Collet
Improving the prevention of tube release by means of a
collet structure.
Body The sealing performance is maintained with a
circumferential seal surface having a unique shape, even
Tubing Seal surface
under thermal stress conditions.
C Clearance for
extra
tightening
To establish the correct tightening position, a torque gauge
is not required as the nut is designed to be tightened up
until the end surface of the fitting’s main body.
Nut Body
Seal surface
3
Fitting / Flare Type
Series LQ3
Specifications
Model LQ310 LQ320 LQ330 LQ340 LQ350 LQ360

Feature
Material New PFA
Maximum operating
1.0 MPa
pressure (at 20°C)
Refer to the withstand pressure and heat resistance
Proof pressure
performance data.
Operating Nut material PVDF 0 to 150°C

temperature Nut material PFA 0 to 200°C
Withstand Pressure and Heat Resistance Performance
4.0
3.5
3.0
Pressure (MPa)
2.5
2.0
1.5
1.0
0.5
0 20 40 60 80 100 120 140 160 180 200

Temperature (°C)
1/8", ø3, 1/4", ø4, ø6 tubings 3/8", ø8, ø10 tubings

1/2", ø12 tubings 3/4", ø19, 1", ø25 tubings
4
Series LQ3
Tubing O.D.
Port size
Series Appearance Size Metric size Inch size
None1/8" 1/4" 3/8" 1/2" 3/4" 1" ø3 ø4 ø6 ø8 ø10 ø12 ø19 ø25 1/8" 1/4" 3/8" 1/2" 3/4" 1"
1
2
3
Male
4
5
Connector
6
LQ3H 1
2
3
Female
4
5
6
1
2
3
Male
4
5
Elbow 6
LQ3L 1
2
3
Female
4
5
6
1
2
3
Male N
4
5
Branch tee 6
LQ3B 1
2
3
Female N
4
5
6
1
2
3
Male
4
5
Run tee 6
LQ3R 1
2
3
Female
4
5
6
1
Union elbow 2
3
LQ3E 4
5
1
2
Union tee
3
LQ3T 4
5
6
1
2
Panel mount union
3
LQ3P 4
5
6
1
2
Union
3
LQ3U 4
5
6
5
+LJK3XULW\)OXRURSRO\PHU)LWWLQJV
+\SHU)LWWLQJ)ODUH7\SH Series LQ3
Tubing O.D.
ø3 ø4 ø6 ø8 ø10 ø12 ø19 ø25 1/8" 1/4" 3/8" 1/2" 3/4" 1"
1
2
Union reducing
3
LQ3U-R : A side : B side
4
5
6
: A side
1
Union elbow 2
reducing 3
4
LQ3E-R : B side 5
6
1
: B side
Union tee 2
reducing 3
4
LQ3T-R : A side : C side
5
6
Note) : A side tubing O.D. : B side tubing O.D. : C side tubing O.D.
Tubing O.D.
ø3 ø4 ø6 ø8 ø10 ø12 ø19 ø25 1/8" 1/4" 3/8" 1/2" 3/4" 1"
2
Space saving
3
union elbow
4
LQ3E-S 5
6
2
Space saving
3
branch tee
4
LQ3T-SB 5
6
2
Space saving
3
run tee
4
LQ3T-SR 5
6
2
Tube extension
3
straight connector
4
LQ3H-T 5
6
Tubing O.D.
ø3 ø4 ø6 ø8 ø10 ø12 ø19 ø25 1/8" 1/4" 3/8" 1/2" 3/4" 1"
1
2
Blanking plug
3
LQ3-P-1 4
5
6
1
2
Tubing plug
3
LQ3-P-2 4
5
6
1
2
Nut
3
LQ3-N 4
5
6
6
Series LQ3
How to Order
Threaded
connection
LQ3 H 11 M
Nut material, packaging
Symbol Nut material Packaging
Fitting type
- PFA Clean packaging equivalent to Class M3.5
Symbol Type
1 PFA Standard packaging equivalent to Class M5.5
H Connector
2 PVDF Clean packaging equivalent to Class M3.5
L Elbow
3 PVDF Standard packaging equivalent to Class M5.5
B Branch tee
R Run tee
Thread type
Symbol Type
- R, Rc
N NPT
Piping type
Symbol Type
M Male
F Female
Size combination
Size No. Applicable tubing size (mm) Port size Size Symbol Applicable tubing size (inch) Port size
1 1 4x3 1 A 1/8" x 0.086" 1/8"
1/8"
1 2 3x2 2 A 1/8"
1/4" x 5/32"
2 1 1/8" 2 B 1/4"
6x4
2 2 1/4" 3 A 1/8"
3 1 10 x 8 3 B 3/8" x 1/4" 1/4"
1/8"
3 2 8x6 3 C 3/8"
3 3 10 x 8 4 A 1/4"
1/4"
3 4 8x6 4 B 1/2" x 3/8" 3/8"
3 5 10 x 8 4 C 1/2"
3/8"
3 6 8x6 5 A 3/8"
4 1 1/4" 5 B 3/4" x 5/8" 1/2"
4 2 12 x 10 3/8" 5 C 3/4"
4 3 1/2" 6 A 1/2"
5 1 3/8" 6 B 1" x 7/8" 3/4"
5 2 19 x 16 1/2" 6 C 1"
5 3 3/4"
6 1 1/2"
6 2 25 x 22 3/4"
6 3 1"
7
How to Order
Tubing
connection
LQ3 E 11
Fitting type Nut material, packaging
Symbol Type Symbol Nut material Packaging
E Union elbow - PFA Clean packaging equivalent to Class M3.5
T Union tee 1 PFA Standard packaging equivalent to Class M5.5
P Panel mount union 2 PVDF Clean packaging equivalent to Class M3.5
U Union 3 PVDF Standard packaging equivalent to Class M5.5
Size combination
Size No. Applicable tubing size (mm) Size Symbol Applicable tubing size (inch)
1 1 4x3 1 A 1/8" x 0.086"
1 2 3x2 2 A 1/4" x 5/32"
2 1 6x4 3 A 3/8" x 1/4"
3 1 10 x 8 4 A 1/2" x 3/8"
3 2 8x6 5 A 3/4" x 5/8"
4 1 12 x 10 6 A 1" x 7/8"
5 1 19 x 16
6 1 25 x 22
8
Series LQ3
Dimensions
Male connector: LQ3H-M
L,L’ Metric Size

H (A,A’)
Applicable Connection
W
Model tubing threads A A’ E E’ H L L’ M W
øM O.D. R/NPT
LQ3H11-M ø4
1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10
LQ3H12-M ø3
Port size (E,E’) LQ3H21-M 1/8" 39.5 38.5
ø6 17 16 16 43.5 42.5 20 14
R (NPT) LQ3H22-M 1/4" 37.5 36.5
LQ3H31-M ø10
1/8" 51 48
LQ3H32-M ø8
LQ3H33-M ø10
(A,A’): Reference dimension after 1/4" 49 46 22.5 19.5 21 55 52 25 18
LQ3H34-M ø8
installation. LQ3H35-M ø10
(E,E’): Reference dimension for the inserted 3/8" 48.5 45.5
tubing from the end surface of the nut. LQ3H36-M ø8
(A’),L’,E’: Nut material PVDF dimensions. LQ3H41-M 1/4" 58 56
W: Width across flats dimension. LQ3H42-M ø12 3/8" 57.5 55.5 24 22 24 64 62 29 22
LQ3H43-M 1/2" 56 54
LQ3H51-M 3/8" 69.5 67
LQ3H52-M ø19 1/2" 68 65.5 26.5 24 32 76 73.5 37 30
LQ3H53-M 3/4" 66.5 64
LQ3H61-M 1/2" 80 76
LQ3H62-M ø25 3/4" 78.5 74.5 30 26 41 88 84 49 36
LQ3H63-M 1" 77.5 73.5
Inch Size
Model tubing threads A A’ E E’ H L L’ M W
O.D. R/NPT
LQ3H1A-M 1/8" 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10
LQ3H2A-M 1/8" 39.5 38.5
1/4" 17 16 16 43.5 42.5 20 14
LQ3H2B-M 1/4" 37.5 36.5
LQ3H3A-M 1/8" 51 48
LQ3H3B-M 3/8" 1/4" 49 46 22.5 19.5 21 55 52 25 18
LQ3H3C-M 3/8" 48.5 45.5
LQ3H4A-M 1/4" 58 56
LQ3H4B-M 1/2" 3/8" 57.5 55.5 24.5 22.5 24 64 62 29 22
LQ3H4C-M 1/2" 56 54
LQ3H5A-M 3/8" 69.5 67
LQ3H5B-M 3/4" 1/2" 68 65.5 26.5 24 32 76 73.5 37 30
LQ3H5C-M 3/4" 66.5 64
LQ3H6A-M 1/2" 80 76
LQ3H6B-M 1" 3/4" 78.5 74.5 30 26 41 88 84 49 36
LQ3H6C-M 1" 77.5 73.5
9
Dimensions
Female connector: LQ3H-F
Port size Metric Size

Rc (NPT)
L,L’ Applicable Connection
H Model tubing threads E E’ H L L’ M W Y
W O.D. Rc/NPT
øM LQ3H11-F ø4
1/8" 10 9 11 35 34 14 10 18.5
øY
LQ3H12-F ø3
LQ3H21-F 1/8" 40 39 18.5
ø6 17 16 16 20 14
(E,E’) LQ3H22-F 1/4" 45 44 21.5
LQ3H31-F ø10
1/8" 50.5 47.5 18.5
LQ3H32-F ø8
LQ3H33-F ø10
1/4" 22.5 19.5 21 55 52 25 18 21.5
LQ3H34-F ø8
(E,E’): Reference dimension for the inserted LQ3H35-F ø10
tubing from the end surface of the nut. 3/8" 55.5 52.5 25
LQ3H36-F ø8
(E’),L’: Nut material PVDF dimensions. LQ3H41-F 1/4" 55.5 53.5 21.5
W: Width across flats dimension.
LQ3H42-F ø12 3/8" 24 22 24 58 56 29 22 25
LQ3H43-F 1/2" 66 64 29.5
LQ3H51-F 3/8" 67 64.5 25
LQ3H52-F ø19 1/2" 26.5 24 32 72 69.5 37 30 29.5
LQ3H53-F 3/4" 73.5 71 36
LQ3H61-F 1/2" 81.5 77.5 29.5
LQ3H62-F ø25 3/4" 30 26 41 83 79 49 36 36
LQ3H63-F 1" 90.5 86.5 44.5
Inch Size
Model tubing threads E E’ H L L’ M W Y
O.D. Rc/NPT
LQ3H1A-F 1/8" 1/8" 10 9 11 35 34 14 10 18.5
LQ3H2A-F 1/8" 40 39 18.5
1/4" 17 16 16 20 14
LQ3H2B-F 1/4" 45 44 21.5
LQ3H3A-F 1/8" 50.5 47.5 18.5
LQ3H3B-F 3/8" 1/4" 22.5 19.5 21 55 52 25 18 21.5
LQ3H3C-F 3/8" 55.5 52.5 25
LQ3H4A-F 1/4" 55.5 53.5 21.5
LQ3H4B-F 1/2" 3/8" 24.5 22.5 24 58 56 29 22 25
LQ3H4C-F 1/2" 66 64 29.5
LQ3H5A-F 3/8" 67 64.5 25
LQ3H5B-F 3/4" 1/2" 26.5 24 32 72 69.5 37 30 29.5
LQ3H5C-F 3/4" 73.5 71 36
LQ3H6A-F 1/2" 81.5 77.5 29.5
LQ3H6B-F 1" 3/4" 30 26 41 83 79 49 36 36
LQ3H6C-F 1" 90.5 86.5 44.5
10
Series LQ3
Dimensions
Male elbow: LQ3L-M

R (NPT)
L1,L1’ Applicable Connection
Model tubing threads A E E’ H L1 L1’ L2 M
O.D. R/NPT
LQ3L11-M ø4
1/8" 12.5 10 9 11 26 25 16.5 14
L2
LQ3L12-M ø3
(A)
øM
LQ3L21-M 1/8" 18.5
ø6 17 16 16 33.5 32.5 22.5 20
LQ3L22-M 1/4" 16.5
LQ3L31-M ø10
H (E,E’) 1/8" 24
LQ3L32-M ø8
LQ3L33-M ø10
1/4" 22 22.5 19.5 21 46 43 28 25
LQ3L34-M ø8
LQ3L35-M ø10
3/8" 21.5
LQ3L36-M ø8
(A): Reference dimension after installation.
(E,E’): Reference dimension for the inserted LQ3L41-M 1/4" 27
tubing from the end surface of the nut. LQ3L42-M ø12 3/8" 26.5 24 22 24 54.5 52.5 33 29
(E’),L1’: Nut material PVDF dimensions. LQ3L43-M 1/2" 25
LQ3L51-M 3/8" 33.5
LQ3L52-M ø19 1/2" 32 26.5 24 32 64 61.5 40 37
LQ3L53-M 3/4" 30.5
LQ3L61-M 1/2" 38
LQ3L62-M ø25 3/4" 36.5 30 26 41 77 73 46 49
LQ3L63-M 1" 35.5
Inch Size
Model tubing threads A E E’ H L1 L1’ L2 M
O.D. R/NPT
LQ3L1A-M 1/8" 1/8" 12.5 10 9 11 26 25 16.5 14
LQ3L2A-M 1/8" 18.5
1/4" 17 16 16 33.5 32.5 22.5 20
LQ3L2B-M 1/4" 16.5
LQ3L3A-M 1/8" 24
LQ3L3B-M 3/8" 1/4" 22 22.5 19.5 21 46 43 28 25
LQ3L3C-M 3/8" 21.5
LQ3L4A-M 1/4" 27
LQ3L4B-M 1/2" 3/8" 26.5 24.5 22.5 24 54.5 52.5 33 29
LQ3L4C-M 1/2" 25
LQ3L5A-M 3/8" 33.5
LQ3L5B-M 3/4" 1/2" 32 26.5 24 32 64 61.5 40 37
LQ3L5C-M 3/4" 30.5
LQ3L6A-M 1/2" 38
LQ3L6B-M 1" 3/4" 36.5 30 26 41 77 73 46 49
LQ3L6C-M 1" 35.5
11
Dimensions
Female elbow: LQ3L-F
øY Metric Size
Port size
Rc (NPT) Applicable Connection
øB Model tubing threads B C E E’ H L1 L1’ L2 M Y
O.D. Rc/NPT
L2
øM
LQ3L11-F ø4
C
1/8" 3.5 4.8 10 9 11 28.5 27.5 19.5 14 18.5

LQ3L12-F ø3
LQ3L21-F 1/8" 20 18.5
H C (E,E’) ø6 4 6 17 16 16 34.5 33.5 20
LQ3L22-F 1/4" 22 21.5
L1,L1’
LQ3L31-F ø10
1/8" 23 18.5
LQ3L32-F ø8
LQ3L33-F ø10
1/4" 5 9 22.5 19.5 21 47.5 44.5 24 25 21.5
LQ3L34-F ø8
(E,E’): Reference dimension for the inserted LQ3L35-F ø10
tubing from the end surface of the nut. 3/8" 25.5 25
LQ3L36-F ø8
(E’),L1’: Nut material PVDF dimensions.
LQ3L41-F 1/4" 23.5 21.5
LQ3L42-F ø12 3/8" 6 10 24 22 24 52.5 50.5 26 29 25
LQ3L43-F 1/2" 30 29.5
LQ3L51-F 3/8" 30.5 25
LQ3L52-F ø19 1/2" 7 14 26.5 24 32 64 61.5 35.5 37 29.5
LQ3L53-F 3/4" 37 36
LQ3L61-F 1/2" 41 29.5
LQ3L62-F ø25 3/4" 8 18 30 26 41 78 74 42.5 49 36
LQ3L63-F 1" 46 44.5
Inch Size
Model tubing threads B C E E’ H L1 L1’ L2 M Y
O.D. Rc/NPT
LQ3L1A-F 1/8" 1/8" 3.5 4.8 10 9 11 28.5 27.5 19.5 14 18.5
LQ3L2A-F 1/8" 20 18.5
1/4" 4 6 17 16 16 34.5 33.5 20
LQ3L2B-F 1/4" 22 21.5
LQ3L3A-F 1/8" 23 18.5
LQ3L3B-F 3/8" 1/4" 5 9 22.5 19.5 21 47.5 44.5 24 25 21.5
LQ3L3C-F 3/8" 25.5 25
LQ3L4A-F 1/4" 23.5 21.5
LQ3L4B-F 1/2" 3/8" 6 10 24.5 22.5 24 52.5 50.5 26 29 25
LQ3L4C-F 1/2" 30 29.5
LQ3L5A-F 3/8" 30.5 25
LQ3L5B-F 3/4" 1/2" 7 14 26.5 24 32 64 61.5 35.5 37 29.5
LQ3L5C-F 3/4" 37 36
LQ3L6A-F 1/2" 41 29.5
LQ3L6B-F 1" 3/4" 8 18 30 26 41 78 74 42.5 49 36
LQ3L6C-F 1" 46 44.5
12
Series LQ3
Dimensions
Male branch tee: LQ3B-M

R (NPT)
2 x øB
Model tubing threads A B E E’ F G H L1 L1’ L2 M
L2
(A)
øM O.D. R/NPT
N
F
LQ3B11-M ø4
1/8" 15 3.5 10 9 4.8 9.5 11 28.5 27.5 19 14
LQ3B12-M ø3
H (E,E’) G (E,E’)
LQ3B21-M 1/8" 19.5 23.5
L1,L1’ L1,L1’ ø6 4 17 16 6 12 16 34.5 33.5 20
LQ3B22-M 1/4" 20.5 26.5
LQ3B31-M ø10
1/8" 22.5 26.5
LQ3B32-M ø8
LQ3B33-M ø10
(A): Reference dimension after installation. 1/4" 23.5 5 22.5 19.5 9 18 21 47.5 44.5 29.5 25
LQ3B34-M ø8
(E,E’): Reference dimension for the inserted
LQ3B35-M ø10
tubing from the end surface of the nut. 3/8" 24 30.5
E’,L1’: Nut material PVDF dimensions. LQ3B36-M ø8
LQ3B41-M 1/4" 27 33
LQ3B42-M ø12 3/8" 27.5 6 24 22 10 20 24 52.5 50.5 34 29
LQ3B43-M 1/2" 29 37
LQ3B51-M 3/8" 32.5 39
LQ3B52-M ø19 1/2" 34 7 26.5 24 14 28 32 64 61.5 42 37
LQ3B53-M 3/4" 34.5 44
LQ3B61-M 1/2" 42 50
LQ3B62-M ø25 3/4" 8 30 26 18 36 41 78 74 52 49
42.5
LQ3B63-M 1" 53
Inch Size
O.D. R/NPT
LQ3B1A-M 1/8" 1/8" 15 3.5 10 9 4.8 9.5 11 28.5 27.5 19 14
LQ3B2A-M 1/8" 19.5 23.5
1/4" 4 17 16 6 12 16 34.5 33.5 20
LQ3B2B-M 1/4" 20.5 26.5
LQ3B3A-M 1/8" 22.5 26.5
LQ3B3B-M 3/8" 1/4" 23.5 5 22.5 19.5 9 18 21 47.5 44.5 29.5 25
LQ3B3C-M 3/8" 24 30.5
LQ3B4A-M 1/4" 27 33
LQ3B4B-M 1/2" 3/8" 27.5 6 24.5 22.5 10 20 24 52.5 50.5 34 29
LQ3B4C-M 1/2" 29 37
LQ3B5A-M 3/8" 32.5 39
LQ3B5B-M 3/4" 1/2" 34 7 26.5 24 14 28 32 64 61.5 42 37
LQ3B5C-M 3/4" 34.5 44
LQ3B6A-M 1/2" 42 50
LQ3B6B-M 1" 3/4" 8 30 26 18 36 41 78 74 52 49
42.5
LQ3B6C-M 1" 53
13
Dimensions
Female branch tee: LQ3B-F
øY Port size Metric Size

Rc (NPT)
2 x øB
Model tubing threads B E E’ F G H L1 L1’ L2 M Y
L2
øM N O.D. Rc/NPT
F
LQ3B11-F ø4
1/8" 3.5 10 9 4.8 9.5 11 28.5 27.5 19.5 14 18.5
LQ3B12-F ø3
H (E,E’) G (E,E’)
L1,L1’ L1,L1’
LQ3B21-F 1/8" 20 18.5
ø6 4 17 16 6 12 16 34.5 33.5 20
LQ3B22-F 1/4" 22 21.5
LQ3B31-F ø10
1/8" 23 18.5
LQ3B32-F ø8
LQ3B33-F ø10
(E,E’): Reference dimension for the inserted 1/4" 5 22.5 19.5 9 18 21 47.5 44.5 24 25 21.5
tubing from the end surface of the nut. LQ3B34-F ø8
(E’),L1’: Nut material PVDF dimensions. LQ3B35-F ø10
3/8" 25.5 25
LQ3B36-F ø8
LQ3B41-F 1/4" 23.5 21.5
LQ3B42-F ø12 3/8" 6 24 22 10 20 24 52.5 50.5 26 29 25
LQ3B43-F 1/2" 30 29.5
LQ3B51-F 3/8" 30.5 25
LQ3B52-F ø19 1/2" 7 26.5 24 14 28 32 64 61.5 35.5 37 29.5
LQ3B53-F 3/4" 37 36
LQ3B61-F 1/2" 41 29.5
LQ3B62-F ø25 3/4" 8 30 26 18 36 41 78 74 42.5 49 36
LQ3B63-F 1" 46 44.5
Inch Size
O.D. Rc/NPT
LQ3B1A-F 1/8" 1/8" 3.5 10 9 4.8 9.5 11 28.5 27.5 19.5 14 18.5
LQ3B2A-F 1/8" 20 18.5
1/4" 4 17 16 6 12 16 34.5 33.5 20
LQ3B2B-F 1/4" 22 21.5
LQ3B3A-F 1/8" 23 18.5
LQ3B3B-F 3/8" 1/4" 5 22.5 19.5 9 18 21 47.5 44.5 24 25 21.5
LQ3B3C-F 3/8" 25.5 25
LQ3B4A-F 1/4" 23.5 21.5
LQ3B4B-F 1/2" 3/8" 6 24.5 22.5 10 20 24 52.5 50.5 26 29 25
LQ3B4C-F 1/2" 30 29.5
LQ3B5A-F 3/8" 30.5 25
LQ3B5B-F 3/4" 1/2" 7 26.5 24 14 28 32 64 61.5 35.5 37 29.5
LQ3B5C-F 3/4" 37 36
LQ3B6A-F 1/2" 41 29.5
LQ3B6B-F 1" 3/4" 8 30 26 18 36 41 78 74 42.5 49 36
LQ3B6C-F 1" 46 44.5
14
Series LQ3
Dimensions
Male run tee: LQ3R-M

(E,E’)
Metric Size
O.D. R/NPT
L1,L1’
2 x øB
LQ3R11-M ø4
øM 1/8" 15 3.5 10 9 4.8 9.5 11 28.5 27.5 19 14
LQ3R12-M ø3
F
LQ3R21-M 1/8" 19.5 23.5

ø6 4 17 16 6 12 16 34.5 33.5 20
Port size LQ3R22-M 1/4" 20.5 26.5
H G
R (NPT) LQ3R31-M ø10
(A) (E,E’) 1/8" 22.5 26.5
LQ3R32-M ø8
L2 L1,L1’
LQ3R33-M ø10
1/4" 23.5 5 22.5 19.5 9 18 21 47.5 44.5 29.5 25
LQ3R34-M ø8
LQ3R35-M ø10
3/8" 24 30.5
LQ3R36-M ø8
(A): Reference dimension after installation. LQ3R41-M 1/4" 27 33
(E,E’): Reference dimension for the inserted LQ3R42-M ø12 3/8" 27.5 6 24 22 10 20 24 52.5 50.5 34 29
tubing from the end surface of the nut. LQ3R43-M 1/2" 29 37
(E’),L’: Nut material PVDF dimensions.
LQ3R51-M 3/8" 32.5 39
LQ3R52-M ø19 1/2" 34 7 26.5 24 14 28 32 64 61.5 42 37
LQ3R53-M 3/4" 34.5 44
LQ3R61-M 1/2" 42 50
LQ3R62-M ø25 3/4" 8 30 26 18 36 41 78 74 52 49
42.5
LQ3R63-M 1" 53
Inch Size
O.D. R/NPT
LQ3R1A-M 1/8" 1/8" 15 3.5 10 9 4.8 9.5 11 28.5 27.5 19 14
LQ3R2A-M 1/8" 19.5 23.5
1/4" 4 17 16 6 12 16 34.5 33.5 20
LQ3R2B-M 1/4" 20.5 26.5
LQ3R3A-M 1/8" 22.5 26.5
LQ3R3B-M 3/8" 1/4" 23.5 5 22.5 19.5 9 18 21 47.5 44.5 29.5 25
LQ3R3C-M 3/8" 24 30.5
LQ3R4A-M 1/4" 27 33
LQ3R4B-M 1/2" 3/8" 27.5 6 24.5 22.5 10 20 24 52.5 50.5 34 29
LQ3R4C-M 1/2" 29 37
LQ3R5A-M 3/8" 32.5 39
LQ3R5B-M 3/4" 1/2" 34 7 26.5 24 14 28 32 64 61.5 42 37
LQ3R5C-M 3/4" 34.5 44
LQ3R6A-M 1/2" 42 50
LQ3R6B-M 1" 3/4" 8 30 26 18 36 41 78 74 52 49
42.5
LQ3R6C-M 1" 53
15
Dimensions
Female run tee: LQ3R-F
(E,E’)
Metric Size
O.D. Rc/NPT
L1,L1’
2 x øB
LQ3R11-F ø4
øM 1/8" 3.5 10 9 4.8 9.5 11 28.5 27.5 19.5 14 18.5
LQ3R12-F ø3
F
øY
LQ3R21-F 1/8" 20 18.5

ø6 4 17 16 6 12 16 34.5 33.5 20
LQ3R22-F 1/4" 22 21.5
H G (E,E’)
LQ3R31-F ø10
L2 L1,L1’ 1/8" 23 18.5
LQ3R32-F ø8
LQ3R33-F ø10
Port size 1/4" 5 22.5 19.5 9 18 21 47.5 44.5 24 25 21.5
LQ3R34-F ø8
Rc (NPT)
LQ3R35-F ø10
3/8" 25.5 25
LQ3R36-F ø8
LQ3R41-F 1/4" 23.5 21.5
(E,E’): Reference dimension for the inserted LQ3R42-F ø12 3/8" 6 24 22 10 20 24 52.5 50.5 26 29 25
tubing from the end surface of the nut. LQ3R43-F 1/2" 30 29.5
(E’),L1’: Nut material PVDF dimensions. LQ3R51-F 3/8" 30.5 25
LQ3R52-F ø19 1/2" 7 26.5 24 14 28 32 64 61.5 35.5 37 29.5
LQ3R53-F 3/4" 37 36
LQ3R61-F 1/2" 41 29.5
LQ3R62-F ø25 3/4" 8 30 26 18 36 41 78 74 42.5 49 36
LQ3R63-F 1" 46 44.5
Inch Size
O.D. Rc/NPT
LQ3R1A-F 1/8" 1/8" 3.5 10 9 4.8 9.5 11 28.5 27.5 19.5 14 18.5
LQ3R2A-F 1/8" 20 18.5
1/4" 4 17 16 6 12 16 34.5 33.5 20
LQ3R2B-F 1/4" 22 21.5
LQ3R3A-F 1/8" 23 18.5
LQ3R3B-F 3/8" 1/4" 5 22.5 19.5 9 18 21 47.5 44.5 24 25 21.5
LQ3R3C-F 3/8" 25.5 25
LQ3R4A-F 1/4" 23.5 21.5
LQ3R4B-F 1/2" 3/8" 6 24.5 22.5 10 20 24 52.5 50.5 26 29 25
LQ3R4C-F 1/2" 30 29.5
LQ3R5A-F 3/8" 30.5 25
LQ3R5B-F 3/4" 1/2" 7 26.5 24 14 28 32 64 61.5 35.5 37 29.5
LQ3R5C-F 3/4" 37 36
LQ3R6A-F 1/2" 41 29.5
LQ3R6B-F 1" 3/4" 8 30 26 18 36 41 78 74 42.5 49 36
LQ3R6C-F 1" 46 44.5
16
Series LQ3
Dimensions
Union elbow: LQ3E

(E,E’)
Metric Size
Applicable
Model tubing B C E E’ H L L’ M
øB O.D.
L,L’
LQ3E11 ø4
3.5 4.8 10 9 11 28.5 27.5 14
LQ3E12 ø3
øM
LQ3E21 ø6 4 6 17 16 16 34.5 33.5 20
C
LQ3E31 ø10
5 9 22.5 19.5 21 47.5 44.5 25
LQ3E32 ø8
H C (E,E’) LQ3E41 ø12 6 10 24 22 24 52.5 50.5 29
L,L’ LQ3E51 ø19 7 14 26.5 24 32 64 61.5 37
LQ3E61 ø25 8 18 30 26 41 78 74 49
Inch Size
tubing from the end surface of the nut. Applicable
Model tubing B C E E’ H L L’ M
O.D.
LQ3E1A 1/8" 3.5 4.8 10 9 11 28.5 27.5 14
LQ3E2A 1/4" 4 6 17 16 16 34.5 33.5 20
LQ3E3A 3/8" 5 9 22.5 19.5 21 47.5 44.5 25
LQ3E4A 1/2" 6 10 24.5 22.5 24 52.5 50.5 29
LQ3E5A 3/4" 7 14 26.5 24 32 64 61.5 37
LQ3E6A 1" 8 18 30 26 41 78 74 49
Union tee: LQ3T

(E,E’)
Metric Size
Applicable
2 x øB Model tubing B E E’ F G H L L’ M
O.D.
L,L’
LQ3T11 ø4
øM 3.5 10 9 4.8 9.5 11 28.5 27.5 14
LQ3T12 ø3
F
LQ3T21 ø6 4 17 16 6 12 16 34.5 33.5 20

LQ3T31 ø10
H (E,E’) G (E,E’) 5 22.5 19.5 9 18 21 47.5 44.5 25
LQ3T32 ø8
L,L’ L,L’
LQ3T41 ø12 6 24 22 10 20 24 52.5 50.5 29
LQ3T51 ø19 7 26.5 24 14 28 32 64 61.5 37
LQ3T61 ø25 8 30 26 18 36 41 78 74 49

tubing from the end surface of the nut. Inch Size
Applicable
Model tubing B E E’ F G H L L’ M
O.D.
LQ3T1A 1/8" 3.5 10 9 4.8 9.5 11 28.5 27.5 14
LQ3T2A 1/4" 4 17 16 6 12 16 34.5 33.5 20
LQ3T3A 3/8" 5 22.5 19.5 9 18 21 47.5 44.5 25
LQ3T4A 1/2" 6 24.5 22.5 10 20 24 52.5 50.5 29
LQ3T5A 3/4" 7 26.5 24 14 28 32 64 61.5 37
LQ3T6A 1" 8 30 26 18 36 41 78 74 49
17
Dimensions
Panel mount union: LQ3P
J Metric Size
Panel thickness
Applicable
H W2 W1 (max. t)
Model tubing E E’ H J K L1 L1’ L2 L2’ M t W1 W2
O.D.
øM
LQ3P11 ø4
10 9 11 6 14.5 23.5 22.5 58 56 14 8 16 17
LQ3P12 ø3
LQ3P21 ø6 17 16 16 7 20.5 28 27 69 67 20 8 21 24
(E,E’) (E,E’)
LQ3P31 ø10
L1,L1’ 22.5 19.5 21 7 24.5 39 36 89 83 25 8 26 28
LQ3P32 ø8
L2,L2’
LQ3P41 ø12 24 22 24 9 30.5 44.5 42.5 100 96 29 8 32 36
Panel hole diameter øK
LQ3P51 ø19 26.5 24 32 9 36.5 50.5 48 117 112 37 13 41 43

LQ3P61 ø25 30 26 41 10 48.5 60 56 136 127.5 49 13 50 55
Inch Size
Applicable
Model tubing E E’ H J K L1 L1’ L2 L2’ M t W1 W2
O.D.
LQ3P1A 1/8" 10 9 11 6 14.5 23.5 22.5 58 56 14 8 16 17
tubing from the end surface of the nut. LQ3P2A 1/4" 17 16 16 7 20.5 28 27 69 67 20 8 21 24
(E’),L1’,L2’: Nut material PVDF dimensions. LQ3P3A 3/8" 22.5 19.5 21 7 24.5 39 36 89 83 25 8 26 28
W: Width across flats dimension. LQ3P4A 1/2" 24.5 22.5 24 9 30.5 44.5 42.5 100 96 29 8 32 36
LQ3P5A 3/4" 26.5 24 32 9 36.5 50.5 48 117 112 37 13 41 43
LQ3P6A 1" 30 26 41 10 48.5 60 56 136 127.5 49 13 50 55
Union: LQ3U
H Metric Size
W
Applicable
øM Model tubing E E’ H L L’ M W
O.D.
LQ3U11 ø4
10 9 11 46.5 44.5 14 10
(E,E’) (E,E’) LQ3U12 ø3
L,L’ LQ3U21 ø6 17 16 16 57 55 20 14
LQ3U31 ø10
22.5 19.5 21 79 73 25 18
LQ3U32 ø8
LQ3U41 ø12 24 22 24 88 84 29 22
(E,E’): Reference dimension for the inserted LQ3U51 ø19 26.5 24 32 103 98 37 30
tubing from the end surface of the nut. LQ3U61 ø25 30 26 41 122 113.5 49 36
W: Width across flats dimension.
Inch Size
Applicable
Model tubing E E’ H L L’ M W
O.D.
LQ3U1A 1/8" 10 9 11 46.5 44.5 14 10
LQ3U2A 1/4" 17 16 16 57 55 20 14
LQ3U3A 3/8" 22.5 19.5 21 79 73 25 18
LQ3U4A 1/2" 24.5 22.5 24 88 84 29 22
LQ3U5A 3/4" 26.5 24 32 103 98 37 30
LQ3U6A 1" 30 26 41 122 113.5 49 36
18
Series LQ3
Union Reducing
How to Order
Tubing
connection
LQ3 U 2 1 R1
Fitting type
Symbol Type
U Union Symbol Nut material Packaging
Body size
(according to the combination table)
Tubing type Type of piping (according to the combination table)

Symbol Type Symbol Type
A Inch R Reducing
1, 2 Metric
Size combination (Metric) Size combination (Inch)

A side B side A side B side
Size Model Size Model
Applicable tubing size (mm) Applicable tubing size (mm) Applicable tubing size (inch) Applicable tubing size (inch)
1 LQ3U11-R1 4x3 3x2 2 LQ3U2A-R1 1/4" x 5/32" 1/8" x 0.086"
LQ3U21-R1 4x3 LQ3U3A-R1 1/4" x 5/32"
2 6x4 3 3/8" x 1/4"
LQ3U21-R2 3x2 LQ3U3A-R2 1/8" x 0.086"
LQ3U31-R1 8x6 LQ3U4A-R1 3/8" x 1/4"
10 x 8 4 1/2" x 3/8"
LQ3U31-R2 6x4 LQ3U4A-R2 1/4" x 5/32"
3
LQ3U32-R1 6x4 LQ3U5A-R1 1/2" x 3/8"
8x6
LQ3U32-R2 4x3 5 LQ3U5A-R2 3/4" x 5/8" 3/8" x 1/4"
LQ3U41-R1 10 x 8 LQ3U5A-R3 1/4" x 5/32"
4 12 x 10
LQ3U41-R2 8x6 LQ3U6A-R1 3/4" x 5/8"
6 1" x 7/8"
LQ3U51-R1 12 x 10 LQ3U6A-R2 1/2" x 3/8"
5 19 x 16
LQ3U51-R2 10 x 8
LQ3U61-R1 19 x 16
6 25 x 22
LQ3U61-R2 12 x 10
A side B side
19
Union Reducing Series LQ3
Dimensions
Union reducing: LQ3U-R
H1 Metric Size
H2 W
øM2
Model Applicable Applicable E1 E1’ E2 E2’ H1 H2 L L’ M1 M2 W
øM1 1/4 tubing O.D. tubing O.D.
(E1,E1’) (E2,E2’) LQ3U11-R1 ø4 ø3 10 9 10 9 11 11 46.5 44.5 14 14 10
L,L’ LQ3U21-R1 ø4
ø6 17 16 10 9 16 11 51 48.5 20 14 14
LQ3U21-R2 ø3
LQ3U31-R1 ø8 22.5 19.5 21 79 73 25
ø10 22.5 19.5 21 25 18
LQ3U31-R2 ø6 17 16 16 66.5 62 20
(E1,E1’,E2,E2’): Reference dimension for the LQ3U32-R1 ø6 17 16 16 66.5 62 20
ø8 22.5 19.5 21 25 18
inserted tubing from the end LQ3U32-R2 ø4 10 9 11 62 58 14
surface of the nut. LQ3U41-R1 ø10
(E1’,E2’),L’: Nut material PVDF dimensions. ø12 24 22 22.5 19.5 24 21 82.5 77 29 25 22
LQ3U41-R2 ø8
LQ3U51-R1 ø12 24 22 24 95.5 91 29
ø19 26.5 24 32 37 30
LQ3U51-R2 ø10 22.5 19.5 21 91 85.5 25
LQ3U61-R1 ø19 26.5 24 32 112.5 105.5 37
ø25 30 26 41 49 36
LQ3U61-R2 ø12 24 22 24 106.5 100 29
Inch Size
A side B side
Model Applicable Applicable E1 E1’ E2 E2’ H1 H2 L L’ M1 M2 W
tubing O.D. tubing O.D.
LQ3U2A-R1 1/4" 1/8" 17 16 10 9 16 11 51 48.5 20 14 14
LQ3U3A-R1 1/4" 17 16 16 66.5 62 20
3/8" 22.5 19.5 21 25 18
LQ3U3A-R2 1/8" 10 9 11 62 58 14
LQ3U4A-R1 3/8" 22.5 19.5 21 82.5 77 25
1/2" 24.5 22.5 24 29 22
LQ3U4A-R2 1/4" 17 16 16 72.5 69 20
LQ3U5A-R1 1/2" 24.5 22.5 24 95.5 91 29
LQ3U5A-R2 3/4" 3/8" 26.5 24 22.5 19.5 32 21 91 85.5 37 25 30
LQ3U5A-R3 1/4" 17 16 16 81 77 20
LQ3U6A-R1 3/4" 26.5 24 32 112.5 105.5 37
1" 30 26 41 49 36
LQ3U6A-R2 1/2" 24.5 22.5 24 106.5 100 29
20
Series LQ3
Union Elbow Reducing
How to Order
Tubing
connection
LQ3 E 2 1 R1
Fitting type
Symbol Type
E Union elbow Symbol Nut material Packaging
Body size 2 PVDF Clean packaging equivalent to Class M3.5
(according to the combination table) 3 PVDF Standard packaging equivalent to Class M5.5

A Inch R Reducing
1, 2 Metric

Applicable tubing size (mm) Applicable tubing size (mm) Applicable tubing size (inch) Applicable tubing size (inch)
1 LQ3E11-R1 4x3 3x2 2 LQ3E2A-R1 1/4" x 5/32" 1/8" x 0.086"
LQ3E21-R1 4x3 LQ3E3A-R1 1/4" x 5/32"
2 6x4 3 3/8" x 1/4"
LQ3E21-R2 3x2 LQ3E3A-R2 1/8" x 0.086"
LQ3E31-R1 8x6 LQ3E4A-R1 3/8" x 1/4"
10 x 8 4 1/2" x 3/8"
LQ3E31-R2 6x4 LQ3E4A-R2 1/4" x 5/32"
3
LQ3E32-R1 6x4 LQ3E5A-R1 1/2" x 3/8"
8x6
LQ3E32-R2 4x3 5 LQ3E5A-R2 3/4" x 5/8" 3/8" x 1/4"
LQ3E41-R1 10 x 8 LQ3E5A-R3 1/4" x 5/32"
4 12 x 10
LQ3E41-R2 8x6 LQ3E6A-R1 3/4" x 5/8"
6 1" x 7/8"
LQ3E51-R1 12 x 10 LQ3E6A-R2 1/2" x 3/8"
5 19 x 16
LQ3E51-R2 10 x 8
LQ3E61-R1 19 x 16
6 25 x 22
LQ3E61-R2 12 x 10
A side
B side
21
Union Elbow Reducing Series LQ3
Dimensions
Union elbow reducing: LQ3E-R
Metric Size
(E1,E1’)
A side B side
A side Model Applicable Applicable B C E1 E1’ E2 E2’ H1 H2 L1 L1’ L2 L2’ M1 M2
tubing O.D. tubing O.D.
LQ3E11-R1 ø4 ø3 3.5 4.8 10 9 10 9 11 11 28.5 27.5 28.5 27.5 14 14
L1,L1’
øB
B side LQ3E21-R1 ø4
2 ø6 4 6 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14
øM LQ3E21-R2 ø3
C
LQ3E31-R1 ø8 22.5 19.5 21 47.5 44.5 25

ø10 5 9 22.5 19.5 21 47.5 44.5 25
LQ3E31-R2 ø6 17 16 16 38 37 20
H2 C (E2,E2’) LQ3E32-R1 ø6 17 16 16 38 37 20
L2,L2’
ø8 5 9 22.5 19.5 21 47.5 44.5 25
LQ3E32-R2 ø4 10 9 11 33.5 32.5 14
LQ3E41-R1 ø10
1
ø12 6 10 24 22 22.5 19.5 24 21 52.5 50.5 48.5 45.5 29 25

øM
LQ3E41-R2 ø8
LQ3E51-R1 ø12 24 22 24 61.5 58.5 56.5 29
H1
ø19 7 14 26.5 24 32 64 37
1/4
LQ3E51-R2 ø10 22.5 19.5 21 61.5 53.5 50.5 25

LQ3E61-R1 ø19 26.5 24 32 74 70 67.5 37
ø25 8 18 30 26 41 78 49
LQ3E61-R2 ø12 24 22 24 74 64.5 62.5 29
Inch Size
(E1,E1’,E2,E2’): Reference dimension for the
inserted tubing from the end A side B side
surface of the nut. Model Applicable Applicable B C E1 E1’ E2 E2’ H1 H2 L1 L1’ L2 L2’ M1 M2
(E1’,E2’),L1’,L2’: Nut material PVDF dimensions. tubing O.D. tubing O.D.
LQ3E2A-R1 1/4" 1/8" 4 6 17 10
16 9 16 11 34.5 33.5 30.5 29.5 20 14
LQ3E3A-R1 1/4" 17 16 16 38 37 20
3/8" 5 9 22.5 19.5 21 47.5 44.5 25
LQ3E3A-R2 1/8" 10 9 11 33.5 32.5 14
LQ3E4A-R1 3/8" 22.5 19.5 21 48.5 45.5 25
1/2" 6 10 24.5 22.5 24 52.5 50.5 29
LQ3E4A-R2 1/4" 17 16 16 39 38 20
LQ3E5A-R1 1/2" 24.5 22.5 24 58.5 56.5 29
LQ3E5A-R2 3/4" 3/8" 7 14 26.5 24 22.5 19.5 32 21 64 61.5 53.5 50.5 37 25
LQ3E5A-R3 1/4" 17 16 16 43.5 42.5 20
LQ3E6A-R1 3/4" 26.5 24 32 70 67.5 37
1" 8 18 30 26 41 78 74 49
LQ3E6A-R2 1/2" 24.5 22.5 24 64.5 62.5 29
22
Series LQ3
Union Tee Reducing
How to Order
Tubing
connection
LQ3 T 2 A R1
Fitting type
Symbol Type
T Union tee Symbol Nut material Packaging
Body size 3 PVDF Standard packaging equivalent to Class M5.5
(according to the combination table)

A Inch R Reducing
1, 2 Metric

A side (Left) B side (Centre) C side (Right) A side (Left) B side (Centre) C side (Right)
Applicable tubing size (mm) Applicable tubing size (mm) Applicable tubing size (mm) Applicable tubing size (inch) Applicable tubing size (inch) Applicable tubing size (inch)
LQ3T11-R1 3x2 4x3 LQ3T2A-R1 1/8" x 0.086" 1/4" x 5/32"
1 4x3 2 1/4" x 5/32"
LQ3T11-R5 4x3 3x2 LQ3T2A-R5 1/4" x 5/32" 1/8" x 0.086"
LQ3T21-R1 4x3 6x4 LQ3T3A-R1 1/4" x 5/32" 3/8" x 1/4"
LQ3T21-R2 3x2 6x4 LQ3T3A-R2 1/8" x 0.086" 3/8" x 1/4"
2 6x4 3/8" x 1/4"
LQ3T21-R5 6x4 4x3 3 LQ3T3A-R5 3/8" x 1/4" 1/4" x 5/32"
LQ3T21-R6 6x4 3x2 LQ3T3A-R7 1/4" x 5/32" 1/4" x 5/32"
LQ3T31-R1 8x6 10 x 8 LQ3T3A-R9 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32"
LQ3T31-R2 6x4 10 x 8 LQ3T4A-R1 3/8" x 1/4" 1/2" x 3/8"
10 x 8
LQ3T31-R5 10 x 8 8x6 LQ3T4A-R2 1/4" x 5/32" 1/2" x 3/8"
3
LQ3T31-R6 10 x 8 6x4 LQ3T4A-R5 1/2" x 3/8" 3/8" x 1/4"
1/2" x 3/8"
LQ3T32-R1 6x4 8x6 4 LQ3T4A-R6 1/2" x 3/8" 1/4" x 5/32"
8x6
LQ3T32-R5 8x6 6x4 LQ3T4A-R7 3/8" x 1/4" 3/8" x 1/4"
LQ3T41-R1 10 x 8 12 x 10 LQ3T4A-R8 1/4" x 5/32" 1/4" x 5/32"
4 12 x 10
LQ3T41-R5 12 x 10 10 x 8 LQ3T4A-R9 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4"
LQ3T51-R1 12 x 10 19 x 16 LQ3T5A-R1 1/2" x 3/8" 3/4" x 5/8"
5 19 x 16
LQ3T51-R5 19 x 16 12 x 10 LQ3T5A-R2 3/8" x 1/4" 3/4" x 5/8"
LQ3T61-R1 19 x 16 25 x 22 LQ3T5A-R3 1/4" x 5/32" 3/4" x 5/8"
6 25 x 22 3/4" x 5/8"
LQ3T61-R5 25 x 22 19 x 16 LQ3T5A-R5 3/4" x 5/8" 1/2" x 3/8"
LQ3T5A-R6 3/4" x 5/8" 3/8" x 1/4"
5
LQ3T5A-R7 1/2" x 3/8" 1/2" x 3/8"
B side LQ3T5A-R9 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8"
LQ3T5A-R10 3/8" x 1/4" 3/4" x 5/8" 3/8" x 1/4"
LQ3T5A-R11 1/2" x 3/8" 1/4" x 5/32"
3/4" x 5/8"
LQ3T5A-R12 3/4" x 5/8" 1/4" x 5/32"
LQ3T6A-R1 3/4" x 5/8" 1" x 7/8"
LQ3T6A-R2 1/2" x 3/8" 1" x 7/8"
LQ3T6A-R3 3/8" x 1/4" 1" x 7/8"
1" x 7/8"
A side C side
LQ3T6A-R4 1/4" x 5/32" 1" x 7/8"
LQ3T6A-R6 1" x 7/8" 1/2" x 3/8"
6 LQ3T6A-R7 3/4" x 5/8" 3/4" x 5/8"
LQ3T6A-R9 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"
LQ3T6A-R10 1/2" x 3/8" 1" x 7/8" 1/2" x 3/8"
LQ3T6A-R12 1" x 7/8" 3/8" x 1/4"
1" x 7/8"
LQ3T6A-R13 1" x 7/8" 1/4" x 5/32"
LQ3T6A-R14 3/4" x 5/8" 1" x 7/8" 1/4" x 5/32"
23
Union Tee Reducing Series LQ3
Dimensions
Union tee reducing: LQ3T-R (E2,E2’)
B side
L2,L2’
2 x øB
øM1
øM3
F
1/4 1/4
A side C side
H3 (E1,E1’) G (E3,E3’) H1
L1,L1’ L3,L3’
2
øM
(E1,E1’,E2,E2’,E3,E3’): Reference dimension for the

inserted tubing from the end
H2
surface of the nut.

(E1’,E2’,E3’),L1’,L2’,L3’: Nut material PVDF dimensions.
Metric Size
A side (Left) B side (Centre) C side (Right)
Model
Applicable tubing O.D. Applicable tubing O.D. Applicable tubing O.D.
B E1 E1’ E2 E2’ E3 E3’ F G H1 H2 H3 L1 L1’ L2 L2’ L3 L3’ M1 M2 M3
LQ3T11-R1 ø3 ø4
ø4 3.5 10 9 10 9 10 9 4.8 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14
LQ3T11-R5 ø4 ø3
LQ3T21-R1 ø4 ø6 10 9 17 16 11 16 30.5 29.5 34.5 33.5 14 20
LQ3T21-R2 ø3 ø6
ø6 4 17 16 6 12 16 34.5 33.5 20
LQ3T21-R5 ø6 ø4 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14
LQ3T21-R6 ø6 ø3
LQ3T31-R1 ø8 ø10 22.5 19.5 21
21
47.5 44.5 25
25
LQ3T31-R2 ø6 ø10 17 16 22.5 19.5 16 38 37 47.5 44.5 20
ø10 5 22.5 19.5 9 18 21 47.5 44.5 25
LQ3T31-R5 ø10 ø8 22.5 19.5 21
21
47.5 44.5 25
25
LQ3T31-R6 ø10 ø6 17 16 16 38 37 20
LQ3T32-R1 ø6 ø8 17 16 22.5 19.5 16 21 38 37 47.5 44.5 20 25
ø8 5 22.5 19.5 9 18 21 47.5 44.5 25
LQ3T32-R5 ø8 ø6 22.5 19.5 17 16 21 16 47.5 44.5 38 37 25 20
LQ3T41-R1 ø10 ø12 22.5 19.5 24 22 21 24 48.5 45.5 52.5 50.5 25 29
ø12 6 24 22 10 20 24 52.5 50.5 29
LQ3T41-R5 ø12 ø10 24 22 22.5 19.5 24 21 52.5 50.5 48.5 45.5 29 25
LQ3T51-R1 ø12 ø19 24 22 26.5 24 24 32 58.5 56.5 64 61.5 29 37
ø19 7 26.5 24 14 28 32 64 61.5 37
LQ3T51-R5 ø19 ø12 26.5 24 24 22 32 24 64 61.5 58.5 56.5 37 29
LQ3T61-R1 ø19 ø25 26.5 24 30 26 32 41 70 67.5 78 74 37 49
ø25 8 30 26 18 36 41 78 74 49
LQ3T61-R5 ø25 ø19 30 26 26.5 24 41 32 78 74 70 67.5 49 37
Inch Size
A side (Left) B side (Centre) C side (Right)
Model
Applicable tubing O.D. Applicable tubing O.D. Applicable tubing O.D.
B E1 E1’ E2 E2’ E3 E3’ F G H1 H2 H3 L1 L1’ L2 L2’ L3 L3’ M1 M2 M3
LQ3T2A-R1 1/4"
1/8" 1/4"
17 16
10 9 17 16
6 12 16
11 16
34.5 33.5
30.5 29.5 34.5 33.5
20
14 20
4
LQ3T2A-R5 1/4" 1/8" 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14
LQ3T3A-R1 1/4" 3/8" 17 16 16 38 37 20
22.5 19.5 21 47.5 44.5 25
LQ3T3A-R2 3/8"
1/8" 3/8"
22.5 19.5
10 9
21
11
47.5 44.5
33.5 32.5
25
14
LQ3T3A-R5 3/8" 1/4" 5 22.5 19.5 9 18 21 47.5 44.5 25
LQ3T3A-R7 1/4" 1/4" 17 16 17 16 16 16 38 37 38 37 20 20
LQ3T3A-R9 1/4" 3/8" 1/4" 17 16 22.5 19.5 16 21 38 37 47.5 44.5 20 25
LQ3T4A-R1 3/8" 1/2" 22.5 19.5 21 48.5 45.5 25
24.5 22.5 24 52.5 50.5 29
LQ3T4A-R2 1/4" 1/2" 17 16 16 39 38 20
LQ3T4A-R5 1/2"
1/2" 3/8"
24.5 22.5 24.5 22.5
22.5 19.5
24 24
21
52.5 50.5 52.5
48.5 45.5
29 29
25
50.5
LQ3T4A-R6 1/2" 1/4" 6 17 16 10 20 16 39 38 20
LQ3T4A-R7 3/8" 3/8" 22.5 19.5 22.5 19.5 21 21 48.5 45.5 48.5 45.5 25 25
LQ3T4A-R8 1/4" 1/4" 17 16 17 16 16 16 39 38 39 38 20 20
LQ3T4A-R9 3/8" 1/2" 3/8" 22.5 19.5 24.5 22.5 22.5 19.5 21 24 21 48.5 45.5 52.5 50.5 48.5 45.5 25 29 25
LQ3T5A-R1 1/2" 3/4" 24.5 22.5 24 58.5 56.5 29
LQ3T5A-R2 3/8" 3/4" 22.5 19.5 26.5 24 21 32 54.5 52.5 64 61.5 25 37
LQ3T5A-R3 3/4"
1/4" 3/4"
26.5 24
17 16
32
16
64 61.5
44.5 43.5
37
20
LQ3T5A-R5 3/4" 1/2" 24.5 22.5 24 58.5 56.5 29
26.5 24 32 64 61.5 37
LQ3T5A-R6 3/4" 3/8" 22.5 19.5
14 28
21 54.5 52.5 25
7
LQ3T5A-R7 1/2" 1/2" 24.5 22.5 24 58.5 56.5 29
24.5 22.5 24 58.5 56.5 29
LQ3T5A-R9 1/2" 3/4" 1/2" 24.5 22.5 24 58.5 56.5 29
26.5 24 32 64 61.5 37
LQ3T5A-R10 3/8" 3/4" 3/8" 22.5 19.5 22.5 19.5 21 21 54.5 52.5 54.5 52.5 25 25
LQ3T5A-R11 3/4"
1/2" 1/4"
26.5 24
24.5 22.5
32
24 58.5 56.5 29
17 16 16 64 61.5 44.5 43.5 37 20
LQ3T5A-R12 3/4" 1/4" 26.5 24 32 64 61.5 37
LQ3T6A-R1 3/4" 1" 26.5 24 32 70 67.5 37
LQ3T6A-R2 1/2" 1" 24.5 22.5 24 64.5 62.5 29
30 26 41 78 74 49
LQ3T6A-R3 1"
3/8" 1"
30 26
22.5 19.5
41
21
78 74
60 57
49
25
LQ3T6A-R4 1/4" 1" 17 16 16 50 49 20
LQ3T6A-R6 1" 1/2" 30 26 24.5 22.5 41 24 78 74 64.5 62.5 49 29
LQ3T6A-R7 3/4" 3/4" 8 26.5 24 18 36 32 70 67.5 37
37
26.5 24 32 70 67.5
LQ3T6A-R9 3/4" 1" 3/4" 26.5 24 32 70 67.5 37
LQ3T6A-R10 1/2" 1" 1/2" 24.5 22.5 24.5 22.5 24 24 64.5 62.5 64.5 62.5 29 29
LQ3T6A-R12 1"
1" 3/8"
30 26
30 26 22.5 19.5
41
41 21
78 74
78 74 60 57
49
49 25
LQ3T6A-R13 1" 1/4"
16 20
17 16 50 49
LQ3T6A-R14 3/4" 1" 1/4" 26.5 24 32 70 67.5 37
24 21
Series LQ3
Space Saving Union Elbow
How to Order
Tubing
connection
LQ3 E 21 S
Fitting type - PFA Clean packaging equivalent to Class M3.5
Symbol Type
E Union elbow
Thread type
Symbol Type
S Space saving
Size combination
2 1 6x4 2 A 1/4" x 5/32"
3 1 10 x 8 3 A 3/8" x 1/4"
3 2 8x6 4 A 1/2" x 3/8"
4 1 12 x 10 5 A 3/4" x 5/8"
5 1 19 x 16 6 A 1" x 7/8"
6 1 25 x 22
Dimensions
Space saving union elbow: LQ3E-S
Metric Size
(L2,L2’)
Applicable
øB Model tubing B C E E’ H L1 L1’ L2 L2’ M
O.D.
øM
C
LQ3E21-S ø6 4 6 17 16 16 34.5 33.5 36.5 35.5 20

1/4 LQ3E31-S ø10
5 9 22.5 19.5 21 47.5 44.5 49.5 46.5 25
LQ3E32-S ø8
H C (E,E’)
LQ3E41-S ø12 6 10 24 22 24 52.5 50.5 54.5 52.5 29
L1,L1’
LQ3E51-S ø19 7 14 26.5 24 32 64 61.5 66 63.5 37
LQ3E61-S ø25 8 18 30 26 41 78 74 80 76 49
(E,E’): Reference dimension for the Inch Size

inserted tubing from the end Applicable
surface of the nut. Model tubing B C E E’ H L1 L1’ L2 L2’ M
(E’),L1’,L2’: Nut material PVDF dimensions. O.D.
LQ3E2A-S 1/4" 4 6 17 16 16 34.5 33.5 36.5 35.5 20
LQ3E3A-S 3/8" 5 9 22.5 19.5 21 47.5 44.5 49.5 46.5 25
LQ3E4A-S 1/2" 6 10 24.5 22.5 24 52.5 50.5 54.5 52.5 29
LQ3E5A-S 3/4" 7 14 26.5 24 32 64 61.5 66 63.5 37
LQ3E6A-S 1" 8 18 30 26 41 78 74 80 76 49
25
Series LQ3
Space Saving Branch Tee
How to Order
Tubing
connection
LQ3 T 21 S B
Fitting type
Symbol Type
T Union tee
Thread type
Symbol Type
B Branch tee
Tubing type
Symbol Type
S Space saving
Size combination
2 1 6x4 2 A 1/4" x 5/32"
3 1 10 x 8 3 A 3/8" x 1/4"
3 2 8x6 4 A 1/2" x 3/8"
4 1 12 x 10 5 A 3/4" x 5/8"
5 1 19 x 16 6 A 1" x 7/8"
6 1 25 x 22
Dimensions
Space saving branch tee: LQ3T-SB
Metric Size
(L2,L2’)
2 x øB Applicable
Model tubing B E E’ F G H L1 L1’ L2 L2’ M
øM O.D.
F
1/4
LQ3T21-SB ø6 4 17 16 6 12 16 34.5 33.5 36.5 35.5 20
LQ3T31-SB ø10
H (E,E’) G (E,E’) 5 22.5 19.5 9 18 21 47.5 44.5 49.5 46.5 25
LQ3T32-SB ø8
L1,L1’ L1,L1’
LQ3T41-SB ø12 6 24 22 10 20 24 52.5 50.5 54.5 52.5 29
LQ3T51-SB ø19 7 26.5 24 14 28 32 64 61.5 66 63.5 37
LQ3T61-SB ø25 8 30 26 18 36 41 78 74 80 76 49
(E,E’): Reference dimension for the
inserted tubing from the end Inch Size
surface of the nut.
(E’),L1’,L2’: Nut material PVDF dimensions. Applicable
Model tubing B E E’ F G H L1 L1’ L2 L2’ M
O.D.
LQ3T2A-SB 1/4" 4 17 16 6 12 16 34.5 33.5 36.5 35.5 20
LQ3T3A-SB 3/8" 5 22.5 19.5 9 18 21 47.5 44.5 49.5 46.5 25
LQ3T4A-SB 1/2" 6 24.5 22.5 10 20 24 52.5 50.5 54.5 52.5 29
LQ3T5A-SB 3/4" 7 26.5 24 14 28 32 64 61.5 66 63.5 37
LQ3T6A-SB 1" 8 30 26 18 36 41 78 74 80 76 49
26
Series LQ3
Space Saving Run Tee
How to Order
Tubing
connection
LQ3 T 21 S R
Fitting type
Symbol Type
T Union tee
Thread type
Symbol Type
R Run tee
Tubing type
Symbol Type
S Space saving
Size combination
2 1 6x4 2 A 1/4" x 5/32"
3 1 10 x 8 3 A 3/8" x 1/4"
3 2 8x6 4 A 1/2" x 3/8"
4 1 12 x 10 5 A 3/4" x 5/8"
5 1 19 x 16 6 A 1" x 7/8"
6 1 25 x 22
Dimensions
Space saving run tee: LQ3T-SR

(E,E’)
Metric Size
Applicable
2 x øB Model tubing B E E’ F G H L1 L1’ L2 L2’ M
L1,L1’
O.D.
LQ3T21-SR ø6 4 17 16 6 12 16 34.5 33.5 36.5 35.5 20
øM
LQ3T31-SR ø10
F
5 22.5 19.5 9 18 21 47.5 44.5 49.5 46.5 25

1/4 LQ3T32-SR ø8
H G (E,E’) LQ3T41-SR ø12 6 24 22 10 20 24 52.5 50.5 54.5 52.5 29
LQ3T51-SR ø19 7 26.5 24 14 28 32 64 61.5 66 63.5 37
L2,L2’ L1,L1’
LQ3T61-SR ø25 8 30 26 18 36 41 78 74 80 76 49
Inch Size
(E,E’): Reference dimension for the Applicable
inserted tubing from the end Model tubing B E E’ F G H L1 L1’ L2 L2’ M
surface of the nut. O.D.
(E’),L1’,L2’: Nut material PVDF dimensions.
LQ3T2A-SR 1/4" 4 17 16 6 12 16 34.5 33.5 36.5 35.5 20
LQ3T3A-SR 3/8" 5 22.5 19.5 9 18 21 47.5 44.5 49.5 46.5 25
LQ3T4A-SR 1/2" 6 24.5 22.5 10 20 24 52.5 50.5 54.5 52.5 29
LQ3T5A-SR 3/4" 7 26.5 24 14 28 32 64 61.5 66 63.5 37
LQ3T6A-SR 1" 8 30 26 18 36 41 78 74 80 76 49
27
Series LQ3
Tube Extension
Straight Connector
How to Order
Tubing
connection
LQ3 H 2A T
Fitting type
Symbol Type
H Connector
Thread type
Symbol Type
T Tube extension
Size combination
2 1 6x4 2 A 1/4" x 5/32"
3 1 10 x 8 3 A 3/8" x 1/4"
3 2 8x6 4 A 1/2" x 3/8"
4 1 12 x 10 5 A 3/4" x 5/8"
5 1 19 x 16 6 A 1" x 7/8"
6 1 25 x 22
Dimensions
Tube extension straight connector: LQ3H-T
H Metric Size
W Applicable
øM Model tubing D E E’ H L1 L1’ L2 M W
O.D.
D
1/4
LQ3H21-T ø6 ø6 17 16 16 50 49 18 20 14
LQ3H31-T ø10 ø10
L2 (E,E’) 22.5 19.5 21 65.5 62.5 23.5 25 18
LQ3H32-T ø8 ø8
L1,L1’ LQ3H41-T ø12 ø12 24 22 24 72 70 25 29 22
LQ3H51-T ø19 ø19 26.5 24 32 83.5 81 26.5 37 30
LQ3H61-T ø25 ø25 30 26 41 97.5 93.5 31 49 36

tubing from the end surface of the nut.
Inch Size
(E’),L’: Nut material PVDF dimensions. Applicable
W: Width across flats dimension. Model tubing D E E’ H L1 L1’ L2 M W
O.D.
LQ3H2A-T 1/4" 1/4" 17 16 16 50 49 18 20 14
LQ3H3A-T 3/8" 3/8" 22.5 19.5 21 65.5 62.5 23.5 25 18
LQ3H4A-T 1/2" 1/2" 24.5 22.5 24 72 70 25 29 22
LQ3H5A-T 3/4" 3/4" 26.5 24 32 83.5 81 26.5 37 30
LQ3H6A-T 1" 1" 30 26 41 97.5 93.5 31 49 36
28
Series LQ3
Options
Blanking plug
LQ3 1 P 03 1
Size Packaging
Symbol Size Thread type Symbol Packaging Used to block
1 1 Symbol Type - Clean packaging equivalent to Class M3.5 fittings which are
2 2 1 Male 1 Standard packaging equivalent to Class M5.5 not being used.
3 3
4 4 Applicable tubing size
5 5
Metric Size Inch Size
6 6
Symbol Applicable tubing size Size Symbol Applicable tubing size Size
03 ø3 x ø2 03 1/8" x 0.086" 1
Fitting type 04 ø4 x ø3
1
07 1/4" x 5/32" 2
Symbol Type 06 ø6 x ø4 2 11 3/8" x 1/4" 3
P Plug 08 ø8 x ø6 13 1/2" x 3/8" 4
3
10 ø10 x ø8 19 3/4" x 5/8" 5
12 ø12 x ø10 4 25 1" x 7/8" 6
19 ø19 x ø16 5
25 ø25 x ø22 6
Tubing plug
LQ3 1 P 03 2
Size Nut material, packaging
Symbol Size Symbol Nut material Packaging
1 1 - PFA Clean packaging equivalent to Class M3.5 Used to block
2 2 Type of piping 1 PFA Standard packaging equivalent to Class M5.5 tubing which is
3 3 Symbol Type 2 PVDF Clean packaging equivalent to Class M3.5 not being used.
4 4 2 Tubing 3 PVDF Standard packaging equivalent to Class M5.5
5 5
Fitting type Symbol Applicable tubing size Size Symbol Applicable tubing size Size
Symbol Type 03 ø3 x ø2 03 1/8" x 0.086" 1
P Plug 1
04 ø4 x ø3 07 1/4" x 5/32" 2
06 ø6 x ø4 2 11 3/8" x 1/4" 3
08 ø8 x ø6 13 1/2" x 3/8" 4
3
10 ø10 x ø8 19 3/4" x 5/8" 5
12 ø12 x ø10 4 25 1" x 7/8" 6
19 ø19 x ø16 5
25 ø25 x ø22 6
Nut
LQ3 1 N 03
Size Nut material, packaging
Symbol Size Symbol Nut material Packaging
1 1 - PFA Clean packaging equivalent to Class M3.5
2 2 1 PFA Standard packaging equivalent to Class M5.5
3 3 2 PVDF Clean packaging equivalent to Class M3.5
4 4 3 PVDF Standard packaging equivalent to Class M5.5
5 5
Fitting type Symbol Applicable tubing size Size Symbol Applicable tubing size Size
Symbol Type 03 ø3 x ø2 03 1/8" x 0.086" 1
1
N Nut 04 ø4 x ø3 07 1/4" x 5/32" 2
06 ø6 x ø4 2 11 3/8" x 1/4" 3
08 ø8 x ø6 13 1/2" x 3/8" 4
3
10 ø10 x ø8 19 3/4" x 5/8" 5
12 ø12 x ø10 4 25 1" x 7/8" 6
19 ø19 x ø16 5
25 ø25 x ø22 6
29
Applicable Fluids
Material and Fluid Compatibility Check List for
Chemical Compatibility
Acetic acid 100%
Acetone 100% Note 1, 2)
Ammonium fluoride 40%
Ammonium hydroxide 30%
Butyl acetate 100%
Methylne chloride 100%
Hydrochloric acid 38%
Hydrofluoric acid 50%
Hydrogen peroxide 60%
Methanol 100%
Methyl ethyl ketone — Note 2)
Nitric acid 70% Note 2)
Phosphoric acid 86%
Caustic potash 85%
Sulfuric acid 100% Note 2)
Toluene — Note 1, 2)
Xylene — Note 2)
Sodium hydroxide 100% Note 2)
1.1.1-Trichloroethane 100% Note 2)
Rhosphorus pentachloride —
Isobutyl alcohol — Note 1)
Isopropyl alcohol — Note 1)
Ozone —
Ethyl acetate — Note 1, 2)
Pure water —
Nitrogen —
Ultrapure water —
Tmah — Note 2) Table symbol : can be used.
The material and fluid compatibility check list provides reference values as a guide only.
Note 1) Since static electricity may be generated, implement suitable countermeasures.
Note 2) Use the nut material made of PFA because the nut material, PVDF can be used depending on the environment or temperature.
• Compatibility is indicated for fluid temperatures of 200°C or less (In the case of the nut material made of PVDF: 150°C or less)
• The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product.
• The data above is based on the information presented by the material manufacturers.
• SMC is not responsible for its accuracy and any damage that may occur because of this data.
30
Series LQ3
Safety Instructions
These safety instructions are intended to prevent a hazardous situation and/or
equipment damage. These instructions indicate the level of potential hazard by
labels of "Caution", "Warning" or "Danger". To ensure safety, be sure to
observe ISO 4414 Note 1), JIS B 8370 Note 2) and other safety practices.
Caution : Operator error could result in injury or equipment damage.

Warning : Operator error could result in serious injury or loss of life.
Danger : In extreme conditions, there is a possible result of serious injury or loss of life.
Note 1) ISO 4414: Pneumatic fluid power --General rules relating to systems.
Note 2) JIS B 8370 : Pneumatic system axiom.
Warning
1. The compatibility of equipment is the responsibility of the person who designs

the system or decides its specifications.
Since the products specified here are used in various operating conditions, their compatibility for the
specific system must be based on specifications or post analysis and/or tests to meet your specific
requirements. The expected performance and safety assurance will be the responsibility of the
person who has determined the compatibility of the system. This person should continuously review
the suitability of all items specified, referring to the latest catalogue information with a view to giving
due consideration to any possibility of equipment failure when configuring a system.
2. Only trained personnel should operate machinery and equipment.
Assembly, handling or repair of machinery and equipment should be performed by trained and
experienced operators.
3. Do not service machinery/equipment or attempt to remove components until
safety is confirmed.
4. To promote safe operation, be sure to observe company standards and
legal regulations, etc.
Refer to ISO4414, JIS B 8370 (pneumatic system axiom), labor health and safety laws and other
safety regulations.
31
Series LQ3
Precautions 1
Be sure to read this before handling.
Design and Selection Piping
Warning Caution
1. Confirm the specifications. 1. Connect tubing with special tools.
Give careful consideration to operating conditions such as the Please contact SMC for special tool.
application, fluid and environment, and use within the opera- ∗ Please refer to the instruction manual regarding the ways to
ting ranges specified in this catalogue. connect a tube.
2. Fluid 2. Tighten the nut until it touches the end sur-
Operate within the indicated fluid temperature range. face of the body, and then tighten it an addi-
3. Maintenance space tion 1/8 turn. As a guide, refer to the proper
Ensure the necessary space for maintenance and inspections. tightening torques shown below.
4. Fluid pressure range Also, when the nut requires extra tightening,
Keep the supplied fluid pressure within the operating pressure please conduct this job in accordance with
range shown in the catalogue. the instruction manual.
5. Countermeasures for static electricity Nut Tightening Torque for Piping
Since static electricity may be generated depending on the
Body size Torque (N.m)
fluid being used, implement suitable countermeasures.
1 0.7 to 0.9
2 1.6 to 1.8
3 3.2 to 3.5
4 5.0 to 5.3
5 10.0 to 10.5
6 22.5 to 23.0
Mounting
3. Use sealant tape for piping the taper thread
Warning parts such as the LQ3H and LQ3L.
1. After mounting, perform suitable function Tape the ridges tightly with the sealant tape, starting one ridge
and leak tests to confirm that the mounting width left from thread end side. 3 to 4 larger of sealant tape
are required.
is correct.
2. Instruction manual Taper Thread Mounting Torque
Mount and operate the product after reading the manual care- Port size Torque (N.m)
fully and understanding its contents. Also keep the manual 1/8 0.6 to 0.9
where it can be referred to as necessary. 1/4 0.8 to 1.2
3/8 1.0 to 1.6
1/2 1.5 to 2.0
3/4 2.0 to 2.7
1 2.5 to 3.6
4. Nut tightening torque for a panel mount union

Nut Tightening Torque for a Panel Mount Union
Body size Torque (N.m)
1 0.5 to 0.6
2 0.6 to 0.7
3 1.2 to 1.3
4 4.5 to 4.6
5 6.8 to 6.9
6 12.4 to 12.5
32
Series LQ3
Precautions 2
Be sure to read this before handling.
Operating Environment Operating Precautions
Warning Warning
1. Do not use in locations having an explosive 1. Operate within the range of the maximum
atmosphere. operating pressure.
2. Do not operate in locations where vibration
or impact occurs. Caution
3. In locations near heat sources, block off ra- 1. After a long period of non-use, perform ins-
diated heat. pections before beginning operation.
2. Use sufficient care in the handling of the LQ
Maintenance series clean packaging types when opening
the package.
Warning
1. Perform maintenance in accordance with the
Use of Tubing
procedures in the instruction manual.
Improper handling can cause damage.
Caution
2. When removing or reinstalling fittings, remo-
ve any remaining chemicals and carefully re- 1. Refer to the applicable tubing sizes shown
place them with deionized water or air, etc., below for tubing to be used.
before beginning work activities. Applicable Tubing Size
3. Tightening of taper threads for piping Connection O.D. (mm) Internal thickness (mm)
tubing size Standard size Tolerance Standard size Tolerance
Because the taper threads are made of resin, minute leakage
may gradually occur due to stress relaxation. Perform periodic ø3 x ø2 3.0
0.5 (0.06
inspections, and if leakage is detected correct the problem by ø4 x ø3 4.0
additional tightening. If additional tightening becomes ineffecti- ø6 x ø4 6.0 +0.2
ve, replace the fitting with a new product. ø8 x ø6 8.0 –0.1
Metric size 1.0 (0.1
4. Check the following during regular mainte- ø10 x ø8 10.0
nance, and replace components as neces- ø12 x ø10 12.0
sary. ø19 x ø16 19.0 +0.3
1.5 (0.15
a) Scratches, gouges, abrasion, corrosion ø25 x ø22 25.0 –0.1
b) Twisting, flattening or distortion of tubing 1/8" x 0.086" 3.18 0.5
(0.1
c) Hardening, deterioration or softening of tubing 3/16" x 1/8" 4.75 0.8
+0.2
5. Do not repair or patch the replaced tubing or 1/4" x 5/32" 6.35
–0.1
1.2 (0.12
fittings for reuse. Inch size 3/8" x 1/4" 9.53
1/2" x 3/8" 12.7
1.6 (0.15
3/4" x 5/8" 19.0 +0.3
1" x 7/8" 25.4 –0.1
33
34
Air Operated Valve
Non-Metallic Exterior
Series LVQ
Guide Ring
Eliminates lateral motion of the poppet
which eliminates internal leakage.
Piston Damper
Absorbs piston momentum to minimize
impact-induced particle generation.
Buffer
Diaphragm (PTFE) Protects diaphragm from deformation
Special diaphragm construction ensures and damage due to back pressure.
consistent and repeatable opening and closing
that prevents the formation of micro-bubbles.
LQ3 Flaretype Construction
Zero Dead Volume
Leak Free to 200˚C.
Residual liquid is minimized by the tapered
shape and integral fitting construction,
allowing liquid to flow smoothly, achieving
improved swept flow characteristics.
Body (High Purity PFA)

Compatible with chemicals such as acids,
bases and de-ionized water.
35
Air Operated Valve Series LVQ
How to Order Valve (Single Type)
LVQ 2 0 Z 07
Option
Body class Nil None
Symbol Body class Orifice dia. Valve type LQ3 1 With flow rate adjustment
2 2 ø4 0 N.C. 2 With by-pass
3 3 ø8 1 N.O. 3 With flow rate adjustment & by-pass
4 4 ø10 2 Double acting 4 With indicator
5 5 ø16 Note) Refer to variations 5 High back pressure(0.42MPa)
6 6 ø22 in the table below 6* High back pressure & Flow rate adjustment
for valve type 7* High back pressure & by-pass
combinations. 8* High back pressure & Flow rate adjustment & by-pass
Applicable tubing size 9* High back pressure & indicator
Body class X33 Double Diaphram HCL Compatible
Connecting tubing
Symbol *Prefered Option Program
O.D. 2 3 4 5 6
Inch sizes Note) Refer to “Variations” in the table below for
07 1/4 option combinations.
11 3/8
13 1/2
19 3/4 Pilot port size
25 1 Nil LQ3 Integral fitting Connecting tubing outside diameter 1/8” (ø3)
R Thread type Rc1/8
N Thread type NPT1/8
Variations
Model LVQ20 LVQ30 LVQ40 LVQ50 LVQ60
Orifice diam
Connectin eter ø4 ø8 ø10 ø16 ø22
g fitting s
Type Sym Valv
bol e type
ize 2 3 4 5 6
Basic type PA
N.C.
B A
N.C.
PB
N.O.
B A
PA
Double
N.O. B A acting
Double acting PB
With flow rate PA
adjustment
B A N.C.
With by-pass PA
N.C.
B A
PA
N.C. Double
B A acting
Double acting PB
With flow rate PA
adjust ment &
by-pass B A N.C.
With PA
indicators
B A N.C.
High back PA
pressure
B A N.C.
36
Series LVQ
Standard Specifications
Model LVQ20 LVQ30 LVQ40 LVQ50 LVQ60
Tubing O.D. Inch 1/4 3/8 1/2 3/4 1
Orifice diameter ø4 ø8 ø10 ø16 ø22
Flow rate Av x 10 m-6 2 8.4 31.2 45.6 120 192

characteristics Cv 0.35 1.3 1.9 5 8
Withstand pressure(MPa) 1
Operating pressure<flown A to B> –98kPa to 0.5MPa –98kPa to 0.4MPa
Back pressure Standard 0.3 or less 0.2 or less

(MPa) High 0.42
Valve leakage(cm3/min) 0 (with water pressure)
Pilot pressure(MPa) 0.3 to 0.5 (0.45 to 0.55 with high back pressure option)
Pilot port size 1/8"(ø3), Rc1/8, NPT1/8
Fluid temperature(¯C) 0 to 150
Ambient temperature(¯C) 0 to 60
Weight(kg) 0.08 0.18 0.22 0.72 0.87
Construction
PB PB
Basic type N.O. Double

N.C. acting
1 1 1
PA PA
3 3 3
B A B A
B A B A B A
2 4
With flow rate With by-pass With indicator
adjustment 6
5
PA PA
5
B A B A
B A B A
Parts list
No. Description Material
1 Actuator section PVDF
2 Body PFA
3 Diaphragm PTFE
4 Nut PFA
5 Flow rate adjustment unit PVDF
6 Indicator, cover PP
37
N.C.
Q
øE
(P) R
Rc1/8(NPT1/8)
Sensor(vent)port
Integral fitting LQ3: 1/8"(ø3)
Pilot port Rc1/8(NPT1/8)
Pilot port
F
B A B A
J
G
L
(H) Pilot port: Rc1/8"(NPT1/8")

Threaded type
N
M
C
A
B
(mm)
Model A B C D E F G H J K L M N P Q R
LVQ20-Z -Nil/5 25.5 28 31.5 58 33.6 56.5 12 75 21.8 37 5 7 15 53.5 21 25.3
LVQ30-Z -Nil/5 28.5 57 34.5 69 45.4 77 16.5 103 32 50 6 7 20 59.5 25 31.2
LVQ40-Z -Nil/5 28.5 57 34.5 69 45.4 82.5 22 114 37.5 55.5 6 7 20 59.5 25 31.2
LVQ50-Z -Nil/5 42 84 48 96 75 127 25 150 50.2 78.2 10 7 20 73 38.5 45
LVQ60-Z -Nil/5 42 84 48 96 75 137 32 167 60 88 10 7 20 73 38.5 45
38
Series LVQ
N.C., with flow rate adjustment
(mm)
(Max.S)
Model S
LVQ20-Z -1/6 83
LVQ30-Z -1/6 113.5
LVQ40-Z -1/6 119
LVQ50-Z -1/6 171.5 B A
LVQ60-Z -1/6 182.5
LVQ20 N
M
N.C., with by-pass
C
A
B
D
(Max
.T)
LVQ30/40/50/60 N
M
V
C
B
A
D
B A
(Max.T)
U
(mm)
Model A B C D M N T U V
LVQ20-Z -2/7 25.5 46 31.5 58 7 15 35.3 10.6 7
LVQ30-Z -2/7 25.5 51 31.5 63 7 15 36.9 16.5 10
LVQ40-Z -2/7 25.5 51 31.5 63 7 15 37.9 22 10
LVQ50-Z -2/7 38 76 44 88 7 20 64 25 17
LVQ60-Z -2/7 38 76 44 88 7 20 66 32 17
39
N.C., with flow rate adjustment & by-pass N

LVQ20
M
C
A
B
D
(Max
. T)
V
LVQ30/40/50/60 N
M
(Max.S)
C
B A
A
B
U
D
(Max.T)
Z
(mm)
Model A B C D M N S T U V
LVQ20-Z -3/8 25.5 46 31.5 58 7 15 83 35.3 10.6 7
LVQ30-Z -3/8 25.5 51 31.5 63 7 15 113.5 36.9 16.5 10
LVQ40-Z -3/8 25.5 51 31.5 63 7 15 119 37.9 22 10
LVQ50-Z -3/8 38 76 44 88 7 20 171.5 64 25 17
LVQ60-Z -3/8 38 76 44 88 7 20 182.5 66 32 17
N.C., with indicator
(mm)
Model S
LVQ20-Z -4/9 70.5
S
LVQ30-Z -4/9 88.5

LVQ40-Z -4/9 94
LVQ50-Z -4/9 134.5 B A
LVQ60-Z -4/9 144
40
Series LVQ
N.O.
Q
Rc1/8(NPT1/8)
Pilot port
øE
Integral fitting LQ3: 1/8(ø3)
Pilot port R
Rc1/8(NPT1/8) Rc1/8(NPT1/8)
Sensor (vent) port Vent port
W
Rc1/8(NPT1/8)
Vent port
B A
(F)
Pilot port: Rc1/8(NPT1/8)

K
Threaded type
B A
J
G
L
(H)
N
M
C
A
B
Double Acting
(P)
Integral fitting LQ3: 1/8(ø3)
Pilot port R Rc1/8(NPT1/8)
Pilot port
Integral fitting LQ3: 1/8(ø3) Rc1/8(NPT1/8)

Pilot port Pilot port
Rc1/8(NPT1/8)
Sensor (vent) port
B A
B A
(mm)
Model A B C D E F G H J K L M N P Q R W
LVQ212-Z 25.5 46 31.5 58 33.6 89.5 12 75 21.8 37 5 7 15 53.5 21 25.3 64
LVQ312-Z 28.5 57 34.5 69 45.4 107.5 16.5 103 32 50 6 7 20 59.5 25 31.2 82
LVQ412-Z 28.5 57 34.5 69 45.4 113 22 114 37.5 55.5 6 7 20 59.5 25 31.2 87.5
LVQ512-Z 42 84 48 96 75 153.2 25 150 50.2 78.2 10 7 20 73 38.5 45 128
LVQ612-Z 42 84 48 96 75 163 32 167 60 88 10 7 20 73 38.5 45 137.5
41
Double acting with by-pass
LVQ20 N
M
C
A
B
D
(Max
. T)
V
LVQ30/40/50/60 N
M
B A V
U
C
B
A
D
(Max.T)
(mm)
Model A B C D M N T U V
LVQ2 12-Z -2 25.5 46 31.5 58 7 15 35.3 10.6 7
LVQ3 12-Z -2 25.5 51 31.5 63 7 15 36.9 16.5 10
LVQ4 12-Z -2 25.5 51 31.5 63 7 15 37.9 22 10
LVQ5 12-Z -2 38 76 44 88 7 20 64 25 17
LVQ6 12-Z -2 38 76 44 88 7 20 66 32 17
42
Series LVQ
LVQ20-Z07-X33 (HCL Series Double-Diaphragm)
Tube Outside Dia. 1/8"
49
33.6
53.5 Spring Material
SUS + PTFE Coating
PTFE Coating
O-Ring Pilot Port
Vent Port
91
37
21.8
12
5
75
Specifications
Special Operating Pressure -98kPa~0.55MPa
31.5
Special Pilot Pressure MPa 0.49 to 0.6

25.5
Special Back Pressure MPa 0.42 @or Less

Special Media HCL
Orifice Size 4
58
46
Cv. Factor 0.35

Fluid Temperature 0 to 100
Ambient Temperature 0 to 60
Materials of Diaphram PTFE
Main Parts Body New PFA
Port Size Tube Size @O.D. 1/4"
7
15
Available on request!
43
LVQ30-Z11_X33 (HCL Series Double-Diaphragm)
53
Spring Material
SUS + PTFE Coating
45.4 PTFE Coating

59.5 Pilot Port
O-Ring
Vent Port
109
50
32
16.5
6
103
Specifications
29.5
Special Back Pressure MPa 0.42 or Less

23.5
Special Media HCL

Orifice Size mmØ 8
Cv. Factor 1.3
47
59
Fluid Temperature ˚C 0 to 100

Ambient Temperature ˚C 0 to 60
Port Size Tube Size O.D. 3/8"
7
20
44
Series LVQ
53
45.4
59.5
114.5
55.5
37.5
22
6
114
29.5
23.5
47
59
7
20
45
67
Spring Material
SUS + PTFE Coating
75 PTFE Coating
O-Ring
73
Pilot Port
Vent Port Tube Outside Dia. 1/8"
155
50.2
25
10
150
Specifications
Special Back Pressure MPa 0.42 @or Less
Special Media HCL
Orifice Size 16
Cv. Factor 5
41
Fluid Temperature 0 to 100

35
Ambient Temperature 0 to 60
82
70

Port Size Tube Size @O.D. 1/2"
7
20
46
Series LVQH
Manually Operated Chemical Valve

Non-Metallic Exterior
How to Order Valve
LVQH 2 0 Z 07 1
Handle operation type
Body class LQ3 1 Quarter-turn LOTO
Symbol Body class Orifice dia. 2 Multi-turn
2 2 ø4
3 3 ø8
4 4 ø10
5 5 ø16
6 6 ø22
Applicable tubing size

Connecting Body class
Symbol
tubing O.D. 2 3 4 5 6
Inch sizes Variations
07 1/4
Model LVQH20 LVQH30 LVQH40 LVQH50 LVQH60
11 3/8
Connec Orifice dia. ø4 ø8 ø10 ø16 ø22
13 1/2 ting fittin
Sym g size
19 3/4 Type bol 2 3 4 5 6
25 1
Quarter-
turn B A
Multi-
turn B A
Specifications
Model LVQH20 LVQH30 LVQH40 LVQH50 LVQH60
Tubing O.D. Inch 1/4 3/8 1/2 3/4 1
Orifice diameter mmø 4 8 10 16 22
Flow rate Av x 10-6m2 8.4 31.2 45.6 120 192

characteristics Cv 0.35 1.3 1.9 5 8
Withstand pressure (MPa) 1
Operating pressure <flown A to B> –98kPa to 0.5MPa –98kPa to 0.4MPa
Back pressure (MPa) 0.5 or less 0.5 or less
Valve leakage (cm3/min) 0 (with water pressure)
Fluid temperature (¯C) 0 to 150
Ambient temperature (¯C) 0 to 60
LVQH -1 0.12 0.28 0.31 1.14 1.20
Weight (kg)
LVQH -2 0.09 0.19 0.24 0.77 0.88
47
Manually Operated Valve Series LVQH
Quarter-turn LOTO
B A
2 4
Multi-turn (with flow rate adjustment)
B A
B A
Parts list
No. Description Material
1 Actuator section PVDF
2 Body PFA
3 Diaphragm PTFE
4 Nut PFA
5 Flow rate adjustment unit PVDF
48
Series LVQH
Open to counter-clockwise Locked position

¯ (Valve closed)
90
Close to clockwise
Q
Unlocked position
(Valve open)
Rc1/8(NPT1/8)
Sensor (vent) port
ø7
F
K
B A
J
G
L
(H)
N
M
C
A
B
(mm)
Model A B C D F G H J K L M N Q Y
LVQH20-Z -1 25.5 46 31.5 58 79 12 75 21.8 37 5 7 15 21 55
LVQH30-Z -1 28.5 57 34.5 69 103 16.5 103 32 50 6 7 20 25 80
LVQH40-Z -1 28.5 57 34.5 69 108 22 114 37.5 55.5 6 7 20 25 80
LVQH50-Z -1 42 84 48 96 165 25 150 50.2 78.2 10 7 20 38.5 110
LVQH60-Z -1 42 84 48 96 175 32 167 60 88 10 7 20 38.5 110
Multi-turn (with flow rate adjustment)
(mm)
Model S
(Max.S)
LVQH20-Z -2 83
LVQH30-Z -2 113.5
LVQH40-Z -2 119
LVQH50-Z -2 171.5 B A
LVQH60-Z -2 182.5
49
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52
Air Operated Press Regulator
Deionized Water
ls
r t m ateria
d pa
Series SRF Wette
N
N e
e w
w P F FA
B
B
:
ooddyy:
:: P T F E
hrraaggmm
Diiaapph
D
Recommended
maximum flow rate
2 l /min SRF 10
5 l /min SRF 30
20 l /min SRF 50
Inlet side pressure: 0.3 MPa, Fluid: Water
Washing/Assembly Procedure Construction

Washing parts: Body, Valve diaphragm
Integral fitting
and Diaphragm
Diaphragm
Parts PTFE
Degreasing washing
DI water washing
Body
NEW PFA
Alcohol washing Valve diaphragm
PTFE
Assembly
With nut Tube extensions
Inspection
Clean pack
Package
Working atmosphere Class 100
Working atmosphere Class 10000
53
Clean Regulator/Fluoropolymer Type
Series SRF
How to Order
Integral fitting SRF 1 0 S 07

Integral fitting (LQ2) Pilot port thread type
Nil Rc1/8
N NPT1/8
Applicable tubing size (O.D. x I.D.)
Metric size Inch size
Applicable Applicable fitting Applicable Applicable model
Symbol Symbol
tubing size SRF10 SRF30 SRF50 tubing size SRF10 SRF30 SRF50
04 4x3 03 1/8" x 0.086"
06 6x4 05 3/16" x 1/8"
08 8x6 07 1/4" x 5/32"
10 10 x 8 11 3/8" x 1/4"
12 12 x 10 13 1/2" x 3/8"
19 19 x 16 19 3/4" x 5/8"
: Basic size : With reducer : Basic size : With reducer

Note) Tubing size is interchangeable by replacing the reducer insert bushing nut.
With nut SRF 1 0 S 1 S 07 11

Fitting type
Pilot port
Symbol Applicable fitting thread type
Body size 1 LQ1
1 Nil Rc1/8
2 LQ2
3 N NPT1/8
5
Fitting size (IN side) Fitting size (OUT side)

Note 2)
Fitting Applicable model Applicable Note 2) Fitting Applicable model
Symbol Fitting size Symbol
type SRF10 SRF30 SRF50 fitting size type SRF10 SRF30 SRF50
07 2 Nil Same as IN side – – – –
11 3 07 2
LQ1,2
13 4 11 3
LQ1,2
19 5 13 4
25 Note 1) 6 LQ1 19 5
: Basic size : With plug-in reducer 25 Note 1) 6 LQ1
: Basic size : With reducer

Note 1) Fitting type: LQ1 only
Note 2) Refer to How to Order (LQ-S) on page 2 for applicable fittings without nut (LQ type).
Select fittings of the same type and size as the one fitted to the regulator side.
Tube extensions SRF 1 0 T 07

Pilot port thread type
Nil Rc1/8
Body size N NPT1/8
1
3 Tubing size (O.D.)
5 Symbol Tubing size Applicable model
07 1/4" SRF10
11 3/8" SRF30
19 3/4" SRF50
54
Air Operated Pressure Regulator Deionized Water Series SRF
How to Order Fitting for Model with Nut

How to order fitting for model such as Clean Regulator/Series SRF0S, when one nut (including insert bushing) of the nuts is
not attached.
LQ1 E 21 S
One nut (including insert bushing) of the nuts is not
Fitting type attached. Please refer to below Ordering example.
E T
Union elbow Union tee Applicable tubing size
Applicable tubing Applicable tubing
Class No. Reducing Class No. Reducing
size (mm) size (inches)
2 1 6x4 2 A 1/4" x 5/32"
2 2 4x3 2 B 3/16" x 1/8"
SMC
SMC
3 1 10 x 8 2 C 1/8" x 0.086"
3 2 8x6 3 A 3/8" x 1/4"
P U 3 3 6x4 3 B 1/4" x 5/32"
Panel mount union Union 4 1 12 x 10 4 A 1/2" x 3/8"

4 2 10 x 8 4 B 3/8" x 1/4"
5 1 19 x 16 5 A 3/4" x 5/8"
5 2 12 x 10 5 B 1/2" x 3/8"
SMC

SMC
6 1 25 x 22 6 A 1" x 7/8"
6 2 19 x 16 6 B 3/4" x 5/8"
Note 1) Select fittings of the same size as the one fitted to the regulator side.
LQ2 E 21 S
One nut (including insert bushing) of the nuts is not
Fitting type attached. Please refer to below Ordering example.
E T
Union elbow Union tee Applicable tubing size
Applicable tubing Applicable tubing
Class No. Reducing Class No. Reducing
size (mm) size (inches)
2 1 6x4 2 A 1/4" x 5/32"

SMC SMC
2 2 4x3 2 B 3/16" x 1/8"

3 1 10 x 8 2 C 1/8" x 0.086"
3 2 8x6 3 A 3/8" x 1/4"
P U 3 3 6x4 3 B 1/4" x 5/32"
Panel mount union Union 4 1 12 x 10 4 A 1/2" x 3/8"

4 2 10 x 8 4 B 3/8" x 1/4"
5 1 19 x 16 5 A 3/4" x 5/8"
5 2 12 x 10 5 B 1/2" x 3/8"
SMC
SMC
Note 1) Select fittings of the same size as the one fitted to the regulator side.
Ordering example
Tubing size
Tubing size
1/4" x 5/32" SRF10S-1S1107 4x3
SRF10S-1S1107 1
LQ1E3B-S (Union elbow) 1

SMC
SMC
IN side OUT side

LQ1T22-S (Union tee) 1
LQ1E3B-S Note) For shipment, the regulator and fittings

(Union elbow) LQ1T22-S
(Union tee) are individually packaged and dispatched
together in 1 box.
2
55
Series SRF
Specifications
Model SRF10 SRF30 SRF50

Proof pressure 1.0 MPa
Maximum operating pressure 0.5 MPa
Set pressure range 0.02 to 0.4 MPa
Maximum operating pressure (pilot pressure) 0.5 MPa
Fluid Pure water, N2
Ambient and fluid temperature 5 to 60°C
Valve leakage 10 cm3/min or less (fluid: water)
Tubing 0.08 0.24 1.2
Weight
Integral fittings
(kg) 0.10 0.28 1.3
With nut
Particulate Generation Characteristics Flow-through Characteristics

Particle concentration (particles/m l)
Particle diameter: 0.1 μm or larger

400 1000
350 Value of specific resistance to
that of supplied DI water
Resistivity (k액얅m)
300
100
250
200
150
10
100
50
0 1
0 5 10 15 20 25 30 0 5 10 15 20 25 30
Measuring time (min) Time of water flow (min)
Test method and conditions Test method and conditions

Particle counters were installed before and after the test sample. The liquid contact portions were filled with sulphuric acid and left
The amount of particle generated from the sample is determined by the untouched for half an hour.
difference in output values from each counter. After the sulphuric acid was drained, the wetted parts are filled with DI
Flow rate of supplied DI water: 100 ml/min water. The specific resistance of the liquid discharged from the outlet
Model: SRF30 side of the sample was measured and recorded.
Model: SRF30
∗Data provided in this section is just one example of the actually
measured values. Application examples illustrated in this flyer do not
guarantee the result of applicable use of this product.
Pressure Fluctuation (Reference value)
Set pressure Inlet pressure 0.5 MPa

Outlet pressure 0.1 MPa
Fluid: Water
Model: SRF30
0.5
Inlet pressure
0.45
0.4
Pressure (MPa)
0.35
0.3
0.25
0.2
Test circuit/Conditions
0.15
0.1 P1 P2
0.05
Outlet pressure
0
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5
Time (sec)
Pump SRF30-
56
Set pressure Inlet pressure 0.3 MPa

Pressure Characteristics Outlet pressure 0.1 MPa Fluid: Water
SRF10 SRF30 SRF50

Flow rate: 0.1 l/min Flow rate: 1 l/min Flow rate: 3 l/min
0.12 0.12 0.12
Outlet pressure (MPa)

0.11 0.11 0.11
Set point Set point
0.10 0.10 0.10
Set point
0.09 0.09 0.09
0.08 0.08 0.08

0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.0 0.1 0.2 0.3 0.4 0.5 0.6
Inlet pressure (MPa) Inlet pressure (MPa) Inlet pressure (MPa)
Flow Characteristics Inlet pressure: 0.3 MPa Fluid: Water
SRF10 SRF30 SRF50

0.25 0.25 0.25
0.20 0.20 0.20

0.15 0.15 0.15
0.10 0.10 0.10
0.05 0.05 0.05
0.00 0.00 0.00

0 1 2 3 4 5 0 5 10 15 20 0 10 20 30 40 50
Flow rate (l /min) Flow rate (l /min) Flow rate (l /min)
Input/Output Characteristics Inlet pressure: 0.5 MPa Flow rate: 0 l/min (ANR) Fluid: Air
SRF10 SRF30 SRF50

0.5 0.5 0.5
0.4 0.4 0.4

0.3 0.3 0.3
0.2 0.2 0.2
0.1 0.1 0.1
0.0 0.0 0.0

0.0 0.1 0.2 0.3 0.4 0.5 0.0 0.1 0.2 0.3 0.4 0.5 0.0 0.1 0.2 0.3 0.4 0.5
Pilot pressure (MPa) Pilot pressure (MPa) Pilot pressure (MPa)
57
Series SRF
Construction/SRF10, 30
Integral fitting With nut
y e t
t
i r y r
!4 u i u
!3 q o
o q
!0 !1
!1 !0
!2 w !2 w
!3
!4
!5
With reducer
Tube extensions
e
t
y
r
i
u
o q
!1 !0
!2 w
Parts list
No. Description Material Note
1 Body New PFA
2 Valve guide PVDF
3 Bonnet PPS
4 Spacer PVDF
5 Pilot diaphragm FKM
6 Diaphragm support PP
7 Withstand pressure diaphragm B FKM
8 Diaphragm PTFE
9 Valve diaphragm PTFE
10 Withstand pressure diaphragm A FKM
Stainless No. Description Material Note
11 Spring holder Fluoro resin coating 13 Insert bushing New PFA
steel 304
Stainless 14 Nut New PFA
12 Valve spring steel 304 Fluoro resin coating
15 Collar New PFA
5
58
Construction/SRF50
SRF50 e
Integral fitting With nut
y r
e t
t u
r y
i
u w
!5 i
q
!4
!1 !1
o o
!0 !3 !3
!2 !0
w w
!2
!4
!5
!6
With reducer
Tube extensions
e
t
r
y
u
i q
o !1
!0
!3
!2 w
Parts list
No. Description Material Note
1 Body New PFA
2 Valve guide PVDF
3 Bonnet PPS
4 Spacer PVDF
5 Pilot diaphragm FKM
6 Diaphragm support PP
7 Withstand pressure diaphragm B FKM
8 Diaphragm PTFE
9 Valve diaphragm PTFE
10 Withstand pressure diaphragm A FKM
Stainless
11 Spring holder Fluoro resin coating
steel 304
Stainless No. Description Material Note
12 Valve spring 1 Fluoro resin coating 14 Insert bushing New PFA
steel 304
Stainless 15 Nut New PFA
13 Valve spring 2 Fluoro resin coating
steel 304 16 Collar New PFA
59
Series SRF
Dimensions/SRF10
Integral fitting
IN OUT
54
26
5.5
32
HEX.18 (81)
23
Pilot port
Rc, NPT1/8
12 R
48
32
40
SMC
4-
3.
23
5
(M
32
ou
With nut
nt
in
g
ho
ø1/4"
le
)
IN OUT
54
26
5.5
A1 A2
B1 B2
SRF10
23
Pilot port
Model A1 A2 B1 B2
Rc, NPT1/8 SRF10S-1S07 31 48
31 48
SRF10S-1S0711 28 51
12 R
SRF10S-1S11 28 51
28 51
SRF10S-1S1107
48
32
40
31 48
1
SRF10S-2S07 28 52
SMC 28 52
SRF10S-2S0711 27 55
SRF10S-2S11 27 55
23 27 55
SRF10S-2S1107 28 52
Tube extensions
4-
3.
5
(M
2"
ou
5/3
nt
in
g
IN OUT
ho
54
le
)
1/4
"
5.5
26
30 32 30
23
Pilot port
12 R
Rc, NPT1/8
48
32
40
1
SMC
4
ho -3.5
23 le (M
) o un
tin
g
60
Dimensions/SRF30
Integral fitting
67.7
IN OUT
32.3
5.5
52
HEX.24 (112)
41.7
Pilot port
R 12 Rc, NPT1/8
75
52
64
1
SMC
4-
5.
With nut 41.7

5
(M
52
ou
nt
in
g
ho
ø3/8"
le
)
67.7
IN OUT
32.3
A1 A2
5.5
B1 B2
41.7 SRF30
Model A1 A2 B1 B2
Pilot port
SRF30S-1S11 35 58
35 58
R 12 Rc, NPT1/8 SRF30S-1S1113 34 62
SRF30S-1S13 34 62
34 62
SRF30S-1S1311
75
52
64
35 58
1
SRF30S-2S11 34 63
34 63
SMC SRF30S-2S1113 32 65
SRF30S-2S13 32 65
32 65
4-
SRF30S-2S1311 34 63
5
.5
41.7
Tube extensions
(M
ou
nt
ing
"
1/4
ho
le)
67.7
IN OUT
32.3
5.5
3/8
"
30 52 30
41.7
Pilot port
R 12 Rc, NPT1/8
75
52
64
1
SMC
41.7 4-5.5 (Mounting hole)
8
61
Series SRF
Dimensions/SRF50
Integral fitting
IN OUT
91
42.3
6
100
HEX.35 (178)
80
Pilot port
Rc, NPT1/8
R 12
132
100
116
1
2
SMC
4-
6.
5
80 (M
ou
nt
100 ing
With nut ho
le)
ø19
IN OUT
91
42.3
A1 A2
6
B1 B2
80
Pilot port
R 12 Rc, NPT1/8
132
100
116
SRF50
1
SMC
Model A1 A2 B1 B2
SRF50S-1S19 58 91
58 91
4- SRF50S-1S1925 55 98
6.
80 5 SRF50S-1S25 55 98
(M
ou 55 98
nt
ing SRF50S-1S2519 58 91
Tube extensions ho SRF50S-2S19 56 56 95 95
le)
16
IN OUT
91
42.3
19
6
38 100 38
80
Pilot port
R 12 Rc, NPT1/8
132
100
116
1
SMC
4-
6.
5
80 (M
ou
nt
ing
ho
le)
62
Series SRF
Fitting and Special Tools
Fittings
Changing tubing sizes
The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing.
Parts composition
Tubing O.D. Component parts
Body
Metric sizes Inch sizes Nut Insert Collar (insert assembly)
class
4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" Basic size Yes Yes No
2 — — — — — — — Reducer type Yes Yes Yes
3 — — — — — — —
5 — — — — — — — —
Changing the tubing size

Example) Changing the tubing from an O.D. 1/4" to O.D. 1/8" in body class 2.
Prepare an insert bushing and nut for O.D. 1/8" tubing (LQ-2U03) and change the tubing size.
(Refer to the section on How to order fitting parts.)
Note) Tubing is sold separately.
Insert bushing
Insert bushing
LQ-2B07
Nut LQ-2B03
LQ-2N07 Nut
LQ-2N03
Tubing Collar
Tubing
Tubing O.D. 1/4"
LQ-2U07
Tubing O.D. 1/8"
(Basic size)
LQ-2U03
How to order fitting parts (Reducer type)
∗ Type U is recommended when changing the tubing size.

LQ 2 U 03
Tubing size
Applicable model
Body class Symbol Tubing O.D. Body class
SRF10 SRF30 SRF50
Applicable model
Symbol Body 03 1/8"
class SRF10 SRF30 SRF50 04 ø4
2 2
05 3/16" 2
3 3
06 ø6
5 5
07 1/4"
06 ø6
Type of parts 08 ø8
Symbol Parts 10 ø10 3
U Nut & Insert bushing 07 1/4"
B Insert bushing 11 3/8"
N Nut 12 ø12
13 1/2" 5
19 3/4", ø19
63
Applicable Fluids
The wetted part material and fluid compatibility check list
Compatibility
Fluid
PFA PTFE
(Body) (Diaphragm)
Acetone Note 1)
Ammonium hydroxide
Isobutyl alcohol Note 1)
Isopropyl alcohol Note 1)
Hydrochloric acid
Hydrogen peroxide
Ethyl acetate Note 1)
Butyl acetate Note 1)
Nitric acid
DI water
Sodium hydroxide
Nitrogen gas
Toluene Note 1)
Hydrofluoric acid
Sulfuric acid
Phosphoric acid
Table symbols
: The fluid is compatible with the material, and can be used with the products.
: In some cases even when the fluid is compatible with the material, it may still permeate from the components
and effect other materials.
Note 1) Since static electricity may be generated, implement suitable countermeasures.
• SMC is not responsible for its accuracy and any damage happened because of this data.
64
Series SRF
Safety Instructions

Warning

specific system must be based on specifications or after analysis and/or tests to meet your specific
the suitability of all items specified. Referring to the latest catalogue information with a view to giving
Assembly, handling or maintenance of machinery and equipment should be performed by trained and
Refer to ISO4414, JIS B 8370 (pneumatic system axiom), labor health and safety laws and other
safety regulations.
65
Series SRF
Clean Regulator/Fluoropolymer Type/Precautions 1
Be sure to read before handling.
Design and Selection Mounting
Warning Caution
1. Confirm the specifications. 1.Open the sealed package inside a clean
Give careful consideration to operating conditions such as the room.
application, fluid and environment, and use within the operat- This product is packed in sealed double packaging in a clean
ing ranges specified in this catalogue. room. It is recommended that the inside packaging is opened
2. Fluids in a clean room or in other clean environments.
Operate after confirming the compatibility of the product's 2. Ensure space for maintenance
component materials with fluids, using the check list on page Ensure the necessary space for maintenance activities.
15. Contact SMC regarding fluids other than those in the check
list. 3. Flush out the piping.
Connect these products to piping only after it has been flushed
3. Residual pressure relief is not possible when and cleaned properly. If debris or scale etc. remains in the
the inlet pressure is released. piping, this can cause faulty operation or failure.
In the case of series SRF, when the inlet pressure is released 4. Confirm the mounted orientation of the prod-
with the condition that the pressure at outlet side is
maintained, the residual pressure cannot be released. If it will uct.
be necessary to eliminate pressure from the outlet side, a If mounted backwards, the device will not operate properly.
5. When piping fittings to the pilot port, use
Caution fittings with resin thread.
Fittings with metal thread may damage the pilot port.
1. Pressure increase in the closed circuit.
Series SRF allows 10 cm3/nm of valve leakage from inlet side Operating Air Supply
to outlet side. The outlet pressure may increase when used in
a closed circuit. When closing the outlet side, use a bypass
circuit as an opening circuit. Warning
2. Depends on operating conditions, oscillation 1. Use clean air.
(buzz) may occur even when used within the Do not use compressed air which includes chemicals,
specification range detailed in this catalogue. synthetic oils containing organic solvents, salts or corrosive
Consult SMC for details. gases, etc., as this can cause damage or malfunction.
Caution
1. When adjusting the pilot pressure, the SMC
precision regulator Series IR/ARP, is recom-
mended.
66
Series SRF
Clean Regulator/Fluoropolymer Type/Precautions 2
Pressure Adjustment Maintenance
Warning Warning
1. Check the inlet, outlet, and pilot pressure 1. Before removing equipment or compressed
indicators while undertaking pressure and air supply/exhaust devices, shut off the air
flow settings. and power supplies, and exhaust com-
Pressures over the regulated range may cause damage to the pressed air from inside the system. Further,
internal parts. when restarting equipment after remounting
or replacement, first confirm safety and then
check the equipment for normal operation.
2. After using chemicals or solvent, remove
Caution any residual chemicals using de-ionized
water and air before the next operation.
1. Without consumption of the outlet side flow,
3. Do not disassemble the product. Products
the outlet pressure will not decrease along
which have been disassembled cannot be
with the pilot pressure decrease.
guaranteed.
As this product is not fitted with a relief mechanism, without
consumption of the outlet side flow, the outlet pressure will not If disassembly is necessary, consult SMC.
decrease along with the pilot pressure decrease.
2. Confirm the inlet pressure.
Set the outlet pressure to no more than 80% of the supply
pressure.
3. When the inlet pressure is fluctuating, take
caution to the setting value of the outlet
pressure.
When the setting value of the outlet pressure is over the inlet
pressure, the outlet pressure cannot be stabilized.
4. When adjusting the flow, set a throttle on the
outlet side of the product.
Without a throttle, the stable adjustment of the flow cannot be
achieved.
5. Do not use fluid containing solid matter.
This will cause faulty operation.
67
68
Series LVR
Air Operated Pressure Regulator Chemicals Flow Control Valve
Difference in diaphragm diameter

provides FAST and PRECISE
As opposed to diaphragm seals, a pressure regulation under changing
traditional piston seal design provides inlet P conditions
precise linear valve movement
Tongue and groove seal of

diaphragm to LVR body
provides secure construction
and long service life
Flare LQ3 fluid ports
Robust springs allow more

stable control of pressure
under high back pressure
conditions
Exhaust/Leak detection port
• High-purity Fluoropolymer swept flow path

• Fluid operating temperature to 100˚C
continuous
• LQ3 Flaretype connections standard
• Available in 3 body sizes
How to Order Specifications
20 40 50
LVR 4 0-Z 11 N Set pressure range MPa 0.02 ~ 0.4
Max. pilot pressure MPa 0.5
Body Class Max. operating pressure MPa 0.5
Tube Size DI Water - Chemistry
2 1/4” Allowable media
4 3/8”, 1/2” 07 1/4” Fluid temperature ˚C 0 ~ 100 continuous
5 3/4” 11 3/8” Ambient temperature ˚C 0 ~ 60
13 1/2” Diaphragm PTFE
Material
19 3/4” Body HP PFA
69
Air Operated Pressure Regulator Chemicals Series LVR
Application Examples
Example 1 Example 2
Before
ITV Series
Electro-pneumatic
Regulator
The flow rate
decreases as the
manual type regulator
pressure is lowered.
AR Series U.P.
Manual
After Regulator LVR
Infiniflow
Flow Sensor
LVR
Chemistry
Example 3 Example 4
LVR Controller
U.P. 1
ITV Series
LVR Electro-pneumatic
U.P. 2 Regulator
LVR
LVR
U.P. 3
Densitometer
Chemistry
LVR
U.P. 4
Chemistry
70
Series LVR
LVR20-Z07N
4 x Ø7
Mounting Holes A-A
Pilot Port
1/8 NPT
40
56
68
A A
27
40
(86)
LQ3 20 Series Fitting Vent Port

M5
IN
49.3
20.1
Vent Port
8.1
LQ3 20 Series Fitting

M5
71
LVR40-Z11N
4 x ø7
Mounting Holes A-A
Pilot Port
1/8" NPT
82.5
100
115
A A
64.5
82.5
(150.5)
Vent Port
M5
89
33
LQ3 30 Series
14
Fitting
LQ3 30 Series Tube Outside Vent Port
Fitting Dia. 3/8" M5
Tube Outside
Dia. 3/8"
72
Series LVR
LVR40-Z13N
73
LVR50-Z19N
4 x ø7
Mounting Holes
A-A
Pilot Port
1/8" NPT
135
120
100
A A
80
100
(189)
Vent Port
M5
117.5
IN
45
22
LQ3 50 Series LQ3 50 Series Vent Port

Fitting Fitting M5
Tube Outside Tube Outside
Dia. 3/4" Dia. 3/4"
74
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77
78
Digital Flow Switch
for Deionized Water
and Chemicals
Wetted
HP440J
Series PF2D
0.4 to 4 l/min (PF2D504) Tube
1.8 to 20 l/min (PF2D520)
Three
4.0 to 40 l/mintypes HP451J
of flow) range
(PF2D540
Swept flow characteristics

Tapered side seal minimizes dead volume
to reduce accumulation of liquid pool.
Particle generation of 3 particles/cc Swept flow characteristics (reference)
or less 1000
Ratio of resistance [kΩ· m]
(average number) Fill the flow path with

sulfuric acid and leave it
Karman vortex eliminates moving parts 100 for 30 minutes.
and allows low particle generation. After disposing the
Particle characteristics (reference) sulfuric acid, flush the
10 flow path out with
deionized water and
Particle ratio [number/cc]
50
measure the resistance
1 rate of the fluid that is
0 5 10 15 20 25 30 discharged from the
2 or 3 particles/cc
Duration of flow [min] downstream side.
0
0 10 20 30 40 50 60 70
Tube
Duration of flow [min]
The data was obtained by performing an actual 10 minutes’

supersonic cleaning using an average 16MΩ·cm of de-ionised
water at class 10000 clean room (1l/min flow rate).
The diameter of the measured particles ranges from 0.1 to 0.5μm.
The flow rate used during measuring is 100cc/min.
Processing chart for series PF2D

Body Vibration reducing seals
Remote type sensor unit Malfunctions (output errors) that
Assembly would otherwise be caused by
Common environment Sensor vibration are prevented.
Supersonic cleaning
4 types of outputs available
With button operation, 4 types of output specification
Double-packing Drying combinations are available.
1 2 3 4
Clean room class 1000
Accumulated Accumulated
Output 1 Switch output Switch output
pulse output pulse output
Shipment
Accumulated Accumulated
Output 2 Switch output Switch output
pulse output pulse output
79
For Deionized Water and Chemicals
Digital Flow Switch
Series PF2D
How to Order
Remote Type
Sensor Unit PF2D5 20 13 1
Flow rate range
04 0.4 to 4l/min
20 1.8 to 20l/min Output specifications
40 4 to 40l/min 1 Output for display unit Note 1) + analogue output (1 to 5V)
Port size: (inch) 2 Output for display unit Note 1) + analogue output (4 to 20mA)
Note 1) Output for the display units of PF2D 300/301
11 3/8 PF2D504
13 1/2 PF2D520
19 3/4 PF2D540
Specifications for Sensor Unit
Model PF2D504 PF2D520 PF2D540

Measured fluid Liquid not to corrode nor erode de-ionised water and/or Teflon®. Viscosity: 3mPa·s (3cP) or less
Detection style Karman vortex
Flow rate measuring range 0.4 to 4l/min 1.8 to 20l/min Note 1) 4 to 40l/min
Operating pressure range Note 2) 0 to 1MPa 0 to 0.6MPa
Proof pressure Note 3) 1.5MPa 0.9MPa
Operating fluid temperature 0 to 90°C
Linearity Note 4) ±2.5%F.S. or less (at 25°C water)
Repeatability ±1%F.S. or less (at 25°C water)
Temperature characteristics ±5%F.S. or less (0 to 50°C)
Pulse output, N channel, open drain, output for display unit PF2D 300/301
Pulse output
(Specifications: Maximum load current of 10mA; Maximum applied voltage of 30V)
Output Voltage output Note 5) 1 to 5V within the flow rate range
specifications Analogue Linearity: ±2%F.S. or less, allowable load resistance: 100kΩ or more
output Current output Note 6) 4 to 20mA within the flow rate range
Linearity: ±2%F.S.or less, allowable load resistance: 300Ω or less with 12VDC, 600Ω or less with 24VDC
Power supply voltage 12 to 24VDC (ripple ±10% or less)
Current consumption 20mA or less (without load)
Enclosure IP65
Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C in stock (no freeze nor condensation)
Environmental
resistance
Voltage resistance 1000VAC for 1 min between external terminals and case
Insulation resistance 50MΩ or more (500VDC) between external terminals and case
Vibration resistance 4.9m/s2
Impact resistance 490m/s2 to X,Y,Z directions 3 times for each
Noise resistance 1000Vp-p, Pulse width: 1μs, Standing: 1ns
Weight 140g (without lead wire) 225g (without lead wire)
Port size 3/8 inch tube 1/2 inch tube 3/4 inch tube
Wetted material Body: new PFA, Sensor: new PFA, Tube: super PFA
Note 1) 1.6 to 20l/min (0.1MPa) with viscosity of 1mPa·s (1cP) or less
Note 2) The operating pressure range drops according to the fluid temperature. See attached graph. 1.0
Operating pressure [MPa]
Note 3) 1.5 times of the maximum operating pressure and varying with fluid temperature. PF2D504/520
Note 4) The system accuracy when combined with PF2D30.
Note 5) When the voltage output is selected.
Note 6) When the current output is selected.
Note 7) The sensor unit is conformed to CE mark. 0.5
PF2D540
0 20 40 60 80 90 100
Fluid temperature [°C]
80
Digital Flow Switch for Deionized Water and Chemicals Series PF2D
How to Order
Remote Type
Display Unit PF2D30 0 A M
Unit specification
Nil With unit switching function
M Fixed SI unit Note 1)
Output specifications Note 1) Fixed units: Real-time flow rate: l/min
Accumulated flow: l
0 NPN open collector 2 outputs
1 PNP open collector 2 outputs
Panel mounting
Specifications for Display Unit
Model PF2D300/301
Flow rate measurement range Note 1) 0.25 to 4.5l/min 1.3 to 21.0l/min 2.5 to 45l/min
Set flow rate range Note 1) 0.25 to 4.5l/min 1.3 to 21.0l/min 2.5 to 45l/min
Minimum setting unit Note 1) 0.05l/min 0.1l/min 0.5l/min
Accumulated pulse flow rate exchange
0.05l/pulse 0.1l/pulse 0.5l/pulse
value (Pulse width: 50ms) Note 1)
Note 2) Real-time flow rate l/min, gal (US)/min
Display
units Accumulated flow l, gal (US)
Accumulated flow range 0 to 999999l
Linearity Note 3) ±2.5%F.S. or less
Repeatability ±0.5%F.S. or less
±1%F.S. or less (15 to 35°C)
Temperature characteristics
±2%F.S. or less (0 to 50°C)
Current consumption 60mA or less
Weight 45g
Maximum load current: 80mA
Note 4)
Output specifications
NPN open collector Internal voltage drop: 1.5V or less (with load current of 80mA)
(PF2D300) Maximum applied voltage: 30V
2 outputs
Switch output
Maximum load current: 80mA
PNP open collector
Internal voltage drop: 1.5V or less (with load current of 80mA)
(PF2D301)
2 outputs
Accumulated pulse output NPN open collector or PNP open collector (same as switch output)
Enclosure IP40
Operating temperature range Operating: 0 to 50°C, Stored: –25 to 85°C (no freezing nor condensation)
Environmental
resistance
Voltage resistance 1000VAC for 1 min between external terminals and case
Insulation resistance 50MΩ or more (500VDC Mega) between external terminals and case
Vibration resistance 10 to 500Hz at whichever is smaller: 1.5mm amplitude or 98m/s2 acceleration in X, Y, Z directions for 2 hrs each
Impact resistance 490m/s2 to X, Y, Z directions 3 times for each
Noise resistance 1000Vp-p, Pulse width: 1μs, Standing: 1ns
Indicator light 3-digits 7-segment LED
Status LED’s ON: when light is on, OUT1: Green; OUT2: Red
Power supply voltage 12 to 24VDC (ripple ±10% or less)
Response time 1sec. or less
Hysteresis Hysteresis mode: adjustable (can be set from 0) Window comparator mode Note 5): fixed (3 digits)
Note 1) The value varies depending on set flow range
Note 2) For digital flow switch with unit switching function. (Fixed SI unit [l/min or l] will be set for switch types without unit switching function.)
Note 3) The system accuracy when combined with PF2D5.
Note 4) Switch output and accumulated pulse output can be selected using the control button operation during initial setting.
1 2 3 4
Output 1 Switch output Switch output Accumulated pulse output Accumulated pulse output
Output 2 Switch output Accumulated pulse output Switch output Accumulated pulse output
Note 5) Window comparator mode: Since hysteresis (H) will reach 3 digits, keep P_1 and P_2 or n_1 and n_2 apart by 7 digits more. (In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)
Note 6) The display unit is conformed to CE mark.
81
Series PF2D
Flow Characteristics (Pressure Characteristics)

PF2D504 PF2D520 PF2D540
0.040 0.035
0.030
0.035
0.030
Pressure loss [MPa]
Pressure loss [MPa]
Pressure loss [MPa]

0.025
0.030
0.025
0.020 0.025
0.020
0.015 0.020
0.015
0.015
0.010
0.010
0.010
0.005 0.005
0.005
0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 0 2 4 6 8 10 12 14 16 18 20 0 5 10 15 20 25 30 35 40

Flow rate (l/min) Flow rate (l/min) Flow rate (l/min)
Construction
PF2D504/520 Parts list

Number Parts Material
1 Body New PFA
2 Sensor New PFA
3 Tube Super PFA
4 Housing A PPS
5 Housing B PPS
6 Housing C PPS
7 Bushing POM
8 Cap PPS
9 Gasket FKM
10 O-ring FKM
11 Thread SUS304
12 Lead wire PVC
PF2D540
82
Dimensions: Separate Type Sensor Unit

PF2D504-11/520-13
Internal circuits and wiring examples
1
to are terminal numbers.
Display
Sensort (PF2D30/31)
Brown
2 6
52
Analogue Switch
Main circuit
Main circuit
output
Load 4 8 output
+ 12 to
White or
18
Pluse 24VDC
3 7 –
Black output
1 5
176 Blue
70
60 PF2D5--1
40
15 Display
Sensor (PF2D30/31)
Brown
2 6
Analogue Switch
Main circuit
Main circuit
output
Load 4 8 output + 12 to
White or
øA
24VDC
62
52
42
3 7 Pluse –
Black
output
Model A 1 5
Blue
PF2D520 12.7
PF2D504 9.52
PF2D5--2
4-ø4.5
PF2D540-19 Wiring
1
Brown (1) DC(+)

Main circuit
Black (4) OUT
White (2) Analogue output

62
Blue (3) DC(–)

25
∗ Use this sensor by connecting to SMC remote type

Flow direction display unit Series PF2D3.
186
86
78
56
15
ø19.05
72
62
52
4-ø4.5
Analogue output
20 5
current [mA]
voltage [V]
4 1
0 0.4 4 (in case of PF2D504)

1.8 20 (in case of PF2D520)
4 40 (in case of PF2D540)
Flow rate [l/min]
83
Series PF2D
Dimensions: Separate Type Display Unit

PF2D30 01-A
Panel mounting type Internal circuits and wiring examples
to are terminal numbers.
40.3 41.8 OUT2

40 NC
4.3 8 Load
Sensor 4
OUT1
Black
Main circuit
3 7 Load
SMC FLOW SWITCH Brown
2 6 +
35.8
Blue
40
A
UNIT
1 5 –
RESET
12 to 24VDC
SET
Series
PF2D5 PF2D300-A(-M)
3 x 7.2(=21.6) 8-M3
Panel fitting dimension
6.4 36 +0.5
0 OUT2
NC
8 Load
Sensor 4
OUT1
Black
Main circuit
1 2 3 4
3 7 Load
+0.5
Brown
0
6 +
19.4
2
36
Blue
1 5 –
5 6 7 8
12 to 24VDC
Series
PF2D5 PF2D301-A(-M)
View A The applicable panel thickness is Do not connect the white wire of the sensor to of the
1 to 3.2mm. display unit.
Terminal block number
1 2 3 4
1 2 3 4
5 6 7 8
5 6 7 8
84
Functions/PF2D Refer to the operation manual how to set and to operate.
Flow rate measurement selection Output types

Real-time flow rate and accumulated flow rate can be selected. Real-time switch output, accumulated switch output, or
Up to 999999 of flow rate value can be accumulated. accumulated pulse output can be selected as an output type.
Unit switching Real-time switch output ( )

• Hysteresis mode
Display Real-time flow rate Accumulated flow ON

l/min l YES
OFF
GPM gal (US) P-2 P-1
Real-time flow rate →
GPM = gal (US)/min "P" • Window comparator mode
H : Hysteresis
Note ) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the
type without the unit switching function. H H
ON
NO OFF
Flow rate measuring unit confirmation P-1 P-2
This function allows to confirm the accumulated flow rate Output
OUT1 mode • Hysteresis mode
when real-time flow rate is selected and to confirm the ON
∗ For OUT2 is the same. YES
real-time flow rate when accumulated flow rate is selected. OFF
n-2 n-1
Error correction • Window comparator mode
Note1) H : Hysteresis
LED display Contents Solution "n" H H
ON
A current of more than Check the load and wiring NO OFF
80mA is flowing to OUT1 for OUT1 n-1 n-2
The setting data has Perform the RESET Note1) Output mode is set to inverted output at the factory before shipment.
changed for whatever operation, and reset all
reasons. data again.
The flow rate is over the Reduce the flow rate until Accumulated switch output ( )
flow rate measurement it is within the flow rate range,
range. using an adjustment valve. ON
"P"
OFF
P-3
Accumulated flow rate →
Key lock
This function prevents incorrect operations such as
Output
changing the set value accidentally. OUT1 mode
Accumulation clearance ON
This is to clear the accumulated value.
Note 1) OFF
"n" n-3
Accumulated flow rate →
Note1) Output mode is set to inverted output at the factory before shipment.
Accumulated pulse output ( )

"P" ON
OFF
Output
OUT1 mode 50msec
ON
Note 1) OFF
"n"
Note1) Refer to the specifications of display unit for the flow rate value per pulse.
85
Applicable Fluid
Compatibility checklist: materials of digital flow switch for deionized
water and chemicals and fluid
Acetone
Ammonium hydroxide
Isobutyl alcohol ⫻
Isopropyl alcohol
Hydrochloric acid
Ozone ⫻
Hydrogen peroxide Concentration 50% or less 50°C or less
Ethyl acetate
Butyl acetate
Nitric acid (except fuming nitric acid) Concentration 10% or less
Deionized water
Sodium hydroxide ⫻
Ultra de-ionised water
Toluene
Hydrofluoric acid Concentration 50% or less
Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less
Phosphoric acid Concentration 30% or less
Note 1) The material and fluid compatibility check list provides reference values as a guide only.
Note 2) Consult SMC for made to order specifications such as: Teflon coated threads to prevent rust/corrosion when in contact with
strong acid or alkali.
· Compatibility is indicated for fluid temperatures at 100°C or less. Table symbols : Can be used

· Consult SMC regarding fluids other than the above. : Can be used under
· Consult SMC regarding operating conditions. certain conditions
· The product is not explosion proof. Please be sure to take measures to guard it from explosive ⫻ : Cannot be used
gas when using explosive fluid.
86
Series PF2D
Safety Instructions
equipment damage. These instructions indicate the level of potential hazard by a
label of "Caution", "Warning" or "Danger". To ensure safety, be sure to observe
these safety practices.

Warning

Since the products specified here are used in various operating conditions, their compatibility with the
requirements. The expected performance and safety assurance will be the responsibility of the person
who has determined the compatibility of the system. This person should continuously review the
suitability of all items specified, referring to the latest catalogue information with a view to giving due
consideration to any possibility of equipment failure when configuring a system.
Assembly, handling or repair of systems should be performed by trained and experienced operators.
4. To promote safe operation, be sure to observe company standard and legal
regulations, etc.
Refer to ISO4414, JIS B 8370 (pneumatic system axiom), labour health and safety laws and other safety
regulations.
87
Series PF2D
Specific Product Precautions 1
Be sure to read before handling. Refer to page 8 for safety instructions.
Design and Selection Design and Selection
Warning Caution
1. Operate the switch only within the specified 1. Data of the flow switch will be stored even
voltage. after the power is turned off.
Use of the switch outside the range of the specified voltage can Input data will be stored in EEPROM so that the data will not be
cause not only malfunction and damage of the switch but also lost after the flow switch is turned off. (Data can be rewritten for
electrocution and fire. up to one million times, and data will be stored for up to 20
years.)
2. Do not exceed the maximum allowable load
specification. Mounting
A load exceeding the maximum load specification can cause
damage to the switch. Warning
3.Do not use a load that generates surge voltage. 1.Monitor the flow direction of the fluid.
Although surge protection is installed in the circuit at the output Install and connect piping so that fluid flows in the direction of
side of the switch, damage may still occur if a surge is applied the arrow indicated on the body.
repeatedly. When a surge generating a load such as a relay or
solenoid is directly driven, use a type of switch with a built-in 2. Remove dirt and dust from inside the piping
surge absorbing element. using an air blower before connecting piping
4.Be sure to verify the applicable fluid. to the switch.
The switch does not have an explosion proof rating. To prevent 3.Do not drop or bump.
possible fire hazard, do not use with flammable gases or fluids.
Do not drop, bump, or apply excessive impacts (490m/s2) while
5.Monitor the internal voltage drop of the switch. handling. Although the external body of the switch (switch case)
When operating below a specified voltage, it is possible that the may not be damaged, the inside of the switch could be
load may be ineffective even though the pressure switch damaged and cause a malfunction.
function is normal. Therefore, the formula below should be 4.Hold the body of the switch when handling.
satisfied after confirming the minimum operating voltage of the
The tensile strength of the cord is 49N. Applying a greater
load.
pulling force on it can cause a malfunction. When handling, hold
Supply – Internal voltage > Minimum operating the body of the switch – do not dangle it from the cord.
voltage drop of switch voltage of load 5. Do not use until you can verify that equip-
ment can operate properly.
6. Use the switch within the specified flow rate Following mounting, repair, or retrofit, verify correct mounting by
measurement and operating pressure. conducting suitable function and leakage tests after piping and
Operating beyond the specified flow rate and operating power connections have been made.
pressure can damage the switch. Avoid especially the 6. Never mount a switch in a place that will be
application of pressure above specifications through a water
hammer.
used as a scaffold during piping.
<Examples of pressure reduction measures> 7. Be sure to allow straight pipe length that is
a) Use a device such as a water hammer relief valve to slow minimum 8 times the port size upstream and
the valve's closing speed.
b) Absorb impact pressure by using an accumulator or elastic downstream of the switch piping.
piping material such as a rubber hose. When abruptly reducing the size of piping or when there is a
c) Keep the piping length as short as possible. restriction such as a valve on the inlet side, the pressure
distribution in the piping changes and makes accurate
7. Design the system so that the fluid always measurement impossible. Therefore, flow restriction measures
fills the detection passage. such as these should be implemented on the outlet side of the
Especially for vertical mounting, introduce the fluid from the switch.
bottom to the top. When used with the outlet side open, be careful of the
8. Operate at a flow rate within the flow rate cavitation that is prone to occur.
measurement range.
If operated outside of the flow rate measurement range, the
Karman vortex will not be generated and normal measurement
will not be possible.
9.Never use flammable fluids and/or penetrable
fluids.
These can cause fire, explosion or corrosion.
∗Refer to MSDA (material safety data sheet) when using
chemicals.
88
Series PF2D
Wiring Operating Environment
Warning Warning
1. Verify the colour and terminal number when 1.Never use in the presence of explosive gases.
wiring. The switches do not have an explosion proof rating. Never use
Incorrect wiring can cause the switch to be damaged and in the presence of an explosive gas as this may cause a serious
malfunction. Verify the colour and the terminal number in the explosion.
instruction manual when wiring. 2.Mount switches in locations where there is no
2. Avoid repeatedly bending or stretching the vibration greater than 98m/s2, or no impact
lead wire. greater than 490m/s2.
Repeatedly applying bending stress or stretching force to the 3. Do not use in an area where surges are
lead wire will cause it to break.
generated.
3.Confirm proper insulation of wiring. When there are units that generate a large amount of surge in
Make sure that there is no faulty wiring insulation (contact with the area around pressure switches, (e.g., solenoid type lifters,
other circuits, ground fault, improper insulation between high frequency induction furnaces, motors, etc.) this may cause
terminals, etc.). Damage may occur due to excess current flow deterioration or damage to the switches' internal circuitry. Avoid
into a switch. sources of surge generation and crossed lines.
4.Do not wire in conjunction with power lines or 4. Switches are not equipped with surge

high voltage lines. protection against lightning.

Wire separately from power lines and high voltage lines, Flow switches are CE compliant; however, they are not
avoiding wiring in the same conduit with these lines. Control equipped with surge protection against lightning. Lightning
circuits including switches may malfunction due to noise from surge protection measures should be applied directly to system
these other lines. components as necessary.
5.Do not allow loads to short circuit. 5. Avoid using switches in an environment
Although switches indicate excess current error if loads are where the likelihood of splashing or spraying
short circuited, all incorrect wiring connections such as power of liquids exists.
supply polarity cannot be protected. Take precautions to avoid
Switches are dustproof and splashproof; however, avoid using
incorrect wiring.
in an environment where the likelihood of heavy splashing or
Usage spraying of water and/or oil exist. Since the display unit of the
remote type switches featured here is not dust or splash proof,
Warning the use in an environment where water and/or oil splashing or
spraying exists must be avoided.
1. When using a switch for high temperature
fluid, the switch itself also becomes hot due Maintenance
to the high temperature fluid. Avoid touching
the switch directly as this may cause a burn. Warning
1. Perform periodical inspections to ensure
proper operation of the switch.
Unexpected malfunctions may cause possible danger.
2. Take precautions when using the switch for
an interlock circuit.
When a pressure switch is used for an interlock circuit, devise a
multiple interlock system to prevent trouble or malfunctioning.
Verify the operation of the switch and interlock function on a
regular basis.
3. Do not disassemble or perform any conver-

sion work on flow switches.

4. Check the following during regular main-
tenance to avoid damage and loss because
of chemicals.
a) Do not touch the remaining chemicals in piping and/or digital
flow switch.
b) Verify the names and characteristics of using chemicals and
treat them accordingly.
89
Series PF2D
Measured Fluid Others
Warning Warning
1.Check regulators and flow adjustment valves 1. Since switch output remains OFF while a
before introducing the fluid. message is displayed after the power is
If pressure or flow rate beyond the specified range are applied turned on, start measurement after a value is
to the switch, the sensor unit may be damaged. displayed.
2. Be sure to take preventive measures not to 2. Perform settings after stopping control sys-

expose the switch to inflammable and / or tems.

explosive gases when using inflammable fluid. When the switch's initial setting and flow rate setting are
3. Place the filter on the upstream side when performed, output maintains the condition prior to the settings.
Output turns OFF when the switch's initial setting and flow rate
extraneous material can be infected. setting are preformed.
Accurate measurement cannot be fulfilled when extraneous
material is adherent to the vortex generator and the vortex
detector of the switch.
Set Flow Rate Range and Rated Flow Rate Range
Caution
Set the flow rate within the rated flow rate measuring range.
The set flow rate range is the range of flow rate that is possible in setting at the controller side.
The flow rate measuring range is the range that satisfies the specifications (accuracy, linearity etc.) on the sensor.
Although it is possible to set a value outside the flow rate measuring range, the specifications will not be guaranteed.
Flow range
Sensor
0.4l/min 1.8l/min 4l/min 10l/min 20l/min 40l/min
4l/min
PF2D504 0.4l/min
4.5l/min
0.25l/min
1.8l/min 20l/min
PF2D520
1.3l/min 21l/min
4l/min 40l/min
PF2D540
2.5l/min
45l/min
Rated flow rate range of sensor

Set flow rate range of sensor
90
High Purity Fluoropolymer
Tubing
ø1/8" x ø1/16" additionally released.
Size variations
Metric sizes: ø4 to ø19 (6 sizes)
Inch sizes: ø1/8" to ø1/2" (8 sizes)
Tubing Series TL / TIL

Tubing
P - 4 5 1J
H
fully fluorinated -CF3

end groups (HP-451J)
reactive competitive -CONH2

end group
reactive competitive -CH2OH

end group
91
High Purity Fluoropolymer Tubing
Series TL/TIL
Material: Super PFA
Series and Specifications
Metric sizes (Series TL) Inch sizes (Series TIL)
Tubing model TL0403 TL0604 TL0806 TL1008 TL1210 TL1916 TIL01 TILB01 TIL05 TIL07 TIL11 TIL13 TIL19 TIL25
Nominal diameter – – – – – – 1/8" 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1"
Tubing size ø4 x ø3 ø6 x ø4 ø8 x ø6 ø10 x ø8 ø12 x ø10 ø19 x ø16 1/8" x 0.086" 1/8" x 1/16" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8"
Basic
diameter 4 6 8 10 12 19 3.18 3.18 4.75 6.35 9.53 12.7 19.05 25.4
O.D.
+0.2 +0.2
(mm) Tolerance ±0.1 –0.1
±0.1 –0.1
Basic
Thickness diameter 0.5 1 1.5 0.5 0.8 0.8 1.2 1.6
(mm) Tolerance ±0.05 ±0.1 ±0.15 ±0.05 ±0.08 ±0.08 ±0.12 ±0.15
10 m – – – – – – – – –
20 m –
50 m –
Bundle
100 m – –
50 Ft. (16 m) – – – – – –
100 Ft. (33 m) – – – – – –
Straight pipe 2 m –
Color Translucent (colour of material)
Applicable fluid Please refer to the applicable fluid in page 41.
Max. operating Note 1)
pressure (at 20°C) 1 MPa 0.9MPa 0.7 MPa 0.6 MPa 1 MPa 0.7 MPa 0.5 MPa
Burst pressure
4.9 MPa 6.9 MPa 4.7 MPa 3.6MPa 2.9 MPa 2.6 MPa 6.4 MPa 9.9 MPa 6.7 MPa 7.9 MPa 6.7 MPa 4.6 MPa 2.8 MPa 2.0 MPa
(at 20°C)
Note 2)
Min. bending
20 40 65 110 160 12 6 20 30 60 160 290
radius (mm)
Max. operating
temperature 260°C
(Fixed use)
Material Super PFA
Note 1) • The maximum operating pressure is the value at 20°C. For other temperatures, calculate from the burst pressure drop coefficient.
Furthermore, an abnormal temperature increase due to adiabatic compression can cause tubing to burst. At a temperature of
To operate at a temperature other than 20°C, the operating pressure must be no more than the value calculated using the 2R 20°C bend the tubing
equation below: When the value (calculated using the formula below) exceeds 1 MPa, the Max. operating pressure is 1 MPa.
Fixed side into a U shape. Then
with one side fixed,
(Max. operating pressure) = 1/4 x (burst pressure drop coefficient) x (burst pressure at 20°C) gradually close the
• When using a fluid in liquid form, the surge pressure must be no more than the maximum operating pressure. other side and
A surge pressure higher than the maximum operating pressure can cause breakage of the fitting or bursting of the tubing. measure 2R at the
Note 2) The minimum bending radius is measured using the method shown in the figure at the right. point where the
Note 3) It is connectable with LQ Series (3/4"size). As for other commercial items, there are some cases it is not able to connect due tubing folds or
to tolerance of dimensions. flattens, etc.
Burst pressure drop curve How to Order

1.0
Metric sizes TL0604 20

Burst pressure drop coefficient
0.8
0.6
Inch sizes TIL01 20
Length Applicable to both
0.4 metric and inch size
Tubing Model Symbol Type Length
0.2 10 10 m
20 20 m
Roll
50 50 m
0
20 40 60 80 100 120 140 160 180 200 220 240 260 100 100 m
Temperature °C
2S Straight 2m
Length Applicable to inch

Note 4) Note 4) size only
Eluting fluorine ion amount ( g/g) Eluting metal ion amount (ng/cm2) Symbol Type Length
Type Fluorine ion Type Al Fe Ni Na Ca 16 50 Ft. (16 m)
Roll
Eluting amount 0.1 or less Eluting amount 4.5 0.3 0.2 7.1 1.3 33 100 Ft. (33 m)
A 15 g piece of fluororesin tubing is cut off, washed in The interior of the fluororesin tubing is washed with super deionized water. Please refer to the “Series and Specifications”
deionized water and immersed in 15 ml of 25% methyl Approximately 20g of super high purity hydrofluoric acid (48%) is measured above, as the tubing length differs dependant
alcohol extract at room temperature for 24 hours. Then and injected into the tubing. The interior wall of the tubing is immersed at on each size.
the extract is diluted with deionized water to be subjected normal temperature for one week with both ends of the tubing plugged.
to a quantitative analysis of fluorine ions. Then the extract was diluted with super deionized water to be subjected to a Note 4) Figures shown in tables are representative
quantitative analysis on Al, Fe, Ni, Na and Ca by the stripping method. values, not guaranteed values.
92
Applicable Fluids
Material and fluid compatibility check list
Acetic acid 100%
100% Note 1)
Acetone
Ammonium fluoride 40%
Ammonium hydroxide 30%
Butyl acetate 100%
Methylne chloride 100%
Hydrochloric acid 38%
Hydrofluoric acid 50%
Hydrogen peroxide 60%
Methanol 100%
Methyl ethyl Ketone —
Nitric acid 70%
Phosphoric acid 86%
Caustic potash 85%
Sulfuric acid 100%
— Note 1)
Toluene
Xylene —
Sodium hydroxide 100%
1.1.1-Trichloroethane 100%
Rhosphorus pentachloride —
— Note 1)
Isobutyl alcohol
— Note 1)
Isopropyl alcohol
Ozone —
— Note 1)
Ethyl acetate
Deionized water —
Nitrogen —
Ultrapure water —
Tmah —
The material and fluid compatibility check list provides reference values as a guide only.
Note 1) Since static electricity may be generated, implement suitable countermeasures. Table symbol can be used.
• Compatibility is indicated for fluid temperatures of 200°C or less.

• SMC is not responsible for its accuracy and any damage happened because of this data.
93
Series TL/TIL
Safety Instructions

Warning

the suitability of all items specified. Referring to the latest catalogue information with a view to giving
Assembly, handling or repair of machinery and equipment should be performed by trained and
Refer to ISO4414, JIS B 8370 (pneumatic system axiom), labour health and safety laws and other
safety regulations.
94
Series TL/TIL
High Purity Fluoropolymer Fittings/
Needle Valve/Tubing Precautions 1
Design and Selection Piping
Warning Caution
1. Confirm the specifications. 1.Connect tubing with special tools.
Give careful consideration to operating conditions such as the Refer to pages 31 through 33 regarding tubing connection and
application, fluid and environment, and use within the operat- special tools.
ing ranges specified in this catalogue.
2. Tighten the nut until it touches the end

2.Fluid surface of the body, and then tighten it an

Operate within the indicated fluid temperature range.
addition 1/8 turn. As a guide, refer to the
3.Maintenance space proper tightening torques shown below.
Ensure the necessary space for maintenance and inspections.
Nut tightening torque for piping
4.Fluid pressure range Torque (N.m)
Keep the supplied fluid pressure within the operating pressure Body class
LQ1 LQ2
range shown in the catalogue.
2 0.3 to 0.4 1.5 to 2.0
5.Countermeasures for static electricity 3 0.8 to 1.0 3.0 to 3.5
Since static electricity may be generated depending on the 4 1.0 to 1.2 7.5 to 9.0
fluid being used, implement suitable countermeasures.
5 2.5 to 3.0 11.0 to 13.0
6 5.5 to 6.0 —
3. Use sealant tape for the piping of taper thread

parts such as LQH and LQL.
Mounting Tape the ridges tightly with the sealant tape, starting one ridge
width left from thread end side. 3 to 4 sealant tapes are
Warning required.
Taper thread mounting torque

1. After mounting, perform suitable function
Bore size Torque (N.m)
and leak tests to confirm that the mounting 1/8 0.6 to 0.9
is correct. 1/4 0.8 to 1.2
2.Instruction manual 3/8 1.0 to 1.6
Mount and operate the product after reading the manual 1/2 1.5 to 2.0
carefully and understanding its contents. Also keep the manual 3/4 2.0 to 2.7
where it can be referred to as necessary.
1 2.5 to 3.6
95
Series TL/TIL
High Purity Fluoropolymer Fittings/
Needle Valve/Tubing Precautions 2
Operating Environment Operating Precautions
Warning Warning
1.Do not use in locations having an explosive 1. Operate within the range of the maximum
atmosphere. operating pressure.
2. Do not operate in locations where vibration Caution
or impact occurs.
3.In locations near heat sources, block off radi- 1. After a long period of non-use, perform
ated heat. inspections before beginning operation.
2. Use sufficient care in the handling of series
Maintenance TL/TIL clean packaging types when their
packaging is opened.
Warning
Installation of Tubing
1.Perform maintenance in accordance with the
procedures in the instruction manual. Caution
Improper handling can cause damage.
2. When removing or reinstalling fittings,
1. Cut the end of the tubing at a right angle and
remove any remaining chemicals and care- pass it through the fitting nut. After placing the
fully replace them with deionized water or tubing in the holder, push it onto the insert
air, etc., before beginning work activities. bushing until it stops and clamp it with the knob.
3.Tightening of taper threads for piping As a guide when tightening the tubing with
Because the taper threads are made of resin, minute leakage
the knob, maintain a uniform gap (approx. 2
may gradually occur due to stress relaxation. Perform periodic mm) on both sides of the holder.
inspections, and if leakage is detected correct the problem by •When the tubing is curved, straighten it out before using it.
additional tightening. If additional tightening becomes ineffec- • The tubing may slip if there is oil or dust, etc., on the
tive, replace the fitting with a new product. holder. Remove the contamination using alcohol or
4. Check the following during regular mainte- another suitable cleaner.
nance, and replace components as neces-
sary. Use of Tubing
a) Scratches, gouges, abrasion, corrosion
b) Twisting, flattening or distortion of tubing
c) Hardening, deterioration or softening of tubing
Caution
5.Do not repair or patch the replaced tubing or 1. Refer to the applicable tubing sizes shown
fittings for reuse. below for tubing to be used.
Applicable tubing sizes
Connection O.D. (mm) Internal thickness (mm)
tubing size Standard size Tolerance Standard size Tolerance
ø3 to ø2 3.0
0.5 ±0.06
ø4 to ø3 4.0
ø6 to ø4 6.0 +0.2
ø8 to ø6 8.0 –0.1
Metric 1.0 ±0.1
ø10 to ø8 10.0
sizes
ø12 to ø10 12.0
ø19 to ø16 19.0 +0.3
1.5 ±0.15
ø25 to ø22 25.0 –0.1
1/8" to 0.086" 3.18 0.5
±0.1
3/16" to 1/8" 4.75 0.8
+0.2
1/4" to 5/32" 6.35 1.2 ±0.12
–0.1
Inch 3/8" to 1/4" 9.53
sizes 1/2" to 3/8" 12.7
1.6 ±0.15
3/4" to 5/8" 19.0 +0.3
1" to 7/8" 25.4 –0.1
96
Flaretype and Press In Tools
97
Tools
Wrench for LQ3 Flaretype Fitting
Nut Size Series
W2
W1
L1 ØD
T2
T1
How to Order
LQ3-GS-
Packaging LQ3
Symbol Size Size L1 W1 W2 T1 T2 ØD

1 1 LQ3-GS-1 59 8 13 7 7 3
2 2 LQ3-GS-2 73 8 17 6 10 3
3 3 LQ3-GS-3 96 10 21 6 10 3
4 4 LQ3-GS-4 104 12 25 8 15 4
5 5 LQ3-GS-5 124 18 33 10 15 4
6 6 LQ3-GS-6 152 25 44.5 10 20 5
98
Tools

Hyper Fitting / Flare Type
Series LQ3 Fitting Procedure
Insertion Tool
Fitting size For 2 to 6 (P.1 to P.3) Fitting size For 1 (P.4, P.5)
Preparation
Caution: Tubing
1. Wipe the tubing with alcohol to prevent slippage.
2. Cut the tubing perpendicularly with a commercially
available dedicated tool.
Parts case
Tubing Perpendicular
Contents:
Insert pins
Insert pin jig Note) An obliquely cut surface may cause insert bushing
breakage, etc.
99
Tools
Heat gun procedure Fitting size For 2 to 6
Position an insert pin in the insert pin jig.
Insert pin LQ3 fitting
Insert pin
Tubing
Insert pin jig

Insert pin jig
Heat gun
∗ To be obtained
separately by
the customer.
Be sure to work at a table when using the insert pin jig.

This will stabilize the insert pin and make work easier.
Heat up the end of the tubing with a commercially available tool such as a heat gun.
∗ As a guide, the area to be heated on the tubing is Heat gun

the length to the insert pin base.
Be careful not to burn
Heat it up for 15 to 20 yourself!
seconds at about 400°C.
Do not touch heated areas (tubing,
heat gun). Also, be careful not to touch
the other side of the heated area since
the temperature also increases there
due to hot air.
After heating up the end of the tubing, immediately slide it over the insert pin up to the
base of the insert, thereby expanding the tubing into a flared shape.
Position of insert pin base Position of insert pin base
Note) Be sure to check the size of the insert pin.
100
Tools
Fitting size For 2 to 6
The tubing must be held for about one minute while it sets in a flared shape. This time
can be reduced by blowing cooling air onto the tube.
After cooling for the required time, remove the tubing from the insert pin.
Tubing
Insert pin
Check that the tubing has been expanded into a flared shape.
Note)
Tubing cooling time can be reduced by
removing the insert pin from the simple jig
and immersing tubing and insert pin in deion-
ized water or similar.
101
Tools
Heat gun procedure Fitting size For 2 to 6
After flaring is complete, promptly attach the LQ3 fitting to the tubing.
LQ3 fitting
Expanded tubing
Fasten the fitting nut to the body and tighten to the end surface using the dedicated nut
spanner.
Dedicated
nut spanner
Completed
Fitting nut
Caution
As a guide, tighten the nut by a Body size Torque (N폷m)
further 1/8 turn in order to make 2 1.6 to 1.8
sure that the nut is screwed on 3 3.2 to 3.5
far enough to make contact with 4 5.0 to 5.3
the body end surface. Refer to 5 10.0 to 10.5
the proper tightening torque Body end surface
6 22.5 to 23.0
shown at right.
102
Tools
Lever type tool procedure Fitting size For 1
Position an insert pin and tubing holder suitable for the tubing size.
Tubing holder
Insert pin
Tool
LQ3 fitting
Tubing
Dedicated
nut spanner
Place the tubing in the tubing holder, Operate the lever, thereby expanding
inserting it to the position where it the tubing into a flared shape.
makes contact with the insert pin, and
clamp the holder with the hook.
Hook
Tubing
Insert pin
Lever
Repeat this operation

3 times.
Hook
Check that the tubing has been expanded

into a flared shape.
103
Tools
Lever type tool procedure Fitting size For 1
After flaring is finished, promptly attach the LQ3 fitting to the tubing.
LQ3 fitting
Expanded tubing
Fasten the fitting nut to the body and tighten to the end surface using the dedicated nut
spanner.
Completed
Dedicated
nut spanner
Fitting nut
Caution
As a guide, tighten the nut by a Body size Torque (N폷m)
further 1/8 turn in order to make 1 0.7 to 0.9
sure that the nut is screwed on
far enough to make contact with
the body end surface. Refer to
the proper tightening torque Body end surface
shown at right.
104
Tools
How to Order Insertion Tools
Fitting size For 2 to 6 Fitting size For 1
LQ3 GPS LQ3 GB

Pin type Pin type
Nil Metric Nil Metric
N Inch N Inch
∗ The parts case is included.
Dedicated Nut Spanner Replacement Parts

Description Part no.
LQ3 GS • GPS insert pin (single)

LQ3 GP
Tubing size symbol
(Refer to Table 1.)
Pin type
Symbol Size
1 1
2 2 • GPS insert pin jig (single)
3 3
AXT1075-30-2
4 4
5 5
6 6
Nut size
• GB insert pin
• Holder assembly
LQ3 GPB
Pin type
Nil Metric size
N Inch size
• GB insert pin (single)

LQ3 GPB 03
Tubing size symbol
(Refer to Table 1.)
03 (ø3, 1/8"), 04 (ø4) only
• GB holder (single)
LQ3 GHB 03
Tubing size symbol
(Refer to Table 1.)
03 (ø3, 1/8"), 04 (ø4) only
Table 1 Tubing Size Symbol

Tubing O.D.
Metric size Inch size
ø3 ø4 ø6 ø8 ø10 ø12 ø19 ø25 1/8" 1/4" 3/8" 1/2" 3/4" 1"
Symbol 03 04 06 08 10 12 19 25 03 07 11 13 19 25
Fitting type GB GPS GB GPS
105
Tools
Flaring Tool for LQ3 Flaretype Fittings
Ø36
117 76
30 49
43
37.5
63
127
177
99
Insert Pin Assembly

Holder Assembly
How To Order
Table 1. Tubing Size Symbol
Tubing Outside Diameter
Type Body Metric Size Inch Size
Size
Ø3 Ø4 Ø6 1/8" 1/4"
1 03 04 — 03 —
B
LQ3-GB- 2 — 04 06 03 07
Type Nil Metric Size Table 2. AC

N Inch Size
Model Insert Pin,
Number Holder Assembly
LQ-GJ LQ-GPJ
LQ-GJ-N LQ-GPJ-N
LQ-GJS LQ-GPJS
LQ-GJS-N LQ-GPJS-N
106
Tools for LQ1/2 Fitting Series
Special Tools
How to order fitting jig
LQ G J
Insert pin material

Nil Resin Option (L/M type only)
Stainless steel Symbol Option
S
(J/K type ony) Nil None
Insert pin/Holder type With

Nil Metric size B brackets
N Inch size
Note 1) Compatible pins and holders
are included with all sizes. (in
parts case)
Option
Type
Description Part no.
Body
Symbol
class
Bracket
LQ-GBL
assembly
J·K 1, 2
J type K type
1, 2, 3,
L·M
4, 5, 6
L type M type (for short piping)
Table 1 Tubing size symbols Replacement parts

Tubing O.D. Description Part No.
Type Body Metric sizes Inch sizes
LQ-GP J -
class
ø3 ø4 ø6 ø8 ø10 ø12 ø19 ø25 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Insert pin Type Insert pin/
1 03 04 — — — — — — 03 — — — — — — holder Holder type
J
2 — 04 06 — — — — — 03 05 07 — — — — assembly Insert pin material Nil Metric sizes
03 04 — — — — — — 03 — — — — — — (with the (J/K type only) S Inch sizes
1
parts case) Nil Resin
2 — 04 06 — — — — — 03 05 07 — — — —
S Stainless steel
3 — — 06 08 10 — — — — — 07 11 — — —
L
4 — — — — 10 12 — — — — — 11 13 — — LQ-GP 2 J - 07
5 — — — — — 12 19 — — — — — 13 19 — Tubing size symbol
Body class
6 — — — — — — 19 25 — — — — — 19 25 Insert pin (Refer to Table 1)
(Refer to Table 1)
(single) Insert pin material
Type (J/K type only)
Nil Resin
S Stainless steel
LQ-GH J - 07
Holder Tubing size symbol
(single) (Refer to Table 1)
Type
Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.
Replacement part type L shows the parts for LQ-GL and LQ-GM.
107
Tools for LQ1/2 Fitting Series
Special Tools
Dimensions
LQ-GJ LQ-GK
117 76
114 (Max. 50)
53
43
63
53
43
63
30
127
45 (adjustable)
24
LQ-GK
ø36
SET POS.
LQ-GJ
ø36
LQ-GM LQ-GL
191 (Max. 91)

325 (Max. 91)
87
87
60
60
112
112
50
50
85
342
40
28
LQ-GM
85
SET POS.
207
6 6
4-
R3
R3
4-
LQ-GL
40
28
SET POS.
6
R3
4-
6
R3
4-
108
Tools
Fitting Assembly Procedure

Assemble fittings following the procedure shown below.
J type J type fitting assembly procedure

1 Pull out the lever pin . Rotate the lever assembly
Tubing Holder assembly replacement screw to align the holes on the lever assembly and
the base . Insert the lever pin into the holes to
Fitting nut Holder assembly
fix the lever assembly .
Insert pin assembly
Insert bushing 2 Place the insert bushing on the insert pin
Insert pin assembly assembly .
replacement screw
3 Cut the end of the tubing at a right angle and pass
it through the fitting nut . After placing the tubing
in the holder assembly , push it onto the insert
Hook bushing until it stops and clamp it with the hook .
Base
Tubing Caution
Insert
When the tubing is curved, straighten it out
bushing Lever pin
before using it.
The tubing may slip if there is oil or dust, etc.,
on the holder assembly . Remove the contami-
nation using alcohol or another suitable cleaner.
4 Press the insert bushing into the tubing by
turning the lever assembly .
5 To replace the insert pin assembly and holder

Lever assembly assembly , use the insert pin assembly
Packed state replacement screw and the holder assembly
replacement screws , respectively.
K type fitting assembly procedure

K type
• For procedure to set and press fit the insert pin
Holder assembly replacement screw assembly, refer to L, M type fitting assembly
Insert pin assembly replacement screw procedures.
• For procedure to set the tubing, refer to J type
procedure.
1
Lever
Refer to J type assembly procedure.
5
Tubing
6 Tighten the fitting nut until it reaches the prescribed
Insert Holding screw position on the body (end face). As a guide, refer to the
bushing proper tightening torques shown below.
SET
POS
.

Torque (Nm)
Body class
LQ1 LQ2
2 0.3 to 0.4 1.5 to 2.0
End face
Note 1) In case of body class 1, the
nut should be tightened
manually.
Optimum position
na
l
Standard size Precautions on installation
ctio Minimum position Seal
Se iew • Be careful not to scratch or dent
V
End face Insert the seal of the insert bushing.
bushing (Refer to the illustration on the
left.)
• When the insert bushing
Tubing inserted, its tubing end should
Reducer type
be closer to seal side than the
minimum position. (Refer to the
illustration on the left.)
109
Tools
Fitting Assembly Procedure
Assemble fittings following the procedure shown below.
L type L/M type fitting assembly procedure

Tubing
Fitting nut 1 Turn the lever and move to SET POS.
Knob Insert pin assembly
2 Place the insert bushing on the insert pin
Insert bushing assembly .
Space
3 Cut the end of the tubing at a right angle and pass

Lever
it through the fitting nut . After placing the tubing
in the holder assembly , push it onto the insert
bushing until it stops and clamp it with the knob .
Holder assembly When tightening the tubing with the knob ,
maintain uniform clearance on both sides of the holder.
Tubing Caution
S ET
POS
Insert . When the tubing is curved, straighten it out
bushing
before using it.
The tubing may slip if there is oil or dust, etc.,
on the holder assembly . Remove the contami-
nation using alcohol or another suitable cleaner.
4 Press the insert bushing into the tubing by
turning the lever . (Pressing in can be accomplished
with 2 or 3 turns of the lever .)
M type Holder assembly replacement screw 5 To replace the insert pin assembly and holder
(2 places) assembly , use the insert pin assembly
Insert pin assembly replacement screw replacement screw and the holder assembly
replacement screws , respectively.
6 In case of M type for short piping, remove the handle

Lever
slide the clamp assembly to attain the specified
Clamp length, then secure it again with the handle .
assembly
7 Tighten the fitting nut to the prescribed position on
Handle
(M type only) the body (end face). As a guide, refer to the proper
tightening torques shown below.
Torque (Nm)
Body class
End face LQ1 LQ2
2 0.3 to 0.4 1.5 to 2.0
3 0.8 to 1.0 3.0 to 3.5
4 1.0 to 1.2 7.5 to 9
5 2.5 to 3.0 11 to 13
l
na Standard size
ctio 6 5.5 to 6.0 —
Se iew
V Note 1) In case of body class 1, the
End face
nut should be tightened
manually.
Reducer type
Optimum position
Minimum position Seal
Insert bushing Precautions on installation

• Be careful not to scratch or dent the seal of the
insert bushing. (Refer to the illustration on the left.)
• When the insert bushing inserted, its tubing end
Tubing should be closer to seal side than the minimum
position. (Refer to the illustration on the left.)
110
Contacts
111
Notes
113
Notes
114
Notes
115
Notes
116
SMC Corporation Profilplast B.V.
4-14-1, Sotokanda, Chiyoda-ku, Economiestraat 3
Tokyo 101-0021, Japan 6135 KV Sittard
International Affairs Management Div. The Netherlands
Tel: 03-5207-8225 Tel: +31(0)46-420 30 00
Fax: 03-5298-5362 Fax: +31(0)46-420 30 01
www.smcworld.com www.profilplast.nl

SMC Brochlr

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Partners in plastics !

High Purity Fluorpolymer Komponenten

For further information please contact info@proﬁlplast.nl

Sales and Production and

TL/TIL LQ3 Series LVQ Series

from 1/8” to 1” from 1/8” to 1” from 1/4” to 1”

Marking Tube laser marked during Die – sinking Die – sinking

Testing and Inspection Visual Inspection Visual Inspection Visual Inspection

Model LQ310 LQ320 LQ330 LQ340 LQ350 LQ360

Operating Nut material PVDF 0 to 150°C

2. Greater swept ﬂow characteristics than standard Flare — Achieved by the

3. Unique collet design offers more robust connection, producing 3X~5X

5. Acme thread means no cross-threading — Fine pitch threads eliminated.

6. Molded “Spring-lock” at base of compression nut combined with tapered

7. PFA Compression Nuts Standard

8. Heat resistant up to 200 °C

Tube support Trapezoidal thread

Model LQ310 LQ320 LQ330 LQ340 LQ350 LQ360

Operating Nut material PVDF 0 to 150°C

Withstand Pressure and Heat Resistance Performance

0 20 40 60 80 100 120 140 160 180 200

1/8", ø3, 1/4", ø4, ø6 tubings 3/8", ø8, ø10 tubings

Male connector: LQ3H-M

L,L’ Metric Size

Female connector: LQ3H-F

Port size Metric Size

Male elbow: LQ3L-M

Port size Metric Size

Female elbow: LQ3L-F

1/8" 3.5 4.8 10 9 11 28.5 27.5 19.5 14 18.5

Male branch tee: LQ3B-M

Port size Metric Size

Female branch tee: LQ3B-F

øY Port size Metric Size

Male run tee: LQ3R-M

LQ3R21-M 1/8" 19.5 23.5

Female run tee: LQ3R-F

LQ3R21-F 1/8" 20 18.5

Union elbow: LQ3E

Union tee: LQ3T

LQ3T21 ø6 4 17 16 6 12 16 34.5 33.5 20

(E,E’): Reference dimension for the inserted

Panel mount union: LQ3P

LQ3P51 ø19 26.5 24 32 9 36.5 50.5 48 117 112 37 13 41 43

Tubing type Type of piping (according to the combination table)

Size combination (Metric) Size combination (Inch)

Union reducing: LQ3U-R

Tubing type Type of piping (according to the combination table)

Size combination (Metric) Size combination (Inch)

Union elbow reducing: LQ3E-R

LQ3E31-R1 ø8 22.5 19.5 21 47.5 44.5 25

ø12 6 10 24 22 22.5 19.5 24 21 52.5 50.5 48.5 45.5 29 25

LQ3E51-R2 ø10 22.5 19.5 21 61.5 53.5 50.5 25

Tubing type Type of piping (according to the combination table)

Size combination (Metric) Size combination (Inch)

Union tee reducing: LQ3T-R (E2,E2’)

(E1,E1’,E2,E2’,E3,E3’): Reference dimension for the

surface of the nut.

Space saving union elbow: LQ3E-S

LQ3E21-S ø6 4 6 17 16 16 34.5 33.5 36.5 35.5 20

(E,E’): Reference dimension for the Inch Size

Space saving branch tee: LQ3T-SB

Space saving run tee: LQ3T-SR