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TMOS STHS34PF80

MEMS Sensor Division


TMOS Presence Sensor Architecture

What is the TMOS sensing technology


• Infrared sensors measure the amount of infrared radiation that is
collected in their field of view.
• Every object emits thermal radiation depending on its temperature.
• The peak of the radiation shift towards lower wavelengths by temperature rising

• CMOS based technology for TMOS Sensor is to measure absolute


temperature targeted 5 ~ 20um Infrared radiation.
Ex. Thermal radiation wavelength
• 1 sensing area + 1 blind area covered by cap metallization in sensing
Sensing Blind area
element of TMOS.
area
• Materialized with ST MEMS technology
• Integrated absorber to improve sensitivity
• Silicon two springs to isolate the pixel array mechanically 2
TMOS Sensing element
Application Enabled by TMOS Sensor
TMOS Sensor enables energy saving in SMART environmental

Predictive
Home Automation SMART Lighting SMART Home IoT
maintenance

Smart Condition
home/building Energy saving monitoring Energy saving
Presence / Motion Presence / Motion Presence / Motion
Thermal monitoring
Detection Detection Detection

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TMOS – STHS34PF80

TMOS STHS34PF80 Structure inside

• ST IR sensor measures in the wavelength range


from 5 to 20 um
• Human body peak radiation is about 9.8um,
therefore it is in the center of ST IR bandwidth.
• The sensor is housed in a package to protect it from`
unwanted radiation
• The window on top is closed with a Silicon window
which is transparent for thermal radiation

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TMOS – STHS34PF80
Single Pixel Presence/Motion detector

STHS34PF80 is the first of a family Presence/Motion detection by absolute


temperature from embedded IR technology Target MP : Q4’21

Electrical Specification (Target) Package Structure


• Object Presence / Motion detection
Top/Inner view Bottom view
• Supply voltage: 1.7V to 3.6V
Vent
• Supply current (1): 10uA @ 1Hz Hole
• Power down current : 0.5uA
• Digital I2C / 3-wires SPI interface
• Presence / movement detection up to 5 meter
• Embedded Temperature sensor for ambient Plastic Package w/ Embedded IR filter
• Accuracy (Tamb) ±0.5°C typ @ -10 ~ 60’C
• Resolution ±0.035°C LGA-10L 3.2 x 4.2 x 1.455mm
• Operating wavelength 5um to 20um
• 80deg Full Field of View (FOV)
Note (1) : Average Setting TMOS=128 Temperature=1
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Sensor Principle of operation

How it works for presence / motion detection in TMOS

Data Processing
FOV

Motion & Presence


Applications
Data out
FOV Temperature
applications

Calibration Data
FOV

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Digital Architecture and working modes
User interface

Data from ALGO FOR


Temperature SENSOR TAMBIENT PRESENCE
DIGITAL TOBJECT LOW PASS
MOTION
FILTER TAMBIENT & FILTER
TAMBIENT SHOCK OUTPUTS
TOBJECT DETECTION & STATUS
Processing
TOBJECT
Data from
Tmos SENSOR
DIGITAL TAMBIENT
FILTER

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TMOS For Presence Sensors
Beyond Pyroelectric Sensors
Pyroelectric TMOS
Measure Delta TEMPERATURE Measure ABS TEMPERATURE
Discrete approach with ext AFE One package solution with Sensor + ASIC
Operating range in meter Operating range from cm to meter
Fresnel lens needed to detect movement. Wide FoV by mask aperture
Suitable for “long” distances No need of external optics for both Presence / Movement
Suitable for long and short distances
High operating temperature range

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Human Presence detection
Presence detection without LENS up to 6meter
4 meter 5 meter 6 meter

Higher sensitivity with LENS for longer detection (longer than 6meter)

Without LENS With LENS

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Presence detection test in LAB
Presence detection measurment done far from 5 meter in LAB

Person(s) position area 5 meter Sensor

Scenario 1 : Single person detection Scenario 2 : Two persons detection Scenario 3 : Multi persons detection

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Reach Estimation with Fresnel Lens

Test scenario: Human pass through FoV : 10.4 meter reach with IML-0687 LENS

Lens IML-0687 Lens IML-0688

• Single FOV • Multi FOV,


• Higher sensitivity (5m) • Lower sensitivity (3m)
• Lower FOV (22) • Higher FOV (45)

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Fresnel Lens Advantages: Chip, Small and Easy to mount on the adapter
TMOS with LENS
• TMOS with LENS : Measured the presence
detection more than 12 meters.

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Overview of e-sensor box for STHS34PF80
Lab Testing Stand Alone Field Test
STHS34PF80

DIL 24
adapter
LabVIEW library board
for rapid test automation
USB

USB

ST Sensor BOX GUI for


Immediate IR data acquisition
and analysis Mobile application for
Testing on field
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Thank you

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