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Maria Paula Fernandez Jimenez (5801303) : Electron Microscopy of Materials Review
Maria Paula Fernandez Jimenez (5801303) : Electron Microscopy of Materials Review
Mechanical Engineer
Faculty of Engineering
Industrial Engineering
Cajicá,Cundinamarca
2023
Content
Introduction ............................................................................................................................. 4
1.Notions of optics .................................................................................................................. 5
Magnification ....................................................................................................................... 5
Resolution ........................................................................................................................... 5
Depth of field ....................................................................................................................... 6
Lens defects ........................................................................................................................ 6
Chromatic aberration....................................................................................................... 6
Spherical aberration ........................................................................................................ 7
Astigmatism ..................................................................................................................... 7
2.Scanning Electron Microscopy (SEM) ................................................................................ 7
3.Transmission electron microscopy(TEM)............................................................................ 9
4.Scanning Transmission Electron Microscopy (STEM) ..................................................... 15
5.Energy dispersive x-ray analysis (EDX); electron energy loss spectroscopy (EELS). .... 17
6.Processing and simulation ................................................................................................ 21
Image processing.............................................................................................................. 21
Image simulation ............................................................................................................... 22
7.Sample Preparation ........................................................................................................... 22
SEM................................................................................................................................... 23
TEM ................................................................................................................................... 24
Self-supported samples ................................................................................................ 24
Samples supported on grids ......................................................................................... 24
8.Preliminary design of the experiment (Which microscope do I need and why?) ............. 25
References ........................................................................................................................... 27
Ilustration Content
Ilustration 1 Optical microscope with a two-lens system. ..........................................................5
Ilustration 2 Components of an optical reflection system ..........................................................7
Ilustration 3 Schematic representation of a scanning electron microscope ............................8
Ilustration 4 a) Scanning image of a silica sample supported on alumina. b) Compositional
map, where the clear contrast corresponds to the silica-rich composition
zones.composition, where the clear contrast corresponds to the zones of silica-rich
composition. .....................................................................................................................................9
Ilustration 5 Components of an optical transmission system ....................................................9
Ilustration 6. Contrast transfer function (CTF) for a 400 kV microscope and Cs = 1.0 mm at
the Scherzer focus (-405 A) .........................................................................................................13
Ilustration 7 Different contrast mechanisms depending on the lens aperture ......................14
Ilustration 8. Mode of operation in the transmission electron microscope as a function of
the condenser aperture. ...............................................................................................................15
Ilustration 9. Mode of operation in the transmission electron microscope as a function of
the condenser aperture. ...............................................................................................................15
Ilustration 10. Image Formation in STEM..................................................................................16
Ilustration 11 a) TEM BF image of the SBA15 catalyst with Co particles and b) STEM-
HAADF micrograph of the same area. .......................................................................................17
Ilustration 12. Schemes of electronic transitions that give rise to energy signals ................18
Ilustration 13. MoS EDX Line Analysis ......................................................................................19
Ilustration 14. EELS spectrum of an amorphous carbon aggregate showing the maxima
due to transitions at n* and a* levels ..........................................................................................20
Ilustration 15. scanning microscope ...........................................................................................23
Ilustration 16. Spectroscope........................................................................................................26
Introduction
From the composition of the first optical microscope composed in 1590 by the Dutch
brothers Hans and Zacharias Janssen; and the first optical microscope designed in 1676 by
the also Dutch Antony van Leeuwenhoek, it was still more than three hundred years before
the German researchers Ernst Ruska and Max Knoll succeeded in constructing the first
transmission electron microscope in 1931. Even so, this first microscope did not allow to
obtain images as sharp as those already obtained in optical microscopy at that time.
Between the 1940s and 1970s, an exponential development took place, leading to the
construction of a microscope with an atomic resolution of 1,250 kV. It was not until 1965 that
resolution and aberrations used in electron microscopy have the same meaning as in optical
microscopy. It is the illumination system of the object that suggests an obvious division
provides images of external morphology similar to those formed by the eye, while a
transmission microscope reports on the internal structure of solids. The electron microscope
interaction of the high-energy electron beam (20-1500 kV) with the object.
microscopy, since the amount of sample observed is always a minuscule amount of the
original sample.
2.Difficulty in quantifying electron diffraction and HREM results. The electron interaction is
1.Notions of optics
Magnification
of lenses and focal lengths. The closer the focal length and the object distance, the greater
the magnification.
Resolution
The resolution is the smallest distance between two points that can be viewed
higher resolution, smaller (r), we can either decrease the wavelength of the radiation or
𝑟 is the resolution
𝛼 is the angle between the light source and the object (depends on the size of the lens
apertura
Depth of field
The depth of field limits the thickness of the object to be studied. A greater depth of
field (h) means obtaining sharp images of objects of appreciable thickness, for which the
0,61𝜆
ℎ= 𝑠𝑒𝑛 𝛼 tan 𝛼 (2)
𝑛
Where:
𝛼 is the angle between the light source and the object (depends on the size of the
objective aperture)
Lens defects
Chromatic aberration
produced.
Spherical aberration
This is related to rays entering the lens at greater angles to the optical axis. The
Astigmatism
scanning electron microscopy is based on the optical system of reflection. The object is
illuminated frontally and the reflected beams are responsible for the final information.
objective lenses, and is scanned across the sample by scanning coils, while a detector
counts the number of low-energy secondary electrons emitted by each spot on the
surface.
A scanning electron microscope consists of a fine electron beam with energy up to
The two major advantages of the scanning microscope are the range of
magnification and the depth of field of the image. Depth of field is the property by which
SEM images can focus on surfaces at different heights at the same time.
The accelerating voltage is between 20 and 40 kV, its resolution between 50 and
20 A. The higher magnification is a function of the scanning system rather than the lenses,
the smaller the scanned area the higher the magnification, a surface at a focus can be
Among the phenomena that take place in the sample under electron impact, the
most important in SEM is the emission of secondary electrons with energies of a few tens
of eV, followed by the emission of backscattered electrons with higher energies. There are
suitable detectors that discriminate electrons according to their energy, thus allowing
Because of this the images formed by secondary electrons represent the surface
electrons with their energy reduced by inelastic interactions with the specimen.
Today it is possible to make combined use of both types of electrons thanks to the
great advances that have been made in backscattered detectors that allow good images to
Another important emission that occurs when the electron beam interacts
inelastically with the sample, both in SEM and TEM, is that of X-ray photons with energy
composition.
potential difference (accelerating voltage) and acquire a kinetic energy. The wavelength
1⁄
𝜆 = ℎ/[2𝑚0 𝑒𝑉(1 + 𝑒𝑉/2𝑚0 𝑐 2 )] 2 (3)
𝜆 = wavelength
𝑉= potential difference
ℎ = Planck's constant
𝑒 = electron load
𝑐= speed of light
In the table 1 lists the different electron wavelengths for the most common
In the table 2 lists the different properties of the different electron sources
The fact that the electrons are charged means that after a diffraction phenomenon
equivalent to that occurring with X-rays, the scattered electrons can be focused to form an
image. Spherical aberration consists in the reduction of the focal length of the electrons
passing through the outer regions of the objective lens with respect to the electrons
passing through the center of the lens. The spherical aberration coefficient (Cs) of the
objective lens is, together with the accelerating voltage and beam coherence, one of the
limiting factors of the resolving power of an electron microscope, so that the smallest
1⁄ (4)
𝑑 = 0,66(𝐶𝑠𝜆3 ) 4
When the beam passes through the crystal, the electrons are scattered or reflected
by the crystal planes by the planes of the crystal with Miller hkl indices. According to
Bragg's law, constructive interference between the constructive interference between the
Where:
𝑛 is an integer
The image is the inverse Fourier Transform of the diffraction which, in turn, is the
Fourier Transform of the object. Due to the effect of the objective lens the electron beams
have their amplitudes and in some cases their phases altered. The degree of the alteration
will be determined by the Contrast Transfer Function (CTF) of the lens which varies with
the focus conditions. The CTF indicates the contrast transferred by the object to the image
Where A(q) is an aperture function that defines the truncation of the diffraction pattern by
the objective aperture and where the phase function exp[ix(q)] describes the phase
distortion imposed on the output wavefunction1 by the objective lens. If the CTF is
negative then the atoms will show a black contrast on a white background and if positive
they will give a white contrast on a black background. If the CTF is large for a given value
of q it means that the periodicity corresponding to that value of q in the object will be
strongly transmitted to the image. Thus, to preserve the relative amplitudes and phases of
the scattering process this function has to be close to unity and of the same sign. It has
been shown by Scherzer that the largest frequency range with sin x(q) = 1 is obtained
when:
1⁄ (7)
≜ 𝑓 = 2.5(𝐶 𝜆/2𝜋) 2
The blur value given by the expression [] is the best blur value given to obtain a
The resolution given for this focus value is determined by the first zero of the CTF,
1
𝑟𝑠𝑐ℎ = 0,66 𝐶𝑠 4𝜆3⁄4 (8)
This contrast transfer function changes with focus and as the transfer function
In TEM images there are three types of contrast mechanisms: i) intensity contrast
from absorption, i.e. from the loss of incident electrons by multiple inelastic scattering; ii)
electrons with a divergence angle greater than the diameter of this aperture and which, as
a consequence, will not contribute to the image. This aperture is therefore often referred to
as the contrast aperture; iii) the phase contrast which is determined by the focus.
The fundamental principle, when obtaining TEM images, is to look at the electron
diffraction diagram, since it is this that gives us information about how a sample scatters.
Given the relationship between the image and the fraction, the diffraction pattern can be
studied. So far we have focused on the usual technique, called brightfield, in which the
diaphragm (aperture) of the objective lens is focused on two or more diffracted beams in
addition to the central beam to form a brightfield image, an image that will contain the
A diffracted beam with a certain spacing can be chosen with the objective aperture
instead of the transmitted beam and a dark field image is formed. By choosing electrons
scattered in a certain direction, a dark field image is obtained which contains interpretable
information about the amplitude of the sample. In general, the areas from which the
selected diffracted beam comes will appear bright in the image while the rest of the
unselected beams will form the dark background of the so-called dark field image.
In electron diffraction, there is a choice between the area selection method (SAED),
where the area to be diffracted is determined by an aperture (area section aperture), and
the microdiffraction and convergent beam electron diffraction (CBED) methods, where no
in two ways; in TEM mode, which has been discussed extensively in this chapter,
and also, if the equipment allows it, in STEM (Scanning Transmission Electron
Microscopy) mode.
and, in addition, if the equipment allows it, in STEM mode (Scanning Transmission
electron microscope to which is attached a system of deflector coils, which allow the
electron beam to be swept over the surface of the sample. The coils control that the
electron probe sweeps parallel to the optical axis at all times, i.e., that it does not change
direction as it sweeps.
STEM mode these are only used to change the camera length between the sample and
the detector plane and also to form the electron probe image. Therefore, most of the optics
act on the beam before it passes through the sample. Now no objective lens is needed to
focus the image, but the signal from the interaction of electrons with matter is collected by
a detector that transforms these pulses into an image, and therefore certain defects of this
lens, such as chromatic aberration, are no longer important. This will be an advantage
when analyzing samples with considerable thickness. In the same way as in SEM, it is
now the detectors that will capture scattered electrons to form the images. The difference
In STEM mode we can obtain three types of images depending on the detector
used (Figure 13.13): Bright Field (BF) images, Dark Field images and HAADF or Z-
contrast images. BF images are formed by detectors that collect electrons diffracting close
to the optical axis, i.e. at low angles. On the other hand, DF images are formed by
electrons diffracted at high angles, which are collected by a ring-shaped detector (ADF).
Finally, the Z contrast images are formed by the electrons that are also collected by this
ring detector but with the electrons that are scattered at very high angle. The STEM BF
and STEM DF images are thus formed by the contribution of elastic and inelastic
scattering, but in the case of the Z-contrast images only incoherent, inelastic scattering is
used.
This type of interaction is known as Rutherford scattering. The incident electron interacts
with the nuclei present in the sample and the result is scattered electrons with an atomic
number squared (Z2) dependence at very high angles. The detector that collects these
electrons is ring-shaped (ADF) and this same detector will be able to collect scattered
electrons at a wide variety of angles by simply varying the length of the chamber.
Ilustration 11 a) TEM BF image of the SBA15 catalyst with Co particles and b) STEM-
The disadvantages of STEM mode lie in its dynamic character. To form an image,
about 2,048 lines have to be scanned. The detectors analyze the signal they pick up and
convert it into images synchronously on a low-scan TV screen or PC, which means that
the process is slow and it takes a few seconds to capture a good image, where both
(EELS).
electrons onto a certain area of the sample in a controlled manner. These electrons can
yield part of their energy to the specimen, giving rise to a whole series of phenomena of
energy transitions in the material studied, which have given rise to a large number of
spectroscopic techniques.
When the electron beam is focused on the sample it causes a series of electron
transitions between different energy levels. The excited ion relaxes to its initial state by the
transfer of an electron from an outer orbital to an inner shell, which results in the emission
of X-rays.
Ilustration 12. Schemes of electronic transitions that give rise to energy signals
separate the different maxima in order to carry out their quantification. This is done by the
detection system. This method is the most common and it is rare to find an electron
microscope that does not have an EDX detector attached, unless this microscope is
exclusively dedicated to high resolution. This method uses a semiconductor detector that
characterizes X-ray photons according to their incident energies by recording the entire
spectrum simultaneously. In TEM the thin film method is used in which it is assumed that
the area of the crystal where the analysis is performed is thin enough to be able to neglect
In STEM mode we will distinguish between two types of EDX analysis: standard
analysis (point, line or area integral) and elemental maps. A standard analysis is
considered to be the spectrum obtained from the selected area, whether it is a point, a line
or a certain area. The point analysis consists of analyzing the area where the electron
probe is placed. The resolution depends on the size of the probe and allows analysis at
atomic resolution. On the other hand, line analysis consists of drawing a line on the image
in such a way that the probe sweeps the line and performs the analysis along it.
X-ray excitation and high spatial resolution. This requires limiting parameters such as
image resolution, number of dots and counts per second, electron probe size, mapping
magnification, etc., to avoid contamination and displacement effects. Very high acquisition
times are therefore required to obtain a good signal-to-noise ratio. The problem of low
signal levels becomes more apparent with low atomic number elements.
As for EELS, it consists in the detection, thanks to a magnetic prism usually placed
after the phosphorescent screen, of the energy loss suffered by the electrons after
interacting with the sample. One of the major differences of EELS spectroscopy with
respect to EDX is the higher energy resolution that can be achieved, being around 1 eV or
even less, while the energy resolution of an EDX detector is around 135 eV. This high
energy resolution implies that by EELS spectroscopy one can see more subtle effects
caused on the different electron levels by the type of bond, the ionization state of the atom,
filter (so called because of its shape) is used, which is mainly used for EFTEM energy
filtering maps, which is another way of obtaining elemental maps similar to those obtained
with EDX mapping. The way in which the spectrum originates is due to electrons passing
through the spectrometer and being deflected by the surrounding magnetic field with an
angle greater than or equal to 90°. Electrons with higher energy are deflected farther away
than those with zero loss. A spectrum is thus formed in the scattering plane consisting of a
distribution of electron counts versus energy loss. Three regions can be considered in an
EELS spectrum:
a) Peak zero loss: consists of elastically backscattered electrons, but also contains
also contains electrons that have undergone very small energy losses. It is essential to
up to 50 eV. It contains electrons that have interacted with the electrons of the outermost
layer and that are weakened. outermost layer and are weakly bonded. It provides
the innermost shells. They provide characteristic information about the atoms in the
sample.
Image simulation is the artificial generation of images (simulated images) from ideal
Image processing
obtain an improved image, with sharper contrasts and it is also essential to quantify the
information contained in an image. For all this it is necessary to have the digitized image
and a suitable program to process it, in other words, to convert it into numbers.
dimensions. The size (number of pixels) and depth (number of grays) of the image
depends on the way it is digitized. The usual way today is directly on the microscope
1024 x 1024 pixels and 16,000 gray levels. They can also be recorded on negatives, which
are either digitized in a densitometer or printed on positives and then recorded with a
scanner.
To convert the image into numbers, the Fourier transform is calculated using the
so-called Fast Fourier Transform (FFT). Thus, the operations that can be performed are
several and go through the obtaining of a Fourier Transform from the image that is the real
space. From this FFT the image can be "cleaned" by simply applying masks to the
reflections obtained and then reconstructing the image. It is also possible to vary the size
of the apertures (imitated in the computer) obtaining contrasts different from those
obtained experimentally in the microscope, being even possible to choose the beams of
Image simulation
The idea of simulating high resolution images comes from the fact that information
about the phases is lost when forming an experimental intensity map except under certain
conditions for very thin crystals at the Scherzer focus. In general, the image does not have
a direct correspondence between the dark spots in the image and the atomic positions, so
one assumes a structure, simulates the image and observes how it fits the experimental
image, so that by modifying the original proposed structure and repeating the process one
can arrive at a fine structure fit from the comparison of simulated and experimental
images. The main problem lies in the sensitivity of the image to various experimental
factors, such as the correct alignment of the beam with respect to the sample and the
optical axis, the thickness of the sample, the focus, the coherence of the beam, the
chromatic and spherical aberrations, etc. The best known image simulation programs are
SHRLI (by M. A. O'Keeffe, a pioneer in this field), NCEMSS (by R. Kilaas), Mactempas
(also by R. Kilaas), EMS (by P. Stadelman) and Cerius. The high-resolution image
simulations shown in this paper have been performed with the NCEMSS program.
7.Sample Preparation
This section is intended to summarize and emphasize the most commonly used
techniques in materials science. In any case, samples should be prepared according to the
One of the great advantages of scanning electron microscopy is the fact that many
species can be examined with little or no preparation. The thickness of the specimen is not
a consideration in this case, so the size is determined only by the size of the specimen
holder. To examine the topographic contrast it is sufficient to cut and polish the surface to
avoid contaminating the microscope, with as little damage as possible and using only the
polishing are used for this purpose. The sample is then supported on a metal specimen
observations are to be carried out at very low voltage or in an environmental SEM, this
coating is not necessary; they can be coated with carbon or metals, the most commonly
used being gold. The metal gives a better and more uniform coating and prevents the
sample from loading more effectively than carbon does. When the time comes to perform
X-ray analysis, it is necessary that the signal of the conductive material is known and
above all, does not mask any of the signals of our sample, in this case, we will have to
There are many ways to prepare samples for TEM, the method of choice depends
Generally the samples are separated into two groups: self-supported and
supported on a grid which is usually made of copper but can also be aluminum, nickel,
tungsten, etc. The type of sample to be prepared will depend mainly on the type of
supported, while other types of species can be supported on grids that are normally 3 mm
Self-supported samples
For its preparation it is necessary a first stage of initial thinning and cutting and a
later thinning until reaching the transparency to the electron beam. The first stage of initial
thinning supposes the obtaining of sheets of between 100 and 200 ^m of thickness and of
these a disc of 3 mm of diameter is cut. It is the central region of this disk that is finally
thinned on one or both sides, to a thickness of only a few microns. final thinning of the disk
ultramicrotomy.
particles transparent to electrons, and deposit them on a thin film supported on a metal
grid. The classic example is a copper grid covered with a film of amorphous carbon with
holes in it, so that, hopefully, some particles will be partially localized in the holes so that
they can be studied without interference. The usual way to deposit the particles on the
copper grid with the carbon film with holes in it is by suspension. The material is first
fractured in an agate mortar, then dispersed in a suitable inert solvent such as aceto na,
ethanol, butanol or n-hexane, with the aid of ultrasound if the agglomerated nature of the
sample requires it. After deposition of the larger particles, invisible particles will be found in
suspension, perfect for observation under the transmission electron microscope. One or
two drops of the suspension are deposited on the grid, the solvent is allowed to evaporate
and the grid is introduced into the microscope. This is the general method of preparation of
supported samples in materials science, however, there are other common methods such
as ultramicrotomy. This is most suitable for biological materials and also when dealing with
particles or fibers, which are too small to be individually thinned, and too large to be
particles in an epoxy resin or similar, followed by cutting them into thin flakes that fall onto
water or an inert medium from which they are collected on the grids.
The electron microscope can provide us with chemical information through the
different spectroscopies, real space information from the images and reciprocal space
it by X-ray diffraction, which will give us global information of the sample. Subsequently, its
examination by SEM microscopy will allow us to discern the crystallinity of the sample, the
presence of various phases and to carry out a preliminary study of its composition by EDX
spectroscopy. With these data we would continue its study in an analytical microscope of
100-200 kV where we would proceed to study by SAED its reciprocal network, by EDX the
composition of each microcrystal and by medium resolution microscopy, both in brightfield
Finally, when the problem requires it, the sample is taken to a high resolution
electron microscope already knowing perfectly the necessary orientation of the crystal and
having simulated the high resolution images for different thicknesses and defocus values.
References
https://www.infinitiaresearch.com/noticias/tecnicas-de-microscopia-para-
caracterizacion-de-materiales/
https://www.scai.uma.es/areas/micr/sem/sem.html