1S ROMY HRP -N- 8-8 CO) — = = 2, | = ra« DD | cr Jt OE ree!Bo. YOK 621 Cc 79Y Crenanemso Hi I. Ocuosst muxposaexrporuxn: Yue6. nocobue ais By- 30. — 2-e uaq., nepepad. u non, — M.: JlaSoparopua Basonsix Sxannit, 2001. — 488 c.: ux. (10 Pi PaccMorpensi OcHOBHBIe aCHeKTsI MUKPOOTeKTPORNKM: bswYecKHe, TexHoROrHWeCKHe 1 exemorexunueckue, Jaeres npegetanenne 06 yposie coppemexxolt MMKpoSMeKTpORUKH, e¢ Me- ‘Tomax, cpeteTBax, Mposemax W Meperextupax. OGCYANAIOTCH BAAS MUTETPAABUBIX CxEM H CXE- Morexsuxa Tidpossre anazorossrx HC. Bo 2m HonaRHH OTpaxeuEr HOBBTe (byHAAMEHTAAEEENE ROcTIKennis B OG.1acTH MHKDOOEKTPORMKH, HCTOAMIYeMBIe B KACTOAMICE BPEMA Ha PARTAKE. Tipeauasnauaerca ana ctyqenTon panuoTexnUwecKHx 4 PanModusHueckm cHennabHOCTet pyson. Moxer Gurr noresiia LIMPOKOMY XpYTY CHeNHALMCTOR, CBATAMURX ¢ CORANHEM K OKCH ayaranuelt paquostextpounioli anmaparyper na HC. Bropoe nanaune AaHHOrO yueGHOrO MOCoGus HomroTOBHIH: A.B. Manson (r1.1, 2, 3), B. C, Tepurenxon (ra. 4, 5), JL, H, Tarpuxeen (ra. 6, 7, saxmouenne), B. B. Benaxos (ra. 8, 9, 10) Tlo nompocan mpno6perenna o6pamarscs: B Mocxse sJla6opatopus Basostix Suanniiv (095) 955-03-98, e-mail: Ibz@aha.ru 8 Canxt-Herep6ypre edmanerrs (812) 247-93-01, e-mail: dialect@sndlct.ioffe.rssi.ru © Crenanenxo M1.II., 2001 ISBN 5-93208-045-0 © JIa6oparopua Basovsrx 3uanuii, 2001 Vue6noe uaqanne A. Tl. Crenanenxo Ockonsr mukposnerrpomuiat Xynoxenx H. Josunckas. Texunveckuii pegaxtop H, Kypasseea, Komnutorepzaa neperxa B. Hocenxo Tlognucano m nevars 25.11.00. dopmar 60x90'/,,. Tapsurypa Uxonsuas. Bymara opceruas. Mevars opcernas. Yen. neu.a, 30,5. ‘Tuparx 3000 ax. Baxaa 3423 Msgarenscrso «Jla6opatopua Basosuix Sxannit», 2001 r. Aapec ata mepe- muckn: 108473, Mocxaa, a/a 9. Texecou (095)955-0398. E-mail: Ibz@aha.ru ‘SJiuyensua Ha usgareneckyw AeaTensHOcTh N2066140 of 12 oKTAGpa 1998 Pr. Ormewarauo ¢ ToTOpLIx AMAHOQNTHROR B HOAUrpAhwdecKoit GupMe «Tlommrpadner+. 160001, r. Bonorga, yx. Yemockanner, 3,Conepoxanne Ilpenucnosue Ko Bropomy usmaHMO. . . . . . . Tlpequcnosue K MepBoMy MsqaHuIO. . . . . . 1. 1. 7 Tapa 1. Ipeqmer muxpoomexrponmku . . . . . . . . 10 1.1. Begenwe . . . Eee Sree eee reed Seeger Gp 1.2. Wurerpanpusie cxemur. . Seed B 1:3. OcoSexHocr# HHTerpanBHNX cxeM KaK HoBOTO THA DNCKTPOHHBIX UpHGopoB. . . . +. + ee ee ee 1B 1.4, Kparxuit ueropwueckuit obgop. . . . ee. 20 1.5. Baxmovenwe © 6 6 ee ee ee ee Kourposbupie sompoct.. 2. ww ee OM Taapa 2. Tonynpopoqumxu . . . 1 ee ee ee ee 25 2.1, Buenenve . . . eee Hae EEE Ha rH He Hae Hea 212. Crpyxrypa nonynponoquukos. |...) ]. BB { 2.8. Hocuvem sapama. . . ee ee ee 80 2.4, Ouepreruueckwe yposH usoHBI. . . . . 2... . 88 2.5. Pacnpegenenne Hocuteneit B 30Hax Mponogumocrs » . . 86 2.6. Obcexr noma. . . SPC ee teeta eee ecco eve : 2.7. Pexom6nnagua Hocureneit BEE HeEH EE - + + 58 2.8, 3akoubI ABYxKeHMA HOCHTeNelt B monynposonuuxax se 68 Kourpombupie Bompocst'. . - . we ee ee ee Taasa 3. MonynposoguuKonsie nepexogs M KOHTaKTsSI . . 73 3.1, Bregenme . . . Bere rere e Hara 3.2. IneKrpouno-muIpomubie nepexomst . . . . . . ee TB 3.3. KouTaxrst uosynpopoqumK-Meranm. . . . . . 89 .4 3.4, Tpanmua nomynposonuwx-amenenrpuk. . . . 1... 95 . Kourpompusie ponpocst. . 2. 1 ee ee ee OT Tyasa 4. Yunnonapusie rpausueropst . . . . . «1. 99 4.1. Beegenve . . EEE Eee ree ear ee eee ee eee eee tae 5 4.2, MUI-rpausueropst. . . ee ee es 100 4,3. Tlonesnie rpausveropst. . . . . . . ee. e116 Kourpompupie Bompocsl. » . . 6. 1 ee ee ee ee 18d Taga 5. Duswueckue npuanunt: padorst arene TpaHsucTopa H THpucropa. . . . « soe e 125 1, Baegenne. . EEE HEE EEE ERE RE ae EEE eee Eee Hira _ 5.2. IIpumumn gelicrsun | ss ee 185 z . Pacnpegenenua Hocuremelt. . . . . . . . . « « - 180 . Koadpunmentst yonnenun toxa, . ee es 1874 ___Ocrosst manepoosernpormen 5.5. Craruyeckwe xapakrepHerHxu . . feet - 145 5.6. Matocurnaapubie sKBUBATeHTHBIe cxemBl 1 apancetp a . 152 5.7. Mepexomuine u vacrorse xapaxrepneriia pete . 155 5.8. Tupucrop. - : papaeetiigenie Kourponsuse sompocs. |... ss se ee 167 Tasa 6. Texnonornueckve OcHOBLI MUKposnextponuKH . 169 6.1. Beenenve. . . SES etree eee a eateee eee Oo 6.2. Togrorossrempiure onepauwa tH ee tee eee eee eet OO 6.3. OnuTaxcua . . . bE Petree eee teeta ee eeeeee eet a 6.4. Tepmuueckoe onvcnenue . . 6 ee ee 18 6.5. Jlernporanne sie ee ete ee eee eee eee ee eee 7a} C:6 Tea tee es 6.7. Texumka Macox . . SPREE He etree erate erecta ts 6.8. Hanecexue TouKux nnenox Se reer eer eet atteeeerer atte tn 6.9, Meranausagua. . see we ee ee eee 200 6.10. COopounse onepanun. | unas) 6.11, Texuonorua TouKonaeHouNEIX ruOpunHWX HC. |. . 205 6.12. Texnonorua Toacronsenounsrx ruOpuqunix WC. . . . 211 Kourponpusie wompocst. . . . ee ee ee 14 Taapa 7. OmemeHTsI uHTerpambHBIX cxeM. . . . . . . 216 7.1. Baegenme. . . SH Pettis etait set ereiettretee Stebel 7.2. Visonauma onementop «1 1 ew we ee ee ee 218 ed Tpangaeropen mop neeeeeeee eee ieee a2 7 LA. Pasnoswgnocrn n-p-n-rpausucropop. . . . . . . . 235 7.5. Tpausucrop p-n-p. ss ee ee ee BA 7.6. Warerpansuue qmombt se 244 7.7, Tloneno tpausucrop. . . . . . . 1 ee ee BAT 7.8. M[MIl-rpansucropst . . - ESS eeee eee eeeeat eta 7.9. Tlonynposognmxonire pesweropsr ee ee ee 25B 7.10. Tlonynposogumxosure KoHAeHcaTopH. 1. 264 TAL. Snements: HC wa nomynposoanmnax rpynma A™B’ | | 271 7.12. Snementst nnenounsix HC . . . se Ha aero Hae ie Koutponpunre sompocst. . . . . ee ee ee ee 280 Tapa 8. Ocuosst umposoli cxemorexauxu . . . . . . 282 8.1. Buegenue. . . Lo. 282 8.2. Crarmueckuil pesxum npocreiimero Gunomapxoro | Kowa... +. 284 8.3. Tepexogutie npoyeccst B npocrelimem GunoxspHoM Kmoye. . . Sp EEEe CUS tee CEE eaten Hoel nas 8.4, Kmou ¢ Gapsepom Wormen | 1.) ) lf ll. . 808 8.5. Tepexmouarens TOoKA sw wee ee ee 805 8.6. Mi[lI-rpanaucropuwe kuoum. . . . | 1... . . 810 8.7. Tlomexoycroitamzocts Kmouet . . 1. 1 we ee B22 8.8. BucraSvnnnnle aueiixu um Tpwrrepsr 2... . ee. 826 8.9. Tpurrep [Imurra. . 2 2. ee eee ee es 880 Kourponsusie pompocst. » . . . ee ee ee ee 884Conepwanne -S Taasa 9. OcHospr ananorosoii cxemorexumku . . . . . 336 9.1. Buegenue. . . SSeS eae eee 9.2. Cocrasuie Tpausucropst . . aetniesiitreest t.1¢ 9.3. Craruuecnuit pexum mpocreiiuiero. yeumurena | | | | 339 9.4, Tlepexogusie npoueccs! B mpocrelimem ycumutene . . . 347 9.5. TIpocreimue ycunuream Ha MIMT-spausucropax . Sensis 7 9.6. Tudbepesnuanpusre yeuanrenu. . eH, 9.7. Omurrepuuie nostopurem. . . . . . 2. ee. 878 9.8. Kackoq 6 6 ee ee ee ee ee ee 885 9.9. Buixonusie Kackagr. . sone ee ee ee. 886 9.10. CraGuauaatopht Hanpaxenma | | 1. =... . . . 894 9.11. CraGmamsaropsr ToKaA.. . . . 1. 1 ee ee ee 400 Kontpompusie ponpocst. . . 1. ee ee ee ee es 409 Tnapa 10. Wuterpanpupie cxempr. . . . . . «se. 411 . Beegenve . . ee ee es All 10.2. Jlorwaecnue omemenm ua Ounonapuax rpausucropax. . . Ser reae ead 10.3. Jlormueckue onemeHTH Ha 2 MIIII-rpaxaneropax ie tee aa 10.4, Jlormueckue gnemexTst Ha cosMenieHHEIX 6vmomapxirx 1 MOII-rpansuctopax (BuKMOII). . . . 434 10.5. Jloruueckve sxemexTsI Ha ToseBsIx Tpalsucropax ¢ ylpassmouyum nmepexojom MeTami—nogynpopoguux (MEI) . . . . . . . . . 435 . Tlapamerpst sormueckux ogementos. . . . . . . . 436 . Wurerpanpunie tpurrepps. . . . 2... eee 440 . BanomuHarouyne yerpolicrpa. . . . oes 446 ; Bonbuime u epepxOonsumue uuterpanbune. cxeMBE . fee soe ee ee 453 10.10. Onepauyorie yeunmresu . bee ee we ew + 460 10.11. Hageanocrs uuTerpanpHnx cxem . . 2... . . 478 10.12. 3axmovenve. © 6 6 ee eee ee ee AD Kourpombupie soupocsl. » . . ee ee ee ee 480 Saxmouenne, TlepcnekTusb pasBuTHa MMKPOdeKTPOHHKH. . . . - « . «e483 Uinreparyparctisiettestee earner aE~ Fipegncnosne Ko BTOpomy M3qaHulo Co spemenu BBIXofa B cRET NepBoro MoRAHUA yaeGHoro nocobuA ANT cTyeHTOB Bys0B «OcHOBBI MUKPOOMeKTPOHUKU> NPOUWTO Now ABAAUATS ater. 3a ou rogtt tpya Mrops Masaopnua Crenanenko, ckoHuaBuleroca B 1982 r., okagaa AOOpy0 NOMOM, HeCKOABKUM NOKOJeHHAM BBINYCKHMKOB PYCCKOASbIUHBIX BYSOB H CTYeHTAM, OCBAMBABIMM OCHOBEI MUKDOIIeKT- pouky Ha anramiicxom w ucnancKkom sspiKax. K comasenmo, B HacTos- jee spema xuura Mi. II. Crenanenxo crana Ouéauorpadwueckoit peako- erbi0. ML. Il. Crenanenxo cnpaseqauno cuuran, uT0 muKeHepy-pusuKy, cne- WMarMsupyloujemyca NO MMKPOITeKTpoHUKe, HeOOXOAHMO CBOOOAHO OpH- eHTHpOBATECH B Tpex ee OasoBHIX COCTABIAIOMINX: UsMUECKHX, TeXHO.IO- PHYeCKHX MW CXEMOTEXHUYECKUX OCHOBAX MUKPOIIEKTPOHHHX NPHGOPoR U erpyxryp. Merogosorua ussoxKenus u chaxruueckuit marepman «Ocho muxpo- SIeKTPOHUKM» OepexHO COXPAHeHLI B HOBOM MsqaHHM, MOsTOMY Mpi cuNTA- ew H. Il. Crenanenko ocxosusm aropom kuurv. Hacroaujee usganue nogrotonmeHo yueHwKamu w copaTHuxamu M4. II. Crenanexxo, cosqasuiero B 1965 r, 8 MAPH nepsyio B CCCP xadeapy Muxpoonextpouuxn. Ecrecr- BeHHO, YTO JAHHOe UsAaHMe — He MpocToe NosTopenMe MaTepuana mpo- max ner. B yueOHoe nocoOue BkmoueHE HOBbIE byHTAMeHTAIBHLIE JoO- cTmkeHua B O61acTU MUKpoosIeKTPOHUKM, UCHONBsyemure Ceituac Ha mpaK- Take. B wacroaujem uaqanuu apropst crapasmch yuecTs HOBBIe BeAHUA B OP- TaHUsauuM yyeOHOrO Mpouecca, B YACTHOCTH, CBOGoRHOe MocemleHHe cTy- ACHTAMH wTexuMit. Tak, B KOH KaxKJ0TO paszewa NPUBeAeHLI KOHTPONL- HBIe BOMpocsI ANH CaMOcTOATeNBHO! npopasorKn. Bea pa6ora no nogrorosKe HoBoro maqaHMA BLINOTHeHA COTPYAHMKAMK Kadegpsl MuKposueKspoHuKU MUP nog pyxosogcrsom mpodeccopa A. B. Ianbuoza. B. B. Beaaxop, JI. H. [arpuxees, B.C. Mepmenxos, A. B. WarsxonTipeanencene -— K nepBomy v37aHuIO MuxpoonexrpoumKa Kak meropmueckuit oran pasBHTua emexTpoHMKH XapakrepHa opraamuecKuM eqMHcrsom (usuuecKux, rexHosoruyecKux (vouxee, KoucTpykTMBHO-TexHOsmOrMyecKMX) HM CXeMOTeXHWYeCKUX acteK- ros. [losromy nonvouexHas, TsopyecKas paspaboTKa MHTerpanbHBIx cxeM HEBOSMOMKHA HM CHIAMH ¢KAACCHYCCKUX® (USHKOB-TeXHONOOB, cI0cob- HBIX paspaOaTSIBAT OTIEBHBIE NOMYNPOBOAHMKOBBE NPUGOPLI, HO He 3HA- KOMBIX WIM C1a60 SHAKOMBIX CO CXeMOTeXHHKOM, HM CHaMM ¢KmaccHte- CKMX» CXeMOTeXHMKOB, crlocoOHbx paspadarbiBaTh dyHKUMonamsuBe YaNIbI M3 oeMeHTApHEIX PaRuOAetaneli, Ho cnaGo 3HAKOMBIX c UsHKO!t 1 Tem Gonee TexHonorveit NonynposoqHMKoBEIx Npu6opos. Cnenvasnncr, pa- Goraiouwi » oSaacTu MUKpossexTpOHUKM, JouKeH B PasHOk crenenn B.1a- ges ee busuueCKuMM, TeXHOOrHYecKUMM M CXeMOTeXHMYeCK UMM OCHOBA- MM, TocHe yero, B SaBMCMMOCTM OT KOHKPeTHBIX yenOBUit, OH MOET Toy- WATS AONOTHUTENBHYIO NOATOTOBKY B TOM HIM MHOM Hampas.leHHn. B nacrosujee spema paspaOoTauKu WHTerpatBHBIX CXeM BBITYCKAIOTCA B PAMKaX HeCKOMBKHX UHDKeHepHO-QusM4ecKHX cHeyHanDHocTelt (0604, 0629 u gp.)', cchopmupoBasmiMxca saqonro go CTaHOBIeHUA MMKpOSNeKT- pouuxu. Tostomy 8 yueOusie naaHsi sTux chemmanbHocrelt B pasHoe Bpe- ‘MA OBLIM BBeqeHEI TAKMe FONOAHUTeTEHBIe AMCWMNIMHBI, Kak «Muxpo- anextponuxka>, «AHamu3 u pacuet uHTerpanbHEIx cxem», «Pacuer u KOH- crpymposaHMe MYKpooeMeHTOB uM MMKPocKeM> wm QD., MPMsBAHHBIe YcoBepuleHCcTBOBATb NPObus cheywanucTos, MpuBecTu ero B cooTBeTCT- BHe c SaqavaMM, peLaeMbIMN B O6slacTH MUKpooNeKTpoNMKH. OAHAKO, KaK HOKAsbIBaeT ONIT, HM OFHA M3 9TUX AHCYMMIIMH He OGecneMBaeT MOAHO- eHHOPO OBaAeHUH CXeMOTeXHMYeCKUMH OCHOBAMH MMKPOOeEKTPOHMKM, a sHauMT eAMHCTHO ee Thex OCHOBONONAraloUIHX acHeKTOB OcTaeTeH Hepe- weHHO mpobremoi. Upyram sosmoxusim nyrem qyia Beinycka paspaSoramkos uHTerpans- HBIX CXeM ABIeTCA youeHHe (UsMKO-TexHOOrMUeCKOl NOATOTOBKK WH- okeHepos paquorexmuueckoro npoduss. C stoit yebI0, HanpuMep, B yxe6- nbrit ax crenmansuocta 0705 BBeneH Kype «Pusraeckne OcHORBI KOHCT- Pyuposauna i TexHosorua POAs, a Kype «3mextponnsre mpuGopsrs mpeoOpasozaH 8 «QneKTPoHHbIe NpHOopE! HW NOyMposOAHUKOBbIe MHTerpa- AIbHBIe cxemui». OnHAKO 9TH KypCbI He BKMOUAIOT B CeO CXeMOTeXHMHECKHE 1B qanwom npegucrosHu Homepa crenuatbHocreli yKAvaMe no AaHAMM Ha 1980 r.— rog BuIxoga 2 ckeT Hepaoro naqaHuA KHurH (pum. ped.).8 Tpeaucaonue « nepsomy Haqanuo aclexTb! MMKPosTeKTPOHUKH, a B KAAaccHYecKUX KYpcaXx, NOcBAINeHHLIX PaqMoeKTPOHHBIM CXeMaM, CHlemMdbuka 9THX acHeKTOB He yuNTEIBAeTCR. Ba nocnequMe gecHTs eT AJL CTYAeHTOS, CeNMANMsMpyIoUlyXcH B O6- AACTH MMKPOSMeKTPOHUKH, BRINYINeHO HecKOMKO yYebuBIX Tocobui. He YMaNIAIA HX OcTOMHCTB w TeM Gotee npHopuTeTa, cxenyeT BCE 2Ke oTMe- THT, ¥TO OHM MlocBAMeHbI 160 TOABKO bUsHYeCKUM, MH60 usHKO-TeX- HOOHYeCKHM H KOHCTPYKTHBHEIM acrlexraM MHKpoameKTpoHHKH. B ro- pasqo Meubiuelt crenenu OHM KacaloTcH 91eMeHTOB MHTerpaBHBIX CXeM, a THABHOe, ONTS Ke COBCEM He saTparMeawr cxeMoTeXHUKY. B panvom yueduom nocobun yenaerca nonsiTKa Gomee m1 MeHee Ton HO OXapaKTepHsonaTs BCe COCTABHBIe YacTH MUKPOsTeEKTPOHMKM. OcoGoe BHUMaHNe yAeMeHO TeM PasyenAM, KOTOPBIe He NOAyAHUN AONHOTO OTpa- 2X€HHA B YNOMAKYTOH yueOHOH MTepaType: dusHKe TpaHsHcTOpoB, TpaH- aucTOpHoil cXeMOTeXHMKe, a TaKxKe OGulei XapakTepucruKe mHTerpast- HBIX cxem. AKU@HT Ha 9TH passeis B yCHOBMAX OrpaHwueHHoro oObema KHUTM He MOsBO.AUN CTONS Xe NORPOOHO MGNORUTE KOHCTPYKTMBHO-TeXHO- Horwyeckwe acneKTEI, BOTpocsl MeTPUKM M HeKOTOpsIe AP. OgHAKo oTOT HemocTaToK NpegcTapiaercs He CTOs cylecTBeHHBIM, NOCKOABKY Aono.T- HUTeMDHBIE CBeJeHHA MO%KHO NOWepHHyTS Us yNOMAHYTOM mureparypH. Virak, 8 ocHosy qaxHoro y¥eOHoro mocoSua No saMBIcly nosTOxKeH cHC- TeMuBIit NOAXOA K u3NOXKeHMO MaTepuasa: OTAeEMBHBIE pasqeA BaaKMO- cBasanbi, padoraior gpyr Ha APyTa MB KoMMJeKce cosqaioT ToT obuyuit @yxqamen?, wa Gase xoToporo BOSMo%HA AaNbHelimaa cneymammsannA cryqeura 8 o6tacTu MuxposneKTpoHMKH. Uro KacaeTes WHOKEHEPOB, KOTO- Pie NO PoAy pasoTE! JOMKHBT MPeogoreTs soAHOCTOpoHHOCTE> cBoeii Mpe*kHei NOArOTOBKM, TO OHH MOrYT CocpeqOTONNTS BHUMAHHe cooTBeTCT- BeHHO Ha ()MaMKO-TeXHOMOTHYECKUX HIM CXEMOTeXHWMECKUX pasjenax, Pyxkosogersyacb cHCTeMHBIM NOAXOAOM, aBTOP BKMONUI B yyebHoe T10- coOue sce HeoOxoqMMBle pasgetsI MUKpONeKTPOHMKM, HesaBycHMO OT Toro, ¥TO HeKoTOpEle M3 HUX ABIIMOTCA MPeAMeTAMM ClenMANbHBIX KypPcoB (wampumep, «Pusuxa nozymposoqHHKos», «IonynpoBoguuKosuie npuso- pate, «Mmyspcusie cxembio, «Veumurenue ut. 11). Taxywo Touxy speuua pasmensoT, Kak HAM K@KETCH, H ABTOPBI yrKe BEINYIEHHBIX NOcobuit. On- HAKO ABTOP CUHTAT HeNPABHALHBIM MeXaHMYeCKM BKNOUATD B OCHOBLI MMKPOONEKTPOHUKM Bech MATePHAN YHOMAKYTSIX KypcoB axe B coKpa- mjenHom Buge. Tlosromy 9ToT Matepnas Opi He TOJIBKO TINATeETSHO OTO- 6pax, Ho m nepepaSoraH B cOOTReTCTBNM ¢ KOHKpeTHIMM saqayaMM MUK- POOeKTPOHMKM, a TAKIHe C YUETOM BYTPeHHei BsAMMOCBASH pasqeNoB. Hanpumep, 3 rx.2 ne BKmouenti TaxHe camu 0 ceGe BAxKHDIe Bompocsr, Kak oJeMeHTH KBAHTOBOMeXaHMYeCKOH Teopun THepsoro Tena, sdipexTEI Tana » [pxoseeoua, pasmepxure obextst B TOHKUX MneHKax u Ap. Vis umcaa Tpaxsnctopor Brn. 4 m5 paccMOTpeHbt TOABKO MAOMOIIHEIe Tpass- aMcTOpbl, COCTABIAIOMIMe OCHOBY COBPeMeHHEIX MHTerpanbuBIx xem. YTo KacaeTeH TPAasGHCTOPHEIX CKeM, TO HX HOMeHKaTypa PesKo coKpaliena w MpwBeqewa B cOOTHeTCTBHe C PeaNBHLIMM KOHUryPAMAMM, uctOsBsye-Tipequcroswe & nepsomy HoAaHWO 9 MBIMH B MHKpossexTpouuKe. Hsmenena Take TpagAMNMOHHaa nocneposa- TeMbHOCTS NPM WSYYeHMM ABYX OCHOBHBIX KsaccoB cxeM: cHayaza (rm. 8) paccMaTpnnalores Kn0veBBIe CXemBI, a saTeM (ri. 9) — yenMTerBHEIE. He mentee crlomtnan sagaya scrata mpu or6ope MaTepuana # BEIpAGoTKe MeTOAMKH ero ManoxKeHUA Brn. 10, nOcBaMeHHOH peambHIM MHTerpatE- HBIM CXeMaM. 3yecb, BO u3sGeKaHMe HeONpaBAAHHIX cO*KHOCTeM, IPH- ULI0C BO MHOTHX CIYWAAX OTKAIATHCA OT PACCMOTPeHUA NONHEIX NPHHUM- HMAJIBHBIx CXeM W COCcpeqOTOUNTS BHUMAHMe Ha CTpykTYPHEIX cxemax. Ta- Koil NOAXOA COoTBeTCTByeT MeTOZaM IIpoeKTHpoBaHUA coBpeMeHHEIx BAC mw Tem Gomee annapatypsl Ha Mx ocHoBe. «OcHOBBI MHKpoomeKTPOHHKH — rlepBoe H3 Tpex y4eOHBIX nlocobuii, mpewia3- HaNeHHIX Ayla BCeCTOPOHHeli NOTOTORKH MIDKeHepos-paspaSoTuNKOB MHTerpamtb- HbIX CXEM, T. €, CNUMAsIHCTOB, XOPOLIO 3HAKOMBIX CO BCEMH TPeMA ACITIEKTAMH MHK- pootexTpoHHKH. Astop Hageetca, ¥7o ero samsicen, peatusonaHibit B qanHoit KHMre, Gyner omo6peH cTygeHramu, samuTepeconaHHLIMM KaeapaMM, a TaK:Ke chelwasMcTaMM, KOTOPEie BOCTOABsyIOTCA e! AIA caMOTIOAroTOBKH. Bosee ‘Toro, OH HageeTCa, ¥TO co BpemeHeM yueOHBIi Kypc «OcHOBBI MHKposteKT- POHWKU>, NOCTpoeHHET B COOTBETCTBHM Co CTPYKTYpOl AaHHOl KHUrM, cTaHer TAKHM 2Ke TDARHIMOHHLIM, Kak Kypest «TlosynpoBomHMKoBEIe MPH- Oops» umm «TeopeTuyeckue ocHoBEI omeKTPOTeXHUKH>. Dro, HeCOMHEHHO, choco6crsozano 651 Kak eqMHOOSpasmio NogroTosKu cheyMarucTos ofHorO M Toro 2%Ke npobuns, TAK M BsAaMMONOHMMAHMO cheuManMcTOB cMexKHBIX npoduseit («onemeHTINMKOB» W sarMapatypuIMKoB»), HeusbexHO BCTyTIA- WUJKX B KOHTAKT IPH paspadorke CORHLIX MUKPOIEKTPOHHEIX CHCTEM. TIpesiaraemoe yueGHoe nocobue paccuuTaHo mperkye Bcero Ha CTyTeHTOB, chenmasmaupylouyuxca m0 MMKPosIeEKTpoHUKe B PaMKax cheyMatbHOCTelt 0604, 0629, 0648, 0701, 0705 u np., a TaKxKe Ha UHKeHepos, OKOHUMBINUX BYSBI 10 9THM cleuManbHoctaM Gomee 7-10 ner Hasag. Oxo, BepoxTHo, byxeT MoslesHO chenuMaAIucTaM No PagMOTeXHMKe, BLTIMCIMTeNLHOM TeXHMKe, KU- SepHeruke, aBromaTuke, eMepuTeEHOK TexHUKe MU APyTMM o6sacTaM Hay- KM Mf TeXHUKM, CBASAHHBIM ¢ NPHMeHeHMeM MHTerpanbHBIx CXeM. Astop sipaxkaer ucKpeHioi0 GmarogapHocTs mpod. C. AH. Wany, npod. B. H. Jyamny u gon. 10. E. Haymony 3a nomeauste sameyanua 1 co- BeTSI, A TAKIKE KOMeKTHBY KacexpE MUKPoomeKTpoHUKU MUP sa no- Moms B paGore u odbopmaeHuu pyxonucH. Mi. 1. Crenanenxo 1 Yue6unie nocoGua: Bepesun A. C., Movaaxuna O, P. «Textosoris 1 Koucrpyupona- Hue MuTerpanpHBIX MUKpocxeM®, Hox. «Panto m camabe, 1983 r. m Anexcen- oA.I., Mazypun H. H. «Muxpocxemorextmxa>, uaq. «Paguo u caaser, 1990 r. (UTpum., ped.)- Fnaee 1 —-——_—__— Npegmert muxposnekTpoHnkn 1.1. Baegenne Poms MMKpOoleKTPOHMKM B COBpeMeHHOM Hayke M TeXHUKe ‘TpyaHo NepeonenuTs. Ova ciipabexmMBO CunTaeTCA KaTasMsaTOpoM HayuHO-TexHuYeckoro mporpecca. CnekTp ee npuMeHeHUA IIpOcTH- paerca OT byHAamenTanpuyirx uccnesoBaHuit Ao MpuKaqHOrO uC- HObSOBaHvA. MukposieKTpoHHKa BAMAeT Ha BCe HapOmHoe Xosaii- CTBO, HO He HeNlocpe”CTBeHHo, a depes Hensrit pay cHenuMdHuecKux orpacneil, TAaKMX Kak BETUMCAMTeTBHAN TexHMKa, UHCOpMaHOH- HO-M3MepUTe/IbHble CHcTemsI, poOororexHuKa, MHMKDpompoueccopsl. Muxpossexrponuka, ouepeqHoit ucTropuuecku o6ycnoBnenusrit 9Tall pasBUTUA 9NeKTPOHMKM HM OAHO M3 ee OCHOBHBIX HalIpaBse- Hui, oOecneunBaeT IPHHIWMNIMAaANbHO HOBLIe IYTH pellleHuA HaspeB- mmx 3ayay. Onexmponuka — ovo o6NacTs HayKU, TeXHUKH HW MpOMsBOACTBA, OXBaTpIBalOlMlad UCCleqOBaHHe M paspaboTKy eMeKTPOHHBIxX MpHoo- POs HM MpHHYMNOB ux UCHONDsoBaHKA. Muxposnexmponuka — ovo paspen oneKTpOHUKH, OxBaTEIBAIO- IHit McCreqoBaHMa uM paspaborKy KayecTBeHHO HOBOFO TUNA 31eKT- pouHBix npu6opos — nuHTerpambHBIX MMKPOCXeM — H IIPHHI{HIIOB MX IpHMeHeHHa. Humezpaavnaa muxpocxema (uM mpocTo MHTerpambHaa Cxema) eCTb COBOKYNHOCTs, Kak NpaBuso, 6ox,Woro KOMYeCTBAa BSauMO- CBAZAHHEIX KOMIIOHEHTOB (TpaH3HCTOpOB, AMOMOB, KOHAeHCATOpOR, pesucTOposB HM T.I.), H3TOTOBIeHHAA B eAUHOM TexHONOTMuecKOM qukse (T.e. OfHOBpeMeHHO), Ha OMHO!t M TOM 2Ke HeCyyei KOHCT- pykuuH — nodnowKe — MV BEITONHAIOMIad OnpesenenHy!0 tyHK- 110 mpeo6pasopanusz wxdopmanun. Tepmun «mHTerpanbuaa cxema» (MC)! orpaxxaer dhakt oGnequ- Henna (uHTerpaluu) OTAeMbHDIX FeTaneit — KOMMOHeHTOB — B KOHCTPYKTHBHO equHbIit MpH6op, a Take (pakT yC10%KHeHHA BBI- 1 Integrated Circuit (IC)1.1, Baegenue i TOMHAeMBIX STHM IpHGopoM PyHKMHt M0 cpasHeHHio c yHkyHA- MM OTfe@1bHBIX KOMMOHEHTOB. KomnouexTel, koTopbie BXoZxT B cocras MC m Tem caMbIM He MO- TYT OBIT BEIJeTeHEI U3 Hee B KAYeCTBE CAMOCTOATeMBELIX H3qemHit, HasbIBaloTca azemenmamu UC unm unmezparbnoimu anemenmamu. Onn o6naqaior HekoTopIMu ocoGeHHOCTAMM 110 CpaBHeHMIO c TpaH- sHcTOpaMH H T.f., KOTOPble HsroTaBIMBaIOTCA B BUe KOHCTPyKTHB- HO O60co6.1eHHEIX eAMHMI M CoeAMHAIOTCA B CxeMy MyTeM naitKH. B ocuose pasBvTMa oeKTpOHMKM exKHT HeltpepEIBHOe yCiO%He- Hue PYHKUMH, BEINOMHAeMEIX 9eKTPOHHOM anmaparypoit. Ha onpe- AeeHHLIX 9TATIAX CTAHOBUTCA HEBOSMOXKHEIM pelllaT, HOBLIe saqauH cTapBIMH cpeACTBAMH HJM, KAaK TOBOPAT, Ha OCHOBe cTapoii 3.1emen- muoi 6a3bl, HANpUMep C NOMONIbIO 31eEKTPOHHBIX aMI MAM AUCK- PeTHBIX TpaHsHcTOpos. OcHOBHEIMH bakTOpaMy, leKaN{HMH B OCcHO- Be CMCHBI JeMeHTHO Gasbl, ABNIAIOTCA: HAMe*KHOCTH, rabapuTEI Macca, CTOMMOCTb H MOLIHOCTS. Oco6enHocTsio usgemMit MMKpOseKTpOHUKM ABUIAeTCA BbICOKaN CTeMeHb C1O2KHOCTH BLINOTHAeMLIX YHKUMH, TA vero cosqaloTca CXeMBI, B KOTOPEIX KOMMYeCTBO KOMMOHeHTOB MCUMCHAeTCA MHILIMO- Hamu. Orcioga acHo, 4To oecneuNTS Haqe%xHOCTh dbyHKUMOHMpoOBa- HMA IPH COeqMHeHHM KOMIOHeHTOB BPy4HYI0 — gayaua HeBEINOHH- Maa. EquuctseaHiiM cnoco6om ee pellieHHa ABIAeTCA IpuMeHeHHe KaecTBeHHO HOBbIX BbICOKUX TexHomoruit. ii4 MsroToBNeHHA MHTerpasbHbIX CXeM MCHONB3yeTCA Ppynno- BoH MeTOA MpousBOACTBa HM MiaHapHan TexHOoOrua. I'pynnosoi memod npowsBoycTBa 3aK0"aeTCA B TOM, UTO, BO-HepBBIX, Ha OfHOM MacTHHe NOMynpOBO_HMKOBOrO MaTepHaa OfHOBpeMeHHO MsroTaBiMBaeTcA OombUIoe KOMMYeCTBO MHTerpasb- HBIX CX€M; BO-BTOPBIX, CIM lOsBONAeT TEXHONOTHYeCKH Mporecc, TO OfHOBpeMeHHO OOpabaTLIBaloTCa AeCATKM Takux MacTuH. Ilo- cae gaBepllenua WMKa MsroToBeHusa MC niacruua paspesaerca B AByX B3aMMHO-lephenAUKyAAPHLIX HanpaBleHuAX Ha OTZeNbHBIC Kpuctanns!, KaxgpIit M3 KOTOpsIX MpegcTaBnner coboit UC. IInanapuaan mexnorozua — 9TO Takad opraHv3salua TexHos0- THuYeckoro Mpoecca, Korma BCe aleMeHTEI H UX COCTABAmIOMMe Co- 3a0TCA B MHTerpanbHO cxeme NyTem HX OpMMpoBaHHA uepes mimocKocrs” 1 Tlo-anramiicxu chip (aun). 2 Tlo-asrnuiicxa nockocrs — plane.Vurerpansmste cxemst 13 Tasos X Ha IlaCTHHe MOXKHO JOCTHUb ABYMA IlyTAMH: yBeiMueHH- eM pagMepa M1acTHHbI HM yMeHbIeHMeM pasMepoR OTICILHLIX 3.1e- MeHTOB. OTH 06a HalpaBNenuA UCMONB3yIOTCA paspaboTanKaMu. B saknuenMe 3aMeTHM, UTO BCe KOHCTAHTBI, BXO_AMIMe B cbop- MYAY, He ABMIOTCA HM NOCTOAHHEIMU, HM 3aBMCMMBIMM Apyr OT Apyra, NooToMy aHamus Ha MHHUMyM CTOMMOCTH Ha CaMOM jleJle aB- HeTCA CO%KHBIM HM MHOTO(akTOPHEIM. 1.2. Murerpanpubie cxempl B mpoyecce passuTua MMKposiekTponuku (M9) HomeHKnarypa MC uenpeppisno usmenanac. Tnapusrit run MC B nacrosuee ppe- MA — Dozynpozog_HuKossie MC. Um u GyzeT nocBanjeHo ocHoBHOe cogqepKaHue sroro nocobua. Kaaccuduxauna HC. Knaccuduxangua MC moxer npoussogu- TbCA 110 pasIMUHbIM NPUsHAKAaM, OTpanH4MMCA 3/eCh TMU OFHHM. Ilo cnoco6y usrorosnenua m Nomydaemoit npu sTOM cTpyKType pas- AMuaOT ABA NPMHYMNMATbHO pasHbIx THMa MHTerpasbHBIX CxeM: NOAYNPOBOABUKOBLIe HW T1eHOUnLIE. Tloaynposodnuxoeaa HC — sto Muxpocxema, onemenrst KoTO- poli BEITIONHeHbI B IpHMoBepXHOCTHOM CJl0e MomyNpoBoAHUKOBO nogtomxn (puc. 1.2). Sra HC cocrasnmor ocuosy coppemennoit MHKpooseKTPOHUEH. S10, Al ¥. + ¥ 7. z Y, > : 7TRA VEZ 7 eH 50 MEM Pesuctop - ‘Tpansactop 3 a Kpensanit Puc, 1.2. Cxpyktypa snementos nonynposoqeHKozoit HC ITaenounan UC — aro muxpocxema, seMeHTbI KOTOpONi BEITION- HeHBI B BUe PASHOTO Poa IieHOK, HaHeCeHHBIX Ha MOBepXHOCTH AMemexTpHuecKo No”oKKM (puc. 1.3). B sasucumocrn or croco- 6a HaHeceHMA IeHOK VM CBASAHHOI C STUM MX TOMUMHOM pasru4a- 1OT MoxKonseHounwe AC (ronmujMHa MMeHOK yo 1-2 mKM) um mow cmonaenounvie MC (rommuna miexok ot 10-20 mk um BbIme).12 Tuasa 1. [peamer maxposaextponmu Ogua UNM HeCKONbKO TexXHOMOrMuecKMX ONepaluii Mp usroToR- nenuu MC saknouaerca B Coe_MHeHHM OTACABHLIX 9eMeHTOR B CXe- MY MIpHcoeqMHeHMM MX K CleNMaAPHLIM KOHTAKTHEIM TI0maqKam. Tlostomy Heo6xoqumo, uTOObI BLIBOAbI BCeX 9JleMeHTOB HM KOHTAKT- HBl€ WIOWaIKM HaXOfMIMCch B OMHOM MocKocTH. Taky10 BO3MO%K- HOCTE oGecneunBaeT IlaHapHad TexXHONOrHA. ®unasnbHaa Onepalua — Kopnycupoéanue — 9sTO MoMeljenue WC 8 xopnyc c npucoeyqMHeHHeM KOHTAKTHBIX MOWaqOK K HOK- xam MC (pue. 1.1). HC He a a " TH HC: RT es R T : 6) 8) Pue. 1.1. Mamocrpanua werotontenua mpocreituieli unterpanbuoii cxemnt: @ — KpeMHuesad naxacTUHa c ¢KOMMTeKTAMM 19 ABYX TpaNscTOpOR, AHORA Mm pesuctopa; 6 — MexcoeqUHeHHs aneMenTon BHYTPU «KOMMIeKTAr (aanapuea Texnonorus); @ — rorosas MC 8 Kopnyce Croumocts D ogxoit MC (oguoro Kpucramma) yrpomjeHHO MO2KHO BLIUMCAMTE ClexyIoWuM o6pasom: A+B yo}, Tye A — 3aTpaTbI Ha HAaYYHO-MCCeqOBATeEIECKMe HM ONBbITHO-KOHCT- pykTopcekue pabors mo cosqanuio UC; B— sarpatsi Ha rexHonoru- ueckoe O6opymOBaHHe, Momeilenue wu ap.; C — TekyHe pacxognr Ha MaTepMasbl, oleKTposHepruio, 3sapaboTHy!0 Mary, B MepecueTe Ha ogHy HaacTuHy; Z — KOMM4eCTBO MAaCTHH, M3TOTOBIHeMBIX 10 AMOPTH3allHM OCHOBHBIX MPOMS3BORCTBEHHBIX (pOHROB; X — Kounue- cTso KpucTainon Ha ImacruHe; Y — orHomienue roquerx MC x Ko- quuectTsy, sanyijeHHOMy B poMsBoqcTBO B Hayase ero. Kpome oveBHqHBIx KOMMeHTapHes OTHOCHTesBHO saTpaT, HYZHO OTMeTUTS CHemyioulee. Yeenuuenve Y yoctuTaeTca cosqanvem Bce Gonee coppeMeHHOM TexHonorMu, Noxany, HaMOonee cioxKHOM HM uncToi cpeqM MHOrHXx HoBeiilmMx npoussogcTs. Pocra uncaa KpHc-14 [nana 1. Tpeamer mukpoosexrpomuntt Kongencatop HEAYKTHBHOCTH Puc. 1.3. Crpyxrypa oxemextos nenounoit HC: 1— sepxnas o6xnaqka; 2 — umxuag o6xnagxa; 3 — quanexTpHK; 4 — coeqHHMTenbHaa MeTanmMieckan Tom0cKa Tlockompky qo cHxX Nop HMKakan KOMOMHANHA HaNLieHHEIx IMeHOK He MOSBONAeT NOMYUUTS AKTUBHBIC 91eMeHTEI THA TPaHsH- cropon, mneHounbie MC cogepsaT TOMbKO MaccHBHEIe 3S/leMeHTHI (pesucrops!, Koujencaropsi 1 T.1.). ostomy @yHKQMM, BEINONHA- emble uucTo meHouHbmn MC, xpaiine orpannuenti. Urobsr mpeo- oleTh oTH orpanuuenua, uMenounyio MC gononHsioT akTHBHBIMH KOMNOHeHTaMM (OTTeNbULIMH TpaH3sucTopamu uu HC), pacnona- Tax MX Ha TOHt Ke NOMMO%KKe HM COeEAMHAA C INCHOUHBIMH 9eMeHTA- mu, Torga nonysaerca UC, xoropyi nassrsaior rHOpuqnoit. Pudpudnaa HC (unu TMC) — sto Muxpocxema, koTopan mpen- cTaBaaeT co6oit KOMOMHAIIHI0 INeHOUHBIX MACCHBHBIX 9/1eMCHTOB H AKTHBHBIX KOMIIOHeHTOB, pacnonokenHslx Ha Obmuelt AHONeKTPH- ueckolt nognomKe. JIMcKpeTHbIe KOMMOHEHTHI, BXOAHIIMe B COCTAB rnOpuguoit MC, sasbrBaioT HasecHdlmu, HOAYePKMBAA ITHM UX o60- COOMeHHOCTL OT OCHOBHOTO TeXHONOTMUeCKOrO WAKA MOMyieHHA TIMeHOUHOH yacTH CXeMBI. Emme oguu Tun «cmemanusix» MC, 8 koropprx coueTaiorca m0- AYMPOBOAHMKOBHIe M INeHOUHbIe MHTeTPaMbHbIe OCMeHTHI, HA3bI- BalOT COBMeIICHHEIMH. Coemewennaa HC — o10 MuKpocxema, y Koropolt aKTHBHEIe 9N@MEHTEI BEITIOAHEHBI B TIPHMOBePXHOCTHOM Coe TOYIPOBOAHH- KOBOrO KpucTasma (Kak y noynpoBogHMKosoit MC), a naccuBHBe HaHeCeHI B BUC IWeHOK Ha NpesBapHTeIbHO Us0NMpPOBAHHYI0 110- BepXHOCTs TOTO 2xe KpUCTamaa (Kak y MeHouHol MC). Cosmemennure MC ssirogus! Torga, Korga HeOGXOAUMBI BBICO- Kue HOMMHAJbI MU BRICOKaA CTAOMBHOCTS CONPOTUBIeHHH HM eMKO-1.2, Hurerpameisre cxenst 15 cTeit; aru TpeOosaHHa nerue oOecneuMTD C NOMOMIbIO NNeHOUHEIX sJleMeHTOB, YeM C NOMOMIbIO NOMyNpOBOAHMKOBEIX. Bo scex Tunax MC mesxcoequnenua aleMeHTOB OCyIecTBAIOT- CH C TIOMOMbI0 TOHKMX MeTaJIIMUeCKMX MONOCOK, HallbeHHEIX WIM HAHeCCHHBIX Ha MOBEPXHOCTS MOA0%KKM HB HYKHEIX MeCTAX KOHTAKTMPYNWUMX C COC#AMHACMBIMH 3IemeHTamu. IIpomecc HaHe- CeHHA STHX COCAMHTENDHBIX NOJIOCOK HasbIBaIoT Memaanusayueil, A CAM épHCyHOK» MexkcoequHeHMit — memannuveckot pase0dxot.. Tlozynposoymnxossie HC. B nacrostyee spema pasnmuator creny- ion|ve nomynpozoguuKosse MC: 6unozapuere, MOI] (merana-oxn- cen-noaynposoguMk) u BMMOII. Mocnegune npezcrasnsior co6oit coueTaHHe IlepBbIX AByX, MH B HHX KOMOMHMPY10TCA NOMOKMTeMDHEIC Mx KauecTsa. Texnonorma nonynposoguuKostrx MC ocHopava Ha meruposa- HMM MO yNpoBoA_HMKoBON (KpeMHHeBOI) NIACTHHBI MOOyVepeAHO AO- HOPHBIMM M AKi[elTOpHEIMM MpHMecaMM, B pesy.ibTaTe yero TOA HOBepXHOCTHIO O6pasyi0TeA TOHKUe COM C PasHEIM THOM IIpOBO- MMOCTH M pP—N-nepexognl Ha rpanurax coe. OTAeNbHBIe COM HC- MOMb3y!0TCA B KayeCTBe pesHCTOpOB, a p—N-Mepexoysr — B AMOA- HBIX H TPaHSHCTOPHBIX CTpyKTypax. Jlermpopanve TiacTHHbI MPHXOAMTCA OCYIIECTBAATR OKaIbHO, T.e. Ha OTACMbHBIX YUACTKAX, PasfeNeHHBIX BOcTaTOUHO GomBUIMMH paccrosHuamu. JlokaibHoe JerMpoBaHve OCyUjecTBMeTCA Cc N0MO- IBIO CHeNMANIbHLIX MACOK C OTBepcTMAMM, Hepes KOTOpHIe ATOMBI TIpuMecu NpoHMKawT B MnacTMAy Ha HyKHBIX yyacTKax. IIpu usro- TOBIeCHHM NMo.ynpopogHMKOoBEIx MC poms mackm o6pruno urpaer Ilenka AByoKuCH KpemHUA SiO,, NoKpbIBaioIan MOBepxHOCTS kpeM- Hvesoit nactuust. B sTolt mrenKe cnermambHbIMM MeTOAaMM rpaBy- pyeTca HeoOxOqHMaA COBOKYIIHOCTL OTBepCTHit pasMUHOl (popMBbI HJM, KaK TOBOpAT, Heo6xo_uMlit pucynox (puc. 1.4). Orseperna B MaCKaX, B YACTHOCTH B OKMCHOM Menke, HasbIBaloT OKHaMU. Oxxa, Macka Puc. 1.4, OkneHaa Macka ¢ OKHAMM AJM TOKATBHOTO erHponaRMa16 Fnapa 1, Upeamer muxpoonerrponari Tenepb KpaTKO oxapakTepusyem cocTaBHBie yacTH (a1eMeHTBI) nlomynposogumKossix AC. Ochosxnmm snementom GunonapHerx AC ABAAeTCA N—P—N-TpaHsncTop: Ha eTO MsTOTOBseHMe OpHeHTUPyeTCA Bech TEXHOMOrMuecKui WHKA. Bee Apyrue 91eMeHTBI AOJ2KHBI U3rO- TABNMBATBCA, MO BO3MO7KHOCTH, ORHOBPeMeHHO C STM TpaHSHCTO- pom, 6e3 AonoAHMTeNDHEIX TexHONOrMueCKUX oOnepanuit. OcuosHnim oiementom MJIII MC asnaerca MIIII-rpansucrop. Usroropnenue Apyrux oJleMeHTOB Tak2Ke No_CcTpavsaetca Nog ba- 30BbIM TpaHsucTop. OnemenTH GunonapHoi MC neo6xogumo Tem mim WHIM CII0cCO- 6om us0uMpoBaTs Apyr oT Apyra c Tem, uTOGsI OHM He BaaNMOgelicT- BoBaIM Yepes KpucTast. Onements1 MOI MC ne nyxgarorca B chenManbHOit u30nANun Apyr oT Apyra, Tak Kak B3aMMofelicTBHe MexK,Y CMe>KHBIMH MOII-rpaxsucropamu He uMeer Mecta. B srom — ofHO 43 PlaBHEIX mpeumyuyects MOII MC no cpasnenmo c 6unonapHEmu. Xapakrepuaa ocobennocTs nonymposoquukosyrx MC cocrout B TOM, UTO CpeAM MX oeMeHTOB OTCYTCTBYIOT KaTYMIKM MHAYKTHBHO- ctu H, Tem Gomee, Tpanchopmaropsi. ITo o6bacHAeTCA TeM, UTO HO cx Top He yfa10cb HCHONLZOBATD B TBEpOM Tese Kakoe-1H60 pH- svueckoe ABIeHHe, SKBUBAeHTHOe aeKTpOMarHMTHOH MHAYKUUH. Tlostomy upu paspaborxe MC crapaiorca peanusopaTh Heobxogu- Mylo byHKIM0 6e3 MCnOnDsOBAHMA MHAYKTuBHOCTeli, uTO B Gonb- umucrse cryyaes yaaetca. cmv 2xe KaTyIKa MHAYKTMBHOCTH WIM TpaHCopMaTop NpHHUMIMAIbHO HeOOXOAMMbEI, HX MPHXOAMTCA uC- NOMb3OBATE B BU HABECHEIX KOMIOHEHTOB. PasMepsl KpucTamNOB y COBpeMeHHEIX MOMyMpOBOABMKOBEIX MC nocruraior 20 x 20 mm”. Yem Oonsute nmomage Kpucrasa, Tem 6o- ee coxkHy10, 6oee mHoroaemenTHy10 MC moxkHO Ha HEM pagMec- tuts. [pu oqnoii u Toit xe NnoMjanM KpHcTanna MOKHO yBeNMUnTS KONMYeCTBO OJeMeHTOB, yMeHbIlai MX pasMepbI M paccToaHuA M@KAy HUME. @yukynouanbuyw cnoxHocTs UC mpunaTo xapakTepusoBaTs cmeneHbl0 unmezpayUU, T.e. KONMUECTBOM 9eMeHTOB (uae BCero TpaHsMcTOpoB) Ha KpucTamme. MakcHMadbHan cTelleHb MHTerpa- yuu cocrasnaer 108 snementos Ha Kpucrasne. [lopsumenne crere- HM HHTerpaun (a BMeCTe C HelO M CNOX*KHOCTH yHkuoui, BRINOTHA- empix MC) — ogua ug rmaBHbix TeHAeHIMi B MMKpOaeKTpoHUKe.1.2, Hurerpansnsie cxemat ; Ww [iia KomwuecTBeHHO# oleHKM cTeneHM MHTerpauMM McnonbsylOT yenosnniit Koahpunvent k = 1gN. B sasucumocra or ero sxayenna wter- PANBHBIe CXeMBI HaSLIBAIOTCH T10-pasHOMy: k<2(N < 100) — unrerpansuan cxema (HC); 2 5(N > 10°) — cnepxomman uurerpanuat cxema (CBUC). Hyoke mpupegentl anriniickue o6o3HauenHa HM MX pacmudpos- KM: IC — Integrated Circuit; MSI — Medium Scale Integration; LSI — Large Scale Integration; VLSI — Very Large Scale Integration. Kpome crenenu MHTerpalmu, ucnompsyior euje Taxol moKasa- Telb, KAK NAOMHOCMs ynakoeKu — KOMMUECTBO oeMeHTOB (uae BCerO TpaHsHCTOPOR) Ha EMMHMIY NNowWaqu Kpucranna. IToT noKa- 3aTeb, KOTOppIit XAapakTepu3yeT riaBHbIM O6pasom ypoBeHs Tex- HOJIOTMM, B HACTOAINee BpemA cocraBsaeT no 500-1000 anemen- TOB/MM?. Tu6puausre HC. [lnenounpie, a sHaunt, u ru6puquere MC B 3a- BHCHMOCTH OT TeXHOMOrHM MsroTOBMeHMA AeATCA Ha TONCTO- 1 TOHKOIMeHOUNEIC. Toncronnenounie TMC (o603Hauum ux Tc! MC) usrorapmuparor- ca BecpMa npocro. Ha AuseKTpwueckyio W1aCTHHKY-NOAMOKKY Ha- HOCAT nacme: pasHoro cocraza. II[posogamme nacrst obecneumBalor Me?KCOeqMHeHMA BJeMeHTOB, OOKNAAKH KOHAeHCATOPOB HM BBIBOALI K UITSIpbKaM Kopnyca; pesHcTuBHEIe — NMony4enue pesucropos; 7Ma- AeKTpwueckHe — UZOANHIO Mexkay OOKNAaAKAMM KOH_eHCAaTOpOR uw o6myi0 samuTy noBepxHocTH rorosoit TMC. Kaxxgrit cnoit yomKeH MMeTb CBOIO Kon*pMrypanuio, cBoi pucyHor. Tlostomy up usroTos- NeHMM Ka2koro COA MacTy HAHOCAT yepes CBOIO Macky — mpaga- pem — c OKHaMM B TeX MeCTaX, Kya AONKHA NOMACTE Macta ZaHHO- To clos. [locne sToro IpukNeMBaloT HaBeCHEI€ KOMMOHEHTSI H COe- AMHAIOT UX BRIBOA C KONMAaKMHIMU nNAOWVAIKaMU. Toxkonmenounsie PMC (o6osHaunm ux TKTMC) usrorapiusawr- ca m0 Gonee cnomHow TexHonoruu, uem Tc!'MC. Kaaccnueckan TOHKOMNMeHOUHAA TeXHONOTMA XapaKTepHa TeM, UTO TIMeHKH OCa>xK- WawTcA Ha MosoxKKy M3 ras0Boi cbasbI. Bsrpacrus ouepequy10 IJl@HKY, M€HAIOT XMMHUeCKMM COCTaB rasa MH TEM CaMbIM 9.1eKTPO- buswueckue cBoiicrsa cnegzywmel nienuu. Takum o6pasom mooue-18 Tnawa 1. [peqmer muxpoomextpommnn peuHo NoxywaioT MpoBopammMe, pesMcTuBHEIe M AMOMeKTpuyecKue cstou. Kondburypayua (pucysoxK) kaxkgoro cs10m Olpegenaetca 1n60 Tpadapetom, Kak B ciyuae Tc!MC, nm60 macKoli, nogo6uo oxnc- Hoit MacKe B MomynpoBogHuKoBEIx MC (cm. puc. 1.4). Hasecubie stementst 8 TkIUC, xax w B Tc!MC, npuxnensawr Ha MOBePXHOCTb POTOBOM M1eHOuHOH uaCTM CXeMBI HM COeAMHAIOT C COOTBeTCTBYIONIHMM KOHTAKTHBIMM TolaqkaMu oeMeHTOB. Crenex» uuterparuu TMC ue Moker oleHHBaTECA Tak oKe, KAK B cayuae NomynpoBoqHMKoBEIx MC. Tem He menee cyiectByeT Tep- MHH Oo2suaa THC (unu BIC), xoropstit osHauaer, uTo B cocTaB THC B KatecTBe HaBeCHBIX KOMIOHCHTOB BXOJAT He OTAeNbHBIC TpawsMcTops, a nembie NoxynpopoguuKospie MC. 1.3. OcoS6eHHocTH HHTerpanbHBIX CxeM Kak HOBOTO THMa aieKTpOHHbIX MpHoOopoB Tlockonpxy AC, nogo6uo rpausucropy, mpexcTaBser co6oit KOH- CTPyKTHBHOe efMHOe ee, BLITONHAeT ONPeAeNeHHYy!O PYHKIMIO 1 AOWKHA yROBNeTBOpATE ONpepenenHEIM TpeboBaHuAM pm McHEITa- HMAX, MOCTaBKaX M OKCIIyaTaMM, OHA OTHOCHTCA K paspamy aeKT- poHHEIx npuGopos. O_Hako No cpaBHeHHIO C AHO70M, TpaHsHCcTOpoM u v.1. UC ssnaetca KauecTBeHHO HOBEIM THOM npHGopa. Ilepéan — z2naenaa oco6ennocms HC Kak sneKTpouHoro mpu6o- pa COCTOUT B TOM, UTO OHA CAMOCTOATeABHO BLINOMHAeT 3aKOHeH- HY10, YACTO BeCbMa CIOMRHY10 PyHKNMIO, Tora Kak oeMeHTapHEIe 9NeKTPOHHEIe MpHOops! BbINOMHAIOT aHANOTMUHy!O PYHKIMIO TONb- KO B aHcamOye c ApyruM¥ KOMMOHeHTamu. Hanpumep, orgepHEit TpaH3sucTop He MoxeT OSecne4uTS ycHeHMe CHTHaTa HM sanoMH- Hanne uHdopmauun. [Ina sTOrO HYKHO M3 HECKONBKUX TPaH3HCTO- OB, pesMcTopos HM APyrHX KOMIMOHeHTOB coopars (cllaaTs) coorBeT- crByiomyt0 cxemy. B MHKpooeKTpoHuKe 2ke ykasaHHbIe byHKqHN BBINOHAIOTCA OFHUM IIpu6opom — MHTerpasbHOi CXeMOM: OHA MO- ‘Ker ObITh YCHIHTeeM, 3aNOMMHAIOIIMM YCTPOMCTBOM mM T.1. Bmopoi eaxcnoit oco6ennocmvi HC aBisetca To, UTO MoBblitie- HMe (PyHKGMOHAIDHOM CNO%KHOCTH sTOrTO NpHOopa M0 cpaBHeHHIO C 9J@MeHTAaPHBIMM He COMPOBORKAaeTcA yXyAWleHWeM KaKOro-u60 M3 OCHOBHEIX HoKasaTeseit (HagexKHOCTL, CTOHMOCTE H T.1I.). Bosee Toro, BCe STH MOKasaTeaM yay4ulaioTcA. Tlockonpxy rabapursi u Macca Mpocrerx u cpegznux MC 6nu3Kn K radapuTam M Macce AUCKpeTHBIX TPaHSHCTOPOB, MOXKHO CUMTAaTb,1,3. Oco6ennocra HATerpanDnsIx cxem 19 uo B HepBOM NpHOMWKeHUM BEIMPpLII 10 sTHM NoKasaTenAM mpH Tepexoge OT AUCKPeTHEIX CXeM K MHTerpasbHbIM ompeyensnerca cTeneHbio MHTerpayMM M MoxKeT AOcTHraTS coTeH uM THICAY pas!. Tlockombky HayexkHOCTh paborsi NomynpoBoARUKOBOrO Upuoopa B allllapatype onpeselseTca uperkae BCerO KOMMYeCTBOM MaAHEIX 1 (e Meusimeit crenenm) cBapasrx coequnennii, ro MC, y xoropsix MeKCOCAMHEHMA 91eMeHTOB OCyINeCTBIAIOTCA yTeM MeTasnusa- uu (T.e. 6e3 Naiiku u cBapKu), obmagaioT 3aBeqOMO MoBLIWeHHOI Ha@KHOCTHIO TO CpaBHeHHIO C AUCKpeTHEIMM CXeMAaMH, BEINOHA- ToujuMu Ty Ke byHKimo. [lo mepe yBenmueHna crenenu uHTerpa- WWMM 9TOT BRIMTpEIL BospacTaeT. Tlockonpry sce anementst MC usrorapmmpaiorca B enMHom Tex- HOMOTH4ECKOM WMKNe, TO KONMYECTBO TexHONOrM4ecKHX onepaluit M0 MX MSPOTOBNeHMIO He HaMHOTO MpesbilaeT KONMUeCTBO ONepa- Mi 20 H3roTOBMeHHIO OTAeNbHOTO TpaHsHcTopa. IlosTomy cTou- moctTs MC npu npownx paBHeix yclosuax 61M3kKa K cToMMOCTH Of- HOTO TpaH3HcTopa. 3HaUMT, B 3aBMCHMOCTH OT cTeleHM MHTerpa- IMM (MAM, TOUHee, OT WIOTHOCTH ylakOBKM), CTOMMOCTR OAHOTO anementa MC no cpaBHenuio co crouMOcTHIO aHanorMuHorO AHCK- peTHOTO KOMMOHeHTA MOMKET OBITS B COTHH pa3 MeHbIte. Takoe 2Ke COOTHOMIeHHe UMeeT MeCTO MexKay croumocTBIO MC u croumocrby AHAJIOTHUHOM CXeMEL, BLITOIHEHHOM Ha AMCKpeTHbIX KOMMOHeHTAX. Tpemba ocoGennocme HC coctour 8 npeqnouTuTenBHOCTH akTHB- HBIX 9JIeMeHTOB MepeA NaccHBHbIMH — MIpMHNMN, AMaMeTpanbHO TMPOTHBOMOMOKHEIM TOMY, KOTOPEIii CBOMCTBeH AUCKpeTHOH TpaHsH- cTopHoit Texuuke. B nocnequeii akTHBHbIe KOMMOHeHTHI, OcobeHHO Tpan3ucTopsi, HawOonee Aoporve, H NOTOMY ONTHMHsallMA CxeMBI IIpM Mpouux paBHBIX YCMOBMAX COCTOMT B yMeHbIeHUM KONMUeCTBA AKTHBHEIX KoMMOHeHTOB. B MC geno o6cronT unaue: y Hux saqana CTOMMOCTp He 3leMeHTA, A KpHCTasNa; NosToMy etecoobpa3sHo pas- MellaTb Ha Kpicrasiie Kak MOPKHO Gonpie aemeHTOB C MHHMMasb- Holt niomagp0. MHHMMasbHy1 TAoWaab MMeOT AKTHBHEIe o1eMeH- TEI — TPaH3HCTOpbI M AMOALI, a MAKCHMAaNDHYy1O — maccuBubie. Cre- Aoparenbuo, onTumManbuaa MC — sro MC, y xoropoit cBegensi kK MHMHUMYMY KONMYeCTBO H HOMHHAaJILI pesHcTopos H, OcobeHHO, KOH- RexcaTopos. 1 Townutit suntrpuin » raGapurax « Mace TpyqHo OeHUTS TeoperuHeCKMM pacte- rom, Tax Kax HC uMetor apyrHe TuMopasMepst KOpMYCOB 4 GostELlee YHENO BLIBO- Jon, Yem aneMeHTapHLIc KoMMOHeHTEI.1. Hpeamer muxpoonexrponici Yemeepmaa ocobexnocmb HC caasana c TeM, UTO CMeXxKHBIe 3,1e- MeHTBI PACHOMOKeHBI APyT OT Apyra Ha PaCCTOAHHM, H3MepHeMOM B MKM WIM fonax MKM. Ha TakHX ManbIx paccToAHMax pasiMune auleKTpousMueckux CBOCTB MaTepMana MaNOBepoaTHO, a creqOBa- TeIbHO, MasOBepOATeH HM 3HaUMTeAbHBIit pasbpoc MapameTpoB y CMe7KHEIX otemenToB. Muaue rozopa, napaMeTpbI CMe:KHLIX o1eMeH- TOB B3aMMOCBA3aHbI — KoppeMpoBansi. ITa KOppeAUMA COXpaHa- eTca M Ip wsMeHeHHM TemMepaTypsI: y CMexKHLIX 91eMeHTOB TeM- TepatypHule Koot@uNHeHTEI MapamMeTpoB NpaKTH4eckH OAMHAKOBLI. KoppenaHa MexkKy WapaMeTpaMM CMe2KHBIX 9leMeHTOB MICHOMB3y- eTca Ip npoexTuposanuu HexoToprx MC c yenbio cHM3uTb BInA- Hue pas6poca napamerpos H usMeHeHuit TemmlepatypL. Tu6pugusie MC toxe npencrapasiot coboit Tun s1eKTPOHHEIX npu6opos. OqHako HanM4Me HaBeCHDIX KOMNOHeHTOB AemaeT Ux Me- Hee CIenMpHUHEIMM, Jem MonynposoguuKosnte MC. Ocraerca B cune dynqamentamsnaa uepta seskoi MC — yxnKnuonanpnan coxKHOCTS npuoopa, UTO, KaK M MIpH ucnorbsoBaHMM MonynpoBog- nukopbix MC, xauecrBeHHo MeHseT CrpyKTypy aNeKTpOHHOH anna- patypp. Cneyuduroit PMC wax mpuéopa moryt 6biTp aH60 BEICOKMe HOMMHAJIbI Pe3MCTOPOB M KOHAeHCATOPOB, HENOCTKUMBIE B Tlony- mposoguMKogbix MC, an6o npeyusHoxHocTb pesucropos, 160, Ha- Kone, NOBLIMeHHaA PYHKMOHAIEHAaA CnomKHOCTL. TMC — ato ru6- Kui, qemessrit, onepaTuBno npoekTupyemsiit Tam MC, xopomo npu- cnoco6ieHHBbIit K pellleHMi0 ClelMaNbHbIX, UaCTHbIX saay. 1.4, Kpatkuit uctoprueckuit 0630p Ucropua MUKposieKTpOHHKM -—— ‘uacTh HCTOPH TexHHuecKoro mporpecca nocnequux net. YuacrHuKu ee — B MepBy10 ovepend Teopueckue paboTrHuKH — yueHbie, us0bpeTaTenm um MHKeHepEI. Pesybrarbi pasBuTHA MHUKPOoTeKTPOHUKH B sHauMTenbHOlt crene- HM YBeIMUHIM BOSMOKHOCTH HAYKM M TeXHUKM, yckopuM MHOrMe Mponeccel, cBAsAHHBIe C HayYHLIMM MccHeyoBaHuAMM uM paspabor- Kol HOBBIX BEICOKUX TexXHOMOrMit, CyecTBeHHO MOBbICHAM Mpous- BONMTeNBHOCTS Tpyqa BO MHOFMX OTpacnax MpoMpluieHHOcTH, baHTacTuuecKM paclIMpHIM BO3MOX%XKHOCTH MHOpMalMOHHBIX CHC- TeM M OKasamM CepbesHoe BAMAHMe Ha Mporpecc pasBuTuA YesOBe- uecTBa B Wenom. Mxorga ucnomp3yeTca marke HOBOe HasBaHHe Co- BpeMeHHOrO Tepvosa HCTOpHN YerTOBeueCTBa — BeK HH*OpMaTH3a- IMM, M B 9TOM TOxKe OrpOMHHIM BK.1ayq MMKPOoeKTPOHUKH.1.4, Kparsmit ucropwueckmit 0630p 21 ITepévtm crapTOBLIM WaroM K MHKPOa/IeKTpOHMKe, HECOMHEHHO, Ob Mepexog OT 9eKTPOHHEIX BAKYyMHEIX JaMI, B KOTOPEIX NDH- MeHAJCA NPUHYMN YUpaBIenUA 91eKTPOHHSIMM MOTOKaMH B Bakyy- Me, K TBepAOTebHBIM IIpMOopaM, re HCHONbZ0Ba0Ch yIpaBlenue ABYKeHHeM NOABWKHBIX HOCHTeNei B MOyIpOBOAHHKe. OTOT mar 6pm cena B nabopatopun Bell Telephone Laboratories B 1948 r. M 3aKMIOUaCcA B M306peTeHuM TpaH3ucTopa. Koukypexiua MexKay BAKYYMHBIMM 9eKTPOHHEIMY JlaMiaMy 1 TpaxusucTopamy composoxzanach 6ypHsrmmu AebaTamu cpequ cnemy- ANMCTOB H, B HepBy!0 Ouepefb, CBA3aHA C GONDILIMM KoMUeCTBOM yclellHo eiicTByloWjel seKTpOHHOM alllapaTypbl, aBHbIM 9Je- MeHTOM KOTOpOi 6bLIa seKTpoHHad sama. [lponspogcTBenueiit MK Takoit ammapatypbr 6pm xopomi0 OTNaxKeH M OHA NpHHOCcHNAa Gombiy npHosi1b Npomsso_uresiam. Enje 4Be OCHOBHEIe NPHYKMHEI cnoco6cTBosain sTomy. ['napHad 3aK0¥ualach B HeCOBepmeHCTBe TeXHONOTMM M3TOTOBMeHUA TpaH3ucTOpoR, MpHBoOAAteit K HecTabu- JbHOCTH XapakTepucTuk NpHoopa, HeMOCTAaTOUHOL ero HaqexHOCTH BEICOKOH cToumocTu. J[pyran cBAgaHa C HeIPHMATHeM HOBOPO IIpH- 6opa 6ombIIMHCTBOM CHeljMamucToB, BOCNMTAHHEIX Ha IpHMeHeHun B 9IeKTpOHMKe BaKyyMHBIX tamn. HegoctaTKu nepsbix obpasnoB TpaHsMCTOpoOB YKpelLiaaM yBepeHHOCTS paqMOnHKeHepos B IpaBH- SbHOCTH UX COMHEHHH OTHOCKTeBHO TPaH3HCTOpOB. Tlepspie Tpan3uctops! 6bLim TOUeUHBIMH HM, B AOMOMHeHMe K yKa- 3aHHBIM BbIlle HeAOCTaTKaM, OOaqasid BLICOKMM YPOBHeM LIyMOB. Marepvanom qua ux M3roTOBseHuA OBL, B epBy10 Ouepemb, repMa- Huit. [lepexog oT TOueuHBIX TpaHSMCTOpOB K TIOCKOCTHBIM 110 Bpe- MeHH CoBlas Cc NepexogqOM OT repMaHMA kK KpeMHMWO UM Gb OCylecT- Bylen B 1953 r. na @upme Texas Instrument Incorporation. Kpem- HMeBbIM TpaHSHCTOp C BbIPaxKeHHBIMM p—7-TlepexowaMM losBOMT yBeIMUTb MOWHOCTh TpaH3ucTopa. Ilozquee mpomecc usroros.ie- HMA TpaHsucTopa, OCHOBAHHBI Ha AMbhysuH, NosBoNMA HananATD TPyNM0B0e MpousBOACTBO TpaHsucTOpOR, YTO HeMeNeHHO CKasanoch Ha yMeHbIMeHUM CTOMMOCTH sTux mpuGopos. B 1956 r. rpem amepu- KaHcKuM yuexpm, Mlokau, Bapquny u Bparteituy, 6sina mpucyx- ena Ho6emesckan Npemua No dusuke 3a UCCTexOBAHMA Nomynpo- BOAHUKOB M OTKpEITHe Tpan3sucTopHoro scdekta. K sromy spemenw yake CTasO ACHO, UTO BO MHOTMX OTpaciAX NPUMeHeHHe TpaHsucTo- POB CHILHO NOTeCHUT MAM MaxKe SaMeHHT seKTPOHHYI0 Jammy. Bmopoit — pemazounii war — noasnenue MHTerpasbHBIx CxeM. Ileppaa uxTerpanpHaa (GunonapHaa) cxema Opa M3roTOBMeHa B22 Tapa 1. Tpeamer murkpoonertpommiit 1961 r. Ha bupme Fairchild Semiconductor u npeycTasnana co6oit Tpurrep, cocToOaLIMit M3 YeTHIPex OUNOAAPHEIX TpaHsHcTOpoB M AByX pesucropos. Yoxe 8 1963 r. dupmoi RCA 6xina BbIlyujeHa NepBan MOII uuterpambHad mormueckan cxema, B KOTOpOoi OnIN0 16 MOII-rpansucropos. Brrerpomy pacnpoctpaneHuio MHTerpasIbHEIX cxeM cnoco6cTBoBasla xoporlo0 orpaboranHas TexHOvlorMueckad Oasa Ip rpynmoBzoM MpousBoycTBe TpaHsucTopoB. Takum o6pasom, c MoMeHTa u306peTeHHA TpaHsHCcTOpa AO UsTO- TOBNCHMA MepBbIX MHTerpasbHBIX CXeM, NOCTYNMBLIMX Ha PbIHOK, mpouno uyts Gonee 10 ner uw fanee mocnegoBAaNO OUeHD GyicTpoe PasBUTHe MUKpOaeKTpoHUKH. B nauane cBoero IyTH TpaHsHCTOpbl MpHMeHANHCh, P1aBHbIM 06- pasoM, AJIA BOCHHBIX ese, Tak Ke Kak, BIPOYeM, H IpepllecrBo- BaBLUIMe MM 9leKTPOHHEIe NaMUBI, H NocnexyiomMe 3a HMMM HHTer- pasibHble cxembI. 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