JSM-6510 series Catalog

JSM-6510 series
Scanning Electron Microscope

Serving Advanced Technology

 Invitation to the nano-world
The scanning electron microscope (SEM) has a wide magnification range to
observe from an overall view similar to an image by naked eye to nano-structures
at very high magnification.
The SEM can be equipped with analytical capability to find elements in a
sub-micron area.
The SEM is now an indispensable tool in research and industry.

JSM-6510 series Lineup

JSM-6510 : Multi purpose high performance SEM
JSM-6510 is a high performance multi-purpose scanning electron microscope with the unique high precision optics. It is
equipped with a large specimen chamber for up to 150 mm diameter specimen.
The operation software is designed for multi-user environment. It is easy to learn and ensures comfortable operation.

JSM-6510LV: Observation of non-conductive specimens

The low vacuum SEM JSM-6510LV is suitable for observation of nonconductive specimens, specimens containing small amount
of water or oil, and specimens which outgases in vacuum. The unique detector detects a shadowed image, a composition
image, and a topographic image, which can be selected simply on the operation GUI. One can switch to the high vacuum SEM
mode in a short time.

JSM-6510A: Non- destructive elemental analysis

The JSM-6510A with JEOL EDS embedded lets you observe and analyze a specimen smoothly. The detector does not require liquid
nitrogen for cooling and ready for analysis in a few minutes after turning on the system.

JSM-6510LA: Obser vation and analysis of non- conductive specimens

The JSM-6510LA is equipped with the low vacuum mode and an embedded JEOL EDS. You can observe and analyze non-
conductive specimens.

Scanning Electron Microscope brings the nano-world close to you

The lowest magnification lets you observe more about 25mm wide area to locate an area of interest. You
can change magnification continuously without change of focus so that finding areas of interest at high
magnifications is easy and quick.
At high magnifications you can observe nano structures easily.

500 m
Specimen: Surface mount IC

1 JSM-6510 series
 JSM-6510 series
Scanning Electron Microscope

JSM-6510LA

1 mm 200 nm 1 m

Specimen: Unhulled rice Specimen: Evaporated gold particles 30kV Specimen: Evaporated gold particles 1kV

JSM-6510 series 2
 Easy to Understand Operation

You start observation when the specimen chamber has been evacuated. You do not need much time to learn the simple to
understand operation menu.
Simply click the HT icon to turn ON the electron source. The adjustments of the electron source are fully automated and you
can start observation immediately.
Custom icon
You can customize the icons to display the frequently used functions. The
customized operation environment is set up as you log-on.

p Example of customized icons. The

icons for EDS operations can be
added.

Operation navi
The easy to understand

u operation procedures are

displayed on the operation
navi area by selecting the
function by the tab at the
bottom.

Operation keyboard* Full live image display

All the operation functions can be performed by a mouse. You You can display the live image in full size. This may be good when
can add the operation knobs as an option. You can operate the more than one person are observing.
frequently adjusted functions by knobs.

* Optional

3 JSM-6510 series
Navigation is Easy

Specimen setting navi

The procedure to set a specimen is displayed in the operation navigation area below the live image area.
You can simply follow this procedure.

Stage navigation system (SNS)*

The optional stage navigation system takes color image of the specimen and uses it for navigation of the specimen stage.
SEM images can be pasted for navigation as well.

Chamber scope*
You can mount the chamber scope to observe the inside of the
specimen chamber. The image by the chamber camera is
displayed on the operation monitor.

* Optional

JSM-6510 series 4
 High Quality Images

Standard recipe
The operation conditions recommended by JEOL application laboratory help you optimize the SEM instantly.

Standard recipe

Custom recipe
When you have found a good operation condition for your specimen, you can save it in the custom recipe and use it repeatedly.
You can also save the operation conditions shared by multiple users.

Select an accelerating voltage

The appearance of an SEM image varies depending on the accelerating voltage.
It is recommended to select the suitable voltage (electron energy) for your specimen by the density and size of structures.

5 m
The optimum accelerating voltage for high High accelerating voltage lowers the contrast The low voltage is suitable for observation of
quality image (5kV) (25kV) fine structures (1.5kV)

Specimen : Ceramic

Seamless auto-bias
The gun bias voltage adjusts the brightness of the electron source.
The seamless auto-bias sets the optimum bias automatically over the entire range of the accelerating voltage.

Stigma memory
JEOL's unique stigma memory automatically corrects astigmatism after a change of accelerating voltage or
working distance. It makes selection of optimum accelerating voltage for your application simple and quick.

5 JSM-6510 series
Optimizing the probe current
The contrast of the image is higher as the probe current is
increased. But the damage by the electron irradiation or heat
increases. The large probe current lowers the image resolution.
It is important to optimize the probe current depending on the
magnification.
Zoom condenser lens
The condenser lens adjusts the probe current. The zoom
condenser lens keeps the focus during change of probe current. It
makes quick to optimize the probe current.

Small probe current Medium probe current Large probe current

Electron gun

When the probe current

Zoom condenser lens is changed, the focused
First condenser lens probe by the first

→
condenser moves up or

←
down but the position of
the focused probe by
Second condenser lens
the second condenser
lens moves very little.

Super conical
objective lens

Therefore, The focus

does not change.

Zoom condenser lens on JSM-6510

5 m
1×10 -12A 1×10 -10A 3×10 -9A

Non-zoom condenser lens

5 m
1×10 A
-12
1×10 A
-10
3×10 A
-9

JSM-6510 series 6
 Acquisition of Images

Image acquisition
Simply a click on the "Photo" icon acquires a digital image.
The acquired images are displayed on the operation navigation area below the live image area.
When the SEM is equipped with a motorized specimen stage, you can go back to the position where the image was taken.

保存画像を見ながら次の視野の観察ができます
u

Operation navi area

Image archiving
The digital images are saved in bmp, tiff, or jpeg format. You can
save acquired images automatically by specifying the directory and
file name of the images.
You can display a saved image on the live image area or on a
separate window.

Image acquired in a shorter time

You can acquire an image of 1280 3 960 pixels in 40 or 20second.
This may be recommended for a routine work when efficiency is
important.

100 m
Image acquired in a shorter exposure time
(40second)

7 JSM-6510 series
Composition Contrast

Information generated from a specimen Objective lens backscattered

A higher density material generates more backscattered electrons than a lighter density material. electron
A backscattered electron image shows the distribution of different materials in a specimen. The detector
shadowed image is a composition image with shadow caused by surface roughness.
Backscattered
High sensitivity backscattered electron detector* electrona

The unique JEOL made high sensitivity backscattered electron detector forms composition specimen
image, topographic image, and shadowed image. The detector is mounted on the bottom
of the objective lens. You do not need to insert or retract the detector.

20 m 20 m
Composition image Secondary electron image

20 m 20 m
Shadowed image Topography image

Enhancement of surface topography

Small steps on the surface of specimen are enhanced by the REF image
detected by the secondary electron detector. This image can be
displayed together with a composition image of backscattered
electrons.

10 m
REF (filtered) image Metal (polish + etched)
* Standard on JSM-6510LV/JSM-6510LA

JSM-6510 series 8
 Side by Side Display of Morphology and Composition

Dual live image

You can display 2 live images such as a secondary electron image and a backscattered electron image.
You can survey a specimen while observing surface morphology and composition distribution.
Each live image is same size as the normal live image.

SEI BEIW

Specimen : Copper dendrite and tungsten powder Left : SE image Right : BSE composition image

Signal mixing
Two kinds of images are added and displayed on the main image area.
The two original images are displayed on the reference image areas.
The mixing ratio of each image can be adjusted. The example shows the mixing of SE and BSE Composition images.

Mixing images

Flexible window SMile movie

A user selectable portion on the main image is displayed with The SMile Movie records and plays live images. The format is AVI.
an image other than the main image. The selected area can be
moved on the main image area. A click on Photo icon records
the flexible window image and 2 original images.
Split live image
One live image area is divided into two halves side-by-side or top and
bottom. Each half is displayed with a user selectable image.

9 JSM-6510 series
Analysis

The analytical SEMs, JSM-6510A and JSM-6510LA, have the EDS in the same console as JSM-6510. You can start EDS
analysis on the SEM monitor seamlessly while observing an SEM image.

SEM monitor EDS monitor

Wavelength dispersive X-ray Analyzer WDS

(WDS)*
WDS has one order higher energy resolution than EDS. It can resolve
closely located spectral peaks, which are not resolved by EDS. The EDS
WDS is suitable for detection of trace elements.
Secondary
electron detector
EBSD*
EBSD analyzes the crystal orientation of crystalline materials. The EBSD EBSD
detector is mounted below the EDS detector at 90° to the tilt axis of the
Backscattered
specimen stage. Specimen
electron detector

Detector layout

Large specimen chamber

The specimen chamber is large enough for a 150mm diameter × 40mm
height specimen. All of a 125 mm diameter sample can be observed.
The ports for EDS, WDS and EBSD as well as for a secondary electron
detector, a backscattered electron detector are provided. EDS and EBSD
are mounted perpendicular to the tilt axis of the specimen stage.

Probe current detector*

The probe current detector detects the probe current during analysis.
The detector is inserted just below the objective aperture so that it is not
necessary to move the specimen stage for measurement.

The specimen chamber and the specimen stage

* Optional

JSM-6510 series 10
 Measurement

Measurement
A variety of measurement functions are provided.
You can manually measure features on a SEM image on the monitor and save.

Measurement functions Length of line, size of free shape, diameter

Measurement on SMile View™*

The standard report editing software, SMile View™ has a
measurement function. Measurement results are pasted on a SEM
image on the SMile View™ layout sheet. The measurement
accuracy can be calibrated by using the SEM image of standard
or reference specimen taken at the same magnification for
measurement. The measurement results can be displayed as a list
or pasted on Excel sheet.

Angle between 2 lines

™

Area of polygon

Count of features

* Standard on JSM-6510A/JSM-6510LA

11 JSM-6510 series
SEM has larger depth of focus as well as higher resolution than a light microscope so that it is suitable for observation of
complicated morphology. The three dimensional image software* developed by JEOL constructs a bird's eye view image from a
pair of stereo images. You can measure height of surface morphology form the bird's eye view image.

Three dimensional image Three dimensional image software

A pair of stereo images is acquired by changing tilt angle of The three dimensional image software constructs a bird's eye
the specimen stage by 4 to 8 degrees. You can view three- view image from a pair of stereo images. You can measure
dimensional image from these images. height of surface morphology from the bird's eye view image.

Acquisition of stereo pair images

The function to help acquisition of stereo pair images is provided.
The second image is acquired by comparing to the first image. It
is simple and easy to acquire a stereo pair.

Stereo pair

Stereo image acquisition menu of JSM-6510

Observation of 3D image on
the three dimensional image software
You can add red and blue color to stereo pair images. You can
observe depth when you look the colored images through a
pair of glass with blue and red filter.

Bird's eye view image

A pair of stereo images in two colors

* Optional Height profile

JSM-6510 series 12
 Observation without Conductive Coating

JSM-6510LV and JSM-6510LA are equipped with the low vacuum mode and enable you to observe non-conductive
specimens. You can analyze a specimen by EDS using high accelerating voltages without worrying about charging.

Backscattered electron detector Secondary electron detector for low

The conventional secondary electron detector, Everhart Thornley
detector, does not function in the low vacuum environment. A
vacuum mode*
backscattered electron detector is widely used instead. You can The secondary electron detector dedicated to the low vacuum
observe the morphology and composition of a specimen. mode.

10 m 10 m
Morphology and composition are observed Morphology is observed clearly

Low vacuum system Principle of low vacuum SEM

The pressure in the specimen chamber can be varied from 10 Pa to
270 Pa without changing the size of the orifice. JSM-6510LA/JSM-
6510LV has 2 vacuum systems, one high-vacuum system and one
low-vacuum system dedicated to the low vacuum specimen chamber.
The objective lens apertures are placed in high vacuum and kept
clean for a long period of time.
A small amount of air is introduced into the specimen chamber. These
air molecules, oxygen and nitrogen, are ionized by the incident
electrons. These ions neutralize electrons on the surface of the
specimen and eliminate charging so that a non conductive specimen
can be observed.

Electron gun

Objective lens

Backscattered
electron
detector Orifice
aperture

VV1
LV
controller
Pirani
V4 gauge Charging Generation of ions


DP VV5 Motor
V6 V2 drive
Foreline trap
V1
VV7
VV3 VV2 VV6

RP1
V8 (Needle valve) 
RP2

The vacuum system dedicated to low vacuum specimen chamber is

equipped.

No charging Neutralization of charge

Scattered electron Ion Electron on a specimen

* Optional

13 JSM-6510 series
Freeze Drying in the LV SEM Observation of Hydrated Specimen

JEOL has developed a simple and quick method for observation of water-containing specimens. The freeze-dry method in
the LV SEM removes water with minimal specimen deformation. This method is especially effective for specimens that are
difficult to prepare with the conventional critical point drying method, such as fresh water plankton, sea water plankton,
cryptosporidium, hair root of plant, and mite.

The Procedure is Simple and Quick.

Freeze Dry in Low Vacuum SEM

Collection of specimen

Cleaning
Chemical fixation
Rinse in water

Freeze in liquid nitrogen

Freeze dry in Low Vacuum SEM

Observation in Low Vacuum SEM

1 m 1 m
Nematode, Chemically fixed, dehydrated, Cryptospordium muris, Freeze dried in LV SEM
replaced with t-butyl alcohol, freeze dried in LVSEM Specimen courtesy of Tokyo Metropolitan Institute of Public Health.
Specimen courtesy of Prof. E. Kondo, Saga niversity, Japan.

100 m
Cross section of an apple 15kV Flower with a bug

JSM-6510 series 14
 Specimen Navigationa

Eucentric large-specimen stage Super conical objective lens

The eucentric specimen stage has minimum shift of observation

area and focus when tilting. The stage is suitable for
observation of a rough surface from a variety of directions.
The stage is eucentric over the entire range of working distance EDS
from 8mm for high magnification work, 10mm for analysis, and
longer working distance for large depth of focus.
Focus change during X, Y, or rotation of a specimen with tilt is
small so that surveying a large specimen is done efficiently.
It is possible to completely cover a 125 mm diameter sample.
EDS Take off
Tilt of large specimen angle 35°
The high conical shape of the objective lens provides great WD=10mm
flexibility in tilting a large specimen. Combination with the
eucentric specimen stage makes tilting of a specimen quite
easy. Specimen
Specimen tilt

Super conical objective lens

Motorized specimen stage*

A variety of motor controlled specimen stages are available as
option. You can select one from 2 axes (X, Y), 3 axes (X, Y, R
or X, Y, Z), and 5 axes (X, Y, R, Z, T) controls. The functions
explained on this page are available with the optional motor
controlled specimen stages.

Continuous move
A click and hold on the shift icon or X, Y, R, T or Z button on
the motorized specimen stage menu moves the specimen
continuously. Tilting the joy stick on the optional operation knob
set does the same.

Click center zoom

A click on a feature on the live image moves the feature to the
center of the live image. You can set to magnify an image after Montage 10 × 9 images (512 × 384 pixels each) Specimen : Butterfly
shift of a feature. Specimen courtesy of Prof. Matsuda, Kumamoto National College of Technology

Eucentric rotation
The eucentric rotation rotates a specimen around the current
observation area.

Frame step move

Each click on the frame-step-move icon shifts a specimen at a
user preset interval to survey a large area efficiently Motorized specimen stage menu

Saving position coordinate

Unlimited specimen positions can be saved to move to these
areas later.

* Optional

15 JSM-6510 series
High Brightness LaB6 Gun*

LaB6 Gun
The LaB6 gun is brighter than the tungsten hairpin gun. The electron source of the LaB6 gun is smaller so that a
higher quality image with better sharpness can be obtained. The improvement is more significant at the lower
accelerating voltages. The LaB6 gun has an advantage in the observation of fine surface structures.
The expected life is around 500 hours, which is approximately 5 times longer than that of the tungsten hairpin
gun. The LaB6 gun is suitable for a study such as the automated particle or gun shot residue analysis, which takes
a long time.
The LaB6 requires higher vacuum than the tungsten hairpin gun for its stable operation. An ion pump is equipped
on the gun chamber to create a higher vacuum for the LaB6 gun. The conventional tungsten hairpin gun can also
be used in the gun chamber equipped with the ion pump.

1 m 0.5 m
Yogurt bacteria Ceramic
3kV Original magnification ×25,000 10kV Original magnification ×30,000

Turbo molecular pump (TMP) *

JSM-6510 series SEM uses the high performance and reliable Electron gun
diffusion pump (DP). With the DP it is necessary to heat the heater
for approximately 25 minutes before the DP is fully operational. The
Objective lens
DP also requires cooling water. aperture
An air-cooled TMP is available as an option for a user who wants Backscattered
electron
to use the SEM immediately after turning it on or to eliminate the use detector Orifice
of cooling water.
VV1
The vacuum system is completely identical except TMP being used
LV
in place of DP. The TMP is not exposed to the air during specimen controller
Pirani
exchange. The inside of the SEM is kept in vacuum while the SEM V4 gauge
is turned off.
The specimen chamber of the low vacuum mode is pumped by the TMP VV5 Motor
dedicated rotary pump while the high vacuum region is pumped by V6 V2 drive
Foreline trap
V1
the TMP.
VV7
VV3 VV2 VV6
V8 (Needle valve)

RP1
RP2
Low vacuum system
Evacuation system of Low Vacuum SEM equipped with TMP High vacuum system

* Optional

JSM-6510 series 16
 Effective Reports Created Quickly & Easily

SMile View™*
SMile View™ creates an effective report with SEM images
and EDS analysis data. You can design layout freely.
Simply drag and paste thumb nail images to a layout sheet
and a report sheet is done. The edited SMile View™ layout
sheet can be sent to Microsoft Word and edited as the
Word document. Images in bmp, tiff, jpeg, and meta file
are compatible with the SMile View™.

Magnification on SMile View™

layout sheet
The magnification indicated on JSM-6510 series SEM is
correct when the width of an image is 128mm. When you
paste images on a SMile View™ layout sheet, this is the
default size. You can freely change the size of images on
the layout sheet. The correct magnifications of images on a
layout sheet are automatically calculated and printed on the
layout

Maintenance Videos

It is important to center the filament tip to the small aperture of the Wehnelt cap
to ensure the best performance. JEOL provides factory pre-centered filaments,
which are centered by JEOL. A user does not have to center a filament.
The lens is designed to easily attain high vacuum to minimize contamination to
Factory Wehnelt
the objective apertures. pre-centered filament

Maintenance procedures in movie

The procedures to replace filament, objective apertures, and orifice are explained in easy to follow movies displayed on the operation navi area.

Replacement of filament

* Standard on JSM-6510A/JSM-6510LA
17 JSM-6510 series
 JSM-6510 series
Scanning Electron Microscope

Principal Specifications
ResolutionHV mode 3.0 nm（30 kV）、8 nm（3 kV）、15 nm（1 kV）
※1
　　　 LV mode 4.0 nm（30 kV）
Magnification × 5 to × 300,000 (on 128 mm × 96 mm image siza)
Preset magnifications 5 step, user selectable
Standard recipe Built in
*1
Custom recipe Operation conditions (Optics, Image mode, LV pressure ) Specimen stage
*1 *1
Secondary electron image, REF image, Composition , Topography ,
Image mode *1
Shadowed
Accelerating voltage 0.5 kV to 30 kV
Filament Factory pre-centered filament
Electron gun Fully automated, manual override
Condenser lens Zoom condenser lens
Objective lens Super conical objective lens
Objective lens apertures 3 stages, XY fine adjustable
Stigmator memory Built in
Electrical image shift ± 50 μm (WD = 10 mm)
Auto functions Focus, brightness, contrast, stigmator JSM-6510LV
Eucentric large-specimen stage
Specimen stage X: 80 mm, Y: 40 mm, Z: 5 mm to 48 mm, Tilt: −10° to 90°,
Rotation: 360°
Reference image
*3
4 images
Installation Layout (JSM-6510LV)
(Navigator )
Specimen exchange Draw out the stage
Maximum specimen 150 mm diameter
PC IBM PC/AT compatible
®
OS Windows 7
*2
Monitor 19 inch LCD, 1 or 2
Frame store 640 × 480, 1,280 × 960, 2,560 × 1,920, 5,120 × 3,340
Dual live image Built in
Full size image display Built in
Pseudo color Built in
Multi image display 2 images, 4 images
Digital zoom Built in
Dual magnification Built in
Network Ethernet
Measurement Built in
Image format BMP, TIFF, JPEG
Auto image archiving Built in
*1
Pumping system Fully automated, DP: 1, RP: 1 or 2
*1
Switching vacuum mode Through the menu, less than 1 minute
*1
LV Pressure 10 to 270 Pa
*2
JED-2300 EDS Built in

Principal Options Installation Requirements

*1
l Backscattered electron detector Power Single-phase, 100V AC, 50/60Hz, 3.0kVA
l Low vacuum secondary electron detector Voltage regulation within ±10 %
l Energy dispersive X-ray analyzer (EDS) ( svoltage drop at 3.0 kVA within 3%)
l Wave length dispersive X-ray analyzer (WDS) Grounding terminal One, 100 ohms or less
l EBSD Cooling water
l Airlock chamber Faucet One, 14 mm OD or ISO 7/1 Rc 1/4 internal thread
l Chamber scope
Drain One, 25 mm or more ID, or ISO 7/1 Rc 1/4 internal
thread
l Operation keyboard
Flow rate 2L / min
l LaB6 electron gun
*2
Pressure 0.05 to 0.2 MPa
l Report creation software (SMile View™)
Temperature 20 ± 5 °C
l Operation console (750 mm wide, 900 mm wide)
Environment
l Motor controlled stage (2 axes, 3 axes, 5 axes) Temperature 20 ± 5 °C
Humidity 60 % or less
Floor space 2,000(W) × 2,500(D) × 1,800(H) mm or more
*1: Standard on JSM-6510LA and JSM-6510LV
Weight Approx. 435 kg ( JSM-6510 ), Approx. 435 kg ( JSM-6510LA )
*2: Standard on JSM-6510LA and JSM-6510A
Door width 850 mm or more
*3: Available when the motorized specimen stage is provided.

Specifications subject to change without notice.

Windows operating system is trademark or registered trademark of Microsoft Corporation (US)
in United States and other countries.

JSM-6510 series 18
No. 1305K250C Printed in Japan, Kp