$CM_FORMAT JEOL/EO

$CM_VERSION 1.0
$CM_COMMENT FMIPA ITB
$CM_DATE 2022-01-26
$CM_TIME 10:23:21
$CM_OPERATOR General
$CM_INSTRUMENT JSM-6510
$CM_ACCEL_VOLT 15
$CM_MAG 5000
$CM_SIGNAL SEI
$CM_STAGE_POS -5.059 -10.317 12.000 0.000 0.000
$CM_STAGE_X -5.059
$CM_STAGE_Y -10.317
$CM_STAGE_T 0.000
$CM_STAGE_Z 12.000
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 5��m
$$SM_FILM_NUMBER 0000
$$SM_TITLE PC-SEM M600
$$SM_WD 12
$$SM_SPOT_SIZE 30
$$SM_VACUUM
$$SM_PHOTO ON
$$SM_MERGE ON
$$SM_SIGNAL1
$$SM_SIGNAL2
$$SM_MULTI
$$SM_VAC_MODE HV