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Graphene, a carbon monatomic layer with a sp2-bonded plane and carboxyl or carbonyl groups to the edges of indi-
honeycomb structure, has been recently investigated as a vidual GO sheet, which make the GO hydrophilic and well
promising 2D material thanks to its unique material prop- dispersed to many polar solvents such as water, dimethyl
erties of high carrier mobility,[1–3] mechanical flexibility,[1,4] sulfoxide (DMSO), N,N′-dimethylformamide (DMF). The
thermal conductivity,[5] and optical transparency.[6] Although electrically conductive reduced graphene oxide (RGO) can
graphene exfoliated from graphite mechanically[2] still gives be produced from the insulating GO by chemical or thermal
the best properties with high purity and low defects, this exfo- reduction through the recovery of sp2-bonds. Chemical
liation process has limitation about large-scale production. reduction using hydrazine or phenylhydrazine in the pres-
Thus, formation of graphene in large area is necessary for ence of DMF and water is one of the easiest methods to con-
widespread applications in electronics, including touch screen vert GO to RGO in the laboratory, due to their effectiveness
panels,[7] sensors,[8] light-emitting diodes,[9] supercapacitors,[10] and fast reaction. Solvothermal reduction with N-methyl-
and solar cells.[11,12] Scalable graphene synthesis methods, such 2-pyrrolidone (NMP) is also considered as a useful method
as chemical vapor deposition (CVD) on catalytic surfaces and because toxic chemicals can be avoided during the reaction.
epitaxial growth on SiC, can synthesize graphene uniformly There remains some amount of functional groups even after
in large areas. However, these methods still use conventional chemical and solvothermal reduction, which enables RGO
multiple steps of lithography and dry etching for patterning, to be well dispersible to various kinds of solvents. Moreover,
and the lithography process does not facilitate patterning by controlling the amount of remaining functional groups or
on nonplanar substrates. Besides, the CVD method mostly introducing other functionality to RGO, its electrical proper-
requires additional processes for transferring the graphene ties and solubility can be easily controlled to be adjusted to
layer from the catalyst surfaces to other target substrates. the main fabrication and target applications.
Instead, another promising alternative method is liquid The suspensions of RGO can be used as inks, and printing
phase exfoliation (LPE).[13–16] Suspensions of graphene techniques enable the suspensions to be printed directly onto
oxides (GOs) can be obtained by the oxidation of graphite target substrates with the desired patterns. Patterning of gra-
using several processes proposed by Brodie, Staudenmeier, phene has been achieved using various methods including
and Hummers. Due to the easiness and controllability of mask-assisted plasma etching[17–19] or growth on prepatterned
the reaction, the Hummers methods are more generally catalyst films,[6,20] which requires costly multiple steps with
used over others in the recent studies. After the oxidation, limited scalability. Compared to those conventional patterning
large amounts of oxygen-related functional groups, such process, direct printing,[21–24] or laser direct writing[25–28]
as hydroxyl or epoxide groups, are introduced to the basal approaches are relatively simple and offer low-cost, large-area
fabrications of devices. (See Table S1, Supporting Informa-
tion.) Among diverse printing methods, inkjet technique is
B. W. An, Dr. K. Kim, M. Kim, S.-Y. Kim, Prof. J.-U. Park of interest due to desirable features including (1) the capa-
School of Materials Science and Engineering bility of fabricating arbitrary pattern designs, where changes
School of Energy and Chemical Engineering
can be achieved readily through software, (2) the reduction
Low-Dimensional Carbon Materials Center
Ulsan National Institute of Science in material waste by depositing functional inks only where
and Technology (UNIST) they are required,[29] and (3) compatibility with large-area
Ulsan 689-789, Republic of Korea substrates.[30–32] Growing numbers of reports describe inkjet
E-mail: jangung@unist.ac.kr printing of graphene using commercially available inkjet
Prof. S.-H. Hur systems with demonstrations on fabrications of devices or
School of Chemical Engineering and Bioengineering device components such as flexible electrodes,[21,33,34] radio
University of Ulsan frequency identification (RFID) antennas,[22] display[35] and
Daehak-ro 102, Nam-gu, Ulsan 680-749, Republic of Korea
organic transistors.[23,24] Conventional inkjet printers gen-
E-mail: shhur@ulsan.ac.kr
erate ejection of droplets from nozzle orifices with the aid
DOI: 10.1002/smll.201403131 of thermal or acoustic force.[36] However, the finest feature
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Figure 2. Thickness control of the printed patterns. a) An optical image of alphabetic patterns with gradient colors by controlling thickness (line
width: about 4–5 µm). A 5-µm-inner-diameter nozzle was used, and the thickness of the pattern was adjusted by changing printing times locally.
(Scale bar, 200 µm). b) AFM depth profiles of portions of the alphabet patterns in Figure 2a). c) Thickness of the printed RGO patterns in terms
of printing times. d) Linear change in the resistance of the RGO line (width: ≈5 µm, thickness: ≈40 nm) with length. Resistivity is ≈0.0013 Ω m.
(line width: about 4–5 µm). A 5-µm-inner-diameter nozzle printed using the RGO ink on the recessed, rough surface of
was used, and the thickness of the pattern was controlled by a metal coin which is composed of Cu–Zn–Ni alloy (center)
adjusting printing repetitions locally. For example, Figure 2b and cupronickel (edge). The high transmittance of RGO ena-
shows AFM depth profiles of local portions of the “GRA- bles this printed pattern to be indistinctive with the naked
PHENE” alphabet patterns. The use of this fine nozzle can eye, as shown in Figure 3c. Here, the printed RGO layer
produce small volumes of the ejected droplets in subpicoliter can act as a protection layer against oxidation of the coin.
ranges and therefore can significantly fasten drying process Carbon allotropes with the sp2 hybridized orbital make a dif-
of the droplets on substrates with minimizing dewetting[42] or fusion barrier acting as a physical separation layer between
coffee ring[43] effect. The pattern thickness increases linearly oxygen molecules and metal surfaces. Also, high thermal and
with printing repetitions (Figure 2c), which induces different chemical resistivity of graphene is advantageous for its use
colors of the patterns shown in Figure 2a. Also, the printed as the protection layer against oxidation.[45–47] When this coin
RGO line exhibits linear increase of electric resistance with was thermally oxidized by heating it at 200 °C on a hotplate,
the length of this line (Figure 2d). This printed RGO pattern the printed RGO pattern prevented the oxidation of the coin
shows resistivity of 0.0013 Ω m. locally, and hence color of the printed area became visible
The resolution of the printed patterns can be controlled distinguishably (Figure 3d). Reduction of the oxidized coin
by modulating the nozzle diameter. As shown in Figure 3a, enabled the RGO pattern to be almost indistinctive again.
for example, an alphabetic pattern “e” was printed with As a demonstration of all-printed transistor fabrication
10 µm in line-width on a thermally grown SiO2 (300 nm)/Si with no use of photolithography process, electrodes of source/
wafer, using a 10-µm-inner-diameter nozzle. Instead of the drain and the RGO channel were formed using e-jet on a ther-
planar surfaces of wafers, nonplanar surfaces can also be used mally grown SiO2 (300 nm)/Si wafer. This approach to adapt
for e-jet printing. For this printing on nonplanar substrates, high-resolution printing technique is significant for cost-
the height between the nozzle and substrate should be main- effective next-generation electronics. The fabrication pro-
tained constantly during printing process, because the mag- cess began with depositing uniform metal layers of Cr (5 nm,
nitude of the electric field at the edge of the nozzle tip can adhesive layer) and Au (100 nm, main conducting layer) onto
determine the overall flow rate and printing resolutions in the wafer. As illustrated in Figure 4a, photocurable poly-
electrohydrodynamics.[28,41,44] In our e-jet setup, a computer- urethane (NOA74, Norland Optical Adhesives, Inc.) was e-jet
controlled translation stage with x, y, and z axes along with printed and cured as an etch-resist using a nozzle with 1 µm
a biaxial tilting stage offers adjustments to assure a precise inner diameter. Then wet etching of the uncovered area of
movement in xy-plane while maintaining the height during deposited metal defined source/drain electrodes with printing
the printing process on nonplanar substrates. Figure 3b pre- resolution of 2 ± 0.4 µm in line-width. After removing the
sents the e-jet printed RGO alphabetic patterns (line width: polyurethane resist using oxygen plasma (20 sccm of oxygen
≈5 µm) on the highly curved surface of a microcapillary with gas flow, chamber pressure of 250 mTorr, 150 W, 5 min), the
the radius of curvature in the range between 50 and 65 µm. RGO printing using e-jet formed the channel part and com-
Counterfeit coin recognition for security indicates an pleted the device fabrication. Figure 4b,c shows optical micro-
important application field that can utilize this high-resolu- scopic images and an AFM image of the printed transistor
tion printing capability of RGO on planar or nonplanar sur- with channel length of ≈3 µm. Drain current (ID) versus gate
faces. For this purpose, a fine alphabetic pattern, G, was e-jet bias (VG) of the transistor was analyzed in ambient condition
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Experimental Section
Preparation of Nozzles: Cr (10 nm), Cu (100 nm), and Au
(10 nm) layers were deposited to glass capillaries with various inner
diameters (0.5–30 µm) using a thermal evaporation system. The
metal-coated nozzle was dipped into 1H,1H,2H,2H-perfluorode-
canethiol (Sigma-Aldrich) solution (0.1 wt% in DMF) for 30 min to
form hydrophobic layer on the metal-coated nozzle surface to pre-
vent nozzle wetting phenomena. A pneumatic pressure pump was
connected to the nozzle to help the inks to reach the nozzle tip.
Preparation of RGO Inks: The GO suspension was prepared by
the oxidation of expanded graphite (Grade 1721-Asbury Carbon)
via the modified Hummers method using KMnO4 and sulfuric acid.
Initially, 1 mL of hydrazine diluted in 5 mL of DI water was added
to 10 mL of aqueous GO solution (10 mg mL−1) with subsequent
ultrasonication for 4 min to make homogeneous solution. Then,
the solution was kept at 90 °C for 2 h with magnetic stirring to con-
vert GO to RGO. The RGO was washed with copious DI water and
redispersed in DMF (1 mg mL−1) to form the ink solution.
Preparation of Substrates: Thermally grown SiO2 (300 nm)/Si
wafers were used as substrates. Cr (5 nm) and Au (100 nm) layers
were coated onto SiO2/Si. The wafer was electrically grounded
during printing.
Transistor Fabrications: On the Cr/Au-deposited SiO2/Si sub-
strate, a UV-curable polyurethane etching resist layer (NOA74,
Norland Optical Adhesives, Inc.) with the minimum line width
of 2 ± 0.4 µm was printed using the e-jet system and a nozzle
with 1-µm-inner-diameter. The e-jet printed resist was cured
by exposing UV light (≈1 J cm−2). The Cr/Au layer was pat-
Figure 3. High-resolution printing on nonplanar surfaces. a) Optical terned using wet etching process (Au etchant: trifluoroacetic
image of an alphabetic pattern with the line width of 10 µm. acid, Transen, Cr etchant: Cr mask etchant, Transen). And the
A 10-µm-inner-diameter nozzle was used. (Scale bar, 50 µm).
resist was removed by O2 plasma etching (reactive ion etching,
b) SEM images of the RGO patterns printed on the sidewall of a glass
microcapillary as a substrate, using the 5-µm-inner-diameter nozzle 20 sccm oxygen gas flow, chamber pressure of 250 mTorr, 150 W,
(line width: ≈5 µm). The microcapillary has a cone geometry as shown 5 min). Then the RGO ink was e-jet printed onto the source/drain
in the top inset, and radius of the substrate is in the range between pattern as a channel material. The RGO ink was printed using a
50 and 65 µm. The white scale bars are 100 µm. c) Photo (left) and 5-µm-inner-diameter nozzle and 10-µm-inner-diameter nozzle
optical image (right) of a coin composed of Cu–Zn–Ni alloy (center) and for controlling the resolutions. Remaining organic solvents were
cupronickel (edge), where an alphabet pattern “G” was printed before removed by annealing the printed RGO patterns at 250 °C for
oxidation. The black scale bar is 1 cm and white scale bar is 50 µm.
30 min.
d) The printed coin after oxidation (200 °C for 20 min on a hotplate).
Although the printed area was barely visible before oxidation, the Electrical Characterization: Electrical characterizations were
printed RGO acts as a passivation layer against oxidation and the conducted with the transfer and output characteristic meas-
printed pattern becomes distinguishably visible. The black scale bar is urement using a semiconductor parametric analyzer (Keithley
1 cm and white scale bar is 50 µm. 4200-SCS).
at room temperature (Figure 4d). The transfer curve shows
ambipolar characteristics that coincide with the previously
reported semimetallic characteristics of RGO,[48,49] with a
charge neutrality point close to ≈0 V. This transistor showed
mobility of ≈6 cm2 V−1 s−1, estimated using a common metal– Supporting Information
oxide–semiconductor thin film transistor model.
In conclusion, we demonstrate here the ability to print, in Supporting Information is available from the Wiley Online Library
a controlled fashion, high-resolution patterns of RGO, by use or from the author.
of the electrohydrodynamic inkjet. Large-scale patterns of
RGO with complex geometries and feature sizes in ≈5 µm of
line-width can be printed readily, suitable for use in various Acknowledgements
applications in security and electronics. Also, direct printing
capability of RGO on both flat and highly curved surfaces B.W.A. and K.K. contributed equally to this work. This work was
described here offers unique potential for 3D, integrated supported by Agency for Defense Development as a collaborative
devices using printed electronics in the future. preliminary core technology research project.
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Figure 4. All-printed field-effect transistor (FET). a) Schematic diagram of the printing procedures. First, a UV-curable polyurethane etch-resist
(NOA74, Norland Optical Adhesives, Inc.) was printed on the Au surfaces for source/drain patterns using a 1-µm-inner-diameter nozzle. After wet
etching and removing the printed resist, source/drain patterns were formed. Then the RGO ink was printed for the local channel area of FET. In
this way, bottom-gate FETs can be printed without use of photolithography. b) Optical images of the all-printed RGO FETs. Bottom image shows a
magnified view of the channel regime (length: 3 µm, width: 70 µm). The upper scale bar is 200 µm and bottom (scale bar, 30 µm). c) AFM image
of the printed channel area. d) Transfer curve of the all-printed FET. (Hole mobility: ≈6 cm2 V−1 s, Vd: 10 V).
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