ISO vs.

ASME:
The Basics of Surface Profile Filtering
Presented by: Tim Ballinger, Bruker-Nano, Inc.
April 24th, 2012

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Presentation Overview

A brief history of ISO and ASME

ISO vs. ASME
The basics of surface profiler filtering
Roughness and waviness
Improvements in software ease of use
Practical applications of stylus profilers
How stylus and noise can filter data
References

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ASME History
ASME was founded in 1880 to provide
a setting for engineers to discuss the
concerns brought by the rise of
industrialization and mechanization.
ASME gained prominence after a boiler
explosion caused the Grover Shoe
Factory Disaster in Brockton, MA on
March 10, 1905 (killing 58 people and
injuring 150)
Having established the Boiler Testing
Code in 1884, ASME formed a Boiler
Code Committee in 1911.
The ASME code was later incorporated
into laws in most US states and
Canadian provinces.
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Grover Shoe Factory Disaster

Brockton, MA

ISO History

Began in 1926 in New York as the International Federation of

the National Standardizing Associations (ISA).
Focused heavily on mechanical engineering.
It was disbanded in 1942 during the second World War.
In 1946, delegates from 25 countries, met at the Institute of
Civil Engineers in London, to form an international organization
To facilitate the international coordination and unification of
industrial standards".
Even the name of the organization is standardized. The name,
"ISO" is not an acronym but was derived from the Greek word
"isos" meaning "equal".
The relation to standards is that if two objects meet the same
standard, they should be equal.
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ISO vs. ASME

European automakers typically apply ISO standards and

US automakers apply ASME standards.
ISO is predominate in western European countries like
Germany, France, and Italy.
But not necessarily in eastern European countries like
Poland, Hungary, and Romania (These countries have
adopted ASME, because it provides them access to the
US market).

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ISO and ASME and Stylus Profiler Filtering

Stylus Profiler: Collects data from the sample surface Real Profile
Total Profile: Unfiltered data produced by the stylus profiler
Primary Profile: Data after the short cutoff filter is applied
(cutoff spatial frequency of s to remove noise).

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The Long and Short of Filtering

Primary Profile Example: Both high frequency roughness and low

frequency waviness (as well as shape curvature)

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The Long and Short of Filtering

Primary Profile Example: Both high frequency roughness and low

frequency waviness (as well as shape curvature)

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The Long and Short of Filtering

Roughness Profile Example: Sampling length is equal to the filter
cutoff wavelength used to separate roughness from waviness (c).
Spatial frequency > cutoff wavelength = roughness profile

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The Long and Short of Filtering

Waviness Profile Example: Sampling length is equal to the filter
cutoff wavelength used to separate roughness from waviness (c).
Spatial frequency < cutoff wavelength = waviness profile

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The Long and Short of Filtering

Shape Profile Example: The waviness profile can be filtered once
more, at an even longer cutoff wavelength, in order to separate the
waviness and form

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The Long and Short of Filtering: Definitions

Traversing Length: Distance of the scan (total profile)
Evaluation Length: Selected portion of the scan for evaluation

Total and primary profiles Sampling length = evaluation length

Sampling Length: < evaluation length.

Roughness and waviness profiles Sampling length = cutoff length (c).

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The Long and Short of Filtering

Sampling Length: < evaluation length.
Segments of a profile showing distance between peaks and adjacent
valleys, as well as identification of additional peaks
Based on ISO 4288 standards.

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ISO vs. ASME Ra Example

ISO 4287 & 4288

ASME B46.1

Ra = (Ra1 + Ra2 + + Ran)/n

Where Ran calculated on a roughness
profile over the sampling length n. n is a
number of sampling lengths.

Ra = (|Z1| + |Z2| + + |ZN|)/N

Where N is a number of data points of
roughness profile over an evaluation
length. Z is height value of roughness
profile

ISO 4287 computes the values over the entire evaluation length
(and sometimes computes the values within a sampling length)
ISO 4288 and ASME B46.1, modifies this computation methodology
to include estimates of parameters (computed over one sampling
length) versus average value of parameters (computed over all
available sampling lengths within the evaluation length)
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Filtering Example Stylus Profiler

Total Profile (Raw unleveled data)
DektakXT Quick-Analyzer Software (Select Data Leveling)

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Filtering Example Stylus Profiler

Select Leveling Type (2-point or linear fit)
Select Roughness button to display filtering options

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Filtering Example Stylus Profiler

Filter Analysis Settings displayed
Select ISO 4287 or ASME B46.1

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Filtering Example Stylus Profiler

Filter Analysis Settings displayed
Select ISO 4287 or ASME B46.1
Select Filter Type

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Filtering Example Stylus Profiler

Filter Analysis Settings displayed

Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter

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Filtering Example Stylus Profiler

Filter Analysis Settings displayed

Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter
Or Select Short & Long Cutoff

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Filtering Example Stylus Profiler

Filter Analysis Settings displayed

Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter
Or Select Short & Long Cutoff
Select Pa: Total or Primary Profile

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Filtering Example Stylus Profiler

Filter Analysis Settings displayed

Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter
Or Select Short & Long Cutoff
Select Ra: Roughness Profile

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Filtering Example Stylus Profiler

Filter Analysis Settings displayed

Select ISO 4287 or ASME B46.1
Select Filter Type
Select Bandpass Filter
Or Select Short & Long Cutoff
Select Wa: Waviness Profile

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Filtering Example Stylus Profiler

Filtered Analytical Results for Ra, Wa & Pa

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Filtering Example Stylus Profiler

Database results comparing multiple measurements

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Filtering Example Stylus Profiler

3D Measurement (DektakXT Stylus Profiler)

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Filtering Example Stylus Profiler

3D Cross-section Roughness and Area Roughness

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3D Resolution and Filtering

3D Area
Surface
Texture

How Profile Density Filters Data

Depends on the spacing between

each individual profile (1um min.)

3D maps can be generated from

10 or 10,000 profiles

High resolution 3D maps can

take hours to complete

MEMS

10mm x 10mm

Micro Fluidic
Channels

3D images created from multiple individual profiles

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Large Map Areas

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How Stylus Size and Shape Filters Data

60
2 um
Radius

12.5um
Radius

2um radius stylus is specified 45

for
surface texture measurements
60 cone angle tip (ASME compliance)

Larger tips (such as

12.5um radius) act as
a filter to smooth data

45 cone angle tip (ISO compliance)

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How Data Point Density Filters Data

Lateral Resolution: Data Point Density:

Too few data points can act to smooth surface profile

DektakXT offers up to 120,000 data points per scan

DektakXT maximum data point density = 0.003um/data point

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How Noise Can Filter Data

Ways to Reduce Noise:

Stable Platform: Lower noise

floor achieved with stable sensor
support

Vibration Isolation: Filter out

external noise & vibration

Electronics: Low-noise
electronics and shielded cables

Environmental Enclosure:
Reduces affects of acoustic noise
and air currents

Built-In Vibration Isolators

Low Noise Single-Arch Support

Measurement repeatability
of better than 5 Angstroms
achieved with DektakXT
Environmental
Enclosure
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Selecting the Right Tool for the Job

AFM: Highest resolution with multiple modes and applications
Optical Profiler: High Z resolution, non-contact high-speed 3D scans
Stylus Profiler: High measurement repeatability of 2D profiles

Atomic Force Microscopy

Nanoscale characterization of electrical,

magnetic, compositional and material
properties
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Optical Profiling

Non-contact 3D measurement of
surface texture and roughness

Stylus Profiling

Measure thin film step heights,

stress and surface texture
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Application Paper & References

ISO Standardized Filtering for

DektakXT Stylus Profiler

Provides more detailed information on

the various ISO and ASME parameters
for measuring roughness and waviness

Available on the Bruker website:

www.Bruker.com

ISO Geometrical Tolerancing Reference

Guide by Alex Krulikowski (Compares
and contrasts ISO and ASME standards)

ISO 4287, Geometrical Product

Specifications (GPS)

ISO 4288, Geometrical Product

Specifications (GPS)

ASME B46.1-2002 (Surface Roughness,

Waviness, and Lay)
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Questions?

Email: tim.ballinger@bruker-nano.com

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April 2012

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