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  • 210629 - 클린룸 운영조건 개선안

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    Acab Aimi
    1 views2 pages

    Original Title

    210629_클린룸 운영조건 개선안

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    1 views2 pages

    210629 - 클린룸 운영조건 개선안

    Uploaded by

    Acab Aimi

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 2

    <현황>

    (1)

    64.0 cmm

    Filter : 18.0 cmm

    (2)
    Fume hood ICP-MS
    25.0 cmm

    블로우 팬 상세
    (3) 17.0 cmm (1) 외기 공급용 (Non-filtered)
    (2) 내기순환 (Filtered) 및 외기공급 (Non-filtered)
    (3) ICP-MS 배기용
    <개선(안)>

    Filter
    (1)
    64.0 cmm

    Felt
    Filter
    36.0 cmm
    Filter : 18.0 cmm

    천장 점검구 개방

    Fume hood ICP-MS (2)


    25.0 cmm

    블로우 팬 상세

    (3) 17.0 cmm (1) 외기 공급용 (Filtered)


    (2) 내기순환 전용 (Filtered)
    (3) ICP-MS 배기용

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