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Operating Instructions

MS 403C Aëolos Mass Spectrometer

NETZSCH-Gerätebau GmbH
Wittelsbacherstraße 42
D - 95100 SELB
Telephone: +49 (0) 9287 881- 0
Telefax: +49 (0) 9287 881- 505
E-Mail: at@netzsch.com
Internet: http://www.netzsch-thermal-analysis.com

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MS 403 C Aëolos
Operating Instructions

CONTENTS

SAFETY INSTRUCTIONS ..................................................................................1

INTRODUCTION ............................................................................................2

MAIN COMPONENTS .....................................................................................3

OPERATIONAL CONTROL AND STATUS DISPLAY ......................................................... 3


TEMPERATURE CONTROLLER .................................................................................. 4
HEATED GAS INLET SYSTEM ................................................................................... 5
STRUCTURE AND TECHNICAL SUPPORT ..................................................................... 7
PUMPING SYSTEM ............................................................................................ 8
PRESSURE GAUGE ............................................................................................. 8
ANALYSIS UNIT WITH ELECTRONICS ..................................................................... 8
ELECTRONIC BOARD ......................................................................................... 9

COMMISSIONING .......................................................................................10

INSTALLING AND CHANGING THE CAPILLARY ....................................................... 10


CHANGING THE CAPILLARY .......................................................................... 14
CLEANING THE ADAPTER ................................................................................. 23
INSTALLING THE ELECTRONIC UNIT OF THE QMA ................................................. 25
DISMOUNTING OR INSTALLING THE HOUSING ...................................................... 25
INSTALLING THE DATA LINE .............................................................................. 26
INSTALLING THE EVALUATION SOFTWARE ........................................................... 26
SWITCHING ON THE MEASURING UNIT ................................................................ 26
BAKING OUT THE VACUUM RECIPIENT ................................................................ 27
SWITCHING OFF THE MEASURING UNIT ............................................................... 28

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Operating Instructions

ELECTRICAL CONNECTIONS ...........................................................................29

TROUBLESHOOTING .....................................................................................31

APPENDIX ................................................................................................33

TECHNICAL SPECIFICATIONS ................................................................................. 33


SPARE PARTS .................................................................................................... 34

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MS 403 C Aëolos
Operating Instructions

Safety instructions
Before opening the measurement unit, you have to switch off the device and turn
off the power supply.

Even if the device is switched off, it is possible that the temperature of the gas
inlet unit's furnace is very high (the word “HOT” is visible on sticker). Therefore it
is necessary to check the surface temperature of the gas inlet unit if you have to do
some work with the furnace (the word “HOT” is invisible on sticker). You can read
the furnace temperature by switching on the device. It is then possible to decrease
the programmed temperature value.

To prevent contaminations of the vacuum system, you should use particle-free


gloves when working with the ion-source or capillary.

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MS 403 C Aëolos
Operating Instructions

Introduction
The MS403C Aëolos gas analysis system is used for the qualitative determination of
gas components, which are emitted during the thermogravimetric analysis.

The system consists of the following components:


• oil-free vacuum system
• Quadrupole-Mass Spectrometer(QMA200), range: 0 – 300 amu
• controlled heating transfer line with changeable capillary and gas inlet
unit
• measuring and evaluation software

The Quadrupole-Mass Spectrometer is equipped with a crossbeam–ion source for a


high linearity of signals with a low fragmentation of molecules and a channeltron
(SEM) detector for fast and sensitive data evaluation.

Vacuum is generated by a turbo molecular pump and a membrane pump


connected in series.

For the determination of working pressure in the vacuum recipient, a PKR 261
pressure gauge with a range of 1000 mbar - 10–9 mbar is used. The measured
pressure is evaluated, saved and displayed by the software.

The evaluation software is controlled by an analog trigger signal. There are also
digital contacts for input and output at your disposal.

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MS 403 C Aëolos
Operating Instructions

Main components

Operational control and status display

QMS 403 C

transfer line
online
300
inlet system

300 heating

Figure 1: operational control

status display meaning

tansfer line green LED: temperature of the transfer line at the


programmed value
inlet system green LED: temperature of the furnace at the
programmed value
pump state green LED: rated speed of the turbo pump is reached
red LED: error turbo pump
online measurement is active
heating the “heating” key switches on the furnace for the
vacuum recipient automatically to heat the recipient (see
“bake out” in manual).
transfer line temperature controller for transfer line
inlet system temperature controller for furnace

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MS 403 C Aëolos
Operating Instructions

Temperature controller

300
K1 K2
Figure 2: temperature controller

OMRON 702040 temperature controllers are available for the transfer line and the
furnace. As a standard, both controllers are adjusted to a programmed
temperature value of maximum 300°C. This value can be adjusted to the different
applications anytime by the operator. The controllers are switched on and off by
the Quadrupole-Mass Spectrometer.

A detailed description of the controllers is included in the manual.

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MS 403 C Aëolos
Operating Instructions

Heated gas inlet system

transfer line

protection grid fixing screws

Figure 3: gas inlet unit with protection grid

The temperature-controlled (max. 300°C) gas inlet system consists of the furnace
and the transfer line with an inside capillary. The protection grid is fixed to the
displacement unit by 4 fixing screws and has to be removed before opening the
measurement unit (see Figure 3 and Figure 4).

displacement unit

furnace

Figure 4: gas inlet unit without protection grid

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MS 403 C Aëolos
Operating Instructions

The displacement unit can be fixed at the highest position on the back side by
fixing a screw. The quick-release fastener (see Figure 5) between the vacuum
recipient and the gas inlet system consists of the stretch fastener and the copper
sealing (max. torque: 7-8 Nm).

quick-release fastener

Figure 5: quick-release fastener

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Operating Instructions

Structure and technical support

2 1 3 4

8
6

Figure 6: QMA measurement unit without cap

1 turbo molecular pump


2 controller for turbo molecular pump
3 sealing cap of the resource reservoir
4 membrane pump
5 pressure gauge
6 analysis unit of the QMA with ion-source, rod system, and detector unit
7 electronic unit of QMA
8 electronic board

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MS 403 C Aëolos
Operating Instructions

Pumping system

The pumping system is free of oil. Exhaust gases from the pumping system will be
diverted from the device by the “EXHAUST“ connection and should be connected
to an extractor unit by using an exhaust tube (external diameter 6 mm).

Pressure gauge

The pressure gauge measures a voltage which is proportional to the pressure.


Voltage is read in by the QMA analog input and evaluated by the software. The
measurement, and therefore the output signal of the pressure gauge, depends on
the type of gas. The pressure gauge is calibrated to N2. If other gases are used, the
measured value has to be corrected with a gas calibration factor (dependent on
the gas). Please consult the manual of the PKR 261.

Analysis unit with electronics

10

11

Figure 7: analysis unit of QMA

9 clip for electronic unit


10 UHV flange with copper sealing for analysis unit
11 ion-source window

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MS 403 C Aëolos
Operating Instructions

The analysis unit is connected to the vacuum recipient by a UHV-flange with


copper sealing. With the help of the show glass, you can check the functioning of
the cathode (shining if the cathode is on). The electronic unit can be separated
from the analysis unit by disconnecting the clip and the supply cables
(see Figure 8).

12

Figure 8: supply cables on electronic unit

12 supply cables on electronic unit

Electronic board

The electronic board is for controlling the pumps and takes over switching
functions. All connecting lines are pluggable. Below the board, there are relays for
the power switch of the heating circuit.

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Operating Instructions

Commissioning

Before the first installation, ensure that the power plug of the instrument is
unplugged and that the power switch is off (position 0).

Installing and changing the capillary

• In the delivery status, the transfer line is dismantled and the quartz capillary
is coiled inside the furnace of the gas inlet unit.
• For a first installation of the capillary, you have to do the following steps:

1. Removing the protection grid

• Loosen the screws.


• Remove the protection grid.

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Operating Instructions

2. Opening the furnace

• The word “HOT” on the sticker


must be invisible (that means
furnace is cold).

ATTENTION!
If the sign “HOT” can be seen,
there is a danger of burning!
• Loosen the screws.
• Remove the front side of the
furnace.

sticker “HOT” front side of the furnace

3. Connecting the transfer line to the furnace

• Plug the end of the transfer


line from which electrical cables
transfer line
emerge into the receptacle so
that the transfer line extends
5 mm from the insulation
material into the furnace
receptacle
(if necessary, the insulation
fixung screws
material must be pushed back
into the original position).
5mm • Affix the transfer line with both
screws.
insulation
material

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Operating Instructions

4. Pushing the capillary into the transfer line


For the first commissioning, the capillary is coiled inside the furnace.

• Uncoil the capillary inside the


furnace and push it into the
transfer line until the
capillary protrudes (a few
cm) from the adapter on the
transfer line STA side.

furnace

5. Affixing the capillary to the adapter (STA side)

• Push a new graphite sealing


adapter
(ferrule) and the nut over
the protruding capillary.
• Cut the protruding capillary.
graphite sealing 1. scarify
(ferrule)
nut
90 mm

capillary
2. snap off

• Affix the protruding capillary


(Coil the remaining capillary into the furnace with the graphite sealing
so that it can be pulled out on the STA side.)
(ferrule) and the nut so that
approx. 90 mm of the
capillary extends from the
adapter (see figure).

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MS 403 C Aëolos
Operating Instructions

6. Affixing the transfer line to the STA by gas connection adapter

adapter on the • Attach the adapter from


transfer line
the top onto the STA.
• Turn the adapter
counterclockwise until it
stops.
• Affix the adapter with
the 4 nuts.

connection on the STA side

7. Attaching the protection grid on STA side

protection grid • Place the protection grid


over the adapter.
• Affix the protection grid
with the 3 screws.

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Operating Instructions

8. Closing the furnace


• Coil the remaining capillary circularly into the furnace so that it can be
pulled out easily on the STA side.
• Attach the front side of the furnace.
• Affix the protection grid.

Changing the capillary

1. Removing the protection grid

• Loosen the screws.


• Remove the protection grid.

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Operating Instructions

2. Opening the furnace

• The word “HOT” on the sticker


must be invisible (that means
furnace is cold).

ATTENTION!
If the sign “HOT” can be seen,
there is a danger of burning!
• Loosen the screws.
• Remove the front side of the
furnace.

sticker “HOT” front side of the furnace

3. Opening the quick-release fastener

• Loosen the screw connection of


the quick-release fastener with
a combination wrench.
• Remove the quick-release
fastener.

screw connection quick-release


fastener

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Operating Instructions

4. Pushing the furnace upwards

• Loosen the fixing


screw.
• Move the furnace into
displacement unit
the highest position.
• Tighten the fixing
fixing screw screw.

5. Removing the protection grid on the STA side

protection grid • Loosen the screws


(only loosen, do not
remove!).
• Remove the
protection grid (lift it
upwards).

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Operating Instructions

6. Loosening the adapter on the STA side

adapter on the • Loosen the 4 nuts (only


transfer line
loosen, do not remove!).
• Turn the adapter clockwise.
• Remove the adapter (lift it
upwards).

connection on the STA side

7. Removing the old capillary


• To remove the old capillary, you have to remove the nut in the furnace as
well as the nut on the adapter on the STA side (see next figure).
• Pull the capillary out of the transfer line and dispose of it correctly.

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MS 403 C Aëolos
Operating Instructions

adapter
nut

graphite sealing
(ferrule)
nut

capillary
capillary guide

furnace adapter

8. Cutting the new capillary

• Cut a new capillary to a length of about 220 cm.

• Scarify the capillary.

• Snap off the capillary at the


scarified point.

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MS 403 C Aëolos
Operating Instructions

9. Installing the new capillary in the furnace

• Push the nut and the


capillary graphite sealing (ferrule)
over the capillary.
• Slightly shorten the end
of the capillary over
nut
which the nut and
graphite sealing (ferrule) graphite sealing have

hole in base plate just been pushed.


• Push this end of the
capillary through the
hole in the base plate
and capillary guide so
that the excess length is
10 mm.
• Tighten the nut.

capillary guide

10mm

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MS 403 C Aëolos
Operating Instructions

10. Pushing the capillary into the transfer line

• Push the capillary into the


transfer line until the
capillary protrudes (a few
cm) from the adapter on
the STA side.
transfer line

furnace

11. Affixing the capillary to the adapter (STA side)

• Push a new graphite


adapter
sealing (ferrule) and the
nut over the protruding
capillary.
graphite sealing • Cut the protruding
(ferrule)
capillary again.
nut
90 mm

• Affix the protruding


capillary with the graphite
capillary sealing (ferrule) and the
nut so that approx. 90 mm
of the capillary extends
from the adapter (see
figure).

Coil the remaining capillary into the furnace so


that it can be pulled out on the STA side.)

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MS 403 C Aëolos
Operating Instructions

12. Affixing the transfer line to the STA by gas connection adapter

adapter on the • Attach the adapter from


transfer line
the top onto the STA.
• Turn the adapter
counterclockwise until it
stops.
• Affix the adapter with the
4 nuts.

connection on the STA side

13. Attaching the protection grid on STA side

protection grid • Push the protection grid


over the adapter.
• Fix the protection grid
with the 3 screws.

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MS 403 C Aëolos
Operating Instructions

14. Pushing the furnace downwards

• Check whether there is


a copper sealing
between the flanges.
• Loosen the screw on
flange the displacement unit
(see 4).
• Move the furnace
downwards.

copper sealing

15. Closing the quick-release fastener

• Put on the quick-


release fastener.
• Tie up the screw with
a torque of 7-8 Nm.

torque 7-8 Nm quick-release


fastener

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Operating Instructions

16. Closing the furnace

• Coil the residual capillary circularly into the furnace so that it can easily be
pulled out on the STA side.
• Attach the front side of the furnace.
• Affix the protection grid.

Switch on the furnace and perform a measurement.

Cleaning the adapter

protection grid • Loosen the screws (only


loosen, do not remove!).

• Remove the protection grid


(lift it upwards).

allen screws • Unscrew the allen screws so


that the support ring is
moveable (now you can
reach all three hexagon
head screws on the
adapter, see next picture).

support ring

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Operating Instructions

• Loosen (only loosen, do not


remove!) the hexagon head
screws on the adapter.

• Turn the adapter


counterclockwise and lift it
upwards.

hexagon head screws

• Use a screw driver and


unscrew the gas tube (the
gas tube consists of a
temperature guidance tube
with a separate cover tube,
see next figure below).

gas tube screw driver

gas tube • Remove the cover tube for


cleaning the slot of the
temperature guidance
tube.
temperature cover tube
guidance tube
(with slot for gases)

• Install the adapter in reverse order.

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MS 403 C Aëolos
Operating Instructions

Installing the electronic unit of the QMA

If the electronic unit was dismantled for transport, place it in horizontal position
on the analysis unit. Unfix the clip on the electronic unit and set the device on the
analysis unit so that the spring catches the nut on the flange of the analysis unit
easily. If necessary, you may turn the electronic unit on its own axis. Fasten the clip
sturdily by hand and plug in the connecting cables (see Figure 8) and affix them.

Dismounting or installing the housing

Before dismounting the housing remove the upper cover plate (lift it upwards) and
then loosen the two front located allen screws below the plate. In order to pull out
the front cover loosen the lower four hexagon head screws on the front cover.
Disconnect the connecting cables for the operating elements and the temperature
controllers on the respective board. For removing the right or left cover plate
loosen also the lower hexagon head screws on the respective cover and the allen
screws on the rear. The Installation of the cap must be done in reverse order.
Details are shown in Figure 9.

upper cover plate

Figure 9: removing the cover plates

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Operating Instructions

Installing the data line

Connect the ends of the serial cable for data exchange to the serial interface of the
PC (COM1/COM2) and to the RS-232 connector on the back side of the Aëolos
instrument. Connect the STA trigger cable to the ANALOG I/O connector on the
Aëolos instrument.

Installing the evaluation software

Install the evaluation software as directed in the manual. Check that the data
exchange through the serial interface is active with the help of the Parset.exe
program (see short manual QS). Check that the “MSDiagnose” diagnostic program
is available. If necessary, install it as directed in the enclosed software
documentation.

Switching on the measuring unit

Be sure that the cap is locked and that the line for exhaust gases is installed.
Check the quick-release fastener for a tight fit. After connecting the line cord, turn
on the instrument with the power switch.

The pumping system is started and signals the achievement of the minimum
necessary pressure (“pump state” display on the front of the instrument, max. 5
minutes). The temperature controller of the gas inlet system starts heating the
transfer line and the furnace of the gas inlet system. The current temperature of
the transfer line and the gas inlet system can be read from the temperature
controllers. After 30 – 40 minutes, the furnace will have reached the programmed
temperature value (300°C). After the status display lights up, you can start the
„MSDiagnose“ diagnosis program and the pressure in the recipient will be
displayed.

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Operating Instructions

–5
For air or nitrogen (N2), the system pressure should be at about 2x10 mbar when
–5
the transfer line is heated to 300°C (room temperature approximately 5x10 mbar).
–5
If the system pressure is much less than 2x10 mbar, the capillary is probably
–5
congested. A pressure value of more than 4x10 indicates a leak in the vacuum
system. If the necessary pressure is achieved, you can switch on the cathode (see
software manual). When the displays of “pump state“ on the front are active, then
the system is ready for measurement.

Please consider that for measurements with the Aëolos-MS the gas flow on the
connected instrument (e.g. STA) must not be switched off.

Baking out the vacuum recipient

If the instrument has not been active for several days, it is suggested that the
recipient be baked out to remove adsorbed gases. To do this, press the bake key
on the front of the measuring unit. If the red light on the front is shining, the
measurement will probably not be correct, since the recipient is still being heated
and therefore the basic signal is still rising.

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Operating Instructions

Switching off the measuring unit

Before switching off the measuring unit, be sure that the cathode and the SEV are
turned off. Exit the measuring program.

The measuring unit should be switched off by the power switch on


its back side at least 10 minutes after the cathode was switched off.

For different models, the vacuum system will be ventilated through the transfer
capillary or by an air valve. After switching off the unit, the rotor of the
turbo molecular pump will still be turning. About 5 minutes after that, you can
open the recipient or move the system. Premature ventilation or transport can
damage the turbo molecular pump.

The temperature of the furnace will remain at above 50°C for at least 30
minutes (“HOT“ sticker).

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MS 403 C Aëolos
Operating Instructions

Electrical connections

RS 232
TRANSFER LINE

CONTROL
TMU

P1 ANALOG I/O
POWER EXHAUST

Figure 10: Aëolos back side

designation function version

POWER voltage switches, filter,


2 backups
RS-232 serial interface to PC Sub-D 9pin connector
CONTROL digital in/output Sub-D 15pin connector
ANALOG I/O analog in/output Sub-D 15pin connector
TRANSFER LINE operating voltage plug-in connector,
transfer line 4 pin screw connection
TMU service for turbo pump 5 pin screw connection
EXHAUST gas outlet pumping system connection tube: ∅ 6 mm

P1/P2 analog pressure read out

The analog trigger signal for the control of the QMA is fed by the ANALOG I/O
connector (contact 14 and 15).

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Operating Instructions

configuration of contacts

CONTROL: contact meaning

1 DI#0 (1)
2 DI#0 (2)
3 DI#1 (1)
4 DI#1 (2)
8 DO#0 (24VDC)
15 DO#0 (0 VDC)
12 0 VDC
13 0 VDC
14 24 VDC

5, 6, 7, 9,10, 11 free

ANALOG I/O: contact meaning

7 AI_CH1+ PKR
8 AI_CH1- PKR
9 AO_CH1+
10 AO_CH2+
11 AO_CH3+
12 AO_CH4+
13 AO_COM
14 AI_CH0 + Trigger STA
15 AI_CH0 - Trigger STA

1 through 6 free

TRANSFER LINE: contact meaning

1 48 VAC (L)
2 48 VAC (N)
3 NiCr/Ni (+)
4 NiCr/Ni (-)

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Operating Instructions

Troubleshooting

In the following table, there are notes to eliminate possible errors.

problem possible causes error correction

pressure oversized Quick-release fastener Retighten quick-release


(p > 2x10 mbar) -5
is loose. fastener; if necessary,
(“pump state“ signal is change the copper sealing.
ok.) Capillary screw Retighten the screw
connection is loose; connection, replace the
broken capillary. graphite sealing (ferrule), or
change the capillary.

Temperature of gas Check programmed


inlet unit too low. temperature value.
very low pressure Capillary congested.
(much less than
2x10 – 5 mbar)
no “pump state“ Leak at the quick- Retighten quick-release
display after warm up release fastener or fastener; if necessary,
capillary screw change copper sealing,
connection. retighten screw connection,
replace the graphite sealing
(ferrule), or change the
capillary.
Counter pressure at Check whether the exhaust
the exhaust line. system is functioning.
Air valve defective. Replace air valve.
Membrane pump Demount pump and do a
defective. maintenance check.
Turbo pump defective. Remove the pump and do a
maintenance.

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Operating Instructions

no “transfer line“ or Error at heater loop of Check programmed


“temperature“ display the transfer line or of temperature value at the
the furnace. Omron controller; check the
fuse for the heater loops,
missing supply voltage, relay
defective, heating cartridges
defective.
no measurement signals Cathode switched off Switch on the emission,
or defective. switch over to the second
filament.
SEM switched off or Switch on SEM and check
working voltage too the voltage.
low .
incorrect measurement Ion flow signals too Check settings for
results low. emission/SEM, check system
pressure.
Bad IQ-focus. Focus the IQ-source
(TuneUp.exe).
Working voltage of Check the SEM voltage.
SEM too low.

The substitution of components of the pumping system, ion-source or the


channeltron is prohibited unless the work is carried out by specialists.

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Operating Instructions

Appendix

Technical specifications

610

575 530

dimensions: 575x610x530 mm

weight: 60 kg

electrical connection: 230 VAC 50/60 Hz (optional 115 VAC 60Hz)

power consumption: 600 VA

gas inlet: single-stage, heating up to 300°C


quick-release fastener at the direction of the
recipient

ion-source: Crossbeam

range: 1 - 300 amu

detector: Faraday / SEM (Channeltron)

type of measurement: MID (max. 64 channels)


Scan Analog
Scan Bargraph

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Operating Instructions

Spare parts

article order number

transfer line, heatable up to 300°C, 6.226.1-91.5


with fused silica capillary, length 1.5 m
transfer line, heatable up to 300°C, 6.226.1-91.10
with fused silica capillary, length 2.0 m
gas tube:
temperature guidance tube HTP4000A18.011-03
cover tube HTP4000A18.011-04
capillary 75 µm NGB 802922
graphite sealing for adapter (14.5x8x2 mm) NGB 802858
graphite sealing for transfer line (14.5x10x3 mm) NGB 802859
graphite sealing (ferrule) for capillary NGB 802958
copper sealing quick-release fastener NGB 802957
quick-release fastener NGB 802990
filament NGB 804366
copper sealing DN63CF GB 427061
copper sealing DNCF40 GB 426408
formation chamber NGB 809659
operating fluid reservoir for turbo pump NGB 804367

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