@ inseto > ADHESIVES Resist Coating Methods > BOND TESTING This document provides an overview of techniques for the uniform coating of a substrate: > ple arc test con Met > pasa ‘easement so cst se 1a] Solmcoating'sthe most common method uted when casting &cubstrate wth photoresist is a method that presents a high peter for throughput and homogene'y. The prncisl ef spn-caatng is atypically few millves of photoresist se esgensne ona substrate when i spinning at several 1000 rpm piety 4000 | rpm) The resst ean ether be dispensed when the substate i statanay ardthen accelerated up to speee ite spr-costing, oi ean be dspensed ance the waters already roting (dmamicsprcoatng}. Any excess resists soun off the edge ofthe substate duing te spioning process Sepcontoa ts: “Te centrtugalorceexperiencea by the resist on the sutace of he water causes the viscous resto sead ox ino 9 untorm thin fn ‘Alongsige the sn speed the spin Une can ako Be used 0 conrol the fil hckness ‘Thi ue to the evsporstion of same ofthe sven or aqueous qu ed to dsperse the resist, whieh causes fuer thinning fhe resist. The loss of he sovent leo rerun the stabiisston of the fn, 0 that willnot cole dunng ter hanatng fre substate “The man advantages of spr-coatng ae thatthe coating step is qute shot wyicaly 10.20 secones, ich when combines with the pensing anc hanng tne, an lead to process mes less than minut. The other aovantage is that the re obtsined are very smooth and te thcleess ean be reatacueily cone very accurately ‘Te cisadvantages and trtatons of spn-costng aise when using non-ctcuat sustales or thik Nery Wseous resists In these cases he ni rdulenees al he ees ne ezpecilly the comers cause the reset dyn an accelerated manner. The foxcess yng then suprsses the spin ofthe resis fom these regions, causing & bese of ress to bule up athe permeter of the subsvate; tis bulk up sevallot resist teferied 0 8 an eege beat In more sdvanced sprecoat systems techniques for removing this esge bead by precise apalcaion af solvent or Imiting ts growh by conoling the a turbulence, have been developed “Te other imsaton that can impact spin-coating she surface of the substate has 2 large numberof features or a varied :oaograpry. then the homogenety ofthe fm thickness can be affected. Wh Bule-p of ress n Noles or spaces leacng to thicker ns ane hiner fms on te eiges ofthe fetures. Ths can be overcome by 2 ‘cookie Consent We use eaokies on our website tage you hemos evant qpatenes ty Save ion pte or by Un oe eth stern cotng ccna repeat vet, 3yelekng ACCEPT ALL: eee Spray-coating Sora oning ean ateatve to spr-coning, pac when he substate sae cove seonas EE cr morphology eane ta he photrest canner be couted wh he eeted@ inseto ery rer Being regediensoteroncbyy Remora ohare sere atererenat a ‘ons onan henveioncemtpannentaiprtcostng ‘Biel wlprapsoontstpholaet at eerie ust ivent suey tanton sy Typically sss afew cSt and may require the clon ofthe resist wh a sobent Dilton ofthe ress can lato the resist ageing process accelerating andto parce ‘mation within she media, The other Imation ot spray-costing, that format of “tnt ym'seifiet given the stochastic stiri of opel landing on the surface. Ta form a eontrvous ls requires arminimum eral est crept censty to be fesched, whch nereases the minimum fn ickness as wellaz Increasing the processing be Dipcoating: Dipcoatng i sed as « slon for resist coating ithe ize ans ype of substate i rot suitable ‘or spivcoatng anc te photoresist rearezents significant cortta he ‘eral process, that even wien compared wih sproyecoatng, the consumption of reset mus be furherreauced ‘The process of cp coming is hat a wafer i submerged vercalyn a ewe of rei 2d ted at stow The ress fm then forms onthe surface and thins cut es he subtle is removed Hom the bath of photoresist The thickness of he ress © onto by the dell mein an atmasphere saturated win solvent, wich controls therate of sokent evaporation. The higher he withsraval speed rom tne ess bath, Sesemaea Die caning cess ‘he thicker tne photoresist [As sresub ofthis proces, the yleHl of est can be TOD% iftoth ster othe susetrate need coetng tepleseting a huge increase in ess eld compared 0 sain ane spaye coating. The tae may have to be replace the resist expires before its consumed, rn wl decreas the yes but sti overs ne most cos efectve ofthe three coatng ethos eoveres The proteresistoten must be sigevieatly el.tes, whieh ca signifearty ineease both te ageing ofthe resi mand the requency wth wich the tank must Be replaced. Aonalysubsuaes wth lege changes in sutaceLopography ate not suitble a5 he reset an fow over he substrate ans grin resi the surface homagenety Init printing ‘an aerate method wilzec to dzpence resi ike pntng. This works na sis fashion spray coating, prodcing drools of photoes, Uke spray-coatng however these craps ae produced in steam rather than 8 mist. The stream of ‘tool's can then be precsely contoled and patterned ono the substate Inkjet proting fers ram the ether costing methocs, nat whit can be used to produce shin homogenaous fn af photoresist the real advantages i ts use come ‘rom using to crest pater the substrate, The cen stomatal save te amount of res used by onl depositing where requred, reducing bath he cost ne ervionmena/impoctoftheprechnograshc pocess.Acétionely,. ts pessole to A © Coole Consent bithesraphc process Wie use cies on our website to give ng versatlty of inkjet pining, 6 9° | youtremostrelvant eperence bY foughput of costed Wels and Fememberng your preterences ane Staaf mate reads and sth repeat vist sy enceng accePT ALL, phos end Yoveonieniiotse use afAli he te esl olson forthe costing of \ ceokes Heaatae only ow microns@ inseto substrates Ths enables very lw ono aves of photoresist wastage nich sa grest, evartage ithe photoresist represents a large materalcost. The other advar:ages of slot-ie coating are ha: nis 2 realy scalable technigue, allowing the sumer of subsites tobe greatly increased. Sli costing is also eect sted to coating ‘ble substrates anc to being used ina rello~llmancfactutng process. Beyond the oetng of photoresist, ltt coming [ike inkjet pining) can be ullsed to coat sry ‘functional material hat canbe clsperse ive aptinable ne For turher information on ourrange of Spin Coates, Spray Coates & Inkjet Protrs please clck MERE For further information on eur range of let-ie Coating Exuiorent please clk MERE Autnor Date, Version Q ‘Chie Valenine | To Navernber 2020 1K3087 Rev.1 ‘cookie Consent We use caches on our website tage you the mast relevant experince By repeat vist, 3yelekng ACCEPT ALL cosker Reaaldae