Equipment Commissioning

Checklist
Form Number/Rev #
EHS-0001-F1 R1
!pplic"nt#
$"te o%
Commissioning#
N"me o% &rg"ni'"tion#
/ /
(ool &)ner#
(ool *+enti%ic"tion Equipment $escription
Tool ID Code:
Tool Name:
Supplier:
Model:
Equipment St"tus
Ne) - anticipated arrival date - / /
Reloc"te+ (equipment must be decontaminated) - from oter location
from !itin CNS" #acilities
Ch"nge to E,isting *nst"ll"tion (onl$ complete sections tat appl$)
Description of Can%e(s):

Responsible -"rties
Co+e
.R/
Full N"me *niti"ls -hone #
Installation Coordinator
IC
Tool &!ner
T&
Tool "n%ineer/
"quipment "n%ineer
T"/""
CNS"
"nvironmental'
(ealt ) Safet$
"(S
CNS" #acilities Tool
(oo*-up Mana%er
-
Tis cec*list is for use in approvin% te completed installation of tools usin% (a+ardous
,roduction Materials ((,M) and equipment for commissionin% to be used in te CNS"
#acilities- Te cec*list is divided into t!o (.) parts- ,art / covers te electrical' mecanical'
non-(,M cemicals and facilities release- ,art . covers te release of all (a+ardous
,roduction Materials and ,$sical (a+ards for tool/equipment operation- Tis cec*list
must be completed prior to releasin% te tool/equipment to te tool o!ner for process
transition and operational use-
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 1 o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
-!R( 1 E34*-5EN( C&55*SS*&N*N6 CHEC78*S(
Electric"l 9 5ech"nic"l !ctiv"tion: Non-H-5 Chemic"ls "n+ F"cilities Rele"se
In some cases electrical ener%$ must be supplied to e4ecute portions of te ,art / Cec*list- Necessar$
electrical po!er circuits ma$ be released from 5&T&' follo!in% approval from CNS" #acilities "(S' in
order to cec* proper operation of tese subs$stems- Te circuits must ten be returned to a 5&T& state
until ,art / is approved-
6en te ,art / Cec*list is full$ and successfull$ completed' all electrical po!er' vacuum' non-(,M
cemical and !ater facilities ma$ be activated- 7ll oter s$stems associated !it te tool/equipment (i-e-
p$sical' (,M cemical' radiation' or oter a+ards) must remain completel$ loc*ed out until installation
is complete and te ,art . Cec*list is approved-
N!
!; Electric"l 5"tri,
8ist "ll sources o% electricit< to the tool/equipment .*C/
N"me o% -"nel / Fee+er =olt"ge .=/
-h"se
Current
.!/
>re"ker
Si'e
.!/
8ock"ble
$isconnect?
8ist
=olt"ge
(este+ 9
=eri%ie+?






N
!
>; Electric"l S"%et< Requirements *C (E/EE EHS
/- (as %round continuit$ been verified8 (9round/bond straps installed ) verified
!ere applicable)
: :
.- (as te facilit$ po!er net!or* from te distribution or branc panel to te tool
main disconnect been verified for correct connections and labelin%8
: :
;- 7re tere loc*able main po!er disconnects readil$ accessible' properl$ labeled'
and capable of disconnectin% all electrical po!er sources to te macine8
: : :
<- Is electrical !irin%/ equipment protected from probable liquid lea* sources8
: :
=- Is a 9round #ault Circuit Interrupt (9#CI) s$stem installed ) operatin% per desi%n'
!ere applicable8 N/7
: :
>- If installed in a+ardous classified locations or e4posed to flammable vapors' are
all electrical components rated for a+ardous locations in accordance !it ICC
"lectrical Code class' %roup ) division per desi%n8
: :
2- Is te tool connected to an ?ninterruptible ,o!er Suppl$ (?,S unit ) tool labeled
accordin%l$)8 N/7
: :
@- 7re all support s$stems (i-e- vacuum pumps' cillers' etc-) fed from te tool or
sub-panel properl$ connected and labeled8
: : :
A- 7re te follo!in% items labeled correctl$ and clearl$8 (labelin% requirements in
parenteses)
a- Main po!er disconnect (&n/&ff' tool ID(s) tat it supplies' volta%e' pase'
current' suppl$ circuit B' location / ID of suppl$ sub-panel)
: : :
b- Suppl$ electrical sub-panel (tool identification tat it supplies)
: : :
c- 7ll tool disconnects (&n/&ff' tool ID(s) tat it supplies' volta%e' pase' current'
suppl$ circuit B' location / ID of suppl$ sub-panel' t$pe of po!er (e-%- Normal'
?,S))-
: : :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 2 o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2

N
!
>; Electric"l S"%et< Requirements *C (E/EE EHS
d- Convenience outlets (circuit brea*er B' panel B)- N/7
: : :
e- 7re tool status indictors (i-e- li%t trees) labeled appropriatel$8
: :
/1- 7re all unused openin%s in electrical panels or enclosures properl$ closed8 : : :
N! Cor+ 9 -lug
N!
C; 8ockout/("gout "n+ H"'"r+ous Energ< Control *C (E/EE EHS
/- (ave 5oc*out / Ta%out (5&T&) procedures been developed specific to tis
equipment and submitted to "(S8
@ @
.- 7re means provided for isolation (5&T&) of all a+ardous ener%$ sources
(mecanical' pneumatic' $draulic' and cemical' radiation' etc-) ) are all
isolation points identified and documented8
: :
;- ,rior to ,art / si%n-off' are all a+ardous ener%ies completel$ loc*ed and ta%%ed
out8
:
<- (as te activation of an$ ,art / (non-(,M) utilit$ (e-%- electrical) been verified to
ensure tat installation personnel !ill N&T be e4posed to a+ardous conditions
durin% remainin% installation activities8 If not' please describe-
N/!
: :
Notes "n+ Comments#
$; !ccess "n+ Cle"r"nce Requirements *C (E/EE EHS
/- Is te minimum !or* space clearance in front of electrical equipment tat is li*el$
to require e4amination' adCustment' servicin%' or maintenance !ile ener%i+ed
compliant !it N"C- (;>D for E /=1 0 or <.-<@D for /=1->11 0' dependin% on N"C
conditions)-
: : :
.- Is te !idt of te !or*in% space in front of electrical equipment te !idt of te
equipment or ;1 inces' !icever is %reater (N"C)8
: : :
;- Is tere a minimum of @1D clear eadroom in electrical !or*space per N"C8 : : :
<- Is tere a ;>D ori+ontal servicin% clearance for (,M !or*stations (per NFS#C
/@1=-.-.-;)8
: : :
=- Do all e4terior doors and access panels !arn of te a+ards located beind tem8 : :

N
!
E; 8"sers N/! (E/EE EHS
5ist T$pe ) Guantit$: Class / Class /M Class . Class .M
Class ;3 Class ;H Class <
: :
/- Is a label visibl$ present on te outside of te tool' certif$in% compliance !it #D7
-CD3( requirements (./ C#3 /1/1-.)8
:
.- Is equipment containin% lasers labeled per 7NSI I/;>-/ ) per ./ C#3 /1/1 ) ./
C#3 /1<1-/18
:
;- 7re all laser interloc*s functional and is te 7ctivation 6arnin% S$stem operational
as required8
: :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge A o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
<- Is tere a protective ousin% around te laser8
: :
=- 7re all removable service access panels eiter interloc*ed or require a tool for
removal8
: :
>- Do all vie!in% portals attenuate to class / or less8
: : :
2- Is tere open beam e4posure potential to class ;H or < 5asers8 If so' complete te
form: "(S-111<@-#/' 3equirements for a Class ;H or < 5aser-
: : :
@- (ave all 5asers been added to te CNS" #acilities 5aser Inventor$ ("(S-111/>-
#=) and revie!ed b$ te CNS" 3adiation Safet$ &fficer8
: : :
N! F; R"+i"tion Requirements N/! (E/EE EHS
/- If a+ardous ?0 li%t sources are present' are te sources enclosed' interloc*ed
and properl$ labeled8
: : :
.- 7re sources of stron% ma%netic fields (J= %auss) properl$ labeled !it pacema*er
a+ard' field stren%t and a+ard distance8
: : :
;- (ave all 3# ) micro!ave sources been identified and properl$ labeled8
: : :
<- (ave all sources of non-ioni+in% radiation been revie!ed b$ CNS" 3adiation
Safet$ &fficer8
: : :
=- If :-ra$ sources are present' are te sources enclosed' interloc*ed and properl$
labeled8
: : :
>- Is te po!er suppl$ to all radiation sources (ioni+in% and non-ioni+in%) loc*ed /
ta%%ed out and is all sieldin% in place8 (N&(E: 3adiation sources !ill not be
ener%i+ed prior to ,art . si%n-off-
:
2- (ave all sources of ioni+in% radiation been revie!ed b$ CNS" "(S and te CNS"
3adiation Safet$ &fficer8
: : :
@- (ave all sources of ioni+in% radiation been added to te CNS" "(S 3adiation
Device Inventor$ ("(S-111/>-#.)8
: :
A- 7re all sources of ioni+in% radiation re%istered !it te NF State Department of
(ealt8
: :
R"+i"tion Sources .(E/
Check "ll th"t "ppl< Frequenc< "n+/or 1"velength 5",imum -o)er -roperl< 8"bele+?
3# / Micro!ave Fes No
?ltraviolet Fes No
Infrared Fes No
:-3a$ Fes No
N!
6; 8ist !ll 4tilities .Non-H-5 6"s 9/or 8iqui+: Chiller: -rocess ="cuum: C$!: 1"ter: F"cilit< 8ines:
or N"tur"l 6"s 8ines: etc;/ Nee+e+ For -"rt 1 Sign-o%%
4tilit< Nee+e+ 8"bele+? 8e"k Checke+? Comments#
Fes No Fes No
Fes No Fes No
Fes No Fes No
Fes No Fes No
Fes No Fes No
Fes No Fes No
Fes No Fes No
Fes No Fes No
Fes No Fes No
Fes No Fes No
*C (E/EE EHS
/- 7re all non-(,M %as )/or liquid' ciller' ,07C' CD7' !ater' facilit$ lines or natural : : :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge B o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
%as lines' etc- clearl$ labeled (contents ) direction of flo!) at ever$ can%e of
direction' before ) after ever$ structural penetration' and at re%ular intervals
accordin% to CNS" #acilities %uidelines8
.- (ave all non-(,M %as )/or liquid' ciller' ,07C' CD7' !ater' facilit$ lines or natural
%as lines' etc-' suppl$in% non-(,M materials' been pressure/lea* cec*ed and
documented (if applicable)8
: : :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge C o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
N!
H; &nbo"r+ Non--rocess Chemic"l *nventor<
(o be %ille+ out b< (ool Engineer; 8ist "ll chemic"ls such "s re%riger"nts: cool"nts: "++itives:
pump lubric"nts: etc; use+ in the tool or its peripher"ls;
Chemic"ls 4se+ 9 Concentr"tion
.%ull chemic"l n"me/
5"nu"l
Fill?
Des / No
8oop / ("nk .check
bo,/
5S$S
Submitte+
.mm/++/<<<</
Receive+ !pprov"l
%rom EHS?
Des / No
Close+
8oop
("nk
=olume
.g"l/





N! *; 6u"r+ing *C (E/EE EHS
/- 7re all electrical' termal' and mecanical a+ards (i-e- pinc-points' movin% parts'
etc-) properl$ %uarded and labeled8
: :
.- 7re all robotics envelopes adequatel$ defined and %uarded8 N/!
: :

N
!
E; -erson"l -rotective Equipment *C (E/EE EHS
/- Is te proper ,," available for all operations ) maintenance tas*s associated !it
tis equipment8 ,lease list:
: :
.- Is proper ,," stora%e available8
: :

N
!
7; (ool *+enti%ic"tion *C (E/EE EHS
/- Is te proper tool identification !it primar$ and secondar$ tool o!ners listed and
posted8
: :
.- (as te tool matri4 been updated and submitted to CNS" "(S8
: :
;- If te tool installation alters te la$out of te cleanroom space' as a ne!
evacuation map been submitted to CNS" #acilities "(S8 N/!
: :
N! 8; Seismic Restr"ints *C (E/EE EHS
/- Seismic bracin% and ancorin% desi%ned utili+in% te follo!in% data:
/) Seismic ?se 9roup: IIK .) Seismic Desi%n Cate%or$: DK ;) Spectral 3esponse
Coefficients: a- Sds L <;-@= (M%)K b- Sdl L ./-/< (M%)K <) Site Class: "K =) Hasic
Seismic #orce 3esistin% S$stem: Dual S$stem Special 3einforced Moment #rame
6it Special 3einforce Concrete Sear 6allsK >) Desi%n Hase Sear: 0 L .=>1
NI,SK 7nal$sis ,rocedure: "quivalent 5ateral #orce ,rocedure-
: : :
N! 5; H-5 $eliver< S<stem .8iqui+s "n+ 6"ses/ *C (E/EE EHS
/- (o! man$ output deliver$ lines/stic*s e4it from suppl$ unit and/or components8 (!rite in
: :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge F o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
number)
.- (ave Cemical/9as Services applied process control loc*s to eac of te output lines/stic*s8
(!rite in number of loc*s applied)
: :
;- (ave Tool Installation applied process control loc*s to eac of te output lines/stic*s8
(!rite in number of loc*s applied)
: :
<- (ave "(S applied process control loc*s to eac of te output lines/stic*s8 (!rite in
number of loc*s applied)
:
N! N; (65S Controls 9 5"tri, *C (E/EE EHS
/- (ave T9MS/77C interloc* si%nals been provided b$ te tool en%ineer to te T9MS contractor8
: : :
.- (as te approved T9MS matri4 been submitted and been si%ned b$ all of te appropriate
parties8
: : :
;- Is a cop$ of te approved si%ned T9MS matri4 included in tis %reenboo*8
: : :
-"rt 1 -unch 8ist
5ist all deficiencies tat do not affect te safet$ of te installation- 7 ,unc 5ist item ma$ not compromise safet$-
,unc 5ist items must be completed prior to ,art . si%n-off-
*ssue Responsibilit< Completion $"te
/-
.-
;-
<-
=-
>-
2-
@-
A-
/1-
Notes "n+ Comments


-"rt 1 *nterim Sign-o%%s N/! Sign"ture -rint N"me $"te
1"/ EHS# Electric"l -o)er# $ebug

1b/ EHS# Non-H-5s

2"/ S<stem &)ner# -rocess ="cuum
2b/ S<stem &)ner# Compresse+ $r< !ir
A"/ S<stem &)ner# 4ltr" -ure 1"ter
Ab/ S<stem &)ner# -rocess Cooling 1"ter
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
B"/ S<stem &)ner# >ulk 6"ses/Non-H-5s
C"/ S<stem &)ner# >l+g; Electric"l -o)er
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 0 o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
-"rt 2 Equipment Commissioning Checklist
Rele"se o% "ll H"'"r+ous -ro+uction 5"teri"ls 9 -h<sic"l H"'"r+s %or Engineering 4se
!; 6ener"l N/! (E/EE EHS
/- (as te "3T Coordinator been informed of te equipment installation and become
familiar !it its emer%enc$ sutdo!n procedures8
: : :
.- #inal 7pproval / Si%n &ff of te ,art . Inspection b$ "(S is contin%ent upon te
completion of te follo!in% t!o steps:
a- ,rocedures concernin% ne! or unusual a+ardous processes or materials
ave been documented and trainin% provided to an "3T 5eader or 7lternate
5eader on all four sifts
b- 7n "3T 5eader or 7lternate 5eader from eac sift must ac*no!led%e
(trou% teir signature below) tat te$ ave been provided !it a p$sical
tour of te ne!l$ installed equipment- Tis tour must include an overvie! of
emer%enc$ features ("M&Os' 9as Detector 5ocations' Interloc*s' Smo*e
Detection' #ire Suppression S$stemsP)
Da$ / "3T 5eader:
Da$ . "3T 5eader:
Ni%t / "3T 5eader:
Ni%t . "3T 5eader:
: : :
;- 7re tere an$ additional a+ards' equipment or conditions tat te "3T need to be
trained on8
a- If applicable as a S&, been developed to cover tis trainin%8
b- If $es as suc trainin% ta*en place for eac sift8
$1 Fes No N1 Fes No $2 Fes No N2 Fes No
: : :
<- 7re tere confined space a+ards associated !it te toolQs operation or
maintenance8 (as a process been developed for enterin% suc a confined space8
: : :
=- (as te S. noise surve$ verified tat te equipment operates at E@1 dH78 If not'
as a field surve$ been completed to determine impact to te area8
: :
>- Is te !or* area adequatel$ illuminated8 :
2- 7re tere an$ speciall$ ne%otiated !or*in% conditions8 If so' please describe-

: :
Notes "n+ Comments#
N! >; E,h"ust =entil"tion .*C/
8oc"tion
5ist all e4aust outlets
(<pe#
scrubbed'
eat
solvent' etc-
Flo) 5onitoring $evices
T$pe and 5ocation
Set -oints
8"bele+
Des No
Des No
Des No
Des No
Des No
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge G o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
N! C; E,h"ust =entil"tion Requirements *C (E/EE EHS
/- (eat e4aust onl$8 : : :
.- 7re all e4aust ducts labeled !it contents and direction of flo! at ever$ can%e of
direction' before ) after ever$ structural penetration and at re%ular intervals
accordin% to CNS" #acilities labelin% %uidelines8
: : :
;- (as a ventilation test and balance been completed and submitted to "(S and are
all dampers mar*ed and loc*ed8
: : :
<- Do all ventilation s$stems tat andle (,Ms ave continuous monitorin% devices
(i-e- potoelic' ma%neelic' etc-) installed8 N/!
: :
a- 7re all monitorin% devices in te plenum functional' secured' properl$ set )
labeled !it set points8
: : :
b- 7re all monitorin% devices at te tool functional' secured' properl$ set )
labeled !it set points8
: :
=- 7re blast %ates on all ventilation s$stems loc*ed8
: : :
>- (as a loss of e4aust test been performed to verif$ tat te tool is placed in a safe
condition upon loss of e4aust ventilation flo!8 N/!
:
2- (ave Industrial ($%iene 0entilation 7ssessments (capture velocit$) been completed
for all areas !ere a+ardous cemicals ma$ be e4posed to te open environment
(i-e- !et stations' lab oods' !et cemical dispense cabinets' etc-)8 N/!
:
@- 7re local e4aust s$stems provided for maintenance activities8 If so' please
describe- N/!
: :
Notes "n+ Comments#

N
!
$; ="cuum -umps *C (E/EE EHS
/- 7re all inputs and outputs labeled !it direction of flo! and are all lines adequatel$
secured8
: : :
.- (as te vacuum pump rotation been verified8
: :
;- 7re all vacuum ,ump "M&s and interloc*s functional (e-%- nitro%en pur%e' bac*-
pressure' temperature' coolin% !ater flo!) and documented8
:
<- 7re all vacuum pumps tat conve$ to4ic %ases contained !itin an e4austed
enclosure8 N/!
:
=- 7re all Nitro%en and !ater flo! indication devices functional8
: :
>- 6ere applicable' are te saft seal nitro%en pur%es operational8 N/!
: :
2- Is e4aust pipin% routed to prevent poolin% of liquids8 (no visible lo! spots or
sa%%in%)-
: :
@- (ave appropriate measures been ta*en to prevent bac* streamin% into te ouse
nitro%en s$stem8
: :
A- #or oil sealed pumps' list oil t$pe: N/!
:
a- Is te pump oil compatible !it te process materials8
:
b- (as an oil drip pan been installed under te entire pump pac*a%e8
:
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 10 o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2

N
!
$; ="cuum -umps *C (E/EE EHS
c- Is an oil demister or separator installed if required8
:
d- 7re te pump-case pur%e and or pump ballast pur%e interloc*ed8 (oil sealed
pumps)
:
N!
E; 8oc"l $ispense "n+ >ulk Chemic"l *nventor<
(o be %ille+ out b< (ool Engineer; 8ist "ll "queous or solvent chemic"ls supplie+ to the tool;
Chemic"ls 4se+ 9 Concentr"tion
.%ull chemic"l n"me/
5"nu"l
-our?
Des / No
>"th or ("nk .check one/
$"te 5S$S
!pprove+
5S$S
submitte+?
Des / No
>"th ("nk
=olume
.g"l/






N/! Chemic"l $istribution 5"tri, .to be complete+ b< (ool Engineer/
Chemic"l $ispense 4nit
N"me .5$4 /
Chemic"l $ispense+ Comments







N
!
F; 8oc"l $ispense Chemic"l $eliver< S<stems Requirements *C (E/EE EHS
/- 7re all cemical suppl$ lines and containment pipin% clearl$ labeled (contents )
direction of flo!) at ever$ can%e of direction' before ) after ever$ structural
penetration' and at re%ular intervals accordin% to CNS" #acilities labelin%
%uidelines8
: : :
.- 7re all appropriate locations (tool' all support equipment' and cemical enclosures)
labeled !it point-of-use cemical labels and/or (7IC&M labels8
: : :
;- (ave all cemical ((,M or oter!ise) suppl$ lines been pressure and lea* tested
and documentation of suc submitted to "(S8 7re te$ double contained !ere
required8
: :
<- 7re all valves and fittin%s for (,M liquid deliver$ s$stems contained !itin a
ventilated enclosure8 N/!
: : :
=- 7re lea* detection s$stems adequatel$ installed for te equipment and in all
cemical valve bo4es8
: : :
a- (ave all liquid lea* detection s$stems been tested and verified to be operational
and documented as suc8
: : :
b- (ave all e4aust pressure detectors been tested and verified to be operational : : :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 11 o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2

N
!
F; 8oc"l $ispense Chemic"l $eliver< S<stems Requirements *C (E/EE EHS
and documented as suc8
c- (ave all eat detectors' if applicable' been tested and verified to be operational
and documented as suc8
: : :
>- 7re all pressuri+ed cemical containers equipped !it te follo!in%: N/!
a- If pressuri+ed to J/= psi%' are te$ 7SM" rated and provided !it over-pressure
protection8
: :
b- If non-rated' are containers equipped !it pressure relief devices set to a
ma4imum of /= psi%8
: :
c- 0ented to te s$stem e4aust8
: :
d- "quipped !it functional liquid level detection and overfill protection8
: :
e- Hondin% / %roundin% ) provided !it an inert pressuri+in% a%ent (for flammable
cemical containers)8
: :
2- 7re all access areas to pressuri+ed lines sielded / interloc*ed to prevent potential
e4posure to cemistries8
: : :
@- 7re safet$ so!ers / e$e !as stations located !itin /1 seconds travel or =1 feet of
cemical use or closer dependin% on te de%ree of a+ard associated !it te
cemical(s) used8 (7NSI I;=@-/-/AA1) N/!
: :

N
!
6; >ulk Chemic"l $eliver< S<stems Requirements *C (E/EE EHS
/- 7re all cemical suppl$ lines and containment pipin% clearl$ labeled (contents )
direction of flo!) at ever$ can%e of direction' before ) after ever$ structural
penetration' and at re%ular intervals accordin% to CNS" #acilities labelin%
%uidelines8
: :
.- 7re all appropriate locations (tools' all support equipment' and cemical enclosures)
labeled !it point-of-use cemical labels and / or (7IC&M labels8
: : :
;- 7re all bul* cemical deliver$ lines and containment pipin% attaced to te correct
point of use and terminated at te tool8 (no fittin%s !itin te double contained
pipin%)
: : :
<- 7re all valves and fittin%s for (,M liquid deliver$ s$stems contained !itin a
ventilated enclosure8 N/!
: : :
=- Is liquid lea* detection properl$ installed in all cemical valve bo4es8
: : :
a- (ave all lea* detection s$stems been tested and verified to be operational and
documented as suc8
:
>- (ave all (,M deliver$ lines been verified to ave secondar$ containment8 N/!
: :
2- (ave all (,M deliver$ lines been lea* tested or pressure tested' documented'
revie!ed and accepted8 N/!
: :
@- (ave all cemical valve bo4es been lea* tested' documented' revie!ed and
accepted8
:
A- Does te cemical valve bo4 suppl$ to te tool close upon "M& activation from te
tool8
:
/1- 7re all emer%enc$ (,M sutoff valves clearl$ visible and indicated b$ means of a
si%n8 (NFS#C .21;-.-.-/-<) N/!
: : :
//- 7re all flammable and combustible materials sealed from electrical equipment or
i%nition sources8
: :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 12 o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2

N
!
6; >ulk Chemic"l $eliver< S<stems Requirements *C (E/EE EHS
/.- #or ne! bul* cemical installations' as te follo!in% information been submitted to
te "(S department to calculate (,M allo!ances for eac control area8
Cemical t$pe/name: B of c$linders:
Si+e: pounds/container &3 %allons/container
: : :
/;- (ave ,5C communications s$stems been properl$:
a- !ired and connected to te tool-
b- pro%rammed ) verified to send correct si%nals to te correct valves per desi%n8
: : :

N
!
H; 6"s $eliver< S<stems Requirements *C (E/EE EHS
/- (ave all lines been traced to ori%in and verified8
:
.- 7re double contained lines (coa4ial tubin%) in place as required8 N/!
: :
;- (ave coa4ial tubin% been pressuri+ed to /11 psi%' !it !arnin% and alarm points
set8
: :
<- 7re all %as lines clearl$ labeled (contents ) direction of flo!) at ever$ can%e in
direction' before ) after ever$ structural penetration' and at re%ular intervals
accordin% to CNS" #acilities labelin% %uidelines8
: :
=- 7re all %as-cabinets/0MHs properl$ labeled !it Dtool destination labelsD8
: : :
>- 7re all enclosures (e-%- %as cabinets' 0MHs' 9IHs' tool cambers' tool %as bo4es)
properl$ labeled !it approved (7IC&M labels8
: : :
2- 7re all lea* points for (,Ms e4austed and / or fitted !it %as detection per te
desi%n8 N/!
: :
@- (ave all %as deliver$ s$stems internal to te tool been lea* cec*ed and
documented8
: :
A- (ave all %as deliver$ s$stems e4ternal to te tool been lea* cec*ed and
documented8
: :
/1- (as lea* detection cec*list(s) been completed and submitted to "(S8
: : :
//- 7re all valves and fittin%s on (,M %as s$stems contained !itin a ventilated
enclosure per desi%n8 N/!
: : :
/.- 7re all %as cabinets vent lines located after te blast %ate' on a lateral or at least five
duct diameters do!nstream from a T9MS sensor8
: :
/;- (ave ,5C communications s$stems been properl$:
a- !ired and connected to te tool-
b- pro%rammed ) verified to send correct si%nals to te correct valves per desi%n8
: :
/<- #or ne! %as cabinet installation' as te follo!in% information been submitted to te
"(S department to calculate (,M allo!ances for eac control area8
9as c$linder t$pe: B of c$linders:
Si+e: pounds/c$linder &3 cubic feet/c$linder
: : :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 1A o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2

N
!
*; $etection/5onitoring Requirements *C (E/EE EHS
/- (as continuous detection been installed at appropriate monitorin% points per
desi%n8 (NFS#C /@1;-/;-/)
: : :
.- (as eac monitorin% point been cec*ed to verif$ tat upon activation' an automatic'
fail-safe source sutdo!n occurs and a visible / audible area alarm is initiated and
as documentation of suc been submitted to "(S8 (i-e- T9MS Matri4 si%n-off)
: : :
;- (ave all detector points been installed so tat te$ are accessible and visible8
: : :
<- 7re all detector points adequatel$ labeled and easil$ read8
: : :
=- 7re te %as detectors positioned before te blast %ate8
: : :
>- (as te %as cabinet vent line been placed at least = duct diameters upstream from
te %as detectors8
: : :
2- (ave ne!l$ added detection points been added to T9MS site summar$ and posted
at te T9MS touc screens8
: : :
@- Is a map of te ne! detector locations available and posted at te 77C8
: : :
A- (as a T9MS matri4 pre-test been sceduled and performed8
: : :
/1- Is te completed and si%ned T9MS matri4 pre-test attaced8
: : :
//- Is te completed and si%ned final T9MS matri4 attaced and as a cop$ been
submitted to "(S8
: : :
N! $etection/5onitoring 5"tri, .to be complete+ b< *C "n+ (E/EE/
6"s
$etection
-oints
S"mple -oint 8oc"tions
1!RN*N6
Set -oint
!8!R5
Set -oint
Function"l (est
$"te






N
!
E; $r"in 5"tri,
$r"in S<stem .(E/
5"teri"l o%
Construction .(E/
8e"k Checke+
.i% require+/ .*C/
-iping 8"bele+ -roperl<
.*C/





N! 7; Chemic"l $ispos"l Requirements *C (E/EE EHS
/- Is all drain pipin% clearl$ labeled (contents ) direction of flo!) at ever$ can%e of
direction' before ) after ever$ structural penetration and at re%ular intervals
accordin% to CNS" #acilities labelin% %uidelines8
: : :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 1B o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2

N
!
E; $r"in 5"tri,
$r"in S<stem .(E/
5"teri"l o%
Construction .(E/
8e"k Checke+
.i% require+/ .*C/
-iping 8"bele+ -roperl<
.*C/
.- Is all !or*station draina%e pipin% connected to a compatible s$stem so as to avoid
cemical reactions %eneratin% eat' %ases' or dan%erous b$-products per desi%n8
:
;- 7re (,M drain lines double contained !ere required8
: : :
<- 7re (,M drain lines lea* cec*ed and documented as suc8
: : :
=- (as all drain !aste and vent pipin% been tested for proper performance via operation
of te process equipment8
: :
>- 7re appropriate !aste receptacles/containers/units available in te !or* area and
properl$ labeled8
: :
2- 7re se%re%ated satellite collection locations present and labeled as needed8 (e-%-
arsenic or lead !aste)
: :
@- Is te !or*station provided !it an approved means of containin% or directin% spills
to a draina%e s$stem per desi%n (i-e- slope or oter approved means of spill
containment)8 (NFS#C /@1=-.-.-.)
: : :
N! 8; -ost--rocess E,h"ust (re"tment S<stems .(E/EE Check "ll th"t "ppl</
-"ssive $ilution / Re"ction Ch"mber $<n"mic Neutr"li'"tion Ch"mber .$NC/
(herm"l $ecomposition 4nit .($4/ 1et Chemic"l Re"ctors
$r< Chemic"l Re"ctors &ther#
-ost--rocess E,h"ust (re"tment S<stems *C (E/EE EHS
/- Is te post-process e4aust treatment s$stem operational' and are all interloc*s
functionin%8
: : :
.- Does te process %as flo! sut do!n in te event of e4aust treatment s$stem
failure8
: :
;- ?pon activation of a trouble alarm' does te s$stem place te tool into a safe
condition and send an alert via te T9MS or HMS8
: :
<- Does te e4aust treatment s$stem confi%uration allo! access for inspection and
cleanin%8
:
=- Is a fire sprin*ler (!a4 coated' plastic ba%' quic* response) installed do!nstream of
te reaction camber' at te transition to te main e4aust lateral per desi%n8 (Is
!ater draina%e adequate8)
: :
>- Is te post-process e4aust treatment s$stem labeled !it (7IC&M labels or
similar identif$in% te process %as and correspondin% b$-products8
: :
2- (ave post-process e4aust emission calculations been submitted and approved b$
"(S to ensure adequate e4aust treatment and posted on te treatment unit8
: :
N! 5; Fire $etection .(E/EE check "ll th"t "ppl</
High sensitivit< +etection (&ptical 7ir Samplin% Smo*e Detection' e-%- 0"SD7' (SSD)
5ocations:
Smoke $etection#
4= / *R +etection#
&ther#
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 1C o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2

N
!
N; Fire -rotection Requirements *C (E/ EE EHS
/- (as annunciation been verified for all equipment-specific fire detection devices8
: : :
.- (as equipment-specific fire alarm annunciation been verified8
: : :
;- 7re lab oods tat use flammable / combustible liquids serviced internall$ b$ a fire
sprin*ler ead and added to te CNS" laborator$ ood inventor$8
: : :
<- #or 6et Stations (all !et cemical processes)' are sprin*lers installed on te ba$
ceilin% in front and beind te tool' providin% covera%e to all areas of te tool8
: : :
=- Do all !or*stations of combustible construction ave a sprin*ler ead installed in te
e4aust duct / plenum !itin . feet of te point of te duct connection or te
connection to te plenum8 (NFS#C /@1;-/1-/-/)
: : :
>- 7re eat detectors/sprin*lers installed in all combustible ducts ) non-combustible
ducts conve$in% vapors or %ases in te flammable ran%e (J/1M 5"5) tat are R /1D
in diameter- (NFS#C /@1;-/1-/-/)
: : :
2- (as all fire suppression a%ent (i-e- sprin*ler' C&.' etc-) deliver$ pipin% leadin% into
enclosed equipment been pressure tested8
: : :
@- (as it been verified tat fire sprin*ler flo! patterns !itin enclosed equipment are
unobstructed8
:
A- 7re fire suppression/detection s$stems installed !itin enclosed equipment !ere
necessar$ and ave te$ been tested and verified functional' providin% te required
discar%e densit$8
:
/1- 7re all sprin*lers tat service te area occupied b$ tis equipment accessible for
periodic inspections8
: : :

N
!
&; 8oc"l Fire Suppression/$etection S<stem $ocument"tion *C (E/EE EHS
/- (as te S$stem been certified ) documentation submitted to "(S8
: : :
.- (ave te S$stem Manuals been submitted to "(S8
: : :
;- (as te 5ocal #ire Suppression/Detection S$stem Summar$ Seet been updated8
:
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 1F o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2

N
!
-; Emergenc< 5"chine &%% .E5&/ *C (E/EE EHS
/- Does te "M& turn off all electrical po!er to te s$stem includin% te ?,S (e4cept
non-a+ardous control volta%e and po!er sources to safet$ related devices)8
:
.- ?pon resettin% of te "M&' does te equipment remain sutdo!n and require a
manual re-start8
:
;- 7re "M& buttons located !itin /1 feet of all operatin% ) sceduled maintenance
locations or !ere a p$sical barrier (!all' floor' panel' etc-) separates !or* locations
from te "M& button8
: :

N
!
3; *nterlocks
Note# (his section "pplies to "ll interlocks intern"l to the equipment;
N/! (E/EE EHS
/- (as an interloc* matri4 (indicatin% !at is activated or sutdo!n !en eac
interloc* is activated) been provided for eac of te follo!in% interloc*s8
a- "4aust flo! (e-%- potoelic)8
: : :
b- Temperature / #ire Detection (e-%- over temp-' ?0 Sensor)8
: : :
c- Mecanical (e-%- pinc points)8
: : :
d- 3obotics and/or 7utomation (e-%- li%t curtains' I3 Sensors)8
: : :
e- ,neumatic / ($draulic8
: : :
f- "lectrical (e-%- (i% 0olta%e' door panels)8
: : :
%- &ter8
: : :
.- (ave all interloc*s been tested and verified to be operational as indicated on te
interloc* matri4 and as suc documentation been submitted to "(S8
: : :
;- (ave an$ can%es been made to te tool or operatin% s$stem tat ma$ ave
affected te functionin% of an$ interloc*s8
: : :
a- If so' ave all interloc*s been re-tested after ever$ suc can%e ) verified to be
operational8
: : :
<- In case of alarm' does te local %as detection s$stem ave interloc*s to stop te
%as flo! into a %as cabinet8
: : :
=- 7re oter interloc*s connections from te tool or process camber/modules
available for connection to an area alarm control panel8 If $es' are tese interloc*s
connected to te area alarm control panel8
: : :

N
!
R; R"+i"tion Requirements N/! (E/EE EHS
/- (ave all sources of non-ioni+in% radiation been surve$ed b$ CNS" 3adiation
Safet$ &fficer8
: : :
.- (ave all sources of ioni+in% radiation been surve$ed b$ CNS" 3adiation Safet$
: : :
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 1 o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2

N
!
R; R"+i"tion Requirements N/! (E/EE EHS
&fficer8
,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 10 o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
N!
S; H-5 $eliver< S<stem .8iqui+s "n+ 6"ses/
-rocess Control *sol"tion 8ock Remov"l
*C (E/EE EHS
/- 6at output deliver$ lines/stic*s are requested to be turned on8 (fill in line
information)
: :
.- (o! man$ remainin% output deliver$ lines/stic*s !ill remain loc*ed out for process
control8 (fill in number and t$pe)
: :
;- Identif$ number and line/stic* label for eac Tool Installation loc* to be removed8




:
:
:
:
:
:
:
:
<- Identif$ number and line/stic* label for eac Cemical/9as Services process control
loc* to be removed8




:
:
:
:
:
:
:
:
Notes "n+ Comments

-"rt 2 *nterim Sign-o%%s
Tis section serves t!o functions:
1) 7llo!s "(S to provide partial approvals in pases as te tool is prepared for use-
2) ,rovides S$stem &!ners te opportunit$ to revie! and approve te parts of te proCect tat te$ !ill o!n-
-h"se N/! Sign"ture -rint N"me $"te
1"/ EHS# Electric"l -o)er# 8"ser

1b/ EHS# Electric"l -o)er# R"+i"tion

1c/ EHS# H-5s

1+/ EHS# (65S

2"/ S<stem &)ner# House E,h"ust

A"/ S<stem &)ner# House $r"in# !1$

Ab/ S<stem &)ner# House $r"in# HF$

Ac/ S<stem &)ner# House $r"in# Solvent

A+/ S<stem &)ner# House $r"in# Slurr<

B"/ S<stem &)ner# H<+rogen

C"/ 6"s "n+/ or 8iqui+ $eliver< "n+/ or
1"ste Collection S<stems >< !ir 8iqui+e


,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 1G o% 20
Equipment Commissioning Checklist
"(S-111/2-#/ 3/2
-"rt 2 -unchlist
5ist all deficiencies tat do not affect te safet$ of te installation- 7 ,unclist item ma$ not compromise safet$-
,unclist items as !ell as Deficient items must be completed prior to ,art . approval-
*ssue Responsibilit< Completion $"te
/-
.-
;-
<-
=-
>-
2-
@-
A-
/1-
//-
/.-
/;-
/<-
/=-
Equipment Commissioning -"rt 2 !pprov"l Sign"tures
I verif$ tat "ll ,art / and ,art . cec*list items (deficient or oter!ise) are complete
) I approve tis equipment for ,art . si%n-off-
(itle Sign"ture -rint N"me $"te
*nst"ll"tion Coor+in"tor .*C/

(ool &)ner .(&/

(ool Engineer / Equipment Engineer
.(E/EE/

CNSE Environment"l He"lth 9 S"%et<
.EHS/

CNSE F"cilities (ool Hook-up 5"n"ger

CNSE Co+e Compli"nce 5"n"ger

CNSE F"cilities $irector

CNSE ER( Coor+in"tor

,rinted copies are considered uncontrolled- 0erif$ revision prior to use-
$CN00 CNSE Con%i+enti"l 1hen Complete+ -"ge 20 o% 20