Using X-ray fluorescence analysis, chemical elements can be detected –
but also the thickness of coatings can be measured.
Article in JOT Special Electroplating 05/21
Measurement System Analysis Made Easy
With measurement system analysis (MSA), mea-
surement processes can be enabled and optimised.
To do this, the user must identify the relevant influ-
encing factors of the MSA, reduce standard deviation
and systematic measured value deviation. An X-ray
fluorescence measuring instrument offers excellent
advantages in this respect.
An industrial plant is only as efficient as the production
equipment and processes used. Regular quality inspec-
tions are indispensable to ensure the stability of the
manufacturing process and consistent product quality
with it. However, quality tests only provide significant
results if they are performed based on efficient measur-
ing methods.
Using the measurement system analysis (MSA), not
only a measurement process is released, but it also
enables its optimisation. For example, measurement
times, asset and operating costs can be minimised by
employing previously defined target values. There are
different definitions for the MSA, including those of the
Automotive Industry Action Group (AIAG) or the German
Association of the Automotive Industry (VDA). Compa-
ny guidelines have been established in practice that is
similar in procedure and method to the MSA guideline
from Bosch (Booklet 10). Therefore, this is the basis for
further explanations.
The primary goal of the MSA is to make a clear state-
ment about the suitability or unsuitability of a measure-
ment process for a given measurement task. In addition,
users can utilise the collected data to identify the essen-
tial influencing factors and optimise the measurement
process. The elements can be divided into the catego-
ries human, environment, measuring object, measuring
method, measuring equipment, mounting device and
evaluation method. This means that the user is just as
much part of the measurement process as the calibra-
tion standard or the air conditioning system.
Every MSA is preceded by an analysis of the resolution
of the measuring equipment used. Prerequisite: the
resolution must be sufficiently high for the upcoming
measurement. Only if that is the case, the required mea-
sured values can be reliably read and determined.
Focus on Measuring Equipment and Evaluation Method
The MSA for an X-ray fluorescence (XRF) analysis spec-
trometer is divided into several type gage studies. In
type 1 gage study, the basic applicability of the mea-
surement process is checked. The focus is on accuracy
and repeatability. For this purpose, the position and
spread of the measured values in a given tolerance field
are analysed. Based on the standard deviation of the
measured values and the systematic measurement de-
viation, the measuring equipment potential, the potential
capability index Cg and the critical capability index Cgk
can be calculated. The systematic measurement error is
only considered for Cgk. If Cg and Cgk meet the speci-
fied requirements, the measuring instrument is capable
for the specific measuring task. Since a standard with
a known feature value is used in type 1 gage study,
influencing variables such as the object to be measured,
people and the environment are not relevant. The stan-
dard is typically measured 50 times in a short sequence.
A qualified person who does not intervene in the mea-
surement operates the process.

Problems and Possible Solutions

If the variance of the readings is too big, the result is an

unacceptable Cg value. The simplest solution for this
is to increase the measurement time. Because of the Increasing the measurement time is the easiest way to improve the vari-
ance for XRF analysis. In this example, the measurement was conducted
usually dominating counting statistics, the quadrupling on 0.1 μm gold layers.
of the measurement time halves the standard deviation.
This results in the following relationship for determining
the target measuring time:

ttarget = Cgtarget2 / Cgactual2 × tactual

In order to optimise the measurement, the counting

rate can also be increased by using larger collimators.
Capillary optics, X-ray tubes, high voltage, filters and
detectors of an X-ray fluorescence spectrometer also
offer optimisation potential. However, these should only
be adjusted after consultation with experts since the
excitation conditions as well as the count rate change.
However, it does not make sense to increase the count-
ing rate indefinitely, because simultaneously, the dead
time increases – i.e. the time in which the detector and
the evaluation electronics do not register any photons.
The optimal counting rate is reached when the mea-
surement performance can no longer be increased de-
spite the higher counting rate. The detectors and pulse
processors used by Fischer process very high counting
rates so all common measurement applications can be
tested without any problems.

Cg is Fulfilled – Cgk is Not

The systematic measured value deviation describes the

difference between the mean value and the specified The collimators, capillary optics, X-ray tubes, filters and detectors of
value of the standard. It serves as a decisive param- an X-ray fluorescence spectrometer have optimisation potential for the
measurement.
eter when the Cg value is met, but Cgk is not. Ideally,
the difference value is equal to zero. A large difference ing device are analysed, and in addition to that, external
can have different causes: the corrective calibration of influences are intentionally incorporated. A high-quality
the device is not good, the positioning is not sufficient- X-ray fluorescence measuring instrument minimis-
ly repeatable due to an unsuitable mounting device or es these factors through extensive automation of the
human influences, or the reference standard is inhomo- measuring process. A programmable XY sample stage,
geneous. autofocus and object recognition ensure that the user
The standard used to determine Cg and Cgk should defi- cannot significantly influence the measurement result.
nitely be used for the corrective calibration. If that’s not
the case, the quality of the standard is also tested with Contact
the Cgk value. The value of a standard is only known
within specified error limits. If two standards with a HELMUT FISCHER GMBH
thickness of 1 μm and a confidence level of ± 5 % are INSTITUT FÜR ELEKTRONIK UND MESSTECHNIK
used, one standard can have a true value of 0.95 μm, the Sindelfingen – Germany
other a true value of 1.05 μm. Suppose one standard is mail@helmut-fischer.com
used for calibration and type 1 gage study is conducted www.helmut-fischer.com
with the other. In that case, the systematic measured
value deviation in an ideal measuring process is around
0.1 μm in the worst case. Taking this into account may
be intentional. Nevertheless, in the context of optimisa-
tion, the user should do without it. This is the only way to
find out whether the measuring device offers a too large
measurement deviation or whether the standards are
not good enough.
Users should also refrain from repositioning the stan-
dard to not mask the performance of the measuring de-
vice by inadequate devices or inhomogeneities. During
the calibration itself, repositioning may be necessary: if
a small measurement spot is used, but the value of the
standard, as usually the case, is to be understood as an
average value in a range of typically 2 × 2 mm. This is
not necessarily a problem since a standard is usually
very homogeneous.
With some material systems or customer-specific stan-
dards, inhomogeneities can occur that have a disruptive
effect. In contrast to the ideal procedure in type 1 gage
study in which the corrective calibration and measure-
ment take place on the same point, in such cases, the
measurement must be averaged over an area for the
best accuracy. Thus, the user measures several points
within the certified range of the standard and deter-
mines the mean value from the results. If XRF analy-
sers with a motorised XY stage are used – such as the
Fischerscope X-RAY XDV-SDD or the XDAL series – this
is possible without any problems. To do this, either the
scan mode is used, or several measuring points are
programed via the measuring software. Important: the
measured area must be taken into account with the
exact weighting during calibration and typical measure-
ment.

Benefits of a High-Quality XRF Spectrometer

In type 2 gage study and type 3 gage study, the factors

human, measurement object, environment and mount-