KHOA CNG NGH IN T

TIU LUN MN HC

CNG NGH VI IN T


Nhm 6


GVHD: TS. Nguyn Minh Ngc


DANH SCH NHM
1. Lng Quang Ti 10046681
2. Trn Thanh Tm 10035161
3. Nguyn Cng Tng 10044671
4. on Tn Thanh 10058581

TN TI:
Photolithography & Etching
Quang khc, cht cn quang resist, thit b,
qui trnh?
Gii hn v nhng li trong qu trnh
quang khc? Phn bit n mn t v n
mn kh?

1. Tng quan v quang khc
Quang khc l k thut s dng bc x
nh sng lm bin i cc cht cn quang
ph trn b mt to ra cc chi tit ging
nh thit k.
Do nh hng ca nhiu x nh sng
nn phng php quang khc khng cho
php to cc chi tit nh hn micro mt,
v vy phng php ny cn c gi l
quang khc micro (micro photolithography)



2. Quy trnh quang khc
Cc bc c bn ca quy trnh quang khc

1. Chun b b mt
2. ng dng cht cn quang
3. Sy s b (soft bake)
4. nh v mt n v phi sng
5. Trng ra
6. Sy s b ln 2 (hard bake)
7. Kim tra
8. Ph lp bo v
9. Kim tra ln cui



Chun b b mt & ph cht cn quang
B mt ca sau khi x l c
ph mt hp cht hu c gi l cht
cn quang (photoresist)
Cht cn quang:
L mt hp cht hu c c tnh nhy quang
Tnh cht b thay i khi chiu cc bc x
thch hp
Bn trong mi trng kim v axit

Cht cn quang thng c ph ln b mt
wafer bng k thut quay ph (spin-coating).
CHT
CN QUANG
CN QUANG
DNG: cht
cn quang sau
khi b nh sng
chiu vo s b
ha tan trong
cc dung dch
trng ra
CN QUANG M:
cht cn quang
sau khi b nh
sng chiu vo
khng b ha tan
trong cc dung
dch trng ra
Sy s b (Soft Bake)
Quy trnh nhit tiu chun:
20 pht u: nhit 90-100
o
C , trong
mt l i lu
45 giy sau: nhit 75-85
o
C , trn mt
tm kim loi nng
Trong thng mi, ngi ta thng nung
nng bng l vi sng hoc n hng ngoi.

nh v mt n v phi sng
Trong giai on ny, h s c chiu nh
sng chuyn hnh nh ln nn, mt n
c t gia h thu knh v nn.
C 3 phng php chiu da vo v tr t
mt n:
Mt n tip xc
Mt n t cch cht cm quang mt
khong cch nh
Mt n t cch xa cht cm quang, nh
sng c chiu qua h thu knh.










B dng nh v mt n vo wafer s dng k thut
ng chnh (mask aligner)
Qu trnh n mn
C hai phng php n mn chnh l : n
mn t v n mn kh.
n mn t
Ngay t cng on phin va mi
c ca ra khi thi silicon t nh my sn
xut phin, cc ha cht c s dng
mi nghin v nh bng. Cui cng
chng ta thu c mt tm silicon phng v
nhn.
i vi nhng thit b n l hoc
mch tch hp c kch thc ln (> 3
m), ho cht n mn c s dng
khc nhng ho tit v m ca s trn lp
vt liu in mi.
n mn kh:
Tm silicon c a vo trong bung
chn khng, sau hn hp kh dng cho
n mn c a vo trong bung phn
ng.
chn khng thch hp, di tc dng
ca ngun cao tn, kh n mn b ion ho v
chng ta thu c hn hp plasma ca kh
ni trn bao gm cc ion F+ do SiO2
hoc Si b n mn v to ra cc sn
phm phn ng tng ng.
Trng ra
Dng ha cht tch cc cht cm
quang cha ng rn
Cc thng s kim sot trong qu trnh
ra: nhit , thi gian, phng php
v ha cht ra.
C 2 phng php ra: phng php
nhng (a trc tip dung dch ra) v
phng php phun.
Sy sau khi hin nh
Mc ch ca bc ny l lm cho
lp cm quang cng hon ton, ng
thi tch ton b dung mi ra khi cht
cn quang
3. ng dng ca quang khc
Ch to vi mch in t trn ming Si
Ch to cc linh kin vi c in t
(MEMS) (Microelectromechical System)
Ch to cc chi tit nh trong ngnh khoa
hc cng ngh v vt liu
u v nhc im
u im: To ra vt liu kch c
micromet vi chnh xc cao.
Nhc im: Khng th ch to cc
linh kin vi kch thc nano
Trong cng ngh quang khc nh hng
ca cc yu t bn ngoi nh m,
nhit phng, sch ca phng cho
n cc thng s trong qu trnh quang
khc nh thi gian chiu sng, tc
quay ph, nhit nung mu u
nh hng ln n cht lng ca
mng.