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    © All Rights Reserved
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    10 views33 pages

    ISO 21501 4 2018 Airborne Particle Counting

    Uploaded by

    fishval
    ISO 21501 4 2018 Airborne Particle Counting

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    © All Rights Reserved
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    BS ISO 21501-4:2018 BSI Standards Publication Determination of particle size distribution — Single particle light interaction methods Part 4: Light scattering airborne particle counter for clean spaces bsi. | nS so 21501-4:2018 sity of Oxtord [BRITISH STANDARD National foreword ‘This British Standard is the UK implementation of $0 21501-42018. Iesupersedes 85150 21501-42007, whichis withdraw, ‘The UK participation init preparation was entrusted to Technical (Commitee LBI/37, Particle characterization ining sieving, ‘Allist of organtzations represented on this committe can be obtained on Fequest tots secretary. ‘This pablieation des not purport to ineude al the necessary provisions ofa contract Users are responsible forts correct application. (© The Britis Seandards Instittion 2018 Published by SI Standards Limited 2018 IsaN 9720580863738 tes 19420 ‘Compliance with a British Standard eannot confer immunity from legal obligations. ‘This British Standard was published under theauthorty ofthe ‘Standards Policy and Strategy Committe on 31 May 2018 Amendments/corrigenda issued since publication Date Text affected S150 21501-42018, INTERNATIONAL Iso STANDARD 21501-4 Spiess 30 Determination of particle size distribution — Single particle light interaction methods — Part 4: Light scattering airborne particle counter for clean spaces Determination del distribution granulométrique — Méthodes ‘Finteraction Tuminease de pariaes uniques Parte 4 Compteur de paricules en suspension dans Pairenlumiére lsperse pour espacespropres Aeerence number ssozisor-#2018(6) o1so2018 Siso 21501-4:2018 180 21501-4:2018(6) ity of Oxford, Ver copy: IP Lo = A COPYRIGHT PROTECTED DOCUMENT ¢ i otto ee ett pn pin tse Sie eee ee cae Sean eas ahaa iectane eam aeae Somes Se eo 18 as of 3 y of Oxford, Version P Login sensed copy 180 21501-4:2018 180 21501-4:2018 Contents Foreword... coc Introduction. Scope - [Normative references ‘Termsand definitions Princ Basic configuration Requirements - G1 Sine setting eror 62 Counting eicieny 63 Seresohution 4 False count {65 Maximum particle number concentration 66 Sampling ow rate err 67 Sampling time error 68 Response rate 9° Calibration Interval 6:10. Reporting of est and calibration results. ‘Testand calibration procedures Ta Se setting 741 Bralation ofsze setting error 712 _ Procedure of sie seting. 72 Evaluation of counting efficiency 73 Bralation of size resolution 74 Evaluation of fale eoune 715 Estimation of coincidence lose at the maximum particle number concentration 7.6 Evaluation of sampling lw rate err 73 Evaluation ofsamplng tine err 7 Evaluation ofresponce rate = Annes A (informative) Counting efficiency Annex B (informative) Size resolution “Annex (informative) False count ‘Annex (informative) Response rate ‘Annex (formative) Procedure for evaluating the uncertainties of the results ofthe performance ests ‘ibtiography. (0 1s02018-leghsreered rosr2018 Ver Oxtor University of Bio 21501-4:2018, 180 21501-4:2018 Foreword 150 (the loternaional Organization for Standardization) isa worldwide federation ofmational standards bodies (ISO member bodies). The work of preparing International Standards Is normally carried out ‘hrough 10 technical committees. Each member Body Interested in a subject for which a technical fammittee has been established has the right to be represented on that committe. International Sorganiations, governmental and non governmental nlason ith 50, alo take part In the work, ISO collaborates closely with the International Electrotechnical Commission (IEC) om all matters Of lctrotechnicl standardization, ‘The procedures used to develop thi document and those intended for its further maintenance are described n the ISO/1BC Directives, Part I Inpartcuar the different approval ritera needed for the “ferent types of [0 documents should be noted. Ths document was drafted in accordance with the ‘itera als ofthe S07 IEC Directives, Part 2 (see wulsaarg/dleztives) ‘Attention is drawn to the possiblity that some ofthe elements ofthis dacument may be the subject of| Daten rights 1S0 sal! not be hel responsible for entfying any oral such patent rights Details of “ny patent rights identified during the development ofthe document willbe in the Introduction and/or ‘onthe 0 listo patent delarations received eve wer isa.org/patents) Any trade name used inthis documents information given forthe convenience of users and does not Constitute an endorsement For an explanation on the voluntary nature of standards, the meaning of ISO specific terms and expressions related fo conformity assessment, as well as information about ISO's adherence tothe World Trade Organization (WTO) principles inthe Technical Barrer o Trade (TBT) se the following URL: waning /isa/foreword. hu “This document was prepared by Techical Committe ISO/TC 24, article characterization including sevng Subcommittee SC 4 Particle characterization ‘This second edition cancels and replaces the fist edition (1S0_21501-4:2007), which has been technically revised ‘The main changes from the previous edition are — Clauses for°Priniple” and Clause for “Base configuration” have been added: — “ze calibration” and “verification of sie setting have been combined as "size seting error” inthe requlrements clause; — “Test report” (3:11 in the previous edition) has been changed to 6.10 on "Reporting of test and eaiibration resus — Information about uncertainties hasbeen enriched and is now the subject of Annex E- Alist fal parts inthe 0 21501 series canbe found onthe SO website (6150 2018-Alrgerrmred 'BS1S0 21501-4:2018 180 21501-4:2018 Introduction Monitoring particle contamination levels required in various ils, e in the electronic industry, in {he pharmaceutical industry, Inthe manufacturing of precision machines and in medial operations. Particle counters are useful instruments for monitoring particle contamination Ina. The purpose of this dactment i to provide a ealbration procedure and verification method for partce counters 0 sto minimize the Inaccurcy nthe measurement resultby a counter, ae well sth difrences nthe Fesults measured by diferent instruments, as of 3 4. Versi of Oxt ty Licensed SISO 21501-4.2018 INTERNATIONAL STANDARD 180 21501-4:2018 Determination of particle size distribution — Single particle light interaction methods — Part 4: Light scattering airborne particle counter for clean spaces 1 Scope ‘This document describes calibration and verification method for aight scattering aithorne particle Counter (LSAPC], which s used to measure the sie distribution and partile mamber concentration of pails suspended In ae. The ight scattering method deserved in this document Is based on single particle measurements. The typical size range of particles measured by ths method is between Om pd 10 ymin particlesze, Instruments that conform to this document are used for the classification of air cleanliness in Cleanrooms and associated contralledenviranments n accordance with SO 146441 and Ssvell asthe messurement of mimberand size distribution of parties in various environments ‘The allowing parameters are within the scope ofthis document — size setingeror — counting efcieney: — sae resolution — false counts — maximum partie number concentration — sampling low rate error: — sampling time eror — response ate: = calbrstion interval = reporting results frm test and clr 2. Normative references “There are no normative referencesin this document 3. Terms and definitions Forthe purpose of thi document, the following terms and definitions apply. 180 and IEC maintain terminological databases for use in standardization atthe following addresses — tec Blectropedia:avallable at hep//wwivelectropedaorgs — 180 Online browsing platform: available at hns//wwsiso ora/abp BSiS0 21501-4:2018, 180 21501-4:2018 aa calibration particle ‘monodisperse spherical particle with a certified mean particle sie, eg, a polystyrene latex (PSL) purtcie where the certified sie is traceable to the nternatonal System of Unite (SI) 4 relative Fandard uncertainty equal to of less than 25%, anda refractive index thats approximately 19 at the wavelength of 59 nm (sour Dine) a2 ‘counting efficiency Fatio ofthe number concentration measured by age seatering airborne particle counter (LSAPC) (3.4) © tothat measured by areference instrument forthe same test aerosol 8 aa false count spparent count per unt volume when a sample air containing no measurable particles is measured by {he ighe scattering airborne particle counter (LSAPC) (38) 34 sare Tight scattering airborne particle counter instrument that measures airborne particle numbers by counting the pulses as the particles pass ‘through the sensing volume, and also particle size by scattered ight intensity Note a ont The optical part sine mesure by the LSARC ithe light seatering egualent particle 26 as Pita pulse helght analyser Instrument that analyses the distribution of pulse heights of Oxford, Version correct as of 30108/ 36 Size resolution ascot sity ofan instrament dstingush between parties of dierent ses 5 a7 © Snidence toss _feducton of partie coun cased by mull parle pasting sinukaneosy rough the sesig -BSehmeand/riy tht procsingtme othe etry 2 as = Ebtaerasl aerosol to be used for calibration or testing of a light scattering airborne particle counter (LSAPC) (3.8) Bi comport caforaton pres mtpenedtn cena B a chine S Thasinu permisibeeror mitof error extreme value of measurement error, with respect toa known reference quantity value, permitted by Speceaions or regulations fora gen measurement, measuring instrument of measuring system Note 1a entry: This docuent uses decinal numbers for he regulements to MPES to avid confusion hat may se when relative anceraites oftest results are reported percent ges 4 Principle ‘The measurement principle ofthe LSAPC is based on detection of light scattered bya particle when the particle passes through an incident ight beam. z (21502018 -aureeerare sion correct as of 30/05/2018 Licensed copy: IP Login, University of Oxford, Ve S150 21501-4:2018 180 21501-4:2018 “The particle site determined from the intensity ofthe scattered light, and the numberof particles From the number of light pulses scattered by individual paris. ‘To be more specific sample air is drawn from the inlet ofthe LSAPC at a constant flow rate, and Introduced to the sensing volume ofthe LSAPC where a ligh beam i irradiated. When a partie Suspended inthe sample lr passes through the ight beam, It scatters the light emitting light pulse. ‘The light pulse is detected by a photo detector, and converted to an electrical pulse Th electrical pulse helght is proportianal tothe seatered ight intensity and depends onthe optical system design, the electronic components used, and thelght Source. Te intensity ofthe scattered ight is dependent fon the sie reractive index, and shape of the partie. the particle f spherical, the scatered ight Intensity is deseribedby the Mie theory. n order to establish Felatonship betven the electrical pulse height and the particle sz, callraton ofeach LSAPC with ae of particles having a well defined sae, ‘eftacivendex and shape i required, 5 Basic configuration ‘An LSAPC is composed typeally ofa light source, 2 sample alr suction system, sensing volume, 3 Photoelectric conversion device, a pulse height analyser, anda display (See Figure) Some LSAPCs do ‘hoteontan a sample alr sutionsystam and/or display ‘To make the particle size calbration possible, the LSAPC should be constructed so that pulse height Aistrbutions for calibration particles can be measured Optical system Light source Sensing volume: Sample al suction system Photoelectric conversion device I Pulse height analyser Display Figure 1 — Example of basic configuration of APC 6 Requirements GA Size setting error ‘The MPE for size setting inthe minimum detectable partie size and other sles specified by the ‘manufacturer ofan LSAPCIS 0,10 (arrespanding to 10 % ofthe specified sz), Sie setting shall be conducted before the LSAPC is shipped from the manufacturer and when the size setting errors fund not lille in period caliration A recommended procedure for size setting is described in 21.2, If other methods are used, their ‘uncertainty Shall be evaluated and described, trib esr 5 150.21501-42018 180 21501-4:2018 62 Counting efficiency ‘The counting efficiency shall be within 0:30 to 0.70 {corresponding to (50 2 20) 96) for calibration partiles witha size close othe minimum detectable particle sae and it shall be within 090 to 1.10 [ra00 +10) for ealibration pariles witha sine 1,5 to 2 times larger than the minimum detectable aril size ‘When cabraton particles with exactly the same size as the minimum detectable partic sie are not avalale, particles whose size is within 5% ofthe minimum detectable particle size may be used and the diameter of the calloraton particles shall be reported. 63. Size resolution 201 ‘The size resolution shal be less than or equal to 0.15 (corresponding to 1596 ofthe specified particle sae), when itis evaluated using ealbration particles of a certified average size specified by the ‘manufacturer {A recommended procedure is described in 23 f ther methods are used, their uncertainty shall be ‘valuated and described. 6A False count ‘Thefalsecount per volumelncubicmeters and ts95 % upper confidencelimit (UCL) shallbe determined according to 74, The 95 96 UCL shal be less than or equal tothe value specified and reported by the manufacture ofthe LSAPC. 65. Maximum particle number concentration ‘The maximum measurable particle number concentration shall be specified by the manufacturer. The coinedence as atthe maim particle number concentration ofan LSAPC salle les that al oda (0%) NOTE The probability of occurence of catldence lose increses with Increasing parle number of Oxford, Version correct as of 30 6.6 Sampling Now rate error “The MPE of the volumetric smpling low rate determined sceording to 26 compared to the flow rate specified by the manufacturer shall be 005 (corresponding to 5%) o the specified low rate, 6.7. Sampling time error ‘The MPE nthe duration ofthe sampling time shall be 0,01 (corresponding o 19) ofthe preset value Ifthe LSAPC does not havea sampling time contrlsystom this subclause doesnot apply. Licensed copy: IP Log 68 Response rate ‘The response rat of the LSAPC obtained according to the test method given in 28 shall be equal to or less than 0,005 (Corresponding to 05%) 6.9 Calibration interval “The calibration of the LSAPC should be condcted at an interval equal to or shorter than one year The Feguirements should be met during the ealbration Interval 4 ‘o1s0201 correct as 4, Ver ‘BS1S0 21501-4:2018 180 21501-4:2018 6.10 Reporting of test and calibration results, ‘The followings the minimum information that shall be recorded in atest report 2) dat oftest/alibration 1) test/calibration particles sed: 6) results forthe parameters: 1) sae setting eon; 2) counting efficiency 3). sampling low rate erro: 4) size resolution (with the particle siz used) 5) ‘falsecoune: 4) threshold voltage values or channels ofthe uilsn PRA corresponding tothe size settings: ©) astatement ofthe test/caliraton method used (eg 180 21501-; 1) report/ertficateidentifcation, test/calibration location ttle and identification of testeaibration provider Incuding signature and date; £8) entification of customer and device under test, including how output was obtained fr counting ffcieney (ep analogue, splay or digital ouput). Acallrationcerelfcae shall furthermore include: 1) dentifetion and - if possible statement of metrological traceability ofall reference equipment and calibration particles us 1) relevant environmental conditions (eg temperature, alr pressure and humidity) under whieh the ‘allbration was performed, |) a stated uncertainty foreach result forthe parameters 1 to 4 with relerence to the caleulation method (eg ISO/IEC Guide 963) - Aanex E contains procedures for evaluating the uncertainty of {he results ofthe performance tests recommended in this document for parameters and 2; 1) a stated false count at a 95% confidence limit eee Annex), NOTE Calration certiteates iru by ISO/IEC 12025 accredited Inboratories and covering al results for the prameters ta areconsidered wo comply wih the reglrerents above 7 Test and calibration procedures 7A. Size setting 7A valuation of size setting error Caleuate the sie setting eroreacording to Formula 2) Bsiso 21501-4:2018, 180 21501-4:2018 a where » ‘thesis setting specied forthe LSAPC: s Is the acta sisting corresponding (see 23.2 forthe meaning Ye). 74.2 Procedure ofsize setting By use ofa PHA connected tothe output terminal fr signal pulses ofthe LSA, or by use of built. Jn PRA if one is contained asa part ofthe LSAPC, obtain a pulse height distribution for atest aer0s0| ‘in which ealbration particles ate suspended, Let Vj and V, denote the lower and upper voltage limits, "respectively ofthe range of ples heights for the calloation particles ee Figure 2). The median voltage Vi ofthe pase eight distribution in the range from Voy shall be ealeulated, and is assigned to the certo sie of thecallbraton parties, xe When a builtin PHA is used the abscissa ofthe pulse height distribution may be given in channel ‘umber instead of voltage. In this ease, the term “weltage" above and In relevant descriptions below Should be interpreted as channel number ofthe PHA, y Xpalachightvoage Wlowerveliage kit, Yn median vokage upper eget Figure2 — Pulse height distribution forthe test aerosol Ifa nose distribution is observed inthe pulse height distribution, and if iis separated distinct from ‘the main peak corresponding tothe clloation particles, the voltages V and Vy shal be chosen So that the range (Vj, Yi) encompasses only the main peak [see Figure a} Ifthe nose distribution overlaps tvith the main peak, Vand Vy shall be chosen so that the range (V1) corresponds to the fll width At half maximum ofthe main peak [se Bgure 3b) The latter way of determining Vand Vs allowed ‘nly when the eight ofthe valley between the noise distribution and the man peaks most half the main peak height 6 1so208-carecaried {as of 30/05/2018 Licensed copy: IP Login, University of Oxford, Ver SISO 21501-4:2018 180 21501-4:2018, % y Y 7 yom Ky 1 100% | 2 + a som 1 x a » Key 1 pale height dsrbution orcaleation parties 2 tose dbution erporaton residue and/or optical or electric noise) ower vag mit Vg man votage Ye upper voRage limit Figure 3 ~ Pulse height distribution forthe test aerosol when noise exists By us ofthe data pai i Va) obtained in this way or multiple data pars (xy, Vy) = 1,2) obtained Silat fr multiple calbraton partes, determine the vlage values (= 1-2.) that correspond to the size setings (or threshold sizes)» given as specifications of the LSAPC (see Eigue 4). In this totermination 3 theoretical response curve based on Mie theory may be sed to calelateV; from ‘experimentally observed Ui Let Vi denote the adjustable threshold vltage corresponding ox; Fr al the sie settings adjust the value of 10 Vy pica sytem of the APCs value th parameter set fhe opal stem ina aaa, the Fesponse Eve nthe vin of ca stl be empirically determined by ting asimpe function eg a quadrati or be Pama tomate ds pis (Pq abtaine ory on ether se NOTE 2 Theda procedure for determining can vary Gapendig on the mode ofthe LARC, NOTES _ vcan be the set voltage of an cleric comparstr ured in the LSAPC, oi ut in PHA swede ‘abe the veal channel ofthe bul PHA wikis ntended to beassiged ions Forth sake of spl ‘tteseripcon ee ssumed tot electric comparators ae employe nthe LEAP for the rest this document, (01802018 Alpert BS 1S0 21501-42018 180 21501-4:2018 y 1 BM) 7 5 x key X paride ste Ey paseneignvoage S 1 esponse curve ecard sa ofthe calibration parties Yin median oage corresponding x, 7 —watage corresponding t= bFOxtor Figure 4 — size calibration Read out the value of ty set forthe electric comparator of the LSAPC. Ideally Vy corresponds tos, ‘butin reality Vy corresponds toa partie size which may be different from x owing, for example, tra change of te response curve overtime. Determine the actual response curve actording to the procedure as deseribed shove oto another method whichis seentifiely dcumente, nd determine {Xvusing this curve eee Figure’) Calculate thesiae setting error e according to Formula (l above. IP Login, Unive NOTE4 _ The expected response curve in EguteS lea hypothesal curve on which the eheshodvokages of Uheeleericomprston Vy woul correspond erty to che specie ae threthols e (2150 2018-apermred 4, Versi University of SISO 21501-42018 180 21501-4:2018 Key X pantie sie Ypulse beighevtage 1 aged espnse curve xe ceriid sz of te eabration pares x, ste setingspeed forthe LSAPC facade seng corresponding Ye Vs lage end trom he eerie compat Figure 5 — Evaluation ofsize setting error 7.2 Evaluation of counting efficiency ‘To evaluate the counting efficiency ofthe LSAPC, use two populations of calibration particles; one that thas ase close tothe minimum detectable particlesie and another that hasa sie L502 times larger ‘than the minimum detectable parle sie ‘Tests with other particle sizes may be added, fits requested bya usr ofthe LSAPC Use either a condensation particle counter (CPC) combined with a diferental electrical mobilty ‘asifier (DEMC) of a ealibrated LSAPC as 4 Telerence Instrument The counting efficiency of the Feference Instrument shall havea metrological traceblity toa national or internatlonal standard, ot the international System of Units (SD, NOTE Thecondenston partic counter ieslto referred to sa candenstion maceus unter (CNC). Measure the number concentrations of test aerosols suspending each ofthe two kinds of calibration particles with the LSAPC under test and with the reference instrament (se Anncx A), Determine the ‘Counting eflleeney according to Enema (2 A @ (6150 2018- igh ered S10 21501-42018 180 21501-4:2018 where tet counting econ, —__sthepardlenumber concentration measured by reference par counter: (¢;—_ the parle mnber concentration measured by parle counter ander ter For these measurements the particle number concentration ofthe test sample should be equal to oF legs than 25 ofthe maximum particle number concetration ofboth the LSAPC under test andthe ‘ference instrument NOTE? _Whenthe pride conetraton mearardy a LSAPCis aly ithe che ol corectd othe incidences he sunting icc ofthe APC depen cn the pre mmber oncentrston ring fom nnedencas he masimam parce mmberconcnttston ro eerie’ tat the conden 3 teenthsoncentson iso 100) ne 3) andthe counting eiency ys cahuned 025 G5 ofthis _Soctnraton then the oats valve fy analer than the vie that would be obtained int i of eo & encetatin by approviate 0026 (26%). 78 Evaluation ofsize resolution % cateulatethe size esotion ofthe LSAPC by Formula (3) sesso Annex, 5 o a ie the pprent stndard devon of the sie dition ofthe ealation parties 6 hsered bytes he 4s the andor devin ofthe si dstibton o the clbration partes provided bythe = ‘nul fe cbse ares gs steered overage sz ofthe clraton partes. NOTE.__Dueto te uncertainties in determining o and oo cain sme cases be smaller than on such ‘ets the valu of Ms rognied 50 ‘The particle size recommended by the manufacturer ofthe LSAPC should be used fr this test. The standard deviation ofthe callration particles, , shouldbe known. Its recommended to determine the meclan voltage (or channel) Yq af the puise eight distribution forthe calloation parlles, a= ‘hovrn in Figen accordance with the method piven in 7.2 Determine the lower and upper voltage limit, Vand Vy which correspond to 61 ofthe peak height {nthe pulse height lstibution. Using the ealbration curve, determine the particle ses » and corresponding respectively to Vand Vi. Caeulate the absolute value ofthe differences, n ~ | and Ira, where zis the certified sie ofthe calibration particles. Let the apparent standard deviation, 0, be equal eo the larger one of n=l and ss = icensed copy: IP Login. L Fy (01502018 Aeghs reer S150 21501-4:2018, 18021501-4:2018 61% ret ue eight otage (or channel) Frogoency als eight istributin forthe carton parties pper sie resaluion ower vokage ime Yn mean volage Ye upper volgen 1 2 wer sideration 3 a Figure 6 — Verification ofsize resolution 74. Evaluation of false count ‘Obtain the particle count atthe size channel corresponding tothe minimum detectable particle size for certain volume of ar using ambient air with ter onthe inlet ofthe LSAPC under test. Calculate the {8595 UCL ofthe fale count according to the procedure given n Annex, Determine the alse count and 15.98 4 UCL by dividing them bythe volume ofthe sample: 7S. Estimation of coincidence loss atthe maximum particle number concentration ‘The coincidence loss determined by the low rate the tine requlted for particles to pas through the Sensing volume and the electrical signal processing time. These values are determined by the desigh of the APC Coincidence losis ealulsted secording to Formula b=1-e19(-4-taat Cran) ® where 1 ‘sthecolncdencoss at the maximum parle umber concentration; « Istheflow ate; tua! —_‘ithesumoltetimeforparicetopaetroughthe sensing volmeand the elt processing Come ‘isthe maximum parle number concentration. 7.6 Evaluation of sampling low rate error ‘The sampling flow rate shouldbe measured using ether asoap bubble lm flow meter, a wet gas meter, ‘or some other typeof flow meter that has ale pressure drop. The low mater sed shall have 8 valld (61502018 Alpes rsered u ‘BS 180 21501-4:2018, 180 21501-4:2018 calibration certifiate The flow rte tobe measured isthe volumetric low rat, Calculate the errr in the sampling low at, by Formula (5). an 4s eqn in. 6 yin o where S Sethe samplig flow rte ror ® ‘the sampling flow rate specied bythe manutcturer When using a mass flow meter, the flow rate shouldbe converted to 2 volumetric Now rate at actual Conditions, taking the temperature and air pressure into aecount. 7.7. valuation of sampling time error Sampling ime isthe ime during which the LSAPC measures a sample {rom the beginning of counting tothe end of counting. Calelate the error nthe samplngtime by © ge Ss the sampling tine ero: Bs ‘she sampling tne preset tothe LSAPC Se ‘edhe ensured sampling tine. Calibrated instruments should be use fr sampling time measurement 7.8 Evaluation of response rate Introduce into the LSAPC a test aerosol suspending calibration patil the sive of whichis 15 times larger than the minimum detectable particle sie. The particle mmber concentration the test aerosol shouldbe approximately equal tothe maximum particle number concentration Sethe size channel for particle counting atthe minimum detectable particle size, set the LSAPC to accumulated counting 2nd ‘operate the LSAPC for 10 mi ‘After the 10 min operation, measure the particle ummber concentration fr the period of. The duration {shall be equal to or shorter than 60 s, and the particle count obtained during this petiod shall be igreater than 1 000 (Gee Annex D). After that, switch the samples from the test aerosol to particle free lean alr Walt for 105 after switching the sample alr, and restart particle counting Measure the particle number concentration for the period of fr the clean ar Calelat the response rat, Ry, By © Fem bo sane ~ Cher ofa @ 2 (21502018 -apesrared BS 1S0 21501-4:2018 180 21501-4:2018 where & athe response rate ‘hare isthe patil number concentradonaberved before sitchin the sample i Cae ithe parce number concentration observed afer witching the samples Ly of Oxford, Ve License (150 2018- Ages nsoned 2 aS 1S0 21501-4:2018, 180 21501-4:2018 Annex A (informative) Counting efficiency ‘igure A shows the test system for counting eficieny. The particle generator generates an aerosol that consist of dry monodisperse PSL particles suspended nceam a ‘ter aerosolsation of a PSL suspension the aerosol typically contains traces of contaminants which ‘can bias the measurement ofthe counting efficiency. Measurement errors should be minimized by: — separating the PSL particles from surfaetant particles, In several mlxing/setling Separation sepsin ultrapure water before preparing the suspension forthe aerosol generator = usinga PSL suspension inthe arosa generator with very low concentration of contaminantsin the Tigi phase, traces of salt in ultrxpare water to a) achieve low enough background o ese pariles and) avold growth af PSL particles due to attachment of contaminants after evaporation ft suspension gud droplet; — optimising the concentration of PSL particles inthe suspension to avold measurement bias due to ‘Sublet PSL particles (wo PSL particles were contained na droplet = drying the aeroselto remove al suspension guid fom the surface ofthe PSL particles andto avoid ‘condensation of suspension lg vapour onthe PSL parties, After drying the aerosol, sae classifying the PSL particles with a DEMC (compare ISO 15000 and ean be applied if the background of residue particles needs toe further reduced. This may especialy be necessary if the requirements i Clause? (se Figirs 3) cannot be flied 6 Since PSL aerosol generated from a suspension is electrosttically charged and since even DEMC- 2 classified PSL parlles are unlpolarly charged, a bipolar diffusion charge conditioner (as known 25 5 aerosol neutralizer) further increases the aecuracy of the measurement ofthe counting efficiency by ‘minimisingparile losses inboth the prtelecounter tobe inspected andthe reference parle countek. After generation and conditioning, the PSL serosl eed to the particle counter tae inspected and the 2 _ Teference particle counter via 2 device (eg distributing br, se Figure A.) which shal be designed _nsuch away that the parle umber concentration st the fnlet of bath partce counters i as close ‘Sas posible The uncertainty assoclated withthe Inbomogenelty In the particle number concentration 5 shouldbe evaluated according‘ the procedure given in 2 (). {The counting efficiency is obtained by caeulating the ratio ofthe particle number concentration © measured bythe particle counter under test and the particle number concentration measured by the | Feference particle counter. The particle number concentration ofthe sample should be less than 25 9% 5 ofthe maximum parle number concentration ofboth the eference parte counter and the particle ‘counter under tet. “ (01502018- ages ese asso 21501-4:2018 180 21501-4:2018, Parle generator fae] aril counter Telrence parle robeinpeced | [LU ouner Figure A. — Example of counting efficiency tet system rect as of 30/05/2018 ‘The method described above is most useful for PSL particles smaller than approximately 1 um. If calibration with lager particles (eg, 5 ym) is required, dry PSL partices are better suited, However, the counting elficieney ay decrease considerably for pares witha damneter larger than 1 yn. The ‘monodisperse, dry PSL powder has tobe free of surfactants to avoid errors during the clibration, A {ty powder dipersergeneratesthe ealbration aerosol Distributing the serosl between the reference particle counter andthe particle counter tobe inspected requires special attention fr lager particles ince particle losses due to inertial impaction and gravitation seting become importent. To use distrbutin tube instead ofa distribution box: yf Oxtor 1 = use sokineticand soaxal probes to extract the calration aerosol fr both particle counters; = use vertical tubing to connec he distribution tube with the particle counters; = ifbends in the connection tubing cannot be avoided, use a large radius of curvature (raius larger than 10 times the ler dlameter ofthe ube) — use metalic grounded tubing with plished inner surface for connection; — avoid changes in tubing diameter; in particular avid step changes. (01502018 aight rere 15 SISO 21501-4:2018 180 21501-4:2018 Annex B (informative) Size resolution Size resolution i defined as one standard deviation of the measured size distribution of monodisperse Callration particles expressed at the mean sie ofthe monodisperse calibration partes, Ifthe distribution of alration particles is asumed tobe the Gaussian station, ee el seelg x rer ecen| {est ay wee fi) tecnico epi tema ¢ tetera deren ‘the uze oft % in the determination of ste resolution, 16 (0150 2018- Alps eserved ect as of 30/05 Oxford, aSiso 21501-4:2018 180 21501-4:2018 Annex C (informative) False count ‘The probability of appearance of false count ie assumed tobe described bythe Plsson distribution, ‘The Poieon distribution is defined by Enema (C kat pix) ea (xa) ce where 8 ts themumberof coun 3 tetemean ae ofthe pops 72) tetera oobi le Xm opltnhvags mean ae of. “The upper confidence defined by Erma C2} Stet ey ‘where isthe significant level When the confidence limits 95%, 5 005 ‘Table Cl shows the observed count and the caleulated upper 95 % confidence limit. When the observed ‘oun zero, eis posible to have upto three counts with a probably of %. For example, i ero ountsare observed in 15 min atthe sample flowrate of 28 3 /min the false count rate isthree counts inthe volime sampled in 15 min with a 95 96 confidence int, Lathe false coun ates 7 counts per uble meter ‘Table C:1 — Observed count and 95 % confidence limit ‘Observed count | Uppercontdence limit (61502010-Alrgherneved ” Bs 1s021501-42018 180 21501-4:2018 Annex D (informative) Response rate ‘Te response rate tests used to evaluate the response rate ofan LSAPC when the sample air is changed {ol clean air sample from a high particle number concentration sample Ifthe alow Inthe Sensor Is oor, esdualpartices area cause fora poor response rate, When an LSAPC is used for along time, there isa post that some particles wil orm sediment nthe sensor In thistest high particle number concentration samplets introduced tothe LSAPC or 10min Particles are then measured for and then the sample ire changed to clean ai After 10 s particles are again measured for The ratio the two counts fort isthe response rate (ee Figute D1}. y correct as of 3010 woe fa x time (econ) parle coneentration length of measurement time of pris 605 Figure Dal — Response rate 0 (01502018 alge of Oxtord, Vers P Login, U BS 1s0 21501-4:2018, 180 21501-4:2018 Annex E (informative) Procedure for evaluating the uncertainties of the results of the performance tests E.L__ Basics on measurement uncertainty In thls annex, recommended procedure is described for evaluating the uncertainties ofthe results of ‘the tests specified in 1 and 22 (Note 1), The general dea of tis procedure follows SO/IBC Guide 0-3, ‘whichis briefly summarized as follows, 2a rc) Step 1) Identify the relationship Between the measurand,y and the input quantities, Peseta etn) ‘This Functional relationships called the mathematical model of measurement (Notes 2 and 3). step 2 Evaluate the standard uncertainty u(x) ofthe input quantity alther by Type Aor Type B evaluation of uncertainty (Notes # and). Step 3) Combine the standard uncertainties of al xs to obtain the combined standard uncertainty ‘of the measurement result, uc). according to the following "aw of propagation of uncertainty (ores ana 7) weony ‘Step 4) When necessary, the expanded uncertainty Vis calculated according to the fllowing equation: 3) © U=kxu(9) Is consistently used for simpli (Note 8), here kis the coverage factor In this NOTE1 The uncertainty components considered In thi Annex are those clean tothe tests specified Inthe main body ofthis document These components ae conadered to cover mo aco tha affect 'easurementsof pate in the fal environment. but are not intended to ever allo them. Adda [etre tha arent conicere itis Annes nea he diferenc nop propre between st prelet ‘Sd pres inthe real enviroment andthe uncersaty seocated wih he determination of tere Fesponse functions. NOTE? _ npurqeany ina quantity whose values wed todetermine he result ofmessuemenoraquanty thatenn otherwise aes reasurmeat eo NoTE3__Atthough the quantities Yand X andthe estmatesy andy are represented byflerentsymbosi0 (©1502018-Arighereered 9 BS1S0 21501-4:2018, 150 21501-4:2018 NOTEA the estimateofaquantityisobained fom 3, =7,where js the mean ofasris of observations sy (h=1.2.). then he standard uncertainty os evaluated as ota 4) Ce ea) — rest geen attr ein earn oS - je-1),orsome eter estimate ef tbe standard deviation based onan experiment conducted cepraely fom te measoremen of: Unertalnty cea reese ee NOTES. Method of evalation of uncertainty by means other than the stars analysis of seis of ‘tetrvation i alld ype B evaluation. Type B evaluations conducted onthe bai of salle Inormation ‘ichasdatsgiventncalbationereiestenstremenespeistonsondbooks ad ata obtained nthe past NOTES Eoumula £2 apple o cites where there are no correlations between put quantes. When the Correlations are nateligie, exta terms containing correlation coofcets are ede tothe rigihan sie of inthis dociment only core stherecorelaons ae neglie are cosiered scl as of 30/05/2018 NOTE? When the mathemati model (takes the form ating ong ong? es) where p, pa areconstants,Eacmula(.3}'sequlalenttothefllowing equation alledthelaw of propagation relate uncertainty, rd, Version of : j fe ffm] 9 NOTE ry nce on) rma dn ht JE Le er renee fe rat ‘acpi he Sidon eae Coe n, University of O E2 Uncertainty of counting efficiency, S Let and us) denote, respectively the counting efficiency of reference instrument and is standard © uncertainty (Note 1} Repestn times paral snultaneous measurement of atest aerosol by a particle counter or devie, unde test (DUT) and theFeference instrument (REF) The number nshoudbelarger © than five The partee concentration ofthe test aerosol and/or the duration ofa single measurement shouldbe chosen so thatthe counts obtained by the REF and the DUT both exceed 1000, tnadlition, as "recommended in Anes, the partile concentration should nat exceed 25 ha the maximum particle 2 number concentration specified for the REF and the DUT. © Letegrand c;denote the particle number concentration obtained by the REF and the DUT, respectively, in the ith repetition ofthe measurement. Here cy 1s delined as the measurement data before the correction by nis applied (Note 2} Let F denote the average ofthe rato r= C/Cye The mathematical ‘ode! ofthe counting efficlency tex, which corresponding to Formula (1) gen by nor en were asa factor accountng for the spatial inhomogeneity inthe particle concentration inthe test Chamber, and is defined a the ratio of the concentration nt he sampling position of the DUT to that a the sampling postion ofthe Ras shown in iguts 4 (Note 3), 20 (6150 2018-Argtseerved f 3010512 Login asso 21501-4:2018 wsozson42030 —+[ orem] ‘entouny — Beem | fa of concenrtnat 19] esmplngpotan a! Dirwuarner Sang chamber oa Figure £1 — Example of experimental configuration forthe uncertainty evaluation ofthe ‘counting efficency test ‘From Formula (6 the standard uncertainty w() is evaluated accordingto Farmula(.8) (See Note). win) wa) ,«2(n0) ,w2@) ca ‘The standard uncertainties in the right hand side of this equation, ufa}, u(ma), and u(r), are evaluatedas follows, ue, tino rom oxprioneor ther sabe nformaton ht the va of within the teva [s.r] thm evan () a on)=8/3-The valu fin the denominator nthe righ hand sie Fomula (8) may beset approximately at when the valu of as ot exact known, {no information is avalable on a; it should be estimated experimentally as follows. rst, prepare two particle counters, Aand BT nt necessary to know the counting efficiencies ofthese counters, ‘Set the sampling positions of A and counters at those of the REF and the DUT shown in Bguce Ed, respectively, and conduct a simultaneous parallel measurement by the two counters. Let ey and 2p

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