EE672 Spring 2023-24

Report Ques�ons for 4-probe, Filmetrics, and

Profilometer

1) 4-Probe Measurement
a) Explain the working principles of 4-probe measurement. [2 M]
b) What is the reason for choosing the 4-probe measurement technique
over the 2-probe measurement technique. [1 M]
c) Write down the advantages and disadvantages of 4-probe measuement.
[2 M]
d) What are the alterna�ve methods for finding the doping concentra�on
(explain any two methods) [2 M]

2) Filmetrics
a) Explain the working principles of Filmetrics reflectometry and
Ellipsometry. [4 M]
b) Give advantages and disadvantages of each. [3 M]

3) Profilometer
a) Explain the working principle of a Profilometer. [2 M]
b) What parameters can be extracted using a profilometer. [2 M]
c) Give two examples of similar techniques (with brief explana�on of each).
[2 M]