MEMS Gyroscope

What is MEMS Technology?

• Micro-Electro-Mechanical Systems.

• Micro-electromechanical systems (MEMS) is a

technology that combines computers with tiny
mechanical devices such as sensors, valves, gears,
mirrors, and actuators embedded in semiconductor
chips
How it works?
• It comprise integrated
Mechanical Components like,
•levers
•springs
•deformable membranes
•vibrating structures
Electrical Components like,
• resistors
• capacitors
• inductors

•  Designed to work in concert to sense and report on the physical

properties of their immediate or local environment to perform some
kind of controlled physical interaction or actuation with their
immediate or local environment. 
How it works?
MEMS Gyroscope
Gyroscopic effect
MEMS Gyroscope
MEMS gyroscopes use the Coriolis Effect
MEMS Gyroscope
MEMS Gyroscope
Type
• Piezoelectric gyroscopes
• Wine-glass resonator
• Cylindrical resonator gyroscope (CRG)
• Tuning fork gyroscope
• Vibrating wheel gyroscope or Disc resonator gyroscope (DRG)
Application
• Helps in Positioning of Spacecraft
• Helps in detection of Yaw Rate, thus, helps in calculation of steering Error
• Roll Over detection
• Gaming Companies use MEMS Gyroscope in making Gaming Consoles
• Smart Phones are nowadays equipped with it, making it an input device for
running of various applications
• Used as a Image Stabilization device for Cameras and Camcorders
• Detect Vibrations and Movements, thus robots can work more efficiently
Thank You