Rohit Vepa Blue Wave Semiconductor Inc. Mentor: Dr. RD Vispute Blue Wave SemiConductor Inc. • A global leader in developing thin film and nanomaterials deposition systems and tools My Project
Find the best processes for creating Diamond-like-
Carbon (DLC) with certain properties Raman Spectroscopy Results • Fluorinated-DLC seemed to be best thin film • Most uniform thickness • Increased both hardness and wear resistance • Decreased the friction coefficient Future Work