contents_vega [Vega-Help] Page | of 165 VEGA3 microscope Table of contents moses Regal * fleican Calm + imasina at Lew Magnitcaon 1 tmaaiaa of aon cnducve samalas without contog Man wanda + image manager 1 Ussrmansaer ‘Datecors contauation age Confiauration ins Toohae acum canst + Nassmanipulatrs * 30.Scanning file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 2 of 165 + imase Sxmnner aclas estonae g ySepees 1 eas 1 Becion oats centering ‘Biament cach lschanca Gun Canton Vacs Abstr Hole Isetinn = L286 += OPTIONAL EQUIPHENT Water Vapour nit Svar User Manual Safety instructions Byam sutorzed parson. It's ao forbidden to substtte » part of the Microvcope by ony lhe ete thats Not Seine! ahd Mot delvered by the Micescope prosucer (es, the suttutan ef te orginal et binds onthe fanges Of the mrescpe chamber by the ght aay tings can cau a0 oF arent evacuate te marin vast): The deacovaton Of hese pokes a 4 are net dangerous inthe aspect ofthe mentioned regulation stand (the acodental ouch can only eves {1 these safety instructions are not followed strietly als, this can result n endangerment of persons and damages to components. Microscope Repairs file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 3 of 165 Microscope Repair and the Spare Parts Usage 1k ony alowed to use arial spare parts delivered by the manufacturer. Te apa end the maintenance, which exceeds the arocedures menined inthis Inanua' an be performed only bythe manctachur” sence technalon or service teehncon fem the approved comgany ‘The Fuse Replacement Serves teemilon from the manufacturer of the service Technion ofthe approves Company. The fis canbe replace onl by exact ho sme "pe the eluted topes: Health Salus, Self Test, Remote Contra! Electron column ‘Te scanning seston meroscope pays the examined object by means of thin electron probe. The colin forms the secron probe (Seam) ang seeps {he ueam ever the Iestigated specimen locota nthe miroscape chamber. The mest imaging Gualies of Ove arescope depend an the parameters 3 Os ‘tecvon beam Seo sie aperere angie ane bear ners ‘The Spot ane - dtermines the retlution ofthe microscope as wel at an usable mapificlion a the stable picture shares te mn considered that the sets eur and hes got a Gaussian intensity aati. So we can speci Is sof exmale wh hat the mith of the nensitydsouten. 1 there are 15 serrone a ne pte! syitem taken in acount he spate determined by te tae ote elecran source and ex cempniention, Praca, oe Spot Sues dences by the opel aberatons of tefl ens he objective The spot ses Sater a Short working distance, Incident electron beams cone-shaped. The vertex angla ofthe cone is determines by the aperture angle, The Sager the aperture angie, the arr the {aves The larger the cae the lower he dap ffasa. Th way the defects af he fs are more event The aperture angle sales nger mo ‘Sstance an a the srvallorGemagifiation the obecve lens ‘The current of the incident beam -is determined by the number of electrons that pase trough the probe the defined time. Te crrent intent inthe robs incoeses sccoraing fo the apetare angle ss wet asthe Spot 26. The age hase of the elon microscope depancs on the numba” of eectrons [ed er'the normeton sequins of sch picture ements nacetery to ure mare tne for mage seaning at 9 smal probe ren sn wee ves is evident tht te incident beam parameters inluence each cer. The apt system ofthe micscope allows operation Inte diferent made when ‘ome parameters ofthe eam can ba prferee andthe str sen e kop sown Ther te some ype! Sram High magnification - I: = necessary to reach high rasluan, small spot azo, as wal ae ebrrtions ofthe lens short working tance) and @ small {pemure angles Asai probe curene snort workeng dance ane Sow scanning spbed must be use ror there condone gh nena he sot se and spare angle ae Breslin fs Uses mgnfaton esl fae seaming con be ued bes the ‘Sova noge rao beta forthe mage High depth of sus «The aperture angle must be smal, working etance Jong ane the demagnication ofthe lens smal, but the spot sta big nd ‘The columa of the mlroscape i an elecwon optic system for forming ane postonng of he electron bean. ‘The electron gun is 2 source of accelerated elecrons. consis of cathode, Wehnek cyinder and ane, The cathode ané Wehnel ender ae connected {e'the negnve szccic poeta, the anode ne the remaining part afte clumn are onthe earth petenea. Te eathoce 8 tungiten lonhanm Nenaborice (Lat) lamar, eated on a such high trnparaure att causes eission of ae electors The wahage betwean te Welt cyner end the ‘node datrminates the accelerating voage of wecons and so ther energy. The leans tat flow From Ee gun fe specied wih the amtsion current. The Emtusion caret can be changod by appyig the nope pte Datncen the Wennek eynder andre athege (Dec) Tee whole gun astm wares Hoe “fea source” of wecrons wt te “allowing specteawons sve eimenson 25.50 ym (sb mil LABS ured, te elecirne eneray som 200 eo 920 kl, the erason curart upto 300 yf ond rightness 10° Alene (10"Aen?ar# LEB ir e) ‘Mote: The (265 cathode can be used ony ip the VEGAS SEM with LABS option since t requires higher vacuum ithe Quand therefore agusted pumping Syste “The gun centering i fored by system of electromagnetic deli cis under the pu, It i inlended for he ttng ofthe electron beam eit from tho uso tat enors the aes ofthe opal system of te column, ei contol by sha function gun alignment tre gone comecey covtored nthe ‘The sor aperture i lace under the entering cols ofthe gun It Intended fr the retaining ofthe marginal pats ofthe electron beam emitted by the ‘The couple of condensers C1 and C2 te tang mapneic anes for Ue demaghifilion of he virtual source. The higher the excatlon ofthe condense, ‘he shores foe! ong ane se hgher ts demagneatan ‘The final aperture cus the sizeof the fa Incident beer It spc in the Holer tthe end ofthe centr! vacuum pipe ofthe eatin, about 60 mm Under condencer C2 Te optimum sw tte aperture hole 59 ih ‘Tee aunty lone IML is» magnetic ensure forthe aperture change of he beam entering t he ln Oo forthe dsplaying OB is off. the change of ths excation IML causes the shiting ofthe electron ben across the optic’ ane and Sartore lek necessary fo comosraste tis enftng by means of the ‘anterng eae IML Comering. “The Stigmator i electromagnetic etl. Is intended forte compensation of the esimatis nal the modes, “The seanning colle ae formed by wo stages of the cect cols. A Scanning ramp is connected to the cls. The rama fecueney determines the scaning file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 4 of 165 speed a the alecran beam; tne smpltade determines the miroscope's fel of wew ane the magnieation ‘The Objective 06) i the ast magni las ofthe clumn thal frms the resulting electron beam. In the usual modes ne excaton of OB) i eeterined by ‘he worsing dtanca, the dance Setwoeh the ower abjecove pe ples and the Soocmen surface, oF amarent scanning mods. ‘The foloning charts shows the eosstection ofthe VEGA 3 electron colin ‘oun cu ENING once» PEA, Sa ee me BS me 1 ideild ode 1 Ghameliog made Chamber ‘The ehamber is» sealed space uncer he column for placa your aeciman for investsaton Tespeinen ne ote sama tas, this lowing you to move your sme rag he venation sce, he cher ua eevee ig _ oma tarnm aaa % bo file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 5 of 165 VEGA3 SB model Faire ners th tit als ls onthe srace pane ofthe sample «tore nosh fr mm’ eh) nach cae ‘Note: A motonsed stage wit readout postion necessty i outomat stage moverens re required during sample observation (a9, entenng the since Dou, Parties Advance, Inase Sepast. Note: A specimen movement ranges are ony informational. The ral rnges depends on sample size and nstlied detector confgurmon) Sample stage pA Meter and Touch Alarm 3nd the chamber body oecrs ll motoring als wl stop and 29 audible sound wl ciate the contact (Toweh Alarm). comer Rolted opis Eucntre aston, Stage Confusion, Stage Conta, Sane Coordinate Syste, Vacuum modes Fr (zo the ele boa), Labe-ecpsed mierorcpes wth sours pomang systems cn wore ony nigh vacium mds (= &003 Fa) ot Wace mode "S00", aptonaiy 3 = 2000, Tow vacuum aperture holder hos ea be serod ino the abjacve secrdng tothe iaructons inthe chaplor 2° ‘ow Vacuurs erate Hoar Inston “1388 file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 6 of 165 lets only posse to investigate canductve samples nthe high vacuum mode, Ite necessary ture the meu rth ow vacuum made to nverigate the om eonuualve samples. Foes [eremore el] monn Woe ee ‘Mote: The tbiedesebes te pressure ranges fer mirescopes without L285 option. 1 Hoh vacuum sees + Extended ow Vacuum Moss Ie fe posse to examine samples using all the epiving modes in the gh and in the medium vacuum made = up to 150 Pa, because te afferent Ris posse to examine samples using ony the RESOLUTION ane DEPTH modes nthe low vacuum made-up to 50 Pa (upto 2900 Pa he microscope Is Sloped mite secondary ery bite, bechoo the eet puepng aperture bead te tre pakion, Aelated topics: Vacuum pane), Low Vacuum Made panel, imaing of non-conductive samgles without conting Detectors. ‘The detection system contains teat ane detector of product of cron beam nerston with the sample surface. The mioscopes mede by TESCAN are {tnoys covered with aE detector. Allvarale pressure modes and medels of combines SEM wih 8 are elvered with « BSE detector. 1 se datedors 1 esters gale cetecer weno getsctor Switching on detectors For using 2 detector select appropriate detector nthe ist box in the Detectors K Mixer panel 1 InBeam SE - requires activation of the InBeam Mode 1 LSID - low vacuum made ad pre-pump of the detectors required file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 7 of 165 Basic microscope accessories and their use ‘Mote: ths document consis nly he spec ond the most ipertant types ef accessories o show wht kind o use. The exact Isis ineude as 2 pockasing Ietvor accessories. 1. sattng rod forthe aperture hoe. 2. The bse specimen stubs 5. Carbon conducive acheive dts for banding the ample tb. 4. The nose forte entarng ofthe Mehra cyinder 5. Tungsten eavoae. 6, Thedtance washers 2, aperare holder. 1. Azores (the number and sizeof he spares depend to micoope YP. 11, Vacuum grease ~ used for sealing of 12, at eezrs~ genera use 13, Fat scewarver, #96 3.2 mm ~ general use, 18, Hoxagoral serendever, ze 2.5 mm ~ ured for mounting / demeurting sample stage 2 extensions (1S, LM chambers) and the stub holers (AM chamber. 15, Hexagonal seremiver, size 1.5 mm ~ Use or xing te screws in the samo stage ana securing te serene of he cathode 16. Hoxagoral Serenetiver, size 3.0 mm ~ general use, manly various NangeScrans, the Mast common Sa Used for Screws. Additonal accesses for the VEGAS SEM wit 6 option: 1. Antimagnetetweszers curved 2. spare ving, sige 34 mn ‘Specimen Holders ‘Te specan holders ites sceording tothe delved microscope type, here you wl ad ony the overview of heal aval ype. & [peed nasereiessnne Sone sce srtsncaps ahs + mm. Te men cen ede ssa any eile sonra. Te esunen rca 9/20/2015contents_vega [Vega-Help] Page 8 of 165 nein nt 8k hia of rd eon nes se a rn be ee Keyboard “Te keyboard used for text and numer Inputs usage does nt der rom the Windows system orate. + Kovboand shoexts Mouse ‘The mouse usege flows the Windows system pratee file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 9 of 165 Mouse funetans dng normal scanning + Double ick withthe left mouse button onthe scaning wincow switches the Focur Wind on an oft 1 Turing the mouse whee! changes the Sean Speed {ifthe mcroscope # scanning over the whole scanning window, ten cling onthe Hight mouse button oper the context menu for simple program ‘the meroscoe is sconing any in the Eacus Window, then 1 hoiing down the left mouse button nod dragging the enouse cursor inthe scanning window moves the focus Wadow. 1 the doubie icing of the right mouse Button oo the Fas Windom moves Wis window tothe cane of Ue nage, * lng onthe right mouse button out of te Focus Windan opens the cntex manu the simple arogram conto ‘The foloningsperaons are avail or the mérascape eqlopes withthe motorized sage 1 Cicking the mouse wheal on a slated objec inthe sanning window maves the stage so that te abject es inthe centre af the scanning window. 1 Holsing down te mouse wheel aa selected sbject ard ragcing We cusor to ay pole in he scaing window moves the jetta he selected + Haig down the mouse wheel on 2 selected objct nthe scenning window for longer than 0.8 seconds moves the stage fo thatthe obec les in the centre ofthe seanning window andthe magneton Is erease bythe actor setin the en SEM > Oatone. ‘Trackball “Te trackbat soften ueud wh te Pa pare! Control buttons of the trackball tuning the trackball inte ection ofthe als X you change the fist sarameter of se ive uncon, turning the tacballin the dretion af he axis Y ‘you erange the socona paramater of he active Turton. By hiding the key FLL, you ‘ce he fest araratr ofthe active unceon; By us the kay 12, Locking the trackball somatisly aftr timeout dened in SEM Options Disleg When ti locked cant change any paremeterin the fae and 9 trackball ‘te trackbacks Een ing i the mote: Dung some running process 9. mage aquiston ete: the trackball ao oisabod SEM Control Panel TESCAN SEM control panel was develaned by TESCAN exclusively for SEM conrl. The combination of manual kneb-et and LED touhseree gives user np ane svagnforanrd way how to conl the mioseape, hs panel ca contol magneton, foes, probe curen, sng speed and eter paramour that are necnsary Yor workng wth the microneape, Cava panel i equisped wilh spac! senso inte upper rg part ef me peel or ‘Btsade aaa of ouharean ighness according ote tarsi of surcuncg hh. Moret, te oe ar wk tefl sre mage age (Mote: TESCAN SEM cont pane is ota standard SEM part file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 10 of 165 itactrau-tacionen OS Functioning of the SEM control panel + Koobs fo controling magnification anc focusing (WD) are paced In the lah gat ofthe con! sane + Contrast, brightness sna beem Intenety (grape current) are conta using kre inthe rh part ofthe pare Controling of te microscope functions through the LEB touchscreen: 1 Acta! window en be changed by elekng the ao inthe Hg orl omer part ofthe sereen 5 Note: ihe function Autorcus i activated ony en the VEGA micascope with a fly makorze stage +n the first window, user can conto! working dlatance (fosserg of the image), magnification, scanning speed snc te setting of the + An actual funtion ofthe 2ad pani ciplayed nthe second window. Curent values can be changed by turning the knobs below and deleted by Clekng tho RESET draceyon he touenseran, Focus View Field 100.00 pm Step 5

=) 0000.30 9 Next Tope 1. Inetina Sams 2. Base imesing 3. imesing tH Magnification folatd topics: Vacuum Pana, Electon Beam, Switching the Microscope Off file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 12 of 165 ‘The microscopes without LaBS option: (pen the Fle menu and selet Ext tem t dose the Veg3TC program Select Switch off and ext War unt he program vegaTE cose Ral Iwi automaticaly save the microscope configuration onthe had ve, Shut dwn the 05 Wincons by he w5ua Way Turn the main switch to the lef (OFF poston) Pall te plug rom the ssa. ‘The microscopes with Laa6 option: Emision fom the Lae eatnode Is sensitive to oresure and temaerlurevarielors. It may take a half an hou for emsion to slabize ater saehing the ‘Sturce on In orer to Keep th elacen source constant tates, les possi to te switcnod on 24 hours po day. weve, the Wate of the Marant Bites Spnincnty ecearee Its recommande to kee the electron Source switched n ante decrease its heating tothe two hid of ts usual value whe isnot eperaing. The tine fretasinng s snort compared fa the stad of catade onetime sno 0 serene Flament heating can be decrease t the wo thd by sitchin off the Hest Butan ‘ie slectron source can be suthed off wth a cick onthe Ky buon ts rcommendd to ste the HY aft you do rtlatend to operate the meroscone ‘high maintains the vacuum ih he gun, neces to be constancy powered [STANDBY mode the cont! elcroics ota te pumping af the column ah amber ae of The power cansumplon is appretay al is comparison ta normal operation. Ifyou rmalize te mirescope (switch of the STANDBY mode} the temperature dt can cause ewer tie instabity of the mage oF the ‘wremalyhign magn eatone tis hue resommendea to ure te STANDBY mode oly nthe cae of ong work neruation (at east overnight) 11615 a0 posible to sch on the pumping sytem in te STANDBY made bythe buton PUMP and keep the chombar on minimel pressure. The tleodvantage is onering ump Het and higher power ensumatan ‘The STANDBY moae I sched on by cicing the STANDBY bullon ct te Vacuum sane you want eo kaap the chamber pumping system on (1s salted of by default) swrch on by ceking on the button PUMP on te Vacuum ane! 1 STANDBY mode works also a5 protection against averhesing of the sytem. Ifthe system Becomes almost overheated, the sofware automaticaly ‘Once you swith tothe STANDBY mode, the usr jst ogs of (Fle--Log of). fe user wants Louse the system apas he can logon by entering is tier noms and password. Then, the microscope loads the setings othe ver EasySEM ySEM graphical uses interface an easy-to-use mode that aos all asc imaging functions with support of background automat. Using of his mode ISracermended especial for experienced usar. FasySEM mode fs opomzed for tous, &) ote buton on Mala Toolbar panels such onthe EaySEM men file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 13 of 165 e) (n) (=) @ fe 8 SESE WERE Main panel e Pils) © (8) (a) [el] Ww (4) ie! is ) Ww Status panel “status panel alsplays he actual statue of he mirossope Sas ED) casysem” ‘Vacuum reat. Control panel control pan! is intended for auc and comfortable canta ofthe asl miroscapefuneons. file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 14 of 165 Ca a Ed fore « [+ [oem [>] olor «Le [oeeels R «(= * HE C) {ig aw ae intended for changing of he parmcter ep by tp, The butns wih ere arn ae more senate han btn wih | se | i) Presets panel ‘Ths panel aows to memory storage of mult parameters ike mapnfiatio, working distance et Presets El 1. Set the saramaters that you watt storage in memory 5 Select the button wth number. 4. Byprosang the buttn wh number, you reall the microscope settings fam the stored memory Stage panel ‘Te Stage panels intended for contol ofthe metorize sag + The button Calibrate starts the automatic calratan of te motored stag, ‘Specimen exchange file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 15 of 165 Mounting the samples ‘The specimen shoul be conductive or ued to the specimen stub. Tes posse to use 12.5 mm specimen pn-stubs or any oter sackman holds, éalvered as microscope acassorss. ‘Conductive txing ofthe sam 1 Acarton conductive athesve dsc te (ot recommended fr lng arm FB analyses) 1 Fang by the sere on the specimen alder Non-conductive samples Itt specimen is examined in the hah vacuum made, & sould be conductive or shoulé be costed by a conducive lnyer ving ether carbon coster oF Sputee ater The contig ofthe snecmien must be conducvly contacted tote sub (ey dost of aver pi). Non-corauctve specimens canbe also examined witout costing, se ncruction hee. Magnetic samples Ts VEGAD i ang ejeve wth saminmason magnet es thu evomasnee an ao shy magne spl canbe ebserved witout sec Specimen exchange procedure 4. Vor the mirosape by using the button VENT onthe Vacuum san. Wale ntl the pressures at atmosphere love 2. Se the it of the specimen stage to zero, or simply ick Home onthe stags conta ansl '3.0pen th chamber doo by gent putin fstten exch onthe appropriate number buton an the carousel RE Ts Uns the buon baccpround& "eo mea the specnan exchange mode mote: Dung the changing of te specioen use the suitable loves for prevention of palion of ner mlroscape pars 5. Lease the seem hong te spacinen stub onthe specimen stage. Remove the specimen stub by Ring the sub upwards. Ik recommended to use Sutable teers ‘ot tout any Interior part of se chamber. Contact between the specimen and the chamber wil be indcated by an acouste buzzer. ‘Mote: Contact between the specimen and any part of the chamber i ineated by 2 special elacbe ret. Tis eeu based an the measuring of the ‘lect eurent. it works on ithe specimen endl, file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 16 of 165 Gore the chamber door by pushing towards the chamber. Start the Sumping procedure by cess av the PUMP button onthe Vacuum panel, where the actual assure ahd pursing progress are aio displayed eck wheter te chamber door stahty coed, + ssc masa 1 ieing a non-conductive zamaes (haut contin Basic Imaging ‘hers ar our fctory preset fr the accel votoge (5, 10,20, 39 kV), one fr eae HV inde The wee oer na eto do ay further adurtents By bwhing among Bem and ung magica J to 000% “+ Ciccan the PUMP button onthe Vacuum Pane! start he pumping procedure, I aees UUs around 3 minutes to Ge cum reay - status when mean microscope s ready o use I teres nee ta exchange the speemen, alow nstucvons In secon Saginan Exhanae Somme ‘hare ar four factory presets for the seelerating vltage (2 5, 10,20 KY), one foreach HY index. The user doesnot nee ta do any futher ajusiments by Snitching sreong thom ane esha maphfeation up to 40008 1 Inthe Detectors bizar panel sles spproprate detacar rom the lit bot. We recammend using SE or BSE detector When the BSE detectors ure, Rare ereoneaeey «+ Sclot the acsleratingvatage (30 KY recommended) using combo box onthe Electron Beam pan! file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 17 of 165 + once you cick on the HY button on te Electron Beam panel tums the hgh vltage an and sats hemting ofthe tungeen flame. Note: Ifthe meroscope i equipped with 9 LaB6 cathode, the MV might be sland suitched on Because Is recommended to decrease ne level of heating Instead of switching tbe HV. See the explanation in Sichng the Mcxascape Of arte detais 1 fagh-cck the SEM Scanning Window o pan manu ad select the minimum magneaton. uo spee toe Og 1 fogh-cckn the SEM Scanning Window to sect Aut signa funcin tose righiness and contrast 3.00 120.s0n7 «Ads o= | ‘Note: The Auto Gun Heating function i ocither necessary nor avaiable ithe microscope is equipped with a LABS fisment, However, ia tungsten lament [Sinserted nthe VEGAS SEM wih LaB6 option, the Alo Gun Heating uncon s avaiable 1 icking on the WO icon s| on the Flosting Toobar and turning the Trackball fom le t right (or vce vers) focuses the image, Double licking in he SEM Scanning window oaens te Facis Window. To remove the Focus window, dublecick anjwhere inthe SEM Scaring window. (OF tse for focusing the function Auto WD) «Focus inthe Resolution made (clk one function Sean Mode inte Info Panel and soect RESOLUTION or use the funcson Contnl Wide File) 1 To select beam intent (8 1 recommend), eat elk on the Bon ‘20 Me faaing Tanta ant When use aroms onthe Bad Paral >To) Gre) i «+ To select the sample poston onthe Stage Cantal Panel, clk on approprate number ben onthe carves file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 18 of 165 (BI) we Bes (camer, woe? 4200 s]oe (50K (Guomena} = 5) cLole| ele] «Placing the curser over the SEM Scanring window end licking the mouse wheel maves that tes on the stage ino the center of the image. See secon 5] + oes fs an et es ck one Sd an Yo Et aa ed sl erie sening spe & + icking onthe Acquire button ante nfe Ban! ar onthe can ‘2 te floating Tatar saves image. Film nat, ston and desergtin ld f rocessary. Choose 3 Foe orth image te sored. Te change parameters of he image use te funcon image Parameters othe menu SEM. wo ‘+ To map the image cick onthe Mapnfeston ican ‘on the Hosting Tacha and turn the Track fom ft ght ae cy 1 Coekng onthe con on the Man Tstbar en the log SEM rests for sawing the caren adjustment ofthe miroscope. Is possible Imaging at High Magnification + Insor appropriate sample for high magnfeation images (e.g non carbon sale). + ost realtone avlobe with hghest acclerating vltge (0 KY) ofthe primary electrons. Selet fourth HV indo using combo box on the fleron Bear pene, ‘Tum on the hia vokage. ‘Note: I che meroscope i eqped with » L386 cathode, the HV might be aeady aiched on Because Is rcommende lo decrease tne level of heating file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 19 of 165 Instond of swching the HV of. See the explanation in Switching the Meraerape OM for further dei + Focus inthe Rezoution made (clk on te function Sean Mode inte Info Panel and seect RESOLUTION). 1 Check the soot ie, whi Is determined by BI value. Right-click inte SEM Scening Window to select aptimur 8 value ~ Auto BE OptMag. 1 For the best resolution mages iis necessary to have as shart workin dstance (WD) as possbe. For SE eetectr tre optimum WD i about 5mm (i 2s BSE Is net mount underaath the objective lr). For BSE Images optimum WD Is aout 8.5 mm. To change se woring tance together wih 2a, without dofcusing the mage, vse te function WDAZ onthe Stage Conta! panel ‘Note: Before changing WOAZ use degauss function by means of leon mage should remain nous «+ Gradually magnty and four the image so scheve 10 x magntiatons. In case the Image f moving during focuing, i = necessary to check entering of the objective. Select the Manual column cantering furcion using combo box on the lech Geom panel er cicking on the ‘Adjustment btn. Te Manual Centering Wizard wincon wil appear. Clexng onthe buten WOB oper window in the SEM Seanning Wengow Cck on the buton Nex for ebtming next instruction, Te function ot centering has two adjustable valves. To be sure just one vale nanging Fold down F12 to change only x movement atthe Tacebll nd 1 9 change only Y movement. treaty oraesensoas ioe] el] woe (ee 1 Every time the image is 100 dark or white you have to use Auto Signal uncin (Right-click in the SEM Scanring window and select Auto signa 1 Aibighermagnteatons (>10 fx) iis racesary to chee, esugmati (Figure A, 6) i recs corrected (gue C). To emec astigmatism dick ‘Stigmator fonction onthe lala fan For prcse correction use Fl! and FIZ butions x x im aE. =. file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015contents_vega [Vega-Help] Page 20 of 165 [see 10s Deseret m — seas (iecw'cur” pa 1 Once ares of ntret is magnified and focued os requested, htc on the Speed icon on the Raaling Taber and sect appropcote Scaming speed B, + Cicking onthe Acquire button on te Info Pan! ar onthe con ‘9 the Boating Tana saves image. Filn ot, lon and desertion Hels t necessary. Choose afer the mage f be stored. Te change parameters of he image use the funtion Jsage Faramters inte men BEM, 5) 1 Clk onthe eon on the Main Telbar open the esiog for sving the crrentsejustment ofthe micorcope. Ite posse ta restore the Imaging of non-conductive samples (without coating) ‘Observation of non-cnductive samples might be problematic beacuse of charging by electron bear n high vacuum The charging euses typical artfets in {hetmage ke lang, sording,eing ete ‘Te erging can be removed in several ways 1 etinintion of chrono by secondary electron emission at very low vatages Low Vacuum Mode Imaging Ordinary SE detector is not avatabe in low vacuum operations ~ see chapter Detecars, therefore TESCAN developed LYSTD detector (Low Vacuum Sccondary TESEAN Deacon, which gies tosorapnicalinfomaton fom the sample i low vacuum Mode, GSE ceteta i Avalabe or both modes {Cowvae, Hive) and ges comgostioral information In gore the scatter oft prmary beam the Tow vacuum made can be reduced by sage of ghar accelerating vltape (HY 30 4V) ands minmum working dstana (WO -3.5 mn) The eptma’ curve of the aimary beam othe best Sgr eM the LVSTD eetector I 15, The signa level canbe inceased by iting o the sampie towards th detector (Ut 10". «Ifyou us the VEGAS SEM wth te La86 option and aehusted pumping Systom, ns the low vacuum aperture holor nthe objoctve according to the Instructions Low VecuureAgerare Miter Incerson = LaB6. I nt raqured (aise the low vac aperture holder yu aoa VELA or VEGA. + Snitch the microscope to wedium vacuum mode (pressure range 1-150 Fa) by clicking onthe UniVae button on the Low Vacuum Med panel. I case ‘van loner vac fe ead (pressure range 189-7000 Ps) follow the istrveons in chapter Agarture Exchange en wes Mase a + Emer requested pressure value in te el nox to Un Button an cick on the OK button, In ass the lower vacuum fs needee (2000 Fa), i is recommended to arts naval 700 Fa ane men inrease te valve godly instep (bout 109 Pa). file:///C:/Users/Tescan/AppData/Local/Temp/~hhCODC.htm 9/20/2015