2028 SERIES

PRODUCT FEATURES PRODUCT FEATURES

High Performance/Compact Design Lowest Nitrogen Consumption to Obtain Max. Vacuum

Ultra-High Purity Vacuum Generators

PRODUCT APPLICATIONS This stainless steel Vacuum Generator Series is nitrogen operated and is available with single or dual vacuum ports. Applications for this generator include: Primary vacuum generation in gas cabinets Chamber evacuation for semiconductor manufacture Dilution of vented gases

2028 SERIES - Product Dimensions

Requires Only 1.6 scfm N2 at 60 psig to Achieve 27 in. Hg Vac. Compatible with Standard Face Seal Fittings 100% Tested for Vacuum Performance and External Leakage Ultrasonically Cleaned to Semiconductor Ultra-High Purity Standards Purged and Final Packaged in Class 1 Cleanroom. Double-bag Packaging with N2 Gas Supplied from a Liquid Source.
Vacuum Port Vent (Outlet)
1.31"

Mates with 3/8 VCR (or 1/2") or Equivalent Vent Vent

2.06" Vac. Vac. Vac.

0.93"

High Velocity Nozzles

Nitrogen

Mates with 1/4 VCR or Equivalent

Nitrogen

2028 - 5

2028 - 52

PRODUCT FEATURES
316 L Stainless Steel Body and Fittings 316 L Stainless Steel Removable Nozzles
Nitrogen (Inlet)

2028 - 5 2028 SERIES - Technical Data

CONSTRUCTION MATERIAL Wetted Areas Non-Wetted Areas 316 L Stainless Steel 316 L Stainless Steel 27" of Hg with inlet nitrogen pressure at 60-80 psig Approx. 7:1 at 1 ATM Maximum 2.7 scfm of N2 @ 80 psig HELIUM LEAK TEST Inboard

Typ. 15/16" Hex

1 x 10

-10 -9

SCC/S He max.

Rated Std.Production

1 x 10 SCC/S He max. Helium leak test performed with 100% He

VACUUM ENTRAINMENT RATIO NITROGEN FLOW

2028 Series

-28

PERFORMANCE

2028 Series 2028 Series

Vacuum (in. Hg)

-24 -20 -16 -12 -8 -4 -0 0.0 0.5 1.0 1.5 2.0 2.5 3.0
REV. 99-1

CLEANLINESS/ PACKAGING

Assembled and tested in CLASS 10 cleanroom. Purged and final packaged in CLASS 1 cleanroom. Double-bag packaging (2 mil nylon inner bag, 6 mil polyethylene outer bag) with N2 gas environment supplied from a liquid source Electropolished to 16 Ra (0.41 Ra m m) on all wetted surfaces Weld on tube extension

STANDARD FINISH OPTIONS

Nitrogen Gas Flow (scfm)

Specifications are subject to change without notice.

VCR is a registered trademark of the Cajon Company

NOTE 1: Dimensional drawings shown are for reference only. Please contact the manufacturer for customer drawings showing updated dimensions.

CARTEN CONTROLS INC.