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    mechanicalTABO4
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    This document summarizes MEMS defects from January 1, 2011 to May 10, 2011. It shows that the most common defects were open bond (OB) with 19 occurrences, followed by foreign material (FM) with 13 occurrences and stuck down (SD) with 13 occurrences. The least common defects were several with 0 occurrences, including dielectric charge (DC), open circuit (OC), resistor defect (RD), unreleased defect (UD), particle defect (PD), corner crack (CC), multi material (MM), missing contact (MC), and gate short (GS).

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    This document summarizes MEMS defects from January 1, 2011 to May 10, 2011. It shows that the most common defects were open bond (OB) with 19 occurrences, followed by foreign material (FM) with 13 occurrences and stuck down (SD) with 13 occurrences. The least common defects were several with 0 occurrences, including dielectric charge (DC), open circuit (OC), resistor defect (RD), unreleased defect (UD), particle defect (PD), corner crack (CC), multi material (MM), missing contact (MC), and gate short (GS).

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as XLS, PDF, TXT or read online from Scribd
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    2 views3 pages

    Book 1

    Uploaded by

    mechanicalTABO4
    This document summarizes MEMS defects from January 1, 2011 to May 10, 2011. It shows that the most common defects were open bond (OB) with 19 occurrences, followed by foreign material (FM) with 13 occurrences and stuck down (SD) with 13 occurrences. The least common defects were several with 0 occurrences, including dielectric charge (DC), open circuit (OC), resistor defect (RD), unreleased defect (UD), particle defect (PD), corner crack (CC), multi material (MM), missing contact (MC), and gate short (GS).

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as XLS, PDF, TXT or read online from Scribd
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    of 3

    DM 10

    ML 27 MEMS Defects as of Jan. 1, 2011 -May 10,

    Frequency
    CB 0
    OB 19 30
    MB 13
    SB 3 25
    GD 9
    TP 0 20
    SC 0
    TD 9 15
    CB 4
    FD 13 10
    SD 13
    FM 2 5
    TB 4
    DC 1 0
    DM

    FM
    ML

    OC 1
    CB

    TP
    OB
    MB
    SB

    CB

    TB
    GD

    SC

    SD

    DC
    OC
    RD
    UD
    PD
    CC
    TD

    FD

    FO
    Defect Code
    RD 0
    UD 0
    PD 0
    CC 0
    FO 8
    MM 0
    MC 0
    SO 0
    NC 0
    TS 2
    CD 0
    GS 0
    RT 0
    SL 0
    DC
    OC

    t Code
    RD
    UD
    PD
    CC
    FO
    MM
    MC

    an. 1, 2011 -May 10, 2011


    SO
    NC
    TS
    CD
    GS
    RT
    SL

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