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Micro and Nanosensors
Micro and Nanosensors
Delivery
Suggested Readings:
(1) Nanosensors: Physical,Chemical, and Biological,
Vinod Kumar Khanna, CRC Press, 2021.
(2) Chemical Sensors: An Introduction for Scientists
and Engineers, Peter Grundler, Springer, 2007.
Fundamentals:
Technically sensing organs – like eyes and ears
The word “sensor” is derived from the Greek word
sentire – meaning perceive
A device that converts a physical stimulus (mechanical
motion, heat, light, sound, magnetic, electric, or radiant
effect) into an electrical signal, which is measured or
recorded by an observer or an instrument.
E.g.: Thermometer, Thermocouple
What are the differences between a
sensor and a transducer?
Transducer converts one form of energy into other forms.
A sensor is a device used to measure the physical changes in
the surroundings
A sensor collects information from the real world.
A transducer only converts energy from one form to
another.
E.g.: a motor converts electrical energy to mechanical energy
Every sensor in this world has three terminals:
(1) Vcc – to power up the sensor
(2) GND – to provide a fixed negative reference
(3) Output – analog output of the sensor (in some sensors,
there may be more than one output terminals)
The following block diagram demonstrates it.
Commonly Measured Quantities
Classification of Sensors
1.Active and Passive sensors:
Active Sensors are those which require an external excitation signal
or a power signal.
E.g.: Photovoltaic cells, Thermocouple
Passive sensors do not require any external power signal and
directly generates output response.
E.g.: Magnetometer, Barometer
2. Based on the means of detection used in the sensor. Some of the
means of detection are Electric, Biological, Chemical, Radioactive
etc.
3.Analog and Digital Sensors:
Analog Sensors produce an analog output i.e., a continuous output
signal with respect to the quantity being measured.
Digital Sensors work with discrete or digital data.
Type of Sensors
Light Sensor:
Thermistor Thermocouple
Micropropulsion system
for satellites
How Does Microfluidics Works?
Microfluidics deals with very precise fluid control, under small
volumes and space .
Typically, micro means one of the following features:
1. Small volumes (μL, nL, pL, fL)
2. Small size (mm, μm)
3. Low energy consumption
Microfluidics systems/devices work by using a pump and a
chip.
Different types of pumps precisely move liquid inside the chip
with a rate of 1microliter per minute to 10,000 microliters
per minute.
Within the chip there are microfluidic channels which allow
the processing of the liquid.
This processing can be mixing, chemical, or physical reactions.
Advantages of Microfluidics:
The first step involves the deposition of the temporary layer (an oxide layer or a nitride
layer) on the silicon substrate using a low-pressure chemical vapour deposition technique.
The second step involves the deposition of the spacer layer which can be a phosphosilicate
glass, used to provide a structural base.
The third step involves subsequent etching of the layer using the dry etching technique.
The fourth step involves the chemical deposition of phosphorus-doped polysilicon to form
the structural layer.
The fifth step involves dry etching or removal of the structural layer to reveal the underlying
layers.
The 6th step involves the removal of the oxide layer and the spacer layer to form the
required structure.
3. MEMs fabrication using LIGA Technique.
It is a fabrication technique that involves lithography,
electroplating, and molding on a single substrate.
The term is a German acronym for Lithographie, Galvanoformung,
Abformung – lithography, electroplating, and molding.
MEMS Sensor Working Principle
Whenever the tilt is applied to the MEMS sensor, then a
balanced mass makes a difference within the electric
potential.
Then that signal can be changed to create a stable output
signal in digital, 4-20mA or VDC.
Modern cars use a lot of sensors and most of them are MEMS based
devices. The following is a list of MEMS Sensors that are used in a
modern car,
Accelerometers – For Electronic Stability Control and Airbag
deployment.
Inertial Measurement Units or IMU (they are combination of MEMS
Accelerometer and MEMS Gyroscope) – For measuring yaw, pitch
and roll for autonomous driving.
Magnetometer – For direction used in navigation.
Pressure and Inertial Sensor – For braking control.
Pressure Sensor – Tyre Pressure Monitoring System.
Airflow Sensor – Air intake monitoring.
Fuel Sensor – Fuel Level Indicator.
Impact and Crash Sensor – Impact detection and Airbag deployment.
MEMS Microphone – For communication and Noise Cancellation.
Temperature Sensor – For Automatic Climate Control and Engine
Temperature Monitoring.
Nano-electro-mechanical systems (NEMS)
Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron
dimensions.
A class of devices integrating electrical and mechanical functionality on
the nanoscale.
In 2000, the first very-large-scale integration (VLSI) NEMS device was
demonstrated by researchers at IBM.
NEMS mostly contains miniaturized electrical and mechanical apparatuses like
actuators, sensors, resonators, beams, sensors, and motors.
(A) Schematic of biodegradable NEMS pressure sensor. Inset shows location of the silicon-
nanomembrane strain gauge. (B) Optical micrograph of the strain gauge region. (C) Image of
complete device.
Properties:
NEMS are ultra low power devices.
Measurements of extremely small displacements and forces.
They dissipate less energy.
Can built with masses approaching a few attograms (10-18 g).
reduces to
Or
Else
where 𝜏 = 𝑎1/𝑎0 is the time constant.
Solving this equation reveals that the output y(t) in
response to x(t) changes exponentially.
Second order system:
The response of a second order system to a step change can
be defined as:
SULFUR CHEMILUMINESCENCE
DETECTOR (SCD)
8. Doppler Effect
The Doppler effect is the apparent change in a wave’s frequency
as a result of the observer and the wave source moving relative
to each other.
If the observer and wave source are moving toward each other,
the wave appears to increase in frequency and is said to be blue
shifted.
If the wave source and observer are moving away from each
other, then the wave appears to decrease in frequency and
becomes red shifted.
The observed Doppler shift in frequency is given by:
where ν is the speed of the wave in the medium, νsource is the speed
of the source with respect to the medium, and fsource frequency of
the source wave.
Common examples of the Doppler effect in sensing include
speed monitoring devices and ultrasounds.
The Doppler effect also plays an important role in radar and
sonar detection systems.
magnetoresistive sensors are used to determine angle and speed, where the
magnetic field indicates the motion or position of a mechanical system.
18. Faraday-Henry Law
An electric field is induced by changing the magnetic field.
Microphones, analogue current/voltage meters, and reed-relay
switches make use of this effect.
E.g.:radio frequency identification (RFID) tags
The relation between the electric field, E, and the magnetic flux
density, B, is defined in differential form,
19. Faraday Rotation Effect
The polarization plane of an electromagnetic wave propagating a
material becomes rotated when subjected to a magnetic field that is
parallel to the propagation direction.
This effect was the first experimental evidence that light is an
electromagnetic wave.
The angle of rotation is defined by the equation:
θ = VBl
where B is the magnetic flux density, V is the Verdet constant and l is
the length of the material through which the light is passing.