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Chem. Rev.

1997, 97, 2967−2994 2967

Developments in Measuring and Calculating Chemical Vapor Transport


Phenomena Demonstrated on Cr, Mo, W, and Their Compounds
M. Lenz and R. Gruehn*
Institut für Anorganische und Analytische Chemie, Justus-Liebig-Universität, Heinrich-Buff-Ring 58, D-35392 Giessen, Germany

Received October 12, 1996 (Revised Manuscript Received July 10, 1997)

Contents E. Other Compounds 2981


1. Chalcogenide Spinels 2981
I. Introduction 2967 2. Cr(II) and Cr(II,III) Compounds 2982
II. Transport Experiments 2968 VI. Molybdenum 2982
A. General 2968 A. Metal 2982
B. Determination of the Transport Rates 2968 B. Halides and Oxyhalides 2983
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III. Theoretical Treatment of the Chemical Transport 2969 C. Oxides 2984


Process 1. Dioxide 2984
A. General Aspects 2969 2. Mo4O11 2984
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B. Calculation of the Equilibrium 2969 3. MoO3 2985


1. General Aspects 2969 D. Oxo Compounds 2985
2. The Cooperative Transport Model 2971 1. Molybdates 2985
3. Solid-State Composition at Steady-State 2971 2. Phosphates 2985
Transport E. Intermetallic Compounds 2985
4. The Four-Stage Model 2972 1. Phosphides, Arsenides, and Antimonides 2985
C. Calculation of the Mass Flux 2972 2. Chalcogenides 2986
1. Diffusive Transport Model by Schäfer 2972 VII. Tungsten 2986
2. Diffusive Transport Model by Lever 2973 A. Metal 2986
B. Halides and Oxyhalides 2987
3. Diffusive Transport Model by Mandel 2973
C. Oxides 2987
4. The Concept of the Solubility of a 2973
Condensed Phase in the Gas Phase 1. Dioxide 2987
2. W18O49 and W20O58 2989
5. Diffusive Transport Model by Arizumi and 2974
Nishinaga 3. Tungsten Trioxide 2989
6. Transport Model by Factor and Garrett 2974 D. Oxo Compounds 2990
1. Tungstates 2990
7. The Flux Function Method of Richardson 2975
and Noläng 2. Phosphates 2990
8. The Productivity Function of Klosse 2975 E. Intermetallic Compounds 2990
1. Phosphides and Arsenides 2990
D. Model Calculations by Computer Programs 2975
2. Chalcogenides 2990
1. EPC, EPDELT, and EPLAM 2975
VIII. Acknowledgments 2991
2. Nonstationary Model Calculation 2976 IX. References 2991
3. CVTrans 2976
4. GMIN 2976
E. Convection 2976 I. Introduction
IV. Remarks and Comments on the Calculation 2977
Procedure To a solid-state chemist heterogeneous reactions
between a condensed phase and a reactive gas
V. Chromium 2978
phasesacting as a solventsoffer numerous and var-
A. Metal 2978 ied aspects of interesting observations. If an other-
B. Halides 2978 wise nonvolatile solid migrates in a temperature
C. Cr(III) Oxo Compounds 2978 gradient, crystals may grow and only then their
1. Cr2O3 2978 crystallographic and physical properties become ac-
2. Oxospinels 2979 cessable. Thus formed compounds may be meta-
3. Phosphates and Sulfates 2979 stable and not be obtainable in any other way at all.
Important information on the transport behavior can
4. CrOCl 2979
be obtained by measuring the mass flux and the
5. Other Compounds 2979 amount of the deposited solids, respectively, and
D. Intermetallic Compounds 2981 comparing them with thermodynamic models. In
1. Borides, Silicides, Phosphides, and 2981 this way, extensive calculations stimulated the de-
Arsenides velopment of the halogen lightbulb. These
2. Chalcogenides 2981 developmentssimportant for the applicationswill be
S0009-2665(94)00313-4 CCC: $28.00 © 1997 American Chemical Society
2968 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

or three-zone tubular furnace with thermocouples).


The furnace can be fixed in horizontal or vertical
position.

B. Determination of the Transport Rates


After an experiment is terminated, the transport
rate can be determined from the weight of the
deposited solid recovered and the total time elapsed,
provided that the transport rate was constant during
the experiment (“steady-state behavior”) and that
solids were present in both source and sink.
The transport rate can be measured for various
transport agent concentrations (cf., Figure 1), tem-
peratures (mean temperature T h ) 1/2(T2 + T1) or
Dr. rer. nat. Markus Lenz was born in 1965 in Ehringshausen, Germany. difference of temperatures ∆T ) |T2 - T1| of sink and
He studied chemistry at the Justus-Liebig-University Giessen, where he
received his Ph.D. in inorganic chemistry under R. Gruehn in 1995. His
source (cf., Figure 2, section III.B.1)), dimensions of
research deals with chemical transport reactions and thermochemical
model calculations of metals and intermetallic compounds.

Dr. rer. nat. L. Reginald Gruehn is professor of inorganic and analytic


chemistry and was born 1929 in Dorpat, Estland. In 1962 he received
his Ph.D. degree from the university in Münster under H. Schäfer. In Figure 1. Experimental and calculated transport rates
1969 he qualified as a university lecturer. He is now professor at Justus- m̆(Mo) and equilibrium solids at sink and source (1000 f
Liebig-University Giessen. His primary research interest is in chemical 900 °C) in the system Mo/H2O/HgBr2 depending on trans-
transport reactions and high-resolution transmission electron microscopy. port agent concentration c(HgBr2). Curve 1 is calculated
with c(H2O) ) 2.5 × 10-3 mmol/cm3. Curve 2 with c(H2O)
referred to but will not be discussed. The involve- ) 2.5 × 10-4 mmol/cm3 (both Do ) 0.1 cm2/s). Experiments
ment of a hitherto unknown gaseous species may be with two different cross sections of the ampule q ) 2 cm2
indicated by the experimental data that do not agree (b) and q ) 0.95 cm2 (9).10
with model calculations at all.
We will report new possibilities of measuring the
mass flux inside a closed ampule. The correlation of
thermochemical calculations with experimental data
is particularly proven in the systems containing Cr,
Mo, W, or their compounds.

II. Transport Experiments


A. General
The transport experiments are mostly carried out
in closed silica tubes having an inner diameter of
about 10-20 mm and a length of about 10-20 cm
(for general aspects see Schäfer1). Prior to loading, Figure 2. Experimental and calculated transport rates
the tubes are usually cleaned and degassed under m̆(WO2) in the system WO2/H2O/HgBr2 depending on the
reduced pressure of 10-5 atm or less and at temper- mean transport temperature T h (∆T ) 100 °C; c(HgBr2) )
atures about 1000 °C, thus reducing the water 3.60 mg/cm3). Curve 1 is calculated with c(H2O) ) 2.5 ×
content.2,3 The samples are introduced into the 10-3 mmol/cm3, curve 2, with c(H2O) ) 2.5 × 10-4 mmol/
cm3 (both Do ) 0.1 cm2/s); curve 3, with c(H2O) ) 2.5 ×
ampule, and the transport agent is added. After the 10-3 mmol/cm3; curve 4, with c(H2O) ) 2.5 × 10-4 mmol/
tube is evacuated, it is sealed off at different pres- cm3 (both Do ) 0.025 cm2/s). The experimental values (b)
sures, depending on the kind of transport agent. The were standardized to a diffusion length of 10 cm and a cross
loaded tube is placed in a temperature gradient (two- section of 2.0 cm2 of the ampules.14
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2969

III. Theoretical Treatment of the Chemical


Transport Process
A. General Aspects
The migration of a condensed phase in a temper-
ature gradient can be caused by several processes:
(i) sublimation without decomposition, (ii) catalytic
sublimation,3,19-22 (iii) dissociative sublimation,23-27
(iv) distillation, and (v) chemical transport. While
sublimation and distillation reactions lead to the
migration of the substance to the lower temperature
of a temperature gradient, the direction of chemical
transport reactions depends on the sign of heat of
reaction ∆RH°.
General aspects of the crystal growth from the gas
phase are discussed in the monographs by Schäfer,1
Factor and Garrett,28 and Wilke and Bohm29 and the
paper of Nitsche.30
Figure 3. Schematic presentation of the transport balance
(from Plies et al.9). For a crystal grower the following aspects are of
general interest: (1) morphology and perfection of the
crystals, (2) transport rates of the deposited phases,
the tube (cross section or length), or orientation of
and (3) equilibrium composition of the condensed
the tube with respect to the gravity vector. phase (and the gas phase). The a priori calculation
In the past several attempts were made to measure of the equilibria and of the rates of deposition are
the rate of material transport in real time during the subject of the following chapters.
vapor phase crystal growth in closed silica ampules:
Geary and Hough,4 Jeffes and Marples,5 Olson,6 B. Calculation of the Equilibrium
Wiedemeier and Chandra,7 Olson and Powell,8 and
Plies et al.9 In all cases the ampule was connected 1. General Aspects
to a mass balance displaying changes of mass within Exothermic reactions (∆RH°T < 0) cause migration
the ampule. The ampule can be connected to the into the region of higher temperature (T1 f T2, T1 <
balance in different ways: (1) the ampule lies on a T2) and endothermic reactions (∆RH°T > 0) into the
horizontal support, the ends of which are attached opposite direction (cf., Figure 5stransport of SiAs by
to the ends of the extended balance arm;4 (2) the means of I231). Exothermic reactions lead to positive
ampule lies on a horizontal support and one end of slopes in the log KP vs 1/T diagrams (eq III.1), while
the beam is attached to the balance (cf., Figure 3);9 endothermic reactions result in negative ones (for
(3) an extension of the ampule is connected to the details see, i.e., Jeffes,32 Wehmeier,33 Schäfer,34 and
balance;5,6 (4) the ampule is supported by a fulcrum Oppermann35).
close to the source end while the other end is The equilibrium state of a system can be described
connected, via an extension rod, to the hang-down by the following relation:
wire of a vacuum balance;7 or (5) the ampule is
attached to the balance via silica fibers, which pass ∆RG°T ) ∆RH°T - T ∆RS°T ) - RT ln KP,T (III.1)
through holes in the furnace wall.8
By using the technique (“transport balance”) of where ∆RG°T stands for standard free energy of
Plies et al.9 it became possible to detect and deter- reaction at temperature T; ∆RH°T, standard enthalpy
mine (i) several consecutive steady states (e.g., in the of reaction at temperature T; ∆RS°T, standard entropy
systems Mo/MoBr2/HgBr2/H2O10 and W/WO2/HgBr2/ of reaction at temperature T; KP,T, equilibrium con-
stant at temperature T; R, universal gas constant;
H2O11); (ii) nonstationary transport effects (CoP/CoI2/
and T, temperature.
I2/H2,12 GeO2/WO2/H2O,9 CrOCl/Cr2O3/Cl2/H2O,13 and
NiSO4/PbSO4/PbCl29); (iii) kinetic effects (W/WO2/ According to Chandra and Wiedemeier36 three
HgBr211 and WO2/HgBr214); and (iv) the loss of mass procedures can be used to calculate equilibrium
conditions (e.g., partial pressures, mole fractions,
of a solid due to dissolution in the gas phase (Rh2O3/
etc.):
Cl215 and WO2/HgBr214).
a. Independent Isothermal Zone Method.
The different effects (i-iv) on the mass/time dia- The equilibrium pressures are independently calcu-
grams are demonstrated in Figure 4. lated for the sink and source region. A model ampule
For open systems another technique of studying is positioned in a temperature gradient T2 f T1 and
heterogeneous reactions (gas-solid) at high temper- is hypothetically divided into two zones (regions), one
atures was reported by Factor and Garrett.16 belonging to the lower temperature T1 and the other
one having the higher temperature T2. Equal
Schönherr and Wojnowski presented a computer- amounts of transport agent are attributed to each
assisted video technique to continously determine the zone. The isothermal calculations for the two zones
contour of the deposition in a closed ampule.17 A are not linked (e.g., by a mass balance) and the total
similar technique is reported by Negishi et al.18 pressures obtained are different for the two regions.
2970 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

Figure 4. Mass/time diagrams measured by the technique of Plies et al. (transport balance)9 and idealized diagrams (in
box): Mass rate A, of MoBr2 (first steady state) and Mo (second steady state);10 B, of WO2 (first steady state) and W
(second steady state);11 C, of WO2 (with kinetic hinderance of deposition);14 D, of WO2 (first steady state) and W (second
steady state, kinetic hinderance of deposition);11 E, of WO2 (nonstationary transport);14 F, of WO2 (starting amount 200
mg, mass loss of WO2),14 in all cases HgBr2 as transport agent (c(HgBr2) ) 3.60 mg/cm3).

b. Coupled Isothermal Zone Method. Calcula- not hypothetically partitioned. The total pressure
tions are carried out under the condition that the solely depends on the amount of added transport
total pressures in the two (or more) hypothetical agent and the mean transport temperature.
isothermal zones are equal, which is realized by Then the ampule is hypothetically partitioned into
adding different amounts of transport agent to the two zones, and by keeping the just-determined total
different zones. pressure, the partial pressures are calculated by
c. Representative Isothermal Zone Method. using method b and applying a temperature gradient.
In a first step the transport ampule is assumed to In practice the differences in partial pressures give
be not in a distinct temperature gradient and to be rise to a mass flux between the two temperature
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2971

and Gruehn,42,43 a system with fixed starting param-


eters [total pressure ∑p, mean transport temperature
T
h , and starting materials (molar numbers of con-
densed phases and gaseous species)] is heated to the
temperature of the source (i.e., T2 for an endothermic
transport reaction) and the composition of the result-
ing equilibrium gas phase is computed. The reaction
may be congruent or incongruent. Under constant
total pressure (∑p(sink) ) ∑p(source)) the gas phase
is hypothetically shifted from T2 to T1. This means,
for an endothermic transport reaction (T2 f T1, T2
> T1), that it must be cooled down from T2 to T1.
Under these conditions the gas phase initially is
metastable, leading to the establishment of a new
equilibrium at T1, which can be achieved by conden-
Figure 5. Experimental transport rates m̆(SiAs) in the
sation of one or more solid and liquid phases,
system SiAs/I.31 m̆exp < 0 means endothermic transport respectively.
processes and are marked by black tops of the bars. Thus the cooperative transport model describes a
Experiments with similar transport agent concentration stationary state by coupling the two subvolumes of
are marked by identical hatching. Missing bars indicate the ampule by means of identical mass balance of
no transport effect. source and sink. In contrast to Schäfer’s KP method1
regions. Model a is a rather crude one, while model it is possible to calculate the transport of heteroge-
c comes much closer to the truly existing conditions neous phases as well as gas phases of complicated
in the ampule. composition.
The calculations may be carried out in two ways: The number of participating condensed phases
(1) by using a “free energy minimization” differing during the transport process is taken into
approach,37-40 and (2) starting from the independent account by the iteration method of Schmidt and
heterogeneous and homogeneous equilibria (KP Gruehn.48,49 According to the cooperative transport
method), which are necessary to completely describe model the composition of the equilibrium gas phase
the system, a set of i nonlinear equations are set up and the condensed phases of the source are calculated
individually for the source and sink region: and the gas phase is shifted to the sink. After the
∆RG°i,T ) - RT ln Ki,P,T (III.2) condensation of one or more phases the corresponding
equilibrium gas phase of the sink is transferred back
where ∆RG°i,T stands for standard free energy of to the source. In order to restore the state of
reaction i at temperature T; Ki,P,T, equilibrium con- equilibrium at the source again a part of the con-
stant of reaction i at temperature T; and R, universal densed phases has to be dissoluted in the gas phase.
gas constant. After shifting this gas phase back into the sink and
The temperature dependency of the equilibrium deposition of the condensed phases these are added
constant is described by the following relation: to the already deposited sink solid. The iteration
steps are repeated until the composition of the
A equilibrium gas phases and of the condensed phase
log Ki,P,T ) - B - C log T (III.3)
T at Tsource and Tsink do not change any further.
where A, B, C are constants. Thus one can obtain transport rates and amounts
On the basis of the thermochemical data the of deposited condensed phases, e.g., for the following
system of i nonlinear equations can be solved by a systems: Si/SiAs/I2/H2O,31 Si/SiAs/As/H2O,50 Ti/O/Hg/
Gauss-Newton-type method or a different iterative Cl,51 Ti/O/Te/Cl,51 VP/I2/H2,52 V2O5/NH4Cl/H2O,53 Cr2O3/
procedure (cf., Binnewies41). CrOCl/Cl2/H2O,13,54 Cr2O3/Br2/H2O,55 Cr2O3/CrBr3/Br2/
Independent of a heterogeneous or homogeneous H2O,55 Cr2O3/HgCl2/H2O,54 Cr2O3/CrI3/I2/H2O,56 CrP/
phase in the source, the simple concepts, however, CrI2/I2/H2,57 CrBr3/Br2/H2O,58 MnP/MnI2/I2/H2,57 CoP/
fail to predict the kinds of deposited condensed CoI2/I2/H2,12 Mo/MoBr2/HgBr2/H2O,10 MoO2/Mo4O11/
phases in the sink. Nor will they work if the HgCl2/H2O,59 MoO2/Mo4O11/HgBr2/H2O,60 Eu/Al/Cl,61
composition of the gas and the condensed phase W/WO2/HgBr2/H2O,11 WO2/HgCl2/H2O,62 WO2/HgBr2/
change during the transport process (“nonstationary H2O,14,62 WO2/W18O49/HgI2/H2O,63 WO3/HgCl2/H2O,64
transport”) and if the deposited phase in the sink and Rh2O3/RhCl3/Cl2/H2O,15 ScNbO4/Cl2/H2O,65 ScNbO4/
the remaining solid in the source have a homogeneity NbCl5/Cl2/H2O,65 MnNb2O6/Cl2/H2O,66 MnNb2O6/NH4-
range. Cl/H2O,66 CoNb2O6/Cl2/H2O,67 CoNb2O6/NH4Cl/H2O,67
This insufficiency led to the development of several CoNb2O6/HgCl2/H2O,67 NiNb2O6/Cl2/H2O,68 NiNb2O6/
other models: the cooperative transport model NH4Cl/H2O,68 Ga2(SO4)3/HCl/H2O,69 Ga2(SO4)3/Cl2/
(Schweizer and Gruehn42,43); the concept of connect- H2O,69 In2(SO4)3/HCl/H2O,70 FeSO4/NH4Cl/H2O,71 Fe2-
ing the source and the sink zone by the so called (SO4)3/Cl2/H2O,71 Fe2(SO4)3/HCl/H2O,72 Fe2(SO4)3/
-relation (Krabbes et al.44,45); and the four-stage NH4Cl/H2O,71 Cr2(SO4)3/Cl2/H2O,73 and Cr2(SO4)3/HCl/
model (Piekarczyk46,47). H2O.73

2. The Cooperative Transport Model 3. Solid-State Composition at Steady-State Transport


A model ampule is hypothetically partitioned into To describe the transport of several solids with a
two parts (source and sink). According to Schweizer homogeneity range as well as ternary solid solutions
2972 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

a general model was developed by Krabbes et al.44,45,74 Stefan flow104 are neglected). Thus no transport rates
Presuming an equilibrium state in the source and the and no transport mechanisms are computed.
sink zone caused by a congruent or incongruent The model is intended to calculate the kind of
reaction of the starting solid with the transport agent, deposited phases at Tsink. Because the gas phase is
it is possible to calculate the composition of the shifted from Tsource to Tsink in stage ii equilibrium
equilibrium solids (ABx (Tsource) and ABx (Tsink)) and conditions no longer exist. For this calculation
the corresponding transport rates. Piekarczyk assumes a certain supersaturation of the
Some of the components of the system only occur gas phase at the end of the stages ii and iii. As a
in the gas phase (solvent components) others are result the composition of the gas phase changes by
present in both states of aggregation, i.e., gaseous homogeneous reactions of the gaseous species. Since
and condensed states. In this model the authors take it is presumed that no condensed phase is precipi-
all elements as components. tated, the gas phase is supersaturated with regard
Both equilibrium zones are connected by (n - 1) to the solid(s). Thus the kind of the eventually
relations of the type44,45,74 deposited solid can be derived in analogy to the paper
of Gruehn and Schweizer.42

(B) ) ()
P*
B
P*
L Tsource
()
- xTsource
p*
A
p*
L Tsource
) ()
P*
B
P*
L Tsink
-
The four-stage model was applied in the transport
systems C/H,105,106 NiTiO3/SeCl4,97 ZnCr2O4/Cl2,47
Y3Fe5O12/Cl2,47 Y3Fe5O12/CCl4,47 and Fe2TiO5/FeCl3/

()
xTsink
p*A
p*L Tsink
(III.4)
Cl2.47

C. Calculation of the Mass Flux


where p*K stands for the equilibrium pressure of the Various concepts were developed to calculate the
component K (components A or B of the condensed mass flux. The principles of these models are briefly
phase or the solvent component L); Tsource, tempera- outlined here.
ture of the source; Tsink, temperature of the sink; and
xT, composition of the solid at Tsource or Tsink; and
1. Diffusive Transport Model by Schäfer
Following Schäfer’s model1,107,108 a transport reac-
l tion is defined as a reaction of a solid or liquid with
p*K ) ∑Rk,ipi (III.5) a gaseous component in a temperature gradient to
i)1 form exclusively gaseous products. Hence a gas
phase consisting of only of two components (gaseous
where Rk,i stands for stoichiometric index of the species Bg and Cg) may be described with
component K in ith species; and pi, partial pressure
of the species i. iAs + kBg ) jCg (III.6)
This model explains the transport behavior of
several systems containing phases with homogeneity The transport of the substance A is caused by a
ranges as well as the subsequent transport in mul- difference of partial pressures ∆pc of the gaseous
tiphase systems: Ga2O3/TeCl4,75 TiB2/TiBr4,76 TiB2/ species Cg between the source region (site of dissolu-
BBr3,76 Te/O/Cl,77 Ti/O/C/Cl,78 Ti/Si/X (X ) Cl, I),79 tion of the condensed phase in the gas phase) and
VO2/Cl2,80 VO2/HCl/Cl2,80 V/O/Te/Cl,81,82 V/Si/Cl,83 Mn/ the sink region (site of deposition of the condensed
O/X (X ) Cl, Br),84 Mn/O/H/X (X ) Cl, Br, I),84 MnO2/ phase out of the gas phase).
InCl3/Cl2,85 Mn/O/M/Cl (M ) Te, Se),86 MnCl2/MCl3 For the chemical transport caused only by diffu-
(M ) Al, Ga, In),87 Fe/O/Cl,88 Fe/O/H/Cl,80 FeSx/I2,89,90 sion, like in a sealed silica ampule, Schäfer obtained
Fe/S/H/Cl,91 Fe/S/N/H/Cl,91 CoS/HI,92 CoS/I2,92 Ni/S/ the transport equation (eq III.7) for the migration of
N/H/I,92 M/S/GeI2 (M ) Fe, Ni),91 M/S/X (M ) Fe, Ni; the solid A in a one-dimensional system. In such a
X ) Cl, I),91 Cu/O/H/Cl,93 Cu/O/H/N/Cl,94 Nb/O/Te/ system it is assumed that diffusion only proceeds
Cl,95,96 NiTiO3/SeCl4,97 CoyFe1-ySx/NH4I,92 CoyFe1-ySx/ parallel along the long axis of the ampule. Provided
GeI2,92,98 Fe1-yNiySx/I2,91 Fe1-yNiySx/GeI2,91,98 Zn1-y- that the gas phase as a whole does not move from
CoyO/Br2,98 Mn/Mo/O/Cl, 99 Mn/Mo/O/Cl/H,99 Mn/Mo/ the source to the sink [which is true of reactions
O/Cl/Te,99 Cu/Mo/O/H/Cl,100 Y3Fe5O12/CCl4,101 Ru/V/ without a change in the number of moles (j ) k)] the
O/Cl/Te,102,103 Ru/Ti/O/C/Cl,102 and Ga/V/O/Cl/Te.102 amount of transported solid A (mole) is calculated to
be (convection and thermodiffusion is neglected)
4. The Four-Stage Model 0.8
On the basis of four consecutive cycles, Piekarc- i ∆pcT
h qt
na ) 1.8 × 10-4 (mol) (III.7)
zyk46,47 described the chemical transport of condensed j ∑ps
phases with fixed stoichiometry as follows: (i) vola-
tilization of the condensed phase in the dissolution where i and j stand for coefficients of the reaction
zone leading to an equilibrium between the con- equation; Th , average temperature of the diffusion
densed phase and the gas phase; (ii) migration of the path (“mean transport temperature”; T h ) 1/2(T2 + T1))
gas phase from the dissolution zone at Tsource to the (K); q, cross section of the diffusion path (cm2); t,
deposition zone and supersaturation at Tsink; (iii) transport time (h); ∆pc, difference in equilibrium
deposition of the condensed phase at the sink; and pressure (atm); ∑p, total pressure in the tube (atm);
(iv) migration of the gas phase back to the source. and s, length of diffusion path (cm). The coefficient
It is assumed that the mass transport proceeds by 1.8 × 10-4 is only valid for variables p, q, t, and s as
thermal convection as long as the total pressure is given in the noted units. Furthermore it describes
very high (molecular diffusion, thermodiffusion, and the pressure and temperature dependency of the
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2973

average diffusion coefficient D using an average conditions, N ) M - C independent, simultaneously


standard diffusion coefficient Do ) 0.1 cm2/s at T ) operating chemical equilibria have to be specified.
298 K and p ) 1 atm. The jth of these N equilibria may be expressed as
The diffusive transport model by Schäfer was follows
applied to the transport systems MgO/HCl,109 GaAs/
I2,110 GaSe/I2,111 In2S3/I2,112 TiS2/I2,113 V/Se/I,114 CrCl3/ Ss + aAg ) bBg + cCg + dDg + ... (III.12)
Al2Cl6,115 FeCl2/HCl,116 FeP2/I2,117 NiO/HCl,109 NiCl2/
HCl,116 Cu2O/HCl,118 LaPO4/Br2,19 LaPO4/Br2/PBr3,19 and more generalized
LaPO4/HBr,19 NiFe2O4/HCl,119 GeSe0.99Te0.01/GeI4,122 M-1
GeSe0.98Te0.02/GeCl4,122 and GeS/GeCl4/Ar.122
Ss ) ∑ qijGi,g (III.13)
2. Diffusive Transport Model by Lever i)1

For a one-dimensional system, Lever120 described where Ss stands for condensed phase; qij, reaction
the chemical transport of only one solid involving coefficient for gaseous species i in reaction j; and Gi,g,
several simultaneous heterogeneous and homoge- the ith gaseous species.
neous equilibria. After Mandel123 in this system the flux Fs (mol/cm2
In this paper a simple expression for the concurrent s) of the solid S can be calculated by defining a set of
diffusive transport of several gaseous species by a N - 1 coupling parameters R j 2, R
j 3, ..., R
j N to be
common binary diffusion coefficient for each pair of
gases is used. Diffusion and net drift of the gas phase ∆H1∆T N
(Stefan flow104) are taken into account. By using all Fs ) (1 + ∑R j j)(φ11 + R
j jφ12 + ... + R
j Nφ1N)-1
2 3
binary diffusion coefficients one mean diffusion coef- RTh L j)2
ficient D is estimated for the whole transport system. (III.14)
The chemical elements present in the system are where R
j j is defined as
labeled A, B, C, ..., L, ..., the molecular species 1, 2,
3, ..., λ, ..., and a molecule of species λ contains aλ |[-φ11 + (∆H1/∆Hn)φn1]|
atoms of A, bλ of B, ..., and lλ of L ..., etc. The molar (III.15)
|[-φ1t + (∆H1/∆Hn)φnt]|
jj )
R
density of the species λ in the gas phase is nλ (mol/
cm3) and the density nL (g atoms/cm3) of the element
L is given by where ∆T stands for temperature difference between
source and sink () T2 - T1); R, universal gas constant;
nL ) ∑lλnλ (III.8) h , mean transport temperature () 1/2(T2 + T1)); L,
T
λ distance between source and sink; ∆Hi, enthalpy
change of the transport equilibrium (1 e i e n); and
where lλ stands for stoichiometric coefficient of the φnt is given by

{( )}
element L in the molecule species λ; and nλ, molar
density of the molecule species λ. qin qjtp
j i - qitp
φnt ) ∑ ∑
jj
By defining a value ηL for the element L (III.16)
i p
ji j pD
h ij
ηL ) nL/nV (III.9)
where qin stands for reaction coefficient for species i
where nL stands for the gram atomic density of the in reaction n; p j i, average partial pressure of the
component L in the gas phase; and nV, total gram species i; qjt, reaction coefficient for species j in
atomic density of the solvent atoms in the gas phase reaction t; qit, reaction coefficient for species i in
(the solvent atom is not present in the solid), he reaction t; pj j, average partial pressure of the species
obtained for the flux JL (mol/cm2 s) of the element L j; p, total pressure; and Dij, diffusion coefficient of a

[ ]
binary mixture of components i and j.
n*
v η′L - η′′
L In earlier papers124,125 it was shown that the
JL ) nD (III.10) migration of a solid may be explained exclusively by
n x′ - x′′
diffusion; viscous flow (“streaming”), convection, and
with thermal diffusion are neglected. The binary diffusion
coefficients have to be evaluated from the literature
(n*v)-1 ) (x′ - x′′)-1 ∫x′′
x′dx data or by calculation. The theory was applied to the
(III.11)
nv transport systems ZnS/HCl,126 ZnS/I2,127 CdS/I2,128,129
CdTe/I2,130 CdTe/NH4Cl,131,132 YbAs/I2,133 GeSe0.99-
where η′L and η′′L stand for ηL at x′′ or x′; n, total Te0.01/GeI4,122 GeSe0.98Te0.02/GeCl4,122 and GeS/GeCl4/
molar density of the gas phase (∑λnλ); D, mean Ar.122
diffusion coefficient; x′′, location of the source; and
x′, location of the sink. 4. The Concept of the Solubility of a Condensed Phase
The model was applied to the transport systems in the Gas Phase
Ge/GeX4 (X ) Br, I),121 GeSe0.99Te0.01/GeI4,122 GeSe0.98- The simple method described above can only be
Te0.02/GeCl4,122 and GeS/GeCl4/Ar.122 used when only one identical phase is present in both
sink and source and when only one heterogeneous
3. Diffusive Transport Model by Mandel equilibrium is causing the transport.
By assuming a one-dimensional system123 in which When the transport is caused by two or more
there are M species (gaseous species Gi,g and the only transport equilibria for identical phases in source and
condensed species Ss) present with C conservation sink, Schäfer134 developed the concept of “solubility”
2974 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

in the gas phase. Hence, the solubility λi of a 5. Diffusive Transport Model by Arizumi and Nishinaga
condensed phase or element i is defined as follows
Arizumi and Nishinaga158-160 proposed transport
equations for the transport of materials (semiconduc-
amount of i tors) in closed tubes assuming a one-dimensional
λi )
amount of solvent component L
)
system and considering diffusion and laminar flow
∑ni ) ∑pi (III.17) as the fundamental transport mechanism (AN model).
∑nL ∑pL These equations can be applied to transport systems
containing foreign matter, as well.
For the element and the compound semiconductors,
On the basis of this concept it is possible to calculate the reactions are expressed by
the amount na (mol) of transported solid A for
chemically more complicated systems, including sys- Ai,s + miI2,g ) AiI2mi,g (III.20)
tems with changing numbers of gas molecules de-
pending on the temperature
For some compound semiconductors the reactions are
described by
na ) ∆λi
∑p(L)Th 0.8qtDo1.8 × 10-3 (mol) (III.18)
∑ps AiBh,s + miI2,g ) AiI2mi,g + 1/yBhy,g (III.21)

where ∆λi stands for λi(source) - λi(sink), difference The flux rate nx (mol/cm2 s) of the ith element x (i )

( )
in solubility of the element i between source and sink; 1, 2, ..., v) is given by

( )
∑p(L), arithmetical mean of the total equilibrium
dPi
Pi∑Dimi
pressures of the solvent atoms at the source and sink
source + ∑p(L)sink); T
1/ (∑p(L) h , average temperature
2 1 v dPi dX
of the diffusion path (“mean transport temperature” nx ) ∑ -Di dX + (III.22)
1/ (T + T )); D , average diffusion coefficient at T )
2 2 1 o
298 K and p ) 1 atm; q, cross section of the diffusion
RT
h i)1 ∑miPi
The following simplifications are used to solve ex-
path; t, transport time; ∑p, total pressure in the tube; pression (III.22):
and s, length of diffusion path. For comments on the
coefficient 1.8 × 10-3 see section III.C.1.
The concept was applied to the transport systems dPi Pi(1) - Pi(2) ∆Pi
(III.23)
dX L L
) )
Si/I2,134 Si/SiCl4,134 Ga2O3/Cl2,135 Ga2O3/H/Cl,136 GaAs/
I2/H2,134 Ge/I2,137 Ge/H2O,48 Ge/GeCl4,138 In2O3/Cl2,139
SnS2/I2,140 Sb/SbCl3,141 Sb/GaCl3,141 Sb2S3/I2,142 TiO2/ and
XCl4 (X ) Te, Se, C),143 MnCl2/MCl3 (M ) Al, Ga,
In),87 Fe/HCl,134 Fe2O3/HCl,134 Fe2O3/TeCl4,144 FeS/ Pi(1) + Pi(2)
H/X (X ) Cl, Br, I),145 FeS/MX4 (M ) Ge, Sn; X ) Cl, Pi ) (III.24)
L
I),145 Ni/CO,146 MoCl3/Cl2,147 Ag/I2,148 Ta2O5/S2,149
TaS2/S2,150 W/Cl2/Ar,134 ReO2/Re2O7/HCl,134 Pt/Cl2,151 where T h stands for average temperature along the
M/GaCl3 (M ) Fe, Co, Ni),152 MCl2/Al2Cl6 (M ) Co, transport distance; R, universal gas constant; Di,
Ni, Cu),153 MCl2/Al2Cl6 (M ) Ca, Cr, Fe, Co, Ni, Cu, diffusion coefficient; Pi(n), partial pressure of element
Pd),154 Co/Ni/GaI3/I2,155 and Cu/Ag/I2.156 i at source (n ) 1) or sink (n ) 2); X, position variable;
By using the model of Krabbes et al.44,45 it is mi, reaction coefficient of element i; and L, transport
possible to calculate the transport rate n̆ (mol/s) of a distance.
solid based on the concept of the solubility in the gas The AN model was applied in the transport sys-
phase with the formula tems GaS/I2,161 GaAs/I2,158 Ge/I2,158 Ge/P/I2,158 GaAs/
Ge/I2,159 ZnO/HgCl2/H2O,162 ZnS/NH4Cl,163 ZnSe/I2,164
n̆(ABxCy...) ) ZnTe/I2,165-167 ZnTe/HCl,168 CdS/I2,168 CdTe/I2,130,169

{( ) ( ) }
h 0.8aD
T ho p* p*A ZnTe/GaAs/I2,170 and ZnTe/Ge/I2.165,171
A
p
j *(L) 1.8 × 10-3
ptot∆l p*L p*L
-
6. Transport Model by Factor and Garrett
Tsource Tsink
Following the model of Factor and Garrett,28 in a
(III.19) one-dimensional transport system the flux rate J
(mol/cm2 s) of a component i caused by diffusion and
where D h o stands for mean diffusion coefficient; T h, Stefan flow104 can be described as follows

{ }
mean temperature; a, cross section of the ampule; ptot,
total pressure; ∆l, length of the ampule; p j *, mean DP p(l) - P
J) ln (III.25)
solvent balance pressure; and p j *K, balance pressures RTl p(0) - P
of the components A and B of the condensed phase
or the solvent component L. For comments on the where D stands for the diffusion coefficient; P, total
coefficient 1.8 × 10-3 see section III.C.1. pressure; R, universal gas constant; T, average
The concept of solubility in the gas phase by temperature along the transport distance; l, transport
Schäfer is the fundamental principle of the programs distance; p(l), partial pressure at l (sink); and p(0),
EPDELT157 and EPLAM,157 respectively, yielding the partial pressure at l ) 0 (source).
transport rates given in the papers listed in section The transport model of Factor and Garrett was
III.B.2. applied to the transport systems GaAs/HCl,172,173
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2975

ZnSe/I2,174 HgZnTe/HgI2,175 GeSe0.99Te0.01/GeI4,122 FeS2/X2 (X ) Cl, Br, I),181 RuS2/X2 (X ) Cl, Br, I),182
GeSe0.98Te0.02/GeCl4,122 and GeS/GeCl4/Ar.122 Cu6PS5X/X2,183 HfS2/X2 (X ) Cl, Br, I),184 CuInS2/X2
(X ) Cl, Br, I),185 Y3Fe5O12/Cl2,178 Y3Fe5O12/HCl,178
7. The Flux Function Method of Richardson and Noläng and Ni3B7O13Cl/Cl2.186
By defining flux functions Φ of the condensed A critical comparison of the flux function method
phases it is possible to calculate net fluxes Jk (mol/ and experimental results are given by Krabbes et al.
cm2 s) of these phases based on an equilibrium for the transport system V8O15/VO2/TeCl4.89
model.176-178 The flux function takes into account the
Stefan flow,104 as well as the temperature and total 8. The Productivity Function of Klosse
pressure variation of the diffusion coefficient. Thus Klosse187 considers a chemical vapor transport
it becomes possible to compute the transport rates system in which the transport of the condensed phase
of the simultaneous migration of several condensed Ai,s(l) (solid or liquid) and gaseous compounds Bi,g is
phases, of condensed phases with incongruent va- based on one or more independent reactions of the
porization or with variable composition in a one- type
dimensional system.
A flux function Φ takes the temperature depen- νAAs(l)+ ... + νB Bg + ... ) νC Cg + ... (III.29)
dency of the diffusion coefficient into account. The
advantage of this flux function is, that different or more generalized
transport systems with different transport agents,
temperature gradients and diffusion coefficients can 0 ) ∑ν′riAi,s(l) + ∑νriBi,g (III.30)
be compared to each other (e.g., transport of SnO2sa i i
comparison of 30 different transport agents177). It is
defined by where ν′ri stands for stoichiometric coefficient of the
ith condensed phase Ai,s(l) in reaction r; and νri,
Jk stoichiometric coefficient of the ith gaseous compound
Φ) (III.26) Bi,g in reaction r.
dT
( D
ho
dx ) Klosse introduces the rate of reaction ξ̇ (mol/s),
which describes the unireactional diffusive transport
where D h o stands for the mean average diffusion in a one-dimensional system (the effects of finite
coefficient; dT/dx, temperature gradient; and Jk, net interface kinetics is formally taken into account):
flux of the condensed phases (k ) 1, 2, ..., l). ODP
The fluxes Jk (k ) 1, 2, ..., n) of the condensed ξ̇ ) - {(1 - R)∆ ln K}F (III.31)
phases are related to the fluxes Jj of the elements (j lRT
) 1, 2, ..., n) by the equation where O stands for the cross-sectional area of the
n ampule; D, diffusion coefficient; P, total pressure; l,
Jj ) ∑ λkjJk (III.27) length of the ampule; R, universal gas constant; T,
absolute temperature; R, parameter to account in-
k)1
terface kinetic constraints (0 e R e 1); and K,
where λkj stands for the stoichiometric coefficient of equilibrium constant of the heterogeneous transport
the jth element (j ) 1, 2, ..., l) in the condensed phase reaction (∆ln K ) ln K(Tsource) - ln K(Tdeposition).
k; and Jk, net flux of the condensed phases (k ) 1, 2, For this a productivity function F has to be defined

[ ]
..., l), with that is proportional to the crystal growth rate. The
mole fractions of the gaseous species and the sto-
m dpi ichiometric coefficients in the transport reaction are
∑λir taken into account.

[ ]
D
h op0TR-1 dT m dpi dT
∑λij
i)1
Jj ) - - pi (III.28) νi2 -1
RptotTR0 dx i)1 dT
∑x - (∑νi)
m
2
∑λirpi F)
i i i
(III.32)
i)1

where D h o stands for mean average diffusion coef- where νi, stands for the stoichiometric coefficient of
ficient; p0, pressure at T0; T, temperature; R, empiri- the ith element (i ) 1, 2, ..., l) in the condensed phase
cal constant (R ) 1.5-2.0);179 R, universal gas con- Ai; and xi, mole fraction of the species i (xi ) pi/∑ipi).
stant; ptot, total pressure; T0, reference temperature; The productivity function of Klosse was applied to
dT/dx, temperature gradient; λij, stoichiometric coef- the transport system ZnS/I2.188
ficient of the jth element (j ) 1, 2, ..., l) in the gaseous
species i; λir, stoichiometric coefficient of the solvent D. Model Calculations by Computer Programs
element r in the ith species; pi, partial pressure of
the ith species (i ) 1, 2, ..., m); and dpi/dT, pressure 1. EPC, EPDELT, and EPLAM
gradient. Using the cooperative transport model, the pro-
The partial pressures of the gaseous species i (i ) gram EPC37,38,157,176,177,189 calculates the equilibrium
1, 2, ..., m) are calculated by the authors by minimi- conditions (condensed phases with the correlated gas
zation of the total Gibbs’ free energy under mass phase). All occurring substances (condensed phases
balance conditions using for example the program and gaseous species) have to be known. For a
SOLGASMIX.180 The method was applied to the calculation EPC needs the thermodynamic data of all
following transport systems: CoP3/Br2,178 FeP/I2,178 substances: standard enthalpy of formation ∆BH°T,
2976 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

standard entropy S°T, and heat capacity CP(T). More- The mass transfer between source and sink (depo-
over the program requires a starting parameter list: sition rates) is calculated using the concept of Schä-
starting substances i with mole numbers ni, consid- fer.134
ered possible reaction products (condensed phases
and gaseous species), temperature of sink and source, 4. GMIN
total pressure, and volume of the ampule.
The solid-state composition at steady state (Krab-
With the given thermochemical data and starting bes et al.44,45) can be computed by using the computer
parameters EPC calculates the position of equilibri- program GMIN192 (the program GMIN is part of the
um by means of minimization of the total free Gibbs program package TRAGMIN). The program calcu-
energy ∆G° first for Tsource and then for Tsink. The lates, by minimization of the Gibbs free energy
results of the calculation (amounts of condensed (iterative procedure given by Erikson37), the equilib-
phases and gaseous species) are written to an output rium partial pressures of the species i and the
file. equilibrium condensed phases with their correspond-
Using the results of the EPC calculations the ing compositions using one (or more)  relations (eq
program EPDELT157 calculates the differences of III.4). Generally it is possible to choose between four
partial pressures ∆pi for all gaseous species. These models describing the relationships between the
are listed as values ∆pi/∑p (∑p ) total pressure) for solids of a transport system: (1) binary condensed
each element occurring in the system. It is also phases of the type ACx (x ) nC/nA); (2) ternary (quasi-
possible to calculate the transport rates of a sub- binary) condensed phases AyB1-yCx with or without
stance by EPDELT. Gaseous species which migrate miscibility gap, which can be described as regular
from the source to the sink get a positive ∆pi/∑p solutions of the two end members (binary phases ACx
value, while species with an opposite migration and BCx, yACx,s + (1 - y)BCx,s ) AyB1-yCx,s); (3) binary
direction (sink f source) have values less than zero. systems with the condensed phase ACx containing the
Because of the standardization of the ∆pi/∑p values component A in ith highest state of oxidation (in
to each element, it is possible to obtain information contrast to model 1 and 2 the activity of C in the solid
on the flux of the solid from these results. is described by a different model192); and (4) ternary
By using the program EPLAM157 it is possible to (quasi-binary) condensed phases whose end members
compute solubilities of gaseous species at Tsource and can be described similar to model 3.
Tsink and from these values the differences of solubili-
GMIN needs the thermochemical data of all con-
ties ∆λi.134 For this it is necessary to define the
densed phases (end members of the homogeneity
solvent element in a separate file.
range) and gaseous species as follows: standard
2. Nonstationary Model Calculation enthalpy of formation ∆BH°T, standard entropy S°T,
heat capacity CP(T), and activity aC of the component
By using the program EPCBAT,190 it is possible to C in phases ACx or AyB1-yCx.
make model calculations for several consecutive Furthermore the molar ratio of the components, the
steady states according to the iteration method of volume, the pressure, and the temperature have to
Schmidt and Gruehn.48,49 This can be achieved by be fixed.
several successive EPC calculations.
It is possible to create gas-phase plots (partial
After the first EPC calculation (computing of the
pressures of gaseous species i as functions of tem-
condensed phases and the corresponding equilibrium
perature) or the solubilities defined by Schäfer134 by
in the gas phase at Tsink and Tsource) the amount of
the subprogram GASGRAPH and to calculate the
the deposited condensed phase in the sink is sub-
transport rate by the subprogram TRANS (both parts
tracted from that of the condensed phase in the
of the program TRAGMIN).
source. After this a new EPC calculation is started.
In every following cycle the mass of the condensed
phase of the source is diminished by the deposit at E. Convection
the sink. In the above-described transport models the flux
When one condensed phase has been completely of a solid is calculated by assuming diffusion and
transported to the sink, a subsequent steady state Stefan flow104 as mass-transfer processes. In chemi-
may occur. This is indicated by changes in equilib- cal transport reactions convection is naturally in-
rium gas-phase composition. volved in the mass flux. It has been observed that
For every cycle an EPDELT calculation can be done for high pressures (p > 1 atm) and special ampule
to get information of the changes in the transport shapes l/h (l ) length and h ) height of the ampule)
model during the transport experiment. the transport rate is increased. We distinguish
between forced convection, which is caused by the
3. CVTrans influence of a gravitational field on a thermal or
CVTrans191 is WINDOWS based and developed concentration gradient, and free convection (locally
from the older program package EPC, EPDELT, and imposed motion).
EPCBAT.37,38,157,176,177,189,190 It calculates the composi- In typical transport experiments (horizontal posi-
tion of the condensed and gas phase under equilib- tion of the transport ampule with respect to the
rium conditions by minimization the free enthalpy gravitation vector) at higher total pressures convec-
of a system according to a procedure by Eriksson.37 tion increases the transport rate. Such effects on the
The composition of the condensed and the gas phase transport rates were investigated in the transport
of source and sink region are related to each other systems GaAs/HCl,173 Ge/I2,137,193-196 Ge/GeI4,197 Ge/
by applying the cooperative transport model by GeCl4,138 GeSe/GeI4,198 GeTe/GeI4,198 SnS2/I2,199 SnS2/
Schweizer and Gruehn.42,43 SnI4,199 Sb/GaCl3,141 Ni/CO,200-202 MnS/MnSe/I2,203
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2977

ZnS/I2,126,204,205 ZnSiP2/I2,206 YbAs/I2,133 TaS2/S2150 and by experiments some general aspects have to be
Hg1-xCdxTe/HgI2.7,207,208 A general treatment of this taken into account.
problem was given by Schäfer et al.,107 Reed et al.,209 At first he has to prove the transport system is well
and Curtis and Dismukes.210 described by thermochemical data of all phases
The growth of crystals and epitaxial layers is (condensed and gaseous). Often the composition of
influenced by convection, too. Investigations of the the gas phase is a great problem. In many systems
effects on the morphology of crystals and layers the gas phase is not completely investigated. An
grown by chemical transport reactions under the unidentified gaseous species may prevent the de-
influence of convection are reported in the transport scription of the transport behavior of a condensed
systems GaAs/GaI3,211 GeSe/GeI4,212,213 Hg1-xCdxTe/ phase. Therefore we have chosen the chromium,
HgI2,214-218 GeSe/I2,219 GeSe2/I2,219 GeTe/I2,219 GeTe/ molybdenum, and tungsten containing systems for
GeI4,213 ZnTe/I2,220 MnSe/CdSe/I2,221 GeSe0.99Te0.01/ our paper, because these systems are very well
GeI4,122 GeSe0.98Te0.02/GeCl4,122 and GeS/GeCl4/Ar.122 described and the thermodynamical data are well
A more general theoretical treatment of convection known. Some of the compounds are of great interest
is given by Carruthers,222,223 Launay and Roux,224 because of their physical properties. In the past the
Reed et al.,209 and Rosenberger et al.225-230 crystallization of these were often carried out by
There is only one attempt at a detailed analysis of chemical transport reactions.
convective flow given by Klosse and Ullersma231 (KU Simple systems with only one equilibrium solid
model). They assumed a two-dimensional rectangu- without range of homogeneity can be treated by the
lar enclosure with two vertical walls. According to simple KP method discussed in section III.B. A more
this model natural convection is effected by a tem- detailed analysis of the gas phase is possible by a
perature gradient only. The mass flux F* (mol/cm2 more sophisticated iteration method.41 For this it is
s) is given by the following equation: necessary to specify all homogeneous and heteroge-
F* ) F(K + 1) (III.33) neous equilibrium reactions. Therefore the kinds of
condensed phases have to be known and must be
where F stands for the mass flux caused by diffusion fixed before the calculations.
with To predict the kinds of formed (at Tsource) and

[ ( )( ) ]
Do 2 2 deposited (at Tsink) condensed phases one has to
1 RTh2 µ choose other methods:
) A 2 3 +B (III.34)
K pd M
h g∆T 1. The cooperative transport model42,43 allows
where A and B stand for dimensionless quantities several steady states to be described during a trans-
depending on the geometry of the ampule (see ref port process. It is possible to compute the sequence
231); Do, average diffusion coefficient; p, total pres- of deposition of several condensed phases without a
sure; d, ampule diameter; R, universal gas constant; homogeneity range.
T
h , average temperature; µ, average viscosity of the 2. The transport of solids with homogeneity range
gas phase; M h , average molar weight of the gas phase; can be explained by the model of Krabbes et al.44,45,74
g, gravitational force; and ∆T, temperature difference This concept fails when the sequence of deposited
between source and sink. phases is of interest.
The average viscosity of the gas phase µ is calcu- Depending on the aspects of interest one has to

( )
lated to be decide between two computer-aided methods. If the
magnitude of transport is not of interest the model
n xiµi of Piekarczyk46,47 may be an alternative, too.
µ)∑ (III.35) After the equilibrium calculations the interest is
i)1 n

∑xjΦij normally focused on the prediction of the transport


rates of the condensed phases. For these calculations
j)1
several concepts have been set up in the past. All
where xi and xj are molar fractions of the gaseous models were developed assuming that the flux of the
species i,j; µi and µj, viscosities of the gaseous species gaseous species proceeds by diffusion and net flux of
i and j (which can be taken from the literature) with the gas phase. Exceptions are the early model by

( Mi
) [ ()( )] Mj Schäfer,1,107,108 which was superseded by the concept
µi 1/2 1/2 2
1 -1/2
Φij ) 1+ 1+ (III.36) of solubility in the gas phase,134 and the model by
x8 Mj µj Mi Klosse and Ullersma,187 which additionally takes into
where Mi and Mj are molar weights of the gaseous account the influence of convection on the transport
species i,j. rates.
The KU model was applied to the transport sys- For the calculation of the transport rates the
tems GaSe/I2,111 GeSe/GeI4,36,232,233 ZnS/NH4Cl,163 equilibrium pressures have to be computed for the
ZnSe/I2,164,174 ZnTe/I2,167 ZnTe/HCl,168 CdS/I2,128,234 source and sink region. In most of the models these
CdTe/I2,130,169 and CdTe/HCl.235 values are sufficient to calculate the fluxes. Excep-
A review on convection is given by Solan and tions are the models by Mandel123 and Klosse:187
Ostrach.236 additional information on the chemical equilibrium
reactions (for example standard reaction enthalpy
IV. Remarks and Comments on the Calculation ∆RH°T in Mandel’s or equilibrium constant KP,t in
Klosse’s) have to be given. Furthermore the diffusion
Procedure has to be described by one mean diffusion coefficient
When a chemist is interested in calculating the (see models in sections III.C.1, III.C.2, III.C.4, and
transport process that he possibly has investigated III.C.6-8) or by several binary diffusion coefficients
2978 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

(III.C.3 and III.C.5). Using binary diffusion coef- gaseous metal complexes are involved in the trans-
ficients requires more computer time and does not port reaction.
automatically lead to more precise results.
The most convenient model is the concept of CrCl2,s + Al2Cl6,g ) CrAl2Cl8,g (V.5)
solubility by Schäfer134 that works with one diffusion
coefficient. It is used in the computer programs CrCl2,s + Ga2Cl6,g ) CrGa2Cl8,g (T < 380 °C)
EPC,37,38,157,176,177,189,190 GMIN,192 and CVTrans.191 (V.6)
V. Chromium CrCl2,s + 2GaCl3,g ) CrGa2Cl8,g (T > 380 °C)

A. Metal (V.7)
Using iodine as transport agent (method after van C. Cr(III) Oxo Compounds
Arkel and de Boer) chromium migrates via CrI2,g to
Generally chromium(III) oxo compounds can be
the zone of higher temperature237-239 (for more details
transported in a temperature gradient from the hot
see, e.g., refs 1, 34, and 35). This is due to the
to the cold zone with Cl2 or HCl as transport agents.
exothermic equilibrium eq V.1.
The transport rates are limited by the position of the
Crs + I2,g ) CrI2,g (V.1) respective volatilization equilibria. If the oxidation
potential of the transport agent is reduced, the
On the other hand using HCl240 or CrCl3241 as transport rates become smaller or even no migration
transport agents, chromium migrates in the opposite is observed.
direction because of the positive reaction enthalpy.
1. Cr2O3
B. Halides Of the known chromium oxides only Cr2O3 can be
transported in a temperature gradient. Hereto oxy-
The trivalent chromium halides CrX3 (X ) Cl, Br,
gen,1 halogens (Cl213,54,247-250 or Br255,248), halides
I) can be transported by several transport agents, but
(HgCl254 or TeCl435), or mixtures of these (CrBr3/Br255
the migration of the halide is accompanied by sub-
or CrI3/I256) were used.
limation if the temperature is increased. Using
In the presence of oxygen Cr2O3 stays in equilib-
halogens as transport agent (CrCl3/Cl2,1,242 CrBr3/
rium with the gaseous chromium(VI) oxide CrO3,g.1
Br2,35,58,243 and CrI3/I2242,243) it is possible to obtain
The endothermic reaction (eq V.8) leads to the
crystals of the chromium trihalides. The migration
migration of Cr2O3 to the cooler zone of the ampule.
is a result of the endothermic reactions eqs V.2 and
V.3. Cr2O3,s + 3/2O2,g ) 2CrO3,g (V.8)
CrX3,s ) CrX3,g (X ) Cl, Br, I) (V.2)
In the case of Cl2 as transport agent the migration
of Cr2O3 is controlled by several endothermic reac-
CrX3,s + 1/2X2,g ) CrX4,g (X ) Cl, Br, I) (V.3) tions. Depending on the amount of chlorine present
a change occurs in the transport mechanism.13,54 For
From chlorine to iodine the participation of the low concentrations of chlorine (and water from the
sublimation equilibrium (eq V.2) (X ) Cl, Br, I) wall of silica ampules) two equilibria determine the
becomes less important because of the diminished transport of Cr2O3,s.
stability of CrX3,g with respect to the free energy of
formation. Cr2O3,s + H2Og + 3Cl2,g ) 2CrO2Cl2,g + 2HClg
Besides sublimation another possibility exists to
deposit CrCl3 and CrBr3 in the sink by heating in an (V.9)
appropriate temperature gradient without additional
transport agent. CrI3,s decomposes completely into Cr2O3,s + 1/2O2,g + 2Cl2,g ) 2CrO2Cl2,g (V.10)
CrI2,s and I2,g under these conditions. The migration
is a result of sublimation and chemical transport by Increasing the amount of Cl2, the transport reac-
CrCl4,g242 or CrBr4,g,58 which are formed by the partial tion changes to13
disproportionation of a small amount of the halide
(“auto transport”). Cr2O3,s + 5/2Cl2,g ) 3/2CrO2Cl2,g + 1/2CrCl4,g
CrCl3 can also be transported by metal halides (V.11)
(AlCl3,115,244-246 GaCl3,245 or NbCl5245) via gaseous
metal complexes. In the case of AlCl3 (500 f 400 Transport rates of up to 6.9 mg/h (1000 f 900 °C,
°C) the migration is caused by the endothermic c(Cl2) ) 2.85 mg/cm3) were observed.54
equilibrium: When chromium is added to the transport system
(decrease of the ratio n°(Cl)/n°(Cr)) the gas phase is
CrCl3,s + 3/2Al2Cl6,g ) CrAl3Cl12,g (V.4) reduced gradually and CrCl3,g, CrCl2,g, and CrOCl2,g
become more important for the migration of Cr2O3
Of the known chromium(II) halides CrX2, transport (for more details see ref 54).
reactions are reported only for X ) Cl. The migration Also, the use of bromine instead of chlorine as
of the chromium(II) halide to the lower temperature transport agent causes a transport of Cr2O3. In
(350 f 250 °C) is mediated by AlCl3,246 whereas comparison to the Cr/O/Cl system the transport rates
GaCl3154 effects a transport in both directions (T > are smaller (m̆max(Cr2O3) ) 0.7 mg/h, 1000 f 900 °C,
380 °C cold f hot, T < 380 °C hot f cold). Again, c(Br2) ) 17.15 mg/cm3).55
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2979

The transport experiments give strong evidence of equilibrium composition of the solid and the gas
the existence of chromium oxybromides. According phase. Transport rates were not derived from these
to thermochemical model calculations based on es- calculations. These thermodynamic analyses often
timated thermodynamic data of the chromium oxy- allow a better choice of transport agent and temper-
bromides in the bromine-containing transport system ature gradients.
two equilibria control the migration of Cr2O3 (cf., eqs
V.9 and V.10).55 3. Phosphates and Sulfates
R-CrPO4 can be crystallized in a temperature
Cr2O3,s + H2Og + 3Br2,g ) 2CrO2Br2,g + 2HBrg gradient using Cl2 as transport agent.255 The ob-
(V.12) served transport rates are low (m̆ < 0.1 mg/d, 1100
f 1000 °C, c(Cl2) ) 2.90 mg/cm3).
Cr2O3,s + 1/2O2,g + 2Br2,g ) 2CrO2Br2,g (V.13) Crystals of rhombohedral anhydrous chromium(III)
sulfate can be grown in the less hot zone of a closed
With iodine a transport of Cr2O3 has not been silica ampule by means of chemical transport using
observed.56 Cl2 or HCl as transport agents.256,257 Thermochemi-
In comparison to halogen as transport agent mix- cal calculations show that the transport of the sulfate
tures of chromium(III) halide and halogen (CrX3/X2, is caused by the flux of CrO2Cl2, SO3, SO2, and O2
X ) Br,55 I56) yield higher transport rates. The from the hot to the cold zone.257
partial pressure of oxygen is lowered. By adding
Cr2(SO4)3,s + 2Cl2,g ) 2CrO2Cl2,g + (2 - x)SO3,g +
CrX3 the chromium oxyhalide CrOX2,g becomes an
important gaseous species for the transport of Cr2O3, (1 + x)SO2,g + (x/2)O2,g (V.17)
and CrX4,g has to be considered as transport agent.
(0 e x e 2, x ) 0 for T
h < 520 °C and x )
Cr2O3,s + 3CrBr4,g ) 3CrOBr2,g + 2CrBr3,g (V.14) 2 for T
h > 780 °C)
Cr2O3,s + 2CrI4,g ) 3CrOI2,g + CrI2,g (V.15) Cr2(SO4)3,s + 4HClg ) 2CrO2Cl2,g + 3SO2,g +
2H2Og (V.18)
Concluding from experimental data it was possible
to fix the estimated values of the enthalpies of 4. CrOCl
formation for CrOX2,g (X ) Br, I) and CrO2Br2,g more
precisely by thermochemical model calculations.55,56 In a temperature gradient CrOCl migrates to the
zone of lower temperature even if no transport agent
2. Oxospinels is added.1,13 This is a result of several consecutive
It is of general interest to grow large single crystals heterogeneous and homogeneous equilibria.13
of chromium oxo-, thio-, and selenospinels MCr2X4 CrOCl can be transported from hot to cold using
(M ) Fe, Mn, Ni, Co, Zn, Cd, Hg, Cu; X ) O, S, Se; Cl2 as transport agent.13,258 According to Nocker and
see Table 1), because of their magnetic, electrical, and Gruehn13 the migration of CrOCl in a temperature
optical properties. The physical properties of these gradient (600 f 500 °C) in the presence of chlorine
substances strongly depend on their composition is the result of the endothermic reaction
(stoichiometric or nonstoichiometric) and on doping. 2CrOCls + 2Cl2,g ) CrO2Cl2,g + CrCl4,g (V.19)
Transport reactions are widely used to grow such
crystals and to control their physical properties by With the use of the transport balance,9 it was
varying the composition of the gas phase. possible to observe several consecutive stationary
According to Peshev et al.252 CoCr2O4 and NiCr2O4 depositions, and nonstationary changes in the gas
migrate via CrO2Cl2, CoCl2, and NiCl2, respectively phase could be recognized.13
using Cl2 as transport agent. The gas-phase compo- It is also possible to crystallize CrOCl by using
sition was calculated (also for ZnCr2O4/Cl2253). Trans- HCl13 (eq V.20) or HgCl213 as transport agents.
port rates up to n̆ ) 9.9 × 10-5 mol/m2 s (CoCr2O4,
1050 f 950 °C) and 6.6 × 10-5 mol/m2 s (NiCr2O4, CrOCls + 2HClg ) CrCl3,g + H2Og (V.20)
1030 f 970 °C) were observed.
5. Other Compounds
MCr2O4,s + 3Cl2,g ) CrO2Cl2,g +
Chromium niobate CrNbO4 and chromium tanta-
MCl2,g (M ) Co, Ni) (V.16)
late CrTaO4 can be transported using Cl2 or HCl as
transport agents.251 It is also possible to obtain
Several oxospinels (MnCr2O4,251 CoCr2O4,251 and
crystals of CrNbO4 with a mixture of Cl2 and NbCl5
NiCr2O4251) migrate with HCl as transport agent, too,
as transport agent (980 f 860 °C).247,259
but no thermochemical calculations were performed
Mn3Cr2Ge3O12 (MCGG) crystallizes in a tempera-
for these systems.
ture gradient (950 f 880 °C) using Cl2,260 I2,260 or a
Many transport systems (e.g., CoCr2O4/Cl2,252
mixture of X/Cl2 (X ) C, S, Te)260 as transport agents.
NiCr2O4/Cl2,252 ZnCr2O4/Cl2,253 CdCr2S4/CrCl3,254 and
HgCr2Se4/CrCl3254) have been analyzed by means of Mn3Cr2Ge3O12,s + 8Cl2,g ) 3MnCl2,g +
thermochemical calculations based on different mod-
els of chemical vapor transport and the results have
2CrO2Cl2,g + 3GeCl2,g + 4O2,g (V.21)
been compared with the experimental data. These Mn3Cr2Ge3O12,s + 9I2,g ) 3MnI2,g + 2CrI3,g +
papers mainly deal with the volatilization of the solid
in the gas phase and the relationships between 3GeI2,g + 6O2,g (V.22)
2980 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

Table 1. Chemical Transport of Chromium and Chromium Compoundsa


substance transport agent ref(s) substance transport agent ref(s)
Cr I2 (-) 237-239 MnCr2S4 AlCl3 (+) 240,268,270
HCl (+) 240 FeCr2S4 Cl2 (+) 278,279
CrCl3 (+) 241 HCl (+) 286-288
CrB X2 (X ) Cl, Br, I) (+) 263 CrCl3 (+) 289-292
CrB2 X2 (X ) Cl, Br, I) (+) 263 Cl2/HCl (+) 279,294
Cr3Si X2 (X ) Cl, Br) (+) 263,264 HCl/CrCl3 (+) 240,288,291
I2 (-) 263,264 CoCr2S4 CrCl3 (+) 289
Cr5Si3 X2 (X ) Cl, Br) (+) 264 Cl2/HCl (+) 294
I2 (-) 264 HCl/CrCl3 (+) 240
CrSi Br2 (+) 264 NiCr2S4 (Ni1-xCr2+xS4) AlCl3 (+) 269,270
I2 (-) 264 AlCl3/CrCl3 (+) 240,270
CrSi2 Cl2 (+) 264-266 CuCr2S4 Cl2 (+) 287
Br2 (+) 264-266 ZnCr2S4 AlCl3 (+) 240,268,270
I2 (-) 264,265 CdCr2S4 Cl2 (+) 240,280-284
CrP I2 (+) 57 I2 (+) 283,285
CrAs I2 (+) 267 AlCl3 (+) 285
Cr2O3 O2 (+) 1 CrCl3 (+) 254,283,293
Cl2 (+) 13,54,247-250 Cl2/HCl (+) 294
Br2 (+) 55,248 HgCr2S4 Cl2 (+) 275
CrBr3/Br2 (+) 55 Fe1-xCuxCr2S4 Cl2 (+) 287
CrI3/I2 (+) 56 (M,Co)Cr2S4 (M ) Mn, Zn, Cd) AlCl3 (+) 240,269,270
HgCl2 (+) 54 Cr7Se8 AlCl3 (+) 240,269
Fe2-yCryO3 Cl2 (+) 261 Cr2Se3 AlCl3 (+) 240,269,274
FeCl3 (+) 261 CrCl3 (+) 274
TeCl4 (+) 262 Cr2S3-xSex AlCl3 (+) 274
MnCr2O4 Cl2 (+) 251 CrCl3 (+) 274
HCl (+) 251 ZnCr2Se4 AlCl3 (+) 240,269,270
CoCr2O4 Cl2 (+) 251,252 CdCr2Se4 HCl/Cl2 (+) 294
HCl (+) 251 AlCl3 (+) 240,269,270
NiCr2O4 Cl2 (+) 251,252 CrCl3 (+) 296
HCl (+) 251 CdCl2 (+) 295
M(Fe,Cr)2O4 Cl2 (+) 251 CuCr2Se4 AlCl3 (+) 240,269,270
(M ) Mn, Ni) HCl (+) 251 I2 (+) 297,298
ZnCr2O4 Cl2 (+) 253 HgCr2Se4 Cl2 (+) 299,301
CrNbO4 Cl2 (+) 251 Br2 (+) 299
HCl (+) 251 AlCl3 (+) 240,269,270
Cl2/NbCl5 (+) 247 CrCl3 (+) 254,282,299-303
CrTaO4 Cl2 (+) 251 HgCl2 (+) 245,299,301
HCl (+) 251 HgBr2 (+) 299
Mn3Cr2Ge3O12 X2 (X ) Cl, I) (+) 260 CrO2Cl2 (+) 299,301
X/Cl2 (X ) C, S, Te) (+) 260 AlCl3/Cl2 (+) 302
Cr3B7O13Br Br2 (+) 312,313 CuxGa1-xCr2Se4 CrCl3 (+) 304
R-CrPO4 Cl2 (+) 255 CuxHg1-xCr2Se4 AlCl3 (+) 305
Cr3(PO4)2 I2 (+) 308 CdCr2(S1-xSex)4 I2/AlCl3 (+) 285
Cr2P2O7 I2 (+) 309 ZnCr2(S1-xSex)4 I2/AlCl3 (+) 307
NH4Cl (+) 309 Cd1-xMxCr2Se4 (M ) In, Al, Ag, Cu) CdCl2 (+) 306
Cr7(PO4)6 I2 (+) 310 FeCr2S4-xSex HCl/Cl2 (+) 294
Cr6(P2O7)4 I2 (+) 311 CrTe I2 (-) 1
Cr2(SO4)3 Cl2 (+) 257 CrCl2 AlCl3 (+) 246
HCl (+) 256,257 GaCl3 (-/+) 154
CrS AlCl3 (+) 268,269 CrCl3 auto transport (+) 242
Cr7S8 AlCl3 (+) 240,268,269 Cl2 (+) 1,242
Cr5S6 AlCl3 (+) 240,268,269 AlCl3 (+) 115,244-246
Cr3S4 AlCl3 (+) 240,268-270 GaCl3 (+) 245
AlCl3/CrCl3 (+) 270 NbCl5 (+) 245
Cr2S3 Br2 (+) 30 CrBr3 auto transport (+) 58
I2 (+) 271 Br2 (+) 35,58,243
S2 (+) 272 CrI3 I2 (+) 242,243
HCl (+) 269,275 CrOCl auto transport (+) 1,13
AlCl3 (+) 240,268,269,274 Cl2 (+) 13,258
CrCl3 (+) 240,274,275 HCl (+) 13
HgCl2 (+) 13
a Key: (+) T2 f T1 “endothermic transport”, (-) T1 f T2 “exothermic transport” (T2 > T1).

Mn3Cr2Ge3O12,s + 4XCl4,g ) 3MnCl2,g + more importance in the transport systems Mn/Cr/Ge/


2CrO2Cl2,g + 3GeCl2,g + 4XO2,g (V.23) O/X/Cl (X ) C, S, Te).
The nonstoichiometric ternary compound Fe2-yCryO3
(X ) C, S, Te) migrates in a temperature gradient (T2 f T1) using
In our opinion the given transport equations are Cl2,261 FeCl3 (m̆ ) 1.5-9 mg/h, 1070 f 770 °C)261 or
not a satisfactory explanation of the transport be- TeCl4262 as transport agents. For the transport
havior of MCGG. It seems to be more obvious that systems Fe2-yCryO3/FeCl3261 and Fe2-yCryO3/TeCl4262
the gaseous species GeCl4 (instead of GeCl2), SO2, and the compositions of the equilibrium solids were
SO3 (instead of SCl4) aresdue to their stabilitysof calculated.
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2981

D. Intermetallic Compounds also possible to obtain mixed chalcogenides


Cr2S3-xSex.274
1. Borides, Silicides, Phosphides, and Arsenides Following Lutz et al.,240,268,269 the chromium sulfides
The chromium borides CrB and CrB2 migrate from can be transported with AlCl3 or CrCl3 as transport
hot to cold, if halogens (Cl2, Br2, or I2) are added as agents. The transport equilibria for AlCl3-containing
transport agent.263 systems as published by Lutz et al.268,269 seem to be
Preparation of single crystals of Cr3Si, Cr5Si3, an insufficient explanation for the observed transport
CrSi,264 and CrSi2264-266 is possible by several trans- behavior.240
port reactions using halogens (Cl2, Br2, or I2) as Cr2S3 crystals can also be grown in a temperature
transport agents. gradient (1020 f 890 °C) in the presence of excess
Krausze et al.265 report the transport behavior of sulfur as transport agent.272 Up to now it is unknown
CrSi2 (TA Cl2, Br2, I2). Detailed experimental results by which gaseous species the migration of the chro-
(m̆max(CrSi2) ) 1.8 mg/h, 1100 f 1000 °C, TA Br2) mium sulfide is mediated. If Br230 or I2271 are added
and a transport model based on thermochemical to the transport system, a transport effect is ob-
calculations are given. According to these, CrSi2 served, too.
migrates from hot to cold in the chlorine- and After Schäfer, CrTe1 transports in the presence of
bromine-containing system. iodine according to the endothermic reaction:

CrSi2,s + 8SiCl4,g ) CrCl2,g + 10SiCl3,g (V.24) CrTes + I2,g ) CrI2,g + 1/2Te2,g (V.28)

CrSi2,s + 3SiBr4,g ) CrBr2,g + 5SiBr2,g (V.25) E. Other Compounds


While using iodine as transport agent an opposite 1. Chalcogenide Spinels
transport direction is found. The reviews of von Philipsborn276 and Gibart et
al.277 cover crystal growth and crystallographic and
CrSi2,s + 10Ig ) CrI2,g + 2SiI4,g (V.26) chemical characterization of several thio- and sele-
nospinels.
The migration of the chromium rich silicides Cr3- a. Thiospinels. Due to their reduced stability
Si, Cr5Si3, and CrSi shows a behavior similar to CrSi2. compared with the oxospinels only a few thiospinels
While chlorine and bromine cause a transport from can be transported with oxidizing transport agents
hot to cold, iodine effects a transport in the reverse (FeCr2S4/Cl2,278,279 CdCr2S4/Cl2,280-284 and HgCr2S4/
direction. A detailed discussion of the transport Cl2275). Considerable yields were found, when I2
(transport rates, composition of the gas phase, and (CdCr2S4283,285), HCl (FeCr2S4,286-288 CuCr2S4,287 and
the subsequent transport behavior of the solids) in Fe1-xCuxCr2S4287), CrCl3 (FeCr2S4,289-292 CoCr2S4,289
the system Cr/Si (n°(Cr)/n°(Si) > 1) has been pub- and CdCr2S4254,283,293), AlCl3 (NiCr2S4269,270 and
lished.264 The incongruent dissolution of the silicides CdCr2S4285) or mixtures of these were applied (Cl2/
in the gas phase leads to different equilibrium solids. HCl,278,279,294 HCl/CrCl3,240,288,291 or AlCl3/CrCl3240,270).
In spite of this, the migration of the chromium The results of the transport experiments were veri-
silicides (m̆exp(CrSin) ) 1-10 mg/h) can be described fied by thermochemical analysis in only a few cases.
by the following equation:264 The composition of the gas phases were calculated
in the following transport systems: FeCr2S4/Cl2,279
CrSin,s + (1+2n)X2,g ) CrX2,g + nSiX4,g FeCr2S4/HCl/Cl2,279,294 MCr2S4/HCl/Cl2 (M ) Co, Cd),294
(X ) Cl, Br) (n ) 0.33, 0.375, 1) (V.27) CdCr2S4/X2 (X ) Cl, I),283 CdCr2S4/CrCl3,283 and
MCr2S4/CrCl3 (M ) Cd, Hg).254
With iodine the transport mechanism becomes Barraclough and Meyer283 investigated the trans-
more complicated.264 port systems CdCr2S4/X2 (X ) Cl, I) and CdCr2S4/
Chromium monophosphide CrP is deposited at the CrCl3 (n̆ ) 10-4 mol/d, 950 f 900 °C, c(CrCl3) ) 1.00
lower temperature using iodine as transport agent. mg/cm3) and propose a transport reaction for the
Transport rates up to 16.8 mg/h were observed (e.g., migration of the thiospinel:
1050 f 950 °C, c(I2) ) 7.61 mg/cm3).57 According to
thermochemical calculations CrP is dissolved in the CdCr2S4,s + 4X2,g ) CdX2,g + 2CrX3,g +
gas phase by formation of CrI2,g, Cr2I4,g, P2,g, and P4,g, 2S2,g (X ) Cl, I) (V.29)
while PI3,g, P2I4,g, HIg, and I2,g have to be considered
as effective transport agents. Depending on c(I2) b. Selenospinels. In the past, there was a great
CrI2,s is deposited in addition to CrP in the sink interest in growing crystals of selenospinels
region. (ZnCr2Se4,240,269,270 CdCr2Se4,240,269,270,294-296 CuCr2-
Selte et al.267 obtained crystals of CrAs by means Se4,240,269,270,297,298 and HgCr2Se4245,254,269,270,282,299-303).
of iodine. Therefore, various transport agents were examined
for their efficiency for the transport of several spinels
2. Chalcogenides to influence the physical properties of the crystals.
The synthesis of chromium sulfides (CrS,268,269 The authors found that the selenospinels migrate
Cr7S8,240,268,269 Cr5S6,240,268,269 Cr3S4,240,268-270 and under conditions similar to these of the thiospinels.
Cr2S330,240,268,269,271-275), chromium selenides (Cr7- However, the temperatures of transport are consider-
Se8240,269 and Cr2Se3,240,269,274) and chromium telluride ably lower than in the thio- or oxospinel systems.
(CrTe1) is performed in a temperature gradient (T2 Gibart302 investigated the transport system HgCr2-
f T1, T2 > T1) with several transport agents. It is Se4/AlCl3/Cl2. The chromium part of the ferromag-
2982 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

netic semiconductor transports via the gaseous com- endothermic reaction, namely: Mo/H2O,318,319 Mo/
plexes CrAl2Cl8 and CrAl3Cl12, while mercury migrates HgBr2,10 and Mo/SbBr3.320
as Hg and selenium as a Se2/Se6 mixture through the Molybdenum migrates from the higher to the lower
gas phase. The composition of the equilibrium gas temperature region with HgBr2 as a transport agent.
phase is also given by this author.302 Together with Mo we observed MoBr2 and MoO2 as
Wehmeier295 proposes for the transport of CdCr2- additional equilibrium solids in the sink region. Both
Se4 with CdCl2 as transport agent (800 f 700 °C). solids are formed by the reaction of the elementary
Mo with the transport agent or with oxygen-contain-
CdCr2Se4,s + 3CdCl2,g ) 4Cdg + 2Se2,g + CrCl3,g ing impurities or H2O out of the silica wall of the
(V.30) ampule.49 With the occurrence of these equilibrium
solids an additional steady-state of deposition is
It is also possible to obtain mixed thio-, seleno-, and developed prior to the migration of Mo (Figure 4). In
thioselenospinels by chemical transport reactions this first steady-state MoBr2 and MoO2 migrate
((M,Co)Cr2S4 (M ) Mn, Zn, Cd),240,269,270 simultaneously by two independent transport reac-
CuxGa1-xCr2Se4,304 CuxHg1-xCr2Se4,305 Cd1-xMxCr2Se4 tions:
(M ) In, Al, Ag, Cu),306 CdCr2(S1-xSex)4,285
ZnCr2(S1-xSex)4,307 and FeCr2(S1-xSex)4294). In these MoBr2,s + HgBr2,g ) MoBr4,g + Hgg (VI.2)
papers the composition and physical properties of
these crystals were investigated. The experimental MoO2,s + HgBr2,g ) MoO2Br2,g + Hgg (VI.3)
data of these transport experiments are given with-
out thermochemical calculations. The deposition of MoBr2 and MoO2 is followed by
the migration of Mo according to the endothermic
2. Cr(II) and Cr(II,III) Compounds reaction:
The chromium phosphates Cr3(PO4)2,308 Cr2P2O7,309
Cr7(PO4)6,310 and Cr6(P2O7)4311 can be transported Mos + 2HgBr2,g ) MoBr4,g + 2Hgg (VI.4)
with iodine as transport agent. On the basis of the
estimated data for Cr2P2O7, it seems to be possible When there is oxygen present in the transport
that the migration of the phosphate proceeds via system the deposition rates of the metal are drasti-
CrI2,g and P4O6,g if phosphorus or chromium mono- cally reduced. The contamination of the system, by
phosphide is added to the system:309 oxygen coming from impurities or water from the
wall of the silica ampule, can be easily simulated by
Cr2P2O7,s + 2I2,g + 2/3P2,g ) 2CrI2,g + 7/6P4O6,g introducing MoO2 into the system. This leads to a
smaller HgBr2 partial pressure (eq VI.3) and, accord-
(V.31) ing to the transport reaction (eq VI.4), to smaller
There are no thermochemical data for Cr3(PO4)2, deposition rates of the metal. The maximum trans-
Cr7(PO4)6, and Cr6(P2O7)4 available. It is therefore port rate (m̆max ) 41.0 mg/h, 1000 f 900 °C, c(HgBr2)
not possible to provide transport equilibria for these ) 8.65 mg/cm3) decreases to values less than 5 mg/h
compounds. (1020 f 960 °C) if MoO2 is present as an equilibrium
Crystals of the chromium boracite Cr3B7O13Br can solid.
be transported using Br2 as the transport agent.312,313 Thus best agreements between calculations and
experimental data were obtained assuming the pres-
ence of oxygen in the starting materials. According
VI. Molybdenum to our model calculations, the gas phase in the system
Mo/H2O/HgBr2 consists primarily of Hg, MoO2Br2,
A. Metal HBr, HgBr2, and MoBr4. For more details see ref 10.
For a general survey of chemical transport reac- The use of HgCl2 as transport agent190 leads to the
tions leading to the migration of Mo from T2 to T1 formation of MoCl2 as an additional solid at T2. Due
see Table 2. Most of the transport agents (e.g., to the higher stability of MoCl2, in comparison to
Cl2,314-316 or I2/H2O317) effect the migration of the MoBr2 (see ref 321), the deposition rate of Mo is
metal from the zone of lower temperature to the one reduced to zero. Only the deposition of MoCl2 (and
of higher temperature (T1 f T2, T1 < T2, exothermic MoO2) at T1 is observed.
transport reaction). With SbBr3 as transport agent, molybdenum can
For instance, Mo migrates, by using iodine as be transported from hot to cold, too.320 The deposition
transport agent, only if water is present in the rates are smaller than those using HgBr2 as trans-
transport system. Because of the instability of the port agent (m̆max ) 16.0 mg/h, 1000 f 900 °C,
molybdenum iodides, particularly the tetraiodide c(SbBr3) ) 7.21 mg/cm3). MoO2Br2 is the most
MoI4,g, the transport has to proceed via MoO2I2,g important molybdenum containing gaseous species
according to the exothermic equilibrium (VI.1) (for (see eq VI.5):
details see ref 317):
Mos + 2H2Og + 2SbBr3,g ) MoO2Br2,g + 4HBrg +
Mos + 2H2Og + 3I2,g ) MoO2I2,g + 4HIg (VI.1) 1
/2Sb4,g (VI.5)
The observed transport rates are less than 2.7 mg/h
(1050 f 1150 °C, c(I2) ) 3.30 mg/cm3). Together with molybdenum, MoO2 and Sb are
To our knowledge there are only a few systems in observed at T1 as additional equilibrium solids.
which Mo migrates from the higher to the lower Mo/W-mixed crystals can be prepared with HgBr2
temperature (T2 f T1, T2 > T1) according to an as transport agent (e.g., m̆ ) 3.6 mg/h, 1050 f 950
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2983

Table 2. Chemical Transport of Molybdenum and Molybdenum Compoundsa


substance transport agent ref(s) substance transport agent ref(s)
Mo Cl2 (-) 314-316 Cu3Mo2O9 X2 (X ) Cl, Br) (+) 100
H2O/H2 (+) 318,319 HCl (+) 100
I2/H2O (-) 317 TeCl4 (+) 100
HgBr2 (+) 10 MMoO4 (M ) Mg, Co, Ni) Cl2 (+) 251
SbBr3 (+) 320 HCl (+) 251
Mo/W HgBr2 (+) 155 M2Mo3O8 (M ) Mn, Fe, Co, Ni) TeCl4 (+) 353,354
Mo3P HgBr2 (+) 357 Mo(PO3)3 I2 (+) 355,356
Mo4P3 I2 (+) 356 NH4I (+) 356
HgBr2 (+) 357 MoP2O7 I2 (+) 356
MoP I2 (+) 356 HgBr2 (+) 356
HgBr2 (+) 357 MoPO5 I2 (+) 356
Mo5As4 X2 (X ) Cl, Br) (+) 358,359 Mo4P6O25 I2 (+) 356
I2 (+) 358-361 Mo2P4O15 I2 (+) 356
Mo2As3 X2 (X ) Cl, Br) (+) 358,359 HgX2 (X ) Cl, Br) (+) 356
I2 (+) 358-361 MoS2 S2 (+) 272,362
MoAs2 X2 (X ) Cl, Br) (+) 358,359 Cl2 (+) 1
I2 (+) 358-361 Br2 (+) 362-364
Mo3Sb7 I2 (+) 360,361 I2 (+) 317
MoO2 I2 or I2/H2O (+) 34,317,329-333 HBr (+) 363
H2O (+) 317,329 NH4Br (+) 363
TeCl4 (+) 334-340 MBr2 (M ) Ge, Sn) (+) 363
TeBr4 (+) 335,337 Mo2S3 X2 (X ) Cl, Br) (+) 363
TeI4 (+) 338 HBr (+) 363
HgCl2 (+) 59 NH4Br (+) 363
HgBr2 (+) 10,60 MBr2 (M ) Ge, Sn) (+) 363
HgI2 (+) 190 PbMo6S8 PbCl2 (+) 365
Mo4O11 I2 (+) 341-343 MoSe2 Se (+) 362,366-368
TeCl4 (+) 18,336,341-345 Br2 (+) 1,362,364,367,368,371
HgCl2 (+) 59 I2 (+) 1,367,368
HgBr2 (+) 60 XCl4 (X ) Se, Te) (+) 367,368
HgI2 (+) 190 Mo1-xWxSe2 Br2 (+) 369
Mo8O23 TeCl4 (+) 336 MoTe2 Br2 (+) 1,362,370-373
Mo9O26 TeCl4 (+) 336 I2 (+) 374
MoO3 Cl2 (+) 346 TeCl4 (+) 375
H2O (+) 347,348 Mo1-xWxTe2 Br2 (+) 370
HCl (+) 349 MoCl2 autotransport (+) 322
TeCl4 (+) 336 MoCl3 autotransport (+) 147,322,323
HgCl2 (+) 346 AlCl3 (+) 245
V1-xMoxO2 Cl2 (+) 350 MoBr2 Br2 (+) 35,324
TeCl4 (+) 351 HgBr2 (+) 10
MnMoO4 Cl2 (+) 99,251 MoBr3 Br2 (+) 324
HCl (+) 99,251 MoOCl2 MoCl5 (+) 323
XCl4 (X ) Se, Te) (+) 99 MoOBr3 Br2 (+) 325
Mn2Mo3O8 I2 (+) 99 MoSCl Cl2 (+) 363
HX (X ) Cl, I) (+) 99 MoSBr Br2 (+) 363
XCl4 (X ) Se, Te) (+) 99 Te4(MoOCl4)2 autotransport (+) 326
ZnMoO4 Cl2 (+) 352 Se4(MoOCl4)2 autotransport (+) 327
Zn2Mo3O8 HX (X ) Cl, Br) (+) 352 [Te15X4]n[MoOX4]2n (X ) Cl, Br) autotransport (+) 328
I2 (+) 352
CuMoO4 X2 (X ) Cl, Br) (+) 100
HCl (+) 100
TeCl4 (+) 100
a
Key: (+) T2 f T1 “endothermic transport”, (-) T1 f T2 “exothermic transport” (T2 > T1).

°C).155 The composition of the crystals varies over a which is formed by the partial disproportionation of
broad range. MoCl2 (“auto transport”).

B. Halides and Oxyhalides MoCl2,s + MoCl4,g ) 2MoCl3,g (VI.6)

The crystallization of some of the molybdenum


halides by chemical transport reactions is quite facile. MoCl3 migrates in a similar way:147,322,323
The migration caused by chemical transport is often
accompanied by sublimation of the halide. In most MoCl3,s + MoCl5,g ) 2MoCl4,g (VI.7)
of the cases the transport is merely used for the
purification of the compound. The transport reac- It is also possible to obtain crystals of MoCl3 with
tions proposed by different authors represent ther- AlCl3 as transport agent (400 f 350 °C):245
modynamically meaningful transport equilibria but
are not the result of thermochemical model calcula-
tions. MoCl3,s + 3/2Al2Cl6,g ) MoAl3Cl12,g (VI.8)
MoCl2 migrates without an additional transport
agent.322 The migration can be described by the MoBr235,324 (1100 f 900 °C) and MoBr3324 (450 f
endotherm reaction of MoCl2 with gaseous MoCl4, 350 °C) can be crystallized with bromine as transport
2984 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

agent. In both cases the halide migrates via MoBr4,g: with the metal to form MoCl2,s and cannot act as the
transport agent any further.190
MoBr2,s + Br2,g ) MoBr4,g (VI.9) Using HgBr2 instead of HgCl2 as transport agent10,60
yields smaller deposition rates (m̆exp ) 37.6 mg/h, 820
MoBr3,s + 1/2Br2,g ) MoBr4,g (V.10) f 740 °C, c(HgBr2) ) 1.55 mg/cm3). Experimental
and calculated data are in good agreement. The
MoOCl2,323 MoOBr3,325 Te4(MoOCl4)2,326 Se4- migration of the dioxide can be described by taking
(MoOCl4)2,327 and [Te15X4][MoOX4]2 (X ) Cl, Br)328 can MoO2Br2,g, HgBr2,g, and Hgg into account (see eq
also be transported. The migration from hot to cold VI.3).
is caused by chemical transport and sublimation At higher temperatures another equilibrium gains
(“auto transport”). significance:

C. Oxides MoO2,s + H2Og + HgBr2,g ) (1/n)(MoO3)n,g +


1. Dioxide 2HBrg + Hgg (n ) 3, 4, 5) (VI.15)
Only endothermic transport reactions (T2 f T1, T2
> T1) are reported for MoO2. With iodine as trans- At Th ) 620 °C, eq VI.15 contributes 0.1% to the
port agent MoO2 migrates via gaseous migration of MoO2. Increasing T h up to 1020 °C leads
MoO2I2.34,317,329-333 to a value of 5.0%.
If the migration of the dioxide is generated by
MoO2,s + I2,g ) MoO2I2,g (VI.11) HgI2,190 the deposition rates of MoO2 are smaller than
in the chlorine- or bromine-containing systems (m̆exp
The transport rate of MoO2 is small (m̆exp ≈ 0.2 mg/ ) 2.2 mg/h, 940 f 860 °C, c(HgI2) ) 1.95 mg/cm3).
h, 730 f 650 °C, c(I2) ) 1.61 mg/cm3). The smaller deposition rates are caused by the
When H2O is used as transport agent,317,329 there equilibrium:
is a transport effect, too. In this case MoO2 migrates
from the source to the sink via MoO2(OH)2 (H2MoO4). MoO2,s + HgI2,g ) MoO2I2,g + Hgg (VI.16)

MoO2,s + 2H2Og ) MoO2(OH)2,g + H2,g (VI.12) The position of equilibrium favors the left side.
The corresponding equilibrium with HIg also favors
The transport rates are small, too (m̆exp ≈ 0.7 mg/ the left side. Again, the gaseous species (MoO3)n,g (n
h, 1000 f 900 °C, c(H2O) ) 0.59 mg/cm3).317 ) 3, 4, 5) contribute to the migration of the dioxide:
Experimental results and model calculations are
reported by Schäfer et al.317 and Ben-Dor and Con- MoO2,s + H2Og + HgI2,g ) (1/n)(MoO3)n,g +
roy.329 2HIg + Hgg (n ) 3, 4, 5) (VI.17)
Very effective transport agents for the transport
of molybdenum dioxide are the tellurium tetrahalides
TeX4 (X ) Cl, Br, I)334-340 with TeX2,g being the active At T h ) 940 °C (∆T ) 80 °C) the migration is
transport agent. Transport rates up to 50 mg/h (X distributed among MoO2I2 (36%), Mo3O9 (44%), Mo4O12
) Br) and 14 mg/h (X ) Cl) were observed: (16%), Mo5O15 (1%), and H2MoO4 (2%).
The migration of MoO2 also occurs in the systems
MoO2,s + TeX2,g ) MoO2X2,g + 1/2Te2,g Mo/MoO2/HgX2 (X ) Cl,190 Br10) and MoO2/Mo4O11/
HgX2 (X ) Cl,59 Br,60 I190).
(X ) Br, I) (VI.13)
2. Mo4O11
Mercury dihalides HgX2 (X ) Cl, Br, I) are trans-
port agents of great effectiveness. In the past iodine341-343 and TeCl418,336,341-345 were
By using HgCl2, deposition rates up to 58 mg/h (620 used for the synthesis of Mo4O11 crystals by chemical
f 540 °C, c(HgCl2,g) ) 1.26 mg/cm3) were observed.59 transport reactions. No systematic examinations of
Experimental results and data based on thermo- the transport behavior in these systems were carried
chemical model calculations are in good agreement, out.
when a smaller diffusion coefficient (Do ) 0.025 cm2/s Using the mercury dihalides HgX2 (X ) Cl,59 Br,60
instead of 0.1 cm2/s) 1,335 is applied.59 I190) one obtains Mo4O11 crystals by chemical trans-
Equilibrium VI.14 describes the migration of MoO2 port reactions (T2 f T1, T2 > T1). It is not possible
using HgCl2 as transport agent: to obtain Mo4O11 in a pure state in these transport
systems. MoO2 is always deposited along with Mo4O11
MoO2,s + HgCl2,g ) MoO2Cl2,g + Hgg (VI.14) in the sink.
For HgCl2 as transport agent59 we obtained rates
The important gaseous species are Hg, MoO2Cl2, up to 57 mg/h for the simultaneous transport of MoO2
MoOCl3, HCl, and MoCl4. Only the solubilities ∆λi134 and Mo4O11 in the first steady state (T h ) 620 °C, ∆T
of Hg, HgCl2, and MoO2Cl2 are large enough to cause ) 80 °C, c(HgCl2) ) 4.30 mg/cm3). Depending on the
the migration of the dioxide. starting ratio n(MoO2)/n(Mo4O11) and temperature,
If there is metallic Mo present in the system we obtained two or three steady states of deposition.
besides MoO2, the deposition rates of MoO2 are During the transport experiment, the solid in the
diminished (m̆exp ) 1.1 mg/h, 1000 f 920 °C, c(HgCl2) source is oxidized until, in the final third steady state,
) 1.26 mg/cm3). Most of the transport agent reacts there is only MoO3 left:
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2985

(1) The equilibrium solids at T2 and T1 consist only D. Oxo Compounds


of MoO2 and Mo4O11. A mixture of MoO2 and Mo4O11
is deposited at the sink. 1. Molybdates
(2) The solid at T2 consists of MoO2 and MoO3. At General thermodynamic aspects of the chemical
T1 there is MoO2 and Mo4O11. MoO2 and Mo4O11 are transport of the ternary oxides MMoO4 (M ) Mg, Mn,
transported from T2 to T1. Co, Ni) with chlorine or HCl as transport agent are
(3) Equilibrium solid at T1, MoO2/Mo4O11, and at discussed by Emmenegger.251
T2, MoO3. Following the deposition of MoO3 in the Reichelt and Oppermann give a detailed discussion
sink leads to the oxidation of MoO2 to Mo4O11. about the system Mn/Mo/O.99 The preparation of
These three cases could be investigated in more pure MnMoO4 and pure Mn2Mo3O8 with several
detail by using the transport balance. The mecha- transport agents (Cl2, I2, HCl, HI, TeCl4, and SeCl4)
nism of transport and deposition, depending on the are described. The composition of the equilibrium
mean transport temperature T h and the starting gas phases and solubilities of the solids in the gas
ratios, is very complicated. The observed phase phases were calculated using the program GMIN.
ratios and the sequence of deposition can be ac- Systematic investigations of the transport system
counted for by thermochemical model calculations. V/Mo/O with Cl2 as transport agent350 show that it
It is not possible to propose a simple transport is possible to obtain crystals of V9Mo6O40 by means
reaction for the migration of the solid phases in the of chemical transport reactions, when oxygen is
system MoO2/Mo4O11/HgCl2/H2O (for details see ref excluded from the system. Experiments with TeCl4
59). as transport agent351 are also presented.
With HgBr2 as transport agent (starting solids Crystals of R-ZnMoO4 can be grown using chlorine
MoO2/Mo4O11)60 the transport system is similar. Like as transport agent (950 f 850 °C).352 Moreover the
in the HgCl2-containing transport system the solid crystallization of Zn2Mo3O8 by HX (X ) Cl, Br) or I2
in the source is oxidized during the transport reac- as transport agents (950 f 850 °C) is described.352
tion. Deposition rates up to 59 mg/h (MoO2/Mo4O11, Single crystals of CuMoO4 and Cu3Mo2O9 were grown
first steady state, 820 f 740 °C, c(HgBr2) ) 4.30 mg/ with Cl2, Br2, HCl, and TeCl4 as transport agent.100
cm3) were observed. Strobel et al. described the crystal growth of
M2Mo3O8 (M ) Mn, Fe, Co, Ni) by means of
In the system MoO2/Mo4O11/HgI2/H2O the deposi- TeCl4.353,354
tion rate of the oxide is diminished to values less than
4.0 mg/h.190 This is due to the fact that MoO2I2 is 2. Phosphates
less stable than MoO2Cl2 and MoO2Br2. Primarily
the gaseous species (MoO3)n,g (n ) 3, 4, 5) contribute It is possible to obtain crystals of molybdenum(III),
to the migration of the oxides. In contrast to the -(IV), and -(V) phosphates by chemical transport
HgCl2- and HgBr2-containing systems we observed reactions.
Mo8O23 and Mo18O52 besides MoO2 and Mo4O11. Mo(PO3)3 can be crystallized by means of iodine
Again, we recorded two steady states for some (900 f 800 °C, c(I2) ) 0.05 mg/cm3),355 HgBr2 (1000
experiments. f 900 °C, c(HgBr2) ) 2.50 mg/cm3),356 or NH4I (1000
f 900 °C, c(NH4I) ) 0.50-3.00 mg/cm3).356 For this
3. MoO3 one can use the trimetaphosphate355 or a mixture of
MoO3/P356 as starting solids.
Only a few papers have been published on the
MoP2O7 migrates in a temperature gradient (1000
chemical transport of MoO3 until now.
f 900 °C) by means of I2 or HgBr2.356 Depending on
In the system MoO3/Cl2, the molybdenum trioxide the starting solids (MoO3/P, MoO2/P, or Mo2P2O11/P)
migrates from the higher to the lower temperature MoP or the molybdenum(V) phosphates can be de-
according to the endothermic transport reaction:346 posited along with MoP2O7.356
MoPO5 (800 f 650 °C, TA I2), Mo4P6O25 (800 f 650
MoO3,s + Cl2,g ) MoO2Cl2,g + 1/2O2,g (VI.18) °C, TA I2), and Mo2P4O15 (1000 f 900 °C, TA I2; 900
f 800 °C, TA HgCl2; 900 f 750 °C, TA HgBr2) can
be transported from hot to cold.356 As starting solids
A related transport system results if Cl2 is replaced mixtures of Mo2P2O11/P were used.
by HgCl2:346
E. Intermetallic Compounds
MoO3,s + HgCl2,g ) MoO2Cl2,g + Hgg + 1/2O2,g
1. Phosphides, Arsenides, and Antimonides
(VI.19)
When HgBr2 is used as a transport agent the
Glemser and Haeseler347
reported an increased metal-rich molybdenum phosphides Mo3P, Mo4P3,
volatility of MoO3 in a temperature range of 600- and MoP as well as the pure metal can be crystallized
690 °C when water is present (cf., ref 348): by chemical vapor transport reactions.357 Due to
endothermic reactions the phosphides migrate in a
gradient from the higher to the lower temperature.
MoO3,s + H2Og ) MoO2(OH)2,g (VI.20)
A critical comparison of experimental observations
and calculated results reveals that MoBr4,g and PBr3,g
It is also possible to obtain crystals of MoO3 if are the most important gaseous species contributing
HCl349 or TeCl4336 are used as transport agents. to the migration of the phosphides. Thus the migra-
2986 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

tion of Mo3P, Mo4P3, and MoP can be described by b. Selenides and Tellurides. The semiconduct-
the following equilibria: ing MoSe2 has been subjected to many investigations
since it proved to be interesting for solar energy
Mo3Ps + (3n + 3)/2HgBr2,g ) 3MoBrn,g + PBr3,g + conversion. Therefore the influence of some trans-
(3n + 3)/2Hgg (n ) 2, 3) (VI.21) port agents on the growth of large single crystals of
MoSe2 was investigated (Se,362,366-368 Br2,1,362,364,367,368,371
Mo4P3,s + (4n + 9)/2HgBr2,g ) 4MoBrn,g + I2,1,367,368 SeCl4,367,368 and TeCl4367,368).
3PBr3,g + (4n + 9)/2Hgg (n ) 2, 3) (VI.22) Legma et al.367 established that MoSe2 migrates via
MoSe3, when selenium is added as transport agent
(1020 f 980 °C, c(Se) ) 9.00 mg/cm3). No transport
MoPs + 7/2HgBr2,g ) MoBr4,g + PBr3,g + 7/2Hgg rates are published in this paper.
(VI.23)
MoSe2,s + Seg ) MoSe3,g (VI.27)
Up to now this is the first metal-rich phosphide
system, for which it is possible to cause a migration
of all phosphides in a temperature gradient using According to the same authors367 the migration of
only one transport agent. From Mo to MoP all MoSe2 with Br2 (910 f 870 °C, c(Br2) ) 1.00 mg/cm3)
members of this class of substances (Mo, Mo3P, and I2 (930 f 830 °C, c(Br2) ) 3.00 mg/cm3) as
Mo4P3, and MoP) can be crystallized by chemical transport agents should be determined by the fol-
vapor transport with HgBr2 as transport agent. lowing equilibrium:
With MoP as the starting solid only MoP was found
as the equilibrium solid in the source and the sink MoSe2,s + 3/2X2,g ) MoX3,g + Se2,g (X ) Br, I)
region. We observed deposition rates m̆(MoP) up to
(VI.28)
45.5 mg/h (1000 f 900 °C, c(HgBr2) ) 7.28 mg/cm3).
Starting with Mo4P3 we observed MoP besides Mo4P3
in the source and sink region (1050 f 950 °C). However, from our point of view it seems more
Transport rates up to 28.2 mg/h were measured likely, that the metal migrates via MoBr4 with
(c(HgBr2) ) 8.90 mg/cm3). A reduced P content of bromine as transport agent and via MoO2I2 (H2O
the solid (Mo3P) lowers the transport rates (m̆(Mo3P) from the silica ampule) with iodine, respectively. For
) 9.4 mg/h, 1050 f 950 °C, c(HgBr2) ) 5.08 mg/cm3). the migration of MoSe2 in the presence of SeCl4 (1020
In contrast to the system MoP/HgBr2 the reduction f 980 °C) and TeCl4 (1000 f 850 °C) no transport
of Th leads to the formation of MoBr2 with Mo4P3 or equilibria were reported.
Mo3P as starting solids. Crystals of the mixed-transition metal dichalco-
It is also possible to obtain crystals of Mo4P3 and genides Mo1-xWxSe2 and Mo1-xWxTe2 can be obtained
MoP using iodine as transport agent.356 The trans- in an endothermic transport process, when bromine
port rates are considerably smaller than in the is added.369,370
HgBr2-containing system. MoTe2 migrates from hot to cold by means of Br2
Single crystals of Mo5As4, Mo2As3, MoAs2, and (900 f 700 °C),1,362,370-373 I2 (770 f 750 °C),374 or
Mo3Sb7 were obtained by means of Cl2,358,359 Br2,358,359 TeCl4.375
or I2.358-361 Murray et al.359 investigated the trans-
port systems Mo/As/X (X ) Cl, Br, I) systematically VII. Tungsten
and obtained the following transport equilibria (X )
Br): A. Metal
1 Due to the significance of tungsten in transport
MoAs2,s + 2Br2,g ) MoBr4,g + /2As4,g (VI.24)
reactions in halogen lightbulbs, many papers have
Mo2As3,s + 4Br2,g ) 2MoBr4,g + 3/4As4,g (VI.25) been published concerning this field (see for example
refs 376-378). For that reason the list of literature
in Table 3 cannot be considered as complete. Most
2. Chalcogenides of these investigations were carried out at tempera-
a. Sulfides. Like many other transition metal tures ranging from 3000 to 300 °C.
sulfides MoS2 can be transported with sulfur as As for molybdenum most of the transport reactions
transport agent (800 f 700 °C).272,362 Moreover, in the similar tungsten-containing system are exo-
crystals of Mo2S3 and MoS2 could be also obtained thermic causing the metal to migrate from the zone
with halogens (Cl2,1 Br2,362-364 and I2317) or halides of the lower to the one of the higher temperature (T1
(HBr,363 NH4Br,363 MBr2 (M ) Ge, Sn)363) as transport f T2, T2 > T1).
agents. Except for iodine, details of the transport The transport of tungsten in iodine-containing
processes have not been examined. MoS2 transports systems317,379 is an example of a W-containing exo-
via MoO2I2, when iodine is added as transport agent thermic transport system and should be particularly
and moisture is present in the system (m̆(MoS2) ) mentioned. Tungsten can only be transported by
0.5 mg/h, 820 f 750 °C, c(I2) ) 3.81 mg/cm3).317 means of iodine if water is present besides the
MoS2,s + 2H2Og + 3I2,g ) MoO2I2,g + 4HIg + S2,g halogen. Equilibrium VII.1 describes the migration
of the metal.
(VI.26)
Ws + 2H2Og + 6Ig (3I2,g) ) WO2I2,g + 4HIg
PbMo6S8 can be transported with PbCl2 as trans-
port agent (e.g., 1100 f 1000 °C).365 (VII.1)
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2987

To the best of our knowledge there are only a few 400 f 350 °C), with excess bromine as transport
examples of systems (W/HgBr211 and W/HgI2190) agent:381-383
transporting the metal into the low-temperature
region of the ampule. WOBr2,s + WOBr4,g ) 2WOBr3,g (VII.5)
With HgBr2 as transport agent we obtained deposi-
tion rates of tungsten up to 41 mg/h (1000 f 900 °C, WOBr3,s + WBr6,g ) WOBr4,g + WBr5,g (VII.6)
c(HgBr2) ) 4.25 mg/cm3). In contrast to molybdenum
the tungsten metal migrates as single phase. Nei- Crystals of Se17(WCl6)2,384 Te4(WCl6)2,385,386
ther WO2 nor WBr2 was formed by reaction of W with Te6(WOCl4)2,387 Te7WOCl5,388 Te7WOBr5, 389 Te8-
H2O or HgBr2 at T2 or T1. WO2Br2 has the largest [WCl6]2,390 [Te15X4][WOX4]2 (X ) Cl, Br),328 (Se6I)-
partial pressure of all tungsten-containing gaseous WCl6,391 and Te6I2(WCl6)2390 can be crystallized by
species, but because of its small ∆λi value134 it does transport reactions (T2 ) 250-150 °C, T1 ) 210-125
not contribute to the migration of tungsten. °C, ∆T ) 20-70 °C) which may be accompanied by
sublimation as well.
The equilibria VII.2 and VII.3 cause the endother-
mic migration of W:
C. Oxides
Ws + 2HgBr2,g ) WBr4,g + 2Hgg (VII.2) 1. Dioxide
By using halogens (Cl2,392,393 Br2,190
the
Ws + 5/2HgBr2,g ) WBr5,g + 5/2Hgg (VII.3) 317,329,332,379,394-396)
I2 as transport agents tungsten
dioxide migrates to the zone of lower temperature of
At Th ) 800 °C (∆T ) 100 °C) WBr4 contributes the ampule. The transport of WO2 proceeds via
4.3% and WBr5 93.5% to the migration of the metal. WO2X2 (X ) Br, I) and can be described by the
At higher temperatures (1100 f 1000 °C) the amount equilibrium
of WBr5 is reduced (WBr4 59.5%, WBr5 37.5%).
Introducing oxygen in the form of H2O or WO2 into WO2,s + X2,g ) WO2X2,g (X ) Br, I) (VII.7)
the system increases the WO2Br2 pressure while the
HgBr2 pressure and the transport rates (m̆(W) < 1.0 Kleber et al.393 reported an endothermic transport
mg/h) become smaller. This time the deposition of using X2 ) Cl2 (T2 ) 1000-850 °C, T1 ) 950-750
WO2 in a first steady state is followed by the °C). Our model calculations190 demonstrate that a
migration of W in a second step. transport from the hotter into the cooler region of an
ampule is only possible if water is present in the
With W or W/WO2 (TA HgBr2) as starting solids system. In this case HCl instead of Cl2 causes the
we observed a delayed deposition of tungsten (i.e., Th endothermic transport of WO2.
) 800 °C, 15 h delay of deposition) (Figure 4).
By means of HgI2 tungsten also migrates from T2 WO2,s + 2HClg ) WO2Cl2,g + H2,g (VII.8)
to T1. In contrast to the system W/HgBr2 the deposi-
tion rates are very small (m̆exp ) 0.2 mg/h, 920 f 840 Furthermore our model calculations confirm the
°C, c(HgI2) ) 1.68 mg/cm3). In addition to the metal, exothermic reaction of WO2 in the absence of water.
a small amount of tungsten dioxide is deposited in Maintaining these experimental conditions is difficult
the sink in a first steady state. The endothermic as the wall of the silica ampule releases water at high
equilibrium VII.4 regulates the migration of W. The temperatures.2
dioxide is formed by the metal reacting with water Bromine as transport agent190 leads to the deposi-
out of the wall of the ampule (or impurities of the tion of W18O49 besides WO2 at T1; the deposition rates
chemicals). are quite small (m̆exp(WO2 + W18O49) ) 1.7 mg/h, 840
f 760 °C, c(Br2) ) 0.39 mg/cm3).
Ws + 2H2Og + 3HgI2,g ) WO2I2,g + 4HIg + 3Hgg Experimental results of the transport system WO2/
I2 are presented in several papers.317,329,332,379,394-396
(VII.4) Dettingmeijer et al. reported transport rates up to
14 mg/h.379 Experimental results as reported by
B. Halides and Oxyhalides Schäfer et al. were m̆exp(max) ) 86 mg/h (c(I2) ) 3.05
mg/cm3, 1000 f 800 °C).317 Moreover, a small
During the research on the transport reactions in amount of W18O49 (WO2.72) is also deposited at T1.
halogen bulbs the tungsten halide and oxyhalide Using HgCl262 as transport agent we observed
systems were also investigated. In order to obtain transport rates up to 4.5 mg/h (c(HgCl2) ) 14.17 mg/
the thermodynamic data of these compounds it was cm3, 950 f 850 °C). In addition to WO2, W18O49 is
necessary to synthesize pure samples. Again, chemi- formed as an additional equilibrium solid at T1. The
cal transport reactions are a good means of purifying amounts of W18O49 however are small. According to
the starting materials. our model calculations the transport of WO2 is
WBr2 can be transported, when WBr4380 or HgBr211 described by equilibrium VII.9 at low temperatures
are added. The migration caused by chemical trans- (T
h ) 590 °C).
port reactions is accompanied by sublimation.
WOBr2 and WOBr3 can be prepared by reaction of WO2,s + HgX2,g ) WO2X2,g + Hgg
tungsten metal with WO3 and bromine. The tung- (X ) Cl, Br, I) (VII.9)
sten oxybromides can be purified in the following
transport reaction, which may be accompanied by At higher temperatures (T
h ) 950 °C) HCl, formed
sublimation (WOBr2, 580 f 450 °C; WOBr3, by reaction of HgCl2 with H2O, takes on greater
2988 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

Table 3. Chemical Transport of Tungsten and Tungsten Compoundsa


substance transport agent ref(s)
W Cl2 (-) 315,378,429-432
Br2 (-) 433,434
I2; I2/H2O (+) 317,379
H2O (+) 317,435-440
O/O2 (-/+) 441
X2 (X ) F, Cl, Br, I) (-) 442
X2 (X ) F, Cl, Br) (-) 443,444
X/O (X ) F, Cl, Br, I) (-) 377,445,446
HX (-) 447,448
X/H/O (X ) F, Cl, Br) (-) 449-453
F/O (-) 454,455
F containing systems (-) 456-458
HgBr2 (+) 11
HgI2 (+) 190
WCl6/Cl2 (-) 459
PSX3 (X ) Cl, Br) (-) 460,461
CH2Br2 (-) 462
Mo/W HgBr2 (+) 155
WP I2 (+) 417,418
WP2 I2 (+) 417
W2As3 I2 (+) 360
WAs2 I2 (+) 360
WO2 Cl2 (+) 392,393
Br2 (+) 190
I2 (+) 317,329,332,379,394-396
HCl (+) 392,393
TeCl4 (+) 335,397
TeBr4 (+) 335
HgCl2 (+) 62
HgBr2 (+) 11,14,62
HgI2 (+) 63
H2O/H2 (+) 1,398,399
NH4Cl (+) 190
W18O49 I2/H2O (+) 379
TeCl4 (+) 397
HgX2 (X ) Cl, Br) (+) 62
HgI2 (+) 63
W20O58 Cl2 (+) 393
HCl (+) 393
TeCl4 (+) 397
WO3 Cl2 (+) 400-402
Br2 (+) 401,402
H2O (+) 347,398,400,403-405
HCl (+) 400-402,407
CCl4 (+) 400
TeCl4 (+) 397
HgCl2 (+) 64
ZnWO4 Cl2 (+) 251,282
HCl (+) 251
MWO4 (M ) Mg, Mn, Fe, Co, Ni) Cl2 (+) 251
HCl (+) 251
In2WO4 H2O (+) 412
AxWO3 (A) K, Rb, Cs; HTB, TTB, ITB) HgX2 (X ) Cl, Br) (+) 413-415
AxNbyW1-yO3 (A) K, Rb; ITB) HgX2 (X ) Cl, Br) (+) 414
Ge0.24WO3 (HTB) H2O (+) 416
V1-xWxO2 TeCl4 (+) 408
(V,W)Ox HCl (+) 409,410
(Nb,W)Ox HgCl2 (+) 411
WP2O7 I2 (+) 417
WPO5 I2 (+) 417
WS2 S2 (+) 272
Cl2 (+) 419
Br2 (+) 364,419
I2 (+) 317
WSe2 Se (+) 362,367,368,420
Br2 (+) 1,362,364,367,368,371,372,420-422
I2 (+) 1,367,368,371,421,424-426
SeCl4 (+) 367,368,428
TeCl4 (+) 367,368
WSSe I2 (+) 427
WTe2 Br2 (+) 1,362,371,372
I2 (+) 1,371
WBr2 Br2 (+) 380
HgBr2 (+) 11
WOBr3 Br2 (+) 381,383
WOBr2 Br2 (+) 382,383
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2989

Table 3 (Continued)
substance transport agent ref(s)
Se17(WCl6)2 autotransport (+) 384
Te4(WCl6)2 autotransport (+) 385
Te6(WOCl4)2 autotransport (+) 386
Te6I2(WCl6)2 autotransport (+) 386
Te7WOCl5 autotransport (+) 388
Te7WOBr5 autotransport (+) 389
Te8[WCl6]2 autotransport (+) 390
(Se6I)WCl6 autotransport (+) 391
[Te15X4]n[WOX4]2n (X ) Cl, Br) autotransport (+) 328
a
Key: (+) T2 f T1 “endothermic transport”, (-) T1 f T2 “exothermic transport” (T2 > T1).

influence as a transport agent compared to HgCl2. amounts of H2O and the resulting gaseous species
The released O2,g is fixed in the solid in form of (for example HCl or HBr), formed under equilibrium
W18O49. Now the transport of WO2 is determined by conditions, as well as an influence of convection, are
eq VII.8. The transport mechanism is discussed by taken into consideration.
Schornstein and Gruehn.62 The migration of W18O49 in the transport system
The similar transport system containing HgBr2 is WO2/W18O49/H2O/HgI2 was compared with detailed
much more efficient than the one containing HgCl2 model calculations.63 Starting with WO2/W18O49,
m̆exp(max) ) 1195 mg/h, 840 f 760 °C, c(HgBr2) ) tungsten dioxide is transported prior to W18O49 in a
9.19 mg/cm3).11,14,62 Experimental results can be first steady state. For W18O49 transport rates up to
accounted for by thermochemical calculations, thus m̆ ) 47.0 mg/h were measured. Thermodynamic
the transport of WO2 can be described by eq VII.9.14 calculations reveal that the transport of W18O49 is
As for W, we observed a delay of deposition of WO2 expressed by several endothermic equilibria involving
at low mean transport temperatures (cf., Figure 4). small amounts of H2O from the silica ampule.
At lower temperatures the experimental transport
rates become smaller than those based on the model WO2.72,s + HgI2,g + 1.44HIg ) WO2I2,g + Hgg +
calculations (cf., Figure 2). It could be demonstrated 0.72H2Og + 0.72I2,g (VII.10)
that the deposition of WO2 at T1 is kinetically
hindered.14 WO2.72,s + HgI2,g + 0.72H2,g ) WO2I2,g + Hgg +
With HgI2 instead of HgBr2 deposition rates up to
72.4 mg/h (960 f 880 °C, c(HgI2) ) 8.54 mg/cm3) were 0.72H2Og (VII.11)
measured.63 The use of a mixture of W and WO2 as
starting solids at T2 leads to the deposition of pure WO2.72,s + 2HIg ) WO2I2,g + 0.28H2,g + 0.72H2Og
WO2 in the sink region. W18O49 is formed at T2 and (VII.12)
migrates to the zone of lower temperature, if no W
is added. The transport of WO2 is described by For the transport of W20O58 with HCl or TeCl4 only
reaction VII.9. the experimental data are published.397
Tungsten dioxide migrates by means of HCl (see
eq VII.8) in an endothermic transport reaction.392,393 3. Tungsten Trioxide
Therefore it is possible to transport WO2 using NH4-
By means of chemical transport reactions it is
Cl as transport agent.190 While migrating, the diox-
possible to obtain crystals of WO3. In the past
ide is partially reduced, forming metallic tungsten,
transport reactions were used only to crystallize WO3
which is observed at T2 as an equilibrium solid and
as single phase. Only a few papers are concerned
is the only solid to migrate into the sink region
with thermochemical calculations on the transport.
(m̆exp(max) ) 21.5 mg/h, 1025 f 925 °C, c(NH4Cl) )
By means of chlorine400-402 or bromine401,402 tung-
0.47 mg/cm3).
sten trioxide migrates according to eq VII.13:
Tellurium tetrahalides TeX4 (X ) Cl,335,397 Br335)
have a considerable effect on the transport of WO2
(m̆max ) 22.0 mg/h, TA TeCl4, m̆max ) 40.0 mg/h, TA WO3,s + X2,g ) WO2X2,g + 1/2O2,g (X ) Cl, Br)
TeBr4). A comparison of the experimentally observed (VII.13)
and the calculated transport rates is given.335,397
Several authors1,398,399 report on the evaporation of Like MoO3, the volatility of WO3 is increased in the
WO2 at high temperatures in the presence of a presence of water347,398,400,403-406 (see eq VII.14):
mixture containing H2O/H2.
WO3,s + H2Og ) WO2(OH)2,g (VII.14)
2. W18O49 and W20O58
W18O49 and W20O58 can be crystallized in a tem- With CCl4,400 HCl,400-402,407 or TeCl4397 as transport
perature gradient (T2 f T1, T2 > T1) by employing agents there is a transport effect, too. At high
several transport agents [Cl2,393 HCl,393 I2/H2O,379 temperatures, the decomposition of CCl4 leads to the
TeCl4,397 and HgX2 (X ) Cl, Br, I)63]. formation of Cl2.
Transport experiments with WO2/W18O49 as start- Schornstein and Gruehn64 investigated the trans-
ing phases reveal that HgBr2 and HgCl2 are suitable port system WO3/HgCl2 comparing the experimental
transport agents.62 Experimental and calculated results with those based on thermochemical calcula-
results agree to a large extent, if the presence of small tions. WO3 migrates by means of HgCl2 with trans-
2990 Chemical Reviews, 1997, Vol. 97, No. 8 Lenz and Gruehn

port rates up to 64.8 mg/h (1140 f 1060 °C, c(HgCl2) play a major part in the chemical transport reactions
) 1.11 mg/cm3). with tungsten phosphates.

WO3,s + HgCl2,g ) WO2Cl2,g + Hgg + 1/2O2,g 14


/5WPO5,s + 6/5WPs + 4I2,g ) 4WO2I2,g + P4O6,g
(VII.15) (VII.18)
Furthermore the effects of the transport agents After Martin and Gruehn418 WP as well as many
HgX2, X2 (X ) Cl, Br, I), and HCl on the deposition other phosphides can be prepared by reduction of
rate of WO3 are compared.64 It is concluded from WO3 with aluminum in the presence of phosphorus
these data that chlorine has the largest transport in sealed silica ampules (T ≈ 500 °C).
effect at temperatures up to ∼920 °C, whereas HgCl2 Crystals of WP can be separated from the reaction
is more effective at higher temperatures. mixture by subsequent chemical transport (m̆(WP)
It is possible to obtain mixed crystals of the ) 1.1 mg/h, 1000 f 900 °C, c(I2) 14.2 mg/cm3) in the
composition V1-xWxO2 (TA TeCl4408). Crystals of synthesis ampule.
vanadium tungsten oxides (V,W)Ox (850-750 f Single crystals of W2As3 and WAs2 were obtained
800-700 °C, TA Cl2409,410) as well as tungsten-rich with Br2358 or I2360 as transport agents.
solid solutions of (Nb,W)Ox phases (1250-1270 f
1100-1200 °C, TA Cl2411), both having block struc- 2. Chalcogenides
tures, can be transported.
a. Sulfides. WS2 migrates from hot to cold (800
f 700 °C) similar to MoS2, when excess sulfur is
D. Oxo Compounds present in the system.272 It is not quite clear by
1. Tungstates which gaseous species this transport is mediated.
Crystals of WS2 can be grown by means of Cl2,419
Crystals of MWO4 (M ) Zn,251,282 Mg,251 Mn,251 Br2,364,419 or I2.317
Fe,251 Co,251 Ni251) grow in a temperature gradient Schäfer et al.317 investigated the transport system
(T2 f T1), when Cl2 or HCl are added as transport WS2/I2/H2O obtaining transport rates up to m̆(WS2)
agents. A general discussion of chemical transport ) 16.7 mg/h (900 f 700 °C, c(I2) ) 1.18 mg/cm3). It
of tungstates is presented by Emmenegger.251 is concluded in this paper that the migration of WS2
In2WO4 migrates from hot to cold (starting solids proceeds via WO2I2 and S2, while I2, in combination
In2O3/WO3/W, 1100 f 1050 °C) with H2O as trans- with H2O, reacts as transport agent.
port agent.412
It is also possible to obtain crystals of hexagonal, WS2,s + 2H2Og + 3I2,g ) WO2I2,g + 4HIg + S2,g
tetragonal, or intergrowth tungsten bronzes (HTB,
TTB, or ITB) AxWO3, AxNbyW1-yO3 (A ) K, Rb, Cs, (VII.19)
800 f 750-700 °C, TA HgCl2 or HgBr2413-415) or
Ge0.24WO3 (930 f 830 °C, TA H2O416). b. Selenides and Tellurides. The semiconduct-
ing WSe2, WSSe, and WTe2 have been the subjects
2. Phosphates of many investigations as have the analogous mo-
lybdenum compounds. For the crystallization of the
WPO5 and WP2O7 migrate in a temperature gradi-
selenides and the telluride, many transport agents
ent with iodine as transport agent, if WP is present.417
were used (Se,362,367,368,420 Br2,1,362,364,367,368,370-372,420-423
Details are discussed in the next section.
I2,1,367,368,371,421,424-427 SeCl4,367,368,428 and TeCl4367,368,423).
With selenium as transport agent (e.g., 1000 f 850
E. Intermetallic Compounds °C, c(Se) ) 9.00 mg/cm3) the transport of WSe2 may
1. Phosphides and Arsenides be caused by WSe3,g367 (eq VII.20). No transport rates
are reported.
Of the known tungsten phosphides, only WP417,418
and WP2417 can be crystallized by means of the WSe2,s + Seg ) WSe3,g (VII.20)
chemical transport method using iodine as transport
agent. With Br2 (910 f 870 °C, c(Br2) ) 1.00 mg/cm3) and
The reduction of WO3 by elemental phosphorus at I2 (800 f 750 °C, c(I2) ) 1.00 mg/cm3) the transport
800 °C leads to the formation of WP, WP2, WPO5, and is described by the following endothermic equilibri-
WP2O7, depending on the molar ratio n°(P)/ um:367
n°(WO3).417 By chemical transport reactions using
iodine as transport agent (e.g., 1000 f 900 °C, c(I2)
WSe2,s + 3/2X2,g ) WX3,g + Se2,g (X ) Br, I)
) 5-17 mg/cm3), the phosphides and phosphates can
be purified and crystallized. (VII.21)

WPs + 2H2Og + I2,g ) WO2I2,g + 1/4P4,g + 2H2,g This equilibrium, as well as the similar molybde-
num-containing system, does not describe the trans-
(VII.16) port behavior well. It is rather more likely that the
transport of WSe2 proceeds via WBr4 and WBr5 with
WP2,s + 2H2Og + I2,g ) WO2I2,g + 1/2P4,g + 2H2,g Br2 as transport agent and WO2I2 in the iodine
(VII.17) system, respectively.
For SeCl4 (1020 f 980 °C, c(SeCl4) ) 3.00 mg/cm3)
The observed simultaneous transport of WP and and TeCl4 (1000 f 850 °C, c(TeCl4) ) 3.00 mg/cm3)
WPO5 implies that the following equilibrium may only the experimental data are given.
Chemical Vapor Transport Phenomena Chemical Reviews, 1997, Vol. 97, No. 8 2991

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obtained with bromine and iodine as transport 129.
agents.367 (60) Schornstein, H.; Gruehn, R. Manuscript in preparation.
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VIII. Acknowledgments (62) Schornstein, H.; Gruehn, R. Z. Anorg. Allg. Chem. 1988, 561,
103.
The authors wish to acknowledge the generous (63) Schornstein, H.; Gruehn, R. Z. Anorg. Allg. Chem. 1989, 579,
support of their research in the field of chemical 173.
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transport reactions by the Deutsche Forschungsge- 51.
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