S9 SECS GEM Interface Manual v1.2

SYNAX
SECS/GEM Interface Manual for

S9, version: 1.2
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TABLE OF CONTENTS
1. COMMUNICATION PROTOCOLS ............................................................................. 7
1.1 HSMS Single session mode (SEMI E37.1) .......................................................................................... 7
1.2 SECS-II (SEMI E5) ................................................................................................................................. 8
2. SECS-II MESSAGE SUMMARY................................................................................. 9
2.1 Host-Originated Transaction ............................................................................................................... 9
2.2 Equipment-Originated Transaction................................................................................................... 10
3. SECS-II MESSAGE DETAILS .................................................................................. 11
3.1 Data Items ............................................................................................................................................ 11

3.1.1 Data Dictionary .............................................................................................................................................. 11
3.1.2 Status Variables ............................................................................................................................................ 14
3.1.3 Equipment Constants .................................................................................................................................... 14
3.1.4 Collection Events........................................................................................................................................... 14
3.1.5 Alarms ........................................................................................................................................................... 14
3.2 Host-Originated Transactions ........................................................................................................... 15

3.2.1 SxF0 Abort Transaction ................................................................................................................................. 15
3.2.2 S1F1 Are You There Request (R) ................................................................................................................. 15
3.2.3 S1F2 On Line Data (D) .................................................................................................................................. 15
3.2.4 S1F3 Selected Equipment Status Request (SSR)......................................................................................... 15
3.2.5 S1F4 Selected Equipment Status Data (SSD) .............................................................................................. 15
3.2.6 S1F11 Status Variables Namelist Request (SVNR) ...................................................................................... 16
3.2.7 S1F12 Status Variable Namelist Reply (SVNRR) .......................................................................................... 16
3.2.8 S1F13 Establish Communication Request (CR)............................................................................................ 16
3.2.9 S1F14 Establish Communication Request Acknowledge (CRA) ................................................................... 16
3.2.10 S1F15 Request OFF-LINE (ROFL) ............................................................................................................... 16
3.2.11 S1F16 OFF-LINE Acknowledge (OFLA) ....................................................................................................... 17
3.2.12 S1F17 Request ON-LINE (ROFL) ................................................................................................................. 17
3.2.13 S1F18 ON-LINE Acknowledge (OFLA) ......................................................................................................... 17
3.2.14 S2F13 Equipment Constant Request (ECR) ................................................................................................. 17
3.2.15 S2F14 Equipment Constant Data (ECD) ....................................................................................................... 17
3.2.16 S2F15 New Equipment Constant Send (ECS) .............................................................................................. 18
3.2.17 S2F16 New Equipment Constant Acknowledge (ECA) ................................................................................. 18
3.2.18 S2F17 Data and Time Request (DTR) .......................................................................................................... 18
3.2.19 S2F18 Data and Time Data (DTD) ................................................................................................................ 18
3.2.20 S2F21 Remote Command Send (RCS) ........................................................................................................ 18
3.2.21 S2F22 Remote Command Acknowledge (RCA)............................................................................................ 18
3.2.22 S2F23 Trace Initialize Send (TIS) ................................................................................................................. 19
3.2.23 S2F24 Trace Initialize Acknowledge (TIA) .................................................................................................... 19
3.2.24 S2F29 Equipment Constant Namelist (ECNR) .............................................................................................. 19
3.2.25 S2F30 Equipment Constant Namelist (ECN)................................................................................................. 20
3.2.26 S2F31 Data and Time Set Request (DTS) .................................................................................................... 20
3.2.27 S2F32 Date and Time Acknowledge (DTA)................................................................................................... 20
3.2.28 S2F33 Define Report (DR) ............................................................................................................................ 21
3.2.29 S2F34 Defined Report Acknowledge (DRA) ................................................................................................. 21
3.2.30 S2F35 Link Event Report (LER) .................................................................................................................... 22
3.2.31 S2F36 Link Event Report Acknowledge (LERA) ........................................................................................... 22
3.2.32 S2F37 Enable/Disable Event Report (EDER)................................................................................................ 23
3.2.33 S2F38 Enable/Disable Event Report Acknowledge (EERA) ......................................................................... 23
3.2.34 S2F41 Host Command Send (HCS) .............................................................................................................. 23
3.2.35 S2F42 Host Command Acknowledge (HCA) ................................................................................................. 24
3.2.36 S2F43 Reset Spooling Streams and Functions (RSSF) ................................................................................ 24
3.2.37 S2F44 Reset Spooling Acknowledge (RSA) ................................................................................................. 25
3.2.38 S5F3 Enable/Disable Alarm Send (EAS) ...................................................................................................... 25
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3.2.39 S5F4 Enable/Disable Alarm Acknowledge (EAA).......................................................................................... 25
3.2.40 S5F5 List Alarms Request (LAR) .................................................................................................................. 25
3.2.41 S5F6 List Alarms Data (LAD) ........................................................................................................................ 26
3.2.42 S5F7 List Enabled Alarms Request (LEAR) .................................................................................................. 26
3.2.43 S5F8 List Enabled Alarms Data (LEAD) ........................................................................................................ 26
3.2.44 S6F15 Event Report Request (ERR) ............................................................................................................. 26
3.2.45 S6F16 List Enabled Alarms Data (LEAD) ...................................................................................................... 27
3.2.46 S6F19 Individual Report Request (IRR) ........................................................................................................ 27
3.2.47 S6F20 Individual Report Data (IRD) .............................................................................................................. 27
3.2.48 S6F23 Request Spooled Data (RSD) ............................................................................................................ 27
3.2.49 S6F24 Request Spooled Data Acknowledgement Send (RSDAS) ................................................................ 28
3.2.50 S7F1 Process Program Load Inquire (PPI) ................................................................................................... 28
3.2.51 S7F2 Process Program Load Grant (PPG) ................................................................................................... 28
3.2.52 S7F3 Process Program Send (PPS) ............................................................................................................. 28
3.2.53 S7F4 Process Program Acknowledge (PPA) ................................................................................................ 28
3.2.54 S7F5 Process Program Request (PPR) ........................................................................................................ 28
3.2.55 S7F6 Process Program Data (PPD) .............................................................................................................. 28
3.2.56 S7F17 Delete Process Program Send (DPS) ................................................................................................ 29
3.2.57 S7F18 Delete Process Program Acknowledge (DPA) ................................................................................... 29
3.2.58 S7F19 Current EPPD Request (RER) ........................................................................................................... 29
3.2.59 S7F20 Current EPPD Data (RED) ................................................................................................................. 29
3.2.60 S10F3 Terminal Display, Single (VTN) .......................................................................................................... 29
3.2.61 S10F4 Terminal Display, Single Acknowledge (VTA) .................................................................................... 29
3.3 Equipment-Originated Transactions................................................................................................. 30

3.3.1 Sx,F0 Abort Transaction ................................................................................................................................ 30
3.3.2 S1F1 Are You There Request (R) ................................................................................................................. 30
3.3.3 S1F2 On Line Data (D) .................................................................................................................................. 30
3.3.4 S1F13 Establish Communications Request (CR) .......................................................................................... 30
3.3.5 S1F14 Establish Communications Request Acknowledge (CRA) ................................................................. 30
3.3.6 S5F1 Alarm Report Send (ARS).................................................................................................................... 30
3.3.7 S5F2 Alarm Report Acknowledge (ARA) ....................................................................................................... 31
3.3.8 S6F1 Trace Data Send .................................................................................................................................. 31
3.3.9 S6F2 Trace Data Acknowledge (TDA) .......................................................................................................... 31
3.3.10 S6F11 Event Report Send (ERS) .................................................................................................................. 32
3.3.11 S6F12 Event Report Acknowledge (ERA) ..................................................................................................... 32
3.3.12 S7F1 Process Program Load Inquire (PPI) ................................................................................................... 32
3.3.13 S7F2 Process Program Load Grant (PPG) ................................................................................................... 32
3.3.14 S7F3 Process Program Send (PPS) ............................................................................................................. 33
3.3.15 S7F4 Process Program Acknowledge (PPA) ................................................................................................ 33
3.3.16 S7F5 Process Program Request (PPR) ........................................................................................................ 33
3.3.17 S7F6 Process Program Data (PPD) .............................................................................................................. 33
3.3.18 S9F1 Unrecognized Device ID (UDN) ........................................................................................................... 33
3.3.19 S9F3 Unrecognized Stream Type (USN) ...................................................................................................... 33
3.3.20 S9F5 Unrecognized Function Type (USN) .................................................................................................... 33
3.3.21 S9F7 Illegal Data (IDN) ................................................................................................................................. 34
3.3.22 S9F9 Transaction Timer Timeout (TTN) ........................................................................................................ 34
3.3.23 S9F11 Data Too Long (DLN)......................................................................................................................... 34
4. SEMI E30 GEM – STATE MODELS, CAPABILITIES AND SCENARIOS ............... 35
4.1 Communications ................................................................................................................................. 36

4.1.1 Communications State Model........................................................................................................................ 36
4.1.2 Communications State Transitions ................................................................................................................ 37
4.1.3 Host Attempts to Establish Communications ................................................................................................. 38
4.1.4 Host Initiated Are You There ......................................................................................................................... 38
4.1.5 Equipment Initiated Are You There ............................................................................................................... 38
4.2 Control ................................................................................................................................................. 39

4.2.1 Control State Model....................................................................................................................................... 39
4.2.2 Control State Transitions ............................................................................................................................... 40
4.2.3 Operator Sets ONLINE .................................................................................................................................. 40
4.2.4 Operator Sets OFFLINE ................................................................................................................................ 41
4.2.5 Operator Sets REMOTE ................................................................................................................................ 41
4.2.6 Operator Sets LOCAL ................................................................................................................................... 41
4.2.7 Host Requests OFFLINE ............................................................................................................................... 41
4.2.8 Host Requests ONLINE ................................................................................................................................ 41
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4.3 Data Collection .................................................................................................................................... 42
4.3.1 Event Data Collection .................................................................................................................................... 42
4.3.2 Host Requests collection event report ........................................................................................................... 42
4.3.3 Collection Report Setup ................................................................................................................................ 42
4.3.4 Equipment Status Report .............................................................................................................................. 42
4.3.5 Equipment Status Variable Namelist Report ................................................................................................. 42
4.3.6 Trace Data Collection .................................................................................................................................... 43
4.4 ALarms ................................................................................................................................................. 44

4.4.1 Enable/Disable Alarms .................................................................................................................................. 44
4.4.2 Alarm Detected by Equipment ....................................................................................................................... 44
4.4.3 Request Alarm Information ............................................................................................................................ 44
4.4.4 Request List of Enabled Alarms .................................................................................................................... 44
4.5 Remote Control ................................................................................................................................... 44

4.5.1 Host Sends Remote Command ..................................................................................................................... 44
4.5.2 Host Sends Host Command .......................................................................................................................... 44
4.6 Equipment Constants ......................................................................................................................... 44

4.6.1 Host Sends Equipment Constants................................................................................................................. 44
4.6.2 Host Equipment Constants Request ............................................................................................................. 45
4.6.3 Host Equipment Constants Namelist Request............................................................................................... 45
4.7 Process Program ................................................................................................................................ 45

4.7.1 Process Program Deletion by Host ............................................................................................................... 45
4.7.2 Host Initiated Process Program Upload (Unformatted) ................................................................................. 45
4.7.3 Equipment Initiated Process Program Upload (Unformatted) ........................................................................ 45
4.7.4 Host Initiated Process Program Download (Unformatted) ............................................................................. 45
4.7.5 Equipment Initiated Process Program Download (Unformatted) ................................................................... 45
4.8 Terminal Services ............................................................................................................................... 46

4.8.1 Host Sends Information to Equipment’s Display device ................................................................................ 46
4.9 Error Messages ................................................................................................................................... 46

4.9.1 Message Fault Due to Unrecognized Device ID ............................................................................................ 46
4.9.2 Message Fault Due to Unrecognized Stream Type ....................................................................................... 46
4.9.3 Message Fault Due to Unrecognized Stream Type ....................................................................................... 46
4.9.4 Message Fault Due to Illegal Data Format .................................................................................................... 46
4.9.5 Message Fault Due to Transaction Timer Timeout........................................................................................ 47
4.10 Clock ................................................................................................................................................. 47

4.10.1 Host Requests Equipment’s Current Time .................................................................................................... 47
4.10.2 Host Instructs Equipment to Set Time ........................................................................................................... 47
4.11 Spooling ........................................................................................................................................... 48

4.11.1 Spooling State Model .................................................................................................................................... 48
4.11.2 Spooling State Transitions ............................................................................................................................ 48
4.11.3 Host Defines Set of Messages to be Spooled ............................................................................................... 50
4.11.4 Host Defines Number of Messages to Send in Response to S6F23 ............................................................. 50
4.11.5 Request and Delete Spooled Data ................................................................................................................ 50
5. SUPPORTED COMMANDS, VARIABLES, EVENTS AND ALARMS ..................... 51
5.1 Remote And Host Commands ........................................................................................................... 51

5.1.1 START .......................................................................................................................................................... 51
5.1.2 STOP ............................................................................................................................................................ 51
5.1.3 TTERM .......................................................................................................................................................... 51
5.1.4 TEST-MODE ................................................................................................................................................. 51
5.1.5 PP-SELECT .................................................................................................................................................. 51
5.2 Variables Dictionary ........................................................................................................................... 52

5.2.1 Status Variables ............................................................................................................................................ 52
5.2.2 Equipment Constants .................................................................................................................................... 52
5.2.3 Data Variables ............................................................................................................................................... 53
5.3 Event List ............................................................................................................................................. 53
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5.3.1 Collection Events........................................................................................................................................... 53
5.3.2 Report Definition............................................................................................................................................ 54
5.4 Alarm Reports ..................................................................................................................................... 55
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LIST OF TABLES
TABLE 1 HSMS PROTOCOL PARAMETERS ............................................................................................................ 7
TABLE 2 HOST-ORIGINATED TRANSACTIONS ......................................................................................................... 9
TABLE 3 EQUIPMENT-ORIGINATED TRANSACTIONS .............................................................................................. 10
TABLE 4 SECS-II DATA TYPE ............................................................................................................................. 11
TABLE 5 DATA ITEM FORMAT .............................................................................................................................. 14
TABLE 6 GEM COMPLIANCE STATEMENT ............................................................................................................ 35
TABLE 7 COMMUNICATION STATE TRANSITIONS ................................................................................................... 37
TABLE 8 SCENARIO: HOST ATTEMPTS TO ESTABLISH COMMUNICATION ................................................................ 38
TABLE 9 SCENARIO: HOST INITIATED ARE YOU THERE ......................................................................................... 38
TABLE 10 SCENARIO: EQUIPMENT INITIATED ARE YOU THERE.............................................................................. 38
TABLE 11 CONTROL STATE TRANSITIONS ............................................................................................................ 40
TABLE 12 SCENARIO: OPERATOR SWITCHES FROM OFFLINE TO ONLINE ........................................................... 40
TABLE 13 SCENARIO: OPERATOR SWITCHES FROM ONLINE TO OFFLINE ........................................................... 41
TABLE 14 SCENARIO: OPERATOR SWITCHES FROM LOCAL TO REMOTE ............................................................ 41
TABLE 15 SCENARIO: OPERATOR SWITCHES FROM REMOTE TO LOCAL ............................................................ 41
TABLE 16 SCENARIO: HOST REQUESTS EQUIPMENT TO GO OFFLINE .................................................................. 41
TABLE 17 SCENARIO: HOST REQUESTS EQUIPMENT TO GO ONLINE .................................................................... 41
TABLE 18 SCENARIO: COLLECTION EVENTS OCCURS AT EQUIPMENT .................................................................... 42
TABLE 19 SCENARIO: HOST REQUESTS COLLECTION EVENT REPORT ................................................................... 42
TABLE 20 SCENARIO: COLLECTION REPORT SETUP ............................................................................................. 42
TABLE 21 SCENARIO: EQUIPMENT STATUS REPORT ............................................................................................ 42
TABLE 22 SCENARIO: EQUIPMENT STATUS VARIABLE NAMELIST REPORT ............................................................. 42
TABLE 23 TRACE DATA COLLECTION DATA ITEMS................................................................................................ 43
TABLE 24 SCENARIO: HOST INITIATES TRACE REPORT......................................................................................... 43
TABLE 25 SCENARIO: ENABLE/DISABLE ALARM ................................................................................................... 44
TABLE 26 SCENARIO: ALARM DETECTED BY EQUIPMENT...................................................................................... 44
TABLE 27 SCENARIO: REQUESTS ALARM INFORMATION ....................................................................................... 44
TABLE 28 SCENARIO: REQUESTS LIST OF ENABLED ALARMS................................................................................ 44
TABLE 29 SCENARIO: HOST SENDS REMOTE COMMAND ...................................................................................... 44
TABLE 30 SCENARIO: HOST SENDS HOST COMMAND .......................................................................................... 44
TABLE 31 SCENARIO: HOST SENDS EQUIPMENT CONSTANTS ............................................................................... 44
TABLE 32 SCENARIO: HOST EQUIPMENT CONSTANTS REQUEST........................................................................... 45
TABLE 33 SCENARIO: HOST EQUIPMENT CONSTANTS REQUEST........................................................................... 45
TABLE 34 SCENARIO: PROCESS PROGRAM DELETION BY HOST............................................................................ 45
TABLE 35 SCENARIO: HOST INITIATED PROCESS PROGRAM UPLOAD (UNFORMATTED) .......................................... 45
TABLE 36 SCENARIO: EQUIPMENT INITIATED PROCESS PROGRAM UPLOAD (UNFORMATTED)................................. 45
TABLE 37 SCENARIO: HOST INITIATED PROCESS PROGRAM DOWNLOAD (UNFORMATTED)..................................... 45
TABLE 38 SCENARIO: EQUIPMENT INITIATED PROCESS PROGRAM DOWNLOAD (UNFORMATTED) ........................... 45
TABLE 39 SCENARIO: HOST SENDS INFORMATION TO EQUIPMENT’S DISPLAY DEVICE ........................................... 46
TABLE 40 SCENARIO: MESSAGE FAULT DUE TO UNRECOGNIZED DEVICE ID .......................................................... 46
TABLE 41 SCENARIO: MESSAGE FAULT DUE TO UNRECOGNIZED FUNCTION TYPE ................................................. 46
TABLE 44 SCENARIO: MESSAGE FAULT DUE TO TRANSACTION TIMER TIMEOUT..................................................... 47
TABLE 45 SCENARIO: HOST REQUESTS EQUIPMENT’S CURRENT TIME .................................................................. 47
TABLE 46 SCENARIO: HOST INSTRUCTS EQUIPMENT TO SET TIME ........................................................................ 47
TABLE 47 SPOOL STATE TRANSITIONS ................................................................................................................ 49
TABLE 48 SCENARIO: HOST DEFINES SET OF MESSAGES TO BE SPOOLED ............................................................ 50
TABLE 49 SCENARIO: HOST DEFINES SET OF MESSAGES TO BE SPOOLED ............................................................ 50
TABLE 50 SCENARIO: REQUEST AND DELETE SPOOLED DATA .............................................................................. 50
TABLE 51 TTERM COMMAND PARAMETER ........................................................................................................ 51
TABLE 52 TEST-MODE COMMAND PARAMETER................................................................................................ 51
TABLE 53 PP-SELECT COMMAND PARAMETER ................................................................................................. 51
TABLE 54 STATUS VARIABLES SUPPORTED BY EQUIPMENT .................................................................................. 52
TABLE 55 EQUIPMENT CONSTANTS SUPPORTED BY EQUIPMENT .......................................................................... 52
TABLE 56 DATA VARIABLES SUPPORTED BY EQUIPMENT...................................................................................... 53
TABLE 57 COLLECTION EVENTS SUPPORTED BY EQUIPMENT ................................................................................ 53
TABLE 58 REPORT DEFINITIONS CREATED BY EQUIPMENT AFTER STARTUP ........................................................... 54
TABLE 59 ALARMS SUPPORTED BY EQUIPMENT ................................................................................................... 94
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1. COMMUNICATION PROTOCOLS
SECS-II messages may be sent using HSMS-SS. SEMI E37 defines in details how a connection is made
and which other industrial standards are referred to.
1.1 HSMS SINGLE SESSION MODE (SEMI E37.1)

HSMS (SEMI E37) uses a stream sockets interface over a Transmission Control Protocol/Internet Protocol
(TCP/IP) network to send and receive SECS-II messages. HSMS does not specify the physical network
medium to be used; however, 10 Mb Ethernet is generally assumed. The equipment supports exactly one (1)
HSMS port, in single-session (HSMS-SS) mode.
Maximum Message Size The maximum size of messages sent is 4294967296 (232) bytes. This does not
include 10 bytes for the header.
The following HSMS protocol parameters are configurable at the equipment:

HSMS PROTOCOL PARAMETERS
Name Function Default Range Resolution
Device ID Equipment Identifier 0 0-32767 1
T3 Timeout Specifies message reply timeout. 45secs 1-120secs 1sec
(Reply)
T5 Timeout Specifies amount of time between successive 10secs 1-240secs 1sec
(Connect Separation) attempts to connect to a remote entity.
T6 Timeout Specifies length of time a control transaction 5secs 1-240secs 1sec
(Control Transaction) may remain open before it is considered a
communications failure.
T7 Timeout Time a TCP/IP connection can remain in the 10secs 1-240secs 1sec
(Not Selected) NOT SELECTED state before it is considered
a communications failure.
T8 Timeout Maximum allowable time between successive 5secs 1-240secs 1sec
(Network Inter- bytes of an HSMS message.
character)
Connect Mode Specifies the logic the entity will use to PASSIVE ACTIVE/ -
establish an HSMS connection. PASSIVE
Local IP Address and Required in PASSIVE mode; defines the local - - -
Port Number connection entity.
Remote IP Address Required in ACTIVE mode; defines the remote - - -
and Port Number connection entity.
Table 1 HSMS Protocol Parameters
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1.2 SECS-II (SEMI E5)
SECS-II gives form and meaning to messages exchanged between equipment and host using a SECS-I or
HSMS message transfer protocol.
Stream and Function: A stream is a category of messages intended to support similar or related activities.
A function is a specific message for a specific activity within a stream.
Transaction: A transaction consists of either a primary message for which no reply is requested, or a
primary message, which requests a reply together with its corresponding secondary message. Secondary
messages cannot request a replay.
Conversation: A conversation is a series of one or more related transactions used to complete a specific
task.
Conversation Timeout: A conversation timeout is used to indicate that a conversation has not completed
properly.
Please refer to the next section for complete list of supported SECS-II messages implemented by the
Equipment.
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2. SECS-II MESSAGE SUMMARY
2.1 HOST-ORIGINATED TRANSACTION

The following table summarizes the primary SECS-II messages understood by the equipment and the
associated secondary replies (where applicable):
HOST TO EQUIPMENT MESSAGES
Primary Secondary
Sx,F0 Abort Transaction (SxF0) -
S1,F1 Are You There Request (R) S1,F2 On Line Data (D)
S1,F3 Selected Equipment Status Request (SSR) S1,F4 Selected Equipment Status Data (SSD)
S1,F11 Status Variable Namelist Request (SVNR) S1,F12 Status Variable Namelist Reply (SVNRR)
S1,F13 Establish Communications Request (CR) S1,F14 Establish Communications Request
Acknowledge (CRA)
S1,F15 Request OFF-LINE (ROFL) S1,F16 OFF-LINE Acknowledge (OFLA)
S1,F17 Request ON-LINE (RONL) S1,F18 ON-LINE Acknowledge (ONLA)
S2,F13 Equipment Constant Request (ECR) S2,F14 Equipment Constant Data (ECD)
S2,F15 New Equipment Constant Send (ECS) S2,F16 New Equipment Constant Acknowledge
(ECA)
S2,F17 Date and Time Request (DTR) S2,F18 Date and Time Data (DTD)
S2,F23 Trace Initialize Send (TIS) S2,F24 Trace Initialize Acknowledge (TIA)
S2,F29 Equipment Constant Namelist Request S2,F30 Equipment Constant Namelist (ECN)
(ECNR)
S2,F31 Date and Time Set Request (DTS) S2,F32 Date and Time Set Acknowledge (DTA)
S2,F33 Define Report (DR) S2,F34 Define Report Acknowledge (DRA)
S2,F35 Link Event Report (LER) S2,F36 Link Event Report Acknowledge (LERA)
S2,F37 Enable/Disable Event Report (EDER) S2,F38 Enable/Disable Event Report
Acknowledge (EERA)
S2,F39 Multi-Block Inquire (MBI) S2,F40 Multi-Block Grant (MBG)
S2,F41 Host Command Send (HCS) S2,F42 Host Command Acknowledge (HCA)
S2,F43 Reset Spooling Streams and Functions S2,F44 Reset Spooling Acknowledge (RSA)
(RSSF)
S5,F3 Enable/Disable Alarm Send (EAS) S5,F4 Enable/Disable Alarm Acknowledge (EAA)
S5,F5 List Alarms Request (LAR) S5,F6 List Alarms Data (LAD)
S6,F15 Event Report Request (ERR) S6,F16 Event Report Data (ERD)
S6,F23 Request Spooled Data (RSD) S6,F24 Request Spooled Data Acknowledgment
Send (RSDAS)
S7,F1 Process Program Load Inquire (PPI) S7,F2 Process Program Load Grant (PPG)
S7,F3 Process Program Send (PPS) S7,F4 Process Program Acknowledge (PPA)
S7,F5 Process Program Request (PPR) S7,F6 Process Program Data (PPD)
S7,F17 Delete Process Program Send (DPS) S7,F18 Delete Process Program Acknowledge
(DPA)
S7,F19 Current EPPD Request (RER) S7,F20 Current EPPD Data (RED)
Table 2 Host-Originated Transactions
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2.2 EQUIPMENT-ORIGINATED TRANSACTION
The following table summarizes the primary SECS-II messages originated by the equipment and the
expected secondary replies (where applicable):
EQUIPMENT TO HOST MESSAGES
Primary Secondary
Sx,F0 Abort Transaction (SxF0) -
S1,F1 Are You There Request (R) S1,F2 On Line Data (D)
S1,F13 Establish Communications Request (CR) S1,F14 Establish Communications Request
Acknowledge (CRA)
S2,F17 Date and Time Request (DTR) S2,F18 Date and Time Data (DTD)
S5,F1 Alarm Report Send (ARS) S5,F2 Alarm Report Acknowledge (ARA)
S6,F1 Trace Data Send (TDS) S6,F2 Trace Data Acknowledge (TDA)
S6,F11 Event Report Send (ERS) S6,F12 Event Report Acknowledge (ERA)
S7,F1 Process Program Load Inquire (PPI) S7,F2 Process Program Load Grant (PPG)
S7,F3 Process Program Send (PPS) S7,F4 Process Program Acknowledge (PPA)
S7,F5 Process Program Request (PPR) S7,F6 Process Program Data (PPD)
S9,F1 Unrecognized Device ID (UDN) -
S9,F3 Unrecognized Stream Type (USN) -
S9,F5 Unrecognized Function Type (UFN) -
S9,F7 Illegal Data (IDN) -
S9,F9 Transaction Timer Timeout (TTN) -
S9,F11 Data Too Long (DLN) -
S9,F13 Conversation Timeout (CTN) -
Table 3 Equipment-Originated Transactions
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3. SECS-II MESSAGE DETAILS
3.1 DATA ITEMS

Complete details of all SECS-II messages supported by the equipment are provided in this section. For
enhanced readability, messages are documented using SECS Message Language (SML) format. Data item
names are presented as comments within each message description. SML data item types map to SEMI E5
item header format codes as follows:
SECS II DATA TYPES
SML Data Item Type Octal
L List 00
B Binary 10
BL Boolean 11
A ASCII 20
J JIS-8 21
I8 Signed 8-byte integer 30
F8 8-byte floating point 40
F4 4-byte floating point 44
U8 Unsigned 8-byte integer 50
Table 4 SECS-II Data Type
3.1.1 DAT A DICTIONARY

This section defines the data items used in the standard SECS-II messages and its format used by the
Equipment.
DATA ITEM FORMAT
Name Format Where Description
Used
ACKC5 Binary S5F4 Stream 5 acknowledge code.
0 = accepted
>0 = error, not accepted
1-63 = reserved
ACKC7 Binary S7F4, Stream 7 acknowledge code.
S7F18 0 = Accepted
1 = Permission not granted (busy)
2 = Length error
4 = PPID not found
5 = Mode unsupported (equipment not under remote
control)
6-63 = Reserved
ACKC10 Binary S10F4, F6 Stream 10 acknowledge code.
0 = Accepted for display
1 = Message will not be displayed
2 = Terminal not available
3-63 = Reserved
ALID U4 S5F3, F5, Alarm identification.
F6
ALCD Binary S5F6 Alarm code.
bit 8 = 1 means alarm set
bit 8 = 0 means alarm cleared bits 7 - 1 is alarm
category code:
0 = Not used
1 = Personal safety
2 = Equipment safety
3 = control warning
4 = Parameter control error
5 = Irrecoverable error
6 = Equipment status warning
7 = Attention flags
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DATA ITEM FORMAT
8 = Data integrity
>8 = Other categories
9-63 = Reserved
ALTX Ascii S5F6 Alarm text, limited to 40 characters.
ALED Binary S5F3 Alarm enable/disable code.
bit 8 = 1 means enable alarm
bit 8 = 0 means disable alarm
ATTRID Ascii S1F19 Identifier for an attribute for a specific type of object.
CCODE U2 Stream 7: Each command code corresponds to a unique
F22, F23, process operation the machine is capable of
F26, F31 performing.
CEID U4 S2F35, F37; Collection event ID.
S6F11, F15
CPACK Binary S2F42 S2F41 host command parameter acknowledge code.
0 = OK
1 = Invalid parameter name
2 = Invalid parameter value
3 = Invalid parameter type
CPNAME Ascii S2F41, Command parameter name.
S2F42
DATAID U4 S2F33, F35, Data ID. In HSMS environments, messages are
F45; S6F5, always a single block and the DATAID must always
F11, F16 be 0.
DSPER Ascii S2F23 Data sample period, format hhmmss
ERRW7 Ascii S7F27 Text string describing error found in process program.
HCACK Binary S2F42 S2F41 host command acknowledge code.
0 = Accepted
1 = Not accepted
2 = Unrecognized command
3 = Invalid parameter
LOC Binary S2F27,S3F2 Machine material location code
MDLN Ascii S1F2, F13, Model number; a constant ASCII field. Content is an
F14 equipment- specific EC.
MID Ascii S2F27; Material ID. 16 Characters maximum
Stream 12;
Stream 7
OBJID Ascii S1F19 Identifier for an object.
OBJSPEC Ascii Stream 14: A text string that has an internal format and that is
F1, F3, F5, used to point to a specific object instance. The string
F7 is formed out of a sequence of formatted substrings,
each specifying an object's type and identifier. The
substring format has the following four fields: object
type, colon character ":", object identifier, greater-than
symbol ">" where the colon character ":" is used to
terminate an object type and the "greater than"
symbol ">" is used to terminate an identifier field. The
object type field may be omitted where it may be
otherwise determined. The final ">" is optional.
OBJTYPE Ascii S1F19 Identifier for a group or class of objects. All objects of
the same type must have the same set of attributes
available.
PPBODY Binary S7F3, F6 Process program body.
PPID Ascii S7F1, F3, Process program ID. This is the name of the process
F5, F6, F17, program
F20
RCMD Ascii S2F41 Remote command code. commands.
REPGSZ U4 S2F23 Reporting group size.
RPTID U4 S2F33, F35; Report ID.
S6F11, F16
SEQNUM U2 S7F27 Value which identifies a unique process program
command by its position in the list of commands
relative to the first. For the first command of the
process program, SEQNUM is l.
SOFTREV Ascii S1F2, F13, The software revision code; a constant ASCII field.
F14 Content is an equipment-specific EC.
TEXT Ascii S10F3, F5 A single line of characters.
- 12 -
DATA ITEM FORMAT
TID Binary S10F3, F5 Terminal number.
0 = Display message on the equipment’s display
device after the Msg button is selected.
1 = Display message directly on the equipme nt’s
display device when received.
TOTSMP U4 S2F23 Total samples to be made.
TRID U4 S2F23, Trace request ID.
S6F1
SVID U4 S1F3, F11, Status variable ID. Status variables may include any
F12; S2F23, parameter that can be sampled in time such as
S2F33 temperature or quantity of a consumable.
ECID U4 S2F13, F15, Equipment constant ID.
F29, F30
DDID U4
ERRCODE U1 S4F20, F22, Code identifying an error
F23 0 = No error
1 = Unknown object in Object Specifier
2 = Unknown target object type
3 = Unknown object instance
4 = Unknown attribute name
5 = Read-only attribute - access denied
0-63 Reserved
OPID U1
LENGTH U4 S7F1 Process program body (PPBODY) length, in bytes.
CMDA U1 S2F22, Command acknowledge code
S2F28 0 = completed or done
1 = command does not exist
2 = cannot perform now
>2 = Other equipment-specific error
3-63 = Reserved
ECMIN U4 S2F30 Equipment constant minimum value.
ECMAX U4 S2F30 Equipment constant maximum value.
ECDEF Ascii S2F30 Equipment constant default value.
IDTYP Binary Stream 12: ID Type.
F1, F3, F4, 0 = Wafer ID
F5, F7, F9, 1 = Wafer Cassette ID
F11, F13, 2 = Film Frame ID
F14, F15, >2 = Error
F16, F17, 3-63 = Reserved
F18
FNLOC U2 Stream 12: Flat/Notch Location. In degrees from the bottom CW.
F1, F3, F4 (Bottom equals zero degrees.) Zero length indicates
not used.
FFROT U2 S12F1, Film Frame Rotation. In degrees from the bottom CW.
S12F3 (Bottom equals zero degrees.) Zero length indicates
not used.
ORLOC Binary Stream 12: Origin Location. implicit value of (0,0)
F1, F3, F4 0 = Center die of wafer (Determined by: (row or
column count +1) / 2 truncated)
1 = Upper right
2 = Upper left
3 = Lower left
4 = Lower right
>4 = Error
5-63 = Reserved
RPSEL U1 S12F1, Reference Point Select
S12F4
DUTMS Ascii S12F1, Die Units of Measure
S12F4
XDIES U4 S12F1, X-axis die size (index)
S12F4
YDIES U4 S12F1, Y-axis die size (index)
S12F4
ROWCT U4 S12F1, Row count in die increments.
S12F4
COLCT U4 S12F1, Column count in die increments.
S12F4
- 13 -
DATA ITEM FORMAT
NULBC_BINLT_BCEQU U1 S12F3, Wafer Mapping Bin codes
S12F4 NULBC = This value is the bin code value that is used
for no die at a location.
BINLT = The Bin List. Is an array of bin values.
BCEQU = Bin code equivalents. Array of all codes
that are to be processed
PRDCT U1 S12F1, Process Die Count. Number of die to be processed or
S12F4 number of die which have been processed.
PRAXI Binary S12F1, Process axis
S12F3 0 = Rows (X-axis), top, increasing
1 = Rows (X-axis), top, decreasing
2 = Rows (X-axis), bottom, increasing
3 = Rows (X-axis), bottom, decreasing
4 = Columns (Y-axis), left, increasing
5 = Columns (Y-axis), left, decreasing
6 = Columns (Y-axis), right, increasing
7 = Columns (Y-axis), right, decreasing
>7 = Error
8-63 = Reserved
SMPLN U4 S6F1 Sample Number
MLCL U8
Table 5 Data Item Format
3.1.2 STATUS VARIABLES

The status variables (SVs) and associated status variable ID (SVID) provided by the equipment are
described in the equipment specific appendices.
3.1.3 EQUIPMENT CONSTANTS

The equipment constant values (ECVs) and associated equipment constant IDs (ECIDs) provided by the
equipment are described in the equipment specific appendices.
3.1.4 COLLECTION EVENTS

The collection events (CEs) and associated collection event ID (CEID) provided by the equipment are
described in the equipment specific appendices.
3.1.5 ALARM S
The Alarms and associated Alarm IDs (ALID) provided by the equipment are described in the equipment
specific appendices
- 14 -
3.2 HOST-ORIGINATED TRANSACTIONS
This section details the primary SECS-II messages understood by the equipment and the associated
secondary replies (where applicable).
3.2.1 SXF0 ABORT TRANSACTION

Usage: S,H->E
Descriptions: Used with all streams in lieu of an expected message to abort a transaction.
Structure: Header-only
Notes:
3.2.2 S1F1 ARE YOU THERE R EQUEST (R)

Usage: S,H->E, reply
Descriptions: Used to test whether the equipment is on-line. A function 0 response to S1,F1 indicates
SECS communication is inoperative (equivalent to a T3 (reply) timeout at the host). While
communications are established, the host may issue this message at any time to test the
SECS link
Notes:
3.2.3 S1F2 ON LINE DAT A (D)

Usage: S,H<-E
Descriptions: Equipment reply to host-originated S1,F1
Structure: <L[2]
<A[MAX 6]> * MDLN
<A[MAX 6]> * SOFTREV
>.
Notes:
3.2.4 S1F3 SELECTED EQUIPM ENT ST ATUS REQUEST (SSR)

Descriptions: Used to request the values of selected status variables.
Structure: <L[MAX N]
<U2[1]> * SVID1
.
.
.
<U2[1]> * SVIDN
>.
Notes: If N=0, then SecsToHost.Net will report all known SVs in ascending SVID order. ECVs
may not be requested via this message. The older (alternative) format of this message is
not supported.
3.2.5 S1F4 SELECTED EQUIPM ENT ST ATUS DAT A (SSD)

Usage: S,H<-E
Descriptions: Returned by the equipment to report the SV values in the order requested.
<V> * SVval1
.
.
.
<V> * SVvalN
>.
Notes: A zero-length list (<L[0]>) returned for SVi means that SVIDi has not been defined in
SecsToHost.Net
- 15 -
3.2.6 S1F11 ST ATUS VARIABLES NAM ELIST REQUEST (SVNR)
Descriptions: This message is used by the host to request identification of certain status variables.
<U2[1]> * SVID1
.
.
.
<U2[1]> * SVIDN
>.
Notes: If N=0, then SecsToHost.Net will report all known SVs in ascending SVID order. ECVs
may not be requested via this message.
3.2.7 S1F12 ST ATUS VARIABLE NAM ELIST REPLY (SVNRR)

Usage: S,H<-E
Descriptions: Returned by the equipment to report the requested SV information.
<L[3]1
<U2[1]> * SVID1
<A[n]> * SVNAME1
<A[n]> * UNITS1
>
.
.
.
<L[3]N
<U2[1]> * SVIDN
<A[n]> * SVNAMEN
<A[n]> * UNITSN
>
>.
Notes: A zero-length name and units (<A[0]>) returned for SVi means that SVIDi has not been
defined in SecsToHost.Net
3.2.8 S1F13 ESTABLISH COMM UNICATION REQUEST (CR)

Descriptions: Used by the host to attempt to initialize communications with the equipment.
Structure: <L[0]>.
Notes:
3.2.9 S1F14 ESTABLISH COMM UNICATION REQUEST AC KNOWLEDGE (CRA)

Usage: S,H<-E
Descriptions: Equipment reply to host-originated S1,F13.
Structure: <L[2]
<B[1]> * COMMACK
<L[2]
<A[MAX 6]> * MDLN
<A[MAX 6]> * SOFTREV
>
>.
Notes:
3.2.10 S1F15 REQUEST OFF-LINE (ROFL)

Descriptions: Used by the host to request equipment transition to the OFF-LINE control state.
Structure: Header only.
Notes:
- 16 -
3.2.11 S1F16 OFF-LINE ACKNOWLEDGE (OFLA)
Usage: S,H<-E
Descriptions: OFF-LINE request acknowledge or error.
Notes: <B[1]>. * OFLACK
3.2.12 S1F17 REQUEST ON-LINE (ROFL)

Descriptions: Used by the host to request equipment transition to the ON-LINE control state.
Notes:
3.2.13 S1F18 ON-LINE ACKNOWLEDGE (OFLA)

Usage: S,H<-E
Descriptions: ON-LINE request acknowledge or error.
Notes: <B[1]>. * ONLACK
3.2.14 S2F13 EQUIPMENT CONST ANT REQUEST (ECR)

Descriptions: Used by the host to request current equipment constant values from the equipment.
Structure: <L[N]
<U2[1]> * ECID1
.
.
.
<U2[1]> * ECIDN
>.
Notes: The older (alternative) format of this message will not be supported.
3.2.15 S2F14 EQUIPMENT CONST ANT DAT A (ECD)

Usage: S,H<-E
Descriptions: Equipment response to S2,F13. ECVs are reported in the order requested.
Structure: <L[N]
<V> * ECV1
.
.
.
<V> * ECVN
>.
Notes: A zero-length list returned for ECVi means that ECIDi does not exist.
- 17 -
3.2.16 S2F15 NEW EQUIPMENT CONSTANT SEND (ECS)
Descriptions: The host directs the equipment to change specific equipment constants. The equipment
is responsible for validating new equipment constant values. New values will take effect
as soon as possible.
Structure: <L[N]
<L[2]1
<U2[1]> * ECID1
<V> * ECV1
>
.
.
.
<L[2]N
<U2[1]> * ECIDN
<V> * ECVN
>
>.
Notes:
3.2.17 S2F16 NEW EQUIPMENT CONSTANT ACKNOWLEDGE (ECA)

Usage: S,H<-E
Descriptions: Equipment response to S2,F15. Any error will cause the entire message to be rejected.
Partial updates will not be performed.
Structure: <B[1]>. * EAC
Notes:
3.2.18 S2F17 DAT A AND TIME REQUEST (DTR)

Descriptions: Used by the host to request the current date and time from the equipment.
Notes:
3.2.19 S2F18 DAT A AND TIME DAT A (DTD)

Usage: S,H<-E
Descriptions: Actual time data, equipment response to S2,F17.
Structure: <A[12]>. * TIME
Notes: A zero length item means no time exists.
3.2.20 S2F21 REMOTE COMMAND SEND (RCS)

Descriptions: Similar to pressing buttons on the front panel or causes some equipment activity to
commence or to cease
Structure: <A[MAX N]> * RCMD
Notes:
3.2.21 S2F22 REMOTE COMMAND ACKNOWLEDGE (RCA)

Usage: S,H<-E
Descriptions: Acknowledge or error.
Structure: <U1>. * CMDA
Notes:
- 18 -
3.2.22 S2F23 TRACE INITIALI ZE SEND (TIS)
Descriptions: Method for sampling selected status variables as a function of time.
Structure: <L[5]
<U2[1]> *TRID
<A[6]> *DSPER
<U4[1]> *TOTSMP
<U4[1]> *REPGSZ
<L[N]>
<U2[1]> *SVID1
.
.
.
<U2[1]> *SVIDN
>
>.
Notes: If TOTSMP=0, then the trace will be terminated.
3.2.23 S2F24 TRACE INITIALI ZE ACKNOWLEDGE (TIA)

Usage: S,H<-E
Descriptions: Acknowledge or error..
Structure: <B[1]> *TIAACK
Notes:
3.2.24 S2F29 EQUIPMENT CONST ANT NAM ELIST (ECNR)

Descriptions: This function allows the host to retrieve basic information about what equipment
constants are available in the equipment.
Structure: <L[N]
<U2[1]> * ECID1
.
.
.
<U2[1]> * ECIDN
>.
Notes: A zero-length list means send information for all ECIDs.
- 19 -
3.2.25 S2F30 EQUIPMENT CONST ANT NAM ELIST (ECN)
Usage: S,H<-E
Descriptions: Data response to S2,F29 message.
Structure: <L[N] (number of equipment constants)
<L1[6]
<U2[1]> * ECID1
<A[MAX N]> * ECNAME1
<V> * ECMIN1
<V> * ECMAX1
<V> * ECDEF1
<A[MAX N]> * UNITS1
>
.
.
.
<LN[6]
<U2[1]> * ECIDN
<A[MAX N]> * ECNAMEN
<V> * ECMINN
<V> * ECMAXN
<V> * ECDEFN
<A[MAX N]> * UNITSN
>
>.
Notes:
3.2.26 S2F31 DAT A AND TIME SET REQUEST (DTS)

Descriptions: The host requests the equipment to set its internal clock to the indicated TIME.
Structure: <A[12]>. * TIME
Notes:
3.2.27 S2F32 DATE AND TIME ACKNOWLEDGE (DTA)

Usage: S,H<-E
Descriptions: Acknowledge the receipt of the date and time.
Structure: <B[1]>. * TIACK
Notes:
- 20 -
3.2.28 S2F33 DEFINE REPORT (DR)
Descriptions: Used by the host to associate equipment variables with discrete reports to be provided
with collection events. Association is performed by grouping specific equipment-defined
VIDs with host-defined RPTIDs.
Structure: <L[2]
<U2[1]> * DATAID
<L[N]
<L1[2]
<U2[1]> * RPTID1
<L[M]
<U2[1]> * SVID1
.
.
.
<U2[1]> * SVIDM
>
>
.
.
.
<LN[2]
<U2[1]> * RPTIDN
<L[M]
<U2[1]> * SVID1
.
.
.
<U2[1]> * SVIDM
>
>
>
>.
Notes:
3.2.29 S2F34 DEFINED REPORT ACKNOWLEDGE (DRA)

Usage: S,H<-E
Descriptions: Acknowledge or error. If an error condition is detected the entire message is rejected (i.e.
partial changes are not allowed).
Structure: <B[1]>. * DRACK
Notes:
- 21 -
3.2.30 S2F35 LINK EVENT REPORT (LER)
Descriptions: Used by the host to associate reports with specific collection events on the equipment.
Association is performed by grouping host-defined RPTIDs with equipment-defined
CEIDs. A report must be defined before it is linked to an event (see S2,F33)
Structure: <L[2]
<U2[1]> * DATAID
<L[N]
<L1[2]
<U2[1]> * CEID1
<L[M]
<U2[1]> * RPTID1
.
.
.
<U2[1]> * RPTIDM
>
>
.
.
.
<LN[2]
<U2[1]> * CEIDN
<L[M]
<U2[1]> * RPTID1
.
.
.
<U2[1]> * RPTIDM
>
>
>
>.
Notes: If N=0, then all report links will be deleted; report definitions will not be changed. If M=0,
then all report links to the specified CEID will be deleted; otherwise, all report links to the
CEID will be replaced.
There is no explicit limit placed on the number of reports linked to an event. The
equipment allows multiple instances of a report to be linked to an event. Event reporting
links will remain unchanged should the host modify a report via a subsequent S2,F33
message. The format of the resulting event report messages (S6,F11), however, may
change.
3.2.31 S2F36 LINK EVENT REPORT ACKNOWLEDGE (LER A)

Usage: S,H<-E
Structure: <B[1]>. * LRACK
Notes:
- 22 -
3.2.32 S2F37 ENABLE/DISABLE EVENT REPORT (EDER)
Descriptions: Used by the host to enable or disable specific event reports on the equipment.
Structure: <L[2]
<BL[1]> * CEED
<L[N]
<U2[1]> * CEID1
.
.
.
<U2[1]> * CEIDN
>
>.
Notes:
3.2.33 S2F38 ENABLE/DISABLE EVENT REPORT ACKNOW LEDGE (EERA)

Usage: S,H<-E
Structure: <B[1]>. * ERACK
Notes:
3.2.34 S2F41 HOST COMM AND S END (HCS)

Descriptions: The host requests the equipment perform a specified remote command.
Structure: <L[2]
<A[MAX N]> * RCMD
<L[MAX N]
<L[2]
<A[MAX N]> * CPNAME1
<V> * CPVAL1
>
.
.
.
<L[2]
<A[MAX N]> * CPNAMEn
<V> * CPVALn
>
>
>.
Notes:
- 23 -
3.2.35 S2F42 HOST COMM AND ACKNOWLEDGE (HCA)
Usage: S,H<-E
Descriptions: Host command acknowledge or error.
Structure: <L[2]
<B[1]> * HCACK
<L[MAX N]
<L[2]
<A[MAX N ]> * CPNAME1
<V> * CPACK1
>
.
.
.
<L[2]
<A[MAX N ]> * CPNAMEn
<V> * CPACKn
>
>
>.
Notes: If there are no invalid parameters, then a list of zero-length will be sent for item 2.
3.2.36 S2F43 RESET SPOOLING STREAM S AND FUNCTIONS (RSSF)

Descriptions: This message allows the host to select specific streams and functions to be spooled
whenever spooling is active
Structure: <L[M]
<L1[2]
<U1[1]> * STRID
<L[N]
<U1[1]> * FCNID1
.
.
.
<U1[1]> * FCNIDN
>
>
.
.
.
<LM[2]
<U1[1]> * STRID
<L[N]
<U1[1]> * FCNID1
.
.
.
<U1[1]> * FCNIDN
>
>
>.
Notes: A zero-length list, M=0 turns off spooling for all streams and functions. A zero-length list,
N=0, turns off spooling for all functions for the stream. Spooling for Stream 1 is not
allowed. The equipment must allow the host to spool all primary messages for a stream
(except Stream 1). A defined list of functions for a stream will replace any previously
selected functions.
- 24 -
3.2.37 S2F44 RESET SPOOLING ACKNOWLEDGE (RSA)
Usage: S,H<-E
Descriptions: Response to S2,F43 message; acknowledge or error.
Structure: <L[2]
<B[1]>. * RSPACK
<L[M]
<L1[3]
<U2[1]> * STRID1
<B[1]>. * STRACK1
<L[N]
<U1[1]> * FCNID1
.
.
.
<U1[1]> * FCNIDN
>
>
.
.
.
<LM[3]
<U2[1]> * STRIDM
<B[1]> * STRACKM
<L[N]
<U1[1]> * FCNID1
.
.
.
<U1[1]> * FCNIDN
>
>
>
>.
Notes: If RSPACK = 0, then a zero-length list, M=0 is given, indicating no streams or functions
in error. A zero-length list, N=0, indicates no functions in error for specified.
3.2.38 S5F3 ENABLE/DISABLE ALARM SEND (EAS)

Descriptions: Allows the host to selectively enable or disable individual alarms the equipment.
Structure: <L[2]
<B[1]> * ALED
<U2[1]> * ALID
>.
Notes: A zero length ALID means all alarms.
3.2.39 S5F4 ENABLE/DISABLE ALARM ACKNOWLEDGE (E AA)

Usage: S,H<-E
Structure: <B[1]>. * ACKC5
Notes:
3.2.40 S5F5 LIST ALARM S REQUEST (LAR)

Descriptions: Requests the equipment to provide current alarm information to the host.
Structure: <U2[N]>. * ALID1,.., ALIDN
Notes:
- 25 -
3.2.41 S5F6 LIST ALARM S DAT A (LAD)
Usage: S,H<-E
Descriptions: Equipment response to S5,F5. The equipment sends current alarm data to the host.
Structure: <L[N]
<L1[3]
<B[1]> * ALCD1
<U2[1]> * ALID1
<A[MAX 40]> * ALTX1
>
.
.
.
<LN[3]
<B[1]> * ALCDN
<U2[1]> * ALIDN
<A[MAX 40]> * ALTXN
>
>.
Notes: If a specified ALID does not exist, then zero-length ALCD and ALTX fields will be
returned
3.2.42 S5F7 LIST ENABLED AL ARM S REQUEST (LEAR)

Descriptions: List alarms which are enabled.
Notes:
3.2.43 S5F8 LIST ENABLED ALARM S D AT A (LEAD)

Usage: S,H<-E
Descriptions: This message is similar to S5,F6 except that it lists only alarms which are enabled.
Structure: <L[m]
<L1[3]
<B[1]> * ALCD1
<U2[1]> * ALID1
<A[MAX 40]> * ALTX1
>
.
.
.
<Lm[3]
<B[1]> * ALCDN
<U2[1]> * ALIDN
<A[MAX 40]> * ALTXN
>
>.
Notes: If m=0, no response can be made. A zero-length item returned for ALCDi or ALTXi
means that value does not exist.
3.2.44 S6F15 EVENT REPORT REQUEST (ERR)

Descriptions: Used by the host to request an event report for a given CEID.
Structure: <U2[1]>. * CEID
Notes:
- 26 -
3.2.45 S6F16 LIST ENABLED ALARM S DAT A (LEAD)
Usage: S,H<-E
Descriptions: Equipment reply to host-originated S6,F15. S6,F16 is identical in format to S6,F11.
Structure: <L[3]
<U2[1]> * DATAID
<U2[1]> * CEID
<L[N]
<L1[2]
<U2[1]> * RPTID1
<L[M]
<V> * V1
.
.
.
<V> * VM
>
>
.
.
.
<LN[2]
<U2[1]> * RPTIDN
<L[M]
<V> * V1
.
.
.
<V> * VM
>
>
>
>.
Notes:
3.2.46 S6F19 INDIVIDUAL REPORT REQUEST (IRR)

Descriptions: Used by the host to request a report via RPTID.
Structure: <U2[1]> * RPTID
Notes:
3.2.47 S6F20 INDIVIDUAL REPORT DAT A (IRD)

Usage: S,H<-E
Descriptions: Equipment reply to host-originated S6,F19.
Structure: <L[N]
<V> * V1
.
.
.
<V> *VN
>.
Notes: A zero-length list, N=0, means that there are no variables linked to the given RPTID or
that the given RPTID does not exist.
3.2.48 S6F23 REQUEST SPOOLE D DAT A (RSD)

Descriptions: Host requests transmission or deletion of the messages currently spooled by the
equipment.
Structure: <B[1]>. * RSDC
Notes:
- 27 -
3.2.49 S6F24 REQUEST SPOOLE D DAT A ACKNOWLEDGEMENT SEND (RSDAS)
Usage: S,H<-E
Descriptions: Equipment acknowledges the receipt of the S6,F23 message.
Structure: <B[1]>. * RSDA
Notes:
3.2.50 S7F1 PROCESS PROGRAM LO AD INQUIRE (PPI)

Descriptions: This message is used by the host to inquire whether or not the equipment will accept the
download of a multi-block process program.
Structure: <L[2]
<A[MAX N]> * PPID
<U4[1]> * LENGTH
>.
Notes:
3.2.51 S7F2 PROCESS PROGRAM LO AD GRANT (PPG)

Usage: S,H<-E
Descriptions: Equipment reply to host-originated S7,F1. Used to acknowledge or reject host request to
download multi-block process program.
Structure: <B[1]>. * PPGNT
Notes:
3.2.52 S7F3 PROCESS PROGRAM SEND (PPS)

Descriptions: Used by the host to send an existing process program to the equipment.
Structure: <L[2]
<A[MAX N]> * PPID
<B[MAX N]> * PPBODY
>.
Notes:
3.2.53 S7F4 PROCESS PROGRAM ACKNOWLEDGE (PPA)

Usage: S,H<-E
Descriptions: Equipment reply to host-originated S7,F3. Used to acknowledge or reject process
program downloaded from the host.
Notes:
3.2.54 S7F5 PROCESS PROGRAM REQUEST (PPR)

Descriptions: Used by the host to request an existing process program from the equipment.
Structure: <A[MAX N]>. * PPID
Notes:
3.2.55 S7F6 PROCESS PROGRAM DAT A (PPD)

Usage: S,H<-E
Descriptions: Equipment reply to host-originated S7,F5. Used to upload process programs from the
equipment to the host.
Structure: <L[2]
<A[MAX N]> * PPID
<B[MAX N]> * PPBODY
>.
Notes: A zero-length list means request denied.
- 28 -
3.2.56 S7F17 DELETE PROCESS PROGRAM SEND (DPS)
Descriptions: Host requests the equipment to delete process programs from equipment storage.
Structure: <L[N]
<A[MAX N]> * PPID1
.
.
.
<A[MAX N]> * PPIDN
>.
Notes: If N=0, then delete all.
3.2.57 S7F18 DELETE PROCESS PROGRAM ACKNOWLEDGE (DPA)

Usage: S,H<-E
Descriptions: Acknowledge receipt of S7,F17 message.
Notes:
3.2.58 S7F19 CURRENT EPPD R EQUEST (RER)

Descriptions: This message is used to request the transmission of the current equipment process
program directory (EPPD). This is a list of all the PPIDs of the process programs stored
in the equipment.
Notes:
3.2.59 S7F20 CURRENT EPPD D AT A (RED)

Usage: S,H<-E
Descriptions: Used by the equipment to transfer its current EPPD to the host.
Structure: <L[N]
<A[MAX N]> * PPID1
.
.
.
<A[MAX N]> * PPIDN
>.
Notes:
3.2.60 S10F3 TERMINAL DISPL AY, SINGLE (VTN)

Descriptions: The host requests the equipment to display a single line of text on its terminal display.
Structure: <L[2]
<B[1]> * TID
<A[MAX N]> * TEXT
>.
Notes:
3.2.61 S10F4 TERMINAL DISPL AY, SINGLE ACKNOWLEDGE (VT A)

Usage: S,H<-E
Descriptions: Equipment response to S10,F3.
Notes:
- 29 -
3.3 EQUIPMENT-ORIGINATED TRANSACTIONS
This section details the primary SECS-II messages understood by the host and the associated secondary
replies (where applicable). Secondary replies (where applicable).
3.3.1 SX,F0 ABORT TRANSACT ION

Usage: S,H<-E
Descriptions: Used with all streams in lieu of an expected message to abort a transaction.
Notes:
3.3.2 S1F1 ARE YOU THERE R EQUEST (R)

Usage: S,H<-E, reply
Descriptions: Used to test host on-line. A function 0 response to S1,F1 indicates SECS communication
is inoperative (equivalent to a T3 (reply) timeout at the equipment). The equipment may
issue this message at any time to test the SECS link
Notes:
3.3.3 S1F2 ON LINE DAT A (D)

Usage: S,H->E
Descriptions: Host reply to host-originated S1,F1
Structure: <L[0]>.
Notes:
3.3.4 S1F13 ESTABLISH COMM UNICATIONS REQUEST ( CR)

Descriptions: Used by the equipment to attempt to initialize communications with the host.
Structure: <L[2]
<A[MAX N]> * MDLN
<A[MAX N]> * SOFTREV
>.
Notes:
3.3.5 S1F14 ESTABLISH COMM UNICATIONS REQUEST ACKNOWLEDGE (CRA)

Usage: S,H->E
Descriptions: Host- reply to equipment originated S1,F13.
Structure: <L[2]
<B[1]> * COMMACK
<L[0]>
>.
Notes:
3.3.6 S5F1 ALARM REPORT SE ND ( ARS)

Descriptions: Report change in or presence of an alarm condition.
Structure: <L[3]
<B[1]> * ALCD
<U2[1]> * ALID
<A[MAX N]> * ALTX
>.
Notes:
- 30 -
3.3.7 S5F2 ALARM REPORT AC KNOWLEDGE (ARA)
Usage: S,H->E
Descriptions: Host acknowledge alarm send.
Notes:
3.3.8 S6F1 TRACE DAT A SEND

Descriptions: Used by the equipment to send samples to the host according to the trace setup done by
S2,F33.
Structure: <L[4]
<U2[1]> * TRID
<U,I> * SMPLN
<A[12]> * STIME
<L[N]
<U2[1]> * SVID
.
.
.
<U2[1]> * SVID
>
>
Notes: A zero-length STIME means no value is given and that the time is to be derived from
SMPLN
3.3.9 S6F2 TRACE DAT A ACKNOWLEDGE (TDA)

Usage: S,H->E
Structure: <B[1]> *ACKC6
Notes:
- 31 -
3.3.10 S6F11 EVENT REPORT SEND (ERS)
Descriptions: Used by the equipment to notify the host of an event.
Structure: <L[3]
<U2[1]> * DATAID
<U2[1]> * CEID
<L[N]
<L1[2]
<U2[1]> * RPTID1
<L[M]
<V> * V1
.
.
.
<V> * VM
>
>
.
.
.
<LN[2]
<U2[1]> * RPTIDN
<L[M]
<V> * V1
.
.
.
<V> * VM
>
>
>
>.
Notes:
3.3.11 S6F12 EVENT REPORT ACKNOWLEDGE (ERA)

Usage: S,H->E
Descriptions: Acknowledges an event report from the equipment (optional).
Notes:
3.3.12 S7F1 PROCESS PROGRAM LO AD INQUIRE (PPI)

Descriptions: This message is used by the equipment to inquire whether or not the host will accept
upload of a multi-block process program.
Structure: <L[2]
<A[MAX N]> * PPID
<U4[1]> * LENGTH
>.
Notes:
3.3.13 S7F2 PROCESS PROGRAM LO AD GRANT (PPG)

Usage: S,H->E
Descriptions: Host reply to equipment-originated S7,F1. Used to acknowledge or reject equipment
request to upload multi-block process program.
Structure: <B[1]>. * PPGNT
Notes:
- 32 -
3.3.14 S7F3 PROCESS PROGRAM SEND (PPS)
Descriptions: Used by the equipment to send an existing process program to the host.
Structure: <L[2]
<A[MAX N]> * PPID
<B[MAX N]> * PPBODY
>.
Notes:
3.3.15 S7F4 PROCESS PROGRAM ACKNOWLEDGE (PPA)

Usage: S,H->E
Descriptions: Host reply to equipment originated S7,F3. Used to acknowledge or reject process
program uploaded from the equipment
Notes:
3.3.16 S7F5 PROCESS PROGRAM REQUEST (PPR)

Descriptions: Used by the equipment to request an existing process program from the host.
Structure: <A[MAX N]>. * PPID
Notes:
3.3.17 S7F6 PROCESS PROGRAM DAT A (PPD)

Usage: S,H->E
Descriptions: Host reply to equipment-originated S7,F5. Used to download process programs from the
host to the equipment.
Structure: <L[2]
<A[MAX N]> * PPID
<B[MAX N]> * PPBODY
>.
Notes: A zero length list means request denied.
3.3.18 S9F1 UNRECOGNIZED DE VICE ID (UDN)

Usage: S,H<-E
Descriptions: Sent by the equipment when a message is received containing an unrecognized device
ID.
Structure: <B[10]>. * MHEAD
Notes: S9,F2 is not used.
3.3.19 S9F3 UNRECOGNIZED ST REAM TYPE (USN)

Usage: S,H<-E
Descriptions: Sent by the equipment when a message is received containing an unrecognized stream
number
3.3.20 S9F5 UNRECOGNIZED FUNCTION TYPE (USN)

Usage: S,H<-E
Descriptions: Sent by the equipment when a message is received containing an unrecognized function
number.
- 33 -
3.3.21 S9F7 ILLEG AL DAT A (IDN)
Usage: S,H<-E
Descriptions: Sent by the equipment when a message is received containing an invalid data format.
3.3.22 S9F9 TRANSACTION TIM ER TIMEOUT (TTN)

Usage: S,H<-E
Descriptions: Sent by the equipment when a transaction timer times out.
3.3.23 S9F11 DAT A TOO LONG (DLN)

Usage: S,H<-E
Descriptions: Sent by the equipment when the equipment receives more data than it can handle.
- 34 -
4. SEMI E30 GEM – STATE MODELS, CAPABILITIES AND
SCENARIOS
GEM is used as a reference model for any type of equipment. The GEM standard defines which SECS-II
messages should be used, in what situations, and what the resulting activity should be.
The GEM implementation on the equipment is in accordance with the SEMI E30 standard, as shown in the
following compliance statement table:
GEM COMPLIANCE STATEMENT
Fundamental GEM Requirements Implemented GEM Compliant
State Models YES NO YES NO
Equipment Processing States YES NO YES NO
Host Initiated S1F13/F14 Scenario YES NO YES NO
Event Notification YES NO YES NO
On-line Identification YES NO YES NO
Error Messages YES NO YES NO
Documentation YES NO YES NO
Control (Operator-initiated) YES NO YES NO
Additional Capabilities Implemented GEM Compliant
Establish Communications YES NO YES NO
Dynamic Event Report Configuration YES NO YES NO
Variable Data Collection YES NO YES NO
Trace Data Collection YES NO YES NO
Status Data Collection YES NO YES NO
Alarm Management YES NO YES NO
Remote Control YES NO YES NO
Equipment Constants YES NO YES NO
Process Program Management YES NO YES NO
Material Movement YES NO YES NO
Equipment Terminal Services YES NO YES NO
Clock YES NO YES NO
Limits Monitoring YES NO YES NO
Spooling YES NO YES NO
Control (Host-initiated) YES NO YES NO
Table 6 GEM Compliance Statement
The following sections describe the equipment in terms of GEM state models, GEM capabilities and
commonly used functionalities implemented by the Equipment.
- 35 -
4.1 COMMUNICATIONS
4.1.1 COMMUNICATIONS STATE MODEL

The equipment will support the GEM Communications State Model as described by the SEMI E30 standard
Figure 1 Communication State Model
- 36 -
4.1.2 COMMUNICATIONS STATE TRANSITIONS
# CURRENT STATE TRIGGER NEW STATE ACTION COMMENT
1 (Entry to System System Default None The system default set to r
COMMUNICATIONS) initialization ENABLED
4 (Entry to ENABLED) Any entry to NOT None May enter from system
ENABLED COMMUNI- initialization to ENABLED or
state CATING through operator switch to
ENABLED
5 (Entry to (Any entry to NOT WAIT CRA Initialize Begin the attempt to
EQUIPMENT- COMMUNI- communication. establish communications
INITIATED CATING) Set Comm-Delay
CONNECT) timer "expired."
Send S1,F13
6 WAIT CRA Connection WAIT DELAY Initialize Comm- Wait for timer to expire
transaction failure Delay timer
7 WAIT DELAY Comm-Delay timer WAIT CRA Send S1,F13 Wait for S1,F14. May
expired receive
S1,F13 from Host
8 WAIT DELAY Received a WAIT CRA Discard Indicates opportunity to
message other message. No establish communications
than S1,F13. reply. Set
Comm- Delay
timer "expired".
Send S1,F13
9 WAIT CRA Received expected COMMUNI- None Communications
S1,F14 with CATING established
COMMACK
=0
10 (Entry to HOST- (Any entry to NOT WAIT CR None Wait for S1,F13 from Host
INITIATED COMMUNI- FROM HOST
CONNECT) CATING)
11 WAIT CR FROM Received S1,F13 WAIT TX Send S1,F14 Host seeks to establish
HOST COMPLETE with communications
COMMACK = 0
12 WAIT TX COMPLETE S1,F14 WAIT CR None Wait for S1,F13 from Host
transmission failed FROM HOST
13 WAIT TX COMPLETE S1,F14 COMMUNIC- None Communications are
transmission ATING established
completed
successfully
14 COMMUNICATING Communication NOT Dequeue all Dequeued messages may
failure COMMUNIC- messages be placed in spool buffer as
ATING queued to send appropriate
Table 7 Communication State Transitions
- 37 -
4.1.3 HOST ATTEMPTS TO EST ABLISH COMMUNICATIONS
COMMENT HOST EQUIPMENT COMMENT
Communications state is
ENABLED (any substate).
Establish communications S1F13
request.
S1F14 Reply COMMACK = 0 and
communications state =
COMMUNICATING.
Table 8 Scenario: Host Attempts to Establish Communication
4.1.4 HOST INITIATED ARE Y OU THERE

Are You There Request S1F1
S1F2 On-Line data response
Table 9 Scenario: Host Initiated Are You There
4.1.5 EQUIPMENT INITIATED ARE YOU THE RE

S1F1 Are You There Request
On-Line data response S1F2
Table 10 Scenario: Equipment Initiated Are You There
- 38 -
4.2 CONTROL
4.2.1 CONTROL ST ATE MODEL

The equipment will support the GEM Control State Model as described by the SEMI E30 standard.
Figure 2 GEM Control State Model
- 39 -
4.2.2 CONTROL ST ATE TRANSITIONS
Entry into CONTROL
Equipment may be
CONTROL state (Substate
1 (Undefined) None configured to default to ON-
(system conditional on
LINE or OFF- LINE*.
initialization). configuration)
OFF-LINE
Entry into OFF- Equipment may be
(Substate
2 (Undefined) LINE None configured to default to any
conditional on
state substate of OFF-LINE
configuration.)
Note that an S1,F1 is sent
EQUIPMENTOFF- Operator actuates ATTEMPT ON-
3 None whenever ATTEMPT ON-
LINE ON- LINE switch LINE
LINE is activated
This may be due to a
communication failure,**
New state reply timeout, or receipt of
4 ATTEMPT ON-LINE S1,F0 conditional on None S1,F0. Configuration may
configuration be set to EQUIPMENT
OFF-LINE or HOST OFF-
LINE
Equipment
Host is notified of transition
receives expected
5 ATTEMPT ON-LINE ON-LINE None to
S1,F2 message
ON-LINE at transition 7.
from the host
"Equipment OFF-LINE"
Operator actuates EQUIPMENT event occurs***. Event
6 ON-LINE None
OFF- LINE switch OFF-LINE reply will be discarded while
OFF-LINE is active
ON-LINE
"Control State LOCAL" or
(Substate
"Control State REMOTE"
Entry to ON-LINE conditional on
7 (Undefined) None event occurs. Event
state REMOTE/
reported based on actual
LOCAL switch
ON-LINE substate activated
setting.)
Operator sets front
"Control State REMOTE"
8 LOCAL panel switch to REMOTE None
event occurs
REMOTE
Operator sets front
"Control State LOCAL"
9 REMOTE panel switch to LOCAL None
event occurs
LOCAL
Equipment accepts
"Set OFF-LINE" HOST OFF- "Equipment OFF-LINE"
10 ON-LINE None
message from host LINE event occurs
(S1,F15).
Equipment accepts
Host is notified to transition
host request to go
11 HOST OFF-LINE ON-LINE None to
ON-LINE
ON-LINE at transition 7
(S1,F17).
Operator actuates EQUIPMENT "Equipment OFF-LINE"
12 HOST OFF-LINE None
OFF- LINE switch OFF-LINE event occurs
Table 11 Control State Transitions
4.2.3 OPERATOR SETS ONLINE

Operator at Equipment Console set
control state to ONLINE
S6F11 Equipment sends Control State

ONLINE event
Acknowledge S6F12
Table 12 Scenario: Operator switches from OFFLINE to ONLINE
- 40 -
4.2.4 OPERATOR SETS OFFLIN E
control state to OFFLINE

OFFLINE event
Table 13 Scenario: Operator switches from ONLINE to OFFLINE
4.2.5 OPERATOR SETS REMOTE

REMOTE

REMOTE event
Table 14 Scenario: Operator switches from LOCAL to REMOTE
4.2.6 OPERATOR SETS LOCAL

LOCAL

LOCAL event
Table 15 Scenario: Operator switches from REMOTE to LOCAL
4.2.7 HOST REQUESTS OFFLIN E

Host request OFFLINE S1F15
S1F0 Equipment is OFFLINE
S1F16 Equipment is ONLINE, transition to
HOST-OFFLINE
 S6F11 Equipment sends Control State

OFFLINE event
Table 16 Scenario: Host requests Equipment to go OFFLINE
4.2.8 HOST REQUESTS ONLINE

Host request ONLINE S1F17
S1F18 Equipment is OFFLINE, transition
to ONLINE
 S6F11 Equipment sends Control State

ONLINE event
Table 17 Scenario: Host requests Equipment to go ONLINE
- 41 -
4.3 DATA COLLECTION
4.3.1 EVENT DAT A COLLECTIO N

LOCAL event
Table 18 Scenario: Collection Events occurs at Equipment
4.3.2 HOST REQUESTS COLLECTION EVENT REPORT

Host requests a collection event S6F15
report
S6F16 Equipment sends a collection event
report
Table 19 Scenario: Host requests Collection Event Report
4.3.3 COLLECTION REPORT SETUP

Send the report definitions S2F33
S2F34 DATAIDs, RPTIDs and VIDs
received by equipment.
Link Event to Report S2F35 CEIDs and RPTIDs received by

equipment
S2F36 Event Linkage accepted.

Acknowledge=0
Enable specific Collection S2F37

Events
Enable events accepted.
Acknowledge=0
Table 20 Scenario: Collection Report Setup
4.3.4 EQUIPMENT ST ATUS REPORT

Host requests report of selected S1F3
status variable values
S1F4 Equipment responds with the
requested status variable data.
Table 21 Scenario: Equipment Status Report
4.3.5 EQUIPMENT ST ATUS VAR IABLE NAM ELIST REPORT

Host requests Equipment S1F11
identify status variables
S1F12 Equipment responds with the
requested status variable
description.
Table 22 Scenario: Equipment Status Variable Namelist Report
- 42 -
4.3.6 TRACE DAT A COLLECTIO N
Trace data collection provides a method of sampling data on a period basis. The time-based approach to
data collection is useful in tracking trends or repeated applications within a time window, or monitoring of
continuous data.
The following table describes the SECS data items required for setting up the Trace Data Collection
TRACE DATA COLLECTION DATA ITEM
Data Item Data Item Type
TRID Trace Request ID. An identifier associated with a trace request definition
DSPER Data sample period. hhmmss format, where:
hh: 00-23
mm: 00-59
ss: 00-59.
e.g.:
013010. (1h+30mins+10secs)
000000 (Invalid)
TOTSMP Total Sample to be taken during a complete trace period
REPGSZ Reporting group size. Minimum value is 1
SMPLN Sample number. The last sample number of the trace collection
STIME Sample timestamp.
Table 23 Trace Data Collection Data Items

Trace Data Collection S2F23
Initialization requested
S2F24 Acknowledge. Trace initiated.
S6F1 Sending sample

Acknowledge S6F2
Table 24 Scenario: Host initiates Trace Report
▪ Equipment will send the trace data with S6F1 according to data sample period (DSPER) times
reporting group size (REPGSZ).
▪ When REPGSZ > 1, the sample taken will be appended to the existing sample data to be sent when
it reaches the reporting group size and the SMPLN will be the last sample contained in this S6F1.
▪ If TRID in S2F23 matches TRID of an existing trace, the existing trace operation is canceled and
replaced by the new one
▪ If TRID in S2F23 matches TRID of an existing trace and TOTSMP=0, the existing trace operation will
be terminated.
▪ The Equipment is capable to handle at least 4 concurrent traces
- 43 -
4.4 ALARMS
4.4.1 ENABLE/DISABLE ALARM S

Enable/Disable Alarm S5F3
S5F4 Equipment acknowledges

Table 25 Scenario: Enable/Disable Alarm
4.4.2 ALARM DETECTED BY EQ UIPMENT

S5F1 Send Alarm Report if alarm is
enabled.
Acknowledge S5F2
Table 26 Scenario: Alarm Detected by Equipment
4.4.3 REQUEST ALARM INFORM ATION

Request Alarm data/text S5F5
S5F6 Send Alarm data/text

Table 27 Scenario: Requests Alarm Information
4.4.4 REQUEST LIST OF ENAB LED ALARM S

Request equipment to send list S5F7
of enabled alarms
S5F8 Send enabled Alarm data/text
Table 28 Scenario: Requests List of Enabled Alarms
4.5 REMOTE CONTROL
4.5.1 HOST SENDS REMOTE CO MM AND

Send Equipment remote S2F21
command
S2F22 Equipment Acknowledges
Table 29 Scenario: Host Sends Remote Command
4.5.2 HOST SENDS HOST COMM AND

Host Command Send S2F41
S2F42 Host Command Acknowledge.

Table 30 Scenario: Host Sends Host Command
4.6 EQUIPMENT CONSTANTS
4.6.1 HOST SENDS EQUIPMENT CONSTANTS

Host update equipment S2F15
constants
S2F16 Equipment sets constants
Table 31 Scenario: Host Sends Equipment Constants
- 44 -
4.6.2 HOST EQUIPMENT CONST ANTS REQUEST
Host constants request S2F13
S2F14 Equipment constant data

Table 32 Scenario: Host Equipment Constants Request
4.6.3 HOST EQUIPMENT CONST ANTS NAM ELIST REQUEST

Host constants namelist request S2F29
S2F30 Equipment constant namelist
Table 33 Scenario: Host Equipment Constants Request
4.7 PROCESS PROGRAM

The Equipment supports Uploads and Downloads only of unformatted process programs.
4.7.1 PROCESS PROGRAM DELETION BY HOST

Delete Process Program Send S7F17
S7F18 Delete Process Program

Acknowledge
Table 34 Scenario: Process Program Deletion by Host
4.7.2 HOST INITIATED PROCE SS PROGRAM UPLO AD (UNFORM ATTED)

Process Program Request S7F5
S7F6* Process Program Data

Table 35 Scenario: Host Initiated Process Program Upload (Unformatted)
* If the process program does not exists, a zero length list will be sent.
4.7.3 EQUIPMENT INITIATED PROCESS PROGRAM UPLO AD (UNFORMATTED)

S7F3 Process Program Send
Process Program Acknowledge S7F4

Table 36 Scenario: Equipment Initiated Process Program Upload (Unformatted)
4.7.4 HOST INITIATED PROCE SS PROGRAM DOWNLO AD (UNFORM ATTED)

Process Program Send S7F3
S7F4 Process Program Acknowledge

Table 37 Scenario: Host Initiated Process Program Download (Unformatted)
4.7.5 EQUIPMENT INITIATED PROCESS PROGRAM DOWNLO AD (UNFORM ATTED)

S7F5 Process Program Request
Process Program Send S7F6

Table 38 Scenario: Equipment Initiated Process Program Download (Unformatted)
- 45 -
4.8 TERMINAL SERVICES
The Equipment terminal services will allow for the Host to display information or messages on the
equipment’s display devices/console.
4.8.1 HOST SENDS INFORMATION TO EQUIPM ENT’S DISPLAY DEVICE

Host sends textual S10F3
information to equipment for
display to operator at
terminal x
S10F4 Equipment acknowledges request
to display text
Table 39 Scenario: Host Sends Information to Equipment’s Display Device
4.9 ERROR MESSAGES

The equipment supports Stream 9 messages as required by the SEMI E30 standard.
4.9.1 MESSAGE FAULT DUE TO UNRECOGNIZED DEVICE ID

Host sends a message with SxFy
a device ID not recognized
by the equipment
S9F1 Equipment reports to the host that
an unrecognized device ID was
received.
Table 40 Scenario: Message Fault due to Unrecognized Device ID
4.9.2 MESSAGE FAULT DUE TO UNRECOGNIZED STREAM TYPE

Host sends a message SxFy
containing a stream type not
recognized by the equipment
an unrecognized stream type was
received.
Table 41 Scenario: Message Fault due to Unrecognized Function Type
4.9.3 MESSAGE FAULT DUE TO UNRECOGNIZED STREAM TYPE

Host sends a message SxFy
containing a function type
not recognized by the
equipment
an unrecognized function type was
received.
4.9.4 MESSAGE FAULT DUE TO ILLEG AL DAT A FORM AT

Host sends an incorrectly SxFy
formatted message to the
equipment
S9F7 Equipment reports to the host that a
message was received containing
an illegal data format.
- 46 -
4.9.5 MESSAGE FAULT DUE TO TRANSACTION TIMER T IMEOUT
SxFy Equipment sends a primary
message requiring a reply to the
host. Reply is not receive within
the configured period;
transaction timer timeout
occurs.
S9F7 Equipment reports a transaction

timer timeout.
Table 44 Scenario: Message Fault due to Transaction Timer Timeout.
4.10 CLOCK
The clock services allow the host to obtain the time of day from the equipment, and they permit the host to
set the time. There is also a message for the equipment to request that the host set the time in the
equipment
The clock is a status variable containing the current value of time at the equipment. This status variable will
be constantly updated by the equipment internally.
The clock support format: yyyymmddhhmmsscc
4.10.1 HOST REQUESTS EQUIPM ENT’S CURRENT TIME

Host requests Equipment S2F17
Time
S2F18 Equipment returns its internal
time reference value to the host
Table 45 Scenario: Host requests Equipment’s Current Time
4.10.2 HOST INSTRUCTS EQUIPMENT TO SET TIME

Host instructs equipment to S2F31
set time
S2F32 Equipment sets its internal time
reference to the value of TIME
received from the host and
acknowledges completion
Table 46 Scenario: Host Instructs Equipment to Set Time
- 47 -
4.11 SPOOLING
The equipment will support the GEM Spool State Model as described by the SEMI E30 standard.
4.11.1 SPOOLING ST ATE MODEL
Figure 3 GEM Spooling State Model
4.11.2 SPOOLING ST ATE TRANS ITIONS

1 SPOOL Communicati SPOOL ACTIVE SpoolCountActual The default state in
INACTIVE on failure and each OR
detected SpoolCountTotal substate is entered.
are initialized to The
zero. Any open message which
transactions with the could not be sent
host are aborted. remains in the
SpoolStartTime (SV) send queue and is
is set to current dealt within Spool
time. Alert Active state. The
the operator that collection event
spooling is active Spooling Activated
has occurred
2 SPOOL NOT Message SPOOL FULL SpoolFullTime The message
FULL generate which (SV) is set to which would not fit
will not fit into current time. Alert into the spooling
spool area the operator that area is dealt with
spool is full after the
transition. No
collection event is
generated
- 48 -
3 SPOOLOUTPUT Spool area emptied SPOOL Spooling process The collection
INACTIVE disabled. Alert the event Spooling
operator that Deactivated has
spooling has been occurred.
terminated Transition from
the OR substate
Spool Load
component
occurs
4 NO S6,F23 PURGE SPOOL No action Initiates
SPOOLOUTPUT received purging
w/RSDC=1 process. No
collection
event is
generated
since this is
based on host
request
5 NO S6,F23 received TRANSMIT No action Initiates message
SPOOLOUTPUT w/ RSCD=0 SPOOL transmission from
spool. No
collection event is
generated since
this is based on
host request
6 TRANSMITSPO Comm. failure NO SPOOL Spool transmission If communications
OL or MaxSpool OUTPUT process failure, the event
Transmit suspended Spool Transmit
reached Failure has
occurred. No
collection event
generated for
MaxSpoolTransmi
t reached
7 POWER ON Equipment power POWER OFF No action Spooling context
source has been
discontinued maintained in non-
volatile storage
prior to this
transition
8 POWEROFF Equipment POWER ON Spooling context If spooling were
power source restored from active prior to
restored non-volatile power down, it
memory shall continue. If
TRANSMIT
SPOOL were
active at power
down, transition
#6 is expected to
follow since
communications
state is initially
NOT
COMMUNICATIN
G
Table 47 Spool State Transitions
- 49 -
4.11.3 HOST DEFINES SET OF MESSAGES TO BE SPOOL ED
Host defines messages to be S2F43
spooled in case of
communications failure.
S2F44 Equipment acknowledges setup

Table 48 Scenario: Host Defines Set of Messages to be spooled
4.11.4 HOST DEFINES NUMBER OF MESSAGES TO SEND IN RESPONSE TO S6F23

Host sends value for S2F15
equipment constant
MaxSpoolTransmit.
S2F16 Equipment acknowledges

equipment constant change
Table 49 Scenario: Host Defines Set of Messages to be spooled
4.11.5 REQUEST AND DELETE S POOLED DAT A

Host Requests data that S1F3
includes spool related status
variables.
S1F4 Send Status data
If MaxSpoolTransmit not 0, S6F23
request spooled data.
S6F24 Request/delete spooled data
acknowledgement
Table 50 Scenario: Request and Delete Spooled Data
- 50 -
5. SUPPORTED COMMANDS, VARIABLES, EVENTS AND ALARMS
This section describes all the host/remote commands, variables, collection events and alarms support by the
Equipment.
5.1 REMOTE AND HOST COMMANDS

The Host and Remote Command message contains an item called RCMD, which is an ASCII string
identifying the command to execute. GEM also specifies that each RCMD may have from zero or more
Command Parameters and Command Values associated with an RCMD. Each command parameter
consists of a CPNAME and associated CPVAL.
Format of RCMD is a string of ASCII characters. See the data dictionary for the format of CPVAL and
CPNAME.
5.1.1 START
This is a Host Command (S2F41) to start equipment operation. This has the same function as machine
START button.
5.1.2 STOP
This is a Host Command (S2F41) to stop equipment operation. This has the same function as machine
STOP button.
5.1.3 TTERM
This is a Host Command (S2F41) to temporary terminate equipment operation. This is the same as
[Operation] > [LD tray termination] > [Temporarily performed termination function].
PARAMETER NAME PARAMETER TYPE DESCRIPTION

(CPNAME)
MODE U2 0 = One tray Termination
1 = Immediately Termination
Table 51 TTERM Command Parameter
5.1.4 TEST-MODE
This is a Host Command (S2F41) to specify test mode before lot start.

(CPNAME)
MODE U2 0 = Normal test
1 = Re-test
2 = Final test
Table 52 TEST-MODE Command Parameter
5.1.5 PP-SELECT
This is a Host Command (S2F41) to load specified setup file that is currently stored in equipment. This
command can only be sent when lot is not started.

(CPNAME)
PPID ASCII Setup file filename
Table 53 PP-SELECT Command Parameter
- 51 -
5.2 VARIABLES DICTIONARY
5.2.1 STATUS VARIABLES

SVID TYPE LOGICAL NAME DESCRIPTION DETAILS
1 List AlarmsEnabled List of enabled alarms. All
alarms are enabled by
default when equipment
startup.
2 List AlarmsSet List of currently set alarm.
3 Ascii Clock
4 U4 ControlState 0 = Unknown
1 = Equipment Offline
2 = Attempt Online
3 = Host Offline
4 = Online Local
5 = Online Remote
5 List EventsEnabled
6 Ascii PPExecName
7 U1 PreviousProcessState 0 = Unknown
1 = Ready
2 = Updating setting
3 = Operating
4 = Operator call
5 = Alarm
8 U1 ProcessState 0 = Unknown
1 = Ready
2 = Updating setting
3 = Operating
4 = Operator call
5 = Alarm
9 U4 SpoolCountActual
10 U4 SpoolCountTotal
11 Ascii SpoolFullTime
12 Ascii SpoolStartTime
13 U4 SpoolState 1 = Active, 2 = Inactive
14 U4 SpoolSubstate 1 = Spool Load Not Full
2 = Spool Load Full
3 = Spool Unload No Output
4 = Spool Unload Output Transmit
5 = Spool Unload Output Purge
1000 Ascii LogonUser
1001 Bool RunCheck_Enable
1002 U4 RunCheck_Timeout
1003 Bool RunCheck_TimeoutResume True = Resume running on timeout.
False = Abort run with error message.
Table 54 Status Variables Supported by Equipment
Note: Above table shows the basic status variables only. For a complete list of status variables, please refer
to attached SVID spreadsheet.
5.2.2 EQUIPMENT CONSTANTS

ECID TYPE LOGICAL NAME DESCRIPTION DEFAULT
2000 U2 EstablishCommunicationsTimeout
2001 U4 MaxSpoolTransmit
2003 Bool OverWriteSpool
2005 U4 MaxSpoolCapacity 200
2006 Bool SpoolEnabled False
2007 U1 TimeFormat
20915 U4 PackageData_ContactorChMask_7 Contactor Ch mask - Contactor F
(16ch)
20925 U4 PackageData_ContactorChMask_17 Contactor Ch mask - Contactor B
(16ch)
Table 55 Equipment Constants Supported by Equipment
- 52 -
5.2.3 DAT A VARIABLES
DVID TYPE LOGICAL NAME DESCRIPTION
3001 U4 EventLimit
3002 U4 LimitVariable
3003 Ascii PPChangeName
3004 U2 PPChangeStatus
3005 Binary TransitionType
3006 U4 AlarmID
3007 U4 ECChangedID
Table 56 Data Variables Supported by Equipment
5.3 EVENT LIST
5.3.1 COLLECTION EVENTS

CEID NAME DEFAULT RPID
1 EquipmentOFFLINE 1
2 ControlStateLOCAL 1
3 ControlStateREMOTE 1
4 ProcessingStarted 2
5 ProcessingCompleted 2
6 ProcessingStopped 2
7 ProcessingStateChanged 4
8 EquipmentConstantChanged 5
9 ProcessProgramChanged 6
10 ProcessProgramSelected 7
11 SpoolingActivated
12 SpoolingDeactivated
13 SpoolingFailed
20 StartPressed
21 StopPressed
22 ResetPressed
23 TermPressed
24 DoorlockOverridePressed
30 SoakStarted 8
31 SoakEnded 8
32 TesterConnectionChanged 9
33 LogonUserChanged 10
34 DUTNumberChanged
35 TempUpdated 11
36 StartREMOTE
37 StartLOCAL
Table 57 Collection Events supported by Equipment
- 53 -
5.3.2 REPORT DEFINITION
RPTID NAME FORMAT
1 ControlReport SVID:3 (Clock)
SVID:4 (ControlState)
2 ProcessingReport SVID:3 (Clock)
SVID:7 (PreviousProcessState)
4 ProcessingStateChangedReport SVID:3 (Clock)
SVID:7 (PreviousProcessState)
SVID:8 (ProcessState)
5 ECChangedReport DVID:3007 (ECChangedID)
6 PPChangedReport DVID:3003 (PPChangeName)
DVID:3004 (PPChangeStatus)
7 PPSelectedReport SVID:6 (PPExecName)
8 SoakReport SVID:3 (Clock)
SVID:10028 (SoakTime_0)
9 TesterConnectionReport SVID:3 (Clock)
SVID:10056 (OnlineOffline)
10 LogonUserReport SVID:3 (Clock)
SVID:1000 (LogonUser)
11 TemperatureReport SVID:3 (Clock)
SVID:10006 (PresentTemp_0)
Table 58 Report definitions created by Equipment after startup
- 54 -
5.4 ALARM REPORTS
The Alarms and associated Alarm IDs (ALID) supported by the equipment are described in this section.
ALTX
ALID
Code Message
0 000000 Press RESET switch.
1 000001 Power ON
2 000002 Logon Request
3 000003 Wait for update
4 000004 Setup Error
5 000005 Mcc Communication Error
6 000006 Mpc Trouble
7 000007 Initialization Request
8 000008 Initializing
9 000009 Selective Initializing
10 00000A Waits for Selective initialize
11 00000B Ready to Start (Normal-test)
12 00000C Ready to Start (Re-test)
13 00000D Ready to Start (Final-test)
14 00000E Conditioning : Room temp.
15 00000F Conditioning : High temp.
16 000010 Operating (Normal-test)
17 000011 Operating (Re-test)
18 000012 Operating (Final-test)
19 000013 Conditioning : Room temp.(Auto-start)
20 000014 Conditioning : High temp.(Auto-start)
21 000015 Auto-terminated
22 000016 Terminated
23 000017 Terminated of Contactor
24 000018 In Emergency Stop
25 000019 In Pause
26 00001A Interlock Released
27 00001B During Maintenance
28 00001C Motor Free
29 00001D Door Unlocked
30 00001E Door open : Front side door
31 00001F Door open : Back side door
32 000020 Door open : Right side door
33 000021 Door open : Left side door
34 000101 Communication Error : Handy Terminal
35 000102 Communication Time-out : Handy Terminal
36 000103 Pressure Error : Compressed Air
37 000104 Pressure Error : Vacuum Air
38 000105 Pressure Error : Contact Balance Air
39 000106 Cooling Fan Trouble : Transfer Z-axis motor driver cooling
40 000107 Cooling Fan Trouble : 空ｷ
- 55 -
ALTX
ALID
Code Message
43 00010A Cooling Fan Trouble : 空ｷ
44 00010B Ionizer Trouble : Socket
45 00010C Ionizer Trouble : Loader area
46 00010D Ionizer Trouble : Shuttle LD
47 00010E Ionizer Trouble : Shuttle UL
48 00010F Ionizer Trouble : Unloader area
49 000110 Ionizer Trouble : Preheat area
50 000111 Ionizer Trouble : Unloader back side area
51 000112 Ionizer Trouble : Contact
52 000113 Ionizer Trouble : 空ｷ
53 000114 Ionizer Trouble : Compressed Air Pressure
54 000201 Input of a password required to clear JAM
55 000202 JAM clear need to cover open : Front side
56 000203 JAM clear need to cover open : Back side
57 000204 JAM clear need to cover open : Right side
58 000205 JAM clear need to cover open : Left side
59 000300 Setup motor control system
60 010001 Return to origin : LD Stacker
61 010002 Initialize not completed : LD Stacker
62 010101 Position Error : LD Stacker
63 010102 Position Error : LD Stacker : Tray pusher
64 010301 Transfer Error : LD Stacker : Forward
65 010302 Transfer Error : LD Stacker : Retreat
66 010303 Cylinder Motion Error : LD Stacker : Lower limit
67 010304 Cylinder Motion Error : LD Stacker : Middle level
68 010305 Cylinder Motion Error : LD Stacker : Upper limit
69 010306 Cylinder Motion Error : LD Stacker : Tray pusher
70 010801 No Tray : LD Tray
71 010901 Remain Tray : LD front side
72 010902 Remain Tray : LD Tray
73 010A01 Tray JAM : LD Stacker
74 011001 Add trays : LD Stacker
75 020001 Return to origin : LD Transfer
76 020002 Initialize not completed : LD Transfer
77 020101 Position Error : LD Transfer : X
78 020102 Position Error : LD Transfer : Y
79 020103 Position Error : LD Transfer : Z
80 020104 Position Error : LD Transfer : X-P
81 020105 Position Error : LD Transfer : Y-P
82 020106 Position Error : LD Transfer : A
83 020107 Position Error : LD Transfer : B
84 020108 Position Error : LD Transfer : C
85 020109 Position Error : LD Transfer : D
86 02010A Position Error : LD Transfer : E
87 02010B Position Error : LD Transfer : F
88 02010C Position Error : LD Transfer : G
- 56 -
ALTX
ALID
Code Message
89 02010D Position Error : LD Transfer : H
90 020201 Motor trouble : LD Transfer : X
91 020202 Motor trouble : LD Transfer : Y
92 020203 Motor trouble : LD Transfer : Z
93 020204 Motor trouble : LD Transfer : X-P
94 020205 Motor trouble : LD Transfer : Y-P
95 020301 Motor trouble : LD Transfer : A
96 020302 Motor trouble : LD Transfer : B
97 020303 Motor trouble : LD Transfer : C
98 020304 Motor trouble : LD Transfer : D
99 020305 Motor trouble : LD Transfer : E
100 020306 Motor trouble : LD Transfer : F
101 020307 Motor trouble : LD Transfer : G
102 020308 Motor trouble : LD Transfer : H
103 020401 Pickup Error : LD Transfer : A ( LD tray )
104 020402 Pickup Error : LD Transfer : B ( LD tray )
105 020403 Pickup Error : LD Transfer : C ( LD tray )
106 020404 Pickup Error : LD Transfer : D ( LD tray )
107 020405 Pickup Error : LD Transfer : E ( LD tray )
108 020406 Pickup Error : LD Transfer : F ( LD tray )
109 020407 Pickup Error : LD Transfer : G ( LD tray )
110 020408 Pickup Error : LD Transfer : H ( LD tray )
111 020409 Pickup Error : LD Transfer : A
112 02040A Pickup Error : LD Transfer : B
113 02040B Pickup Error : LD Transfer : C
114 02040C Pickup Error : LD Transfer : D
115 02040D Pickup Error : LD Transfer : E
116 02040E Pickup Error : LD Transfer : F
117 02040F Pickup Error : LD Transfer : G
118 020410 Pickup Error : LD Transfer : H
119 020501 Transfer Error : LD Transfer : A
120 020502 Transfer Error : LD Transfer : B
121 020503 Transfer Error : LD Transfer : C
122 020504 Transfer Error : LD Transfer : D
123 020505 Transfer Error : LD Transfer : E
124 020506 Transfer Error : LD Transfer : F
125 020507 Transfer Error : LD Transfer : G
126 020508 Transfer Error : LD Transfer : H
127 020601 Pickup Sensor Trouble : LD Transfer : A
128 020602 Pickup Sensor Trouble : LD Transfer : B
129 020603 Pickup Sensor Trouble : LD Transfer : C
130 020604 Pickup Sensor Trouble : LD Transfer : D
131 020605 Pickup Sensor Trouble : LD Transfer : E
132 020606 Pickup Sensor Trouble : LD Transfer : F
133 020607 Pickup Sensor Trouble : LD Transfer : G
134 020608 Pickup Sensor Trouble : LD Transfer : H
- 57 -
ALTX
ALID
Code Message
135 020801 Confirm remaining IC : LD Transfer
136 020F01 Unstable pickup : LD Transfer : A
137 020F02 Unstable pickup : LD Transfer : B
138 020F03 Unstable pickup : LD Transfer : C
139 020F04 Unstable pickup : LD Transfer : D
140 020F05 Unstable pickup : LD Transfer : E
141 020F06 Unstable pickup : LD Transfer : F
142 020F07 Unstable pickup : LD Transfer : G
143 020F08 Unstable pickup : LD Transfer : H
144 030001 Return to origin : Shuttle F
145 030002 Initialize not completed : Shuttle F
146 030101 Position Error : Shuttle F
147 030201 Motor trouble : Shuttle F
148 030701 IC Mis-set : Shuttle F-LD : L2 (BS31)
150 030703 IC Mis-set : Shuttle F-LD : R1 (BS33)
152 030705 IC Mis-set : Shuttle F-UL : L2 (BS47)
153 030706 IC Mis-set : Shuttle F-UL : L1 (BS48)
154 030707 IC Mis-set : Shuttle F-UL : R1 (BS49)
155 030708 IC Mis-set : Shuttle F-UL : R2 (BS50)
156 030709 IC Mis-set : Shuttle F-LD : F (BS35)
157 03070A IC Mis-set : Shuttle F-LD : C (BS36)
158 03070B IC Mis-set : Shuttle F-LD : B (BS37)
159 03070C IC Mis-set : Shuttle F-UL : F (BS51)
160 03070D IC Mis-set : Shuttle F-UL : C (BS52)
161 03070E IC Mis-set : Shuttle F-UL : B (BS53)
162 03070F IC Detection Error : Shuttle F : IN (BS30)
163 030710 IC Upper detection Error : Shuttle F : OUT (BS46)
164 030B01 IC Mis-set : Shuttle F-LD : A
165 030B02 IC Mis-set : Shuttle F-LD : B
166 030B03 IC Mis-set : Shuttle F-LD : C
167 030B04 IC Mis-set : Shuttle F-LD : D
168 030B05 IC Mis-set : Shuttle F-LD : E
169 030B06 IC Mis-set : Shuttle F-LD : F
170 030B07 IC Mis-set : Shuttle F-LD : G
171 030B08 IC Mis-set : Shuttle F-LD : H
172 030B09 IC Mis-set : Shuttle F-LD : I
173 030B0A IC Mis-set : Shuttle F-LD : J
174 030B0B IC Mis-set : Shuttle F-LD : K
175 030B0C IC Mis-set : Shuttle F-LD : L
176 030B0D IC Mis-set : Shuttle F-LD : M
177 030B0E IC Mis-set : Shuttle F-LD : N
178 030B0F IC Mis-set : Shuttle F-LD : O
179 030B10 IC Mis-set : Shuttle F-LD : P
180 030B11 IC Mis-set : Shuttle F-UL : A
- 58 -
ALTX
ALID
Code Message
181 030B12 IC Mis-set : Shuttle F-UL : B
182 030B13 IC Mis-set : Shuttle F-UL : C
183 030B14 IC Mis-set : Shuttle F-UL : D
184 030B15 IC Mis-set : Shuttle F-UL : E
185 030B16 IC Mis-set : Shuttle F-UL : F
186 030B17 IC Mis-set : Shuttle F-UL : G
187 030B18 IC Mis-set : Shuttle F-UL : H
188 030B19 IC Mis-set : Shuttle F-UL : I
189 030B1A IC Mis-set : Shuttle F-UL : J
190 030B1B IC Mis-set : Shuttle F-UL : K
191 030B1C IC Mis-set : Shuttle F-UL : L
192 030B1D IC Mis-set : Shuttle F-UL : M
193 030B1E IC Mis-set : Shuttle F-UL : N
194 030B1F IC Mis-set : Shuttle F-UL : O
195 030B20 IC Mis-set : Shuttle F-UL : P
196 030C01 IC Remain : Shuttle F-LD : A
197 030C02 IC Remain : Shuttle F-LD : B
198 030C03 IC Remain : Shuttle F-LD : C
199 030C04 IC Remain : Shuttle F-LD : D
200 030C05 IC Remain : Shuttle F-LD : E
201 030C06 IC Remain : Shuttle F-LD : F
202 030C07 IC Remain : Shuttle F-LD : G
203 030C08 IC Remain : Shuttle F-LD : H
204 030C09 IC Remain : Shuttle F-LD : I
205 030C0A IC Remain : Shuttle F-LD : J
206 030C0B IC Remain : Shuttle F-LD : K
207 030C0C IC Remain : Shuttle F-LD : L
208 030C0D IC Remain : Shuttle F-LD : M
209 030C0E IC Remain : Shuttle F-LD : N
210 030C0F IC Remain : Shuttle F-LD : O
211 030C10 IC Remain : Shuttle F-LD : P
212 030C11 IC Remain : Shuttle F-UL : A
213 030C12 IC Remain : Shuttle F-UL : B
214 030C13 IC Remain : Shuttle F-UL : C
215 030C14 IC Remain : Shuttle F-UL : D
216 030C15 IC Remain : Shuttle F-UL : E
217 030C16 IC Remain : Shuttle F-UL : F
218 030C17 IC Remain : Shuttle F-UL : G
219 030C18 IC Remain : Shuttle F-UL : H
220 030C19 IC Remain : Shuttle F-UL : I
221 030C1A IC Remain : Shuttle F-UL : J
222 030C1B IC Remain : Shuttle F-UL : K
223 030C1C IC Remain : Shuttle F-UL : L
224 030C1D IC Remain : Shuttle F-UL : M
225 030C1E IC Remain : Shuttle F-UL : N
226 030C1F IC Remain : Shuttle F-UL : O
- 59 -
ALTX
ALID
Code Message
227 030C20 IC Remain : Shuttle F-UL : P
228 040001 Return to origin : Shuttle B
229 040002 Initialize not completed : Shuttle B
230 040101 Position Error : Shuttle B
231 040201 Motor trouble : Shuttle B
232 040701 IC Mis-set : Shuttle B-LD : L2 (BS39)
234 040703 IC Mis-set : Shuttle B-LD : R1 (BS41)
236 040705 IC Mis-set : Shuttle B-UL : L2 (BS55)
237 040706 IC Mis-set : Shuttle B-UL : L1 (BS56)
238 040707 IC Mis-set : Shuttle B-UL : R1 (BS57)
239 040708 IC Mis-set : Shuttle B-UL : R2 (BS58)
240 040709 IC Mis-set : Shuttle B-LD : F (BS43)
241 04070A IC Mis-set : Shuttle B-LD : C (BS44)
242 04070B IC Mis-set : Shuttle B-LD : B (BS45)
243 04070C IC Mis-set : Shuttle B-UL : F (BS59)
244 04070D IC Mis-set : Shuttle B-UL : C (BS60)
245 04070E IC Mis-set : Shuttle B-UL : B (BS61)
246 04070F IC Detection Error : Shuttle B : IN (BS38)
247 040710 IC Upper detection Error : Shuttle B : OUT (BS54)
248 040B01 IC Mis-set : Shuttle B-LD : A
249 040B02 IC Mis-set : Shuttle B-LD : B
250 040B03 IC Mis-set : Shuttle B-LD : C
251 040B04 IC Mis-set : Shuttle B-LD : D
252 040B05 IC Mis-set : Shuttle B-LD : E
253 040B06 IC Mis-set : Shuttle B-LD : F
254 040B07 IC Mis-set : Shuttle B-LD : G
255 040B08 IC Mis-set : Shuttle B-LD : H
256 040B09 IC Mis-set : Shuttle B-LD : I
257 040B0A IC Mis-set : Shuttle B-LD : J
258 040B0B IC Mis-set : Shuttle B-LD : K
259 040B0C IC Mis-set : Shuttle B-LD : L
260 040B0D IC Mis-set : Shuttle B-LD : M
261 040B0E IC Mis-set : Shuttle B-LD : N
262 040B0F IC Mis-set : Shuttle B-LD : O
263 040B10 IC Mis-set : Shuttle B-LD : P
264 040B11 IC Mis-set : Shuttle B-UL : A
265 040B12 IC Mis-set : Shuttle B-UL : B
266 040B13 IC Mis-set : Shuttle B-UL : C
267 040B14 IC Mis-set : Shuttle B-UL : D
268 040B15 IC Mis-set : Shuttle B-UL : E
269 040B16 IC Mis-set : Shuttle B-UL : F
270 040B17 IC Mis-set : Shuttle B-UL : G
271 040B18 IC Mis-set : Shuttle B-UL : H
272 040B19 IC Mis-set : Shuttle B-UL : I
- 60 -
ALTX
ALID
Code Message
273 040B1A IC Mis-set : Shuttle B-UL : J
274 040B1B IC Mis-set : Shuttle B-UL : K
275 040B1C IC Mis-set : Shuttle B-UL : L
276 040B1D IC Mis-set : Shuttle B-UL : M
277 040B1E IC Mis-set : Shuttle B-UL : N
278 040B1F IC Mis-set : Shuttle B-UL : O
279 040B20 IC Mis-set : Shuttle B-UL : P
280 040C01 IC Remain : Shuttle B-LD : A
281 040C02 IC Remain : Shuttle B-LD : B
282 040C03 IC Remain : Shuttle B-LD : C
283 040C04 IC Remain : Shuttle B-LD : D
284 040C05 IC Remain : Shuttle B-LD : E
285 040C06 IC Remain : Shuttle B-LD : F
286 040C07 IC Remain : Shuttle B-LD : G
287 040C08 IC Remain : Shuttle B-LD : H
288 040C09 IC Remain : Shuttle B-LD : I
289 040C0A IC Remain : Shuttle B-LD : J
290 040C0B IC Remain : Shuttle B-LD : K
291 040C0C IC Remain : Shuttle B-LD : L
292 040C0D IC Remain : Shuttle B-LD : M
293 040C0E IC Remain : Shuttle B-LD : N
294 040C0F IC Remain : Shuttle B-LD : O
295 040C10 IC Remain : Shuttle B-LD : P
296 040C11 IC Remain : Shuttle B-UL : A
297 040C12 IC Remain : Shuttle B-UL : B
298 040C13 IC Remain : Shuttle B-UL : C
299 040C14 IC Remain : Shuttle B-UL : D
300 040C15 IC Remain : Shuttle B-UL : E
301 040C16 IC Remain : Shuttle B-UL : F
302 040C17 IC Remain : Shuttle B-UL : G
303 040C18 IC Remain : Shuttle B-UL : H
304 040C19 IC Remain : Shuttle B-UL : I
305 040C1A IC Remain : Shuttle B-UL : J
306 040C1B IC Remain : Shuttle B-UL : K
307 040C1C IC Remain : Shuttle B-UL : L
308 040C1D IC Remain : Shuttle B-UL : M
309 040C1E IC Remain : Shuttle B-UL : N
310 040C1F IC Remain : Shuttle B-UL : O
311 040C20 IC Remain : Shuttle B-UL : P
312 050001 Return to origin : Contactor : F-Y
313 050002 Initialize not completed : Contactor : F-Y
314 050101 Position Error : Contactor : F-Y
315 050201 Motor trouble : Contactor : F-Y
316 060001 Return to origin : Contactor : F-Z
317 060002 Initialize not completed : Contactor : F-Z
318 060101 Position Error : Contactor : F-Z
- 61 -
ALTX
ALID
Code Message
319 060201 Motor trouble : Contactor : F-Z
320 060401 Pickup Error : Contactor F : A (Shuttle)
321 060402 Pickup Error : Contactor F : B (Shuttle)
322 060403 Pickup Error : Contactor F : C (Shuttle)
323 060404 Pickup Error : Contactor F : D (Shuttle)
324 060405 Pickup Error : Contactor F : E (Shuttle)
325 060406 Pickup Error : Contactor F : F (Shuttle)
326 060407 Pickup Error : Contactor F : G (Shuttle)
327 060408 Pickup Error : Contactor F : H (Shuttle)
328 060409 Pickup Error : Contactor F : I (Shuttle)
329 06040A Pickup Error : Contactor F : J (Shuttle)
330 06040B Pickup Error : Contactor F : K (Shuttle)
331 06040C Pickup Error : Contactor F : L (Shuttle)
332 06040D Pickup Error : Contactor F : M (Shuttle)
333 06040E Pickup Error : Contactor F : N (Shuttle)
334 06040F Pickup Error : Contactor F : O (Shuttle)
335 060410 Pickup Error : Contactor F : P (Shuttle)
336 060501 Transfer Error : Contactor F : A (Shuttle>>)
337 060502 Transfer Error : Contactor F : B (Shuttle>>)
338 060503 Transfer Error : Contactor F : C (Shuttle>>)
339 060504 Transfer Error : Contactor F : D (Shuttle>>)
340 060505 Transfer Error : Contactor F : E (Shuttle>>)
341 060506 Transfer Error : Contactor F : F (Shuttle>>)
342 060507 Transfer Error : Contactor F : G (Shuttle>>)
343 060508 Transfer Error : Contactor F : H (Shuttle>>)
344 060509 Transfer Error : Contactor F : I (Shuttle>>)
345 06050A Transfer Error : Contactor F : J (Shuttle>>)
346 06050B Transfer Error : Contactor F : K (Shuttle>>)
347 06050C Transfer Error : Contactor F : L (Shuttle>>)
348 06050D Transfer Error : Contactor F : M (Shuttle>>)
349 06050E Transfer Error : Contactor F : N (Shuttle>>)
350 06050F Transfer Error : Contactor F : O (Shuttle>>)
351 060510 Transfer Error : Contactor F : P (Shuttle>>)
352 060601 Pickup Sensor Trouble : Contactor F : A
353 060602 Pickup Sensor Trouble : Contactor F : B
354 060603 Pickup Sensor Trouble : Contactor F : C
355 060604 Pickup Sensor Trouble : Contactor F : D
356 060605 Pickup Sensor Trouble : Contactor F : E
357 060606 Pickup Sensor Trouble : Contactor F : F
358 060607 Pickup Sensor Trouble : Contactor F : G
359 060608 Pickup Sensor Trouble : Contactor F : H
360 060609 Pickup Sensor Trouble : Contactor F : I
361 06060A Pickup Sensor Trouble : Contactor F : J
362 06060B Pickup Sensor Trouble : Contactor F : K
363 06060C Pickup Sensor Trouble : Contactor F : L
364 06060D Pickup Sensor Trouble : Contactor F : M
- 62 -
ALTX
ALID
Code Message
365 06060E Pickup Sensor Trouble : Contactor F : N
366 06060F Pickup Sensor Trouble : Contactor F : O
367 060610 Pickup Sensor Trouble : Contactor F : P
368 070001 Return to origin : Contactor : B-Z
369 070002 Initialize not completed : Contactor : B-Z
370 070101 Position Error : Contactor : B-Z
371 070201 Motor trouble : Contactor : B-Z
372 070401 Pickup Error : Contactor B : A (Shuttle)
373 070402 Pickup Error : Contactor B : B (Shuttle)
374 070403 Pickup Error : Contactor B : C (Shuttle)
375 070404 Pickup Error : Contactor B : D (Shuttle)
376 070405 Pickup Error : Contactor B : E (Shuttle)
377 070406 Pickup Error : Contactor B : F (Shuttle)
378 070407 Pickup Error : Contactor B : G (Shuttle)
379 070408 Pickup Error : Contactor B : H (Shuttle)
380 070409 Pickup Error : Contactor B : I (Shuttle)
381 07040A Pickup Error : Contactor B : J (Shuttle)
382 07040B Pickup Error : Contactor B : K (Shuttle)
383 07040C Pickup Error : Contactor B : L (Shuttle)
384 07040D Pickup Error : Contactor B : M (Shuttle)
385 07040E Pickup Error : Contactor B : N (Shuttle)
386 07040F Pickup Error : Contactor B : O (Shuttle)
387 070410 Pickup Error : Contactor B : P (Shuttle)
388 070501 Transfer Error : Contactor B : A (Shuttle>>)
389 070502 Transfer Error : Contactor B : B (Shuttle>>)
390 070503 Transfer Error : Contactor B : C (Shuttle>>)
391 070504 Transfer Error : Contactor B : D (Shuttle>>)
392 070505 Transfer Error : Contactor B : E (Shuttle>>)
393 070506 Transfer Error : Contactor B : F (Shuttle>>)
394 070507 Transfer Error : Contactor B : G (Shuttle>>)
395 070508 Transfer Error : Contactor B : H (Shuttle>>)
396 070509 Transfer Error : Contactor B : I (Shuttle>>)
397 07050A Transfer Error : Contactor B : J (Shuttle>>)
398 07050B Transfer Error : Contactor B : K (Shuttle>>)
399 07050C Transfer Error : Contactor B : L (Shuttle>>)
400 07050D Transfer Error : Contactor B : M (Shuttle>>)
401 07050E Transfer Error : Contactor B : N (Shuttle>>)
402 07050F Transfer Error : Contactor B : O (Shuttle>>)
403 070510 Transfer Error : Contactor B : P (Shuttle>>)
404 070601 Pickup Sensor Trouble : Contactor B : A
405 070602 Pickup Sensor Trouble : Contactor B : B
406 070603 Pickup Sensor Trouble : Contactor B : C
407 070604 Pickup Sensor Trouble : Contactor B : D
408 070605 Pickup Sensor Trouble : Contactor B : E
409 070606 Pickup Sensor Trouble : Contactor B : F
410 070607 Pickup Sensor Trouble : Contactor B : G
- 63 -
ALTX
ALID
Code Message
411 070608 Pickup Sensor Trouble : Contactor B : H
412 070609 Pickup Sensor Trouble : Contactor B : I
413 07060A Pickup Sensor Trouble : Contactor B : J
414 07060B Pickup Sensor Trouble : Contactor B : K
415 07060C Pickup Sensor Trouble : Contactor B : L
416 07060D Pickup Sensor Trouble : Contactor B : M
417 07060E Pickup Sensor Trouble : Contactor B : N
418 07060F Pickup Sensor Trouble : Contactor B : O
419 070610 Pickup Sensor Trouble : Contactor B : P
420 080001 Return to origin : UL Transfer
421 080002 Initialize not completed : UL Transfer
422 080101 Position Error : UL Transfer : X
423 080102 Position Error : UL Transfer : Y
424 080103 Position Error : UL Transfer : Z
425 080104 Position Error : UL Transfer : X-P
426 080105 Position Error : UL Transfer : Y-P
427 080106 Position Error : UL Transfer : A
428 080107 Position Error : UL Transfer : B
429 080108 Position Error : UL Transfer : C
430 080109 Position Error : UL Transfer : D
431 08010A Position Error : UL Transfer : E
432 08010B Position Error : UL Transfer : F
433 08010C Position Error : UL Transfer : G
434 08010D Position Error : UL Transfer : H
435 080201 Motor trouble : UL Transfer : X
436 080202 Motor trouble : UL Transfer : Y
437 080203 Motor trouble : UL Transfer : Z
438 080204 Motor trouble : UL Transfer : X-P
439 080205 Motor trouble : UL Transfer : Y-P
440 080301 Motor trouble : UL Transfer : A
441 080302 Motor trouble : UL Transfer : B
442 080303 Motor trouble : UL Transfer : C
443 080304 Motor trouble : UL Transfer : D
444 080305 Motor trouble : UL Transfer : E
445 080306 Motor trouble : UL Transfer : F
446 080307 Motor trouble : UL Transfer : G
447 080308 Motor trouble : UL Transfer : H
448 080401 Pickup Error : UL Transfer : A
449 080402 Pickup Error : UL Transfer : B
450 080403 Pickup Error : UL Transfer : C
451 080404 Pickup Error : UL Transfer : D
452 080405 Pickup Error : UL Transfer : E
453 080406 Pickup Error : UL Transfer : F
454 080407 Pickup Error : UL Transfer : G
455 080408 Pickup Error : UL Transfer : H
456 080501 Transfer Error : UL Transfer : A
- 64 -
ALTX
ALID
Code Message
457 080502 Transfer Error : UL Transfer : B
458 080503 Transfer Error : UL Transfer : C
459 080504 Transfer Error : UL Transfer : D
460 080505 Transfer Error : UL Transfer : E
461 080506 Transfer Error : UL Transfer : F
462 080507 Transfer Error : UL Transfer : G
463 080508 Transfer Error : UL Transfer : H
464 080601 Pickup Sensor Trouble : UL Transfer : A
465 080602 Pickup Sensor Trouble : UL Transfer : B
466 080603 Pickup Sensor Trouble : UL Transfer : C
467 080604 Pickup Sensor Trouble : UL Transfer : D
468 080605 Pickup Sensor Trouble : UL Transfer : E
469 080606 Pickup Sensor Trouble : UL Transfer : F
470 080607 Pickup Sensor Trouble : UL Transfer : G
471 080608 Pickup Sensor Trouble : UL Transfer : H
472 090001 Return to origin : TB1 Stacker
473 090002 Initialize not completed : TB1 Stacker
474 090101 Position Error : TB1 Stacker
475 090102 Position Error : TB1 Stacker : Tray pusher
476 090301 Transfer : TB1 Stacker : Forward
477 090302 Transfer Error : TB1 Stacker : Retreat
478 090303 Cylinder Motion Error : TB1 Stacker : Lower limit
479 090304 Cylinder Motion Error : TB1 Stacker : Middle level
480 090305 Cylinder Motion Error : TB1 Stacker : Upper limit
481 090306 Cylinder Motion Error : TB1 Stacker : Tray pusher
482 090801 No Tray : TB1 Tray
483 090901 Remain Tray : TB1 front side
484 090902 Remain Tray : TB1 Tray
485 090A01 Tray JAM : TB1 Stacker
486 091001 Add trays : TB1 Stacker
487 091101 Take-out Tray : TB1 Stacker
488 0A0001 Return to origin : TB2 Stacker
489 0A0002 Initialize not completed : TB2 Stacker
490 0A0101 Position Error : TB2 Stacker
491 0A0102 Position Error : TB2 Stacker : Tray pusher
492 0A0301 Transfer Error : TB2 Stacker : Forward
493 0A0302 Transfer Error : TB2 Stacker : Retreat
494 0A0303 Cylinder Motion Error : TB2 Stacker : Lower limit
495 0A0304 Cylinder Motion Error : TB2 Stacker : Middle level
496 0A0305 Cylinder Motion Error : TB2 Stacker : Upper limit
497 0A0306 Cylinder Motion Error : TB2 Stacker : Tray pusher
498 0A0801 No Tray : TB2 Tray
499 0A0901 Remain Tray : TB2 front side
500 0A0902 Remain Tray : TB2 Tray
501 0A0A01 Tray JAM : TB2 Stacker
502 0A1001 Add trays : TB2 Stacker
- 65 -
ALTX
ALID
Code Message
503 0A1101 Take-out Tray : TB2 Stacker
504 0B0001 Return to origin : UL1 Stacker
505 0B0002 Initialize not completed : UL1 Stacker
506 0B0101 Position Error : UL1 Stacker
507 0B0102 Position Error : UL1 Stacker : Tray pusher
508 0B0301 Transfer Error : UL1 Stacker : Forward
509 0B0302 Transfer Error : UL1 Stacker : Retreat
510 0B0303 Cylinder Motion Error : UL1 Stacker : Lower limit
511 0B0304 Cylinder Motion Error : UL1 Stacker : Upper limit
512 0B0305 Cylinder Motion Error : UL1 Stacker : Tray pusher
513 0B0801 No Tray : UL1 Tray
514 0B0901 Remain Tray : UL1 front side
515 0B0902 Remain Tray : UL1 Tray
516 0B0A01 Tray JAM : UL1 Stacker
517 0B1101 Take-out Tray : UL1 Stacker
518 0B1F01 Confirm IC Mis-set : UL1 Tray
519 0C0001 Return to origin : UL2 Stacker
520 0C0002 Initialize not completed : UL2 Stacker
521 0C0101 Position Error : UL2 Stacker
522 0C0102 Position Error : UL2 Stacker : Tray pusher
523 0C0301 Transfer Error : UL2 Stacker : Forward
524 0C0302 Transfer Error : UL2 Stacker : Retreat
525 0C0303 Cylinder Motion Error : UL2 Stacker : Lower limit
526 0C0304 Cylinder Motion Error : UL2 Stacker : Upper limit
527 0C0305 Cylinder Motion Error : UL2 Stacker : Tray pusher
528 0C0801 No Tray : UL2 Tray
529 0C0901 Remain Tray : UL2 front side
530 0C0902 Remain Tray : UL2 Tray
531 0C0A01 Tray JAM : UL2 Stacker
532 0C1101 Take-out Tray : UL2 Stacker
533 0C1F01 Confirm IC Mis-set : UL2 Tray
534 0D0001 Return to origin : UL3 Stacker
535 0D0002 Initialize not completed : UL3 Stacker
536 0D0101 Position Error : UL3 Stacker
537 0D0102 Position Error : UL3 Stacker : Tray pusher
538 0D0301 Transfer Error : UL3 Stacker : Forward
539 0D0302 Transfer Error : UL3 Stacker : Retreat
540 0D0303 Cylinder Motion Error : UL3 Stacker : Lower limit
541 0D0304 Cylinder Motion Error : UL3 Stacker : Upper limit
542 0D0305 Cylinder Motion Error : UL3 Stacker : Tray pusher
543 0D0801 No Tray : UL3 Tray
544 0D0901 Remain Tray : UL3 front side
545 0D0902 Remain Tray : UL3 Tray
546 0D0A01 Tray JAM : UL3 Stacker
547 0D1101 Take-out Tray : UL3 Stacker
548 0D1F01 Confirm IC Mis-set : UL3 Tray
- 66 -
ALTX
ALID
Code Message
549 0E0801 No Tray : UL4
550 0E1101 Chnage Tray : UL4
551 0F0801 No Tray : UL5
552 0F1101 Chnage Tray : UL5
553 100801 No Tray : UL6
554 101101 Chnage Tray : UL6
555 110001 Return to origin : Tray Transfer
556 110002 Initialize not completed : Tray Transfer
557 110101 Position Error : Tray Transfer
558 110102 Position Error : Tray Transfer : Z
559 110201 Motor trouble : Tray Transfer
560 110301 Cylinder Motion Error : Tray Transfer : Z
561 110401 Pickup Error : Tray Transfer
562 110501 Transfer Error : Tray Transfer
563 110601 Pickup Sensor Trouble : Tray Transfer
564 120001 Return to origin : IC-rotator : LD
565 120002 Initialize not completed : IC-rotator : LD
566 120003 Initialize not completed : IC-rotator : LD : A
567 120004 Initialize not completed : IC-rotator : LD : B
568 120005 Initialize not completed : IC-rotator : LD : C
569 120006 Initialize not completed : IC-rotator : LD : D
570 120101 Position Error : IC-rotator : LD
571 120102 Position Error : IC-rotator : LD : A
572 120103 Position Error : IC-rotator : LD : B
573 120104 Position Error : IC-rotator : LD : C
574 120105 Position Error : IC-rotator : LD : D
575 120301 Cylinder Motion Error : IC-rotator : LD
576 120701 IC Mis-set : IC-rotator : LD : L (BS74)
577 120702 IC Mis-set : IC-rotator : LD : R (BS75)
578 120703 IC Mis-set : IC-rotator : LD : XF (BS72)
579 120704 IC Mis-set : IC-rotator : LD : XB (BS73)
580 130001 Return to origin : IC-rotator : UL
581 130002 Initialize not completed : IC-rotator : UL
582 130003 Initialize not completed : IC-rotator : UL : A
583 130004 Initialize not completed : IC-rotator : UL : B
584 130005 Initialize not completed : IC-rotator : UL : C
585 130006 Initialize not completed : IC-rotator : UL : D
586 130101 Position Error : IC-rotator : UL
587 130102 Position Error : IC-rotator : UL : A
588 130103 Position Error : IC-rotator : UL : B
589 130104 Position Error : IC-rotator : UL : C
590 130105 Position Error : IC-rotator : UL : D
591 130301 Cylinder Motion Error : IC-rotator : UL
592 130701 IC Mis-set : IC-rotator : UL : L (BS78)
593 130702 IC Mis-set : IC-rotator : UL : R (BS79)
594 130703 IC Mis-set : IC-rotator : UL : XF (BS76)
- 67 -
ALTX
ALID
Code Message
595 130704 IC Mis-set : IC-rotator : UL : XB (BS77)
596 1E0001 Testing …..
597 1E0002 Tester trouble
598 1E0003 DIO I/F board trouble
599 1E0004 Power Supply Error : TesterI/F(DIO)
600 1E0005 Waits for ready of a tester
601 1E0006 GP-IB board trouble
602 1E0101 Communication Time-out : TesterI/F(DIO I/F)
603 1E0102 Communication Time-out : TesterI/F(RS232c)
604 1E0103 Communication Time-out : TesterI/F(GP-IB)
605 1E0104 Communication Error : TesterI/F(DIO I/F)
606 1E0105 Communication Error : TesterI/F(RS232c)
607 1E0106 Communication Error : TesterI/F(GP-IB)
608 1E0201 Test time-out
609 1E0301 Tester Error : READY signal
610 1E0302 Tester Error : ALARM signal
611 1E0303 Tester Error : DUT-1
618 1E030A Tester Error : DUT-8
619 1E030B Tester Error : DUT-9
620 1E030C Tester Error : DUT-10
621 1E030D Tester Error : DUT-11
622 1E030E Tester Error : DUT-12
623 1E030F Tester Error : DUT-13
627 1E0313 Tester Error : Received test result out of specification
628 1F0001 Completed preparations : Room temp.
629 1F0002 Completed preparations : High temp.
630 1F0003 In auto tuning
631 1F0004 Temperture Requirement Error
632 1F0005 Power Supply Error : Temp. control circuit
633 1F0101 Communication Error : Temp. controller
634 1F0102 Communication Time-out : Temp. controller
635 1F0201 Temp. controller trouble : Contactor F-A line [H6]
636 1F0202 Temp. controller trouble : Contactor F-B line [H7]
637 1F0203 Temp. controller trouble : Contactor F-C line [H8]
638 1F0204 Temp. controller trouble : Contactor F-D line [H9]
639 1F0205 Temp. controller trouble : Contactor B-A line [H10]
640 1F0206 Temp. controller trouble : Contactor B-B line [H11]
- 68 -
ALTX
ALID
Code Message
641 1F0207 Temp. controller trouble : Contactor B-C line [H12]
642 1F0208 Temp. controller trouble : Contactor B-D line [H13]
643 1F0209 Temp. controller trouble : Preheat 1
644 1F020A Temp. controller trouble : Preheat 2
645 1F020B Temp. controller trouble : Socket
646 1F020C Temp. controller trouble : 空ｷ
647 1F020D Temp. controller trouble : Contactor F-E line [H14]
648 1F020E Temp. controller trouble : Contactor F-F line [H15]
649 1F020F Temp. controller trouble : Contactor F-G line [H16]
650 1F0210 Temp. controller trouble : Contactor F-H line [H17]
651 1F0211 Temp. controller trouble : Contactor B-E line [H18]
652 1F0212 Temp. controller trouble : Contactor B-F line [H19]
653 1F0213 Temp. controller trouble : Contactor B-G line [H20]
654 1F0214 Temp. controller trouble : Contactor B-H line [H21]
655 1F0215 Temp. controller trouble : Shuttle F
656 1F0216 Temp. controller trouble : Shuttle B
657 1F0301 Temp. Error : Contactor F-A line [H6]
658 1F0302 Temp. Error : Contactor F-B line [H7]
659 1F0303 Temp. Error : Contactor F-C line [H8]
660 1F0304 Temp. Error : Contactor F-D line [H9]
661 1F0305 Temp. Error : Contactor B-A line [H10]
662 1F0306 Temp. Error : Contactor B-B line [H11]
663 1F0307 Temp. Error : Contactor B-C line [H12]
664 1F0308 Temp. Error : Contactor B-D line [H13]
665 1F0309 Temp. Error : Preheat 1
666 1F030A Temp. Error : Preheat 2
667 1F030B Temp. Error : Socket
668 1F030C Temp. Error : 空ｷ
669 1F030D Temp. Error : Contactor F-E line [H14]
670 1F030E Temp. Error : Contactor F-F line [H15]
671 1F030F Temp. Error : Contactor F-G line [H16]
672 1F0310 Temp. Error : Contactor F-H line [H17]
673 1F0311 Temp. Error : Contactor B-E line [H18]
674 1F0312 Temp. Error : Contactor B-F line [H19]
675 1F0313 Temp. Error : Contactor B-G line [H20]
676 1F0314 Temp. Error : Contactor B-H line [H21]
677 1F0315 Temp. Error : Shuttle F
678 1F0316 Temp. Error : Shuttle B
679 1F0401 Temp. Limit : Contactor F-A line [H6]
680 1F0402 Temp. Limit : Contactor F-B line [H7]
681 1F0403 Temp. Limit : Contactor F-C line [H8]
682 1F0404 Temp. Limit : Contactor F-D line [H9]
683 1F0405 Temp. Limit : Contactor B-A line [H10]
684 1F0406 Temp. Limit : Contactor B-B line [H11]
685 1F0407 Temp. Limit : Contactor B-C line [H12]
686 1F0408 Temp. Limit : Contactor B-D line [H13]
- 69 -
ALTX
ALID
Code Message
687 1F0409 Temp. Limit : Preheat 1
688 1F040A Temp. Limit : Preheat 2
689 1F040B Temp. Limit : Socket
690 1F040C Temp. Limit : 空ｷ
691 1F040D Temp. Limit : Contactor F-E line [H14]
692 1F040E Temp. Limit : Contactor F-F line [H15]
693 1F040F Temp. Limit : Contactor F-G line [H16]
694 1F0410 Temp. Limit : Contactor F-H line [H17]
695 1F0411 Temp. Limit : Contactor B-E line [H18]
696 1F0412 Temp. Limit : Contactor B-F line [H19]
697 1F0413 Temp. Limit : Contactor B-G line [H20]
698 1F0414 Temp. Limit : Contactor B-H line [H21]
699 1F0415 Temp. Limit : Shuttle F
700 1F0416 Temp. Limit : Shuttle B
701 1F0501 Fault Warning : Contactor F-A line [H6]
702 1F0502 Fault Warning : Contactor F-B line [H7]
703 1F0503 Fault Warning : Contactor F-C line [H8]
704 1F0504 Fault Warning : Contactor F-D line [H9]
705 1F0505 Fault Warning : Contactor B-A line [H10]
706 1F0506 Fault Warning : Contactor B-B line [H11]
707 1F0507 Fault Warning : Contactor B-C line [H12]
708 1F0508 Fault Warning : Contactor B-D line [H13]
709 1F0509 Fault Warning : Preheat 1
710 1F050A Fault Warning : Preheat 2
711 1F050B Fault Warning : Socket
712 1F050C Fault Warning : 空ｷ
713 1F050D Fault Warning : Contactor F-E line [H14]
714 1F050E Fault Warning : Contactor F-F line [H15]
715 1F050F Fault Warning : Contactor F-G line [H16]
716 1F0510 Fault Warning : Contactor F-H line [H17]
717 1F0511 Fault Warning : Contactor B-E line [H18]
718 1F0512 Fault Warning : Contactor B-F line [H19]
719 1F0513 Fault Warning : Contactor B-G line [H20]
720 1F0514 Fault Warning : Contactor B-H line [H21]
721 1F0515 Fault Warning : Shuttle F
722 1F0516 Fault Warning : Shuttle B
723 200001 Anywire Trouble : Abnormal status
724 200002 Anywire Trouble : D-G line short circuit
725 200003 Anywire Trouble : D-P line short circuit
726 200004 Anywire Trouble : 24Vvoltage
727 200005 Anywire Trouble : Fault Warning
728 200101 Motor Control Trouble : Generally
729 200102 Motor Control Trouble : Time-out
730 200103 Motor Control Trouble : Moving range transcendency.
731 200104 Motor Control Trouble : Unsuitable Encoder value.
732 200201 Serial Communication Trouble : RS232c
- 70 -
ALTX
ALID
Code Message
733 200301 Serial Communication Trouble : RS485
734 210001 Socket Module Un-locked
735 210002 Socket Module Non-installation
736 210101 In warm up socket-pin temperature.
737 210701 IC Mis-set : Socket : L4 (BS108)
741 210705 IC Mis-set : Socket : R1 (BS67)
745 210709 IC Mis-set : Socket : XF (BS62)
746 21070A IC Mis-set : Socket : XC (BS63)
747 21070B IC Mis-set : Socket : XB (BS64)
748 21080C IC Remain : Socket A
749 21080D IC Remain : Socket B
750 21080E IC Remain : Socket C
751 21080F IC Remain : Socket D
752 210810 IC Remain : Socket E
753 210811 IC Remain : Socket F
754 210812 IC Remain : Socket G
755 210813 IC Remain : Socket H
756 210814 IC Remain : Socket I
757 210815 IC Remain : Socket J
758 210816 IC Remain : Socket K
759 210817 IC Remain : Socket L
760 210818 IC Remain : Socket M
761 210819 IC Remain : Socket N
762 21081A IC Remain : Socket O
763 21081B IC Remain : Socket P
764 220001 Maintenance Request : Handler
765 220002 Maintenance Request : Vacuum Pump
766 220101 Contact Count Alarm : Socket A
767 220102 Contact Count Alarm : Socket B
768 220103 Contact Count Alarm : Socket C
769 220104 Contact Count Alarm : Socket D
770 220105 Contact Count Alarm : Socket E
771 220106 Contact Count Alarm : Socket F
772 220107 Contact Count Alarm : Socket G
773 220108 Contact Count Alarm : Socket H
774 220109 Contact Count Alarm : Socket I
775 22010A Contact Count Alarm : Socket J
776 22010B Contact Count Alarm : Socket K
777 22010C Contact Count Alarm : Socket L
778 22010D Contact Count Alarm : Socket M
- 71 -
ALTX
ALID
Code Message
779 22010E Contact Count Alarm : Socket N
780 22010F Contact Count Alarm : Socket O
781 220110 Contact Count Alarm : Socket P
782 220201 Contact Count Alarm : Contactor F-A
783 220202 Contact Count Alarm : Contactor F-B
784 220203 Contact Count Alarm : Contactor F-C
785 220204 Contact Count Alarm : Contactor F-D
786 220205 Contact Count Alarm : Contactor F-E
787 220206 Contact Count Alarm : Contactor F-F
788 220207 Contact Count Alarm : Contactor F-G
789 220208 Contact Count Alarm : Contactor F-H
790 220209 Contact Count Alarm : Contactor F-I
791 22020A Contact Count Alarm : Contactor F-J
792 22020B Contact Count Alarm : Contactor F-K
793 22020C Contact Count Alarm : Contactor F-L
794 22020D Contact Count Alarm : Contactor F-M
795 22020E Contact Count Alarm : Contactor F-N
796 22020F Contact Count Alarm : Contactor F-O
797 220210 Contact Count Alarm : Contactor F-P
798 220301 Contact Count Alarm : Contactor B-A
799 220302 Contact Count Alarm : Contactor B-B
800 220303 Contact Count Alarm : Contactor B-C
801 220304 Contact Count Alarm : Contactor B-D
802 220305 Contact Count Alarm : Contactor B-E
803 220306 Contact Count Alarm : Contactor B-F
804 220307 Contact Count Alarm : Contactor B-G
805 220308 Contact Count Alarm : Contactor B-H
806 220309 Contact Count Alarm : Contactor B-I
807 22030A Contact Count Alarm : Contactor B-J
808 22030B Contact Count Alarm : Contactor B-K
809 22030C Contact Count Alarm : Contactor B-L
810 22030D Contact Count Alarm : Contactor B-M
811 22030E Contact Count Alarm : Contactor B-N
812 22030F Contact Count Alarm : Contactor B-O
813 220310 Contact Count Alarm : Contactor B-P
814 220401 Continuous NG : DUT-1
823 22040A Continuous NG : DUT-10
824 22040B Continuous NG : DUT-11
- 72 -
ALTX
ALID
Code Message
825 22040C Continuous NG : DUT-12
826 22040D Continuous NG : DUT-13
827 22040E Continuous NG : DUT-14
828 22040F Continuous NG : DUT-15
830 220501 Continuous NG : Contactor F-A
831 220502 Continuous NG : Contactor F-B
832 220503 Continuous NG : Contactor F-C
833 220504 Continuous NG : Contactor F-D
834 220505 Continuous NG : Contactor F-E
835 220506 Continuous NG : Contactor F-F
836 220507 Continuous NG : Contactor F-G
837 220508 Continuous NG : Contactor F-H
838 220509 Continuous NG : Contactor F-I
839 22050A Continuous NG : Contactor F-J
840 22050B Continuous NG : Contactor F-K
841 22050C Continuous NG : Contactor F-L
842 22050D Continuous NG : Contactor F-M
843 22050E Continuous NG : Contactor F-N
844 22050F Continuous NG : Contactor F-O
845 220510 Continuous NG : Contactor F-P
846 220601 Continuous NG : Contactor B-A
847 220602 Continuous NG : Contactor B-B
848 220603 Continuous NG : Contactor B-C
849 220604 Continuous NG : Contactor B-D
850 220605 Continuous NG : Contactor B-E
851 220606 Continuous NG : Contactor B-F
852 220607 Continuous NG : Contactor B-G
853 220608 Continuous NG : Contactor B-H
854 220609 Continuous NG : Contactor B-I
855 22060A Continuous NG : Contactor B-J
856 22060B Continuous NG : Contactor B-K
857 22060C Continuous NG : Contactor B-L
858 22060D Continuous NG : Contactor B-M
859 22060E Continuous NG : Contactor B-N
860 22060F Continuous NG : Contactor B-O
861 220610 Continuous NG : Contactor B-P
862 220701 Fail Rate Alarm : Socket Average
863 220702 Fail Rate Alarm : Contactor F/B Delta
864 220703 Fail Rate Alarm : Contactor F Average
865 220704 Fail Rate Alarm : Contactor B Average
866 220801 Fail Rate Alarm : Socket A
867 220802 Fail Rate Alarm : Socket B
868 220803 Fail Rate Alarm : Socket C
869 220804 Fail Rate Alarm : Socket D
870 220805 Fail Rate Alarm : Socket E
- 73 -
ALTX
ALID
Code Message
871 220806 Fail Rate Alarm : Socket F
872 220807 Fail Rate Alarm : Socket G
873 220808 Fail Rate Alarm : Socket H
874 220809 Fail Rate Alarm : Socket I
875 22080A Fail Rate Alarm : Socket J
876 22080B Fail Rate Alarm : Socket K
877 22080C Fail Rate Alarm : Socket L
878 22080D Fail Rate Alarm : Socket M
879 22080E Fail Rate Alarm : Socket N
880 22080F Fail Rate Alarm : Socket O
881 220810 Fail Rate Alarm : Socket P
882 220901 Fail Rate Alarm : Contactor F-A
883 220902 Fail Rate Alarm : Contactor F-B
884 220903 Fail Rate Alarm : Contactor F-C
885 220904 Fail Rate Alarm : Contactor F-D
886 220905 Fail Rate Alarm : Contactor F-E
887 220906 Fail Rate Alarm : Contactor F-F
888 220907 Fail Rate Alarm : Contactor F-G
889 220908 Fail Rate Alarm : Contactor F-H
890 220909 Fail Rate Alarm : Contactor F-I
891 22090A Fail Rate Alarm : Contactor F-J
892 22090B Fail Rate Alarm : Contactor F-K
893 22090C Fail Rate Alarm : Contactor F-L
894 22090D Fail Rate Alarm : Contactor F-M
895 22090E Fail Rate Alarm : Contactor F-N
896 22090F Fail Rate Alarm : Contactor F-O
897 220910 Fail Rate Alarm : Contactor F-P
898 220A01 Fail Rate Alarm : Contactor B-A
899 220A02 Fail Rate Alarm : Contactor B-B
900 220A03 Fail Rate Alarm : Contactor B-C
901 220A04 Fail Rate Alarm : Contactor B-D
902 220A05 Fail Rate Alarm : Contactor B-E
903 220A06 Fail Rate Alarm : Contactor B-F
904 220A07 Fail Rate Alarm : Contactor B-G
905 220A08 Fail Rate Alarm : Contactor B-H
906 220A09 Fail Rate Alarm : Contactor B-I
907 220A0A Fail Rate Alarm : Contactor B-J
908 220A0B Fail Rate Alarm : Contactor B-K
909 220A0C Fail Rate Alarm : Contactor B-L
910 220A0D Fail Rate Alarm : Contactor B-M
911 220A0E Fail Rate Alarm : Contactor B-N
912 220A0F Fail Rate Alarm : Contactor B-O
913 220A10 Fail Rate Alarm : Contactor B-P
914 000400 Communication Error : High contact force pressure air
sensor controller
915 060301 Pressure Error : Contactor F compressed Air
916 060302 Brake trouble : Contactor F
- 74 -
ALTX
ALID
Code Message
917 070301 Pressure Error : Contactor B compressed Air
918 070302 Brake trouble : Contactor B
919 000115 Pressure Error : Contact Balance Air : CT-F
920 000116 Pressure Error : Contact Balance Air : CT-B
921 000117 Pressure Error : Contact Balance Air : CT-F-A
922 000118 Pressure Error : Contact Balance Air : CT-F-B
923 000119 Pressure Error : Contact Balance Air : CT-F-C
924 00011A Pressure Error : Contact Balance Air : CT-F-D
925 00011B Pressure Error : Contact Balance Air : CT-F-E
926 00011C Pressure Error : Contact Balance Air : CT-F-F
927 00011D Pressure Error : Contact Balance Air : CT-F-G
928 00011E Pressure Error : Contact Balance Air : CT-F-H
929 00011F Pressure Error : Contact Balance Air : CT-B-A
930 000120 Pressure Error : Contact Balance Air : CT-B-B
931 000121 Pressure Error : Contact Balance Air : CT-B-C
932 000122 Pressure Error : Contact Balance Air : CT-B-D
933 000123 Pressure Error : Contact Balance Air : CT-B-E
934 000124 Pressure Error : Contact Balance Air : CT-B-F
935 000125 Pressure Error : Contact Balance Air : CT-B-G
936 000126 Pressure Error : Contact Balance Air : CT-B-H
937 0B1102 Set empty tray : UL1 Stacker
938 0C1102 Set empty tray : UL2 Stacker
939 0D1102 Set empty tray : UL3 Stacker
940 000022 Waits for soak time-up
941 000023 During autoteaching : Contactor F
942 000024 During autoteaching : Contactor B
943 000025 Reaches the auto teaching limit : Contactor F
944 000026 Reaches the auto teaching limit : Contactor B
945 000027 Shuttle F : Reconfirm teaching
946 000028 Shuttle B : Reconfirm teaching
947 000029 During socket DDD
948 030801 IC Remain : Shuttle F-LD : L2 (BS31)
950 030803 IC Remain : Shuttle F-LD : R1 (BS33)
952 030805 IC Remain : Shuttle F-UL : L2 (BS47)
953 030806 IC Remain : Shuttle F-UL : L1 (BS48)
954 030807 IC Remain : Shuttle F-UL : R1 (BS49)
955 030808 IC Remain : Shuttle F-UL : R2 (BS50)
956 030809 IC Remain : Shuttle F-LD : F (BS35)
957 03080A IC Remain : Shuttle F-LD : C (BS36)
958 03080B IC Remain : Shuttle F-LD : B (BS37)
959 03080C IC Remain : Shuttle F-UL : F (BS51)
960 03080D IC Remain : Shuttle F-UL : C (BS52)
961 03080E IC Remain : Shuttle F-UL : B (BS53)
962 040801 IC Remain : Shuttle B-LD : L2
- 75 -
ALTX
ALID
Code Message
963 040802 IC Remain : Shuttle B-LD : L1
964 040803 IC Remain : Shuttle B-LD : R1
965 040804 IC Remain : Shuttle B-LD : R2
966 040805 IC Remain : Shuttle B-UL : L2
967 040806 IC Remain : Shuttle B-UL : L1
968 040807 IC Remain : Shuttle B-UL : R1
969 040808 IC Remain : Shuttle B-UL : R2
970 040809 IC Remain : Shuttle B-LD : F
971 04080A IC Remain : Shuttle B-LD : C
972 04080B IC Remain : Shuttle B-LD : B
973 04080C IC Remain : Shuttle B-UL : F
974 04080D IC Remain : Shuttle B-UL : C
975 04080E IC Remain : Shuttle B-UL : B
976 120801 IC Remain : IC-rotator : LD : L (BS74)
977 120802 IC Remain : IC-rotator : LD : R (BS75)
978 120803 IC Remain : IC-rotator : LD : XF (BS72)
979 120804 IC Remain : IC-rotator : LD : XB (BS73)
980 130801 IC Remain : IC-rotator : UL : L (BS78)
981 130802 IC Remain : IC-rotator : UL : R (BS79)
982 130803 IC Remain : IC-rotator : UL : XF (BS76)
983 130804 IC Remain : IC-rotator : UL : XB (BS77)
984 210801 IC Remain : Socket : L4 (BS108)
988 210805 IC Remain : Socket : R1 (BS67)
992 210809 IC Remain : Socket : XF (BS62)
993 21080A IC Remain : Socket : XC (BS63)
994 21080B IC Remain : Socket : XB (BS64)
995 210901 Yield alarm : Socket A
996 210902 Yield alarm : Socket B
997 210903 Yield alarm : Socket C
998 210904 Yield alarm : Socket D
999 210905 Yield alarm : Socket E
1000 210906 Yield alarm : Socket F
1001 210907 Yield alarm : Socket G
1002 210908 Yield alarm : Socket H
1003 210909 Yield alarm : Socket I
1004 21090A Yield alarm : Socket J
1005 21090B Yield alarm : Socket K
1006 21090C Yield alarm : Socket L
1007 21090D Yield alarm : Socket M
1008 21090E Yield alarm : Socket N
- 76 -
ALTX
ALID
Code Message
1009 21090F Yield alarm : Socket O
1010 210910 Yield alarm : Socket P
1011 210A01 Yield alarm : continuous failure : Socket A
1012 210A02 Yield alarm : continuous failure : Socket B
1013 210A03 Yield alarm : continuous failure : Socket C
1014 210A04 Yield alarm : continuous failure : Socket D
1015 210A05 Yield alarm : continuous failure : Socket E
1016 210A06 Yield alarm : continuous failure : Socket F
1017 210A07 Yield alarm : continuous failure : Socket G
1018 210A08 Yield alarm : continuous failure : Socket H
1019 210A09 Yield alarm : continuous failure : Socket I
1020 210A0A Yield alarm : continuous failure : Socket J
1021 210A0B Yield alarm : continuous failure : Socket K
1022 210A0C Yield alarm : continuous failure : Socket L
1023 210A0D Yield alarm : continuous failure : Socket M
1024 210A0E Yield alarm : continuous failure : Socket N
1025 210A0F Yield alarm : continuous failure : Socket O
1026 210A10 Yield alarm : continuous failure : Socket P
1027 060421 Pickup Error : Contactor F : A (Socket)
1028 060422 Pickup Error : Contactor F : B (Socket)
1029 060423 Pickup Error : Contactor F : C (Socket)
1030 060424 Pickup Error : Contactor F : D (Socket)
1031 060425 Pickup Error : Contactor F : E (Socket)
1032 060426 Pickup Error : Contactor F : F (Socket)
1033 060427 Pickup Error : Contactor F : G (Socket)
1034 060428 Pickup Error : Contactor F : H (Socket)
1035 060429 Pickup Error : Contactor F : I (Socket)
1036 06042A Pickup Error : Contactor F : J (Socket)
1037 06042B Pickup Error : Contactor F : K (Socket)
1038 06042C Pickup Error : Contactor F : L (Socket)
1039 06042D Pickup Error : Contactor F : M (Socket)
1040 06042E Pickup Error : Contactor F : N (Socket)
1041 06042F Pickup Error : Contactor F : O (Socket)
1042 060430 Pickup Error : Contactor F : P (Socket)
1043 060521 Transfer Error : Contactor F : A (Socket>>)
1044 060522 Transfer Error : Contactor F : B (Socket>>)
1045 060523 Transfer Error : Contactor F : C (Socket>>)
1046 060524 Transfer Error : Contactor F : D (Socket>>)
1047 060525 Transfer Error : Contactor F : E (Socket>>)
1048 060526 Transfer Error : Contactor F : F (Socket>>)
1049 060527 Transfer Error : Contactor F : G (Socket>>)
1050 060528 Transfer Error : Contactor F : H (Socket>>)
1051 060529 Transfer Error : Contactor F : I (Socket>>)
1052 06052A Transfer Error : Contactor F : J (Socket>>)
1053 06052B Transfer Error : Contactor F : K (Socket>>)
1054 06052C Transfer Error : Contactor F : L (Socket>>)
- 77 -
ALTX
ALID
Code Message
1055 06052D Transfer Error : Contactor F : M (Socket>>)
1056 06052E Transfer Error : Contactor F : N (Socket>>)
1057 06052F Transfer Error : Contactor F : O (Socket>>)
1058 060530 Transfer Error : Contactor F : P (Socket>>)
1059 070421 Pickup Error : Contactor B : A (Socket)
1060 070422 Pickup Error : Contactor B : B (Socket)
1061 070423 Pickup Error : Contactor B : C (Socket)
1062 070424 Pickup Error : Contactor B : D (Socket)
1063 070425 Pickup Error : Contactor B : E (Socket)
1064 070426 Pickup Error : Contactor B : F (Socket)
1065 070427 Pickup Error : Contactor B : G (Socket)
1066 070428 Pickup Error : Contactor B : H (Socket)
1067 070429 Pickup Error : Contactor B : I (Socket)
1068 07042A Pickup Error : Contactor B : J (Socket)
1069 07042B Pickup Error : Contactor B : K (Socket)
1070 07042C Pickup Error : Contactor B : L (Socket)
1071 07042D Pickup Error : Contactor B : M (Socket)
1072 07042E Pickup Error : Contactor B : N (Socket)
1073 07042F Pickup Error : Contactor B : O (Socket)
1074 070430 Pickup Error : Contactor B : P (Socket)
1075 070521 Transfer Error : Contactor B : A (Socket>>)
1076 070522 Transfer Error : Contactor B : B (Socket>>)
1077 070523 Transfer Error : Contactor B : C (Socket>>)
1078 070524 Transfer Error : Contactor B : D (Socket>>)
1079 070525 Transfer Error : Contactor B : E (Socket>>)
1080 070526 Transfer Error : Contactor B : F (Socket>>)
1081 070527 Transfer Error : Contactor B : G (Socket>>)
1082 070528 Transfer Error : Contactor B : H (Socket>>)
1083 070529 Transfer Error : Contactor B : I (Socket>>)
1084 07052A Transfer Error : Contactor B : J (Socket>>)
1085 07052B Transfer Error : Contactor B : K (Socket>>)
1086 07052C Transfer Error : Contactor B : L (Socket>>)
1087 07052D Transfer Error : Contactor B : M (Socket>>)
1088 07052E Transfer Error : Contactor B : N (Socket>>)
1089 07052F Transfer Error : Contactor B : O (Socket>>)
1090 070530 Transfer Error : Contactor B : P (Socket>>)
1091 1F0417 Temp. Limit : LD transfer Y axis
1092 1F0418 Temp. Limit : UL transfer Y axis
1093 030711 IC Mis-set : Shuttle F-LD : YC (BS93)
1094 030712 IC Mis-set : Shuttle F-UL : YC (BS95)
1095 03080F IC Remain : Shuttle F-LD : YC (BS93)
1096 030810 IC Remain : Shuttle F-UL : YC (BS95)
1097 040711 IC Mis-set : Shuttle B-LD : YC (BS94)
1098 040712 IC Mis-set : Shuttle B-UL : YC (BS96)
1099 04080F IC Remain : Shuttle B-LD : YC (BS94)
1100 040810 IC Remain : Shuttle B-UL : YC (BS96)
- 78 -
ALTX
ALID
Code Message
1101 012001 Wait for neutralizing static charge : LD Tray
1102 0B2001 Wait for neutralizing static charge : UL1 Tray
1103 0C2001 Wait for neutralizing static charge : UL2 Tray
1104 0D2001 Wait for neutralizing static charge : UL3 Tray
1105 000500 Network communication timeout
1106 000501 Network communication error
1107 000502 Network : Waits for host server's response
1108 020802 IC Remain : Preheat (LD transfer : A)
1109 020803 IC Remain : Preheat (LD transfer : B)
1110 020804 IC Remain : Preheat (LD transfer : C)
1111 020805 IC Remain : Preheat (LD transfer : D)
1112 020806 IC Remain : Preheat (LD transfer : E)
1113 020807 IC Remain : Preheat (LD transfer : F)
1114 020808 IC Remain : Preheat (LD transfer : G)
1115 020809 IC Remain : Preheat (LD transfer : H)
1116 120805 IC Remain : IC-rotator : LD : A
1117 120806 IC Remain : IC-rotator : LD : B
1118 120807 IC Remain : IC-rotator : LD : C
1119 120808 IC Remain : IC-rotator : LD : D
1120 130805 IC Remain : IC-rotator : UL : A
1121 130806 IC Remain : IC-rotator : UL : B
1122 130807 IC Remain : IC-rotator : UL : C
1123 130808 IC Remain : IC-rotator : UL : D
1124 0B1201 Take-out Tray : UL1 : Check the empty pockets
1125 0C1201 Take-out Tray : UL2 : Check the empty pockets
1126 0D1201 Take-out Tray : UL3 : Check the empty pockets
1127 0E1201 Chnage Tray : UL4 : Check the empty pockets
1128 0F1201 Chnage Tray : UL5 : Check the empty pockets
1129 101201 Chnage Tray : UL6 : Check the empty pockets
1130 030713 IC Mis-set : Shuttle F : IN (BS30)
1131 030811 IC Remain : Shuttle F : IN (BS30)
1132 040713 IC Mis-set : Shuttle B : IN (BS38)
1133 040811 IC Remain : Shuttle B : IN (BS38)
1134 030714 IC Mis-set : Shuttle F : OUT (BS46)
1135 030812 IC Remain : Shuttle F : OUT (BS46)
1136 040714 IC Mis-set : Shuttle B : OUT (BS54)
1137 040812 IC Remain : Shuttle B : OUT (BS54)
1138 00002A Lot End
1139 210800 IC Remain : Socket
1140 000401 Communication Error : Vision system for DDD
1141 1F0006 Checking heater circuit.
1142 1F0217 Temp. sensor trouble : Contactor F-A line [H6]
1143 1F0218 Temp. sensor trouble : Contactor F-B line [H7]
1144 1F0219 Temp. sensor trouble : Contactor F-C line [H8]
1145 1F021A Temp. sensor trouble : Contactor F-D line [H9]
1146 1F021B Temp. sensor trouble : Contactor B-A line [H10]
- 79 -
ALTX
ALID
Code Message
1147 1F021C Temp. sensor trouble : Contactor B-B line [H11]
1148 1F021D Temp. sensor trouble : Contactor B-C line [H12]
1149 1F021E Temp. sensor trouble : Contactor B-D line [H13]
1150 1F021F Temp. sensor trouble : Preheat 1
1151 1F0220 Temp. sensor trouble : Preheat 2
1152 1F0221 Temp. sensor trouble : Socket
1153 1F0222 Temp. sensor trouble : 空き
1154 1F0223 Temp. sensor trouble : Contactor F-E line [H14]
1155 1F0224 Temp. sensor trouble : Contactor F-F line [H15]
1156 1F0225 Temp. sensor trouble : Contactor F-G line [H16]
1157 1F0226 Temp. sensor trouble : Contactor F-H line [H17]
1158 1F0227 Temp. sensor trouble : Contactor B-E line [H18]
1159 1F0228 Temp. sensor trouble : Contactor B-F line [H19]
1160 1F0229 Temp. sensor trouble : Contactor B-G line [H20]
1161 1F022A Temp. sensor trouble : Contactor B-H line [H21]
1162 1F022B Temp. sensor trouble : Shuttle F
1163 1F022C Temp. sensor trouble : Shuttle B
1164 00002B In single mode for contactor
1165 00002C In 1 : 1 transfer mode
1166 00002D Sending "LOT START"
1167 00002E Sending "LOT END"
1168 00002F Confirm of 1 : 1 transfer mode
1169 060303 Fall prevention Cylinder trouble : Contactor F
1170 070303 Fall prevention Cylinder trouble : Contactor B
1171 000030 Suspended maintenance operations
1172 000600 LD transfer Vision uint error
1173 000601 Shuttle F Vision uint error
1174 000602 Shuttle B Vision uint error
1175 000603 UL transfer Vision uint error
1176 000031 Waiting for read of QR code
1177 012002 Temp. Error : LD Tray IC
1178 21070C IC Mis-set : Socket : 32F (BS106)
1179 21070D IC Mis-set : Socket : 32B (BS107)
1180 21081C IC Remain : Socket Q
1181 21081D IC Remain : Socket R
1182 21081E IC Remain : Socket S
1183 21081F IC Remain : Socket T
1184 210820 IC Remain : Socket U
1185 210821 IC Remain : Socket V
1186 210822 IC Remain : Socket W
1187 210823 IC Remain : Socket X
1188 210824 IC Remain : Socket Y
1189 210825 IC Remain : Socket Z
1190 210826 IC Remain : Socket a
1191 210827 IC Remain : Socket b
1192 210828 IC Remain : Socket c
- 80 -
ALTX
ALID
Code Message
1193 210829 IC Remain : Socket d
1194 21082A IC Remain : Socket e
1195 21082B IC Remain : Socket f
1196 21082C IC Remain : Socket 32F
1197 21082D IC Remain : Socket 32B
1198 210911 Yield alarm : Socket Q
1199 210912 Yield alarm : Socket R
1200 210913 Yield alarm : Socket S
1201 210914 Yield alarm : Socket T
1202 210915 Yield alarm : Socket U
1203 210916 Yield alarm : Socket V
1204 210917 Yield alarm : Socket W
1205 210918 Yield alarm : Socket X
1206 210919 Yield alarm : Socket Y
1207 21091A Yield alarm : Socket Z
1208 21091B Yield alarm : Socket a
1209 21091C Yield alarm : Socket b
1210 21091D Yield alarm : Socket c
1211 21091E Yield alarm : Socket d
1212 21091F Yield alarm : Socket e
1213 210920 Yield alarm : Socket f
1214 210A11 Yield alarm : continuous failure : Socket Q
1215 210A12 Yield alarm : continuous failure : Socket R
1216 210A13 Yield alarm : continuous failure : Socket S
1217 210A14 Yield alarm : continuous failure : Socket T
1218 210A15 Yield alarm : continuous failure : Socket U
1219 210A16 Yield alarm : continuous failure : Socket V
1220 210A17 Yield alarm : continuous failure : Socket W
1221 210A18 Yield alarm : continuous failure : Socket X
1222 210A19 Yield alarm : continuous failure : Socket Y
1223 210A1A Yield alarm : continuous failure : Socket Z
1224 210A1B Yield alarm : continuous failure : Socket a
1225 210A1C Yield alarm : continuous failure : Socket b
1226 210A1D Yield alarm : continuous failure : Socket c
1227 210A1E Yield alarm : continuous failure : Socket d
1228 210A1F Yield alarm : continuous failure : Socket e
1229 210A20 Yield alarm : continuous failure : Socket f
1230 220111 Contact Count Alarm : Socket Q
1231 220112 Contact Count Alarm : Socket R
1232 220113 Contact Count Alarm : Socket S
1233 220114 Contact Count Alarm : Socket T
1234 220115 Contact Count Alarm : Socket U
1235 220116 Contact Count Alarm : Socket V
1236 220117 Contact Count Alarm : Socket W
1237 220118 Contact Count Alarm : Socket X
1238 220119 Contact Count Alarm : Socket Y
- 81 -
ALTX
ALID
Code Message
1239 22011A Contact Count Alarm : Socket Z
1240 22011B Contact Count Alarm : Socket a
1241 22011C Contact Count Alarm : Socket b
1242 22011D Contact Count Alarm : Socket c
1243 22011E Contact Count Alarm : Socket d
1244 22011F Contact Count Alarm : Socket e
1245 220120 Contact Count Alarm : Socket f
1255 22041A Continuous NG : DUT-26
1256 22041B Continuous NG : DUT-27
1257 22041C Continuous NG : DUT-28
1258 22041D Continuous NG : DUT-29
1259 22041E Continuous NG : DUT-30
1260 22041F Continuous NG : DUT-31
1262 220811 Fail Rate Alarm : Socket Q
1263 220812 Fail Rate Alarm : Socket R
1264 220813 Fail Rate Alarm : Socket S
1265 220814 Fail Rate Alarm : Socket T
1266 220815 Fail Rate Alarm : Socket U
1267 220816 Fail Rate Alarm : Socket V
1268 220817 Fail Rate Alarm : Socket W
1269 220818 Fail Rate Alarm : Socket X
1270 220819 Fail Rate Alarm : Socket Y
1271 22081A Fail Rate Alarm : Socket Z
1272 22081B Fail Rate Alarm : Socket a
1273 22081C Fail Rate Alarm : Socket b
1274 22081D Fail Rate Alarm : Socket c
1275 22081E Fail Rate Alarm : Socket d
1276 22081F Fail Rate Alarm : Socket e
1277 220820 Fail Rate Alarm : Socket f
1282 030719 IC Mis-set : Shuttle F-UL : L4 (BS???)
1283 03071A IC Mis-set : Shuttle F-UL : L3 (BS???)
1284 03071B IC Mis-set : Shuttle F-UL : R3 (BS???)
- 82 -
ALTX
ALID
Code Message
1285 03071C IC Mis-set : Shuttle F-UL : R4 (BS???)
1290 030817 IC Remain : Shuttle F-UL : L4 (BS???)
1291 030818 IC Remain : Shuttle F-UL : L3 (BS???)
1292 030819 IC Remain : Shuttle F-UL : R3 (BS???)
1293 03081A IC Remain : Shuttle F-UL : R4 (BS???)
1298 040719 IC Mis-set : Shuttle B-UL : L4 (BS???)
1299 04071A IC Mis-set : Shuttle B-UL : L3 (BS???)
1300 04071B IC Mis-set : Shuttle B-UL : R3 (BS???)
1301 04071C IC Mis-set : Shuttle B-UL : R4 (BS???)
1302 040813 IC Remain : Shuttle B-LD : L4 (BS102)
1303 040814 IC Remain : Shuttle B-LD : L3 (BS103)
1304 040815 IC Remain : Shuttle B-LD : R3 (BS104)
1305 040816 IC Remain : Shuttle B-LD : R4 (BS105)
1306 040817 IC Remain : Shuttle B-UL : L4 (BS???)
1307 040818 IC Remain : Shuttle B-UL : L3 (BS???)
1308 040819 IC Remain : Shuttle B-UL : R3 (BS???)
1309 04081A IC Remain : Shuttle B-UL : R4 (BS???)
1310 140001 Return to origin : Contactor : B-Y
1311 140002 Initialize not completed : Contactor : B-Y
1312 140101 Position Error : Contactor : B-Y
1313 140201 Motor trouble : Contactor : B-Y
1314 000032 Waiting for start permission
1315 210102 Position Error : CCU Clamp
1316 210301 Cylinder Motion Error : CCU Clamp
1317 000127 Electrode not attached in the socket ionizer
1318 000033 Check servo driver EMG-STP signal
1319 000034 During socket cleaning
1320 000128 Socket ionizer air flow rate inappropriate
1321 000129 Socket ion balance alarm
1322 000035 Wait for the recipe setting (Auto Lot Setting)
1323 000036 Reserved the operation start. (Auto Lot Setting)
1324 000037 Communication trouble (Auto Lot Setting)
1325 000038 Enter Number (Auto Lot Setting)
1326 000039 Error (Auto Lot Setting)
1327 00003A Lot ending process (Auto Lot Setting)
1328 00003B Handler deadlock.....
1329 150001 Return to origin : Soak Shuttle
1330 150002 Initialize not completed : Soak Shuttle
- 83 -
ALTX
ALID
Code Message
1331 150101 Position Error : Soak Shuttle
1332 150201 Motor trouble : Soak Shuttle
1333 150701 IC Mis-set : Soak Shuttle-F
1334 150702 IC Mis-set : Soak Shuttle-B
1335 150703 IC Mis-set : Soak Shuttle-C
1336 150801 IC Remain : Soak Shuttle-F
1337 150802 IC Remain : Soak Shuttle-B
1338 150803 IC Remain : Soak Shuttle-C
1339 000206 Tray confirmation : UL1 Tray
1343 00020A Tray confirmation : UL5 Tray
1344 00020B Tray confirmation : UL6 Tray
1345 010307 Cylinder Motion Error : LD Stacker : Latch (Left Back)
1346 010308 Cylinder Motion Error : LD Stacker : Latch (Right Back)
1347 010309 Cylinder Motion Error : LD Stacker : Latch (Left Front)
1348 01030A Cylinder Motion Error : LD Stacker : Latch (Right Front)
1349 00003C Conditioning : Cold temp.
1350 00003D Conditioning : Cold temp.(Auto-start)
1351 1F0007 Completed preparations : Cold temp.
1352 1F022D Temp. controller trouble : Shuttle F-UL
1353 1F022E Temp. controller trouble : Shuttle B-UL
1354 1F022F Temp. controller trouble : Defrost plate
1355 1F0233 Temp. sensor trouble : Shuttle F-UL
1356 1F0234 Temp. sensor trouble : Shuttle B-UL
1357 1F0235 Temp. sensor trouble : Defrost plate
1358 1F0317 Temp. Error : Shuttle F-UL
1359 1F0318 Temp. Error : Shuttle B-UL
1360 1F0319 Temp. Error : Defrost plate
1361 1F0419 Temp. Limit : Shuttle F-UL
1362 1F041A Temp. Limit : Shuttle B-UL
1363 1F041B Temp. Limit : Defrost plate
1364 1F0517 Fault Warning : Shuttle F-UL
1365 1F0518 Fault Warning : Shuttle B-UL
1366 1F0519 Fault Warning : Defrost plate
1367 00003E Sort Error
1368 1F0008 No defrost plate
1369 1F0230 Temp. controller trouble : SoakBox bottom surface
1370 1F0231 Temp. controller trouble : Temp. balance adjust (Soak
shuttle)
1371 1F0232 Temp. controller trouble : Temp. balance adjust (Socket)
1372 1F0236 Temp. sensor trouble : SoakBox bottom surface
1373 1F0237 Temp. sensor trouble : Temp. balance adjust (Soak shuttle)
1374 1F0238 Temp. sensor trouble : Temp. balance adjust (Socket)
1375 1F031A Temp. Error : SoakBox bottom surface
1376 1F031B Temp. Error : Temp. balance adjustment (Soak shuttle)
- 84 -
ALTX
ALID
Code Message
1377 1F031C Temp. Error : Temp. balance adjustment (Socket)
1378 1F041C Temp. Limit : SoakBox bottom surface
1379 1F041D Temp. Limit : Temp. balance adjustment (Soak shuttle)
1380 1F041E Temp. Limit : Temp. balance adjustment (Socket)
1381 1F051A Fault Warning : SoakBox bottom surface
1382 1F051B Fault Warning : Temp. balance adjustment (Soak shuttle)
1383 1F051C Fault Warning : Temp. balance adjustment (Socket)
1384 1F041F Temp. Limit : ThermoJetter (Socket)
1385 060431 Pickup Error : Contactor F : A (Soak Shuttle)
1386 060432 Pickup Error : Contactor F : B (Soak Shuttle)
1387 060433 Pickup Error : Contactor F : C (Soak Shuttle)
1388 060434 Pickup Error : Contactor F : D (Soak Shuttle)
1389 060435 Pickup Error : Contactor F : E (Soak Shuttle)
1390 060436 Pickup Error : Contactor F : F (Soak Shuttle)
1391 060437 Pickup Error : Contactor F : G (Soak Shuttle)
1392 060438 Pickup Error : Contactor F : H (Soak Shuttle)
1393 060439 Pickup Error : Contactor F : I (Soak Shuttle)
1394 06043A Pickup Error : Contactor F : J (Soak Shuttle)
1395 06043B Pickup Error : Contactor F : K (Soak Shuttle)
1396 06043C Pickup Error : Contactor F : L (Soak Shuttle)
1397 06043D Pickup Error : Contactor F : M (Soak Shuttle)
1398 06043E Pickup Error : Contactor F : N (Soak Shuttle)
1399 06043F Pickup Error : Contactor F : O (Soak Shuttle)
1400 060440 Pickup Error : Contactor F : P (Soak Shuttle)
1401 070431 Pickup Error : Contactor B : A (Soak Shuttle)
1402 070432 Pickup Error : Contactor B : B (Soak Shuttle)
1403 070433 Pickup Error : Contactor B : C (Soak Shuttle)
1404 070434 Pickup Error : Contactor B : D (Soak Shuttle)
1405 070435 Pickup Error : Contactor B : E (Soak Shuttle)
1406 070436 Pickup Error : Contactor B : F (Soak Shuttle)
1407 070437 Pickup Error : Contactor B : G (Soak Shuttle)
1408 070438 Pickup Error : Contactor B : H (Soak Shuttle)
1409 070439 Pickup Error : Contactor B : I (Soak Shuttle)
1410 07043A Pickup Error : Contactor B : J (Soak Shuttle)
1411 07043B Pickup Error : Contactor B : K (Soak Shuttle)
1412 07043C Pickup Error : Contactor B : L (Soak Shuttle)
1413 07043D Pickup Error : Contactor B : M (Soak Shuttle)
1414 07043E Pickup Error : Contactor B : N (Soak Shuttle)
1415 07043F Pickup Error : Contactor B : O (Soak Shuttle)
1416 070440 Pickup Error : Contactor B : P (Soak Shuttle)
1417 00003F Waiting for input of lot information.
1418 000040 Terminated of Temporary Termination.
1419 150804 IC Remain : Soak Shuttle (Contactor A)
1420 150805 IC Remain : Soak Shuttle (Contactor B)
1421 150806 IC Remain : Soak Shuttle (Contactor C)
1422 150807 IC Remain : Soak Shuttle (Contactor D)
- 85 -
ALTX
ALID
Code Message
1423 150808 IC Remain : Soak Shuttle (Contactor E)
1424 150809 IC Remain : Soak Shuttle (Contactor F)
1425 15080A IC Remain : Soak Shuttle (Contactor G)
1426 15080B IC Remain : Soak Shuttle (Contactor H)
1427 15080C IC Remain : Soak Shuttle (Contactor I)
1428 15080D IC Remain : Soak Shuttle (Contactor J)
1429 15080E IC Remain : Soak Shuttle (Contactor K)
1430 15080F IC Remain : Soak Shuttle (Contactor L)
1431 150810 IC Remain : Soak Shuttle (Contactor M)
1432 150811 IC Remain : Soak Shuttle (Contactor N)
1433 150812 IC Remain : Soak Shuttle (Contactor O)
1434 150813 IC Remain : Soak Shuttle (Contactor P)
1435 080801 IC Remain : Defrost Plate (UD transfer : A)
1436 080802 IC Remain : Defrost Plate (UD transfer : B)
1437 080803 IC Remain : Defrost Plate (UD transfer : C)
1438 080804 IC Remain : Defrost Plate (UD transfer : D)
1439 080805 IC Remain : Defrost Plate (UD transfer : E)
1440 080806 IC Remain : Defrost Plate (UD transfer : F)
1441 080807 IC Remain : Defrost Plate (UD transfer : G)
1442 080808 IC Remain : Defrost Plate (UD transfer : H)
1443 1F0420 Temp. Limit : SoakBox top surface
1444 1F0421 Temp. Limit : SoakBox Around
1445 000041 Door open : Contactor Left-side
1446 000042 Door open : Contactor Right-side
1447 000043 Door open : Contactor Back-side
1448 000044 Door open : Contactor Upper-side
1449 00012A Pressure Error : Compressed Dry-air
1450 00012B Abnormal condition : ThermoJetter
1451 1F0103 Communication Error : ThermoJetter
1452 00012C During validation of ion balance (Socket)
1453 1F03FF Temp. Error : ThermoJetter (Socket)
1454 060304 During pad warm-up: contactor F
1455 070304 During pad warm-up: contactor B
1456 00012D Local mode : ThermoJetter
1457 060531 Transfer Error : Contactor F : A (Soak Shuttle>>)
1458 060532 Transfer Error : Contactor F : B (Soak Shuttle>>)
1459 060533 Transfer Error : Contactor F : C (Soak Shuttle>>)
1460 060534 Transfer Error : Contactor F : D (Soak Shuttle>>)
1461 060535 Transfer Error : Contactor F : E (Soak Shuttle>>)
1462 060536 Transfer Error : Contactor F : F (Soak Shuttle>>)
1463 060537 Transfer Error : Contactor F : G (Soak Shuttle>>)
1464 060538 Transfer Error : Contactor F : H (Soak Shuttle>>)
1465 060539 Transfer Error : Contactor F : I (Soak Shuttle>>)
1466 06053A Transfer Error : Contactor F : J (Soak Shuttle>>)
1467 06053B Transfer Error : Contactor F : K (Soak Shuttle>>)
1468 06053C Transfer Error : Contactor F : L (Soak Shuttle>>)
- 86 -
ALTX
ALID
Code Message
1469 06053D Transfer Error : Contactor F : M (Soak Shuttle>>)
1470 06053E Transfer Error : Contactor F : N (Soak Shuttle>>)
1471 06053F Transfer Error : Contactor F : O (Soak Shuttle>>)
1472 060540 Transfer Error : Contactor F : P (Soak Shuttle>>)
1473 070531 Transfer Error : Contactor B : A (Soak Shuttle>>)
1474 070532 Transfer Error : Contactor B : B (Soak Shuttle>>)
1475 070533 Transfer Error : Contactor B : C (Soak Shuttle>>)
1476 070534 Transfer Error : Contactor B : D (Soak Shuttle>>)
1477 070535 Transfer Error : Contactor B : E (Soak Shuttle>>)
1478 070536 Transfer Error : Contactor B : F (Soak Shuttle>>)
1479 070537 Transfer Error : Contactor B : G (Soak Shuttle>>)
1480 070538 Transfer Error : Contactor B : H (Soak Shuttle>>)
1481 070539 Transfer Error : Contactor B : I (Soak Shuttle>>)
1482 07053A Transfer Error : Contactor B : J (Soak Shuttle>>)
1483 07053B Transfer Error : Contactor B : K (Soak Shuttle>>)
1484 07053C Transfer Error : Contactor B : L (Soak Shuttle>>)
1485 07053D Transfer Error : Contactor B : M (Soak Shuttle>>)
1486 07053E Transfer Error : Contactor B : N (Soak Shuttle>>)
1487 07053F Transfer Error : Contactor B : O (Soak Shuttle>>)
1488 070540 Transfer Error : Contactor B : P (Soak Shuttle>>)
1489 00012E Temp. control stop : ThermoJetter
1490 000045 No soak box top cover
1491 00012F Refrigerator stop : ThermoJetter
1492 000046 Dew-point temperature anomaly : Dew-point meter 1
1493 000047 Dew-point temperature anomaly : Dew-point meter 2
1494 000048 Waiting for input of test gross.
1495 21082E Double device detection : Contactor F (L)
1496 21082F Double device detection : Contactor F (R)
1497 210830 Double device detection : Contactor B (L)
1498 210831 Double device detection : Contactor B (R)
1499 03071D Mis-set : Shuttle F-LD : L1b (BS120)
1500 03071E Mis-set : Shuttle F-LD : R1b (BS121)
1501 03071F Mis-set : Shuttle F-UL : L1b (BS124)
1502 030720 Mis-set : Shuttle F-UL : R1b (BS125)
1503 03081B IC Remain : Shuttle F-LD : L1b (BS120)
1504 03081C IC Remain : Shuttle F-LD : R1b (BS121)
1505 03081D IC Remain : Shuttle F-UL : L1b (BS124)
1506 03081E IC Remain : Shuttle F-UL : R1b (BS125)
1507 04071D Mis-set : Shuttle B-LD : L1b (BS122)
1508 04071E Mis-set : Shuttle B-LD : R1b (BS123)
1509 04071F Mis-set : Shuttle B-UL : L1b (BS126)
1510 040720 Mis-set : Shuttle B-UL : R1b (BS127)
1511 04081B IC Remain : Shuttle B-LD : L1b (BS122)
1512 04081C IC Remain : Shuttle B-LD : R1b (BS123)
1513 04081D IC Remain : Shuttle B-UL : L1b (BS126)
1514 04081E IC Remain : Shuttle B-UL : R1b (BS127)
- 87 -
ALTX
ALID
Code Message
1515 00020C UL transfer : handling selection of pickup miss IC
1516 0B2002 Tray direction incorrect : UL1 tray
1517 0C2002 Tray direction incorrect : UL2 tray
1518 0D2002 Tray direction incorrect : UL3 tray
1519 000604 QR code reader error : Shuttle F-F
1520 000605 QR code reader error : Shuttle F-B
1521 000606 QR code reader error : Shuttle B-F
1522 000607 QR code reader error : Shuttle B-B
1523 021000 Please confirm no remaining IC on LD tray.
1524 1E0401 Waiting for tester communication
1525 160001 Return to origin : UL3 shuttle
1526 160002 Initialize not completed : UL3 shuttle
1527 160101 Position Error : UL3 shuttle
1528 160201 Motor trouble : UL3 shuttle
1529 160701 IC Mis-set : UL3 shuttle
1530 160801 IC Remain : UL3 shuttle
1531 170001 Return to origin : UL3 P&P
1532 170002 Initialize not completed : UL3 P&P
1533 170003 Tape & Reel : Not ready
1534 170004 Tape & Reel : ERROR
1535 170005 Tape & Reel : JAM
1536 170006 Tape & Reel : WARNING
1537 170101 Position Error : UL3 P&P
1538 170201 Motor trouble : UL3 P&P
1539 170401 Pickup Error : UL3 P&P : A
1540 170402 Pickup Error : UL3 P&P : B
1541 170403 Pickup Error : UL3 P&P : Ｃ
1542 170404 Pickup Error : UL3 P&P : D
1543 170601 Pickup Sensor Trouble : UL3 P&P : A
1544 170602 Pickup Sensor Trouble : UL3 P&P : B
1545 170603 Pickup Sensor Trouble : UL3 P&P : C
1546 170604 Pickup Sensor Trouble : UL3 P&P : D
1547 170007 Tape & Reel : Finish one lot.
1548 180001 Return to origin : UL3 Recovery transfer
1549 180002 Initialize not completed : UL3 Recovery transfer
1550 180101 Position Error : UL3 Recovery transfer X
1551 180102 Position Error : UL3 Recovery transfer Z
1552 180201 Motor trouble : UL3 Recovery transfer X
1553 180202 Motor trouble : UL3 Recovery transfer Z
1554 180401 Pickup Error : UL3 Recovery transfer
1555 180501 Transfer Error : UL3 Recovery transfer
1556 180601 Pickup Sensor Trouble : UL3 Recovery transfer
1557 000049 Door open : Tape & Reel unit
1558 00020D UL3 Recovery transfer : handling selection of pickup miss IC
1559 00004A Tape & Reel unit : Camera Position Error
1560 170301 Cylinder Motion Error : UL3 P&P
- 88 -
ALTX
ALID
Code Message
1561 00004B Waiting for a Lot-Cancel procedure
1562 090307 Cylinder Motion Error : TB1 Stacker : Latch (Left Back)
1563 090308 Cylinder Motion Error : TB1 Stacker : Latch (Right Back)
1564 090309 Cylinder Motion Error : TB1 Stacker : Latch (Left Front)
1565 09030A Cylinder Motion Error : TB1 Stacker : Latch (Right Front)
1566 0A0307 Cylinder Motion Error : TB2 Stacker : Latch (Left Back)
1567 0A0308 Cylinder Motion Error : TB2 Stacker : Latch (Right Back)
1568 0A0309 Cylinder Motion Error : TB2 Stacker : Latch (Left Front)
1569 0A030A Cylinder Motion Error : TB2 Stacker : Latch (Right Front)
1570 00004C Each individual mode
1571 00004D Teach mode
1572 00004E Contactor drop prevention device attached state
1573 00004F Vacuum pump power OFF
1574 000050 Mode switch input signal abnormality
1575 000051 Front door Unlocked
1576 000052 Reach the automatic mask limit
1577 000053 Vacuum pump start waiting
1578 000054 Operation not ready
1579 000700 QR code reader continuous NG : Shuttle F-F
1580 000701 QR code reader continuous NG : Shuttle F-B
1581 000702 QR code reader continuous NG : Shuttle B-F
1582 000703 QR code reader continuous NG : Shuttle B-B
1583 000055 Air compressor trouble
1584 000056 During Socket Cleaning
1585 000057 Change cleaning devices
1586 000058 Socket Cleaning Aborting
1587 000059 Socket Cleaning Aborted
1588 00005A Door lock incomplete : Front side
1589 00005B Door lock incomplete : Back side
1590 00005C Door lock incomplete : Right side
1591 00005D Door lock incomplete : Left side
1592 00005E Door lock incomplete : Tape & Reel unit
1598 000135 ESD Monitor Trouble : LD-F
1599 000136 ESD Monitor Trouble : LD-B
1600 000137 ESD Monitor Trouble : UL-F
1601 000138 ESD Monitor Trouble : UL-B
1602 1F0239 Temp. controller trouble : Camber Blower
1603 1F023A Temp. controller trouble : Camber Blower R
1604 1F023B Temp. controller trouble : Jet Heater L
1605 1F023C Temp. controller trouble : Jet Heater R
1606 1F023D Temp. controller trouble : Contactor F Auxiliary Heater
- 89 -
ALTX
ALID
Code Message
1607 1F023E Temp. controller trouble : Contactor B Auxiliary Heater
1608 1F031D Temp. Error : Camber Blower
1609 1F031E Temp. Error : Camber Blower R
1610 1F031FD Temp. Error : Jet Heater L
1611 1F0320 Temp. Error : Jet Heater R
1612 1F0321 Temp. Error : Contactor F Auxiliary Heater
1613 1F0322 Temp. Error : Contactor B Auxiliary Heater
1614 1F0422 Temp. Limit : Chamber Blower L
1615 1F0423 Temp. Limit : Chamber Blower R
1616 1F0424 Temp. Limit : Jet Heater L
1617 1F0425 Temp. Limit : Jet Heater R
1618 1F0426 Temp. Limit : Contactor F Auxiliary Heater
1619 1F0427 Temp. Limit : Contactor B Auxiliary Heater
1620 1F051D Fault Warning : Chamber Blower L
1621 1F051E Fault Warning : Chamber Blower R
1622 1F051F Fault Warning : Jet Heater L
1623 1F0520 Fault Warning : Jet Heater R
1624 1F0521 Fault Warning : Contactor F Auxiliary Heater
1625 1F0522 Fault Warning : Contactor B Auxiliary Heater
1626 1F023F Temp. sensor trouble : Camber Blower
1627 1F0240 Temp. sensor trouble : Camber Blower R
1628 1F0241 Temp. sensor trouble : Jet Heater L
1629 1F0242 Temp. sensor trouble : Jet Heater R
1630 1F0243 Temp. sensor trouble : Contactor F Auxiliary Heater
1631 1F0244 Temp. sensor trouble : Contactor B Auxiliary Heater
1632 1F0601 Fan trouble : Chamber blower L
1633 1F0602 Fan trouble : Chamber blower R
1634 1F0603 Air flow anomaly : Jet Heater L
1635 1F0604 Air flow anomaly : Jet Heater R
1636 2F0001 Return to origin : Axis of rotation A
1637 2F0002 Return to origin : Axis of rotation B
1638 2F0003 Return to origin : Axis of rotation C
1639 2F0004 Return to origin : Axis of rotation D
1640 2F0005 Initialize not completed : Axis of rotation A
1641 2F0006 Initialize not completed : Axis of rotation B
1642 2F0007 Initialize not completed : Axis of rotation C
1643 2F0008 Initialize not completed : Axis of rotation D
1644 2F0009 Waiting for tester preparation (Rotation unit)
1645 2F000A Waiting for the handler is launched (Rotation unit)
1646 2F000B Wait for update (Rotation unit)
1647 2F000C Door Unlocked (Rotation unit)
1648 2F000D Door open : Rotation unit Left side
1649 2F000E Door open : Rotation unit Back side
1650 2F000F Door open : Rotation unit Right side
1651 2F0010 Connector cover open : Reference socket
- 90 -
ALTX
ALID
Code Message
1652 2F0011 Connector cover open : Axis of rotation A
1653 2F0012 Connector cover open : Axis of rotation B
1654 2F0013 Connector cover open : Axis of rotation C
1655 2F0014 Connector cover open : Axis of rotation D
1656 2F0101 Position Error : Axis of rotation A
1657 2F0102 Position Error : Axis of rotation B
1658 2F0103 Position Error : Axis of rotation C
1659 2F0104 Position Error : Axis of rotation D
1660 2F0105 Cooling fan trouble : Rotation unit
1661 2F0201 Motor trouble : Axis of rotation A
1662 2F0202 Motor trouble : Axis of rotation B
1663 2F0203 Motor trouble : Axis of rotation C
1664 2F0204 Motor trouble : Axis of rotation D
1665 2F0301 Deviation error of continuous rotation (Rotation unit)
1666 2E0300 Sensor trouble : Shuttle F-LD
1667 2E0400 Sensor trouble : Shuttle B-LD
1668 2E2100 Sensor trouble : Socket X
1669 2E2110 Sensor trouble : Socket Y
1670 200302 Communication Error : RS485 (COM8)
1671 2F0401 Communication trouble : Rotation unit
1672 2F0000 Confirmation rotation unit state
1673 300000 空き nf
1674 300001 IC Remain : Cam L1
1675 300002 IC Remain : Cam L2
1676 300003 IC Remain : :Cam R1
1677 300004 IC Remain : :Cam R2
1678 300011 Cam trouble : Cam L1
1679 300012 Cam trouble : Cam L2
1680 300013 Cam trouble : Cam R1
1681 300014 Cam trouble : Cam R2
1682 000800 Communication trouble : Ionizer controller 1
1683 000801 Communication trouble : Ionizer controller 2
1684 000802 Ionizer sensor trouble : LD (IOS01)
1685 000803 Ionizer sensor trouble : Shuttle LD (IOS02)
1686 000804 Ionizer sensor trouble : Shuttle UL (IOS03)
1687 000805 Ionizer sensor trouble : UL (IOS04)
1688 000806 Ionizer sensor trouble : Socket (IOS05)
1689 200400 DIO module trouble : USIO-32
1690 2E0301 Sensor trouble : Shuttle F-UL
1691 2E0401 Sensor trouble : Shuttle B-UL
1692 000807 Decay time measurement mode
1693 000808 Measuring decay time
1694 1F0245 Temp. controller trouble : Contactor F-I line [H41]
1695 1F0246 Temp. controller trouble : Contactor F-J line [H42]
1696 1F0247 Temp. controller trouble : Contactor F-K line [H43]
- 91 -
ALTX
ALID
Code Message
1697 1F0248 Temp. controller trouble : Contactor F-L line [H44]
1698 1F0249 Temp. controller trouble : Contactor B-I line [H51]
1699 1F024A Temp. controller trouble : Contactor B-J line [H52]
1700 1F024B Temp. controller trouble : Contactor B-K line [H53]
1701 1F024C Temp. controller trouble : Contactor B-L line [H54]
1702 1F024D Temp. controller trouble : Contactor F-M line [H45]
1703 1F024E Temp. controller trouble : Contactor F-N line [H46]
1704 1F024F Temp. controller trouble : Contactor F-O line [H47]
1705 1F0250 Temp. controller trouble : Contactor F-P line [H48]
1706 1F0251 Temp. controller trouble : Contactor B-M line [H55]
1707 1F0252 Temp. controller trouble : Contactor B-N line [H56]
1708 1F0253 Temp. controller trouble : Contactor B-O line [H57]
1709 1F0254 Temp. controller trouble : Contactor B-P line [H58]
1710 1F0255 Temp. sensor trouble : Contactor F-I line [H41]
1711 1F0256 Temp. sensor trouble : Contactor F-J line [H42]
1712 1F0257 Temp. sensor trouble : Contactor F-K line [H43]
1713 1F0258 Temp. sensor trouble : Contactor F-L line [H44]
1714 1F0259 Temp. sensor trouble : Contactor B-I line [H51]
1715 1F025A Temp. sensor trouble : Contactor B-J line [H52]
1716 1F025B Temp. sensor trouble : Contactor B-K line [H53]
1717 1F025C Temp. sensor trouble : Contactor B-L line [H54]
1718 1F025D Temp. sensor trouble : Contactor F-M line [H45]
1719 1F025E Temp. sensor trouble : Contactor F-N line [H46]
1720 1F025F Temp. sensor trouble : Contactor F-O line [H47]
1721 1F0260 Temp. sensor trouble : Contactor F-P line [H48]
1722 1F0261 Temp. sensor trouble : Contactor B-M line [H55]
1723 1F0262 Temp. sensor trouble : Contactor B-N line [H56]
1724 1F0263 Temp. sensor trouble : Contactor B-O line [H57]
1725 1F0264 Temp. sensor trouble : Contactor B-P line [H58]
1726 1F0323 Temp. Error : Contactor F-I line [H41]
1727 1F0324 Temp. Error : Contactor F-J line [H42]
1728 1F0325 Temp. Error : Contactor F-K line [H43]
1729 1F0326 Temp. Error : Contactor F-L line [H44]
1730 1F0327 Temp. Error : Contactor B-I line [H51]
1731 1F0328 Temp. Error : Contactor B-J line [H52]
1732 1F0329 Temp. Error : Contactor B-K line [H53]
1733 1F032A Temp. Error : Contactor B-L line [H54]
1734 1F032B Temp. Error : Contactor F-M line [H45]
1735 1F032C Temp. Error : Contactor F-N line [H46]
1736 1F032D Temp. Error : Contactor F-O line [H47]
1737 1F032E Temp. Error : Contactor F-P line [H48]
1738 1F032F Temp. Error : Contactor B-M line [H55]
1739 1F0330 Temp. Error : Contactor B-N line [H56]
1740 1F0331 Temp. Error : Contactor B-O line [H57]
1741 1F0332 Temp. Error : Contactor B-P line [H58]
- 92 -
ALTX
ALID
Code Message
1742 1F0428 Temp. Limit : Contactor F-I line [H41]
1743 1F0429 Temp. Limit : Contactor F-J line [H42]
1744 1F042A Temp. Limit : Contactor F-K line [H43]
1745 1F042B Temp. Limit : Contactor F-L line [H44]
1746 1F042C Temp. Limit : Contactor B-I line [H51]
1747 1F042D Temp. Limit : Contactor B-J line [H52]
1748 1F042E Temp. Limit : Contactor B-K line [H53]
1749 1F042F Temp. Limit : Contactor B-L line [H54]
1750 1F0430 Temp. Limit : Contactor F-M line [H45]
1751 1F0431 Temp. Limit : Contactor F-N line [H46]
1752 1F0432 Temp. Limit : Contactor F-O line [H47]
1753 1F0433 Temp. Limit : Contactor F-P line [H48]
1754 1F0434 Temp. Limit : Contactor B-M line [H55]
1755 1F0435 Temp. Limit : Contactor B-N line [H56]
1756 1F0436 Temp. Limit : Contactor B-O line [H57]
1757 1F0437 Temp. Limit : Contactor B-P line [H58]
1758 1F0523 Fault Warning : Contactor F-I line [H41]
1759 1F0524 Fault Warning : Contactor F-J line [H42]
1760 1F0525 Fault Warning : Contactor F-K line [H43]
1761 1F0526 Fault Warning : Contactor F-L line [H44]
1762 1F0527 Fault Warning : Contactor B-I line [H51]
1763 1F0528 Fault Warning : Contactor B-J line [H52]
1764 1F0529 Fault Warning : Contactor B-K line [H53]
1765 1F052A Fault Warning : Contactor B-L line [H54]
1766 1F052B Fault Warning : Contactor F-M line [H45]
1767 1F052C Fault Warning : Contactor F-N line [H46]
1768 1F052D Fault Warning : Contactor F-O line [H47]
1769 1F052E Fault Warning : Contactor F-P line [H48]
1770 1F052F Fault Warning : Contactor B-M line [H55]
1771 1F0530 Fault Warning : Contactor B-N line [H56]
1772 1F0531 Fault Warning : Contactor B-O line [H57]
1773 1F0532 Fault Warning : Contactor B-P line [H58]
1774 000503 Connection error : Test CIM
1775 000504 Quantity mismatch : Test CIM
1776 000505 Communication timeout : Test CIM
1777 000506 Lot end signal mismatch : Test CIM
1778 120900 Set IC : IC-rotator : LD
1779 130900 Set IC : IC-rotator : UL
1780 030900 Set IC : Shuttle F-LD
1781 030901 Set IC : Shuttle F-UL
1782 040900 Set IC : Shuttle B-LD
1783 040901 Set IC : Shuttle B-UL
1784 210900 Set IC : Socket
1785 020900 ＩＣセット : Set IC : Preheat 1Test
1786 020901 ＩＣセット : Set IC : Preheat 2Test
- 93 -
ALTX
ALID
Code Message
1787 220B00 Suction pad count : LD transfer
1788 220B10 Suction pad count : Contactor F
1789 220B20 Suction pad count : Contactor B
1790 220B30 Suction pad count : UL transfer
1791 000139 Air Clean Unit Error
1792 00005F IC collection box opened
1793 000060 Waiting for IC collection
1794 000061 Lot collection completed
1795 000900 Executing Run Check
Table 59 Alarms Supported by Equipment
- 94 -

S9 SECS GEM Interface Manual v1.2

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S9 SECS GEM Interface Manual v1.2

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SYNAX

SECS/GEM Interface Manual for

1.1 HSMS Single session mode (SEMI E37.1) .......................................................................................... 7

1.2 SECS-II (SEMI E5) ................................................................................................................................. 8

2. SECS-II MESSAGE SUMMARY................................................................................. 9

2.1 Host-Originated Transaction ............................................................................................................... 9

2.2 Equipment-Originated Transaction................................................................................................... 10

3. SECS-II MESSAGE DETAILS .................................................................................. 11

3.1 Data Items ............................................................................................................................................ 11

3.2 Host-Originated Transactions ........................................................................................................... 15

3.3 Equipment-Originated Transactions................................................................................................. 30

4. SEMI E30 GEM – STATE MODELS, CAPABILITIES AND SCENARIOS ............... 35

4.1 Communications ................................................................................................................................. 36

4.2 Control ................................................................................................................................................. 39

4.4 ALarms ................................................................................................................................................. 44

4.5 Remote Control ................................................................................................................................... 44

4.6 Equipment Constants ......................................................................................................................... 44

4.7 Process Program ................................................................................................................................ 45

4.8 Terminal Services ............................................................................................................................... 46

4.9 Error Messages ................................................................................................................................... 46

4.10 Clock ................................................................................................................................................. 47

4.11 Spooling ........................................................................................................................................... 48

5. SUPPORTED COMMANDS, VARIABLES, EVENTS AND ALARMS ..................... 51

5.1 Remote And Host Commands ........................................................................................................... 51

5.2 Variables Dictionary ........................................................................................................................... 52

5.3 Event List ............................................................................................................................................. 53

5.4 Alarm Reports ..................................................................................................................................... 55

1.1 HSMS SINGLE SESSION MODE (SEMI E37.1)

The following HSMS protocol parameters are configurable at the equipment:

2.1 HOST-ORIGINATED TRANSACTION

3.1 DATA ITEMS

3.1.1 DAT A DICTIONARY

3.1.2 STATUS VARIABLES

3.1.3 EQUIPMENT CONSTANTS

3.1.4 COLLECTION EVENTS

3.2.1 SXF0 ABORT TRANSACTION

3.2.2 S1F1 ARE YOU THERE R EQUEST (R)

3.2.3 S1F2 ON LINE DAT A (D)

3.2.4 S1F3 SELECTED EQUIPM ENT ST ATUS REQUEST (SSR)

3.2.5 S1F4 SELECTED EQUIPM ENT ST ATUS DAT A (SSD)

3.2.7 S1F12 ST ATUS VARIABLE NAM ELIST REPLY (SVNRR)

3.2.8 S1F13 ESTABLISH COMM UNICATION REQUEST (CR)

3.2.9 S1F14 ESTABLISH COMM UNICATION REQUEST AC KNOWLEDGE (CRA)

3.2.10 S1F15 REQUEST OFF-LINE (ROFL)

3.2.12 S1F17 REQUEST ON-LINE (ROFL)

3.2.13 S1F18 ON-LINE ACKNOWLEDGE (OFLA)

3.2.14 S2F13 EQUIPMENT CONST ANT REQUEST (ECR)

3.2.15 S2F14 EQUIPMENT CONST ANT DAT A (ECD)

3.2.17 S2F16 NEW EQUIPMENT CONSTANT ACKNOWLEDGE (ECA)

3.2.18 S2F17 DAT A AND TIME REQUEST (DTR)

3.2.19 S2F18 DAT A AND TIME DAT A (DTD)

3.2.20 S2F21 REMOTE COMMAND SEND (RCS)

3.2.21 S2F22 REMOTE COMMAND ACKNOWLEDGE (RCA)

3.2.23 S2F24 TRACE INITIALI ZE ACKNOWLEDGE (TIA)

3.2.24 S2F29 EQUIPMENT CONST ANT NAM ELIST (ECNR)

3.2.26 S2F31 DAT A AND TIME SET REQUEST (DTS)

3.2.27 S2F32 DATE AND TIME ACKNOWLEDGE (DTA)

3.2.29 S2F34 DEFINED REPORT ACKNOWLEDGE (DRA)

3.2.31 S2F36 LINK EVENT REPORT ACKNOWLEDGE (LER A)

3.2.33 S2F38 ENABLE/DISABLE EVENT REPORT ACKNOW LEDGE (EERA)

3.2.34 S2F41 HOST COMM AND S END (HCS)

3.2.36 S2F43 RESET SPOOLING STREAM S AND FUNCTIONS (RSSF)

3.2.38 S5F3 ENABLE/DISABLE ALARM SEND (EAS)

3.2.39 S5F4 ENABLE/DISABLE ALARM ACKNOWLEDGE (E AA)