Scanning Electron Microscopy

Basic Principles
Presented by Joven Calara Research Engineer, Metallurgy

Simple Magnifiers
Raindrop

Simple Magnifiers
Raindrop

Simple lens - hand magnifier

Magnification to ~10x

Compound Magnifiers - Microscope

Maximum magnification ~1000x - WHY?

Light Microscope limits of magnification

Green algae 400X magnification

Light Microscope limits of magnification

Green algae 800X magnification

Visible Light Spectrum

Wavelength ( ) 400 700 nm

Optical microscopes
Optical microscopes resolution limited by wavelength of light

Abbe s Law; Maximum resolution = /2 = 200 nm

Image of point light source the Airy disc

Image of point light source the Airy disc

Airy disk

Image of point light source the Airy disc

Airy disk

Airy disks and resolution

Objects smaller than 500 nm

Viruses, as small as 5 nm

Objects smaller than 500 nm

Viruses, as small as 5 nm Smoke or soot particles Colloids (very fine particles) Milk !

Objects smaller than 500 nm

http://www.foodsci.uoguelph.ca

Wavelengths shorter than 200nm needed

Wavelengths shorter than 200nm needed

, nm Ultraviolet X-rays Gamma rays 100 200 0.1 100 < 0.1 Why not Glass is opaque to UV Glass can t focus x-rays Ionizes everything

By early 1900, new approaches to microscopy were desperately needed.

A Different Method of Magnification - Mapping

Mapping ; one-to-one correspondence between finite number of the elements of two areas. Modern implementation is scanning. Example; a small photograph mapped onto a building wall mural scanning photo into picture elements (pixels) and enlarged reproduction of the pixels. Each pixel a single color/brightness.

Subdivide this into pieces, each to match a pixel on LCD

20 cm x 20 cm section of LCD

A section of an LCD screen

A section of an LCD screen

Pixel count = 4 per mm

Subdivide this into pieces, each to match a pixel on LCD screen 800 pixels high and wide

20 cm x 20 cm section of LCD

Black and white picture, pixel attribute is brightness only. Laser beam scan OK.
= laser spot diameter d cm

800 pixels high and wide

20 cm x 20 cm section of LCD

Black and white picture, pixel attribute is brightness only. Laser beam scan OK.
= laser spot diameter d cm

800 pixels high and wide

20 cm x 20 cm section of LCD
d, cm 5 0.2 0.02 0.01 magnification 4x 100x 1000x 2000x Light beams at >>1000x laser spot dia. 0.063 mm 0.0025 mm 250 nanometers 150 nm

Electron beams (electrical discharges)

Lightning electron beam in air

Lightning Globe toy electron beams in partial vacuum

Early Electron Beam Device Crooke s Tube

Cathode ray tube

Cathode ray deflection with magnetic fields

Early oscilloscope (1897)

First example of beam scanning, just on a single line. Input signal appears as waveform.

Cathode ray tube (CRT, 1907)

Raster scanning

Modern Electron Beam Devices Television - Computer monitors

TV

Black and white TV - ~1950

CRT monitor ~1980

Technological skills in place by early 1900; Generation of electron beam Focusing of the beam Scanning or rastering (scanning e.g. left to right, then down a bit, repeat scan)

Simplified sketch of electron scanning optics

Simplified sketch of electron scanning optics

Laser scanning detected signal = reflected light E-beam scanning detected signal = ? ? ? ?

Electron beam solid interaction

Electron ejection from sample by primary beam

Secondary electrons, <50eV

Backscattered electron, high eV

The Scanning Electron Microscope

Electron Imaging Effect of Surface Topology

(Detector overhead sample)

Electron Imaging Effect of Surface Topology

(Detector overhead sample)

Chrysanthemum pollens

Magnification by the SEM Effect of Probe (Beam Spot) Size

Small area on specimen

Display device photo print or monitor

Magnification with wide probe size (laser spot?)

Small area on specimen

Display device photo print or monitor

Wavelength of electron beams the De Broglie Equation

Light can behave as waves ( lightwaves ), or as particles (photons). De Broiglie proposed the converse is also true. Electrons have wave properties.

De Broglie Equation adapted to SEM = h/sqrt(2meV) = 1.23/sqrt(V) nanometers At V = 10,000 volts, = 0.0123 nanometers
h (Planck s constant) = 6.63x10-34 Js m(electron mass) = 9.11x10-31 kg e (electron charge) = 1.6x10-19 C

SEM resolution
Theoretical 0.01 nm Development lab grade 0.1 nm High end 1.0 nm Typical 3 nm (ca. 300,000x)

Typical magnifications routine 200-8000x

Depth of Field how deep is the field in sharp focus

Optical microscope

SEM

Tungsten filament

Characteristic X-rays; Elements Chemical Analysis

Characteristic X-rays; Elements Chemical Analysis

Ductile Iron

JEOL JSF-6400 Scanning Electron Microscope of SLCC

Hitachi TM3000 Scanning Electron Microscope