Equipement Qty CFM Connection size Type Remark

Chemical Room Process

FM 1 1 1500 10" - 12" OD Process 2500 FPM
FM 2 1 1500 10" - 12" OD Process 2500 FPM
FM 3 1 1500 10" - 12" OD Process 2500 FPM
FM 4 1 1500 10" - 12" OD Process 2500 FPM
FM 5 1 1500 10" - 12" OD Process 2500 FPM
FM 6 lab
Mechanical 1 1500 10" - 12" OD Process 2500 FPM
RIE
Tool exhaust 1 1 150 3" Hot 2500 fpm 175°C
Tool exhaust
Mechanical lab 2 1 250 4" Hot 2500 fpm 175°C
Laser decapper Process
Fa Lab

Laser 1 1 300 4" Process 3000fpm

Laser 2 1 300 4" Process 3000fpm
MIP Decapper 1 10 100 mm Hot 200 m3/hr 7m/s
Chemical Lab cabinet Process
Cab 1 1 35 50mm od Process 1500 fpm
Cab 2 1 35 50mm od Process 1500 fpm
Cab 3 1 35 50mm od Process 1500 fpm
Cab 4 1 35 50mm od Process 1500 fpm
PPe Cab 1 35 50mm od Process 1500 fpm
Gas utility room exhaust 200 Process 7500 FPm
Mechanical lab
RIE
Tool exhaust 1 1 150 3" Hot 2500 fpm 175°C
Tool exhaust 2 1 250 4" Hot 2500 fpm 175°C
Mechanical lab Oven + fridge 1 180 4" Hot 2000 FPM 175°C
Bake oven B7 1 12 4" Hot 175°C
Bake oven B13 1 30 4" Hot 175°C
Bake oven B14 1 30 4" Hot 175°C
Bake oven B16 1 30 4" Hot 175°C
Bake oven B17 1 12 4" Hot 175°C
Bake oven B21 (CHD) 1 30 4" Hot 175°C
Bake oven B22 (CHD) 1 30 4" Hot 175°C
REFLOW FURNACE RF2 2 600 8" Hot 300°C
SD01 Workstation (Fumehood) 1 200 Hot 175°C

THB28 (ESPEC-Full CC3)(CHD) 1 300 10" x 3 1/8" Wet 175°C

DV1 1 500 10" x 3 1/8" Hot 150°C
IBE2 (CC3E) 1 500 10" x 3 1/8" Hot 150°C
IBE3(CC3HV) 1 500 8" x 2 3/4" Hot 150°C
IBE9 (CC3) 1 500 10" x 3 1/8" Hot 150°C
IBE10 (CC3-LTOL) 2 500 4" Hot 150°C
IBE11 (CC3) 1 500 10" x 3 1/8" Hot 150°C
IBE12 (CC3) 1 500 8.5" x 2 1/2" Hot 150°C
IBE13 (CC3-ENGINEERING) 1 500 10" x 3 1/8" Hot 150°C
Rel Lab

Bake oven B4 1 12 4" Hot 175°C

IBE16(CC5) 1 518 200mm Hot 175°C
IBE17(CC3HV)(CAPEX) 1 518 200mm Hot 175°C
IBE18 (CCHV) (CHD) 1 500 8.5" x 2 1/2" Hot 150°C
IBE19 (CCHV) (CHD) 1 500 8.5" x 2 1/2" Hot 150°C
IBE20 (CC3) (CHD) 1 500 8.5" x 2 1/2" Hot 150°C
IBE21 (CC3) (CHD) 1 500 8.5" x 2 1/2" Hot 150°C
IBE22 (CC3) (CHD) 1 500 8.5" x 2 1/2" Hot 150°C
W5 & W6 1 500 7 1/4" x 5 1/8" Hot 150°C
W7 & W8 1 500 7 1/4" x 5 1/8" Hot 150°C
W9 & W10 (STATIC) (CHD) 1 500 7 1/4" x 5 1/8" Hot 150°C
W11 & W12 (STATIC)(CHD) 1 500 7 1/4" x 5 1/8" Hot 150°C
W12 & W13 (STATIC)(CHD) 1 500 7 1/4" x 5 1/8" Hot 150°C

IBE14(CC5) 3 Hot 175°C

Outlet 1 1400 8" x 12" Hot 175°C
Outlet 2 1400 8" x 12" Hot 175°C
Outlet 3 2500 8" x 12" Hot 175°C
IBE15 (CC5) 3 Hot 175°C
Outlet 1 1400 8" x 12" Hot 175°C
Outlet 2 1400 8" x 12" Hot 175°C
Outlet 3 2500 8" x 12" Hot 175°C