Pneumatic Equipment For Food Industry: Theme

Pneumatic Equipment
for Food Industry
Energy Saving/
Theme Food Sanitation Environmental Resistance Reduced-wiring High Speed Temperature Control High Pressure Safety Measures Others
Hygienic Water Resistant Heat Air Blow High Speed Standards Steam
Paper Powder/ Static Temperature High
Resistant/ Measures against Adsorption
Dust Resistant Neutralization Control Pressure
Grease for Food Stainless Steel Cold Resistant Pressure/ High Frequency/ Residual Pressure Transfer
Processing Flow Rate Long Lurch Prevention
Equipment Detection Service Life Drop Prevention Maintenance
Misoperation Standards
Applicable Reduced Electric/ Prevention
Equipment Materials -wiring Positioning
Actuators
Valves
Fittings & Tubing

Flow Control Equipment
Pressure Control Equipment/

Blow Guns
Static Neutralization
Equipment
Detection Switches
Vacuum Equipment
Temperature Control
Equipment
Electric Actuators
P-E15-20A
Process/Theme Before filling Containers
Brewing, Blending, Sterilization Material supply Molding Cleaning
Beer, Beverages
Blow molding Rinser

Hygienic
Food Grease for Food Processing Equipment
Sanitation (certified by NSF-H1)
Applicable Materials
Water Resistant
Stainless Steel
Environmental
Paper Powder/Dust Resistant
Resistance
Heat Resistant/Cold Resistant
Air Blow
Energy Saving/
Pressure/Flow Rate Detection
Reduced-wiring
Reduced-wiring
High Speed
High
High Frequency/Long Service Life
Speed
Electric/Positioning
Temperature Control Temperature Control
High Pressure High Pressure

Standards/Measures against Residual Pressure/Lurch
Safety Measures Prevention/Drop Prevention/Misoperation Prevention
Steam/Adsorption Transfer/
Others Maintenance/Standards
Reduced-wiring Static Neutralization High Pressure Hygienic
Check valve
VCHC40
IN
P
Silencer Direct operated regulator

EXH P
VCHN3/4 Max. (Relieving type)
6.0 MPa
IN VCHR30/40
Discharging Charging
Stainless steel
OUT
Water Resistant Water resistant
Enclosure: IP67 Pilot operated 2 port solenoid valve

Grease for Food Processing Equipment
Pilot operated 2 port solenoid valve Normally closed
Normally open
VCH41
VCH42
Heat Resistant
Maintenance High Speed Applicable Materials

Can be replaced individually! High speed: 3000 mm/s
High Power Cylinder

Air Blow
RHC Series
Stainless Steel
Steam (Heating) Pressure/Flow Rate Detection
1 These are examples. Customers are responsible for deciding on the application of the products.
Filling Capping Labeler Transportation
Filling Capping Wrapping Conveyor
Filling Capping Inspection
High Frequency Hygienic Static Neutralization Air Blow

Metal seal
Stainless Steel

High Speed
Hygienic
Stainless steel
Water resistant
Heat Resistant
Static Neutralization Steam Electric/Positioning
Maintenance/Standards
ISO cylinders
These are examples. Customers are responsible for deciding on the application of the products. 2
Process/Theme
Stirring/Mixing Heating Cleaning Cutting
Confectionery, Noodle,
Bread Production, etc.
Stirring/Mixing machine Oven fryer Cleaning machine Slicer

Hygienic
Sanitation (certified by NSF-H1)
Applicable Materials
Water Resistant
Stainless Steel
Environmental
Paper Powder/Dust Resistant
Resistance
Heat Resistant/Cold Resistant
Air Blow
Energy Saving/
Pressure/Flow Rate Detection
Reduced-wiring
Reduced-wiring
High Speed
High
High Frequency/Long Service Life
Speed
Electric/Positioning
Temperature Control Temperature Control
High Pressure High Pressure

Standards/Measures against Residual Pressure/Lurch
Safety Measures Prevention/Drop Prevention/Misoperation Prevention
Steam/Adsorption Transfer/
Others Maintenance/Standards
Hygienic Heat Resistant Hygienic Hygienic

Stainless Steel
Water Resistant
Stainless Steel Stainless steel
Water resistant
Temperature Control Steam (Heating) Temperature Control Temperature Control

Grease for Food Processing Equipment Grease for Food Processing Equipment
Pressure/Flow Rate Detection Cold Resistant
From –40°C
Heat Resistant
Cold Resistant
Air Blow
From –40°C
Pressure/Flow Rate Detection Pressure/Flow Rate Detection
Electric Electric
Air Blow Air Blow
3 These are examples. Customers are responsible for deciding on the application of the products.
Packaging machine 1 Packaging machine 2 Box making Caser robot Palletizer
Heat Resistant Heat Resistant Adsorption Transfer Adsorption Transfer Adsorption Transfer
Static Neutralization Static Neutralization Electric
Paper Powder/Dust Resistant Paper Powder/Dust Resistant Paper Powder/Dust Resistant

High Frequency/Long Service Life Temperature Control
Lube-retainer
Pressure/Flow Control Static Neutralization Applicable Materials
These are examples. Customers are responsible for deciding on the application of the products. 4
Products
Actuators
Food Hygienic s P.9 Food Grease for Food Processing Equipment s P.10 Environmental Stainless Steel sP.11
Sanitation Sanitation Resistance
M Made to Order
Applicable Models
Symbol Series CJ5-S, CG5-S
HYm MXQ, MXF, MXW
-X9
MXP, MXPJ, MXY M Made to Order s P.11
• Made of stainless steel -XC6
-X79 MIW, MIS, MHm
• Tie-rod, cushion valve, tie-rod nut, etc.
CM2-Z, CG1-Z made of stainless steel -XC7
-XC85 CA2-Z, CQ2, CQS • Double clevis and double knuckle joint
MGP, MGP-Z pins made of stainless steel -XC27
Environmental Water Resistant s P.12 Environmental Paper Powder/Dust Resistant s P.13

Resistance Resistance
Dust Grease film

(Foreign matter) formation
Piston rod CM2-Z CG1-Z CA2-Z CDQS
Lube-retainer
CM2-Z, CG1-Z, CQ2, CA2-Z
CDQ2 MXQmA MGP CXS
MB-Z, MB1-Z, MGPM, MGGM
Environmental Heat Resistant sP.14

Resistance
M Others s P.14
CJP2-XB6, CJ2-Z-XB6, CM2-Z-XB6, CG1-Z-XB6 • Cylinder with Heat Resistant Auto Switch
MB-Z-XB6, MB1-Z-XB6, CA2-Z-XB6, CS1-XB6 (Max.150°C) -XB14
CS2-XB6, CUJ-XB6, CU-XB6, CQS-XB6 • Heat Resistant Air Gripper
CQ2-XB6, CG5-XB6, CY3B-XB6, MK-XB6 (−10 to 100°C) -X4
MGP-XB6, MGP-Z-XB6, MGQ-XB6, MGG-XB6
MGC-XB6, CXSJ-XB6, CXS-XB6
Environmental Cold Resistant sP.15 High High Speed sP.15 High High Frequency/Long Service Life sP.15
Resistance Speed Speed
CJP2-XB7, CJ2-Z-XB7, CM2-Z-XB7 RHC MQM

CG1-Z-XB7, CU-XB7, CQS-XB7, CQ2-XB7
Safety Drop Prevention sP.16

Measures
End Lock Cylinders Lock Cylinders

CBJ2, CBM2, CBG1, CBA2, MBB, CBQ2, MGG, MGP CLJ2, CLM2, CLG1, MLGC, CNG, CNA2
CXS, CXW, MGZ, MTS, MXS, MXQ, MY1H-Z, MY1H MNB, CNS, CLS, CL1, CLQ, RLQ, MLU
CS1-X1347 (Made to Order) MLGP, ML1C, MHT2
5
Products
Actuators
Standards sP.18 Specialized Products
Others
• Stainless Steel Compact Cylinder: Water Resistant Type/
CQ2B32RD-W4420/4491-m, etc. P.11 s
Standard no. ISO6432 ISO15552 ISO21287 • External Stainless Steel Compact Guide Cylinder/MGPMm-X2532 P.11
Actuators
s
C85 CP96/C96 C55 • Mechanically Jointed Rodless Cylinder/MY3B63-m-DCJ6064J P.12 s
• Improved Environmental Resistance: Parallel Style Air Gripper/MHZL2-m-X3361 P.12

s
Series • Heat Resistant Cylinder with Auto Switch P.14 s
• Heat Resistant Auto Switch P.14 s
• Air-Hydro Booster P.15 s
Valves
Valves
Energy
Food Hygienic sP.19 Environmental Stainless Steel s P.19,26 Saving/ Air Blow sP.19
Sanitation Resistance Reduced-
wiring

Fittings & Tubing
VFN2120N-X23/-X36 LVA INA-14 VQ20/30
Equipment/Blow Guns
XTO-674
Pressure Control
Energy
Saving/ Reduced-wiring sP.19 High High Speed s P.20 High High Frequency/Long Service Life sP.20
Reduced- Speed Speed
wiring
M8/M12 Connector
sP.20
Equipment
EX260, EX250 SX10 VQC, VQZ
Detection Switches
High High Pressure sP.21 Safety Standards s P.21 Safety Measures against Residual Pressure sP.22
Pressure Measures Measures
Safety Standard ISO13849-1 Certified
Vacuum Equipment
VCH4m, VCH410
VCHC40 VHS
With residual pressure release valve
VP-X536/538/555, VG-X87 SY3000/5000/7000
Temperature Control
Safety Lurch Prevention sP.22 Safety Drop Prevention s P.23 Safety Misoperation Prevention sP.23
Equipment
Measures Measures Measures

Electric Actuators
AV Double Check Spacer (With residual pressure release valve) VR51

SY3000/5000/7000
Double Check Block
S0700, VQ, VQC, VQZ
6
Products
Valves
Steam sP.24 Maintenance sP.24 Specialized Products
Others Others
• With M12 pre-wired connector/
VQ4000 P.19 s
VXB, VXS SY3000/5000/7000
Fittings/Tubing/Flow Control Equipment

Food Applicable Materials sP.27 Environmental Stainless Steel sP.25 Environmental Heat Resistant s P.26
Sanitation Resistance Resistance
TL/TIL
TLM/TILM
TH/TIH
TD/TID KQG2, KFG2 KKA LQ1, LQ3
TU-X214/217 KPG, MS
Environmental Stainless Steel sP.29 Safety Measures against Residual Pressure sP.30 Safety Lurch Prevention s P.31
Resistance Measures Measures
ASG/AS-FPG
INA-14 ASmmmmmE KEm ASD, ASD-FM, ASD-D, ASD-T
Safety Drop Prevention sP.32 Maintenance sP.29 Specialized Products

Others
Measures
• Stainless Steel Specification
Standard Speed Controller
In-line Type/INA P.29
s
• Stainless Steel Specification

Standard Speed Controller
Metal Body Elbow Type/INA s P.29
ASP T0604/TH0604-X64
Pressure Control Equipment/Blow Guns

Energy
Environmental Stainless Steel sP.33 Saving/ Air Blow sP.33
Resistance Reduced-
wiring
SRH, SRP AW-X2622 VMG KN ZHm-m-X185

7
Products
Pressure Control Equipment/Blow Guns Static Neutralization Equipment

High High Pressure sP.34 Specialized Products Environmental Static Neutralization sP.35
Pressure Resistance
• Blow Gun Using Grease for Food Machines/
VMG-X7
Actuators
• Blow Gun with Hook/VMG-X110
VCHR VCHN
M Made to Order P.35 IZS4m, IZN10, IZF10, IZF21/31
Valves
s
• High pressure -X425 IZD10, IZE11, IZH10, etc.
Detection Switches

Energy
Fittings & Tubing

Environmental Stainless Steel sP.37 Saving/ Pressure/Flow Rate Detection sP.38 High High Pressure sP.40
Resistance Reduced- Pressure
wiring
Equipment/Blow Guns
Pressure Control
Z/ISE20, Z/ISE30A
ZSE/ISE80 Z/ISE40A PFM, PFMB, PFMC ISE75/75H
PSE56m PSE54m PF2A, PF3W
PSE200/300 LFEm
Vacuum Equipment
Equipment
Environmental Stainless Steel sP.41 Others
Adsorption Transfer s P.41
Resistance
Detection Switches
ZK2 ZH ZH-X185 ZP3E
Laser printing
ZH-X267
Vacuum Equipment
ZP2
Specialized Products
• Vacuum Pad for Soft Film/
ZP-606-25CS0J20 P.42
s
ZP3 XT661
Temperature Control
Temperature Control Equipment Electric Actuators

Equipment
Temperature Temperature Control sP.43 Environmental Water Resistant sP.12 High Electric/Positioning sP.45
Control Resistance Speed
Electric Actuators
HRSE, HRS, HRS090, HRS100/150

HRSH090, HRSH, IDHm LEY-25/32-X5, LEY63-P LEm
8
Actuators
Food Hygienic
Sanitation
A water resistant cylinder configured for easy cleaning

Five times increase in service life compared to current model (SMC ratio)
Water-proof examination result (Reference data)
1 2 3 4 5
Hygienic Design Cylinder (HYB, HYQ, HYC, HYG)
Water resistance
improvement cylinder Comparison with current model: Approx. 5 times
Standard cylinder
Washing in water/Temperature: 30°C, Flow rate: 160 cc/min
Hygienic Design Cylinder HY

Type Series Action Bore size [mm]
Round type HYB 20, 25, 32, 40, 50, 63, 80, 100
Basic type HYQ Double 20, 25, 32, 40, 50, 63
ISO standard type HYC acting 32, 40, 50, 63
With guide HYG 20, 25, 32, 40, 50, 63
Food grade grease (certified by NSF-H1) is available.
Features Ambient and fluid temperature: 0 to 70°C (Without auto switch)
0 to 60°C (With auto switch)
Flat, grooveless configuration New scraper

Eliminates the auto switch Scraper Grease retention in
groove and the holes for Plug bolt guide rod and
(Option) cylinder rod Plug bolt
cushion needle holes, etc. (Option)
Breathing port on guide
Current Cushion needle
<Use example> Water dispersion
environment
HYB General
environment
Cushion needle
Piping at the breathing port on
guide allows breathing outside
HYG
the water dispersion environment.
Special coating
HYC Guide accommodates a
special coating.
Plug bolt
(Option)
HYQ
External cover
(Option)
9
Sanitation
Certified by NSF-H1
Specifications
Actuators
Food zone
Seal material Nitrile rubber Not installable
Grease Grease for food Splash zone
Auto switch Mountable Not installable
Dimensions Same as standard type

Specifications other than above Same as standard type
Container
Warning
Valves
Precautions Non-food zone
Be aware that smoking cigarettes etc. after your hands have come into Food Installable
contact with the grease used in this cylinder can create a gas that is
hazardous to humans.

<Not installable>
Fittings & Tubing

Food zone··········An environment where food which will be sold as ∗: Avoid using this product in the food zone. (Refer to the figure above.)
merchandize, directly touches the cylinder’s components. ∗: When the product is used in an area of liquid splash, or a water resist-
Splash zone·······An environment where food which will not be sold as ant function is required for the product, please consult with SMC.
merchandize, directly touches the cylinder’s components. ∗: Operate without lubrication from a pneumatic system lubricator.
<Installable> ∗: Use the following grease pack for the maintenance work.
Non-food zone···An environment where there is no contact with food. GR-H-010 (Grease: 10 g)
∗: Please contact SMC for details about the maintenance intervals for this
cylinder, which differ from those of the standard cylinder.
Equipment/Blow Guns
Pressure Control
Made to Order
Grease for Food Processing Equipment <Applicable Series>

Food grade grease (certified by NSF-H1) is Symbol Symbol
Series Series
(Suffix) (Suffix)
used for all parts that grease is applied.
MXQ CM2-Z
Equipment
MXF CG1-Z
MXW CA2-Z
-X9
MXP CQ2 -XC85
MXPJ CQS
MXY MGP
MIW MGP-Z
Detection Switches
MIS -X79
MH
Series other than the above are also available.

Please contact SMC for details.
Vacuum Equipment
Temperature Control
Equipment
Electric Actuators
10
Actuators
Environmental Stainless Steel
Resistance
Stainless Steel Cylinder C5-S

Series Action Bore size [mm]
CJ5-S 10,16
Double acting
CG5-S 20, 25, 32, 40, 50, 63, 80, 100
Material
External metal parts: Stainless steel 304
Seal: Choose from NBR/FKM
Features
Ambient and fluid temperature: –10 to 70°C (Without auto switch),
–10 to 60°C (With auto switch)
Food grade grease (certified by NSF-H1)
Made to Order
Applicable for use under environments with water splashing. Stainless steel parts improve corrosion resistance.
Symbol
Made of Stainless Steel: -XC6 Suitable for the cases it is likely to generate rust by being immersed in the water and corrosion.
<Applicable Series>
CM2/CG1-Z/MB-Z∗2/MB1-Z∗2/CA2-Z∗1, 2/CS1∗2/CQS/CQ2/CV/MGP-Z/MGP/MGG/MGC/
CXS/CXSJ/RHC Series
∗1: Only head end lock is available for the CBA2.
∗2: There is a maximum stroke limit for CA2, MB, MB1 (ø100) and CS1 cylinders.
∗3: The CS2 series, made of stainless steel, is applicable as -XC68.
The CA2-Z, MB-Z and MB1-Z series are applicable as -XC68. (-XC6 for ø125)
Symbol
Tie-rod, Cushion Valve, Tie-rod Nut, etc. Made of Stainless Steel: -XC7
When using in locations where the rust generation or corrosion likelihood exists, the standard parts material have been partly changed to the stainless steel.
<Applicable Series>
MB-Z/MB1-Z/CA2-Z/CA2/CV Series
Symbol
Double Clevis and Double Knuckle Joint Pins Made of Stainless Steel: -XC27
To prevent the oscillating portion of the double clevis or the double knuckle joint from rusting, the material of
the pin and the retaining ring has been changed to stainless steel.
<Applicable Series>
CM2/MB-Z/MB1-Z/CA2-Z/CS1/CS2/CV/CG1/CQS/CQ2 Series
External Stainless Steel Compact Guide Cylinder Stainless Steel Compact Cylinder: Water Resistant Type
MGPM-X2532 CDQ2B32R-30-DCI7727I
¡Stainless steel is used for all external metal parts. ¡External parts (piston rod, body) are made of stainless steel 304.
¡Improved corrosion resistance in environments ¡Using a special scraper improved water resistance.
exposed to water ¡Interchangeable mounting pitch with the CQ2 standard
¡Food grade grease (certified by NSF-H1) is used. product.
¡Laser marking (Cylinder plate) ¡Water resistant 2-color indicator solid state auto switch is mountable.
¡Food grade grease (certified by NSF-H1) is used.
Stainless Steel Compact Cylinder: Water Resistant Type Water Resistant Compact Cylinder
CQ2B32RD-W4420-10 CQ2B20RD-W4419-15
CQ2B32RD-W4491-20 ¡External parts (piston rod, body) are made of
¡External parts (piston rod, body) are made of stainless steel 304. stainless steel 304.
¡Using a special scraper improved water resistance. ¡With special scraper
¡Interchangeable mounting pitch with the CQ2 standard product. ¡Grease: Lithium soap based grease
¡Grease: Lithium soap based grease
11
Environmental Water Resistant
Resistance
Water Resistant Cylinders
Actuators
Applicable for use in environments exposed to coolant or with water splashing.
 Dramatically improved water resistance
Relation of Coolant Entry and Sliding Distance ∗: For rod size ø20
Water resistant special scraper
Amount of coolant entry [g]

15 ×
10 Standard cylinder
Valves
Water resistant cylinder
5
0 50 100 150 200 250 300

Sliding distance [km]
Fittings & Tubing

Conditions
Water resistant Operating conditions ····· Air
Material: Stainless steel 2-color indicator Pressure ······················· 0.5 MPa
(Piston rod, Rod end nut) solid state auto switch Coolant ························· Water-soluble
Piston speed ················· 200 mm/s
Operating cycle ············· 60 cpm
Equipment/Blow Guns
Description Series Bore size [mm]
Pressure Control
Air cylinder CM2-Z 20, 25, 32, 40
Air cylinder CG1-Z 32, 40, 50, 63, 80, 100
Compact cylinder CQ2 20, 25, 32, 40, 50, 63, 80, 100
Air cylinder CA2-Z 40, 50, 63, 80, 100
Air cylinder MB-Z 32, 40, 50, 63, 80, 100
Square tube type air cylinder MB1-Z 32, 40, 50, 63, 80, 100
Compact guide cylinder MGPM 20, 25, 32, 40, 50, 63, 80, 100
Equipment
Guide cylinder MGGM 32, 40, 50, 63, 80, 100
Features Using a special scraper improved water resistance, compared to standard cylinders.
Electric Actuator/Rod Type: Dust-tight/Water-jet-proof (IP65 Equivalent)

<Applicable Series>
 Enclosure: IP65 equivalent Seal connector
Detection Switches
Size Motor type Model
· Step motor
25 (Servo/24 VDC)
Aluminum cover
Scraper Lube-retainer (Except LEY63) · Servo motor
Retains grease oil film.
LEY-X5
32 (24 VDC)
· AC servo motor
63 AC servo motor LEY63-P
Vent hole
Vacuum Equipment
Groove for auto switch
Temperature Control
Equipment
Water Resistant Compact Cylinder Mechanically Jointed Improved Environmental Resistance

CQSB12RD-P6057-10 Rodless Cylinder Parallel Style Air Gripper
¡With special scraper/Material: NBR MY3B63--DCJ6064J MHZL2-10SF-X3361
¡Piston seal material changed to H-NBR. ¡Dust cover prevents moisture from
¡Application example: entering. Material: Fluororubber
Electric Actuators
In the area around the ultrasonic cleaning ¡O-ring/Seal material: Fluororubber

machine in a high temperature region∗1 ¡Fluorine grease
(Hydrocarbon-based cleaning liquid at- ¡Magnet holder/Finger/
mosphere) Piston material: Stainless
∗1: Do not use in locations where the product steel
is directly exposed to cleaning liquid.
12
Actuators
Environmental Paper Powder/Dust Resistant
Resistance
Applicable to Operation in Micro-powder (10 to 100 mm) /General Environments: Cylinder with Stable Lubrication Function (Lube-retainer)
CM2-Z/CG1-Z/CA2-Z/CDQS/CDQ2/MXQA/MGP/CXS
Durability is 4 times stronger

than the standard model in micro-powder environments.
Durability comparison
5
4
4 times stronger Even with the built-in stable
lubrication function (Lube-retainer),
Durability (Life)
2
the overall length and
1
mounting are the same as
0
those of the standard model.
Cylinder with Standard With heavy-duty scraper: ∗: Except for some models
Lube-retainer cylinder -XC4 (Reference)
Comparison with the standard model and model with heavy-

duty scraper (-XC4) (Relative ratio of B10)
∗: The durability test is conducted in accordance with SMC test conditions.
As the Lube-retainer is mounted at two locations, Grease film formation

¡Grease film is formed on the Dust (Foreign matter)
piston rod surface to improve
Piston rod
the durability.
¡Entry of dust and foreign matter
is prevented.
Lube-retainers
¡T
he number of operating cycles can be improved even in general environments.
Applicable Cylinders
Air Cylinder Air Cylinder Air Cylinder Compact Cylinder/Compact Type
RoHS RoHS RoHS
CM2-Z Series CG1-Z Series CA2-Z Series CDQS Series
ø20 to ø40 ø20 to ø100 ø40 to ø100 ø20 to ø25 RoHS
Compact Cylinder Air Slide Table Compact Guide Cylinder Dual Rod Cylinder
RoHS RoHS RoHS
CDQ2 Series MXQA Series MGP Series CXS Series RoHS
ø32 to ø100 ø6 to ø25 ø20 to ø100 ø6 to ø32
13
Environmental Heat Resistant
Resistance
Made to Order
Actuators
Symbol
Heat Resistant Cylinder (–10 to 150°C): -XB6
Seal material and grease have been changed, so that it could be used even at higher temperature up to 150 from –10°C.
Specifications
Ambient temperature range –10°C to 150°C (CS1, CS2: 0°C to 150°C)
Seal material Fluororubber
Valves
Grease Heat resistant grease <Applicable Series>
CJP2/CJ2-Z/CM2-Z/CG1-Z/MB-Z/MB1-Z/CA2-Z/CUJ/CU/CQS/CG5/
Specifications other than CS1/CS2/CQ2/MGP/MGP-Z/MGQ/MGG/MGC/CXSJ/CXS/MK Series
Same as standard type
above and external dimensions

Fittings & Tubing
CY3B Series Cylinder with Heat Resistant Auto Switch
Symbol
Specifications (Max. 150°C): -XB14
Applicable size CY3B
Bore size ø6 to ø63 Heat resistant compact cylinder which can mount heat resistant
Ambient and fluid temperature 50 to 150°C∗1 solid state switch (D-M9J)
Maximum operating pressure 0.5 MPa
Equipment/Blow Guns
Specifications
Pressure Control
Piston speed 50 to 400 mm/s∗1
Applicable cylinder Compact cylinder/Standard type
∗1: W
hen using in less than 100°C range, since it could make a difference in the
maintenance cycle, depending on the operating speed, use it at 200 mm/s or less.
Series CQ2
Bore size [mm] 16, 20, 25, 32, 40, 50, 63
Temperature Range for Operating Cylinder and Piston Speed Type Non-lube
Fluid Air
q When using with the operating temperature from 60 up to 100°C, and the
Proof pressure 1.5 MPa
piston speed of more than 200 mm/s, please consult with SMC separately.
w When using with the operating temperature from 50 up to 100°C, and the Maximum operating pressure 1.0 MPa
Equipment
piston speed of 200 mm/s or less, XB6 specifications can be used. Minimum operating pressure 0.05 MPa (For ø16 only, 0.07 MPa)
e As for XB6, regarding the temperature range (over 50 to 60°C) which
overlaps the one of standard products, consider the tendency of operating Ambient and fluid temperature 0 to 150°C
temperature (upper, lower limits), then choose a model. Rubber bumper None
Rod end thread Male or female thread
[mm/s] +1.0
Stroke length tolerance 0 mm
400 Piston speed 50 to 500 mm/s
Detection Switches
Standard q
products Heat Resistant 2-Color Indicator Solid State Auto Switch (Single Unit)
Piston speed
200
¡Heat resistant type
¡The optimum operating
e XB6
w range can be determined
by the color of the light.
(Red  Green  Red)
Vacuum Equipment
20 40 60 80 100 120 140 160 [°C]
Ambient temperature
When using with the operating temperature fluctuated between 50°C or less
and 100°C or more, the operating speed, etc. will be largely restricted by the
durability. Prior to use, please contact SMC.
Temperature Control
Symbol
Heat Resistant Cylinder with Auto Switch
Heat Resistant Air Gripper (–10 to 100°C): -X4
Equipment
MGP20 to 63 Series
Seal material and grease have been changed, so that it could be used
even at higher temperature up to 100 from –10°C. ¡The heat resistant solid state auto switch
(D-F7NJL) can be mounted on the
Specifications MGPM20/25/32/50/63.
Ambient temperature range –10°C to 100°C
Seal material Fluororubber
Electric Actuators
Grease Heat resistant grease (GR-F) Heat Resistant Auto Switch

Specifications other than D-A73HM-536
Same as standard type
above and external dimensions ¡Can be used in an atmosphere of 130°C.
<Applicable Series> Cannot be mounted on standard cylinders.
MHC/MHF/MHK/MHL/MHS/MHT/MHW/MHY/MHZ Series Please contact SMC for applicable cylinders.
14
Actuators
Environmental Cold Resistant
Resistance
Made to Order
Symbol
Cold Resistant Cylinder (−40 to 70°C): -XB7 Seal material and grease have been changed, so that it could be used even at lower temperature down to –40°C.
Specifications
Ambient temperature range −40°C to 70°C Auto switch Not mountable
Seal material Low nitrile rubber Dimensions Same as standard type
<Applicable Series>
Grease Cold resistant grease
CJP2/CJ2-Z/CM2-Z/CG1-Z/
Specifications other than above Same as standard type CU/CQS/CQ2 Series
High High Speed

Speed
High Power Cylinder RHC

¡The capacity to absorb 10 to 20 times more energy than general purpose cylinders (CG1 series). ¡XC93: With greater water resistance
¡Smooth cushioning for high speed operation (3000 mm/s) with light loads and low/medium + stable lubrication function
speed operation with heavy loads
High High Frequency/Long Service Life

Speed
Low Friction Cylinder/Metal Seal Type

High speed, High frequency actuation Long service life
H type achieves speeds up to 3000 mm/s (without fixed Long service life of 10000 km or 100 million full cycles.
orifice), and continuous actuation up to 50 cycles per second.
(MQMLH)
Lateral Load Resisting Low Friction Cylinder MQM Variations Application Example
Compact Low Friction Cylinder MQQ
Bore size Operating pressure range Actuation speed
Series
[mm] [MPa] [mm/s]
6 (Standard only)
MQML ø6: 0.02 to 0.7
0.5 to 1000
Standard type 10 ø10 to ø25: 0.005 to 0.7
16 Low Friction Cylinder (Single Acting) MQP
MQMLH 20 0.01 to 0.7 5 to 3000
High speed/frequency 25
High High Pressure

Pressure
Air-Hydro Booster: Hydraulic Cylinder Integrated ¡11 tons (36 times pressure increase at 8 mm stroke)
CHDF50-A4954-30/-A7662-125 1.9 tons (16 times pressure increase at 5 to 10 mm stroke)
¡
CHD2-DCP8894P/-DCH7274H/-DCP1252P
Part number Operating pressure range [MPa] Pressure increase ratio Full stroke [mm] Pressure increase stroke [mm]
CHDF50-A4954-30 0.3 to 0.6 16 : 1 30 5
CHDF50-A7662-125 0.3 to 0.6 16 : 1 125 5
CHD2H100-100-DCP8894P 0.2 to 0.38 36 : 1 100 8
CHD2F50-40-DCH7274H 0.3 to 0.6 16 : 1 40 10
CHD2F50-100-DCP1252P 0.3 to 0.6 16 : 1 100 5
15
Safety Drop Prevention
Measures
End Lock Cylinders
Actuators
Drop prevention at the stroke end position
¡When air is discharged at the stroke end position, the lock engages.
¡Separate air piping for locking is not required.
Valves
Air Cylinder CBJ2 Air Cylinder CBM2 Air Cylinder CBG1 Air Cylinder CBA2

Fittings & Tubing
Bore size ø16 Bore size ø20 to ø40 Bore size ø20 to ø100 Bore size ø40 to ø100
Lock position Both ends Lock position Both ends Lock position Both ends Lock position Both ends
Air Cylinder MBB Compact Cylinder CBQ2 Guide Cylinder MGG Compact Guide Cylinder MGP
Equipment/Blow Guns
Pressure Control
Bore size ø32 to ø100 Bore size ø20 to ø100 Bore size ø20 to ø100 Bore size ø20 to ø100
Equipment
Lock position Both ends Lock position Both ends Lock position Both ends Lock position Both ends
Dual Rod Cylinder CXS Slide Unit CXW Non-rotating Double Power Cylinder MGZ Precision Cylinder MTS
Detection Switches
Lock position Retraction stroke end Lock position Single end (Lock unit side) Lock position Extension stroke end Lock position Retraction stroke end
Air Slide Table MXS Air Slide Table MXQ Mechanically Jointed Rodless Cylinder MY1H-Z Mechanically Jointed Rodless Cylinder MY1H Vacuum Equipment
Temperature Control
Equipment
Lock position Retraction stroke end Lock position Retraction stroke end Lock position Both ends Lock position Both ends
Air Cylinder CS1

Electric Actuators
Made to Order
(-X1347)
Bore size ø125, ø140, ø160

Lock position Both ends
16
Actuators
Measures
Lock Cylinders
Locking is possible at any desired stroke position.
¡Emergency stops and intermediate stops are possible.
(The CLQ, RLQ, MLU, MLGP and CLK1 series cannot perform an intermediate stop.)
¡Locking position can be changed in accordance with the external stopper position and the thickness of clamped workpieces.
Built-in Fine Lock Cylinder

Fine Lock Cylinder CLJ2 Fine Lock Cylinder CLM2 Fine Lock Cylinder CLG1
Guide Cylinder MLGC
Bore size ø16 Bore size ø20 to ø40 Bore size ø20 to ø40 Bore size ø20 to ø40
Locking direction Both directions Locking direction Both directions Locking direction Both directions Locking direction Both directions
Cylinder with Lock CNG Cylinder with Lock CNA2 Cylinder with Lock MNB Cylinder with Lock CNS
Locking direction Both directions Locking direction Both directions Locking direction Both directions Locking direction Both directions
Compact Cylinder with Lock Compact Cylinder with Air

Cylinder with Lock CLS Lock-up Cylinder CL1
CLQ Cushion and Lock RLQ
Locking direction Both directions Locking direction One direction Locking direction One direction Locking direction One direction
Compact Guide Cylinder with

Plate Cylinder with Lock MLU Hy-rodless Cylinder ML1C Toggle Type Air Gripper MHT2
Lock MLGP
Locking direction One direction Locking direction One direction Locking direction Both directions Locking direction When closed
17
Others
Standards
ISO cylinders are designed to meet with the international standard laid down by the International
Actuators
Organization for Standardization (ISO).
As long as the standard number is identical, the mounting sizes are applicable worldwide.
ISO 6432 C85 ISO 15552 CP96/C96 ISO 21287 C55
Valves
Fittings & Tubing
ISO Cylinder Series Variations
Bore size [mm]
Standard no. Series Action
Equipment/Blow Guns
8 10 12 16 20 25 32 40 50 63 80 100 125
Pressure Control
Standard Double acting,
Single rod
Double acting,
C85 Double rod
Single acting,
Single rod
ISO 6432
Equipment
Non-rotating rod Double acting,
Single rod
C85K
Single acting,
Single rod
Direct mount Double acting,
C85R
Detection Switches
Single rod

Single rod
CP96
Double acting,
Double rod
ISO 15552
Non-rotating rod Double acting,
CP96K
Single rod Vacuum Equipment
Double acting,
Double rod

Single rod
C96
Double acting,
Temperature Control
Double rod
Double acting,
Equipment
Non-rotating rod
ISO 15552 Single rod
C96K
Double acting,
Double rod
Smooth Double acting,
Cylinder C96Y Single rod
Electric Actuators

ISO 21287 C55 Single rod
18
Valves
Food Hygienic Environmental Stainless Steel
Sanitation Resistance
NAMUR Interface Air Operated High Purity

3/5 Port Solenoid Valve Chemical Liquid Valve
IP67 Compliant, Hygienic Design Type LVA
VFN2120N-X23/ Body material: Stainless steel 316
-X36
Series Port size Power consumption Series Valve type Port size Orifice dia. [mmø]
VFN2120N-X23/ Threaded
1/4" (NPT, G) 0.5 W LVA N.C./N.O./C.O. 1/8 to 1 2 to 22
-X36 type
Equivalent to IP67
Fluid temperature: 0 to 100°C (Diaphragm: PTFE)
Ambient and fluid temperature: −10 to 60°C
Features Features 0 to 60°C (Diaphragm: NBR, EPR)
Function plate realized 3/5 port selectable
Diaphragm material: Choose from PTFE/NBR/EPR
Electrical entry: M12 connector
Energy
Saving/ Air Blow
Reduced-
wiring
Pilot Operated 2 Port Solenoid Valve for Dry Air VQ20/30

Series Valve type Port size Cv
VQ20 N.C. ø6 to ø12 0.33
VQ30 N.C. ø6 to ø12 0.80
Application: Air-blow, Blow-off of workpiece, etc.
High frequency operation possible: High speed response 7 ms or less (VQ20), 20 ms or less (VQ30)
Features Easy piping with One-touch Fittings
Dust-tight, water-jet-proof (IP65) compliant in DIN terminal type
Manifold model: VV2Q22, VV2Q32
Energy
Saving/ Reduced-wiring
Reduced-
wiring
Serial Transmission System EX For Output

Series Enclosure Communication protocol *1 Applicable valve
DeviceNet™
PROFIBUS DP SY3000, 5000, 7000
CC-Link VQC1000, 2000, 4000, 5000
EX260 IP67
PROFINET SV1000, 2000, 3000
EtherCAT® S0700 (IP40)
EtherNet/IP™
*1: The applicable protocols differ depending on the series. Refer to the catalog for details.
Serial Transmission System EX For Input/Output

Series Enclosure Communication protocol *1 Applicable valve
DeviceNet™
PROFIBUS DP SY3000, 5000, 7000
CC-Link VQC1000, 2000, 4000, 5000
EX250 IP67
EtherNet/IP™ SV1000, 2000, 3000
AS-Interface S0700 (IP40)
CANopen
*1: The applicable protocols differ depending on the series. Refer to the catalog for details.
Specialized Product
With M12 pre-wired connector/VQ4000
¡With M12 (4-pin) pre-wired connector for ASi system
¡IP65 compliant
19
Energy
Saving/ Reduced-wiring
Reduced-
wiring
M8/M12 Connector PCA/EX9/EX500
Actuators
¡Communication cable/connector: CC-Link, DeviceNet™, PROFIBUS DP, PROFINET,
EtherCAT®, EtherNet/IP™
¡Conforming to IEC61076-2-101 and IEC60947-5-2
¡IP67 (IEC60529)
¡Fieldwireable connectors: No exclusive tools, reduction in wiring time
¡SPEEDCON: Just insert the connector and make 1/2 rotation.
Valves
Fittings & Tubing
High High Speed
Speed
High Speed 2 Port Valve SX10 Series Flow rate (L/min: at 0.25 MPa) Power consumption [W] Max. operating frequency [Hz]
Equipment/Blow Guns
80 1200
Pressure Control
40 1000
SX10 50
10 550
4 350
80 650
40 550
SX10 100
10 300
4 200
80 600
Equipment
40 500
SX10 150
10 250
4 150
High speed response: ON 0.45 ms, High frequency: 1200 Hz
OFF 0.4 ms (±0.05 ms) Width: 9 mm
Detection Switches
Features Long service life: 5 billion cycles or more Low power consumption: 4 W, continuous energization is possible.
¡The response time, service life and maximum operating frequency are based on SMC’s test conditions.
¡Response time: The values at a flow rate of 50 L/min and power consumption of 80 W
High High Frequency/Long Service Life

Speed
Vacuum Equipment
5 Port Solenoid Valve/Metal Seal Type VQC1000/2000

Series Sonic conductance: C Applicable cylinder size [mm] Power consumption [W]
VQC1000 0.72 dm3/(s·bar) 50 0.95 (High speed response)
VQC2000 2.6 dm3/(s·bar) 80 0.4 (Standard)
Temperature Control
Service life: 200 million cycles (Based on SMC’s test conditions.)

Response time: 10 ms (VQC1000), 20 ms (VQC2000)
Equipment
Features
Accuracy: ±2 ms (VQC1000/2000)
IP67
5 Port Solenoid Valve/Metal Seal Type VQZ

Electric Actuators
Series Sonic conductance: C Applicable cylinder size [mm] Power consumption [W]
VQZ1000 0.7 dm3/(s·bar) 63
0.9 (High speed response)
VQZ2000 1.9 dm3/(s·bar) 80
0.35 (Standard)
VQZ3000 3
3.0 dm /(s·bar) 100
Features Response time: 10 ms (VQZ1000/2000/3000)
Accuracy: ±2 ms
20
Valves
High High Pressure
Pressure
Pilot Operated 2 Port Solenoid Valve VCH40

Series Maximum operating pressure [MPa] Port size
VCH41 (N.C.)
5.0 3/4, 1
VCH42 (N.O.)
Features Uses the polyurethane elastomer poppet for valve parts.
Improves durability at high pressure.
Pilot Operated 3 Port Solenoid Valve VCH400

VCH410 5.0 1/2, 3/4, 1
Manifold (Made to Order)
Check Valve VCHC40

VCHC40 5.0 3/4, 1
Refer to page 34 for Direct Operated Regulator for 6.0 MPa and 5.0 MPa Silencer.
Safety Standards
Measures
Safety Standard ISO13849-1 Certified 3 Port Solenoid Valve/

Residual Pressure Release Valve with Detection of Main Valve Position
VP-X536/-X538/-X555, VG-X87 Corresponding to Category 2 to 4
Standards
Category
Safety limit switch Machinery Directive 2006/42/EC

Series manufacturer
Enclosure
Harmonized EN ISO13849-1: 2008 CE cUL RoHS
EN ISO4414: 2010
standards EN ISO13849-2: 2012
Residual Pressure OMRON Corporation
Release Valve 2 IP65
VP542/742-X536 Rockwell Automation, Inc.
Dual Residual Pressure OMRON Corporation
Release Valve 3, 4 IP65
Dual Residual Pressure Release Valve OMRON Corporation
with Soft Start-up Function 3, 4 IP65
*1
Dual Residual Pressure OMRON Corporation
Release Valve 3, 4 IP40
VG342-X87 Rockwell Automation, Inc.
*1: Only port size 3/4"
21
Safety Measures against Residual Pressure
Measures
Conforming to OSHA Standard: Pressure Relief 3 Port Valve with Locking Holes VHS Aluminum handle and
Actuators
bonnet type is
¡Conforming to OSHA standard (Occupational Safety and available.
Health Administration Department of Labor).
¡Manually operated valve can be used to prevent acci-
dents caused by residual pressure in pneumatic lines.
¡Possible to verify the supply and exhaust status of air
flow at a glance.
¡When in the exhaust position, the valve may be padlock
secured. Prevents accidental start-ups while personnel
Valves
are cleaning or servicing equipment.
¡Push the handle and then turn, 2-step action prevents
malfunction.
IP67 compliant

With Residual Pressure Release Valve (SY5000/7000) SUP Stop Valve Spacer with Residual Pressure Release Valve
Fittings & Tubing

· The pressure of the 4 (A) and 2 (B) ports is also exhausted Air supply to each valve can be stopped individually. The valve and cylinder
automatically at the same when the pressure of the 1 (P) can be replaced without stopping other devices and equipment.
port is exhausted.
· The pressure can be visualized using the indicator (red).
Lever type
[When 1(P) port is pressurized]
Equipment/Blow Guns
Pressure Control
Indicator
EXH. EXH.
When P port is not pressurized 4 2
2-position single valve
5 3
1 4(A)
When P port is pressurized 2(B)
Slotted type SUP stop valve

[When 1(P) port is not pressurized] spacer assembly
EXH. EXH.
Equipment
4 2 5(EA)
1(P)
5 3 3(EB)
1
2-position single valve example
Detection Switches
Safety Lurch Prevention
Measures
Soft Start-up Valve AV

Symbol
Start-up valve for low speed air supply to gradually raise initial pressure
Vacuum Equipment
12
in an air system and for quick exhaust by cutting off air supply.
1 2
3
12
Series Coil rated voltage 10 2
1(P) 1 2 2(A)
100, 200, 110 to 120, 1
3
2
AV 220 VAC (50/60 Hz), 10

1
10
240 VAC (50/60 Hz), 12, 24 VDC
Temperature Control
Equipment
3(R)
Electric Actuators
22
Valves
Measures
5 Port Solenoid Valve Manifold Options: Double Check Spacer/Double Check Block
Can hold an intermediate cylinder position for an extended time.
Combining with a 3-position exhaust center solenoid valve will enable the cylinder to stop in the middle or maintain its position for long periods of time. The
combination with a 2-position single/double solenoid valve will prevent the dropping at the cylinder stroke end when the SUP residual pressure is released.
Double Check Spacer (With residual pressure release valve) Double Check Block Circuit diagram
Cylinder side pressure

(P2)
Separated
Double check spacer with

residual pressure release valve
B
B
To
CY
Lp SUP side pressure (P1)
ort
Button for manual release [Intermediate stop] [Drop prevention] Direct mounting
of residual pressure
Double check spacer assembly Double check spacer assembly (VQ2000)
To exhaust residual
pressure on cylinder side.
Top ported
4(A) 2(B) 5(EA) 4(A) 2(B) 5(EA)

1(P) 1(P)
3(EB) 3(EB)
Bottom ported
Exhaust center 2-position single/double
Safety Misoperation Prevention

Measures
Two Hand Control Valve VR51 Series Basic circuit example Two Hand Control Valve
When starting an operation, accidents such as fingers being caught can be Push button
operated valve Cylinder
prevented, by requiring both hands to start these push button operated valves.
Conforming to EN574
Air operated
valve
Push button
Silencer operated valve
Synchronized, two- (Accessory)
handed operation Series Connection piping size Option/Accessory
Flame resistant One-touch fitting ø6
An output is not available Flame resistant
VR51 Bracket, Silencer
if the time lag exceeds One-touch fitting Flame resistant One-touch fitting ø1/4
0.5 seconds.
23
Others
Steam
For Steam Angle Seat Valve: Air Operated Type VXB
Actuators
Series Valve type Port size Orifice diameter [mmø]
3/8, 1/2, 3/4
VXB N.C.
10 A, 15 A, 20 A
11, 14, 18
Low pressure loss due to angle seat structure

Reduced leakage with rubber seal
Long service life: 3 million cycles (Steam), 5 million cycles (Air)
Features
Valves
Low leakage: 10 cm3/min or less
Space saving: Height 100 mm
Body material: Stainless steel 316L equivalent, Bronze (CAC)

For Steam Zero Differential Pressure Type Pilot Operated 2 Port Solenoid Valve VXS
Fittings & Tubing

Series Valve type Port size Orifice diameter [mmø]
VXS N.C. 1/4 to 1 10 to 25
Long service life: 3 million cycles (Based on SMC’s test condition)

Improved air filtration
Equipment/Blow Guns
Features Reduced apparent power: 18 VA  12 VA, 20 VA  15 VA
Pressure Control
Reduced coil temperature rise: 120°C  100°C
IP65
Others
Maintenance
Equipment
SUP Stop Valve Spacer with Residual Pressure Release Valve
Air supply to each valve can be stopped individually. The valve and
cylinder can be replaced without stopping other devices and equipment.
Detection Switches
2-position single valve
4(A)
Lever type Slotted type 2(B)
SUP stop valve

spacer assembly
Vacuum Equipment
5(EA)
1(P)
3(EB)
2-position single valve example
Solenoid valves can be replaced individually!

Temperature Control
Equipment
The solenoid valves can be replaced

individually without stopping the
equipment during maintenance.
<Application example>
Air operated valves, such as sanitary
Electric Actuators
valve and automatic valve control
24
Fittings
Resistance
Stainless Steel 316 One-touch Fittings KQG2

Series Applicable tubing O.D. Connection thread
M5
Metric ø3.2, ø4, ø6, ø8, ø10, ø12, ø16
R, Rc 1/8, 1/4, 3/8, 1/2
*: Can be used KQG2
with steam.
ø1/8", ø5/32", ø1/4", ø5/16" UNF10-32
Inch
ø3/8", ø1/2" NPT1/8, 1/4, 3/8, 1/2
¡Compact and lightweight
¡Fluid temperature: −5 to 150°C
Features ¡Material: Metal parts stainless steel 316, Seal parts special FKM
¡Grease-free/Can be used with steam. Certified to meet current
Food Sanitation Law standards.
Stainless Steel 316 Insert Fittings KFG2

Metric ø4, ø6, ø8, ø10, ø12, ø16 R, Rc 1/8, 1/4, 3/8, 1/2
*: Can be used KFG2
with steam.
ø1/8", ø5/32", ø1/4", ø5/16"
Inch NPT1/8, 1/4, 3/8, 1/2
ø3/8", ø1/2"
¡Fluid temperature: −65 to 260°C (Swivel elbow: −5 to 150°C )
Features ¡Material: Stainless steel 316. Rubber material is not used. (Except swivel elbow)
¡Grease-free/Can be used with steam. Certified to meet current Food Sanitation
Law standards.
Clean One-touch Fittings for Driving Air Piping KPG

KPG ø4, ø6, ø8, ø10, ø12 M5, 1/8, 1/4, 3/8, 1/2
¡One-touch fittings suitable for drive air systems in clean room
environments
Features
¡Resin parts: Polypropylene
¡Metal parts: Stainless steel 304
Miniature Fittings: Stainless Steel 316 MS

MS ø3.2, ø4, ø6 M5
¡Possible to use in corrosive conditions.
Features ¡Compact piping space
¡Hose nipple, Hose elbow, Barb
S Couplers: Stainless Steel Type KKA

Series Connection thread
KKA 1/8, 1/4, 3/8, 1/2, 3/4, 1, 1 1/4, 1 1/2
¡Body material: Stainless steel 304
¡Seal material: Fluororubber (Special FKM) is employed.
Features
¡Grease-free
¡Both plug and socket have an integral check valve.
25
Resistance
Made to Order
Actuators
Check Valves Seal material and grease have been changed, so that it could be used even at higher temperature up to 100 from −10°C.
¡Body material: All stainless steel (Main parts: Stainless steel) ¡High temperature: 80°C/Low temperature: −30°C
¡Low cracking pressure: 0.01 MPa ¡Rubber material: NBR/FKM/CR
Specifications
INA-14-47
85 -m
All stainless steel Model INA-14-47-m INA-14-85-m
Valves
Fluid Air, Water
Operating pressure range 0.05 to 1 MPa
−5 to 60°C −5 to 80°C
Ambient and fluid temperature
(No freezing) (No freezing)

Valve seal material NBR FKM
Fittings & Tubing

INA-14-m Port size Rc1/4, Rc3/8, Rc1/2
Sonic Rc1/4 9.5 dm3/(s·bar)
conductance Rc3/8, Rc1/2 10.5 dm3/(s·bar)
Critical pressure ratio 0.45
Specifications
INA-14-290
Equipment/Blow Guns
INA-14-290
Pressure Control
Main parts: Stainless steel Model
Seal material: NBR Fluid Air, Water
Operating pressure range 0.02 to 1 MPa
Ambient and fluid temperature −5 to 60°C (No freezing)
Port size 2 x Rc1/8
Sonic conductance 1.25 dm3/(s·bar)
INA-14-290 Critical pressure ratio 0.45
Equipment
Specifications
XTO-674-mAm
Main parts: Stainless steel Model XTO-674-mA XTO-674-mAE XTO-674-mAH XTO-674-mAL
Seal material: NBR/FKM/CR Fluid Air, Water Air
Detection Switches
Operating pressure range 0.05 to 1 MPa 0.01 to 1 MPa 0.05 to 1 MPa
−5 to 80°C −30 to 60°C
Ambient and fluid temperature −5 to 60°C (No freezing)
(No freezing) (No freezing)
Port size Rc1/4, Rc3/8, Rc1/2
Sonic Rc1/4 9.5 dm3/(s·bar)
XTO-674-mm conductance Rc3/8, Rc1/2 10.5 dm3/(s·bar)
Critical pressure ratio 0.45
Vacuum Equipment
Environmental Heat Resistant

Resistance
Fluoropolymer Fittings: Hyper Fittings/ Fluoropolymer Fittings: Hyper Fittings/

Temperature Control
Insert Bushing Type Flare Type

Equipment
LQ1 LQ3
Electric Actuators
Series Maximum operating pressure Operating temperature [°C] Series Maximum operating pressure Operating temperature [°C]
LQ1 1.0 MPa 0 to 200 Nut material PVDF: 0 to 150
LQ3 1.0 MPa
Nut material PFA: 0 to 200
Material: New PFA
Quadruple seal construction Material: New PFA
Features
Reducer enables tube size changeability with no Features Triple seal construction
change of body required. Excellent and easy installation
26
Tubing
Food Applicable Materials
Sanitation
Food-related laws and regulations compliant products Series

Compatible with Complies with FDA
Food Sanitation Law (Food and Drug Administration)
Compatible with Food Sanitation Law TL/TIL V V
Compatible with the test conforming to Japan’s Food Sanitation Law based TLM/TILM V V
on the 370th notice given by the Ministry of Health and Welfare in 1959. TH/TIH V V
Tubing
TD/TID V V
Complies with FDA (Food and Drug Administration) TU-X217 V —
Complies with FDA (Food and Drug Administration) §177-1550 and TU-X214 — V
§177-2600 dissolution tests.
Fluoropolymer Tubing TL/TIL Compatible with Food Sanitation Law Complies with FDA (Food and Drug Administration)
Series Applicable tubing O.D. Color

Metric ø4, ø6, ø8, ø10, ø12, ø19
TL/TIL ø1/8", ø3/16", ø1/4", ø3/8" Translucent
Inch
ø1/2", ø3/4", ø1"
¡Material: Super PFA
Features ¡Max. operating pressure: 1.0 MPa (at 20°C)*1
¡Max. operating temperature: 260°C (This can vary according to operating pressure.)
*1: This can vary according to size.
Fluoropolymer Tubing (PFA) TLM/TILM Compatible with Food Sanitation Law Complies with FDA (Food and Drug Administration)

ø2, ø3, ø4, ø6, ø8, ø10
Metric Translucent,
ø12, ø16, ø19, ø25
TLM/TILM Black, Blue,
ø1/8", ø3/16", ø1/4", ø3/8" Red
Inch
ø1/2", ø3/4", ø1", ø1 1/4"
¡Material: Super PFA
FEP Tubing (Fluoropolymer) TH/TIH Compatible with Food Sanitation Law Complies with FDA (Food and Drug Administration)

Metric ø4, ø6, ø8, ø10, ø12 Translucent,
TH/TIH ø1/8", ø3/16", ø1/4" Black, Red,
Inch
ø3/8", ø1/2", ø3/4" Blue
¡Material: FEP
Soft Fluoropolymer Tubing TD/TID Compatible with Food Sanitation Law Complies with FDA (Food and Drug Administration)

Metric ø4, ø6, ø8, ø10, ø12
TD/TID Translucent
Inch ø1/8", ø3/16", ø1/4", ø3/8", ø1/2"
¡Material: Modified PTFE
27
Food Applicable Materials
Sanitation
Actuators
Compatible with Food Sanitation Law: Polyurethane Tubing TU-X217 Compatible with Food Sanitation Law

Black, White, Blue,
TU-X217 Metric ø4, ø6, ø8, ø10, ø12
Clear
Valves
Polyurethane Tubing TU-X214 Complies with FDA (Food and Drug Administration)

Fittings & Tubing

Black, White, Red,
TU-X214 ø4, ø6, ø8, ø10, ø12 Blue, Yellow, Green,
Clear, Orange
Equipment/Blow Guns
Pressure Control
Environmental
Resistance
Made to Order
Equipment
Double-layered Tubing for Instrumentation Device (Single-tubed/Double-tubed)
IN-241 Series
T0604 to T1075-X120/121/166 Series
Double-layered tubing with an external layer of vinyl chloride or polyolefin to protect the inner tubing
Inner tubing color: “Black” or “Black + White”
Detection Switches
Number of Inner tubing Outer layer
Diameter
Material Length per roll

cores color thickness [mm]
[mm]
Model
Black Vinyl 100 m 200 m 300 m
1 2 Black + Polyolefin 0.5 1
White chloride Reel Roll Reel Reel Roll
IN-241-2522-100 V V V V V
IN-241-2522-300
Vacuum Equipment
V V V V V
O.D.
T0604-1-100-X120-A ø6 V V V V V
T0604-1-300-X120-A V V V V V
T0604-2-100-X120-A I.D. V V V V V
ø4
T0604-2-100-X121-A V V V V V
IN-241-1047 V V V V V
IN-241-2523-100
Temperature Control
V V V V V
IN-241-2523-300 O.D. V V V V V
Equipment
T0806-1-100-X120-A ø8 V V V V V
T0806-1-300-X120 I.D. V V V V V
IN-241-2502-100 ø6 V V V V V
IN-241-2593-100 V V V V V
T1075-1-100-X120-A V V V V V
Electric Actuators
O.D.
T1075-1-300-X120 ø10 V V V V V
IN-241-2503-100 V V V V V
IN-241-2594-100 I.D. V V V V V
ø7.5
T1075-2-300-X166 V V V V V
*: If you need a different number of cores, different colors or lengths over 300 m, please contact our sales representatives.
28
Others
Maintenance
Longer Length Reel T0604/TH0604-X64 Compatible with Food Sanitation Law Complies with FDA (Food and Drug Administration)

T0604-X64 ø6
TH0604-X64
¡Length per roll: 500 m, 250 m
¡Material: Nylon tubing/T Series, Black, White
FEP tubing (Fluoropolymer)/TH Series (Nylon)
¡Compatible with Food Sanitation Law (TH Series) Translucent
Features · Compatible with the test conforming to Japan’s Food
(FEP tubing)
Sanitation Law based on the 370th notice given by
the Ministry of Health and Welfare in 1959.
· Complies with FDA (Food and Drug Administration)
§177-1550 and §177-2600 dissolution tests.
Flow Control Equipment

Resistance
Stainless Steel Speed Controller ASG

Series Applicable tubing I.D. [mm] Connection thread
ASG 4, 6, 8, 10, 12 M5, 1/8, 1/4, 3/8, 1/2
Material
Features · Metal parts: Stainless steel 316, Seal parts: Special FKM
Ambient and fluid temperature: −5 to 60°C
Clean Speed Controller with One-touch Fitting AS-FPG

Series Port size Applicable tubing O.D.
AS-FPG M5 x 0.8, R1/8, 1/4, 3/8, 1/2 ø4 to ø12
¡Low particulate generating speed controllers designed for use in clean rooms
Features ¡Resin parts: Polypropylene
¡Metal parts: Stainless steel 304
Stainless Steel Specification Standard Speed Stainless Steel Specification Standard Speed
Controller (In-line Type) Controller (Metal Body Elbow Type)
Metal parts are stainless steel. Metal parts are stainless steel.
Series Connection thread Series Connection thread Control type

INA-14-82 INA-14-233
INA-14-179 INA-14-213 M3, M5
M5, 1/8, 1/4 INA-14-166
INA-14-211 3/8, 1/2 1/8, 1/4 Meter-out
INA-14-196 INA-14-172 3/8, 1/2
INA-14-145 INA-14-167
INA-14-209
29
Safety Measures against Residual Pressure
Measures
Speed Controller with Residual Pressure Release Valve ASE
Actuators
Residual pressure can be easily released Eye-catching red color release button.
with one push of button. Push
Release Release
Valves
Symbol

Fittings & Tubing
Equipment/Blow Guns
Pressure Control
Port size in the Applicable tubing
Type Series
cylinder side O.D.
With One-touch Fitting (Elbow type, Universal type) ASmmm1FE ø4 to ø12
1/8 to 1/2
In-line Type (Metal Body) ASm000E —
Equipment
Residual Pressure Release Valve with One-touch Fittings KE
Detection Switches
14
1 2 1 2
Example of circuit diagram
Residual pressure in the cylinder (Residual exhaust of air cylinder)
3
can be easily released with one 5

1
4
push of the push button. 1 2 1 23
1
2 3
2
1 2 1 2
3
12 Vacuum Equipment
Type Series Applicable tubing O.D.
With One-touch fittings

without a push button guard
KEA
Temperature Control
ø6 to ø12
With One-touch fittings
KEB
Equipment
with a push button guard

Rc thread Connection thread:
with a push button guard
KEC Rc1/4, 3/8
Electric Actuators
30
Flow Control Equipment
Safety Lurch Prevention
Measures
Dual Speed Controller with One-touch Fittings ASD Series

Prevents sudden extensions with meter-in/meter-out control.
Two flow control valves and check valves have been integrated.
Exhaust center
Port size in the Applicable tubing O.D.

Type Series
cylinder side Metric size Inch size
Dual speed controller ASD M5 to 1/2 ø4 to ø12 ø1/8" to ø3/8"
Dual Speed Controller for Low Speed Operation ASD-FM Series

Type Series
Dual speed controller
with One-touch fitting
ASDm30FM M5 to 1/4 ø4 to ø10 ø1/8" to ø3/8"
Dual Speed Controller Adjustable by Flat Head Screwdriver ASD-D Series

Type Series
Flat head screwdriver
ASDmmmF-D M5 to 1/2 ø4 to ø12 ø1/8" to ø3/8"
31
Tamper Proof Dual Speed Controller ASD-T Series
Special tool Type Series
Actuators
ASDmmmF-T M5 to 1/2 ø4 to ø12 ø1/8" to ø3/8"
Valves
Fittings & Tubing
Measures
Speed Controller with Pilot Check Valve ASP Series
Equipment/Blow Guns
Pressure Control
Pilot check valve and speed controller are combined.
Realizes momentary intermediate stoppage of a cylinder
and able to adjust speed control of it.
Tubing mount direction is 360° free.
Electroless nickel plated is provided as standard.
Equipment
Detection Switches
Work
piece
Example of drop prevention circuit
Vacuum Equipment
Type Series
Speed controller
with pilot check valve
ASP 1/8 to 1/2 ø6 to ø12 ø1/4" to ø1/2"
Temperature Control
Equipment
Electric Actuators
32
Sanitation
Blow Gun Using Grease for Food Processing Machines/VMG-X7
Grease for food processing machines*1 is applied to wetted parts (sealing parts). *1: Grease meets NSF (USDA) H1 standards.

Resistance
Clean Regulator SRH

Series Relief mechanism Port size Set pressure [MPa]
Rc1/8, 1/4, 3/8, 1/2
SRH Non-relief
9/16-18UNF, 7/8-14UNF
Low pressure type: 0.02 to 0.2
High pressure type:0.05 to 0.7
SRH Relief Rc1/8, 1/4, 3/8, 1/2
¡Contamination controlled stainless steel regulator
Features ¡Oil-free
¡Two types of diaphragm materials: PTFE, Fluororubber
Precision Clean Regulator SRP

Series Port size Set pressure [MPa]
Low pressure type: 0.005 to 0.2
SRP M5, 1/8
High pressure type: 0.01 to 0.4
¡High precision low flow consumption stainless steel regulator
¡Bleed air flow 0.5 L/min (ANR) or less (0.2 MPa at outlet pressure)
Features
¡Setting sensitivity: 0.3% F.S.
¡Repeatability: 1% F.S.
Filter Regulator AW30/40-X2622

Series Port size Set pressure [MPa]
AW30/40-X2622 1/4, 3/8, 1/2 0.05 to 0.85
¡Stainless steel 316 and special temperature environment (–40°C) specifications

¡External parts material: Stainless steel 316
Features
¡Ambient and fluid temperature: –40 to 80°C
¡NACE International Standards compliant
Blow Gun with Hook/VMG-X110
Install mounting hook in blow gun (Material: Stainless steel)
Energy
Saving/ Air Blow
Reduced-
wiring
Blow Gun VMG

Operating pressure Effective area Nozzle port
Series Port size
range [MPa] [mm2] size
Rc, NPT, G
VMG 0 to 1.0 30 Rc1/4
1/4, 3/8
¡Reduction of 2,000 m3
per annum is possible. (Energy saving)
Features
¡Pressure loss 1% or less (Nozzle diameter: ø2.5)
33
Energy
Saving/ Air Blow
Reduced-
wiring
Nozzles for Blowing KN
Actuators
Series Type Nozzle size
Nozzle with male thread ø1 to ø8
High efficiency nozzle ø1 to ø2
Low noise nozzle with male thread ø0.75 x 4 to ø1.1 x 8
KN Copper extension nozzle ø1.5 to ø3
Pivoting nozzle ø4, ø6
Nozzle with self-align fitting ø1 to ø6
Valves
Nozzle for One-touch fitting ø1 to ø3
Vacuum Flow ZH--X185

Series Features

Fittings & Tubing
¡By supplying compressed air, large blow and vacuum flow rate available
¡A blow flow rate 4 times the supply air
¡A vacuum flow rate 3 times the supply air
ZH--X185
¡Large passage diameter available for suction of machining chips, particles, etc.
¡Maintenance free
¡Mounting bracket available
Equipment/Blow Guns
Pressure Control
Application Examples
Blow
Equipment
Blowing away Blowing away
water droplets machining chips
Detection Switches
High High Pressure
Pressure
Vacuum Equipment
Direct Operated Regulator for 6.0 MPa (Relieving Type) VCHR
Series Type Port size Set pressure [MPa]
Direct operated regulator 0.5 to 5.0
VCHR30/40 (Relieving type)
G3/4,1,1 1/2
(Max. operating pressure 6.0)
¡Service life: 10 million times
Temperature Control
Improved durability in high pressure environments using a polyurethane

elastomer poppet.
Equipment
Features ¡Uses NSF-H1 approved grease at guide rings (sliding parts).

¡Improved durability using a metal seal type relief valve.
¡Uses special fluororesin seal for sliding parts. Stable unattached
response, and not easily affected by pressure.
Electric Actuators
5.0 MPa Silencer VCHN

Series Features
¡Reduces clogging with the double-layer structure.
VCHN
¡Noise reduction: 35 dB (A)
34
High High Pressure
Pressure
Made to Order
High Pressure Specifications

Part number AR20 to 60-B-X425
Strong materials are used in the manufacturing of Proof pressure [MPa] 3.0
regulators intended for high pressure operation.
Maximum operating pressure [MPa] 2.0
Also, construction modification allows a wider set
Set pressure range [MPa] 0.1 to 1.7
pressure range.
Ambient and fluid temperature [°C] –5 to 60 (No freezing)
Static Neutralization Equipment

Environmental Static Neutralization
Resistance
Ionizer/Bar Type IZS40/41/42

Series Type Ion generation method Offset voltage
IZS42 Dual AC type
Corona discharge
IZS41 Feedback sensor type
type
Within ±30 V
IZS40 Standard type
Potential amplitude is reduced with Dual AC type. 25 V or less
¡
(at the installation height of 300 mm)
¡Rapid neutralization of static electricity by a feedback sensor.
¡Reduction of adjustment and maintenance labor by auto balance sensor.
¡Simple operation: Can be controlled by powering the ionizer ON. (Standard type)
Features
¡Setting ionizer with remote controller.
¡Transition wiring may be used.
High speed static neutralization cartridges and energy saving static
¡
neutralization cartridges are available.
¡CE, RoHS compliant
Ionizer/Nozzle Type IZN10

Series Ion generation method Offset voltage
Energy saving static neutralization nozzle: Within ±10 V
IZN10 Corona discharge type
High flow rate nozzle: Within ±15 V
Nozzle type: Dust removal and static neutralization by air blow, spot type
¡
static neutralization
¡Slim design: Thickness dimension 16 mm
¡CE, UL, RoHS compliant
Features ¡Nozzle type can be selected according to applications.
360° rotation · Energy saving static neutralization nozzle
(Short range static neutralization, design focuses on ion balance)
· High flow static neutralization nozzle
With right angles/-X367 (Long range static neutralization and dust removal)
35
Resistance
Made to Order
Actuators
Nozzle Variations
Circular diffusion nozzle Flat diffusion nozzle Bar nozzle (straight type)
Electricity removal range
Electricity removal range
Valves
Ionized air Ionized air
Part number Part number Part number Bar length [mm]
IZN10-G-X198 IZN10-G-X199 IZN10-G-100-X216 100

IZN10-G-200-X216 200
Fittings & Tubing

IZN10-G-300-X216 300
Circumferential jet bar nozzle (straight type) Bender tube nozzle IZN10-G-400-X216 400
IZN10-G-500-X216 500
IZN10-G-600-X216 600
Equipment/Blow Guns
Pressure Control
Long nozzle
Part number Bar length [mm] Part number Bar length [mm]
IZN10-G-X278 150 IZN10-G-100-X205 100
IZN10-G-200-X205 200 Part number Bar length [mm]
IZN10-G-300-X205 300 IZN10-G-100-X226 100
IZN10-G-400-X205 400 IZN10-G-200-X226 200
Equipment
IZN10-G-500-X205 500 IZN10-G-300-X226 300
IZN10-G-600-X205 600 IZN10-G-400-X226 400
IZN10-G-500-X226 500
For the ionizer, please select a female
IZN10-11
IZN10-G-600-X226 600
thread type (Rc1/8) for the piping.
Detection Switches
IZE11 Series
Intermittent Control Timer IZE110-X238
Series Changeable frequency
IZE110-X238 0.1 to 50.0 Hz
¡A digital timer that can control ON/OFF switches of valves etc.
¡Set individual ON and OFF times: 0.1 to 99.9 seconds
Vacuum Equipment
¡Display of accumulated number of changes
It can be used for maintaining valve or cylinder operation.
¡Switch output (Output under timer control)
Features ¡2 types of trigger input
· Repeat input
(ON/OFF operation during trigger input)
· One-shot input
Application: Improved dust removal effect
under low air consumption (ON/OFF operation for a time set from trigger input)
Temperature Control
by intermittent ion blowing ¡CE, RoHS compliant

Equipment
Fan Type Ionizer IZF10

Series Ion generation method Offset voltage
Electric Actuators
IZF10 Corona discharge type (DC) ±13 V

¡Compact design: 80 mm x 110 mm x 39 mm
¡Weight: 280 g
¡Static neutralization time: 1.5 seconds
Features
¡With alarm
Incorrect high voltage, Emitter dirt detection
36
Resistance
Fan Type Ionizer IZF21/31

Series Ion generation method Offset voltage Maximum air flow
IZF21 Corona discharge 1.8 m3/min
±5 V
IZF31 type 4.4 m3/min
¡Thickness: 40 mm ¡Extensive/rapid static neutralization
¡Flow rate adjustment function (1 to 10 steps)
¡Easier maintenance
Features
· Emitter cartridge is easily replaceable.
· Automatic cleaning function of emitters · Averaging operation
Electrostatic Sensor IZD10/IZE11

Series Measurement potential Output voltage Effective detection distance
±0.4 kV
IZD10-110 (At detection distance 25 mm) 1 to 5 V 10 to 50 mm
(Output impedance:
±20 kV Approx. 100 Ω)
IZD10-510 (At detection distance 50 mm)
25 to 75 mm
Series Rated measurement range Smallest settable increment Output

Switch output x 2 +
−0.4 kV to +0.4 kV 0.001 kV (at ±0.4 kV)
IZE11 −20 kV to +20 kV 0.1 kV (at ±20 kV)
Analog output
(1 to 5 V, 4 to 20 mA)
¡Detects electrostatic potential of the workpiece, and is capable of switch output, analog output or output of current.
Features
¡CE, UL, RoHS compliant
Handheld Electrostatic Meter IZH10

Series Rated charge amount range Minimum display unit
0.1 kV (±1.0 to ±20.0 kV)
IZH10 ±20.0 kV
0.01 kV (0 to ±0.99 kV)
Features ¡Easy-to-use handheld electrostatic meter ¡CE, RoHS compliant
Detection Switches
Resistance
Self-contained Type Remote Type

2-Color Display Digital Pressure Switch ZSE80(F)/ISE80(H) Pressure Sensor for General Fluids PSE56
*: R
efer to page 38 for
pressure sensor controller.
Series Type Rated pressure range Series Type Rated pressure range
ZSE80F Compound pressure −100.0 to 100.0 kPa PSE563 Compound pressure −100 to 100 kPa
ZSE80 Vacuum pressure 0.0 to −101.0 kPa PSE561 Vacuum pressure 0 to −101 kPa
ISE80 Positive pressure −0.100 to 1.000 MPa PSE564 Positive pressure 0 to 500 kPa
ISE80H Positive pressure −0.100 to 2.000 MPa PSE560 Positive pressure 0 to 1 MPa
¡Wetted parts: Stainless steel 304/Stainless steel 630 ¡Wetted parts: Stainless steel 316L
¡IP65 ¡Suitable for a wide variety of fluids ¡IP65 ¡Suitable for a wide variety of fluids
Features Features
¡Low leakage. Choice of VCR® or Swagelok® fitting is available. ¡Analog output (Voltage/Current)
¡Rear ported, Bottom ported ¡Low leakage. Choice of VCR® or Swagelok® fitting is available.
VCR® and Swagelok® are registered trademarks of Swagelok Company.
37
Detection Switches
Energy
Saving/ Pressure/Flow Rate Detection
Reduced-
wiring
Self-contained Type
Actuators
3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20
Series Type Rated pressure range
ZSE20F Compound pressure −100.0 to 100.0 kPa
ZSE20 Vacuum pressure 0.0 to −101.0 kPa
ISE20 Positive pressure −0.100 to 1.000 MPa
¡Setting is possible while checking the measured value.
Valves
¡Delay time: Fastest 1.5 ms or less
Features
¡Current consumption: 25 mA or less
¡With a snapshot function

Fittings & Tubing
2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A
ZSE30AF Compound pressure −100.0 to 100.0 kPa
ZSE30A Vacuum pressure 0.0 to −101.0 kPa
ISE30A Positive pressure −0.100 to 1.000 MPa
Equipment/Blow Guns
¡With One-touch fitting (Straight, Elbow)
Pressure Control
¡Space-saving, mountable side by side without clearance (Panel mount)
Features
¡With display calibration function
¡Can copy to up to 10 switches simultaneously.
2-Color Display High-Precision Digital Pressure Switch ZSE40A(F)/ISE40A
Equipment
ZSE40AF Compound pressure −100.0 to 100.0 kPa
ZSE40A Vacuum pressure 0.0 to −101.3 kPa
ISE40A Positive pressure −0.100 to 1.000 MPa
¡IP65
¡Fluid: Air, Non-corrosive gas, Non-flammable gas
Detection Switches
Features ¡Can copy to up to 10 switches simultaneously.
¡3-step setting
¡With One-touch fitting
Remote Type
Vacuum Equipment
Compact Pneumatic Pressure Sensor PSE54
PSE543 Compound pressure −100 to 100 kPa
PSE541 Vacuum pressure 0 to −101 kPa
PSE540 Positive pressure 0 to 1 MPa
Temperature Control
Features ¡Analog output (voltage)

Equipment
Pressure Sensor Controller PSE200/300

Electric Actuators
38
Detection Switches
Energy
Reduced-
wiring
2-Color Display Digital Flow Switch PFM

Series Rated flow range [L/min]
0.2 to 10 (0.2 to 5)
0.5 to 25 (0.5 to 12.5)
PFM
1 to 50 (1 to 25)
2 to 100 (2 to 50) ( ): For CO2
¡Air, N2, Ar, CO2
¡Grease-free
Features
¡Integrated flow adjustment valve
¡Compact, Lightweight, Space-saving
2-Color Display Digital Flow Switch PFMB

2 to 200
5 to 500
PFMB
10 to 1000
20 to 2000
¡Air, N2 ¡Grease-free
Features
¡Integrated flow adjustment valve (200 L type) ¡Compact, Space-saving
3-Color Display Digital Flow Switch PFMC

5 to 500
PFMC 10 to 1000
20 to 2000
¡Enclosure: IP65
¡Dry air, N2
Features ¡3-color/2-screen display
¡Expanded flow range: Wide range of flow measurement with one product
¡Compact, Space-saving
Digital Flow Switch for Air PF2A

1 to 10
5 to 50
10 to 100
20 to 200
PF2A
50 to 500
150 to 3000
300 to 6000
600 to 12000
¡Integrated type and separate monitor type are available.
¡Switch output, accumulated pulse output, analog output
Features
¡Capable of switching back and forth between cumulative and instantaneous flow
¡IP65
39
Energy
Reduced-
wiring
3-Color Display Digital Flow Switch for Water PF3W
Actuators
0.5 to 4
2 to 16
PF3W 5 to 40
10 to 100
50 to 250
¡Flow sensor with 3-color/2-screen display
Valves
¡Integrated temperature sensor
¡40% smaller (compared with PF2W)
Features
¡IP65 compliant, Grease-free
¡Fluid temperature: 0 to 90°C
¡PVC piping type: Applicable to deionized water and chemical liquids

Fittings & Tubing
3-Color Display Digital Flow Switch for PVC Piping PF3W
10 to 100
PF3W
30 to 250
Equipment/Blow Guns
Pressure Control
¡Applicable fluid: Deionized water, Chemical liquids, etc.
¡Flow sensor with 3-color/2-screen display
Features ¡IP65 compliant, Grease-free
¡Fluid temperature: 0 to 70°C
¡PVC pipe O.D.: 25A
Equipment
3-Color Display Electromagnetic Type Digital Flow Switch LFE
Detection Switches
0.5 to 20
LFE 2.5 to 100
5 to 200
56 mm x 40 mm x 90 mm (H x W x D)
Weight: 340 g (LFE13)
Features ¡Reverse flow can be detected.
¡Operating fluid temperature: 0 to 85°C
¡Current consumption: 45 mA Vacuum Equipment
¡Applicable fluids: Water, Water-soluble coolant
High Pressure
Temperature Control
High
Pressure
Equipment
2-Color Display Digital Pressure Switch ISE70/75(H)

ISE70 Positive pressure (for air) 0 to 1 MPa
Electric Actuators
ISE75 Positive pressure (for general fluids) 0 to 10 MPa

ISE75H Positive pressure (for general fluids) 0 to 15 MPa
¡Metal body type (Die-cast aluminum)
Features ¡IP67
¡With M12 connector
40
Vacuum Equipment
Resistance
All Stainless Steel Vacuum Ejector ZH-X267

Nozzle diameter Max. suction flow Air consumption Guidelines for
Series
[mm] [L/min (ANR)] [L/min (ANR)] applicable pad [mm]
ZH05-X267 0.5 5 13 2 to 13
ZH07-X267 0.7 12 23 2 to 20
ZH10-X267 1.0 24 46 2 to 32
¡All stainless steel (SCS13: Equivalent to stainless steel 304)
Features
¡Sealant not required ¡Maximum operating temperature: 260°C ¡Grease-free
Others
Adsorption Transfer
Vacuum Unit ZK2

Nozzle Max. suction flow Air consumption Guidelines for Vacuum pump
Ejector series
diameter [mm] [L/min (ANR)] [L/min (ANR)] applicable pad [mm] system series
ZK207 0.7 29 24 2 to 40
ZK210 1.0 44 40 2 to 50
ZK200
ZK212 1.2 61 58 2 to 125
ZK215 1.5 67 90 2 to 150
¡Compatible with ejector systems and the vacuum pump systems
¡Digital pressure switch for vacuum with energy saving function cuts supply air
when the pressure reached the desired vacuum. Air consumption: 90% reduction
¡More efficient ejector Suction flow: 50% increase
Features
Air consumption: 30% reduction
(Compared to other SMC single stage ejectors)
¡Compact/Lightweight: Volume 88 cm3 (28% reduction)
Weight 81 g (59% reduction)
Body Ported Type Vacuum Ejector ZH

Nozzle Vacuum pressure reached∗1 [kPa] Max. suction flow [L/min (ANR)] Air consumption
Series
diameter [mm] Type S Type L Type S Type L [L/min (ANR)]
ZH05DA 0.5 6 13 13
ZH07DA 0.7 12 28 27
–48
ZH10DA 1.0 26 52 52
ZH13DA 1.3 –90 40 78 84
ZH15DA 1.5 58 78 113
ZH18DA 1.8 –66 76 128 162
ZH20DA 2.0 90 155 196
¡Overall length: Max. 11% reduction (51.8 mm/ZH05DA-06-06-06)
Features
¡Weight: Max. 74% reduction (23.3 g/ZH20DA-10-12-12N)
∗1: Supply pressure: 0.45 MPa
Vacuum Flow ZH--X185

Series Passage diameter
ZH10-X185 ø13
ZH20-X185 ø21.6
ZH30-X185 ø30
ZH40-X185 ø42
¡By supplying compressed air, large blow and vacuum flow rate available
¡A blow flow rate 4 times the supply air
¡A vacuum flow rate 3 times the supply air
¡Large passage diameter available for suction of machining chips, particles, etc.
Features ¡Maintenance free
¡Mounting bracket available
¡Application examples
Blow: Blowing away water droplets and machining chips.
Vacuum: Vacuuming the smoke during soldering. Transferring materials such as pellets or fine particles.
41
Others
Adsorption Transfer
Vacuum Pad ZP3E Vacuum Pad ZP3
Actuators
Series Type Pad diameter Series Type Pad diameter
ZP3E-UM- Flat type with groove ø32, ø40, ø50, ø63, ø80, ø100, ø125 ZP3 Flat ø1.5, ø2, ø3.5
Valves
ZP3E-BM- Bellows type with groove ø32, ø40, ø50, ø63, ø80, ø100, ø125 ZP3 Flat with groove ø4, ø6, ø8, ø10, ø13, ø16
¡Stability of suction position, improved ease of removal. ZP3 Bellows ø4, ø6, ø8, ø10, ø13, ø16
Groove on the adsorption surface secures the interior space. ¡Compact, Space-saving, Overall length is shortened.
Features
Features Ribs reduce the inclinations during transport of workpiece. ¡One-touch fitting and barb fitting for ø2 are available.
¡The number of mounting screws reduced (4 pcs.  1 pc.)

¡Pad and metal parts can be disposed of separately.
Fittings & Tubing

4.5-Stage Bellows Pad ZP2 Non-contact Gripper XT661
Equipment/Blow Guns
Pressure Control
Series Pad diameter Series Outer body diameter Note
ZP2-TB15 ø15 Cyclone type ø20, ø40, ø60, ø80, ø100 High lifting force
ZP2-TB20 ø20 Low profile cyclone type ø20, ø25 Low profile: 1.8 mm
ZP2-TB30 ø30 ø40, ø60, ø80, ø100,
Bernoulli type Vibration reducing
Equipment
ZP2-T40 ø40 120, 150
ZP2-T46 ø46 ¡Assist in non-contact workpiece transfer.
¡For adsorbing workpieces flowing at high speeds ¡Max. workpiece suction distance: 10 mm
Features
Features ¡Follows various shapes of workpieces. ¡Cyclone type: High lifting force: Max. 44 N
¡Pad material: Silicone rubber (Rubber hardness: A40, A50, A60) ¡Bernoulli type: Amplitude of the workpiece during gripping: ±0.01 mm or less
Detection Switches
Vacuum Pad for Soft Film ¡Reduction of wrinkles made on thin workpieces, such as film or vinyl, during adsorption
ZP-606-25CS0J20 ¡Reliable suction of film or vinyl
Vacuum Equipment
Temperature Control
Equipment
Electric Actuators
42
Temperature Control Equipment Refer to Temperature Control Equipment Precautions
for operating environment and storage environment.
Temperature Temperature Control

Control
Thermo-chiller: Basic Type HRSE

Compact basic type Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating fluid
1.2 kW, 1.6 kW Tap water, Ethylene
Air-cooled
HRSE 10 to 30°C 2.2 kW ±2.0°C
refrigeration
glycol aqueous
(Air-cooled, 60 Hz) solution (15%)
¡Simple function and performance. Thermo-chiller of the basic type.
¡Large energy saving by triple control!
Power consumption 33% energy saving
Features
¡Compact/Lightweight 32 kg (100 VAC)
¡Maintenance free: Magnet pump
¡Low-noise design: 55 dB(A)
Thermo-chiller: Standard Type HRS

Standard type Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating fluid
1.3 kW, 1.9 kW Air-cooled Tap water, Deionized
2.4 kW, 3.2 kW refrigeration water, Ethylene
HRS012 to 060 5 to 40°C
5.1 kW, 5.9 kW
±0.1°C
Water-cooled glycol aqueous
(Air-cooled, 60 Hz) refrigeration solution (15%)
¡With this chiller, cooling water can be obtained anywhere it is necessary

because of easy installation and easy operation.
¡For a wide range of applications such as laser machine tool, analytical
equipment, LCD manufacturing equipment, mold temperature control, etc.
¡Compact: W 377 x H 615 x D 500 mm (HRS012/018/024)
Features ¡Timer operation function, Low level in tank, Power failure auto-restart,
Antifreezing operation function, etc.
¡Self diagnosis function
¡Available as overseas models (Single-phase 200 to 230 VAC, Single-
phase 100, 115 VAC)
¡Conforms to UL specifications, CE-marking. (Except 9 kW)
Thermo-chiller: Standard Type HRS090

Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating fluid
Air-cooled Tap water, Deionized
9 kW refrigeration water, Ethylene
HRS090 5 to 35°C
(Air-cooled, 60 Hz)
±0.5°C
refrigeration solution (15%)
¡Lightweight and Compact
¡Cooling capacity: 9 kW
¡Temperature stability: ±0.5°C
Features
¡Set temperature range: 5 to 35°C
¡Maximum ambient temperature: 45°C
¡Power supply: 3-phase 200 to 230 VAC, 380 to 415 VAC
Thermo-chiller: Standard Type HRS100/150

9.5 kW refrigeration
HRS100 water, Ethylene
5 to 35°C 14.5 kW ±1.0°C
HRS150 (Air-cooled, 60 Hz) Water-cooled glycol aqueous
¡No heater required, circulating fluid is heated using heat exhausted
by refrigerating circuit.
¡Compatible power supplies in Europe, Asia, Oceania, North, Central
Features
and South America
¡Low-noise design: 70 dB(A)
¡Outdoor installation: IPX4
43
Temperature Temperature Control
Control
Thermo-chiller: Inverter Type HRSH090
Actuators
9.5 kW refrigeration water, Ethylene
HRSH090 5 to 40°C
(Air-cooled)
±0.1°C
¡Power consumption reduced by 53%
Outstanding energy saving effect with the triple inverter!
Valves
Features ¡Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
¡Low-noise design: Max. 66 dB(A)

Fittings & Tubing
Thermo-chiller: Inverter Type HRSH
Large type Series Set temperature range Cooling capacity Temperature stability Cooling method Circulating fluid
10 kW, 15 kW Air-cooled Tap water, Deionized
20 kW, 25 kW refrigeration water, Ethylene
HRSH 5 to 35°C
28 kW
±0.1°C
(Air-cooled, 60 Hz) refrigeration solution (15%)
Equipment/Blow Guns
Pressure Control
¡Outstanding energy saving effect with the triple inverter!
¡Outdoor installation, Splashproof type (IPX4)
Features
¡Temperature stability: ±0.1°C (when a load is stable)
¡Space-saving and lightweight 280 kg (25 kW type)
¡Conforms to UL specifications, CE-marking.
Thermo-dryer IDH
Equipment
With air temperature adjustment function Air flow capacity Outlet air temperature Outlet air set Outlet air temperature Cooling
Series
[L/min (ANR)] adjustment range pressure range stability method
IDH4 100 to 500 Heater operation
15 to 30°C 0.15 to 0.85 MPa ±0.1°C
IDH6 200 to 800 PID control
¡Stable supply of temperature and pressure controlled dry clean air!
Detection Switches
Possible to supply compressed air with the same conditions and
quality regardless of the season.
¡Application example
Supplying compressed air with constant conditions to air bearings
mounted on the tool.
Features ¡Built-in filter
Filter nominal filtration rating: 0.01 μm (99.9% filtration efficiency)
Vacuum Equipment
Outlet oil mist concentration: Max. 0.01 mg/m3 (ANR)
Outlet cleanliness: Particles of 0.3 mm or more: 3.5 particles/L (ANR)
or less
¡Power supply available all over the world
Single-phase 100, 200, 230 VAC (50/60 Hz)
Temperature Control
Equipment
Electric Actuators
44
Electric Actuators
High Electric/Positioning
Speed
Electric Actuators
Transfer Load and unload

transfer of workpieces
Slider Type
LEF Series LEFG Series Support Guide
Step Motor (Servo/24 VDC) Servo Motor (24 VDC)
Clean Room Specification
AC Servo Motor (100/200/400 W)
Ball screw drive Clean Room Specification Secondary Battery Compatible

LEFS Series Support guide
Motorless Type
Belt drive
LEFB Series
LEJ Series AC Servo Motor (100/200 W)

Application Example LEF
Ball screw drive Clean Room Specification Secondary Battery Compatible Pick and place
LEJS Series Motorless Type LEJ
LEY
Belt drive
LEJB Series
LEM Series Step Motor (Servo/24 VDC)

Belt drive
Basic type Cam follower guide type Linear guide single axis type Linear guide double axis type
LEMB Series LEMC Series LEMH Series LEMHT Series
Lift Up/Push
Rod Type
LEY Series Dust-tight/Water-jet-proof (IP65 Equivalent) Secondary Battery Compatible Motorless Type
Application Examples
Step Motor (Servo/24 VDC) AC Servo Motor (100/200/400 W)
Lifter
Servo Motor (24 VDC)
Motor top
mounting type
LEY Series In-line motor type
LEY Series
LEY D Series
Delivery
Guide Rod Type LEYG Series
Step Motor (Servo/24 VDC) AC Servo Motor (100/200 W)
Servo Motor (24 VDC)
 Lateral end load:
5 times more
45
Rotate Stop
Actuators
Rotary Table Electric Stopper Cylinder
LER Series LEB Series Application Example
Valves
Step Motor (Servo/24 VDC) Made to Order
[Basic type] [Continuous rotation specification] Suitable for conveyor lines
[High precision type] Rotation angle: 360° without an air supply

Fittings & Tubing
Space Saving
Equipment/Blow Guns
Can be mounted with short pitch. (LEP)
Pressure Control
Guide Rod Slider Miniature
LEL Series LEP Series
Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC)
Belt drive Rod type Slide table type
Equipment
 Low-profile/Flat LEPY Series LEPS Series
Height 48 mm
Detection Switches
Slide Table
Compact Type LES Series High Rigidity Type LESH Series
Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Step Motor (Servo/24 VDC) Servo Motor (24 VDC)
Vacuum Equipment
Basic type Symmetrical type In-line motor type Basic type Symmetrical type In-line motor type
LES R Series LES L Series LES D Series LESH R Series LESH L Series LESH D Series
Application Example
Positioning of pallets
Temperature Control
Grip
on a conveyer
Equipment
Gripper
LEH Series Step Motor (Servo/24 VDC)
Electric Actuators
Z Type (2 fingers) ZJ Type (2 fingers) F Type (2 fingers) S Type (3 fingers)

LEHZ Series With dust cover Long stroke Can hold round
LEHZJ Series LEHF Series workpieces.
LEHS Series
46
Electric Actuators
High Electric/Positioning
Speed
Controller/Driver
Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC)

Servo Motor (24 VDC) Programless Type Programless Type
Step Data Input Type Parallel I/O Type LECP1 Series (With Stroke Study)
LECP6 Series JXC73/83 Series  14 points LECP2 Series
LECA6 Series  4 axis synchronous
positioning  End to end operation
 Control panel similar to an air cylinder
 64 points positioning control
setting (PC is  2 stroke end points +
 Input using controller  Linear/circular
not required.) 12 intermediate points
setting kit or teaching interpolation
positioning
box
Specialized for Series LEM
Step Motor (Servo/24 VDC) Fieldbus-compatible Network Controller/Gateway Unit
Pulse Input Type CC-Link EtherNet/IP™ LEC-G Series

LECPA Series Direct Input Type Direct Input Type
LECPMJ Series JXC91 Series
AC Servo Motor
Pulse Input Type CC-Link SSCNET# Type

LECSA Series Direct Input Type LECSS Series
LECSB Series LECSC Series
 Absolute encoder (LECSB)
 Built-in positioning function (LECSA)
LECSA Series LECSB Series
MECHATROLINK@ Type MECHATROLINK# Type SSCNET#/H Type

LECYM Series LECYU Series LECSS-T Series
-@ -#
47
48
Temperature Control Static Neutralization Pressure Control Fittings & Tubing
Electric Actuators Vacuum Equipment Detection Switches Valves Actuators
Equipment Equipment Equipment/Blow Guns Flow Control Equipment
SMC ’ s unique production system achieves
Die Maintenance Aluminum Melting Furnace Line

P roduction and Supply
NC Machinery Line Piston Rod Machinery Line
SMC’s Integrated Production System
Plastics Molding
Dies Casting
Machining
Forging
Punching Press
Impact Molding
49
high quality, low cost and a short lead time.
SMC products reflect a market trend towards greater diversification with a vast array of 12,000 basic
models and over 700,000 variations. This is made possible by an integrated production system that
includes casting, machining, surface treatment, coating, assembly and inspection, all performed in SMC’s
factories in order to supply our products with a high level of quality, reasonable pricing and shorter
delivery times to our customers. Furthermore, we use a unique production control system in which
instructions for all production operations are performed automatically based on information from orders
received. As a result, SMC has achieved shorter lead times for its product.
Valve Body Machining Plastics Molding Coil Winding
Assembly Inspection Clean Room
Electronic Parts
Assembly/Inspection of
Temperature Control Equipment
Electronic Substrate Mounting Automatic Assembly Equipment

50
A global production network supports a
stable & continuous supply of high quality
products throughout the world.
SMC delivers products for world markets from five key factory locations in Japan,
in the Tsukuba district of Ibaraki prefecture and the Soka district of Saitama
prefecture, as well as from other key locations in China and Singapore.
Additionally, to respond quickly and increase flexibility to the demands of the
local market, overseas production facilities have been established in SMC
subsidiaries around the world.
1 Production Facilities (Japan)

P roduction and Supply
 Soka Area (Saitama Pref.)  Tsukuba Area (Ibaraki Pref.)

Total land area: 31,757 m2 Total land area: 171,939 m2
Total floor area: 47,920 m2 Total floor area: 79,884 m2
 Kamaishi Area (Iwate Pref.)  Tohno Factory (Iwate Pref.)

Total land area: 86,196 m2 Total land area: 78,845 m2
Total floor area: 52,396 m2 Total floor area: 28,536 m2
 Yamatsuri Factory (Fukushima Pref.)

Total land area: 315,761 m2
 Distribution Center
Total floor area: 44,362 m2 (Ibaraki Pref.)
Total land area: 32,207 m2
Total floor area: 19,514 m2
2 Key Overseas Production Facilities
 China Factory  Singapore Factory

SMC (China) Co., Ltd. SMC (Beijing) Manufacturing Co., Ltd. SMC Manufacturing (Singapore) Pte. Ltd.
Total land area: 172,558 m2 Total land area: 315,857 m2 Total land area: 47,911 m2
Total floor area: 115,389 m2 Total floor area: 147,056 m2 Total floor area: 37,800 m2
51
Russia
U.K. Germany
Czech Republic
Spain China
Italy Japan U.S.A.
Korea
India
Mexico
1 Production Singapore
Facilities (Japan)
2 Key Overseas Australia Brazil
Production Facilities
3 Overseas Local
Production Facilities
3 Overseas Local Production Facilities

North, Central & South America
 Chile
 Argentina
 Bolivia
 U.S.A.  Brazil  Mexico
Europe/Africa
 Switzerland
 Austria
 Sweden
 France
 Spain
 Germany  U.K.  Italy  Turkey
 South Africa
 Russia  Czech Republic
Asia/Oceania
 Singapore
 Malaysia
 New Zealand
 Hong Kong
 China
 Australia  Korea  India (Guangzhou)
 Taiwan
 Thailand
52
Pneumatic Equipment for Food Industry
Energy
Food Environmental Saving/ High Temperature High Safety
Others
Sanitation Resistance Reduced- Speed Control Pressure Measures
wiring

Pneumatic Equipment For Food Industry: Theme

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Pneumatic Equipment For Food Industry: Theme

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Pneumatic Equipment

for Food Industry

Fittings & Tubing

Pressure Control Equipment/

Blow molding Rinser

Temperature Control Temperature Control

High Pressure High Pressure

Reduced-wiring Static Neutralization High Pressure Hygienic

Silencer Direct operated regulator

Water Resistant Water resistant

Enclosure: IP67 Pilot operated 2 port solenoid valve

Maintenance High Speed Applicable Materials

High Power Cylinder

Steam (Heating) Pressure/Flow Rate Detection

Filling Capping Inspection

High Frequency Hygienic Static Neutralization Air Blow

Grease for Food Processing Equipment

Stirring/Mixing machine Oven fryer Cleaning machine Slicer

Temperature Control Temperature Control

High Pressure High Pressure

Hygienic Heat Resistant Hygienic Hygienic

Temperature Control Steam (Heating) Temperature Control Temperature Control

Grease for Food Processing Equipment

Pressure/Flow Rate Detection Cold Resistant

Pressure/Flow Rate Detection Pressure/Flow Rate Detection

Static Neutralization Static Neutralization Electric

Paper Powder/Dust Resistant Paper Powder/Dust Resistant Paper Powder/Dust Resistant

Pressure/Flow Control Static Neutralization Applicable Materials

Environmental Water Resistant s P.12 Environmental Paper Powder/Dust Resistant s P.13

Dust Grease film

Environmental Heat Resistant sP.14

CJP2-XB7, CJ2-Z-XB7, CM2-Z-XB7 RHC MQM

Safety Drop Prevention sP.16

End Lock Cylinders Lock Cylinders

C85 CP96/C96 C55 • Mechanically Jointed Rodless Cylinder/MY3B63-m-DCJ6064J P.12 s

• Improved Environmental Resistance: Parallel Style Air Gripper/MHZL2-m-X3361 P.12

Series • Heat Resistant Cylinder with Auto Switch P.14 s

• Heat Resistant Auto Switch P.14 s

• Air-Hydro Booster P.15 s

Flow Control Equipment

Safety Standard ISO13849-1 Certified

Measures Measures Measures

AV Double Check Spacer (With residual pressure release valve) VR51

VXB, VXS SY3000/5000/7000

Fittings/Tubing/Flow Control Equipment

Safety Drop Prevention sP.32 Maintenance sP.29 Specialized Products

• Stainless Steel Specification

Pressure Control Equipment/Blow Guns

SRH, SRP AW-X2622 VMG KN ZHm-m-X185

Pressure Control Equipment/Blow Guns Static Neutralization Equipment

M Made to Order P.35 IZS4m, IZN10, IZF10, IZF21/31

• High pressure -X425 IZD10, IZE11, IZH10, etc.

Flow Control Equipment

Fittings & Tubing

Temperature Control Equipment Electric Actuators

HRSE, HRS, HRS090, HRS100/150

A water resistant cylinder configured for easy cleaning

Hygienic Design Cylinder (HYB, HYQ, HYC, HYG)

Washing in water/Temperature: 30°C, Flow rate: 160 cc/min

Hygienic Design Cylinder HY

Flat, grooveless configuration New scraper

Dimensions Same as standard type

Flow Control Equipment

In the area around the ultrasonic cleaning ¡O-ring/Seal material: Fluororubber