ISO 14464-1

NEBB
US Fed 209E

VLSI

ICUOR

FGMP

(Semi-conductor Industry)
IC
(Scientific Technology Industry)

(Medication and Food)

CGMP(Current Good Manufacturing
Practice)
(Biological Technology)

(Hospital)

(particulate)
(temperature & humidity)
(room pressurization)
(air velocity)
(air flow parallelism)
(noise level)
(vibration)
(lighting level)
(electrostatic test)
()

 The History

1961,
Technical Manual 00-25-203.
1963-1992,
Federal Standard 209, A~E
1996 NEBB
1999,(ISO)
ISO 14644-1

FS 209

Cleanroom and Work Station Requirements,

Controlled Environments
FS 209 A
209 B
209 C
209 D
209 E

(1966)
(1973)
(1987)
(1988)
(1992)

 FS 209 D
Class

Particles

/ft3

0.1m 0.2m 0.3m 0.5m 5.0m

1

35

7.5

NA

10

350

75

30

10

NA

100

NA

750

300

100

NA

1,000

NA

NA

NA

1,000

10,000

NA

NA

NA

10,000

70

100,000

NA

NA

NA

100,000

700

 FS 209 E

0.5 m/m3,1000
,M3

 FS 209 E

SI

U.S.

M1
M 1.5

M2
M 2.5

10

M3
M 3.5

100

M4
M 4.5

1,000

M5
M 5.5

10,000

M6
M 6.5
M7

100,000

0.1m

0.2m

0.3m

0.5m

5m

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

350

9.91

75.7

2.14

30.9

0.875

10.0

0.283

1,240

35.0

265

7.50

106

3.00

35.3

1.00

3,500

99.1

757

21.4

309

8.75

100

2.83

12,400

350

2,650

75.0

1,060

30.0

353

10.0

35,000

991

7,570

214

3,090

87.5

1,000

28.3

26,500

750

10,600

300

3,530

100

75,700

2140

30,900

875

10,000

283

35,300

1,000

247

7.00

100,000

2,830

618

17.5

353,000

10,000

2,470

70.0

1,000,000

28,300

6,180

175

3,530,000

100,000

24,700

700

10,000,000

283,000

61,800

1,750

 ISO 14644-1

(ISO)

International Organization for Standardization,

ISO

1999,ISO 14644-1
Classification of Air Cleanliness

 ISO
0 .1
C n = 10
D

2.08

N ISO9
D
m
0.1m
Cn

 ISO Class

0.1 m

0.2 m

0.3 m

0.5 m

ISO Class 1

10

ISO Class 2

100

ISO Class 3

24

10

1 000

237

102

35

ISO Class 4

10 000

2 370

1 020

352

83

ISO Class 5

100 000

23 700

10 200

3 520

832

29

ISO Class 6

1 000 000

237 000

102 000

35 200

8 320

293

ISO Class 7

352 000

83 200

2 930

ISO Class 8

3 520 000

832 000

29 300

ISO Class 9

35 200 000

8 320 000

293 000

(1):

Cn

10N

(0.1/D)2.08

Cn N

1 m

5 m

 IEST

Institute of Environmental Sciences and Technology

Recommended Practices, RPs

940 East Northwest Highway
Mount Prospect
Illinois, 60056, USA.
Tel :+1 708 255 1561
Fax :+1 708 255 1699
Web site:www.iest.org

NEBB National Environmental

Balancing Bureau


ISO
14644-1
1999
Class 1
Class 2
Class 3
Class 4
Class 5
Class 6
Class 7
Class 8
Class 9

USA
209E
1992

1
10
100
1,000
10,000
100,000

Japan
B 9920
1989
1
2
3
4
5
6
7
8

France
X44101
1981

4000

--400000
4000000

Germany
VID 2083
1990
0
1
2
3
4
5
6
7

UK
BS 5295
1989

C
D
E,F
G,H
J
K
L

Australia
AS 1386
1989

0.035
0.35
3.5
35
350
3500

 Occupancy state ()
As

built

At

rest

Operational

1,2,3

1,2,3

1,2,3

1,2,3

OPT

OPT

1,2

1,2

1,2

1,2,3

1,2,3

1,2,3

1,2

1,2,3

1,2,3

1,2

N/A

OPT (1,2 only)

1,2

1,2

1,2

N/A

1,2

1,2

1,OPT(2,3)

1,OPT(2,3)

1,OPT (2,3)

1,2,3

1,2,3

1,2,3

OPT

OPT

OPT

1.as-built 2.at-rest 3.operational

1.()
2.()
3.

4.--
5.

0.25 m/s 0.6 m/s

5
ALNOR
Model 8585

1 050m/s0-9999ft/min
3
0.01m/s1ft/min
2 -106014140
0.30.5
0.10.1


Electronic Balometer
ALNOR
APM 150 Meter

85~400m3/h
0~50

HEPA filter
1ft
75~150mm
1ft
sensor

1.()5
2.15
V AM = (V1 + V2 + ..... + VN ) / N

SDV =

(V1 VAM )2 + (V2 VAM )2 + ... + (VN VAM )2

N 1

RSD = SD V / V AM * 100 %

sensor
4ft
4ft

150cm

1.5
2.15

1.Particle Counter
2.Isokinetic Sampling
Probe
3.Aerosol
Generator


Specifications
MetOne
3313 PORTABLE
COUNT
100~250V
50/60Hz
0~2A

0.3,0.5,1,3,5,10m
6 Channels
1CFM


CC LS FS DP
Sr =
60 N P

1.HEPA3
2.1.538mm
3.HEPA
HEPA
HEPA3
38mm

Particle Counter

1.(
)
2.(ISO) A0.5
3. FL1.5m
4.
5. 1


1.Individual

Averages
A C1C2.CN/ N

2.

All Means of Averages

M A1A2.AL/ L

3.

Standard Deviation
SD(A1-M)2(A2-M)2.(AL-M)2/L-1 0.5

4.

Standard Error
SE SD/(L) 0.5

HVAC
HM28

0~25mbar

0.1

)
((:
:

)

CGMP 10Pa

10Pa

10~25Pa
10~25Pa

8~12Pa
8~12Pa

1. Smoke ()
2. Vapor ()
3. Helium Bubble ()
4. Streamer ()
5. 3-D ultrasonic anemometer (
)


Ultrasonic Anemometer
ANEMOSONICTM
Ultrasonic Anemometer UA6

1 0.050m/sec0.09,999ft/min
1 0.01m/sec1ft/min
2099
30.05,000m3/sec
0.09.999106ft3/min
4 07032158
12 0.11
50.00899.99m2
0.08621,076ft2
6099%
NCIT Dr. Wang Lab.

Flo-Viz method

Flo-viz

2135
mm

2440
mm

mm
915mm

Flo-Viz method
A

Tangent-1

A=a/b

:<14

0.070
0.105
0.141
0.176
0.213
0.249
0.287
0.325

Angle A

4
6
8
10
12
14
16
18

1.
2.


filter

76cm

60cm
60cm

(FC)

(FC)
15

(FC)
12~18

30

24~36

()

1~39

50

40~60

40~59

75

60~90

60

100

80~120

()

1FCfoot-candle10.76 lux

HVAC

1.31.5 Hz16 kHz

2.14 to 122(-10
to 50)
3.0 to 90RH
4.5


Sound Level Meter
HD 9020
Class 1
14dB135dB
16Hz16kHz
IEC651IEC804
IOS1996

1.5m
20m

20m

(63 to
8000 Hz)

NC60-70

cleanroom

1.14 to 122
2.0 to 95RH
3.peak to peak0.030in.
0.75mm10
55 Hz


Vibration Meter
TYPE 3144A

ACC
0.0199.9m/s2 PEAK
VEL
0.0199.9mm/s PEAK
DISP
0.01.99 mm PEAKPEAK

35000Hz

AS
AL

)
m
4
.
2
(

(6m)

Class 1000

(33m)

)
m
8
(

()

(DB )

(%RH)

(dB)

(mmAq)

100

222

555

70

1.5

1000

222

555

75

1.25

AS
AL

E1

E2

E3

E4

E5

E6

)
m
6
(

C1

C2

C3

C4

C5

C6

B1

B2

B3

B4

B5

B6

B7

B8

B9

B10

B11

A1

A2

A3

A4

A5

A6

A7

A8

A9

A10

A11

(20m)

F1

F2

G1

G2

H2

H2

H2

10

11

440

435

471

449

459

455

477

436

474

471

450

468

454

490

440

550

416

378

427

439

438

455

423

437

416

421

431

481

410

415

424

432

392

472

414

418

491

488

441

451

412

(:m3 /hr)

QAM = (Q1 + Q2 + ..... + QN ) / N

SD Q =

(Q1 Q AM )2 + (Q 2 Q AM )2 + ... + (Q N
N 1

RSD = SDQ / Q AM 100

Q AM

QAM444

(m3 /hr)
)2

SDQ 31
RSD7%

416

490

435

2.828

2.236

20.26

RSD

0.68

0.456

4.657

(m3 /hr)

832

979

1304

QAM
(m3 /hr)

SDQ

Clean
Booth

AS
AL

4
3

)
m
6
11
12 13 (

10

(20m)

20 m 8 m 12.613


Location

0.3m

0.5m

1.0m

3.0m

5.0m

10.0m

Loc.01

28.0

22.0

27.0

5.0

2.0

4.0

Loc.02

2.0

3.0

1.0

0.0

1.0

0.0

Loc.03

8.0

6.0

15.0

1.0

2.0

2.0

Loc.04

8.0

4.0

9.0

3.0

1.0

0.0

Loc.05

9.0

6.0

4.0

0.0

4.0

0.0

Loc.06

6.0

3.0

1.0

1.0

0.0

0.0

Loc.07

7.0

5.0

3.0

0.0

2.0

2.0

Loc.08

6.0

3.0

9.0

0.0

1.0

1.0

Loc.09

2.0

0.0

0.0

0.0

0.0

0.0

Loc.10

5.0

6.0

0.0

0.0

1.0

0.0

Loc.11

0.0

2.0

6.0

0.0

1.0

0.0

Loc.12

3.0

3.0

6.0

0.0

2.0

0.0

Loc.13

17.0

10.0

13.0

5.0

4.0

3.0


30
25
20
15
10
5

0.3m
0.5m
1.0m
3.0m
5.0m

0
.01 oc.03 oc.05 oc.07 oc.09 oc.11 oc.13
c
o
L
L
L
L
L
L
L

10.0m

AS
AL

189 246 187

220 326 191
190 295 186

560

561

559

550

530

658

657

684

670

560

250 520 243

250 520 243

310 530 308

310 530 308

537 520 300

537 520 300

504

634

696

706

703

618

636

626

658

628

650

700

711

708

689

684

685

654

511

570

584

706

560

550

563

560

510

lx

1
2

AS
AL

(20m)

120 m2/40 m2 3

)
m
6
(

NCIT Dr. Wang Lab.

(NC)

(Hz)
63

(dB)
1

70

69

69

69

72

73

77

72

(dB)
83

125

72

75

74

76

75

73

71

68

79

250

68

67

68

67

67

68

67

66

75

500

67

66

73

68

73

68

67

65

73

1000

66

69

66

67

66

65

65

66

71

2000

68

66

66

65

64

64

64

68

69

4000

65

65

65

68

65

67

64

63

68

8000

65

65

65

65

65

65

65

64

67

1.0
0.8
1.0

0.8

0.4

0.4

AS
0.5

0.8
0.4

0.8

0.4

1.1
AL

0.8

0.4

0.3

0.9

0.8

0.3

0.3

0.7

0.5

0.4

(: mm/s )

0.4

0.4

0.6

0.4

ISO 14464-1
209E

NEBB
As-built

At-rest
Operational

()

!!

Thanks!!