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C. The chemical
composition of the elements and their spatial distribution on the surface were determined by X-ray photo-
electronspectroscopy (XPS) and time-of-ight secondary ion mass spectrometry (ToF-SIMS) respectively.
PdWO
3
thick lm was prepared by screen-printing on alumina substrates tted with gold electrodes
and a platinum heater. The responses to 25200 ppm hydrogen (diluted in air) were measured at oper-
ating temperatures ranging from 200 to 280
C. The changes in the crystal phases, formation of hydrogen tungsten bronze, on the surface or bulk
were correlated with the electrical responses. A sensing mechanism of PdWO
3
for H
2
is proposed and
discussed.
2012 Elsevier B.V. All rights reserved.
1. Introduction
Because of its interesting chemical, optical and electrical prop-
erties, tungsten oxide (WO
3
), which is n-type semiconductor, has
been the object of extensive research. It was studied in numerous
elds such as electrochromism [15], photoelectrochemical [6,7]
and particularly in gas sensor [813]. Pure WO
3
has good sensing
properties to oxidizing gases such as NO and NO
2
[9,12,14,15], O
3
[16,17] and Cl
2
[18]. However for reducing gases (CO, NH
3
, ethanol,
methanol, etc.), the surface modication of WO
3
by noble catalyst
(Pt, Au, and Pd) is required. The sensing mechanismof gas sensors
basedonmodiedmetal oxides by noble metals (NM-MO) has been
reported in the literature by several authors [19,20]. It is accepted
that the sensing mechanismis associated to the change of the resis-
tance in contact with the chemisorbed oxygen and gas species
on the surface of the metal oxide. For NM-MO such as PdSnO
2
,
Corresponding author. Tel.: +32 6537 4515; fax: +32 6537 4416.
E-mail addresses: Abdelhamid.Boudiba@umons.ac.be,
abdelhamid.boudiba@gmail.com (A. Boudiba).
PtWO
3
and PdWO
3
, the catalyst on the surface of the metal
oxides favours the presence of oxygenspecies (O
, O
2
andO
2
) on
the surface which depends strongly on the temperature [2124].
The ionization of oxygen molecules by the capture of electrons
from the conduction band of oxides results in an electron deple-
tion region on the surface of the sensor material. When the surface
of the gas sensors is exposed to reducing gases, the oxygen species
react with the gases and electrons are given back to the semicon-
ductor, whichincreases the sensor conductivity. For hydrogen(H
2
),
inadditiontothereactiononthesurfaceof thesensor betweenoxy-
gen species and hydrogen, the catalyst dissociates H
2
to H-adatoms
which react with WO
3
itself to form a blue tungsten bronze [20].
The formation of the tungsten bronze can be limited at the sur-
face of the sensitive materials or in the bulk depending on the
atmospheric conditions, temperature and doping elements. The
purpose of this work is to understand the competition between
these two mechanisms. First, PdWO
3
nanocomposites were pre-
pared and characterized and then, the effects of the temperature,
the catalyst (pure WO
3
and Pd-loaded WO
3
), the water vapour
and the oxygen (in air or in nitrogen atmospheres) on the elec-
trical, optical and crystal phase of tungsten oxide are studied. The
0925-4005/$ see front matter 2012 Elsevier B.V. All rights reserved.
http://dx.doi.org/10.1016/j.snb.2012.09.063
Please cite this article inpress as: A. Boudiba, et al., Sensingmechanismof hydrogensensors basedonpalladium-loadedtungstenoxide (PdWO
3
),
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Fig. 1. Representative scheme of the in situ characterization (PdWO
3
/H
2
) by UVvisNIR spectrometer.
changes in the optical properties (diffuse reectance) and crystal
phases of Pd-loaded WO
3
in contact with hydrogen were demon-
stratedat the surface andinthe bulk depending onthe atmospheric
conditions.
2. Experimental
2.1. Preparation of WO
3
nanoparticles
The synthesis of WO
3
nanopowder is reported in a previous
article [11]. Briey, a solution of Na
2
WO
4
(0.5M) was prepared
and heated at 80
C for 4h.
2.2. Preparation of PdWO
3
nanocomposites and PdWO
3
coating (sensor)
To prepare PdWO
3
nanocomposites as a powder, palladium
chloride salt (PdCl
2
) was dissolved and dispersed in terpineol with
WO
3
nanopowder using sonication probe (UP50H, Hielscher Ultra-
sonic GmbH), the resultant dispersion with 1at% Pd loading was
dried at 100
C for 12h.
PdWO
3
coatings (sensors) were prepared by screen-printing of
PdWO
3
inks on alumina substrates tted with gold electrodes and
a platinum heater (C-MAC Micro Technology Company, Belgium).
The PdWO
3
sensor was annealed in air at 400
C for
24h in ambient air before their exposure to hydrogen in a Teon
chamber. The setup for gas sensing measurements is reported
in Ref. [8].
2.3. Characterization
The morphology of WO
3
was observed by TEM (TEM, Philips
CM200, 120kV) and SEM (SEM, Philips XL20, 20kV). The crys-
tal structure of the prepared WO
3
nanopowder and PdWO
3
nanocomposites was dened by X-ray diffraction (XRD, Siemens
D5000) using CuK
/min.
The chemical composition of the samples was investigated
using X-ray photoelectron spectroscopy (XPS), VERSAPROBE PHI
5000 from Physical Electronics, equipped with a Monochromatic
Al K
C
in the wavelength range 2000400nm in air and in contact
with hydrogen (0.4% diluted in air); the scheme illustrating the
in situ characterization by UVvisNIR spectrometer is shown in
Fig. 1.
2.4. H
2
measurements
The resistivity changes of PdWO
3
sensor in air and in function
of hydrogen concentrations (25200ppm hydrogen) were mea-
sured at different working temperatures ranged from200 to 280
C
at relative humidity of 50% (measured at 22
C
in air and in contact with 0.4% of hydrogen diluted in synthetic
air.
In order to study the change in the crystal phase of WO
3
in
contact with hydrogen versus temperature, the HTXRD were car-
ried out on pure WO
3
and PdWO
3
powders (annealed in air at
400
radiation. Data
were collected over the range 2060
C in 2, with a 0.015
step
and a time of 0.2s per step from room temperature to 200
C.
The samples were deposited on platinum sheets to avoid any
contamination.
Please cite this article inpress as: A. Boudiba, et al., Sensingmechanismof hydrogensensors basedonpalladium-loadedtungstenoxide (PdWO
3
),
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Fig. 2. SEMmicrographs at different magnications (a) and TEM(b) images recorded on WO
3
nanopowder as synthesized and annealed in air at 400
C for 4h.
3. Results and discussion
3.1. Morphology and crystal structure characterization of WO
3
Fig. 2(a) shows the SEM images of WO
3
powder annealed in
air for 4h. The powder looks consisting in agglomerated spheri-
cal particles. The agglomerates were dispersed in methanol and
observed by TEM(Fig. 2(b)). The image shows that the nanopowder
has a monodisperse population with average size is approximately
100nm. The crystal structure was determined by XRD analysis. As
well known, WO
3
can exist under different forms and its crystal
phase changes are reversible with temperature (Table 1). At room
temperature (27
C
-WO
3
Orthorhombic From320
C to 720
C
-WO
3
Monoclinic From17
C to 320
C
-WO
3
Triclinic From40
C to 17
C
-WO
3
Monoclinic 40
C
+6 [25] which means that the lms are close to the chemical stoi-
chiometry of WO
3
. The survey spectrum of O1s and Pd3d peaks
recordedare showninFig. 3(c) and(d) respectively. The energy val-
ues generated by photoelectrons emitted by Pd atoms showthat Pd
is oxidized on the surface (PdO
2
). The XRD patterns of PdWO
3
do
not reveal any presence of Pd due to the small amount of Pd load-
inginthenanocomposites (1at%). Thecrystal phaseof PdWO
3
was
similar to pure WO
3
(monoclinic WO
3
). The patterns are presented
in the Section 3.5.
3.3. ToF-SIMS characterization
An effective dispersion of the catalyst on the surface of semi-
conductor grains is the key to reach a good response to hydrogen.
The dissociation of hydrogen is controlled by the catalyst and its
dispersion [29]. In order to analyse the distribution of Pd at the sur-
face of PdWO
3
lms, ToF-SIMS measurements in imaging mode
were performed on the surface. The most characteristic ions pro-
duced are O
+
, W
+
and
186
W
+
(m/z =186, isotope of tungsten) from
the WO
3
matrix, Pd
+
and
108
Pd
+
(m/z =108, isotope of Pd) fromPd.
As observed from the ToF-SIMS micrograph represented in Fig. 4,
the spatial distribution on the surface of Pd
+
and
108
Pd
+
ions is
rather uniform as well as the spatial distribution of W
+
and O
+
.
This homogeneous dispersion obtained by sonication makes the
PdWO
3
sensors very sensitive to hydrogen.
3.4. Response to hydrogen
H
2
sensing measurements of PdWO
3
coatings (sensors) were
carried out at working temperature ranged from 200 to 280
C at
50% relative humidity which obtained by owing the air through a
water bubbler maintained at 22
C for 12h: (a) typical XPS spectra; (b) W4f energy region; (c) O1s energy region; (d) Pd4d region.
200 and 280
C
reaches very fast its maximum and then decreases to reach the
equilibrium. The two steps for reaching the equilibrium at 280
C
compared to 200
C. In
fact, the transfer of electrons between adsorbed molecules (O
2
,
O
2
and O
) and WO
3
modies the energy barrier (eV
s
) at the grain
boundaries which given by G=G
0
exp(qVs/k
b
T), where G
0
, is the
conductance of the grain itself, k
b
is the Boltzmanns constant. The
deduced energy barriers (eV
s
) from curve presenting Ln(R) versus
1/T are presented in Table 2. The energy barrier (eV
s
) is reduced
from 0.45eV (in air) to 0.12eV in contact with 200ppm H
2
. As
seen on Fig. 6(b), the eV
s
are reduced in hydrogen compared to air
for all concentrations (50200ppm) because the concentration of
adsorbed oxygen species is reduced by reacting with hydrogen and
then, the number of carriers (electrons) is increased. Fig. 7(a) and
(b) shows the sensitivity of the sensor versus working temperature
Table 2
The deducedbarrier energy (eVs) fromcurve plottedLn(R) versus 1/T showninFig. 6.
Atmosphere Energy barrier (eVs)
Air 0.45eV
50ppmH
2
0.20eV
100ppmH
2
0.21eV
150ppmH
2
0.15eV
200ppmH
2
0.12eV
(from 200 to 280
C
for 12h showing the homogenous distribution of Pd on the surface of the lm.
electrical response of PdWO
3
sensor (n-type semiconductor) to
25200ppmhydrogen shown in Fig. 5, it is well illustrated that the
resistance of the sensor decreases once in contact with hydrogen.
This change in the resistance in contact with hydrogen which is a
reducing gas can be attributed to two phenomena:
(I) The oxygenspecies chemisorbedonthe surface of WO
3
reacts
with hydrogen to formwater vapour as following:
H
2
(gas)
Pd
2H
(H-adatoms) (1)
2H
(ads) + O
(ads) H
2
O + e
(2)
These reactions (1) and (2) do not happen in the case of pure WO
3
.
The variation of the resistance of pure WO
3
sensor in contact with
hydrogen (50200ppm) remains unchanged even at 200
C [11].
(II) The dissociated hydrogen on the catalyst (Pd) reacts with
WO
3
to formhydrogen tungsten bronze following the reaction:
xH
(ads) + WO
3
H
x
WO
3
(3)
Both mechanisms (I) and (II) result in an increase of the conductiv-
ity. The dispersion of Pd on the surface of the WO
3
grains (Fig. 8)
increases the global electrical resistance of the sensor compared
to pure WO
3
[11]. This is due to the changes in the number of
carriers (electrons) in the conducting band because the catalyst,
Fig. 5. Response of PdWO
3
sensor to 50200ppmH
2
at 200 and 280
C (RH=50%
measured at 22
C).
Fig. 6. Evolution of the resistance of PdWO
3
sensor (Ln(R) versus 1/T) in air and in
contact with 50200ppmhydrogen (RH=50% measured at 22
C).
which is dispersed as small clusters, enhances the concentrations
of the oxygen ions (O
, O
2
and O
2
) on the surface of WO
3
. These
ions trap electrons from the conducting band of semiconductor
results in an electron depletion region schemed in Fig. 8(a). When
PdWO
3
sensor is exposed to H
2
, the oxygen ions react with the
latter according to reaction (2). The electrons resulting from this
reaction are given back to WO
3
inducing a change in the resistivity
of the sensor. In addition to reaction (2), the Pd catalyst dissociates
H
2
to H-adatoms which react with WO
3
to form a blue tungsten
Fig. 7. Response of PdWO
3
sensor versus (a) operating temperature and (b) hydro-
gen concentration (CH
2
= 50200ppm, RH=50% measured at 22
C, T =20080
C).
Please cite this article inpress as: A. Boudiba, et al., Sensingmechanismof hydrogensensors basedonpalladium-loadedtungstenoxide (PdWO
3
),
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Fig. 8. Representative scheme of the energy barrier (eVs) caused by (a) the catalyst in air and (b) the hydrogen at the surface grains of the sensor.
bronze. H-adatoms react as electrons donors to WO
3
and conse-
quently, the sensor resistance decreases because of an increase in
the number of carriers.
To understand the effect of the water vapour on the kinetic
reactions between Pd-loaded WO
3
and hydrogen, the sensor was
exposed to 200ppmH
2
(21% or 1% oxygen) diluted in dried air and
moist air with 0% and 50% relative humidity respectively. As can
be seen in Fig. 9(a) and (b), the kinetic response of the sensor at
280
Step (b): The resistance (in moist/or dried air) increases to reach
the equilibriumfollowing the reactions:
H
x
WO
3
+O
2
(air) WO
3
+H
2
O (4)
O
2
(air) + 2e
2O
(ads) (5)
2O
(ads) (7)
+H
+
(8)
OH
and H
+
serve as conductive species. On the other
hand, free electrons can also be released to the metal
oxide inducing a decreased in the resistance following the
reactions proposed by Heiland and Kohl [26]:
H
2
O(gas) 2OH + V
O
+2e` (9)
V
O
+ 2e
(10)
As seen in Fig. 9(b), the resistance of the sensor in dried
air (RH=0%), reach its equilibrium after the Step (c) and stays
stable contrary to the resistance measured at 50%relative humidity
(Fig. 9(c)). In fact, above 200
C.
The colour change of PdWO
3
from yellow to dark blue when the
sensor is exposed to hydrogen (change of WO
3
to H
x
WO
3
, Eq. (3))
is shown in Fig. 10. The colour change is due to the formation of
hydrogen tungsten bronze on the surface because of the reduction
of W
6+
to W
5+
or W
4+
. The reectance decreased in contact with
hydrogen (30min) from45% to 30% around 2000nm. After 60min
of contact with hydrogen, the sensor was exposed to synthetic air
for 60min; the reectance comes back to the base line showing
that the reaction Eq. (3) is reversible (oxidation of H
x
WO
3
to form
WO
3
).
Please cite this article inpress as: A. Boudiba, et al., Sensingmechanismof hydrogensensors basedonpalladium-loadedtungstenoxide (PdWO
3
),
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Fig. 9. (a) Response of PdWO
3
sensor to 200ppm H
2
at 200
C: (i) 200ppm H
2
diluted in dried air (RH=0%, 1% oxygen), (ii) 200ppm H
2
diluted in dried air (RH=0%, 21%
oxygen) and (iii) 200ppmhydrogen diluted in moist air (RH=50%, 21% oxygen); (b and c) response of the sensor to 200ppmH
2
in dried and moist air respectively showing
the different steps of the evolution of the resistance.
3.5.2. In situ characterization (PdWO
3
in contact with 3% H
2
) by
XRD analysis
In situ characterization using XRD analysis were carried out
on PdWO
3
and pure WO
3
nanopowders depending on the
Fig. 10. Evolution of the reectance of PdWO
3
sensor in air and contact with 0.4%
H
2
diluted in air at 200
C.
temperature (27200
C Pure WO
3
3% of H
2
in air Monoclinic WO
3
200
C Pure WO
3
3% of H
2
in N
2
Monoclinic WO
3
27200
C PdWO
3
3% of H
2
in air Monoclinic WO
3
27200
C PdWO
3
3% of H
2
in N
2
Tetragonal hydrogen
tungsten bronze
Fig. 12. XRD patterns of pure WO
3
versus working temperature of (a) in contact
with 3% hydrogen diluted in air and (b) in contact with 3% hydrogen diluted in N
2
.
27
C to 200