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Deposition
PVD
Physical methods produce the atoms that
deposit on the substrate
– Evaporation
– Sputtering
Sometimes called vacuum deposition
because the process is usually done in an
evacuated chamber
PVD is used for metals.
Dielectrics can be deposited using specialized
equipment
Salicide
http://www.research.ibm.com/journal/rd/444/jordansweet.html