P-CRDS – BN July 7, 2008

6.0

5.5

5.0

4.5

PeakFit Area (ppm*nm) 4.0

3.5

3.0

2.5

2.0

1.5

1.0

0.5

0.0
0 10 20 30 40 50 60
Beam Current (mA)

[7/8/2008 02:26 "/Graph1" (2454655)]

Linear Regression through origin for Data2_B:
Y=B*X

Parameter Value Error

------------------------------------------------------------
A 0 --
B 0.08911 0.00177
------------------------------------------------------------

R SD N P
------------------------------------------------------------
0.99316 0.16799 5 <0.0001
------------------------------------------------------------
Test 1

Test 2
 ASSUMING Sputter Yield BN – 0.5

ASSUMING 0.8333 of beam current is on the target. (This assumption comes from
the observation of measuring 25mA on the Aluminum target when the Ion Source
power supply reads 30mA).
- NOTE: Hrmmm….. this is interesting. With a target of size 15x14 cm, and a
vacuum chamber diameter of 20cm, the target takes up 0.833 of the cross sectional area
of the chamber. – Coincidence?

ASSUMING 15x14 cm BN target.

ASSUMING The target is ~1.0 cm away from the laser axis.

Questions: In INPUT BLOCK 1, what is : n, U, and Ei ?

With these assumptions, the following data has been compared:

CRDS
Model
1.40E+010

1.20E+010

1.00E+010
[BN] (cm )
-2

8.00E+009

6.00E+009

4.00E+009

20 30 40 50 60
Beam Current (mA)

CRDS (cm-2) MODEL (cm-2) Beam Current (mA) CRDS PeakFit Area obtained from:
4.36E+09 4.46E+09 20 Test2
6.78E+09 6.69E+09 30 Test1
8.00E+09 8.92E+09 40 Test1
1.07E+10 1.12E+10 50 Test1
1.33E+10 1.34E+10 60 Test2