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6.1 INTRODUCTION
Many reactions and processes important to the processing of metals rely on the transfer
of mass —> either within a specific solid or from a liquid, a gas, or another solid phase
o This is accomplished by diffusion
Diffusion = material transport by atomic motion
Diffusion couple = joining bars of two different metals together, so there is intimate
contact between the two faces
o Used to demonstrate diffusion
o The couple is heated for an extended period of time (high temp but below the
melting points of the two metals) then cooled to room temp
o Results show the two metals will be separated by an alloyed diffusion zone
M = mass
A = the area across which diffusion is occurring
t = elapsed diffusion time
o Units of J [=] kg/m2•s or atoms/m2•s
Steady state diffusion in a single (x) direction: flux is proportional to the concentration
gradient (dC/dx)**
Under conditions of nonsteady state, we use partial differential equation known as Fick’s
second law
o It can be noted that the log of the diffusion coefficient has a linear relationship
with the reciprocal of temperature
Predeposition treatments are normally carried out within the temp range
of 900ºC to 1000ºC for typically less than 1 h
o (2) Drive-in diffusion
Transports impurity atoms farther into the silicon in order to provide a
more suitable concentration distribution without increasing the overall
impurity content
This treatment is carried out at a higher temp – up to ~1200ºC
Carried out in an oxidizing atmosphere to form an oxide layer on the
surface
Diffusion rates through this SiO2 layer are relatively slow, so very few
impurity atoms diffuse out and escape from the silicon**
6.7 OTHER DIFFUSION PATHS
Atomic migration may also occur along dislocations, grain boundaries, and external
surfaces
o These are sometimes called short-circuit diffusion paths
o Rates are much faster than for bulk diffusion
In most situations, short-circuit contributions to the overall diffusion flux are insignificant
o B/c cross-sectional area of these paths is extremely small**