MEMS

Multiple choice
A typical single ULSI chip may contain
(a) 100
(b) 10
(c) 100 million transistors
2

First significant miniaturization occurred with

(a) ICs
(b) Laptops
(c)

Cell Phones.
3.

Development of ICs began in

(a) 1940
(b) 1980
(c) 1970
4.

The term LIGA refers to (a) Design (b) Material

(c)
Micro fabrication process.
5.

Micromachining is used for the fabrication of

(a) Transistor
(b) ICs
(c) Pressure Sensor.
6.

Market value of Microsystems is intimately related to

(a) Volume demand

(b) Special features

(c) Performance of the products
a)

Compare the microelectronics and Microsystems.

b)
Explain in detail the multidiscipline structure of
Microsystems
c)
What are the advantages of miniaturization of
Microsystems
d)
Explain the working principle of MEMS based pressure
sensor. List out
its advantages & disadvantages.
e)
Explain in detail the application of MEMS sensors for
Automobile
Industry.
f)

Explain the sensors used in Aerospace Industry.

g)
Why silicon is used for MEMS Fabrication, explain its
advantages &
characteristics