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Progress Report

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Fully-Printed Piezoelectric Devices for Flexible Electronics


Applications
Marc Aliqué, Claudia Delgado Simão,* Gonzalo Murillo,* and Ana Moya

printed electronics, where electronic


Recent advances in materials and manufacturing processes pave the way for circuits or devices may be printed with
the establishment of piezoelectric materials via printing techniques as flexible conventional analog or digital printing
sensors, actuators, and generators. Such flexible devices are key building techniques.[1,2] Since its emerging in the
mid-20th century, the field of printed
blocks for future advanced robotic skin and conformable medical devices. electronics has witnessed tremendous
Herein special focus is given to printed devices for its lightweight, flexibility, progress. New domains in electronic
and manufacturing by high throughput techniques, offering a disruptive technology related to new materials syn-
advantage in integration technologies and a wide range of opportunities for theses,[3] novel devices concepts,[4] new
industrialization routes, where cost-effective applications are required. In this functionalities, and new production
techniques[5,6] announce a revolution in
Progress Report, the different system parameters are discussed, pinpointing
microelectronics industry that is usually
the ones that affect the production of reliable flexible printed piezoelectric focusing in silicon and microfabrication
devices and limit this technology to achieve higher technological maturity. techniques.[7]
Focus is made on screen and inkjet printing as fabrication techniques and the Printed electronics technology uses
well-established piezoelectric polymer poly(vinylidene fluoride-co-trifluoro- an ensemble of additive manufacturing
ethylene). Key limiting factors found for the manufacturing of robust scal- techniques,[5,6] where stacked layers of
functional materials are deposited on a
able all-printed piezoelectric devices stems mainly from the piezoelectric ink substrate with a certain design or pat-
production and processing. Finally, the integration of these materials, via tern. It is considered relatively simple to
printing technologies, into soft, flexible, and even stretchable substrates is implement because it is built over mature
analyzed and insights are gathered on the manufacturing trends to achieve technology, which is less time consuming,
low-cost production of flexible piezoelectric devices embedded in electronic versatile, and customizable, and have
less materials waste than typical micro-
skin and smart wearables.
fabrication,[7] being suitable to produce
cost-effective devices, aiming to niche
applications in high-volume market seg-
1. Introduction ments where the high performance of conventional electronics
is not required. Historically, different types of printing tech-
Over the past decades, the fast-growing pace of the printing niques have been employed based on different physic princi-
technology accompanied the emergence of the concept of ples, such as lithography or flexography,[8] but the two main
groups of techniques that can be differentiated for the devel-
opment of these systems are with and without the use of a
M. Aliqué, Dr. C. D. Simão, Dr. A. Moya printing mask, also called analog and digital printing, respec-
Eurecat
Centre Tecnològic de Catalunya tively.[9] Each printing technique operates inks and substrates
Functional Printing and Embedded Devices Unit in different manner, limiting the application of one technique
Mataró 08302, Spain or other to the interface relations concerning the materials
E-mail: claudia.delgado@eurecat.org used and designed pattern structure (thickness and resolution
M. Aliqué requirements), the physical and chemical properties of the
Electrical and Telecommunication Engineering Department
deposited functional inks, and the selected substrate charac-
Universitat Autònoma de Barcelona (UAB)
Bellaterra 08193, Spain teristics. The most suitable techniques for almost any applica-
Dr. G. Murillo tion related to the printing electronics field are screen printing
Instituto de Microelectrónica de Barcelona (analog) and inkjet (digital) printing. Although screen printing
IMB-CNM (CSIC) and inkjet printing have different system specifications and
Esfera UAB requirements, they have both matured in the graphic arts sector
Campus Universitat Autònoma de Barcelona
Bellaterra 08193, Spain before becoming electronic devices manufacturing techniques.
E-mail: gonzalo.murillo@csic.es Furthermore, their enhanced properties allow the development
The ORCID identification number(s) for the author(s) of this article of customized patterns with complex shapes at low-cost produc-
can be found under https://doi.org/10.1002/admt.202001020. tion, making printed electronics very attractive for industrial
adoption.[10] Most printed devices target the use of flexible and
DOI: 10.1002/admt.202001020

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potentially low-cost substrates to enable large area and/or more large d33 piezoelectric coefficient, which quantifies the volume
rugged products, enabling a higher freedom of design, seam- change when a piezoelectric material is subject to an electric
less integration, use of sustainable materials, even recycled or field, but most of them are bulk inorganic materials with lim-
biodegradable,[11] and reduction of metal content in electronic ited printable characteristics, and only polymers and nanoparti-
circuits.[12] These characteristics enable the printed materials cles embedded in polymer matrix composite are suitable to be
and devices to be integrated into different soft substrates, like used in printing technologies.[25]
plastics, paper, or clothes fabric. Their lightweight character In this Progress Report, an overview about the reported
enables them to be placed in locations where conventional piezoelectric materials apt for printed electronics and the dif-
sensors or electronics cannot be used due to their rigid charac- ferent methodologies followed by the preparation of printed
teristics, allowing the creation of innovative designs and appli- devices are discussed. An initial section provides an analysis
cations, such as in smart textile,[13,14] implants onto the human of the different printing technologies, focusing on inkjet and
body[15–17] or flexible energy devices[18] among others. screen printing that are the ones more used and useful for
With the emergence of electronic devices manufactured by printed piezoelectric devices, and the different polarization
printing means, a wide range of conductive, semiconductor, techniques applied to the materials to induce the piezoelectric
and dielectric materials have been developed as inks for the characteristics. The content that follows summarizes the
different printed techniques. Electroactive polymers are some main piezoelectric materials with more suitable characteris-
of the most promising materials for flexible electronics[19] and tics in applications (organic, inorganic, and composites). The
among them, piezoelectric materials are in the set of acces- final section discusses different devices focusing on the latest
sible printed substances[20] with promising results. The interest developments, fabricated with the explained printing tech-
of these materials stumbles upon their ability to generate niques and materials, to demonstrate the real-life application of
electrical signals as outputs in response to mechanical stress, the piezoelectric materials as energy harvesters, actuators, and
vibrations, or deformations, and vice versa, reversibly. This sensors.
duality sets the basis for their application in devices, such as
sensors, actuators, or energy harvesters (i.e., direct and indi-
rect piezoelectric effects).[21–23] The generated electrical power 2. Fabrication Methods
arises from changes in the internal charge distribution of the
piezoelectric material, produced by random or environmental- 2.1. Printing Techniques
driven mechanical movements, e.g., contact from airstreams or
liquid flow, or triggered by vicinity vibrations, or also by human The capabilities of the piezoelectric materials are promising in
motion in their everyday life. Likewise, the application of an the laboratory scale and, to effectively transfer this know-how
external electric field onto a piezoelectric material induces a for mass production and achieve benefits, a promising route
redistribution of their internal structure, obtaining a controlled is via printed electronics technology. The use of printing tech-
mechanical movement. In the case of piezoelectric polymers, niques for the manufacturing of electronics has several advan-
their glassy structure creates dispersion of the originated tages, including the fast and low-cost assemble in large area
charge upon stimuli, therefore it is required an alignment of and flexible substrates. An overview of printing techniques is
the internal charges before it exhibits piezoelectric proper- given in Figure 1. Two main printing techniques groups are dis-
ties.[24] This treatment is also called poling or polarization and tinguished, depending if they need a printing mask or not. On
is one of the critical parameters in piezoelectric polymers pro- one hand, the ones that require a mask, can be called analogue
cessing. Various reported poling techniques are discussed later printing, and include techniques like screen printing,[26] offset,[27]
in this report, but each one of them has different properties flexo­graphy,[28] and gravure.[29] All these techniques share a
that must be analyzed to choose the right one for every device. common feature: the pattern to be printed is embodied in a phys-
There are various piezoelectric materials known nowadays with ical form such as a mask, roll, plate, or screen. This template is

Figure 1.  Schematic overview of the different technologies for printing electronics.

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Figure 2.  State of the art of the a) publications about printed piezoelectric polymer devices and b) their applications. Search carried out on April 27, 2020.

transferred during the act of printing through direct or indirect that conventional devices cannot achieve, thus increasing the
contact with the substrate. Changes in the patterns can only be number of applications that can be performed. As Figure  2b
achieved by changing the master pattern, which involves making shows, sensors and harvester devices, made with piezoelectric
physical changes to the template within the printing machine, polymers, are currently drawing the most attention in their
meaning time consuming and an increase of the device fabrica- manufacturing using printing techniques alone.
tion cost and consequently, of variability to some extent. These Some of the techniques used for printed electronics are sche-
master patterns can be produced with different size of the mesh matically summarized in Figure  3, where the main parts of
depending on the type of ink used and the weight of their com- their instrumentation are shown. Furthermore, the two main
ponents in order to regulate the size of the printed layer. techniques used for printed electronics will be explained more
In the other hand, there are techniques that do not require carefully in the section below.
a mask, known as digital methods. This term means that the
design is controlled by a computer, therefore the printing head
is electronically controlled making a translational movement 2.1.1. Screen Printing
that follows the digital pattern. This results in a contactless
selective transfer the ink into the substrate without extra waste, Screen printing is the most mature technique in printing elec-
and without force applied onto the substrate or sublayer. The tronics. It is a 2D low-cost manufacturing process able to coat
basic premise of digital printing is the accurate positioning of large surface areas, and it is the simplest, most popular, and
a liquid droplet with small volume directly correlated under most economical technique in printed electronics. The fact
digital control with the presence of information at each binary of being a 2D technique requires the presence of a designed
unit of the image to be reproduced. This technique allows pattern, which provides more versatility than other analog
the obtaining of thinner layers and a very easy superposition printing tools. A blade, or squeegee, forces the desired ink
of the deposited ones without masking, being these two the transfer through the open areas (mesh) of the designed pattern
main advantages of the technique. Digital printing has certain of the mask onto the substrate. A balance of the ink viscosity
drawbacks especially with respect to average throughput when is needed; the ink has to be liquid enough to slide and pass
compared to high-end analogue printing technologies. Inkjet through the mesh of the mask, but dense enough to be adhered
printing[30] is the dominant digital technique, but other tech- to the substrate surface. Even so, this technique allows the use
niques, like electrophotography,[31] are also used with less repro- of a rather high ink viscosity (1–50 Pa s−1) and because of this,
ducibility in industry. materials layer up to several µm of thickness can be developed.
Screen and inkjet printing are the two printing techniques There are three different assemblies of screen printing tech-
commonly used in printed electronics, and are compat- niques that can be used in 2D round-to-round (R2R) manu-
ible to process piezoelectric polymers. These two, the most facturing based on flatbed and rotary mechanics and a hybrid
representative of the analog and digital techniques, enable mechanism mixing both techniques:[9,32]
preparing devices composed by different layers in soft and flex-
ible substrates in high throughput. Considering Figure 2a, the • Flat-to-flat method (flatbed): Printing mask and printing sub-
technique that has been used the longest for the development strate are both flat. A movable blade (or squeegee) force the
of the piezoelectric polymers is the screen printing, being first ink to pass through the screen apertures onto the printing
used in the late 20th century. The number of reported publi- substrate (Figure 4a).
cations using inkjet printing is expected to increase in the • Round-to-round (rotary printing): The printing screen is
coming years, thus surpassing those reported using screen cylindrical with ink inside the printing cylinder. Printing
printing. Although there is an increasing density of products mask, substrate, and impression cylinder moves at the same
in the market manufactured using printing techniques, most of time taking place the ink transfer to the substrate (Figure 4b).
printed piezoelectric devices are still under prototype develop- • Flat-to-round: Mixture of both techniques, the printing plate
ment and basic research. The capability to develop these printed is flat and the printing onto the substrate is done by a rotating
piezoelectric devices (sensors, actuators, or energy harvesters) impression cylinder that moves synchronously. A static blade
in flexible substrates allows the adhesion in irregular surfaces adapts to the substrate surface transferring the ink.

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Figure 3.  Schematic representation of a) flexography, b) offset, c) gravure, and d) electrophotography printing.

2.1.2. Inkjet Printing • Continuous inkjet: a constant flow of selectively charged


droplets is generated according to the image and the elec-
Inkjet printing technique is a digital and noncontact tech- tronic pattern. The ones that are charged are deflected by
nique that allows the direct pattering of large areas without an electric field, and the uncharged one’s flow onto the sub-
a physical mask, owing to the precise control of picoliter vol- strate. So, only a fraction of the droplets ink is adhered to the
umes of materials in form of ink. Furthermore, thanks to the substrate (Figure 4c).
digital pattering, the manufacturing cost is reduced, allowing • Drop-on-demand inkjet: a single drop is only ejected by the
a fast change in the design without the need for a new set of cartridge nozzle when required by the image. The drops can
masks, which enables a more flexible processing flow, and an be generated thanks to a vaporization of the liquid in the ink
easy superposition of the layers. It is a suitable technology for chamber (thermal, Figure  4d), by a mechanically deforma-
a wide range of production scales, with a lower initial invest- tion produced by piezoelectric material under a controlled
ment than other printing techniques. The ink consumption electric field (piezoelectric, Figure 4e), or by the electrostatic
and material wastage are minimal, and it can produce pat- force generated by an electric field between the ink and the
terned thin films. An important drawback of this technique substrate, pushing the drop through the nozzle (electrostatic,
is concerning that inks have to meet very specific rheological Figure 4f).
requirements, as viscosity and surface tension, which need to
be within narrow margins; 1–30 cP and 24–40 mN m−1, respec-
tively. Inkjet printing has more restrictions in the materials 3. Piezoelectric Materials
to be printed than other printing techniques, and commer-
cial functional inks are scarce, expensive, and have very lim- 3.1. Piezoelectric Effect
ited shelf-life. So, more investigation in inks development is
required. Piezoelectricity is a property that is exhibited by some non-
The inkjet technique is broadly classified into two categories centrosymmetric materials called piezoelectric materials. The
based on the mechanism of droplet generation: as continuous piezoelectricity effect occurs when the charge balance within
inkjet and drop-on-demand inkjet printing. Drop-on-demand the crystal lattice of those materials is disturbed. When there
technique is in turn classified into three types since it can is no stress applied on the material, the positive and nega-
be modulated by thermal, piezo, or electrostatic regulators tive charges are evenly distributed so there is no potential
(Figure 4c–f)[9,32] difference along the material. When a piezoelectric material

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Figure 4.  Simplified views of a) flat-to-flat and b) round-to-round screen-printing mechanics. c) Continuous, d) thermal drop-on-demand (bubble jet),
e) piezoelectric drop-on-demand, and f) electrostatic inkjet printing mechanics. Reproduced with permission.[9] Copyright 2001, Springer.

is mechanically strained, its internal charge distribution 3.2. Piezoelectric Materials


changes, leading to the appearance of an electric potential dif-
ference between its outer surfaces that can be detected. Due A suitable selection of piezoelectric materials depends on the
to this duality, these devices can be used as sensors. Piezo- target mechanical stress-electrical signal ratio. For example,
electric materials also can be used as actuators in presence of in sensor; inorganic or ceramic piezoelectric layers show a
the inverse effect. This effect appears when an external field large piezoelectric effect. This amplitude is related to high
is applied to an actuator device, which causes a realignment piezoelectric coefficients d33 that can be seen in Table  1,
of the internal charges of the piezoelectric layer and induces a which makes possible the detection of low amplitude defor-
mechanical strain. mations and forces. Barium titanate (BaTiO3), lead zirconate
Piezoelectricity is ruled by the piezoelectric coefficients dxx titanate (PZT), and PMN-PT single crystal (with structure
(pC  N−1) that relates the force or the volume change when a (1−x) Pb(Mg1/3Nb2/3)O3−xPbTiO3) are the materials with higher
material is subject to an electric field and vice versa. Typically, piezoelectric constant and, with an optimum manufacturing
the most significant coefficients are the ones where the volume process, pressure sensors with high levels of sensitivity, in the
change is parallel to the force applied (d33) or perpendicular to order of 0.005 Pa, and fast response times (0.1 ms) can be devel-
the force applied (d31). A schematic representation of a pressure oped.[33] Thus, these materials show promising characteristics
sensor mechanism is explained in Figure 5. to fabricate sensors with real-time response.

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Figure 5.  a) Schematic representation of the piezoelectric effect in a pressure sensor. When the piezoelectric material is compressed b) it is polar-
ized in one direction generating an electric signal, and when it is expanded c) it is polarized in the other direction generating an electric signal of the
inverse sign.

However, because of the high Young’s modulus and low solu- vibration sensors, where inorganic piezoelectric materials are
bility, the integration of an isolated layer of these ceramic mate- the most efficient. The increase of the β-phase of the PVFD
rials with printing technology into soft and flexible substrates has been one of the most challenging investigation since their
is a challenge that scientists have in mind, trying to dodge the properties where discovered. The main strategies to increase
problems of the ink fabrication and application. the β-phase were based on the development of specific post-
Another option for the development of piezoelectric devices treatment with regular and expensive results.[49] PVDF-based
is the use of piezoelectric organic materials, such as polymers. copolymers have similar properties than the original PVDF
Organic polymers, with a low piezoelectric constant, if com- polymer but synthetic routes enable achieving compositions
pared with ceramic piezoelectric materials, have the advan- with largest contribution of the β-phase. The P(VDF–TrFE)
tage that can be biocompatible and flexible with relative small copolymer was obtained with the copolymerization between
Young’s modulus, allowing their application into soft sub- the VDF building block and the TrFE. Their analysis shows that
strates and compatible with printed electronics to be applied after the annealing at 140 °C, the β-phase was the most predom-
in places that rigid inorganic piezoelectric sensors cannot be inant structure,[50] obtaining an easy way to increase the contri-
adhered. Polar polymers like polyvinylidene fluoride (PVDF) bution of the β-phase, making the P(VDF–TrFE) copolymer a
are a promising alternative for the devices development since better option for the sensor devices application.[51]
their manufacturing is simple and cost-effective.[42] With the Organic and inorganic piezoelectric materials can be com-
adequate morphology and assembly, different sensors,[43–45] bined in hybrid systems improving the mechanical durability of
actuators,[46,47] or generators[48] devices on flexible or stretch- the resultant structure. Going further, these two materials can
able substrates are realized. This polymer is also commercially work closer in composites enhancing their individual lowest
available with different formulations adapted for conventional properties since the resultant material is flexible with large
printed techniques (both inkjet and screen printing) able to piezoelectric properties. A schematic of the different constitu-
form four types of crystalline phases, phase I (β), phase II (α), tions for piezocomposites can be seen in Figure  6, where the
phase III (γ), and phase IV. Among these four phases, only the interaction of the two different phases are shown.[52] The first
β-phase is the polar phase with a large spontaneous polarization number represents the physical connectivity of the active phase
without mechanical orientation. Due to the electronegativity of and the second one the physical connectivity of the passive
the β-phase of the PVFD provided by the fluorine atoms, the phase. For instance, mixing PZT powder in a polydimethyl-
generated dipole moment enhances their sensor activity also in siloxane matrix produces a stretchable material with very
large piezoelectric constant (d33  = 26 pC  N−1) for soft-touch
applications.[53]
Table 1.  Piezoelectric constant and Young’s modulus of the most used
bulk piezoelectric materials.
3.3. Poling Techniques
Piezoelectric Material type d33 coefficient Young’s Ref.
material [pC N−1] modulus
[GPa]
Piezoelectric polymer materials are composed by elec-
tric dipoles that are randomly oriented or following a
PVDF Anisotropic, Polymer −33 1.0–3.2 [34]
certain alignment. The copolymer poly(vinylidene fluoride-co-
P(VDF–TrFE) Anisotropic, Copolymer −58 1.1–3 [35] trifluoroethylene) (PVDF–TrFE) became popular in the recent
ZnO Anisotropic, Crystal 27 201 [36] years because of the possibility to be printed, flexible and,
BaTiO3 Anisotropic (Orthotropic), 460 94–120 [37,38] because of the presence of the block TrFE, to directly obtain
Ceramic a polar beta phase, if compared with the processing of the
PZT Anisotropic (Orthotropic), 593 60 [39]
homopolymer PVDF alone. However, it is necessary to perform
Ceramic the “poling” process. Such step, also known as thermal poling,
consists of applying a high electric field, in combination with
AlN Anisotropic, Ceramic 6 308 [40]
temperature, with the aim of aligning (at the nanoscale) all
PMN-PT Anisotropic, Single Crystal 2000 1000 [34,41]
the dipoles with the electric field, which is what eventually

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Figure 6.  Different structural composition of ceramic–polymer composites. Ceramic materials are represented in blue and polymer materials are
represented in orange. Reproduced with permission.[52] Copyright 1999, Elsevier.

yields the piezoelectric response in the material. In the first • Contact (electrode) poling:[55,56] The electrodes of the piezo-
case, a process called poling is necessary for the dipole align- electric device are electrically connected, and a large electric
ment to enhance the piezoelectric properties. Poling requires field (usually higher than 50 V  µm−1 for the piezoelectric
heating the material over the Curie temperature[54] that allows polymers[30,44,57] and around 10 V µm−1 for composites[13,58])
the molecules to move more freely. In that point, a rather is applied the device. The applied voltage is limited to the
high large electric field is applied to the material, causing the dielectric breakdown in air; therefore, this technique is usu-
dipoles to align themselves in the same direction as the elec- ally done under inert atmosphere or a vacuum chamber.
tric field (E), increasing the polarization of the piezoelectric However, the contact poling through the electrodes is the
layer. If the material is submitted to the electric field while most used, but two different kind of electrode poling tech-
it cools down, the dipoles are able to remain in that position niques can be distinguished in actuators or cantilevers.[59]
after removing the electric field, and the material goes back to When the applied force is perpendicular to the poling
ambient temperature. Poling process is only relevant for poly- direction, the d31 piezoelectric coefficient is the most domi-
crystalline ferroelectric materials, while nonferroelectric piezo- nant and the piezoelectric material shows unidirectional
electric materials, e.g., quartz or AlN, with randomly oriented stretching displacement due to the piezoelectric effect
grains cannot be poled. When measuring the polarization (Figure 7c,f ). In contrast when the applied force is in-plane
strength (P) while sweeping an electric field (E), it is usually to the poling direction, the d33 piezoelectric constant is
observed a hysteresis loop from +E to −E (V µm−1) increasing dominant (Figure 7d,e).
each step |E| until it maintains constant and a remnant polari- • Corona poling:[55,56,60,61] This technique usually needs of
zation appears in the piezoelectric layer. A graphical represen- a high voltage (6–8 kV) with the corona needle electrode
tation of this dipole alignment during the poling mechanism located at ≈2 cm from the piezoelectric layer surface.
is explained in Figure 7a and, in Figure 7b, an example of this • Photothermal poling:[55,62,63] This is a variation of the conven-
P–E hysteresis loop is depicted. tional electrode poling, where the material is heated using
Different direct contact poling methods can be performed, a laser beam allowing the poling in very localized points in
and in all cases the use of electrodes is required: areas in the range of µm2 size.

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Figure 7.  Schematic representation of a) contact poling effect where the dipoles of the piezoelectric material are aligned, b) example of a typical cyclic
P–E curve showing hysteresis, c) d31 contribution in sandwiched structure, d) d33 contribution in sandwiched structure, e) d33 contribution in top elec-
trodes structure, and f) d31 contribution in top electrodes structure.

• Electron beam poling:[55,64,65] The constant current created materials is one of the many ways explored to simplify pro-
by a monoenergetic electron beam with energy ranging cessing steps, increasing the production speed and reducing
between 2 and 40 keV aligns the dipoles of the material. manufacturing costs in order to enhance their industrial adop-
This technique allows poling very small areas in the range of tion. Fully printed devices are all-printed multilayer devices,
µm2. where the printed piezoelectric material is stacked between two
printed contact electrodes. The multilayer structure of the piezo-
electric device is usually less than 200 µm thick, responsible for
4. Fully-Printed Piezoelectric Devices a large flexibility, bending, or even stretching of the devices, to
some extent.[30]
As seen in reported works, the poling conditions are centered Metal nanoparticles based inks are commonly used for
in different combinations of electric field and temperature in the printed contact electrodes, being the silver nanoparticle
order to find the ones that allow to obtain the best piezoelectric inks the ones that is used mostly because its commercial
performances, monitoring device properties like capacitance availability, low resistivity, and cost-effectiveness. Another
or piezoelectric constants before and after poling treatment. type of conductive inks are the organometallic inks, sinter-
However, it is not possible to find correlations between the final free inks using metal particles encapsulated with stabi-
device characteristics and temperature and electric field only, lizers capable to produce ink formulations for depositing at
since the poling process strongly depends of the layers thick- low temperature, returning high conductivity metal films,
ness (active piezoelectric polymer and electrodes) and the mois- without the need for subsequent sintering treatments.[66]
ture of the whole printed system and the environment. In this These inks avoid problems of aggregation of the metal par-
particular point, it is rarely seen being reported the moisture ticles and clogging in inkjet printing, but are substantially
content of the device, since it could be for example character- more expensive. They are promising for top electrode appli-
ized by thermogravimetric analysis, or the relative humidity cations avoiding permeation through the underlying piezo-
registered in the inert gas chamber, when is the strategy electric layer. The conductive ink used to print the bottom
employed. In printed piezoelectric layers, the moisture content and top electrodes do not necessarily have to be the same,
has a predominant role in the final piezoelectric characteristics each one will be selected depending on its homogeneity
of a printed device. Printed materials are already highly sensi- when printing on the different surfaces. Furthermore, it is
tive to the moisture and temperature during the printing pro- crucial that the top electrode ink will be compatible with the
cess, and the curing process of the inks is clearly insufficient piezoelectric layer to avoid shortcuts between the top and
to remove all moisture in the system. Thus, a rigid control and bottom electrodes.
monitoring of moisture seems crucial to define a reproduc- The shape of the electrodes, and therefore the shape of the
ible protocol for poling a printed piezoelectric device based in device, will depend on the application that is going to be used.
PVDF–TrFE. If the device will be used as a sensor or actuator, their size will
be smaller than if it will be used as energy harvester, because
in the first case, the device has to be more precise to be used
4.1. Printed Electrodes in the sensing/actuation area. Also, the shape of the sensors
and actuators devices trends to be circular or square, while the
As stated before, the motivation for the development of piezo- energy harvester trends to be rectangular as will be discussed
electric devices using printing techniques and organic/inorganic later in this section with some examples.

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4.2. Printing PVDF-Based Polymers A piezoelectric ink made of P(VDF–TrFE) solubilized with
cyclopentanone and dimethyl sulfoxide was performed by Tuau
As stated previously, polymers are the most suitable piezo- et  al.[30] with a resulting viscosity of 5.4 mPs  s−1 and a contact
electric materials to be used as printable inks owing their flex- angle of 9.6° with the polyethylene naphthalate (PEN) surface.
ibility and their relative facility to be solubilized, in comparison With these parameters, the ink has an optimal formulation
with inorganic and crystal materials. PVDF is the most used for inkjet printing. This resulted in the successful printing of
piezoelectric polymer because it has larger piezoelectric coeffi- 12 layers of the piezoelectric compound achieving up to 2 µm
cients than other bulk polymers.[25] In addition, PVDF is soluble thick layer, after the corresponding postprocessing steps. This
in acetone and N,N-dimethylformamide (DMF)[67] allowing methodology was implemented to prepare a full printed struc-
changing the viscosity and density of the inks to fit the target ture, using silver inkjet-printed electrodes. The full i­ nkjet-printed
printing equipment to be employed. Moreover, it can be printed device was studied and able to be used as energy harvesters,
in different soft substrates such as polyethylene terephthalate ­sensors, and actuators in flexible electronic applications.
(PET) or paper, being the mostly used in sensors,[68,69] but also, Another promising approach was reported by Pabst et al.[75,76]
in stiffer materials for energy harvesting applications,[70] with in 2013. A fully inkjet-printed actuator, with a bending deflec-
a thickness of 3–10 µm obtaining devices with very good prop- tion, made of P(VDF–TrFE) onto PEN substrate, also using
erties. As an example, the all-printed PVDF sensors present a Ag as a printed contact electrode. They also described that the
sensitivity of 1.2 V  N−1 when are printed onto PET substrates inkjet-printed piezoelectric layer has a thickness of 9 µm and the
and 0.3 V  N−1 when are printed onto paper.[68,69] There is also complete device showed a promising piezoelectric coefficient
research done in the addition of piezoelectric inorganic particles d31 of about 9 pC  N−1 after thermal treatments (Tmax  = 130  °C)
with PVDF to selectively enhance the piezoelectric response of and plasma sintering as postprocessing steps. The fabrication
the material. This includes BaTiO3, PZT, or zinc oxide (ZnO).[71] method of the actuator proposed[75,76] is explained in Figure 8a,
Almusallam et  al.[58] proposed a device based on PZT:P(VDF– providing a cross-sectional scanning electron microscopy
TrFE) composite as pressure sensor. They found that the best (SEM) image of the final device. As reported, the actuator
composition ratio was 50:50 printing the composite in a PET has a very thin piezoelectric layer, with a Young’s modulus of
layer followed by a heat treatment for 30 min at 120  °C, suc- 2 GPa, but owing to the hardness of the Ag electrodes, which
cessfully achieving a piezoelectric device with a d31 = 17 pC N−1. have a Young’s modulus of 40 GPa, the flexibility of the final
The piezoelectric properties of the PVDF are enhanced with device decreases. A high transversal piezoelectric constant
the addition of the trifluroethylene (TrEE) which modifies the (d31 = 7–9 pC N−1) allows the generation of significant actuator
molecular chain arrangement achieving higher polarization deflections.
level of piezoelectric coefficient as explained before. Viscosities Other inkjet-printed device is reported by Lim et  al.[77] in
from 5.4 mPa  s−1 to 0.53 Pa  s−1 of the corresponding ink can 2017. This work presents a flexible piezoelectric energy har-
be found with a piezoelectric layer thickness ranging from 2 to vester (f-PEH) made of BaTiO3. The piezoelectric ink used in
108 µm, respectively. This wide range of thickness allows the this device was done by the hybridization of the nanopowder
printed material to be used in different applications, such as ceramic material with an epoxy thermoset resin in presence
stretchable pressure sensors,[30,72–74] actuators for lab-on-chip of a dispersant and DMF. Printing procedure, SEM images,
devices for point-of-care diagnostics[30,72,75,76] or generators.[76] and electrical characteristics can be seen in Figure  8b. This
Besides organic materials, printing piezoelectric composites hybrid piezoelectric layer has a thickness of 15 µm in the har-
is also possible thanks to the relative solubility provided by its vesting device with significant properties like current density of
inherent organic part. Because of the thickness of the piezo- 0.21 µA cm−2 or a power density of 0.42 µW cm−2.
electric layer (from 30 to 100 µm in reported works) and the
hardness provided by the single crystals the main applications
of the printed piezoelectric composites are pressing sensors[58] 4.4. Full Screen-Printed Piezoelectric Devices
or energy generators[13,77] because large elasticity of the piezo-
electric material is not needed. Because of its simplicity and suitability for mass production,
screen printing remains the technology most suitable for
industrial scale up of such printed devices. There are several
4.3. Full Inkjet-Printed Piezoelectric Devices reported full screen printing piezoelectric devices in literature,
again combining conductive inks to print the contacts with the
Inkjet printing offers a mask less and noncontact deposition of printed piezoelectric polymer layer. Lima et al.[71] recently have
materials onto a wide range of substrates. Nevertheless, the fab- reported a novel screen-printed and flexible multiferric magne-
rication of fully inkjet-printed devices remains difficult mainly toelectric (ME) material based on P(VDF–TrFE) as piezoelectric
due to the strict parameters that the ink needs to fulfill in terms phase and PVDF/CoFe2O4 as the magnetostrictive phase. The
of viscosity, surface tension, and particle size. The success of all-printed ME composite exhibits a −26 pC  N−1 piezoelectric
the inkjet printing technology in piezoelectric device manu- response at a longitudinal frequency of 16.2 kHz and a voltage
facturing strongly depends on the availability of functional coefficient of 164 mV cm−1 ·Oe−1. After the dilution of the ink
materials and suitable postprocessing techniques. The main with DMF, they obtained a 1.13 Pa s of viscosity at 300 s−1 shear
components of these inks are the functional material, the sol- rate. Their printing procedure can be seen in Figure  9a. Such
vent, and other additives. These two last components need to be optimized device reduces cost assembly and an easy integration
removed after printing through postprocessing steps. in large areas for sensors, actuators, and energy harvesters.

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Figure 8.  a) Schematic diagram of the fabrication method i) inkjet printing and sintering of Ag bottom electrode onto PET substrate, ii) inkjet printing
and tempering of the P(VDF–TrFE) layer and iii) inkjet printing and sintering of Ag top electrode. iv) Cross-sectional SEM image of layer sandwich.
v) Cantilever mounted on glass for characterization, vi) static and dynamic deflection behavior of cantilever actuators. The piezoelectric coefficient d31
is derived from these measurements and used to model the membrane behavior, vii) resonance spectra of cantilevers actuators and viii) deflected
shape of a membrane actuator driven at resonance and measured by a laser scanning vibrometer. Reproduced with permission.[76] Copyright 2013,
Elsevier. b) Schematic illustrations for a facile inkjet printing process and ink solvent-evaporation mechanism in the printed droplet. ii) Schemes of the
sequential process for the fabrication of an all-inkjet-printed f-PEH. iii) The cross-sectional SEM images of all-inkjet-printed f-PEH. The inset shows the
magnified cross-sectional image of a BaTiO3-resin hybrid film (scale bar: 500 nm). iv) A photograph of the fully f-PEH with a sample size of 5 × 5 cm2
(activation area of 3 × 4 cm2) achieved by inkjet printing of piezoelectric hybrid film and conductive layers. The inset shows the top surface of inkjet-
printed piezoelectric hybrid film (scale bar: 500 nm). v) The output voltage and current increased with the poling voltage. vi) Dependence of the strain
(bending radius) and strain rate on the output performance of a f-PEH. Reproduced with permission.[77] Copyright 2017, Elsevier.

Also, Zirkl et  al.[73] reported a low-cost fully screen-printed and materials tends to improve the manufacturability of
smart active matrix sensor array, using P(VDF–TrFE) as devices to bridge system mismatch issues, e.g., rheology
piezoelectric material with a thickness of 5 µm printed onto and particle size.[78] As discussed previously, there are some
a PET sheet substrate (Figure  9b). This sensor has a smaller piezoelectric materials that due to their properties cannot be
remnant polarization after hysteresis poling providing the solubilized properly and therefore used as inks in screen nor
device with− a d33 = 20 pC N−1. A magneto-electric energy har- inkjet printing. However, other manufacturing methods can
vester based on a PVDF screen-printed polymer deposited on be performed to fabricate these devices. A promising example
a Metglas iron-based substrate has been reported by Chlaihawi of this approach is with ZnO. Due to its inherent piezoelec-
et al.[70] Silver was screen-printed as top electrode on the printed tricity, good biocompatibility, semiconductor nature, and its
PVDF layer. This energy harvester had a power density of capability to form multiple piezoelectric nano-objects, this
639.6 µW cm−3 that came from a maximum power generated of material is compatible with printed technology.[79–81] Using an
8.41 µW at a load resistant of 100 kΩ and frequency of 100 Hz. ink with ZnO nanoparticles embedded on a polymer matrix
The electrodes and piezoelectric layer of the work by Zirkl et al. makes this material process compatible with printing steps in
was performed by screen printing, but the dielectric layer and a fairly easy way.[18] Posterior hydrothermal method for growing
the electrolyte ionic conductor were deposited onto the device of ZnO nanowires (NWs) from the printed seeds at mild tem-
via inkjet printing. The fabrication of complex devices using just peratures and aqueous solutions have been successful reported
one manufacturing technique limits the architecture to specific and are one promising piezoelectric device published.[78] A step
resolution or materials, whereas the combination of different forward is done in the work reported by Choi et  al.[67] where
techniques offered an advantage due to the need of multilayer a hybrid piezoelectric structure comprised of ZnO nanowires
assembly of different materials with different rheology. (NWs) grown on a PVDF polymer matrix is described. In this
way, the ink polymer matrix is also piezoelectric. They demon-
strate that ZnO NWs growth on a polyimide (PI) substrate is
4.5. Hybrid Devices conserved when ZnO is integrated in a PVDF matrix. Although
this mixed solution provides internal strain to the PVDF, rising
Hybrid devices use more than one manufacturing technique the effective Young’s modulus of the device thus its brittleness,
or combination of materials. Combining printing techniques it increased gradually the output electrical power of a hybrid

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Figure 9.  a,i) Schematic representation of the experimental procedure used to obtain the composite, ii) SEM image of the ME sample, iii) Room-
temperature magnetic hysteresis loops for the pure CFO nanoparticles, printed PVDF-CFO layer and all-printed ME sample. Reproduced with permis-
sion.[72] Copyright 2019, Royal Society of Chemistry. b) Process flow illustrating the fabrication of printed ferroelectric active matrix sensor arrays. i)
Screen printing with PEDOT:PSS to form the bottom electrodes of the sensor, ii) screen printing of the ferroelectric P(VDF–TrFE) film, iii) screen printing
of carbon to form the top electrodes of the sensor, iv) inkjet printing with PEDOT:PSS to form the gate and channel of the ECTs, v) inkjet printing of
the SU-8 separation layer, vi) inkjet printing of the ECT polymeric electrolyte, and vii) layout of an all-printed 3 × 6 sensor array with integrated ECTs.
viii) Close-up image of the channel region of the ECT. ix) AFM height image of the screen-printed P(VDF-TrFE) layer. The color map corresponds to a
height scale ranging from 0 to 55 nm. The RMS roughness of the film is 4.5 nm. Characterization of the printed sensor. x) Hysteresis loops of a fer-
roelectric sensor. The lines illustrate the opening of the loop with increasing electric field amplitude, xi) Variation of Pr, the piezoelectric d33 coefficient,
and the pyroelectric p3 coefficient on a 3 × 4 printed sensor array, xii) frequency dependence of the pyroelectric voltage response of a sensor excited
by intensity-modulated light from a laser diode emitting at 808 nm for carbon and PEDOT:PSS top electrodes. The error bars illustrate the variation
in the pyroelectric response across the 3 × 4 printed sensor array. Reproduced with permission.[74] Copyright 2011, Wiley-VCH. c) Schematic diagram
of the fabrication method i) PI as flexible substrate, ii) thermal deposition of the bottom Au/Cr electrode, iii) ZnO NW growth, iv) spin-coating of the
PVDF layer, v) cleaning of the top surface, and vi) thermal deposition of Au/Cr top-electrode. vii) SEM image of a cross section of the hybrid structure,
viii) distribution of strains on surfaces of a hybrid structure and pristine PVDF blocks, and ix) distribution of strains in mid-layers of a hybrid structure
and PVDF blocks. x) Power output of a PVDF-based NG and xi) power output of NG based on a hybrid structure. Reproduced with permission.[67]
Copyright 2017, Elsevier. d,i) Schematic diagram of the fabrication process of a poly(vinylidene fluorine)-BaTiO3 (PVDF–BTO) composite. Mixing,
spin-coating, firing, and corona poling. Finite element simulations of the strain distribution ii) on the surface and iii) in the mid-layers of PVDF and
PVDF–BTO blocks. iv) Comparison of the piezoelectric outputs with the predicted piezoelectric coefficient, measured Young’s modulus, and dielectric
constant. Reproduced with permission.[82] Copyright 2018, MDPI.

nanogenerator whit increasing applied strain (Figure  9c). power generation. Moreover, finite elements simulations were
The voltage and current outputs were enhanced ≈2.7-fold and done to model the stretch where an external strain of 3.2% was
6.5-fold, respectively. applied along an axis. This, reflects a variation of strain from
Similar work was reported by Kit et al.[82] of a hybrid piezo- 1% to 11% in the PVDF–BTO composite, however the PVDF
electric nanogenerator based in a PVDF–BaTiO3 composite. display a mean value of 3.2%, neglecting the higher values
Eventually, increasing the amount of BaTiO3 increases the on the corners of the model, which could reach up to 4.3% as
Young’s modulus until the point of 10% wt of BaTiO3, where depicted in Figure 9d.
the piezoelectric constant is the highest, indicating that the Considering the shape and design of the different devices, a
Young’s modulus plays an important role in the piezoelectric trend is observed. In the devices whose purpose is to generate

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energy, the rectangular shape is the predominant owing to the by screen and inkjet printing. The inkjet-printed piezoelectric
devices are made to be used as cantilevers, where thanks to the layers have thickness ranging from 2 to 9 µm (with individual
bending movement the output voltage is higher due to the com- layers of 100 nm) in the case of the piezoelectric polymers and
bination of the piezoelectric constants. In the same perspec- up to 15 µm each layer in the case of a hybrid resin of BaTiO3.
tive, actuator devices also have rectangular shape, remaining in Moreover, maximum areas of 2 and 12 cm2 for polymer piezo-
the concept that when applying an AC current, the cantilever electric devices and hybrid piezoelectric devices have been
moves. In other type of actuator devices, circular shapes are found as the maximum inkjet-printed piezoelectric area to our
usually reported. In contrast, sensor devices no longer appear knowledge. The feasibility for scale-up production, and the
with rectangular shapes but usually show square or round potential for printing multifunctional materials is increasing,
shape with smaller electrode area. making possible future printed areas in the scale of the squared
The summary of the all-printed piezoelectric devices dis- meters could be feasible. However, recent developments are
cussed is shown in Table 2. In this table, the referenced papers done at small scale using desktop printers, exploring new mate-
are ordered according to the different printing technique and rials, and focusing on getting the best performance of devices.
the different devices are arranged by their printed material, For the screen printing technique, piezoelectric individual
the printed substrate, the device design, the poling technique layers can have larger thicknesses, from 2 to 100 µm, as in the
applied, and the main properties reported by the authors. case of PVDF–TrFE and BaTiO3, respectively,[57,78] owing to the
Each application reported has different target technologies difficulty of processing thin masks for the printing production.
and different adoption barriers, both commercial and tech- In comparison with inkjet-printing, bigger areas of printed
nical, and each one is at different stages of technology readi- devices can be found with screen-printing where maximum
ness level. areas of 12 and 100 cm2 for polymer piezoelectric devices and
hybrid piezoelectric devices, respectively. Because of these dif-
ferences in area and thicknesses, it is more common to use the
5. Outlook and Conclusions devices produced by inkjet printing as sensors and the ones
made by screen printing for actuator applications. Organic
All printed piezoelectric devices have the singularity to be used polymers, such as PVDF and its composite P(VDF–TrFE), are
in integrated and multifunctional applications, from mechan- the most used piezoelectric materials for printing electronics
ical energy harvesting, to sensing and actuation. The evolu- owing their relative easiness in the ink production. Neverthe-
tion of printed piezoelectric devices and their applications is less, current research focuses achieving inks and hybrid devices
closely linked to advances in materials synthesis compatible based in piezocomposites composed by ceramic materials such
with printing techniques to reach d33 piezoelectric coefficients as BaTiO3 or PZT as piezoelectric nanoparticles blended with
with at least 15 pC N−1. It is noteworthy that the most reported polymers or resins. These have reported larger piezoelectric
fully printed device is the pressure sensor. Piezoelectric pres- constants than the printed piezoelectric polymer alone, up to an
sure sensor has the capacity to measure pressures as low as order of magnitude, achieving a d33 > 40 pC N−1 in a generator
0.1 Pa for applications in robotics and with high sensitivity made of PZT–PVDF. And finally, but of crucial importance,
touch interfaces. However, for applications that do not require is the variability of device performance due to lack of control
sophisticated functionality, such as 3D touch or proximity of the poling process of PVDF, being the contact poling while
sensing,[84–86] piezoresistive sensors are the widely used due to heating under inert atmosphere the most common and effec-
their low technology complexity, which is more mature tech- tive one still remains an open challenge and with considerable
nology, longer established, and being used in automotive and lack of reliability.
medical applications. The main limitation of piezoelectric pres- Printed piezoelectric devices as key building blocks for their
sure sensors in some applications is that they are more expen- application in smart textiles or flexible electronics require fun-
sive to manufacture and less straightforward to integrate. damental studies about printed layers homogeneity to conserve
Although printed piezoelectric devices have unique capa- their piezoelectric properties obtained in laboratory conditions
bility with their multifunctionality, their sensing applications and when integrated into functional prototypes. Open chal-
are rather niche, and it is expected that with the mature of their lenges include that not all the piezoelectric materials are com-
use as energy harvesters will increase their application to enable patible with printing techniques, new methodologies related to
self-powered sensors. There is no doubt that, as the technology the materials and workflow to prepare the printed electrodes
matures, the number of applications will keep increasing. As in the devices. The techniques and materials presented in this
fully printed devices, their field of application is extensive, with Progress Report show promising candidates to be used in off-
great interest in wearables and biomedical systems, this is the-shelf products of tomorrow. The future mass production
because of their capabilities in rending piezoelectric devices in of printed piezoelectric devices settles on the combination
thin and soft formats. Most of the printed devices discussed in of different materials and printing techniques and the con-
the earlier sections are not addressed to a specific application, trol of printing parameters in each step. Despite several open
focusing more in the fabrication, characterization, and perfor- challenges, the main bottleneck existing today is still the lack
mance of the materials and the whole printed device, and just of readily available piezoelectric materials compatible with
validated in laboratory scale. It is also seen the lack of a critical printing techniques, imposed by high cost, the strict rheolog-
analysis of device variability and how to tackle it. ical properties that inks need to meet, particularly in terms of
In summary, all-printed piezoelectric devices offer prom- viscosity and surface tension and lack of robustness of poling
ising applications and the ones reported are mainly developed processes. More efforts need to be done in order to increase

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Table 2.  Summary of the main works reporting all-printed piezoelectric devices sorted by printing technique.

Printing Transducer Material Substrate Shape & Poling Characterization Properties Application Year Ref
technique type Size area
(equipment)a)
Inkjet Printing Generator BaTiO3 PI Rectangle Different Surface and cross- Output Flexible (2017) [77]
(UJ 200 hybrid 12 cm2 contact poling section (SEM) voltage = 7 V electronics
UNIJET) (resin) tests (from 50 Morphology (SEM j = 0.21 µA cm−2
to 300 V µm−1) and TEM) PD = 0.42 µW cm
Particle size and Thicknessb) =
size distribution 15 µm
(Image J)
Crystalline structure
(XRD)
Vibration modes
(Raman)
Inkjet Printing Sensor, PVDF–TrFE PEN Square Contact poling Thicknesses Ink Flexible (2017) [30]
(NM) actuator 4 mm2 at 100 V µm−1 (Profilometer) Surface tension = electronics
and (sensor) Surface tension 35.6 mN m−1
generator Rectangle (contact angle, Contact
5 mm2 goniometer) angle = 9.6°
(actuator)
Viscosity Viscosity =
(Rheometer) 5.4 mPa s
Dielectric response Device
Piezoelectric d31 = 10.4 pm V−1
properties
Pr (50 MV m−1) =
7.8 µC cm−2
Thicknessb) =
2 µm
Inkjet Printing Actuator P(VDF– PET Circle Contact poling Cross-section (SEM) Y = 40 GPa LOC (2013, [75,76]
(Omnijet 100) TrFE) 1.75 cm2 at 44 V µm−1 at Static deflection d31 = 7–9 pC N−1 devices 2014)
(membrane) RT for 1 min (laser triangulation for POC
Pr = 5.8 µC cm−2
Rectangle displacement sensor diagnostics
0.75 cm2 Thicknessb) =
and high voltage
(cantilever) 9 µm
amplifier)
Dynamic deflection
(laser scanning
vibrometer)
Calorimetric
measurements
(Between −20 and
200 C)
Morphology (AFM,
XRD and NT MDT
Solver)
Screen Printing Sensor PVDF–TrFE PET Square NM Surface morphology Rs = 0.09 Ω sq−1 Flexible (2018) [73]
(NM) 1–3 cm2 (FE–SEM) Thicknessb) = sensing
Layer structure (EDX) 18 µm
Screen Printing Sensor PVDF–TrFE PET Square Contact poling Data acquisition Thicknessb) = Flexible (2019) [83]
(homemade) 2 cm2 at 100 V µm−1 system 30 µm electronics
at 120 °C for (Oscilloscope) d33 = 19 pC N−1
15 min Thicknesses
Piezoelectric
properties
Screen Printing Sensor PVDF–TrFE PEN Circle Contact poling Data acquisition Thicknessb) = Healthcare (2019) [57]
(MT320T, 7 cm2 at 50 V µm−1 at system 2 µm monitoring
Microtech) 140 °C Thicknesses operating voltage
= −3 V

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Table 2.  Continued.

Printing Transducer Material Substrate Shape & Poling Characterization Properties Application Year Ref
technique type Size area
(equipment)a)

Screen Printing Sensor PVDF PET and Squares NM Substrate surface Sensitivity = Flexible (2015, [68,69]
(AMI MSP 485) paper 1–9 cm2 energy (Goniometer) 1.2 V N−1 (PET); electronics 2017)
Thickness and 0.3 V N−1 (paper)
roughness (scanning Thicknessb) =
interferometer 10 µm
microscope)
Sheet resistance
Crystallinity &
β-phase (XRD)

Screen Printing Generator PVDF Metglas Rectangle Contact poling Data acquisition 100 Hz Energy (2016) [70]
(HMI MSP-485) iron 3 cm2 at 80 V µm−1 system (2 MΩ load harvester
based for 2 h (Oscilloscope) resistance) =
Thicknesses 2.25 V
Thicknessb) =
3 µm
PD = 639 µW m−3

Screen Printing Generator PZT–PVDF PI and Square Contact poling Dielectric properties εr (ω) = 171 Textile (2017) [13]
(DEK Printing (2.57:1) + Woven- 100 cm2 at 3.7 V µm−1 Piezoelectric d33 = 43.5 pC N−1 electronics
Machines Ltd) 0.2% Ag fabric at 75 °C for 6 properties Thickness (total
min
Thicknesses generator) =
100 µm

Screen Printing Sensor, PVDF–TrFE Teflon Square Corona poling Morphology (FEG/ Ink NM (2019) [72]
(NM) actuator 12 cm2 at 120 °C SEM, after gold Viscosity =
and coated by magnetron 0.53 Pa s
generator sputtering)
Device
Piezoelectric
Thicknessb) =
properties
108 µm
Thicknesses
d33 = −26 pC N−1

Screen Printing Sensor PVDF–TrFE PET Circle Contact poling Piezoelectric surface d33 = 20 pC N−1 NM (2011) [74]
(TIC SCF-550) 1 cm2 (hysteresis morphology (AFM) p3 = 278 µC Km−2
Inkjet Printing loop at 75 Dielectric properties Pr (70 V  µC−1) =
V µm−1)
Electric properties 52 mC m−2
Piezoelectric Thicknessb) =
properties 5 µm

Screen Printing Sensor PVDF– PET Square Contact poling Dielectric properties εr (ω) NM (2015) [58]
electrodes TrFe:PZT 1 cm2 at 15 V µm−1 at Electric properties (1 kHz) = 69
(Dupont (50:50) RT for 1 h Pr (34 MV m−1) =
Piezoelectric
5064H) 4.8 µC cm−2
properties
Doctor Blade
Thicknesses d31 = 17 pC N−1
technique,
composite Thicknessb) =
30–60 µm

Roll coating Generator BaTiO3 Cu Rectangle Contact poling Cross-section (SEM) Output Wearable (2019) [78]
(piezo electrode 4.5 cm2 at 3.6 V µm−1 voltage = 1 V sensor
BTO-carrot Thicknessb) =
composite) 100 µm
and Screen
Printing
(electrode)

a)ε (ω) = Relative Permittivity; P  = Remnant Polarization; R  = Sheet Resistance; PD = Power Density; j = Current Density; d  = Piezoelectric constant; Y = Young’s Mod-
r r s xy
ulus; p3 = Pyroelectric constant; LOC = Lab-On-Chip; POC = Point-Of-Care; NM = Nonmentioned; b)Thickness of the total amount of piezoelectric layer.

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Marc Alique has obtained his B.Sc. and M.Sc. degrees at University Autònoma de Barcelona
(UAB). Currently, he is a junior researcher at Fundació Eurecat-Centre Tecnològic de Catalunya,
working on printed piezoelectric sensors and actuators and has engaged in a doctoral thesis under
Eurecat Vicente López scholarship program, about novel printed piezoelectro devices in wearable
applications, in collaboration with Institute of Microelectronics of Barcelona (IMB-CNM, CSIC)
and UAB.

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Claudia Delgado Simao is a project leader at Fundació Eurecat. She obtained her M.Sc. degree
in Chemistry by Universidade Técnica de Lisboa (Portugal) in 2007 and her Ph.D. thesis in
Materials Science by Universitat Autònoma de Barcelona (Spain) in 2011 on molecular electronics.
Her research interests span over materials science, self-assembly, organic electronics, surface
engineering, and printing technology for energy and medical devices, and human–machine
interfaces.

Gonzalo Murillo received his Electronic Engineering Degree from the Universidad de Granada
(Spain) in 2007. He obtained his M.Sc. in Micro and Nanoelectronics and his Ph.D. from the
Universitat Autònoma de Barcelona (UAB) in 2008 and 2011, respectively. He was a researcher
at the Nanotech-DTU (Denmark), MINATEC (France), International Iberian Nanotechnology
Laboratory (Portugal), and Georgia Institute of Technology (Atlanta, USA). His current research
field is the piezoelectric and triboelectric energy harvesting for IoT, self-powered flexible
implantable and wearable devices, and human cell stimulation.

Ana Moya is a senior research at Fundació Eurecat. She received her Ph.D. in Electrical and
Telecommunication Engineering in 2017 from the Universitat Autònoma de Barcelona. From 2008
to 2019, she formed part of the Biomedical Applications Group at the Institute of Microelectronics
of Barcelona (IMB-CNM, CSIC). She gathered an interdisciplinary scientific background, with
solid experience in the design and development of electrochemical sensors through printing
techniques.

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