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Sp15 Bee 112 (Fabrication)
Sp15 Bee 112 (Fabrication)
Fabrication Process Of
Integrated Circuits
Group Members
M.Hamza Fayyaz(Sp15-Bee-111)
Formation of N-
Diffusion Stripping off
Etching
protective layer
P-Diffusion Same As
Metallization Contacts Formation N-Diffusion
Types Of Fabrication:
P-Substrate
This Oxidation layer is basically used for insulation and also for the Gates.
Dry Oxide
Si + O2 SiO2
Wet oxide
P-Substrate
Step N0 : 02
Photo Resistor
SiO2
P-substrate
Masking
P-substrate P-substrate
Step No:
04
Wafer is immersed in acidic and basic solution and clean the exposed layer of photo
resistor
Depends on the material used to be etched out
Example like in Silicon or Poly silicon we use Hydro fluoric Acid
Nitride we use phosphoric Acid
SiO2 SiO2
P-substrate P-substrate
Step No : 05
Removes through Chemical Reaction
Like we use fuming Nitric acid or exposure to Oxides
Photo Resistor
SiO2 SiO2
P-substrate P-substrate
Step No : 06
SiO2
N-Well
N-Well P-substrate
P-substrate
Thin Gate Oxide:
Poly silicon layer is generally formed by silane at Conducting layer that
about 1000C connect the underlying
Then silicon is reacted with the oxygen at source or drain.
700C to give Aluminum and nitride and also Dielectric layer that
silicon dioxide deposited on the Wafer. separate gate terminal
from source or drain.
This Layer is generally thick oxides layer
Layer is normally compose
Aluminum is then vaporized to
of Aluminum or dry
deposited on the wafer
oxides.
N-Well
P-substrate
We first put a photo resist on the
Poly silicon layer
Then we put a masking on which
N- Photo part we want to aligned
P-substrate Well Resist Thin gate Oxide are made for
transistors.
Poly silicon is used because it
doesnt melt in the further process.
N- N-
Well Well
P-substrate P-substrate
Self Alignment
Poly silicon gives precise alignment for the source and Drain
Now, protective layer of Oxide is form
Use Masking process to make small gaps for n+ doping
N- N-
Well Align for Well
P-substrate P-substrate
Doping
Low temperature Process
Advantages:
-------------------------------
n+ Diffusion
N-well
P-Substrate
n+ Diffusion
n+ n+
N-well
P-Substrate
n+ n+
N-well
P-Substrate
-------------------------------
P-Diffusion
n+ n+
N-well
P-Substrate
p
p+ n+ p+ n+
+
N-well
P-Substrate
Firstly ,thick layer of Oxide is pressed on the wafer
This is a protective layer which protect other parts from environment .
Cut the part where we connects terminal.
Cut through the etching and same as above process
------------------------------
Contacts Thick Oxide Layer
p
p+ n+ p+ n+
+
N-well
P-Substrate
Through patterning and masking we get rid
of excess metal
------------------------------------
Metals
Splutter metal on the surface of wafer
p
p+ n+ p+ n+
+
N-well
P-Substrate
END RESULT OF FABRICATION
N-MOS P-MOS
p
p+ n+ p+ n+
+
N-well
P-Substrate
REFFERENCE:
Lecture slides .
Cheming Hu Ch3