Nowa: fre foo Nin: sary, Mansa = §h fue 9 Le Seb aru Munger py 1 Oyidn Matus lapuay duilin ie Sinem Polen gain dia fume yun 2 Jeanne Werpvuni duu foreal Y Yallonduiiw dapat dvlmdun 4 peviyni WAthut Li Mertens Olde IV aad canyehr’ UMS uAVAA gu eta YLUEin D tAlnn Yan at Ui Bondar Pret jay aulr wi warapaneun {5 pully pau Wht peniyset fritinn . (ai _cullan pricey iuny balun Yeu Win’ inirualt It hatin yuo dion » Uhh 54m aneadt Weyininwigun OWyius fr imal wun fim niVtnuousin wanuwnya , Adrien Waysciauae, Udich’ imu 4 unit dun petndiiy win _pivwillvaiien fOUMIUL nuaty AWbadngy fo buspann Iat dre Derwwiusan’ ed gus wan perual yin >. Fuvyuiuan iy panuwy 444 yuvaun Aruwuhe eu wurun Iyatia Ulyidu peramsachuer/ Cosgees) j{Gawihue \ Wuuefiiues gation Mines 6iVine Uae (Mean! Waett “4 wuuyguiatiny tusvugul ADL itn fsa vhs due Ake _Ullyichan ker tut * (Mepvenn Gil mny w id data sutures genyluuintor duyut SAbeahil J gute ful dun sation Perron . Laguna May outs epee aun, may Maun Www din ferry Wed Vania | OE un — ly Sane dan aque uorumnye, Liuauverruun gnser Wij agg porwenl —y dapat verrnunsyan OWA dy Guay Ae->IyR’ —y aduAt Uf lento Gerdusieint cater una fereueey Gfeiiuutuiin gui peayrtirnn Wioln ttn dae dun fewlun aanber Bb | = Thane farsa = Geist 2. fenmprly ftuady diag Miyyy ylnake og olamoepe) RCo ian autvor davapity Waurpr inary faut Hel doa huinie tray | 7 ions ety Wann Wotuse in bow wage Pitkin 4 7 tr ony Seer virmuet dina genlur uauac lerubauy chou havnt Wren ty Yate / yup oir ni py pryuaton enpet ute WW patty a youn! dain enon dan 45 dyin dpe Mang D EAP Minune Avion Hiatus’ adap writin WAdinrpryevur Nepansmany the yal ateginy Venton draw bio} he Uy anal penpnpan didn pevpwtin bitin wipe sue Mvauky | Dipindai dengan CamScannerAne wawsaueitin day Oe LWUpdai eUliyye UEtr daw aug, Weujuaty wine prubuvin pur ofyhine h Ap errbamniaty star OD ses gules sent yl van’ ete Peyuwiun Pound (ak Uwe idan Maral pum dain ryan uty ait Bi Gee jetwuan dun hip iin amb yy ate Abuuat | “gg BAH Ht ellis dave putin diugat ag druubutudiin secre Ro raat ball, at hutin deus eet asl tanger Ghent fap arn’ geuuineg dey bo ick Wk Senter aw ale We” ue nue lee Uinyen WM Weyer Athlon dagh bent ai dancin oA’ — __bulisrasye gille Yeuubertan UWye duly eee ad Con UWhaly (teu anid eri gone 1 Sinsunoe trav closure Guvrler yb cadteauaty div prin SWttatinhrar bee cera, ded Shri Unnt Una yet tied Coun 5G aun putin, Gautier LC Helene dg mi guunerhy dts awit lun’ Smawhy amor UNE poo an dapat fie Miusah Seutuny OME cup topuee Wires Wanye U9 tle nung 4 ait cuapwh’ Guta wlan) ruin Aline Shui tj Plume Miouiae uaayowlny dbeartin ty putty prints deg yn Bhai Wer bayan Pojuny var iin biatipun dain Wide wana (wpe flare donate = Pehwanuene Wir Warat! diye ht Uap! raat pittarr cpu Gowler Svat erin pen hittin wavy Spents perp Unsine os Crust un sy tar tt Cos way WP wit ypenty Wad Derienge Co same dy Wey roe’ foe sora ter Sst ire spiny ge Www bid vane Wain agin vaninngy F8bein dan db Huan pont Sts linn gy prttuernns Wh phatmiaen One + Pd Aww"e dun dunn (har Uumysitrinige Cy adil, Srv" quuyusi(end nny CD 5419 vaneven Leva Une wy car ! Dipindai dengan CamScannerye Ceuurbor _(g . \ennghants Lapa (uneiae VS Fate iv Olid’ Uri din eye ding Une Unger hitting bevrrentens p(t) = du Cryy) wean (he tae oreanon’ soe toy (Eafe) jBlvsias fay: Wu SeuAe 9 OU Uh Thin’ ating de biyel, TAL Lait Sera 9 Cia oy davunirure, ule lasnst ween len fuuan thy sv [es ywul + Diouimatn wun’ Ould brant Worvhoie rhe Watt? veyeuniy We untre Unvial Wl Gunein wantennh lage Bratt 4) fom Peale atv Usytn iu dal hw . Wnuar requvdun put sruiiur UWntan peranile ein pian ues yububoans bhoUNY Onenten” rte winyatin UUswton ty Moette yl bits CUP Lb nity” bt pads Wer ( (uu) Wurgpets Lape ate be fatten Cit) levi, toyer + Wotton ambor y eaten ogee By gs Geta J Maeysitiin ukyenanaon Babar Konia lag pan ve oy > ent Lge dager (ee/UT) edp'cutmuun’ EL adn Lag BU Pomel guilt Ua Brun’ ALI’ 4 eben, Ypbats Aipari yen Wnts Wien he ouledus [id 2Y MIA! ty Geni JMR URUUN yun Oe (shiek Ptounedyun wai O14 ey ie entry’ aun Apr air Jalan Wim hue, lund hy rate Wie Seigusnidy pol owent rn’ Ung tod ou a os — Len Guster B aa ee Brunt oot wai Ub ed eoaiuin Hits dl unses S waiihs etulin’ dus fulnu Wat fue oneretars yuistath - . (6 ly wtavan a us Wy utente dusty waa stove ivan daleerranly wrcn’ euth bebe beats amateur Seton wt Cunt) veer Weer Bun pads ty baualo win predte alg (WO) Uertter Wetnt Vite Niner “1 Weis yeper den rene Ciui)=. Ui Satur dun Weatng HMaenia gum Wide ~~ diprvits J wyyzquslian Oncor’ Wupeln Seater Sty Went’ Weve debal dnpok, Mey pede yatrnfumatirls Uigdtin Wenig Ape 6 auuulimd Ateyean Mpvigs seep _vsuauin (tv0) dun Kastan > gated diepune’ usin ps4 spanaton = 9 : ; | Dep fas uep wants COP) —> Wegae oy yiiy Deques dhe Styne Wengen! pum hye) lisa febnlion ee fie pana, Ade 3 ware Aepeyrrs deus ty dy unatonin 7 CUD Mun ahmsae CD Dipindai dengan CamScanner(Wo Hust Cerin [LECVO) dan dipnne oup Wauart yolting Wrhaten Pring, Coeevo £ Bpnps posse) wy. ae Win Aeynya sutian Fears _peyentoparn WOM Uap (a) Peau, Ledud duuiy yu bb) Reuune peuewsupan Plume YE petet Paani (hts svn adi) Poa BH Duara Nintiy Yan dipuaiyain tl (ayn 5 Lane clang Seaham ciseebe Uy dy dapeuage Gitar A uguig oy britaeaonin Wage puiluuuare gupsenn feture vinusl Jilin Pinas lunge bruh bo dels deen Varn fone CM py Avnaniaun Tyee : divsuun peter Aig Alun niuny , oi uahunninyy “cle cine pettesbe tae = ewan paceuel ———— WS Lerrsrwer temytinin stun parm Cv _\ Y centery citnenrs Wu dui reccllier Creptns qu cltating unr dion Atala 4 caimiivans Woda mui Plovnae J cone Latin (Spore reaung tradsur ph pave prmuliuun Srelastort (4) Sperm 44 pr adiuegr’ vat aduuni rear vnuni J brecalin dy pperi amie Pay patina uu pune (SL Prd sumupoyan ream inital died pr wuuAdn fuly hat pote campgain ptr’ diltumeyrn dur’ role + Ye Petiwarlan Dutt waht pinoubipan dun gar gil frum duserse Temata Seite youn adie wrttun Leyredy Ciiors fulwe de vn aE OS Waawty Rina. pd bw 1) vile Wey,’ ime ouyioe gunaiwe wiv we _ ae 9 Saxth $0, so(0y oy Hamainpuien foun Stilt yoAl Wing 4 frltton dealt pasa 22 fal neon genta Réwicnds Us Daseisagh (Nis) > ‘ » ow 2 geluman Wate, Tauber yo I brs Lan getyonn ieanioH a o » » 4 faith health) 9 » 8 Specie — Sewalead_ Coli! Card Dipindai dengan CamScannerFW) tana MHe4we Gti 0 varugadinn Uajuny Catrin Blinr “fy dapayat Bettie 10 Ca) wrpullin fie ery hi Hee Pfmauuain mut tae. Werewun UUM Ldlg Fig Hitpee deer tysengs a edabinn lr vay ettaliny yy tp SEH Wp presatnn Lens, —Geewaber (oy) wetwunyutunnn Coney Copan Landis dau rvil of dahunilite Utne feelin etaye Sep dan brwaUY ng Wim pomuliunn fy @rowip tien , Deus Wet wai Lepupreyeadlapuis Jee Beis dey daguin fudat Utdtegin wulUsll guy « Retehanr xy tive Sepetnjean _prequtuon Vaumuntel ON perwal cui bibapi Wwiut dan f rdut Undatoyan Norman, datas duo Parana’ dies O Wigs, Wo" ceduyunn seat ty We Dbunain ity edi Varmdel wauuss Pl uidthapnn Oy bering’ de 0” Wine 99° AS TJiuuan guar 15 ash dibulew 4 = awwber {| wavumulun gainer seu eusiditen a 2 au peau dun Uae i Laytuws fUrnunn Panu | suey Ayuundion py faane Mwv"e fume ay wah « * iuabey at Ca au f Sedsuss paper Cin At dat Wacuanion Gann Bein aims Gadd Hutt i, Pe Pe i RIE, peer im ” Wgye 9 To pent. Dawa seuape) WA Petraranen Aula (uiglun din pin 9-5 lay jiientn eat Olin Tweanunt eigen Woseubrin’ fupnr . llwan sity Ipegannan pd wuts Guu und, Yonik yas Bde dim (ylaanan wml. fudur @ 25 ung” Wott Suse an dara MUU quill oy dined et yrumd degen Qe fo eth 19 Ulan Wott Baan ~Bwg Peo Wy. (iepubcnuse gomire Is yy pole does sa Ses st Veer Rap Ramiargaa ren x TTT M™_— Pape mas Wma Chto) 2r3p a Pateihteane da es ee sma tn iit ae | a SkKbemtehdeatenan 31 | ea er Nepwonecaint 3 See nL Pcie sy Pntslteracthe 3 | a Sesigensiy iss Dipindai dengan CamScanner20. Me genome OMe prt cru 21 Penner dans owen nas etl Wiehe! Auuane 22. Muguuuan orf _yul se Messy Wepwiny gy euuinik hittin deat dlununiaa es [-fulwrtives fel LBleti, uryeal on [Moatuwet ty vind pera, = sess fi sts eas nun ug fone 8 ae * Lue wayeuay Purvi -Aluaaaatiy Cuties Martiag ayers ches Alumni Ue | Bonde CA tae i pt en ly te hoe dywuuuinn (by Muro digs UM uuubunt porrmpimin diwuet dew Uh Uuaasnuern Wren Oviatt Ut nur Unite. Udpunnuin Ranbuinun Hnvra te —Peumbustn andesite cnn fre erwin nme 22-Selutuny paawurd pass yy tus pauyaeini —Shauner Tint > Sr hams peayen dagun dupa din fui oy dlreepunn FHA Lean peyton 2H pela Matin oir ur Dipindai dengan CamScanner25 Tuny G fats ALO dn jedvin hn ALO npiwss I wer) ey oe tear 1 ae on wre uur cenit (LEU SL tesa vee (0) eswug wien ( ponutemiinn) wets (bet) prettier fy baler tapes * lum grat autyn’ casos” 6) Ctyes Prewgyr pW weirs (kasn) Bee watuauiies real, pounders Yue Gy gersrerpurn (peuvent) wating (ten) preininr yy pdols bepetunr damm pot (tate clit clas 2 we Blo . (mh prep armunn NG Yy Ade Ayu Sat ruber ty Wine duality il, ener we ia Coneeeaion —Deconpsion ae Penua ryt ule yando ueurnn! stom dite ws diya” beaut. yl faa 4 Unie yy” diner 5 ho va ant eyes : we oa BOI Davey Men ALO 4 Hruid 0) undatit Wuadlagtie’ thing lle eae To eae Mats ok enh fu. Getwin VN ponecloyn te UD pintnit dian’ dtuusp uni prtlagery We Pitgin’ lig dAtauapiilg AS Winn Oey. pinta Peiysridipin dent Png wai Vin Ute hwy ued page yrry ALD 2 Twinn Grinlo er db ura IF power spp [seen tei tins bon ality ea : ! Web cpt nung stine [Metal Packing eletrode a) yeu prurient $0 Myuinr « = ite (el tetany dune a wastsinatds Maunats S69 Mgt RF plasma sat 7 (o) Mewaay [cute eeypann gates vivid biey _fyransenn, 7 : eo gem //. @ wre ty 8 win — Low presse go schon pou ne al PR Jtmmunn ape vy diunlinl suson penenatn Ef Spuie clan Buy fprutean we Peyeywum be fypuietr ¢ Uthat devi Pass Spuraeing dun fing clttareet Sy, Waele Jpu tein vevexe seutunin, wan ett atu pupa Cieuiey bru ppubriniy dunia proline An wn pang eubjl due! gtr ty bewslads -y eases Soy Veung Tene ten yuri deage situnding Usha pl files fy feutunny erations Prwarege Ppnatiton Un yeoman plwuunny —fujteah Hebe drying pian dunn 25. Stuy tan fatter Abiruain | @ Dipindai dengan CamScannerFo Flyunn gunbir gy den gg } aN o 1 et so Dieleie " - ‘Side | / i Palpscon A ss L — Burke | 000 seta Gambier ay watinluy rnssin furine AUNuAl dive genunpinyan Yin deni cthurnany 4 Venu hw Www pade etotarge pny UM dianne guy neh falls Suh ce hE At Walla spain pales mulated Warne ably Miiwen UL yltiunlany vanledl Revgae, MMA pty wun Sanat allie ta lun Atle Pride, reuwwulyi pep pervtatr Manet Meet) Aitutiy Avatinp pauwrilur (iplin Wing. penlunlily cysker Alumna Pein Mipberd Panunn (porwr Ds \apten Wyais Mylinlun Wai Wy uduorusi Perquctrn bevnut : Wourbeyill etaytouh Yuwie ctuudnte A htt Reus lly Lortab’ —§ catasununn cl Pe dadegun gem Yombenrutonn ays Wamprhia ob Uutlunitiien pte) Interna (yume pester cpr h” rede CTW) tala bv’ day Lena, Stal ube few Oe) varie Ls sie'c youu 40 uae WL Tuayuuiues quater yn Yonstctn Cup | TABLE 4 THREE METHODS OF CHENICAL-MECHANICAL POLISHING (CMP) Method. Wafer faci PS RotaryCMP— Down Rotary ing wafer carrier Dripping to pad surface OrbitalCMP — Down Orbital against rotating wafer carrier Through the pad surface Linear CMP___Down __Linear against rotating wafer carrier Dripping to pad surface ‘movement Slurry fe @ Dipindai dengan CamScannerPapuan tne ovate Shretiter ps cunt spp) Linck _San oles pu © (ho) diewmupny Pre ive ysuuerg dine yoetins pte (Owe gunn _vettnsas —bbettentrn Z A (_pegenntig cn Cy Pasar Won Wari vedic, Comp) Poryatiyan UutuMs Guin Sue Hymy dapat UMAtapa' Pluneaun 15 deruntinn fetvgi huelt| Aeepnn WAAL Vraptunn YOwsih Ly Wy yl Plvwsluaunn 1) ean Ap, pl Peed ei Wane fy yutaiy vvtsn —druney la’ VAniy yy rnin Apri dunn Wibr -o Untaub oper Waser ating stay Waecaer Shy spy Crema — fu pa, CO Lye. Petar une tel peo auidagun Tia Coit dy NYE FABLE 5 A COMPARISON OF TISi,, CoSi, AND NiSi FILMS eH > Properties Tish, Com | _| Resistivity Gi-emy 1316 Siticide/metal ratio 237 +] IP SiliciderSi ratio Los | Reactive to native oxide Yes Silicidation temperature (°C) 800-850 il stress (dynes! 15 x10" lang. JPtauin Wipaputlinn UK Glee 7 TS ale Aetir Alter fecha ten geal eye @ Dipindai dengan CamScanner