3-5 Error Code Table USER/Factory | Check Mode ‘Contents E30 - E39: Set angle - coordinate error ESI = When the coordinate is stored, the angle unit is different between when stored and when called. E35 = Collimation is done in +6° from zenith and nadir in the remote eleva- tion measurement mode, In the directional angle setting, the instrument point coordinate is the same as the directional angle coordinate. E40 - ‘E40 - E49: BIOS periphery and program mode measurement error Calendar IC cannot be accessed. E60 - E69: EDM error Ther is abnormal data in the memory information, F63 = The rotation of the cylindrical motor does not reach the specified speed. (It does not rotate or it cannot rotate smoothly.) E65 = “The standard side judges that there is something wrong in EDM. E68 = ‘The difference in the measured distance between the inside and outside is 10mm or less. £69 = EDM does not respond to the command from the standard side. E80 - E89: Communication error in the instrument ESI = E83 ‘This error oceurs when the user tries to set the angle with “GON” in “COMMUNICATION” though “DEGREE” is set. LVDS communication cannot be made between BAT COM and AF. ‘ABS does not respond to the command from OS. ‘OS does not respond to the command from ABS. ‘Communication error between tasks in ABS, (SUB-SERVO) E89 = ‘Communication error between tasks in ABS. (SUB-ABS) E90 - E99: Memory error in the instrument 599) = EEPROM writing error in ABS sub task racking microcomputer error TIPU does not understand the command from ABS, ‘An unexpected trouble has occurred, Conia dopaton and reproaicin provesUSER/Factory ‘Check Mode ‘Contents E308 In automatic tracking/automatic collimation, the tracking light inten- sity adjustment is not finished or the EDM measurement cannot be done, TIPU does not respond to the command from ABS. TIPU EEPROM error (Self-check) TIPU EEPROM error (Reading) ‘TIPU EEPROM error (Writing) ‘TIPU EEPROM error (Address) ‘The TIPU version information cannot be read. In automatic tracking/automatic collimation, FPGA does not start. In automatic tracking/automatic collimation, the CMOS sensor does not start 322 = Tn automatic tracking/automatic collimation, the tracking LD does not light up. 1323, When the image processing unit (DPS) requests the image, FPGA does not respond. E324 = Error in self-check of FPGA SDRAM £325 = Error in self-check of RAM 1326 _ When the light intensity adjustment is set to FPGA through the image processing unit (DPS), itis not validated. E330 - When reticle/rotation/focus is registered, the light intensity adjustment is not finished, E331 _ ‘When reticle/rotation/focus is registered, measurement is not finished (Shimmer, etc.) 332 = When rotation/focus is registered, automatic control is not possible. 333, = When reticle/rotation/focus is registered, the dispersion in the measure- ment results is large. ‘The “Far” and “Near” limit switches are ON during the “0” detection, ‘When the “0” detection starts, the “Near” limit switch is not changed from “ON” to “OFF”. Ea85 - ‘Overcurrent is detected during the “O” detection. (“Far” direction from the initial status) aad = The limit switeh is not set to “ON” when checking the “Near” limit switch “ON” during the “0” detection. FA86 = Overcurrent is detected while focus is moved from “Far” to “Near” during the “O” detection E487 _ ‘Overcurrent is detected in the vicinity of the “Near” limit switch during the “0” detection, 373 Cone dopeatonanéreproaictin prehbesUSER/Factory ‘Check Mode ‘Contents BAAS = ‘The “Near” limit switch is not set to “OFF” when checking its “OFF” status during the “0” detection. The “Far” limit switch is not set to “ON” when checking its “ON” sta- tus during the “0” detection, EARS = Overcurrent is detected while focus is moved from “Near” to “Far” during the “0” detection E489 _ ‘Overcurrent is detected in the vicinity of the “Far” limit switch during the “0” detection. E451 = AF does not respond to the command from ABS. Basa = Overcurrent of motor is detected, F499 = ‘AF EEPROM error E800 - F899: Self check mode measurement error E801 Vibration error (Judged with the standard deviation +5” for 30 sec- onds.) 802 Tilt value is #2’ 30” or more. F803, = Tilt offset value X: 43", ¥:23' or more E804 = Tilt axis is deviated in 15” or more during normal — inverted —> nor- ‘mal measurement. E806 = ‘The H angle is deviated in 1° or more. £600 - £799: ABS angular measurement microcomputer error 689 = The ABS angular measurement microcomputer cannot get the angle data. £990 = ‘The ABS angular measurement microcomputer cannot get the coefli- E##0 ABS angular measurement cient of the tilt unit. fit unit error £600 _ “The gate array is faulty (when tilt is measured). E610 _ In the tilt unit, the CCD center position is unset Tilt error _ In the tit unit, the CCD light intensity is insufficient Tilt error = In the tilt unt, the CCD light intensity is excessive. Tilt error = In the tilt unit, the pattern pitch is faulty. Tilt error = In the tilt unit, the XY tilt offset is out of the range. Tilt error = In the tilt unit, the tilt REF pattern is faulty. Tilt error = In the tilt unit, the Y tilt pattern is insufficient. Tilt error = In the tilt unit, the CCD pattern contrast is faulty. E##1 ABS angular measurement HI unit error E601 ‘The gate array is faulty (when HI is measured) E6II In the HI unit, the CCD center position is unset. Hangle error In the HI unit, the CCD light intensity is insufficient, Conia dopaton and reproaicin provesUSER/Factory | Check Mode ‘Contents Hangle error E631 In the HI unit, the CCD light intensity is excessive Hangle error E641 In the Hi unit, the pattern pitch is faulty angle error ETI In the HI unit, the CCD pattern contrast is faulty. Hangle error EM In the Hi unit, the phase, amplitude and standard deviation of A signal are not good. angle error E751 In the HI unit, the phase, amplitude and standard deviation of B signal are not good. Hangle error F761 In the HI unit, the phase, amplitude and standard deviation of C signal are not good. Wangle error E651 Tn the HI unit, the CCD light intensity is insufficient (when used nor- mally). angle error E661 In the HI unit, the CCD light intensity is excessive (when used nor- mally), E##2 ABS angular measurement H2 unit error E602 The gate array is faulty (when H2 is measured), E612 Hangle error Hangle error In the 112 unit, the CCD center position is unset. In the H2 unit, the CCD light intensity is insufficient. In the H2 unit, the CCD light intensity is excessive. Hangle error In the H2 unit, the pattern pitch is faulty. H angle error In the H2 unit, the CCD pattem contrast is faulty. H angle error In the H2 unit, the phase, amplitude and standard deviation of A signal are not good. Hangle error In the H2 unit, the phase, amplitude and standard deviation of B signal are not good, Hangle error ‘In the H2 unit, the phase, amplitude and standard deviation of C signal are not good, Tangle error E72 Tin the FT angle unit, the validity of the opposability reading position is not good. Hangle error 652 In the H2 unit, the CCD light intensity is insufficient (when used nor- mally). Hangle error £662 In the H2 unit, the CCD light intensity is excessive (when used nor- mally), E##3 ABS angular measurement V1 unit error E603 E613 V angle error V angle error The gate array is faulty (when V1 is measured) In the V1 unit, the CCD center position is unset. In the V1 unit, the CCD light intensity is insufficient. In the V1 unit, the CCD light intensity is excessive. V angle error In the V1 unit, the pattern pitch is faulty. V angle error In the V1 unit, the CCD pattern contrast is faulty 'V angle error Tn the VI unit, the phase, amplitude and standard deviation of A signal are not good. 3.75 Cone dopeatonanéreproaictin prehbesUSER/Factory | Check Mode ‘Contents V angle error E753 In the VI unit, the phase, amplitude and standard deviation of B signal are not good. V angle error E763 In the V1 unit, the phase, amplitude and standard deviation of C signal ate not good. V angle error 653 In the VI unit, the CCD light intensity is insufficient (when used nor- mally). V angle error E665 In the VI unit, the CCD light intensity is excessive (when used nor- mally), Ei##4 ABS angular measurement V2 unit error F604 = ‘The gate array is faulty (when V2 is measured). E614 = In the V2 unit, the CCD center position is unset. V angle error 5624 In the V2 unit, the CCD light intensity is insufficient. V angle error 5634 In the V2 unit, the CCD light intensity is excessive. V angle error 644 In the V2 unit, the pattern pitch is faulty V angle error E734 In the V2 unit, the CCD pattern contrast is faulty. V angle error E744 In the V2 unit, the phase, amplitude and standard deviation of A signal are not good. V angle error E754 In the V2 unit, the phase, amplitude and standard deviation of B signal are not good, V angle error E764 In the V2 unit, the phase, amplitude and standard deviation of C signal are not good. V angle error ET74 In the V angle unit, the validity of the opposability reading position is, not good. V angle error 1654 In the V2 unit, the CCD light intensity is insufficient (when used nor- mally). V angle error £664 In the V2 unit, the CCD light intensity is excessive (when used nor- mally), Conia dopaton and reproaicin proves