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MEMS AND NANO MATERIALS

Assignment topics

1. Piezoresistive pressure sensor 2. Capacitive membrane pressure sensor

-included first test - included first test

3. Capacitive Comb structure pressure sensor - included first test 4. Mech-zehnder interferometer 5. Hall sensor based angular measurement 6. Capacitive angular measurements 7. Piezo resistive accelerometer 8. Capacitive accelerator 9. Chemical sensor 10. Optical sensor 11. Ion sensitive FET sensor 12. Bio sensor 13. Temperature sensor 14. Translational Micro actuator 15. Rotary micro actuator 16. Flash measuring 17. CMOS 18. MOSFET 19. SET 20. Quantum Dots 21. Resonant Tunnelling Diode 22. Resonant Tunnelling Transition 23. Si Photo voltaic - included first test

24. Pressure sensitive &TiO2 photovoltaics

The assignment topics have the following sub heading Construction Working principles Features such as size mass , sensitive, range, accuracy, repeatability Application and Limitation

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