You are on page 1of 29


Sushmitha.D, 28.12.2011

Today’s Overview

Learning Objectives • • • • Plasma processing Classifications Procedure Benefits .

•Named plasma by Irving Langmuir in 1928. . • Its the fourth state of matter. composed of an ionised gas.Introduction To Plasma •Identified by Sir William Crookes in 1879. • It can modify the wettability and dye uptake.

Main Attraction Of Plasma • • • • • Avoidance of chemical effluents. Low cost. . Rapid reaction times. Low consumption of gas. High cleaning efficiency.

Atmospheric pressure plasma. Low pressure plasma 1. . of ions n electrons 1. Cold plasma. Hot plasma. 2.Classification Of Plasma On basis of pressure in plasma chamber On basis of degree of ionisation & temp. 2.

2. Electronegative gas plasma. DC plasma. Electropositive gas plasma. AC plasma. 1.Classification of Plasma(cont…) On basis of frequency of power supply Depending upon the electron affinity of the process gases 1. . 2.

• Includes transferred arcs. corona discharge & dielectric carrier discharge…. In arcs & torches: 1. plasma torches. exceeds 3000 centigrade.Temp.Atmospheric Pressure Plasma • Used in variety of material used in metallurgy .

Produce non-equilibrium plasma with gas temp.Often arcing occurs btw electrodes. 1. 1.Pointed electrodes are used to prevent arcing and lower the gas temp. .Atmospheric Pressure Plasma(cont….) Corona & dielectric barrier discharge: 1. between 50 to 400 centigrade.

Adv. Is cost effective. Continuous treatment can be given. Disadv. 2. 2. Of atmospheric plasma: 1. 3. . Difficulty of sustaining of glowdischarge. Difficutly to form uniform plasma. High voltage are required for gas breakdown. Of atmospheric plasma: 1.

Types of atm.pressure plasma  Corona discharge  Dielectric barrier discharge  Plasma jet. .

usually air.highly curved 2.  Has 2 symmetric electrodes: 1.Low curvature  High curvature ensures high potential gradient around another for generation of plasma .Corona discharge:  Current develops btw two potential electrodes in a neutral fluid.

. such as chemical pesticides.plasma….Uses of corona discharge • Activation of polymer surface • Manufacture of ozone • Removal of unwanted volatile organics.

Dielectric barrier discharge(DBD) • 2 metal electrode in which one coated with dielectric layer. pressure-0. • Voltage-20KV. • Cannot be operated by DC fields.1 bar to 1 bar • It is also known as the silent discharge. .

.Dielectric barrier discharge(DBD) Advantages: • Material process like cleaning of metal surfaces… • Since plasma is not uniform. its use in etching and deposition is limited to cases where the surface need not be smooth..

• velocity-12m/s and temp-150 centrigrade.56 MHz RF power to inner electrode at voltage btw 100v and 250v. • Ionized gas from plasma jet exits through the nozzle onto a substrate.tungsten and silicon dioxide. • 13. oxygen & gases flow. • Used to etch polyimide .thus gas discharge.Plasma Jet: • 2 concentric electrodes through which a mix of helium. .

• A uniform glow discharge can be generated. • Etch and deposit thin films upto 10m/m and at temp below 150 centigrade. .Low pressure plasma: • Generate high concentration of reactive species. • Ions cause directional etch at sub-micron level.

. • High maintenance cost. • Uniform glows.Low pressure plasma: Advantages: Disadvantages: • Vacuum systems are expensive. • A stable operating window between spark ignition and arcing. • Size of the object to be treated is limited. • Low breakdown voltages.

atomic and molecular species is extremely high. .Hot plasma: • Occurs when temp of electron. • Nearly fully ionized. • Ex:The sun and stars in the universe consist entirely of hot plasma.

• Ex: flat screen television. • A small fraction of gas molecules is ionized. .Cold plasma: • Occurs when the atomic & molecular species are at ambient temp. whereas electrons at high temp. to finely etch channels on integrated circuits.

DC and AC plasma: • AC discharges are preferred over DC driven discharges bcz: 1. 2.In DC discharge-unwanted charging effects.This is reduced in AC. .energy transfer into the discharge is more efficient.As AC frequency increases.

of +ve ions=No. although both are smaller than no. of neutrons. ..He and reactive gases like nitrogen.Electropositive plasma: • Contain species that do not form negative ions easily. • No. of electrons. • Ex: noble gases like Ar.

. So. • Electron temp. to sustain & difficult to initiate. • No.unstable & non-uniform often.Electronegative plasma: • Species which have a positive electron affinity. is much higher than in EP plasma. of free electrons is significantly reduced • It requires high temp.

• Formed by applying a potential difference btw 2 electrodes that are inserted in a cell filled with gas. • Excitation collision forms excited species which decay to lower levels by light emission. of +ve & -ve charges and large no. . of neutral species.Glow discharge plasma: • Ionized gas with equal no.

iv. Lubricity vi. Wetting capacity ii. Cleanliness & sterility vii. Biocompatibility iii. Capillarity.Benefits of plasma textile surface treatment: i.Washability . Bond strength v.

this technology will play a crucial role for textile finishing… . • Would gain high potential in the times to come.Conclusion: • Its utilization is still at the nascent stage. • If the high equipment cost of plasma devices is minimized .

vol. India 2005. • • www. NID Publications.fibre2fashion.March 2006. • www.31..plasmatreat.B. Plasma Textile Technology. Indian Journal of Fibre and Textile Research.References: • Karthick .P.