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    UNIT 3 Diffusion and Ion-implatation

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    ic tech

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    © All Rights Reserved
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    38 views24 pages

    UNIT 3 Diffusion and Ion-Implatation

    Uploaded by

    Anonymous eWMnRr70q
    ic tech

    Copyright:

    © All Rights Reserved
    Download as PDF or read online from Scribd
    Flag for inappropriate content
    of 24
    Diffusion Preece Unit. 3 ¢ Whe nhectuction of conbelled amounts of paper” clopanle € BLP, AL Ga, Me, Spiele) mle celeetec! eq! nicenelelen Im ondlen te Change ie clectregic feled Fawaliplanes Cie specictivily amobi tily He) ve Called oliffanic: ete, 4 -, ea ‘ y Oiffusion ve aprecett wf eehroclucing conteeled amour? of aloporte ple Gemiecnclucley ayfilerial ”- * Diffacion 12 eels clefined ek dyemepest ef chemical Species trem om cosen at hag concen fecebew 40 am ave How conehakien ” E yoy tar Merk, a Len c (accra oo a hogen Depante nt | / 7 - * dy oly fucion «he clepant Couree Ve placed or c® Neo surfer of wsefer fn form of clopom- and Cencemfrortion ef ce “cea Loafer >| v GSernicenclarcters at phage ° Ne oltca cate: ; a0 okmenief frem the eurefowe 'o toafen - Sn cli ffucion cok Hh aaa le Ve beni clebn mine J Sa La) seen Syme, = AA 1 Diffecion Sy ctor : \ es Seb Lource OH Qucalz a (i ffeceion NN Tbe a ¥ WALT a =- ate Vent md Foca So BO oa Platinu ih Sour 7 beak Carries ube 7 Ahave figeee Shove Ce Selig Where Scuree “Uffuceion syelem,, Platinum ‘boat (8 uted dehald a Source -6f ctopar J materiale moloere “romeportecl to neor tht gubetyed Surface woth help of Consiey Matera! ory acer We ovesedll call equection te mem below ., J Fe Rowen, fon #705 > F8s0Q FUNos “Sid Qouses Atesh comerdteal inte Oxicle form tb ache ook O bersten for Out bi ffution ef Glico and opemts aterm, Oxide of opont moateviof weackerd with silicon and ae bowen ettom . AB,0, £ si > (Rf BO. for phos phous — o ) Ahos +58 —>40 4 Ssicg for ie + 6 4c f 2800 na for Doped ‘p! “ = . ; 100. — mony 1 eal r ao pki uel Source adh mn Sysfem / © clifusic oe > Quookz Diffuvowtebe | curd st ‘ mes a = = Ly > T, verb yt Z| Quota 1s Bock ol uh ge commbsell« yen TES Rubble Liquiel Gouver Diffuaion & chem Crbewe tyra Sho: ee Roque - carer elif fecaion system, ) lohere & eee : etB)qact to bubblew # é 3 1 Riquicl Sourree inn tee Vorper fey 18 “framape meay the Subs heel woofers sR. woth he hele Cotte Covries Gab (o Nuvall reaction in Petion a” ig giver Ae i \ cl Fer Bowem Laer, 202 — 7A R202 F CBs e + 6B (Borers Pui bromicts) Cele ca Bownin for cul ebftusion) iS I B20 + acer 48+ S00 C Bowen Toi oxide) Low phosphoreut = 4 pod, + 202 C Phegpoherus 7 chiielt) djoe FS —tP F582 -—O —_-U) > 205 F Glo tO G Gaseous Fousee _ Diffusion § dem sy ue 1 — Burod2 Biffeasieon he set aL pa i fic» > Quotas beak = Te Vent oe. ne b s 7 > Chemicer| "Rees Fee bey ne 2} CU vsartsof gcaes Pref foc! b al aha) (J chemica!Ecutin( CR, Ne PM ‘Aa, ) ‘ te GFeue out ~ Source Diffusion Syctem Above > ch, are shout co. GQauteout — couree! obiffetion eystem, tcherel tere Sorfixes Edncontretion of alopante ( di z Coneenfration orf op orks ecw He Sutctoo bet safoes) 12 Confecllect Toate he feo: volves ond Loner mete Kol) oterp [2 deemopootes! meds the cud a Caroferee oil he help of Cowan yedet, Ta over atl weackron (2 fvem by: , f Ban, ; GC d Ryle ~P B00 2255 Roo + Mae —@ C_Dj boxerne) Oa Do —— 4& f 38'o9 —@) Jo phos hoes €P) , ' one f 40s PEs Proof Uo —O C Phos phine ) BRog Pes —— YP F Sfio2 —G) yfepes or Darr uston IN Soave C Durvcsons eeranuee ) © J these are mainly three ctiffurtion anecheniean rm seucls — @ Vacene dy | Sule) tutonel Diffusion > A‘ hugh Wen semaine Re lattice ates Vibealt oncund Ahe Gatton Soe hese ig ce Leite prctatie| Ahead cx hod atem( Lalicn “clam acquiler Suffieiint te tedve thy laltien Sta end “become ayy intesstifial aterm anel ercatin & Vewemee bho & moighbasing finpunily atom aniqncdh Fede the en ote (fax shecoGl in f \ (ths Waele) , +e mechoniem je awe Vacem ed etif{ ution. ee oa ° Sb Vacane: ° om eS ° © Dopont o eo So 6 aa Psp) ° ° ° ° alam, _ ° Céidiconis odor ) ° ° oO Oo i > ‘Vo.come! Diffution G feouep FT Clememb ne} Fou Pees Al Von qa ctf faiey olement arse tual Concictevedt @ Foley shi Kal) Diffuse 3° interstitial oto ja movin C one foee do serve tea heut olichabing a lattice ato’ je ceetlect the iterctttia| cliffusioy mechemi¢m: Sn care Yolen cht Bio obi {fusion , the sige & ites cli bra aA atom al bo amellea thom Spe hoct cutom| -Qecttier citom amd coer not ov rrlmuke jhe Covalent bonc| ewith Sikicon's atom Ctatlice amy G © 5 @ doparts alo ° > C Srthadiol SOR SO stat ° ° O20 D cube |< ctl ° ° oko }° ee fo} oO ° 5° ° 'y () Tater Dp Riot Diffesion A AR SN 3) Posh okey T i fPeeien | Jntenchon? Dif feesiow > ¢ oO ° o o 9° ay > Gidice Self ix O ° oO ° o ‘at: a —~ ee Dopanle eo a as oO oO tb lie or. NL 2 Cimpn 2° O — ikicon °O a oe o oO fo) vathice a ° ° oO 5 . fe ey Onterc hi tiate Differion: Above rane ahouog ttaohiale chiffecion mechanier Sn Sep, Je Self prterct Bred ce ra olplacina em br irepesity ecto (dtopent atom ). In flop @ clo lim becomes om imterct io} alten , Fy sa. “He impusit diz ote) alam re clteplacing the lattice olom [hock al ih foe inclep@ lati ctor becomes elf ~ intirsh ¢ Ref + s Ah extemcteo frtewstitial mechan A fe moun oA ret obiffucion amechemism Bq thre wmecherisen | fe es more cttoms ave aliffuseel an . ze there ors ino} pase Alto by inter changin: ae) () ion d yd three % om @xcemple of Cha i and jl /Durrecion Tinoey s iS Fas, % one olimensioned Diffusion Equestion >) NSE) Hele pub Micheal fic heen om ob ffusion Hie the beted on the omalogy bel vweom rmatesiot Ascmefers : ™ Selution | Riqueicl amet heed: Aramifer e Concductio:, In the prsseree of. -alachic ( stel, He “plus, C&D is a aD j— fiat ctor Bf dD Bifano ef Co Corsviee aio den Ca d ve (Le, Fe mo. of elepank oem p Wrough umib orsece cei Bine | (a (aid E, = lechsic fice ( Net g em = Mobi Lit “apurpitey exter» Jolopan AL obi {7 mm) ~y ae Pp D = Diffution Coefficient (Gat N=See N= Aire: of aoe (ee Y - - Distance mm Cm fe onchornt ohafasin coefficionk (DD onel coithout -elecletc faa Lee so, Then from Quarry ) | Neqoive Signs r=" feop Bier hak Concentration clecveated d tom! yerpeck a oc, Cag) Cquabo) 13 Cabted) -fick'g Fis} lave of chi ffiction and Guuationg) dates thal a hex CA) 48 ! amt) a se ) ye GO Vhe hepa ceclern cout move Cab fleue ys [yer “ao. feccorel ce loc Concer dsalion on Qo . Opie onelescle~ “ bee - t ms) — (0th goin dopo’ at > iy deport ater) . LE at peit x bete . = Small change in no of f deport . . olen in mle rorcop eet ADE IL — ARCarax)y Oe AKIN — Volume Cx ) AS&) — AdU+dx) = Fxdn _ St ON _ LD dixsd=) =feo] ot © OSS Se We Kmow fat Linn PPO ~d ery O¢ a \ Xe he . Ns on =e Oe S| -© foment ot in, Ow > -2 [ =pQx or Ou Ox oe a an conclemt “SS 3 oxe | —& Cqaation@ ja Known ah Pres Second Jaro of ob ffusien C rot. Heaney jisee @Gie Dy {fusion Coctheernt we net -Conconbs oft Corcerbrection ) e Conthont efidncs > fe Corecy < ine cw Core Syatic he mifeat Corel Sey at al Cardi ter re fered = ROKLO tater =O -- ah. cleport carter tchich thectes that r Corducte (Subshat 1 wnittally BETO - ~Yhe bounden; Concdihons are GC wot) = Ms a _ Beurday y Y | ° ih Rot) = Oo Contin . The celutin of eke Geeend tore of Diffuse cse > OEE ‘he midi! and teary conihon 12 Giver by txt) = Ne eee Ge ) | ey, \o Sree) | —D* | \ [ee Lohne Ne = Surface corcamtration of clopent r cttem) t= Ofte Bime to\secon ( oF ) Cre = Con plementeny| exe fanction ] as 1D = Diffuser Cede CSE) Concerbrationa - te |) tarts Sty C Diffuee Ne | ~~ | Ne §2 | \ 2 Cornplore ner} | ever frortion ——= \. profile ° Sa ste Dislenee eM: \ \ Total cancunt of chepert CD one ane val r? Qr - [row dx Ne , 8 A QQ. Jn exfe (ex) Ber > —— = Yio. Aiffooentiatin Gy Lith veges be ax = pt el ie [ew Be esapy Q+ - “Ne mit (ys 4 a Q, = SUSE rse(t. ) Gly =-2Ne [BE = PENA BE 1 Garterctection - of \perction cloptth C75), Conctdler ce olopin poh Goitly back , Greed concentecabog | “nt ee als 2D (2%leg.) —® ls> ba shy Nae ne n~n Dretoneer¢ Cfor bn ne ty ot “he po obepth ace NOt) = Ned from CaD | Ne = Ne enfe Ce) Dicon at ICO 19ern? ne agnaictecired! at 10 the oY tiger Cuber Joes “Tut oven ond 4 he olepemk concen teotign reaches f > vere ltec) 09 ape CIE) PTS Pre VSI Rabern| Carns pod out eee o-yel Hon) be > vid q . pO bee ech Gouses Steins es ; C Conttirh Tolal De A fete quorbly oof the ab fan geitened | : f on the toa fer of siffes zion ( ove cecth fem | Ach Cuvee, ord 2 axtumen{ Phat oll of nteriol 13 comtumeel, cs ( ces Qe (re se rmpur phy pee sami oree ) © \ Beervclen f meet) =e Concli in Tak tro. N (xe) =O — mikied concblion ) “the th a fo. : hat Soubs fied She mifid cero bewneleny Gondiliont 1% Ginter by ee = : HOGbL) = Gr ox : ) : alk et ution Fick Becone) Ras of otf ation fy tcthry =O, WY, Chlam the suefocke { / Coreer4ty om ONE) 4 ye kerbs yu us! \ Lt? . C toi (femer Pimms ) . f eta L- Sa 7 \ : ee wider ab hin Py perc atepth oc ye gee ion fo > J , > xy mak NEN. asd «= 7) L - De serclenh Diffusivities Carc@) Con eorm feakion - : Ey fhe p = bi Le perm C tee BDrffusion Ce iced r2 & oe on of cle} Comecmsecction As uset eal grok, 2 N ~ lar Ho —_ Coneertrectren Catone D: Diffraion ceetficlemb Alums that DXN Dekn —@ De = hs —S De. © Surface cbftuson Coe . . an O . vom Coeficiente fe Me Lob em ® [tes Cyotings Jumebes ky th ip). YBete Dx bh — *j = VET Det Dac nN? = ‘| = 01g TbSt Down? xj =o SOLIS syn esfes) ae (e =O oo, _] [efoos KE - @ 221 x 7 mn x<<4 TK erf (x0) = 2 ex ca ORD! Nes Usut:? 0%) ye MPLANITATION FP ton imp lertetion s¢ procese } tic cloport : ° Lebicls emer get ea an be inhveckeced nls a [se — ode ssacdic wate C cons Suhchrate ) m order! . ae lange ~Cbecksonic properties [ ctectsico) | open ren q Cource aba a ala nt C BF, Acta D ha & oy + veil! Depend tent crt ac) 4 Maal a Ome Coenen: — tration ) Deed Tons "7 SS papi pf fe re Gy Autesion ee i mar Uapor Aecele rate Pombersctel | the er fe ermal] cteradsd|_ Peres | = nap Lastedion ile ~Giticon's Cubsteate + Danie ton Deoponls enttr miro Silicon Pe dye Pave: spreoccss, ‘l (frptonteation Sa _ toa Shepton’ | Ci Micowris ‘atom * wofuy oad eoltife cody “cis emrc . fee! Comin Re ache a} Some loth + ded C hi / ; Sn io implernd akiow seoceat, THe oe profi ie chetesmmed tT “rai cvnd | “nant of basicaW ( ions - We teed to form a hallod yuock Ton — tv plowd-ation cCeg 4 Source ] cl Rrecliow ot a mocre t) Egle OC fern Dany hort ey Lew hep Gernbec Cio : Jom = haplonda tier spe the Jrfdooeterction eo { emrergot fre a Cd chvate [%& jeer (fsofeon Chaoqedd posticles J r “4 Newhet Pea r , i Meaps Mass Magnet. Analyse Qeewh er Beam a, mY Tass Magnet Aratyse {' ; and plate \ygats plot =f] LUrncvern Lect beer ap WHE yt CoA jill The Y-Mie S Games J X-axig — C Sil om't — YS eh Wofey Exhectio voltago “f fy Sehermvtic @® Jor Gearee Jon Source hata heatre) (hemor Lo beak: Up fousee qat Such RF om Aelta. mfte Chaged jonk € ed ox het ) Z Cxbroction plate conte Que potent a ( "C as Eos > HL, dF Fetes C BRa patchy l My Heatea fiRement fen extsation votto-ge avound 4OKV Coebed the the lon Coursee Chesabew “yet tong to ve ert of asd ¢ tnte mane ONALY QT . fp ae oy vant eboccl rex SS aa Th c meng netic vetch he Hic aa gne tic tomas oe Tr Reh Sab that) ext jond caitle “the cloeia be ees vatio oc 07) 6 beae| Conhout -{itle secs. Jone tony PeEfrionce va five ‘pb! cect Abed t q ie x2) ——O) Fee anagnetic fosce on crn ient VW = votheibe ef sen F 2 Charg€/ of (ion Bey Jgrete [isecounti a if iene fottoed | fee pedh ef wackiat % Vthom, I xR ec may" £C Combifugal forvee, ; (Vx) C q ve Te = aay? 9 aS GBe __ vd alo Wwe Karaed thal , “ Kinetic fatentiol emung ! dm OU Chand otteg o-( —@ fom <¥@ end equation @ oav _ 4qBe NI ay © ay fe Sel Jan wy Pr UMALs of ims fo fee a give extracted sani and magne [ lowe sclensily ch) path vactien Ve Aneclte >sOpoy | WromeD be « Square Deed of The afhane of ion ton bea me M4, Cniwente d ion) ~ SAib & eel NS \ 5 . un a Sonted jong @ Acceleration Rae : lm) LE Altes Mans cmolyzer Perce the Selected fori thin enter | Le accelthalion Lube LOhcse hry are -creceltyatid Ureles* ut elechic fied Cohen thry ancue, feos hy vetnge Bo eS Vetteys Careend) (f . J @ XN Sconnes Prot > Atte Oceelevater Aahe process, the ions elccho- beam if them Scammed aver the wofers “s wr face by usang_ Slecte elifteclrm pots are! firally jont implentid int Loner ati Deflec Gow Hoevixata) we ‘at Wi pefiection pate P . cy - peo elaftectin ) ce phe. Searmer ) on penons) i Nd venta ene Jon ~ —|" pall aaa Dood cel wn( 1) i > , op Shera lon , . 2 cut cl Rees 4 pecerse TA Uscuets Covtec| he le Cmpecatiac ¢ GA Zefarf bem eretine): ORE NE dit cobs ~ e s to 2 Mw ern Guike che im = eeCiwe Contes) -ones No. (, - pee be No. of tons) oot plertes| “pen (te a ble oF pref Con be Sbainer C MRI the enabs od oleae fo a C no. et ier pes nike deleay Ore crmpte Obne, | es Cae ache re Dads of {chet rn pe of (oy ae e + . cle pin profile > Ton - rrp tomdtecbeu + ie non -enustalin procter te. lopont Concerteatien meicte CiQiconz Sabstedke re not Oinited Temp De tee dune C| A. Jen - irrtolernbation jaoocst is mocathet rn Vocuurh Chambus (re ibie e Clean: ond proces 2 An jon rm plenfeltion proces > fonts encog SP Siees fool Kev fo !qeu ol Ae ei rae ene Pe eben ta oD Of okk fe a ' + od Discolvertge oe High Sophichiceted ed ore eebriquerl re On rh Costly & ‘tom- tm onto Gon wm { age Fo vfhs gemionder clos 2 Lo steal de chise te vai mene: dig A Smo “Creo le. } {Section of To achei w coefen camel thay Lose cithey cottisions bebroeew U the Tons cont (Usters OS tC ema fGeons alen “8 otis at elechenic doppiny : an . . ( Seornd celUsion ts aefined ck Nucke by Serre emeay { to Se) Then clecreadro) yrsee ef [eee Ly Geo : f ngage ‘ emesg “ ¢ 48 clefmed cd | C “dé ie - Shc o< | Sate) + Cote) | -d& _ yw fs + Set] —a> ne ; Lohuve ae = Noet Leathiee atom pe unik Volum © Syd) = Neuclecr choppy emeng re ( NX ¢ . 4 Ae lE) = Cleckronic topping emergy — - The crease clishonee Ayovellec} (Jorn imblented jem okie coming Lo Wer inthe Lattice Shictuve i& staf ony Ronse ‘g. ~ _ . > . — 2 : ime = OKs fryso Kenge CE) end [sejected Rog ¢ Py, > x-axis S)Fise atimensinal ions Coneem- drain Aidsibution of the Implantes! ions Tropeeted Remge tkp) i the pagjectiow J 1 ony ‘ ye th Nomqe Ro te “Hu direction of IMS hoam VU trciclenes- , q Chetevet -chagale) 48 chatistico} {tuctualiow clergy, om eis ae to Fheevxts et ~ Melclemer, . . eee Sp Cire fected choggte) fe stakistical La m preyeckd ramge along axis at Mefclenct - iq) chocse *he C cemtrection of ton obs bution 4 Mhe caxts of metclemee, Mee implored impeit t pe ile Com be pre cimacte cf by a ( Gausiion oidributio function ( ato x=P, @ nN 2, : i. ¢ Ro) =: S$ = 19x So * \ sery umnib aver) Where S= Dese = No vot fonk \ Sp- Profectedd Qh NOY = roe peecion et ot from igeere fat dance’ X! Uo Ronge is coe arr =< 1 p 4° ‘R= we i {Zs +Sel&) =e von) \ jim ee > cay stallene oc &. i rralleg ex tm cot eneder (he treo em ind, Sanet / flenet/iain OM A reilegd on Fok on Onion j Conk Woofen C Vondase 2D) L Mast ef a 1 fected ¢e 1B Omd jon! p. : on’ (rh cpm 4 ) Nagel Jere Me chimed ceachanhel, od, , Brel Corn reve Cm below fy OY Cyeed blur Cayetn t. much lore a Oye ct Mae this pMenemnener is bineuny o® Jon chony choy c a z eS ° \ Log . . Eee ©) 5 =* charne ae ~ 7 : e 5 coe © 2 ne : o- e © Oo a “ 2 a 7 9 C5o- ” © o o S o a} ° Channel a Concentra Pion ione f t Due 4o ven cherr cles f \ ake werd Qe? Caponrertie wt A Guu \ Ate mfg, ~ ——~ xX . £ ton chorneliny phenesencan . ths sereny peth ein | of cleopon) alenn se Conventec! XK \ 7 Goaatscion alicteikutron to ent onenbrod Chelrbubrom - 4s err i Dy Other use » tarsing genom larteriow pore enes fx Mrs prebabiels mucteas so tor Rennetiny te we, of ton =P plortalion: ch woceec ' ennelray Com ke mrmianizoc -by feoreme! teckmiquer | q® pe { ip &y paey © “blecking crane pheut ¢ cusface layer ¢ ( Abeve CU Ais csustol c cusfoes ! Q) 1 Yis-coremtedion of cme tee cafe @® By erecting © domere Boy C! sons ( \ ¢ Serofocs \ bEbiayy "Sony Tonk Ferree Pyar (\\ Oe bes th feed Boe ooo eet § Oxicle 24 | \\ \) \ vw \ Cc © ec oo e oS ae oo © f EEO eSe So ce © Pep e8ne Of © © © e608 oa oon CaBtay “oo 6 a OO ee eo oe e 5 ° ®@ 5 \ eo e © o of 8 © a OG o ee Co o s oof coo fo o ° Oo ° ° S t oe Oo oe oO fro) \ faa) “ 7 f, 2 C causter) 4@ 7 \ ( ptluacr ore Baween Ton -

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