Agggoe Ga su, parcence ASSEMBLY nos 305644901 SET oncom = sm (Contry Figure 6-10. Cappilaries. Since the flow control is a closed loop method of control, trouble shooting and isolating the Proportional Solenoid Valve (PSV) versus the Flow meter can be slightly tricky. Let's focus first on the control of the PSV. This proportional valve is ever neither completely closed nor completely open. During normal operation its duty cycle range is around 45%- 50%, which means, 45%-50% open. You can read the PSV duty cycle on the monitor page by viewing the parameter called Flow Duty. As the reference and sample period timers count down during their cor- responding cycles, yau can see the flow duty number changing in arder to maintain the 50 SCCM flow rate, regardless of the path or leg the gas is flowing through. If you notice that during the Sample count down period, the flow seems to be controlled, but during the Reference period the flow seems to go out of tolerance, then you have isolated the flow problem to the Reference path or leg. Try removing the Reference dryer and install a jumper or bypass in its place (1/8 inch tubing). There could be some obstruction in the dryer (internal). Asa result, even when the PSV valve is at its max. duty cycle, a higher pressure differential will be ‘Troubleshooting | 6-11