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Paper: A Growth Mechanism For Graphene Deposited On Polycrystalline Co Film by Plasma Enhanced Chemical Vapor Deposition
Paper: A Growth Mechanism For Graphene Deposited On Polycrystalline Co Film by Plasma Enhanced Chemical Vapor Deposition
1616 New J. Chem., 2013, 37, 1616--1622 This journal is c The Royal Society of Chemistry and the Centre National de la Recherche Scientifique 2013
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Table 1 The portion of chemical species for G1, G2, G3 and G4 based on XPS full width at half maximum of the 2D band (FWHM2D) are used
results to distinguish the graphene layers.35
Samples G1 G2 G3 G4 La is inversely proportional to the ID/IG value and
2 could be evaluated based on the equation: La (nm) =
sp (CQC)% 74.0 74.2 74.4 74.3
sp3 (C–C)% 20.2 20.1 19.9 19.9 (2.4 10 10)llaser4(ID/IG) 1, where La (nm) is the crystallite size
C–O% 5.8 5.7 5.7 5.8 in the surface layer of few-layer graphene, llaser (nm) is the
wavelength of incident light.34,36–39 According to the Raman
spectra, we have evaluated the average value of ID/IG, in-plane
carbon bonding, sp3-hybridized carbon bonding and C–O grain size (La), I2D/IG and FWHM2D of graphene, as shown in
bonding in G1, G2, G3 and G4 exhibit no significant differ- Fig. 3(a)–(d). The ID/IG dramatically decreases with increasing
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ences, indicating the four graphene samples have almost the deposition time from 15 s to 40 s, while the ID/IG greatly
same bonding structure. increases with increasing deposition time from 40 s to 360 s,
Raman spectroscopy is a relatively easy, nondestructive, indicating the highest graphitic degree and the largest grain
non-contact and fast technique, which can give structural size of G2. The I2D/IG and FWHM2D values for four samples are
information of graphene, and has been widely used to char- >1.2 and o80 cm 1, respectively, which provides direct evidence
acterize the structural properties of graphene, such as graphitic of few layer graphene (average number of layers r 3).18,35,40
degree, in-plane crystallite size (La) and graphene layers.20,34,35 Furthermore, the Raman spectra from G2 reveal that the
The representative Raman spectra for G1, G2, G3 and G4 are FWHM2D value as well as standard deviation of I2D/IG and
shown in Fig. 2(a)–(d), which were taken without transferring FWHM2D are the smallest among the four samples. These
the graphene from the Co substrates to insulating substrates. suggest that G2 has a relatively uniform number of layers,
There are two main peaks between 1000 and 3000 cm 1: G band compared to either of G1, G3 and G4, although the four
at B1584 cm 1 and 2D band at B2700 cm 1, which are the samples are all few-layer graphene.14,18,35
characteristics of graphene. Besides the G band and 2D band, a There are a lot of linear defects with higher activity at the
disorder-induced D band around B1354 cm 1 is also observed grain boundaries of polycrystalline Co film,14,17 which will lead
in Fig. 2. The D band originates from the graphene edges, grain to the easy absorption and the enhanced diffusion of carbon
boundaries, sp3-hybridized carbon bonds and oxidation func- radicals on these defects. Considering La as an average grain
tional groups. The G band corresponds to the in-plane vibra- size of graphene, one can assume that the higher the number of
tion of sp2 carbon atoms (E2g), which presents the Raman active grains, the higher the D peak intensity, and hence the smaller
for sp2 carbon networks. For a qualitative analysis of the La.34 When the deposition time is 15 s, only a few discharging
graphene, the integrated intensity ratio of the D band to G carbon radicals can be provided to grow graphene, causing a lot
band (ID/IG) can be used to evaluate the graphitic degree of of small graphene domains to appear on the surface of the Co
graphene. The 2D band, the overtone of the D band, is due to film. Upon increasing the deposition time to 40 s, there are
the two-phonon double resonance Raman scattering process enough discharging carbon radials for graphene growth. Thus,
and it is sensitive to the stacking order of graphene sheets graphene domains rapidly grow up by gathering C2 radicals on
along the c axis. Therefore, the lineshape, the frequency and the the active sites of graphene boundaries. If the deposition time
is further increased (90 s and 360 s), the graphene domains
Fig. 2 Raman spectra of (a) G1, (b) G2, (c) G3, (d) G4 and (e) graphene grown Fig. 3 (a) ID/IG, (b) in-plane grain size (La), (c) I2D/IG and (d) FWHM2D values of
for 20 min. graphene as a function of the deposition time.
1618 New J. Chem., 2013, 37, 1616--1622 This journal is c The Royal Society of Chemistry and the Centre National de la Recherche Scientifique 2013
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Fig. 4 (a) and (b) SEM images of graphene grown for 20 min. The SEM images
were obtained by tilting the sample stage with (a) 01 and (b) 451.
near the Co grain rapidly grow up and cover the Co grains. For
the second layer growth of graphene, the catalytic nature of Co
film is greatly weakened. The CHx radicals can not be further
dissociated by the Co surface,23 and the attachment of CHx
(x = 1, 2, 3) radicals on the active sites of graphene boundaries
will terminate the extension of graphene domains. Meanwhile,
Fig. 5 (a) TEM image of graphene grown for 40 s. (b) and (c) TEM images of
new nucleation sites of graphene are formed and then grow graphene grown for 20 min. (d) HRTEM image taken from the area indicated
up on the Co grain, which leads to a large number of with an arrow in (c).
graphene boundaries on the Co grain, and thus the ID/IG value
increases.
In order to reveal the influence of grain boundaries of Co impurities are crystalline particles with different orientations16,42
film on the formation of graphene, the deposition time was and the inter-planar spacing for these crystalline particles is
increased to 20 min. Fig. 4(a) and (b) show the SEM images of 0.232 and 0.198 nm, agreeing well with that of (100) and (101)
the sample grown for 20 min, obtained by tilting the sample planes, respectively, for graphite.
stage at 01 and 451, respectively, from the e-beam direction, It is worth noting that XRD patterns in Fig. 1(b) and in our
from which it can be observed that many vertical flakes are previous work19 show a higher intensity of the Co (111) peak
formed at the boundaries of Co grains, resulting from the high than that of the Co (200) peak of polycrystalline Co film before
activity of defects at the grain boundaries. It is well-known that and after annealing. Also, the triangular Co (111) plane is prone
different kinds of metals, such as Co, Ni, Cu, etc., can be used to have more similarities in crystallographic geometry with the
as substrates to grow graphene. An important reason for the hexagonal graphene lattice than other Co crystal planes, thus
high efficiency growth of graphene is that the solubility of reducing the nucleation barrier, since the lattice mismatch between
carbon into metals is low but enough for the formation of graphene and underlying metal can not be ignored.21,43 Hence
graphene. However, for the polycrystalline substrates, as grain we will investigate how the Co (111) plane influences the formation
boundaries are highly active and can enhance the diffusion rate of graphene. In order to verify the growth mechanism of
of carbon radicals, this will lead to the formation of graphene at graphene on the Co (111) surface, the diffusion of carbon
the grain boundaries preferentially. If two growing graphene atoms from the subsurface octahedral sites to the Co (111)
domains meet each other, graphene sheets are forced to rise surface and the diffusion of carbon atoms over the Co (111)
upwards, causing the formation of vertical flakes.41 Fig. 2(e) surface using DFT code is explored.
shows the Raman spectrum of the sample grown for 20 min, in The calculated lattice constant of bulk Co is 3.554 Å, which
which three peaks at 1355 cm 1, 1584 cm 1 and 2710 cm 1 is in good agreement with the previous theoretical result.44
appear, corresponding to the D, G and 2D bands of graphene, There are four unique high-symmetry positions for the adsorp-
respectively, and its ID/IG and I2D/IG are 0.33 and 1.23, respec- tion of carbon atoms on a Co(111) surface: the top site, the
tively, which indicates that few-layer graphene with a high face-centered cubic (fcc) site, the hexagonal close-packed (hcp)
graphitic degree has been prepared. site, and the bridge site.45–47 Fig. 6(a) shows the schematic
TEM and HRTEM images provide an insight into the mor- representations of the high symmetry sites on the Co(111)
phology and atomic structure of the graphene film grown for surface. The adsorbed surface is fully relaxed and the adsorbed
20 min. It is apparent that the graphene film grown for 20 min carbon atom comes to its favorable position. For the adsorption
is transparent with many black impurities (Fig. 5(b) and (c)), on the top and bridge sites of the Co (111) surface, the carbon
which is proposed to be due to the presence of vertical graphite atom moves to the neighboring hcp site after the geometry
flakes on the graphene film, while the graphene grown for 40 s optimization. The calculated results indicate that the carbon
(Fig. 5(a)) is clear and transparent. The lines in Fig. 5(d) (taken atom prefers to adsorb only on the three-fold hollow sites (hcp
from the area indicated with an arrow in Fig. 5(c)) show that the and fcc) of the Co (111) surface.
This journal is c The Royal Society of Chemistry and the Centre National de la Recherche Scientifique 2013 New J. Chem., 2013, 37, 1616--1622 1619
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that from the hcp site to fcc site is 0.44 eV, demonstrating that
the penetration of the carbon atom from the subsurface to the
surface shows extremely high barriers compared with the
diffusion on the surface.
Based on the experimental and DFT results, the growth
mechanism of graphene on polycrystalline Co film is revealed
in Fig. 7. (1) After the Co film is heated up to 800 1C in the
protection gas, plasma power (200 W) is applied to decompose
methane into carbon radicals (CHx, species impinging from the
gas phase in plasma, x = 0, 1, 2, 3). The C2 radical is favored to
grow continuous graphene, while the other carbon radicals will
prevent the extension of the sp2 network of graphene; (2) in the
case of a thermal substrate, carbon radicals will further dissociate
on the Co surface, providing more C2 radicals for growing
graphene; (3) some of the carbon radicals diffuse into the Co
Fig. 6 (a) Adsorption sites of carbon atoms on the Co (111) surface. Co1, Co2 film, while other carbon radicals will cause the direct growth of
and Co3 denote the Co atoms of the first, second and third surface layers,
graphene at the grain boundaries and on the surface of the Co
respectively. (b) Relative energy versus the diffusion path. Cos denotes the
configuration that one carbon atom is in the subsurface octahedral cavity (os),
film. If the Co surface is covered by the first graphene layer, the
Chcp and Cfcc denote the configurations that one carbon atom is adsorbed on the catalytic nature of the Co surface to dissociate carbon radicals is
hcp site and fcc site, respectively. greatly weakened. Then more CHx (x = 1, 2, 3) radicals are
attached to the edges of graphene domains, causing the
formation of graphene with smaller grain size in the second layer
The mobility of the carbon atoms plays an important role in than in the first layer; (4) afterwards, in the process of cooling,
the growth of graphene.48–50 Therefore, the investigation of the some carbon atoms segregate from the interior of the Co film and
reaction pathways for the penetration of carbon atoms from the migrate to the Co surface to extend the graphene network.
Fig. 7 Schematic illustration of the growth mechanism of graphene on polycrystalline Co film by RF-PECVD.
1620 New J. Chem., 2013, 37, 1616--1622 This journal is c The Royal Society of Chemistry and the Centre National de la Recherche Scientifique 2013
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is more easily formed by a surface direct growth process. J. Phys. Chem. C, 2011, 115, 5232–5238.
19 S. M. Wang, Y. H. Pei, X. Wang, H. Wang, Q. N. Meng,
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1622 New J. Chem., 2013, 37, 1616--1622 This journal is c The Royal Society of Chemistry and the Centre National de la Recherche Scientifique 2013