Safe Rahat Mamta To nt See rt EVIDENT Industrial Microscopes What is EVIDENT? OLYMPUS Surface Roughness Measurement—Terms and Standards Dverview Home | Products| Laser Confocel Meroscopes | Surace Roughnes Mesauremant | Sua Roughness Meseurmant—Terms and Stender Various Measurement Instruments Are Capable of Measuring Surface Roughness Surface roughness measurement instruments can be categorized into contact-based and noncontact-based instruments, ‘There ate pros and cons to both methods, and itis important to select the most suitable instrument based on your application, Measurement Method instrument Contact-based —_—_ Stylus roughness measurement instrument Coherence scanning Interferometers Laser microscope Non contact-based ‘measurement Digital microscope ‘Scanning probe microscope (SPM) ocivenympu ne cmionmalgyraceiget mseanansoaome Advantages Enables reliable measurement as the sample surface is physically traced with a stylus ‘+ Has been used for along time + Quick measurements + Enables sub-nanometer ‘measurement of smooth surfaces at low magnification High angle detection sensitivity, enabling analysis of steeply incined slopes + High XY resolution, providing for clear, high-contrast images + Enables many kinds of observations and a simple level of measurement + Enables measurement of sub- nanometer surfaces + Enables measurement of samples with a relatively high aspect ratio Limitations Limited to measuring a single section with a reduced quantity of ‘measurement information Incapable of measuring adhesive surfaces and soft samples Difficult to precisely positon the prove Incapable of measuring details smaller than the stylus probe tip diameter Has trouble measuring rough surfaces Has trouble measuring samples with significant dliferences in brightness Low contrast makes it ficult to locate the areas subject to measurement Low XY resolution Incapable of conducting sub-nanometer measurements Inferior height discrimination capabilites at lower magnification rates [Not uitable for measuring component roughness (suitable for measuring waviness) Incapable of measuring sub-nanometer irregularities Low XY resolution les dcut o precisely position the probe Slow [Not suitable for measuring um irregularitiesase as Safe Rants Memutorar To nt Sata lrg Solutions of the OLSS000 Microscope for Surface Roughness ‘Advantages over a contact stylus ver Advant ‘SPMs) International Standardization ‘The International Organization for Standardization (ISO) is promoting the designation of standards for areal measurement, and many basic standards are have already been adopted. The following table lists primary standards applicable tothe profile and the areal method. ‘Tne profile method standards were created assuming the exclusive use of contact probe-based measurement instruments ‘The standards designated unified measurement condition requirements, including evaluation length, cutoff, the radius ofthe probe tip, etc. In the case ofthe areal method, various measurement instruments based on different operating principles are used, making it impossible to introduce unified measurement condition requirements. Accordingly, users are required to determine the suitable measurement conditions that correspond to the purpose of the evaluation. Hints for determining the measurement conditions are described in “Essentials of Surface Roughness Evaluation Using Laser Microscopy." Primary standards of the profile and areal methods Profile method type ‘real method type 180 4287-1997 Surface texture parameters, 180 13565:1895 10 25178-22012 180 12086:1996 180 4288:1996 Measurement conditons 180 25178-3:2012 180 3274:1996 Fiter Iso 11562:1998 150 16510 series Categorization of measurement Instruments - 15025178-6:2010 Calibration of measurement Instruments 180 12178:2000 Under preparation Standard tost pieces for calibration 150 5436-1:2000 18025°78-70:2013 Graphic method 180 1302:2002 18025178-1:2016, Technical Terminology and Descriptions Prof method essential terms lI Areal method essertal te Essentials of Surface Roughness Evaluation Using Laser Microscopy How to se objective lense l| Method of iter application ‘orien mpi comsnmatelgyree cues macnn ortasa se Safe Rants Mentor To nt Se Ort ‘The functionality of the respective fiters, the combination of fiers, ‘and the size of the fiters used in surface feature analysis are as described below: ‘The fering conditions are determined in accordance with the ‘objectives of the analysis. Filter functionality In conducting surface feature parametric analysis, the application of three types of fiters (F operation, § filer, and L fier) should be: ‘considered forthe surface texture d with the objectives ofthe measurement, 1cquired in accordance Filter combinations =: Not applicable ©: Applicable Filter size (nesting indices) restrictions apply one ympuincominmatelgyircecgesineaeranentsratemsandaeei! S titer Liter F operation (Shortcut fiter) | (Long-passfiter) Nominal form Measurement components of | noise and small samples (spheres, feature cylinders, curves, | components are tc.) are eliminated eliminated PO\ SRB. Emnaton ofsmall Elita of wanes ey ‘eae D/O. am Waviness ‘components are eliminates Binnaon of phere etuee Eight combinations are availabe for the three fiers (F operation, $ fiter, and Liter). Select the combination of fters to be applied referencing thelist of measurement objectives indicated in the folowing table. When When «liminating When ‘small eliminating eliminating When Sprerea,oudtness Wren spheres, | When. elimina ‘components When ih Tiwating [coves and | etenat TTS curves, and SOO en eliminating curves, and eliminating smal she ean | and noise, Intended | 2242"'9 giminating spheres, other form — small roughness SMI sohees, purpose _ waviness curves, and components roughness components, °°" ‘curves and acquired component other form in aattion to components | roise, and S078" other eature data " s | me smal components the and noises | waviness ‘components waviness components |TV || addon to components component the Ps and noise ‘component Feoperation | - - ° ° - - ° ° S iter - - - - ° ° ° ° Litter - ° - ° : ° - ° Filtering strength (separating capabilites) is referred to as nesting incices (Liters are alternately called cutots). + The filter eliminates increasingly more detailed feature companents the larger the nesting index value is + The L filter eliminates increasingly more wavinass feature components the smaller the nesting index value is Although the use of numerical values (0.5, 0.8, 1,2, 25,5, 8, 10, 20) are recommended when defining nesting index values, the folowingsca as Sule Ragone Memuroert—To nt Sree ret + The nesting index value for S fters needs to be specified to exceed the optical resolution (= focusing spot diameter) and at least ‘three times the value ofthe data sampling interval ‘+ The nesting index for the L fter needs to be set to a value smaller than the area of measurement (length of the narraw side of the rectangular area) Thickness and Flaw inspection Industriat Mieroscopes XRF Analyzers Support Solutions Laser Confocal Mxescopes Henanld and Portable xP ContactUs Flaw Detectors Posted Arey Flaw Digi Mcroscopas Benctop and Showroom XRF Service Slutons| Tansee Gauges Cheatin Ini XRF Analyse sofware sal Scanners AR Misoscopes Sofware Digtl Cameras Image Analyte Software Videoscopes and Borescopes Mero Specopotametar Frorscopes Integration CCopyrght EVIDENT, A ight reserved “Terms OF Use [Priacy Note | Cookies | Cookies Setings | About Us| Siomap orien ympuincominmatlgyircecagvesineaeranentsratemsandaeei! ‘Te Obmpus Serie Cloud Corlance and Eihies at dont Discontinied and Obscat Products Resources “ural White Papers