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Calculation Formula of Vacuum in common use

1.Boyle Law

2.CayLussac Law

3.Charles Law

4.Average free lift

5.Suction capacity

6.Communication conductor

7.Pumping time of vacuum

8.Maintain pump's selection

9.Estimation of the suction capacity


of the diffusion vacuum pump

10.The fore stage suction capacity


11.Leakage rate
of the Roots pump

12.Rough vacuum pump's suction


capacity selection

14.Calculation formula of the 15.Geometry calculation formula


13.Selection of the fore pump's
suction capacity of the diffusion of the Rotary vacuum pump's
suction capacity
pump
suction capacity
16.O- ring rubber groove depth

17.Square shape rubber groove


depth
1.Boyle law

Volume express by VPressure by PPVconstant


Definite amount of airwhile the same temperature,the relation of the air pressure and
volume is reverse proportion.
It is: P1/P2V2/V1
2.CayLussac law
While the pressure isn't changed, the relation of the definite amount of air's volume
and absolute temperature is reverse proportion
V1/V2T1/T2constant
While the same pressure to the definite amount of air, its volume would increase (or
decrease)1/273 of its initial volume if the temperature was improved (or reduce)1.
3.Charles law
To the definite amount of air, while the air keeps its volume not to change, the relation
of its pressure intensity and temperature is reverse proportion
P1/P2T1/T2

To the definite quatity air, while the same volume, the temperature increases (or
decreases)1its pressure intensity would improve (or reduce )1/273 of the initial
volume.
4.Average free lift
(510-3)/P (cm)
5.Suction capacity
Sdv/dt (L/s) or

SQ/P

QFlow volume(TorrL/s) PPressure Intensity(Torr)

VVolume(L) tTime(s)

6.Communication Conductor CQ/(P2-P1) (L/s)


7.Pumping time of vacuum
The calculation formula of the pumping time from ATM to 1Torr
t8V/S (experience formula)
V represents the volumeS reprensents the suction capacitythe "t" is usally selected during the 5~10
minutes.
8.Maintain pump selection
S MaintainS Fore/10
9.Eltimation suction capacity of the diffusion pump
S3D2 (DDiameter cm
10.Suction capacity of the fore pump of Roots pump
S(0.1~0.2)S Roots (l/s)
11.Leakage rate
QLeakageV(P2-P1)/(t2-t1)
Qleakagesystem leakage rate(mmHgl/s)
Vsystem volume(l)
P1the system pressure intensity when stop the vacuum pump(mmHg)
P2the pressure intensity of the vacuum pump after passing the time "t"(mmHg)
tthe pressure expends the time(s) from 1L to 2L

12.Rough vacuum pump's suction capacity selection

SQ1/P Pre (l/s)


S=2.3Vlg(Pa/P Pre)/t
Sthe efficient suction capacity of the chemical pump
Q1the vacuum system leakage rate(TorrL/s)
P Preneed reach to the preparation vacuum (Torr)
Vvacuum system volume(L)
tthe expending time to reach at the preparation pressure
PaATM(Torr
13.Fore pump suction capacity selection
The convery pump that exhaust port pressure is lower than the ATM such as Diffusion
pump,oil add-pressure pump,the Roots, molecule pump etc. They need the fore pump to keep
the preparation pressure is lower than the critical date.The selected fore pump must
discharge the suction capacity of the main pump.According to the pipe path, every cross
flow volume is equal by bellow condition
PnSgPgS or
SgPgs/Pn
Sgthe efficient suction capacity of the fore pump(l/s)
Pnthe main pump's critical pressure intensity (the max suction capacity)(l/s)
Pgthe highest working pressure of vacuum(Torr)
Sthe efficient suction capacity of the main pump at Pg.(l/s)
14.Suction capacity calculation formula of the diffusion pump
SQ/P(Kn)/(Pt)(L/s)
in equationSexperiment pump's suction capacity(l/s)
nthe oil post in the burette increase scale
tthe expending time to increase n scale for the oil post(s)
Pthe measure pressure intensity near the casing mouth(Torr)
Kthe burette coefficient(TorrL/s)
KV0(L/n)(0/m)+PaVt
thereinto V0initial volume of the burette and vacuum rub pipe(L)
Lthe length of the burette scale part(mm)
nthe scale number of the buretter scale part
0specific gravity of oil(g/cm3)
mthe specific gravity of Hydrargyrum(g/cm3)
Pathe local ATM(Torr)
Vtone scale of the burette is corresponding volume (L/Scale)
15.Geometry calcutaltion formula of the Rotary pump's suction capaity
SZnLKv(D2-d2)/(24104) (l/s)
in formulaZ is the vane numbern is the rotated speed(rpm)L is the casing cavity length,D is the

diameter of casing cavityd is the Rotor diameter(cm)Kv is the volume using coefficient(usally is 95
)
16.O-ring rubber groove depth B0.7D
D is the diameter of the rubberthe groove wide C1.6B
17.Square shape rubber groove depth B0.8A
A is the side length of the square shape rubberthe groove wide C1.67B

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