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    This document summarizes research on the simulation and fabrication of microcavities based on porous silicon multilayers in the infrared spectrum. A team of researchers from the Institute of Materials Science and Thai Nguyen University of Education used an electrochemical etching process with varying current densities to create a porous silicon multilayer, which forms the basis of a microcavity structure when inserted between two symmetric Bragg reflectors. Simulation of the microcavity properties and reflection spectra was performed using the Transfer Matrix Method. Experimental determination of suitable period numbers for the Bragg reflectors was also conducted.

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    AbstractForNanotechnology

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    This document summarizes research on the simulation and fabrication of microcavities based on porous silicon multilayers in the infrared spectrum. A team of researchers from the Institute of Materials Science and Thai Nguyen University of Education used an electrochemical etching process with varying current densities to create a porous silicon multilayer, which forms the basis of a microcavity structure when inserted between two symmetric Bragg reflectors. Simulation of the microcavity properties and reflection spectra was performed using the Transfer Matrix Method. Experimental determination of suitable period numbers for the Bragg reflectors was also conducted.

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    13 views1 page

    Abstract For Nanotechnology

    Uploaded by

    thuyvan_1234
    This document summarizes research on the simulation and fabrication of microcavities based on porous silicon multilayers in the infrared spectrum. A team of researchers from the Institute of Materials Science and Thai Nguyen University of Education used an electrochemical etching process with varying current densities to create a porous silicon multilayer, which forms the basis of a microcavity structure when inserted between two symmetric Bragg reflectors. Simulation of the microcavity properties and reflection spectra was performed using the Transfer Matrix Method. Experimental determination of suitable period numbers for the Bragg reflectors was also conducted.

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    HỘI NGHỊ QUANG HỌC QUANG PHỔ TOÀN QUỐC LẦN THỨ VI

    (Hà Nội, Việt Nam. 8-12 THÁNG 11 NĂM 2010)

    Study and fabrication of microcavity


    based on porous silicon multilayer
    Nguyen Thuy Van 1, Do Thuy Chi 2, PhamVan Hoi 1
    and Bui Huy 1
    1
    Institute of Materials Science, VAST 18 Hoang Quoc
    Viet Str., Cau Giay Dist., Hanoi, Vietnam
    2
    Thai Nguyen University of Education, Luong Ngoc
    Quyen road, Thai Nguyen city, Vietnam
    * Corresponding author: vannt@ims.vast.ac.vn

    Abstract: In this paper we present the results in


    simulation and elaboration of microcavities based on
    porous silicon multilayer in the infrared. The porous
    silicon multilayer is fabricated by an electrochemical
    etching of a silicon wafer with timely repeat steps of
    applied current densities. The simulation is relying on the
    Transfer Matrix Method (TMM) to design and predict the
    properties of microcavity as well as the relation between
    electrochemical parameters with of reflection spectra.
    Structurally, microcavity consists of a cavity layer inserted
    in between two symmetric Bragg reflectors. Appropriate
    period numbers of the reflector in porous silicon
    microcavities have been determined by experiment.

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