Microsyst Technol (2010) 16:18111819

DOI 10.1007/s00542-010-1096-7

TECHNICAL PAPER

Double-disk rotating viscous micro-pump with slip flow

Khaled M. Bataineh Mohd A. Al-Nimr
Suhil M. Kiwan

Received: 23 January 2010 / Accepted: 5 May 2010 / Published online: 20 May 2010
Springer-Verlag 2010

Abstract In this paper numerical solution was provided

for the 2D, axisymmetric Navier-Stokes equations coupled
with energy equation for gaseous slip flow between two
micro rotating disks pump. A first-order slip boundary
condition was applied to all internal solid walls. The
objective is to study the effect of Knudsen number, rotational Reynolds number and gap height on pump head, flow
rate, coefficient of moments and overall micro-pump efficiency. Pump head, flow rate, coefficient of moments and
pump efficiency were calculated for various pump operating conditions when the mass flow rate is applied at the
pump inlet port. Detailed investigations were performed for
rotational Reynolds number equals to 10. Effect of gap
height between the two disks was studied. Effect of rotational Reynolds number on maximum flow rate and maximum pressure rise was simulated. The present numerical
results for no-slip were compared with previously published experimental and theoretical data and found to be in
a very good agreement. Knudsen number Kn values were
found to be major parameters that affect the performance of
pump. Pump performance decreases with increasing Kn.
Optimal pump performance occurs around middle point of
pump operating range. Pump operating range decreases
with increasing Kn numbers. Pump performance is found
to experience a steep degradation for Kn approaching 0.1.

K. M. Bataineh (&)  M. A. Al-Nimr  S. M. Kiwan

Department of Mechanical Engineering, Jordan University
of Science and Technology, Irbid, Jordan
e-mail: k.bataineh@just.edu.jo

Maximum flow rate increases with rotational speed almost

linearly. Maximum pressure rise also increases with rotational speed. Reducing gap height results in increasing
maximum pressure rise, while increasing gap height results
in larger maximum flow rate.
List
CM
D
g
H
NH
NQ
P
PS
Q
r1
r2
Re
Sc
T
vr
vh
vz
t
x
q
qr
qo
s
r
rv
k
g
*

of symbols
Moment coefficient
Diameter of the disk [m]
Acceleration due to gravity [m/s2]
Pump discharge head [m]
Dimensionless head
Dimensionless flow rate
Pressure [Pa]
Shaft input power [N m/s]
Flow rate [m3/s]
Inner radius of the impeller [m]
Outer radius of the impeller [m]
Rotational reynolds number
Space between the disks [m]
Shaft toque on the disk [N m]
Radial velocity components [m/s]
Swirl velocity components [m/s]
Axial velocity components [m/s]
Kinematic viscosity [m2/s]
Rotor angular velocty [rad/s]
Density [kg/m3]
Density ratio
Density at exit [kg/m3]
Shear stress [N/m2]
Tangential-momentum accommodation coefficient
LennardJones characterstic length [m]
Mean free path [m]
Overall pump efficiency
Dimensionless variables

123

1812

1 Introduction
In the last several years the hydrodynamics and thermal
behaviors of different systems at micro-scale level have
attracted the attention of many researchers. This is due to
the rapid growth of novel techniques applied in MEMS
(micro-electro-mechanical systems) that find applications
in many industrial and biomedical fields. An excellent
review for the fundamentals, theory and applications of
these micro-scale systems may be found in (Duncan
and Peterson 1994; Gad-el-Hak 1999, 2002; Iverson and
Garimella 2008). The current micropump technologies and
their biomedical applications have been briefly reviewed
by Amirouche et al. (2009). As a result of this revolutionary raised interest in these micro-scale systems,
researchers revisited many macro-scale mechanical components and focused on investigating and predicting the
change in their thermal and hydrodynamics behavior if
they fabricated at micro-scale sizes. Recently, electrostatic,
magnetic, electromagnetic, pneumatic and thermal actuators, motors, valves, gears, cantilevers, diaphragms and
tweezers less than 100 lm in size have been fabricated.
These have been used as sensors for pressure, temperature,
mass flow, velocity, sound and chemical composition; as
actuators for linear and angular motions; and as simple
components for complex systems such as robots, microheat engines and micro-heat-pumps (Duncan and Peterson
1994; Gad-el-Hak 1999, 2002).
One of the most important mechanical components that
find numerous numbers of applications is the pumps.
Engineers are familiar with all types of pumps and especially the rotating disk pumps. In general, one may look to
this pump as one of the technical applications of rotating
disk problems. Micro-rotating disk finds applications in
viscometry, spin-coating, manufacturing and in various
rotating machinery components (Anderson and Rousselet
2006). Further application can be found in microsensors,
separation devices, drug delivery systems, electronics
cooling, micro-gas turbines, micro-compressors, rheometers, lubrication, and computer storage disks. An excellent
review for the interaction of a flow with the rotation of
single disk was provided by Owen and Rogers (1989).
As mentioned previously, rotating disk pumps are one
of the most important applications that involve the interaction of fluid flow with rotating disks. Research on such
rotating disk micro-pump was firstly introduced in (Sen
et al. 1996). Blanchard et al. (2005) investigated the
hydrodynamics behavior of single-disk and double-disk
viscous micro-pumps and the performance of a miniature
single-disk viscous pump, respectively. In series of
papers, Kilani et al. (2003, 2006) and Al-Halhouli et al.
(2006, 2008) examined the hydrodynamics behavior of a

123

Microsyst Technol (2010) 16:18111819

modified type of a spiral-channel viscous micro-pump.

Halhouli et al. (2007) investigated the effect of radius
ratio, and channel aspect ratio on the flow performance
single and double disk viscous micropumps. They found
that the lubrication solution is in good agreement with
their numerical and experimental results.
The main draw back of these investigations is the
ignorance of the velocity slip that occurs at the solid
boundaries that confine the flow. In these investigations the
authors do not pay any attention to the possibility of having
relatively large values of Knudson numbers especially
when the gab width between the two disks that form the
pump is very small.
The fluid flows in these small devices differ from those
in macroscopic systems and cannot always be predicted
from the classical flow and energy models such as the
Navier-Stokes and energy equations with no-slip and
no-jump boundary conditions at a fluidsolid interface
(Duncan and Peterson 1994; Gad-el-Hak 1999, 2002;
Karniadakis and Beskok 2002). Slip flow, temperature
jump, thermal creep, rarefaction, compressibility, viscous
dissipation, intermolecular forces and other unconventional
effects may have to be taken into account. For gases,
micro-fluid hydrodynamics and thermal behavior have
been studied by incorporating slip and jump boundary
conditions, thermal creep, viscous dissipation as well as
compressibility effects into the continuum equations of
motion and energy. Molecular-based models have also
been used for certain ranges of the operating parameters.
Researchers prefer to use the continuum models instead
of the alternative molecular models because it is much
easier to handle the continuum model mathematically. This
is usually done as long as the continuum models are
applicable. Thus, careful considerations of the validity of
the Navier-Stokes equations have to be taken into account.
In order to be able to solve the Navier-Stokes equations for
any flow situation a number of initial and boundary conditions have to be applied. The ratio between the molecule
mean free path and the system characteristic length is
known as the Knudsen number Kn which is the most
important parameter determining the flow regime. Usually,
the no-slip boundary condition at a fluidsolid interfacial
surface is enforced in the momentum equation and an
analogous no-temperature-jump condition is applied in the
energy equation. In practice, the no-slip/no-jump condition
leads to fairly accurate predictions as long as Kn \ 0.001.
Beyond that, the equilibrium does not hold and a certain
degree of tangential-velocity slip and temperature jump
must be allowed. First-order slip/temperature-jump
boundary conditions should be applied to the NavierStokes equation in the range between 0.001 \ Kn \ 0.1.
The transition region occupies the range between

Microsyst Technol (2010) 16:18111819

0.1 \ Kn \ 10, and second-order or higher slip/temperaturejump boundary conditions are applicable there.
The objective of the present study is to examine the
hydrodynamics behavior of a rotating disk pump at microscale level. The effect of different geometrical, design and
operating conditions on the pump hydrodynamics behavior
will be investigated. The effects of these parameters on
the head-flow rate, head-efficiency and efficiency-flow
rate characteristics curves of the pump will be examined.
The fluid that is handled by the pump is assumed to
have Knudson number that falls within the range
0.001 \ Kn \ 0.1 so it is possible to adopt the continuum
approach with velocity slip at the solid/fluid interfacial
boundaries. Since the slip physics at the boundaries is fully
understood for gaseous fluids, the fluid that is handled by the
pump is assumed to be gas. Also, it is worth mentioning that
the same approach may be applied on liquid taking into
consideration that the constitution for liquid slip at the wall
is similar to that used for gases but with different coefficient.
These coefficients for liquids have been measured experimentally. It is worth mentioning here that the findings of the
present study are valid even for macro-pumps that operate at
relatively low pressures. At these low pressure levels, the
molecules mean free path length is large. This yields a relatively large value of Kn which falls within the range that
necessitates the imposing of the continuum model combined
with the velocity slip boundary conditions. Another objective of this study is to simulate the fluid flow behavior in
wide range of already existing devices and applications
involve fluid flow confined in micro-gap formed between
two rotating disks.

2 Governing equations

1813

neither centrifugal nor positive displacement. The pumping

mechanism is called Discpac, and it moves the fluid using
forces of the boundary layer especially the viscous drag.
So, it is basically shear-driven flows due to rotation of
disks. When the fluid enters the disks pump through the
inlet port, its molecules adhere to the surfaces of the disks.
This creates a boundary layer. As the disks rotate, energy is
transferred to successive layer of molecules through viscous drag, generating velocity and pressure gradient across
the gap between the rotating disks. This combination of
boundary layer and viscous drag causes dynamic force that
pulls the fluid in outward radial direction. Gas enters the
cavity between two co-rotating disks. The disks are D in
diameter and the gas enters at m_ inlet through a circular bore
of radius r1. The disks, which are Sc apart, are spinning at
x, and the gas enters with no swirl. As the flow is diverted
radially, the rotation of the disk has a significant effect on
the viscous flow developing along the surface of the disk.
The diameter of the disk D is taken as the characteristic
length scale. The nondimensional parameters; geometric
parameters r* and z*, rotational Reynolds number Re,
velocity components vr , vh , vz , density q, flow rate NQ,
pump head NH, pressure rise (pump load) P* and shaft
input power Ps* are obtained as following:
r

r
;
D

Re

wD2
;
4m

z

z
;
D

vr

Sc
vr
;
xD

Sc
D

vh

1
vh
;
xD

vz

vz
xD

q qr q0

where qo is the density at the exit port which assumed to be

constant, without loss of generality, we assume qr be equal
to unity (see Bataineh and Al-Nimr 2009).
Qin
gH
; NH
pxr12 D
xD2
Z
Z
1
1
Dp
po dA 
pi dA;
Aoutlet
Ainlet
NQ

The rotating disk micropump is composed of two rotating

finite parallel disks; as shown in Fig. 1. The fluid between
the two disks is taken to be Newtonian, compressible and
isothermal with constant properties. The pumping mechanism uses unique non-impingement principles, which is

Ao

PS TS x;

PS

Ai

PS
qx3 D5

4
p

DP
qxD2

Also, overall pump efficiency, moment coefficient and

moment are defined as:
g

qgHQ H  Q

PS
PS

CM

M
8qo x2 D5

M
Fig. 1 Model of rotating disk micro pump

Zr

2pr 2 szh dr

7
8

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1814

Microsyst Technol (2010) 16:18111819

For axisymmteric flow of compressible fluid, the

continuity equation and Navier-Stokes equations written
in dimensionless cylindrical coordinates are:

o   
o
10
r vr  r  vz 0

or
oz


ov v2
ov
1
vr
op
r2 vr  2
vr r  h vz r
11
 
Re
or
r
oz
r
or



vh
vr o    
1
 ovh
2 
r
r
v

v

12

v
h
z
h
r  or 
oz Re
r 2
ov
ov
1
1 op
vr z vz z r2 vz 
Re
q oz
or
oz

13

A gas flow is classified to be in the slip regime if the

Knudsen number Kn is 0.001 \ Kn \ 0.1. In present
study, Knudsen number is defined as Kn = k/Sc, where
Sc is the distance between disks and k is the mean free path
of gas molecules defined as:
kB T
k p
2pr2v p

14

Where rv is LennardJones characteristic of the gas and

kB is the Boltzman constant equals to 1.38066 9 10-23 J/
K.
For macrofluidic devices, Kn is very small, and no-slip
boundary condition at solid boundaries is valid assumption.
In micromechanics of gases and rarefied gases, Kn is not
small and there is a slip at solid boundaries. The traditionally used no-slip boundary conditions for velocity are
no longer valid in micromechanics of gases. In the slip
regime, the gas velocity at a solid surface differs from the
velocity at which the wall moves. Following Maxwell
(1879), it has been proposed by Schaaf and Chambre
(1961) that at a solid surface in isothermal slip flow; the
dimensionless slip velocity is defined as:
vs vs 

2  r ovg
Kn
r
on

To evaluate the performance of rotating disks micro

pump, commercial finite volume software FLUENT is used
in this study (2002). FLUENT Software adopts Maxwells
models for slip velocity. FLUENT defines the equations
below to simulate slip velocity.





2r
oU
2  r k
Uw  Ug

Ug  Uc
16
Kn
r
on
r
d


~ ~
Vg  V
n g Vw
17
where, U and V represent the velocity component that is
parallel and normal to the wall, respectively. The subscripts
g, w and c indicate gas, wall and cell-center velocities. The
parameter d is the distance from cell center to the wall and
r is the momentum accommodation coefficient of the gas.
The mean free path is computed using Eq. 14.
The 2D, axisymmetric Navier-Stokes equations coupled
with energy equation were numerically solved. Numerical
domain consists of two parallel disks rotating as shown in
Fig. 2. Due to significant effect on the viscous flow
developing along the surface of the rotating disks, the flow
is diverted radially. In numerical simulations, the inlet
boundary condition was specified by mass flow rate. The
outlet boundary condition was specified by pressure equal
to gage pressure throughout all simulations. Slip velocity
conditions were used in all internal surfaces of the channel.
A special solution technique was used to obtain a converged solution. Since high degree of rotation introduces a
large radial pressure gradient which drives the flow in the
axial and radial directions, which may lead to instabilities
in the solution process. As a convergence criterion, the

15

where v*s is the dimensionless tangential velocity of the

surface, v*g is dimensionless velocity of the gas, n is
the coordinate normal to the solid surface and r is called
the tangential-momentum accommodation coefficient.
Equation above is written in non-dimensional form with
velocities being non-dimensionlized by surface speed of
the disk x D/2 and the gap between the two disk Sc.

3 Numerical modeling
It is often difficult to obtain accurate analytical results
using governing equations for rotating disks micropump.
Hence numerical simulations become an attractive method
to predict the performance of the micropump.

123

Fig. 2 Mesh density of numerical domain

Microsyst Technol (2010) 16:18111819

1815

solver iterated the equations until the scaled residuals of

continuity; x-velocity; y-velocity, swirl velocity and energy
were \10-10. Mesh independent solution was obtained for
relatively large volume of cells (see Table 1). In present
study, number of cells used is 243,000. In order to enhance
accuracy, double precision was used. Also, second order
accuracy was used for density, momentum, swirl velocity,
energy and pressure.

similar to the present work geometry shown in Fig. 1. The

sample problem consists of two parallel disks, one of them
rotating with angular speed equals to 15.82 while the other
is held stationary. Figure 3 compares between the dimensionless radial velocity of present numerical work and
experimental work at two different radial locations. It is
clear from the Fig. 3 that the present numerical solution
matches very well the experimental work obtained by Szeri
et al. (1983).

3.1 Validation of the model

The mesh density was exhaustively tested in order to
guarantee that the results were mesh-independent. Table 1
illustrates the mesh convergence of the pump head. Model
that consists of 243,000 elements was used for the entire
simulations. Figure 2 shows part of the mesh density
numerical domain where finer mesh was used near inlet
region and near wall of the disks.
In order to validate the simulation model, the present
results were compared against previous results obtained by
White (1991). White (1991) reported moment coefficients
variations with Reynolds number for a single disk. Moment
coefficients were numerically obtained for both disks.
Hence their result should be multiplied by factor of two.
The solution presented in White (1991) is valid for finite
disk if Re  1 and D  Sc. These conditions are satisfied
in present validation for comparison purposes. Table 2
shows that the present results are in very good agreement
with theoretical.
To further validate the numerical solution, a sample
problem is created and compared against experimental
results obtained by Szeri et al. (1983). Szeri et al. obtained
Laser-Doppler velocity measurement in water between
finite rotating disks. The sample problem geometry is
Table 1 Demonstrates the mesh convergence of dimensionless
pressure rise NH, Sc* = 0.07, NQ = 0.0146, Kn = 0, where i is the
previous simulation


NHi NHi1 
Number of element
NH
 NH  100%
i

6,000

Convergence problems

22,000

0.1905732

N/A

84,600

0.184962

3%

243,000

0.183146

1%

Table 2 Validation of the

simulation results, no slip

N/A

4 Results and discussion

In this section the results of several parameters controlling
the flow characteristic will be presented and discussed.
These parameters include Kn, Re, Sc.
4.1 Effect of Kn numbers
Figure 4 shows the characteristic curves for rotating micro
disk pump for Re = 10. In general, pump head decreases
almost linearly with decreasing in flow rate with the same
behavior for all values of Kn studied in this present work.
The reason for this general trend is; for given Kn, the input
power is constant, output power of the pump is qgHQ,
increase in H should accompanied with decrease in Q and
verse-versa. Increasing Kn resulted in reducing pump head,
since as Kn increases, slip velocity increases, and hence
less viscous effect developed at the wall of the disks.
Figure 4 shows that maximum head (zero flow rate) for no
slip is 0.287, while for Kn = 0.1 is only 0.032. The same is
true for flowrate, for no-slip, pump able to deliver 0.035,
while for Kn = 0.1, pump only delivers 0.0023. Finally,
increasing Kn resulted in reducing operating range of the
pump (maximum flowrateminimum flow rate).
Figure 5 shows how the moment coefficients for both
rotating disks vary as a function of flow rate for different
values of Kn number for Re = 10. Values of CM do not
change with increasing in flow rate. However CM decreases
with increasing Kn numbers. The moment coefficient for
no-slip (Kn = 0) is greater than that for Kn = 0.1 by
almost three times. This is because the magnitude of shear
stresses at the disk surface is proportional to derivatives of
the slip velocity. Figure 5 suggested that moment coefficient is only function of Reynolds number and Knudsen

23:87

CM White CM  p
Re

CM Present work



C
CM White 
Difference (%)  M present
 100%
CM White

500

0.3461

0.3305

4.5

700

0.2925

0.2962

1.2

10,000

0.0774

0.0749

3.2

100,000

0.0245

0.0247

1.1

Re Re

xr22
t

123

1816

Microsyst Technol (2010) 16:18111819

Fig. 4 Effect of Kn on NH for Re = 10, Sc* = 0.07

Fig. 5 Moment coefficient for both rotating disk as a function of flow

rate for different values of Kn number, Re = 10, Sc* = 0.07

Fig. 3 Comparison between experimental results obtained by Szeri

et al. and present numerical solution. Dimensionless radial velocity
distribution across the gap between rotating disks, x1 = 15.82 rpm,
x2 = 0 rpm. a At dimensionless radial location r* = 0.173. b At
dimensionless radial location at r* = 0.45

number. The present behavior of no slip matches previously theoretical and experimental published results.
Figure 6 shows how overall pump efficiency varies as a
function of flow rate and Kn number. Since for a fixed
value of Kn, the flow rate inversely proportional to the
pump load, there should be an optimum operating condition of the pump. Figure 6 shows that the optimum operating condition lies almost in the middle the pumps
operating range. For example, from Fig. 4, for
Kn = 0.001, maximum flow rate (zero pump head) is
around 0.026. Figure 6 shows that for the same Kn that

123

Fig. 6 Overall pump efficiency as a function of flow rate for different

values of Kn, Re = 10, Sc* = 0.07

maximum pump efficiency obtained for flow rate around

0.013. The same is true for different values of Kn numbers.
For example, from Fig. 4, for Kn = 0.1, maximum flow
rate (zero pump head) is around 0.00223. Figure 7 shows
that maximum pump efficiency occurs at flow rate around
0.0011. In general, the effect of increasing Kn number is

Microsyst Technol (2010) 16:18111819

1817

Fig. 7 Zoom out of Fig. 6, overall pump efficiency as a function of

flow rate for Kn = 0.1, Re = 10, Sc* = 0.07
Fig. 9 Zoom out of Fig. 8

increasing of pump efficiency. For example, maximum

efficiency for no slip is 1.31%, while for Kn = 0.1, only
0.035%. This behavior provides evidence of the dominating effect of viscous forces generated by rotation of the
disks. Radial velocity distributions across the gap for different values of Kn are shown in Fig. 8. The higher the Kn
number is the greater the slip at the walls of the disks. For
all values of Kn number, maximum velocity occurs at the
middle of the gap. Also, for given mass flow rate,
increasing Kn numbers results in decreasing the magnitude
of maximum velocity. Figure 9 is a zoom out of Fig. 8 to
clarify slip velocity at the disks walls.
4.2 Effect of gap height
Fig. 10 Effect of gap height on NH, Re = 10

Three values of gap height have been numerically studied;

to investigate their effect on pump performance. These
values are; Sc* = 0.113, 0.07, 0.0418.
Figure 10 shows that maximum pressure was obtained
for smaller value of gap height, while maximum flow rate
was obtained for larger value of gap height. Similar
behavior is observed for slip flow. So in general, increasing

Fig. 8 Radial velocity distribution across the gap at r = D/2,

Re = 10

the gap resulted in decreasing slope of head-flow rate

curve.
4.3 Effect of rotational speed
The effect of rotational speed was studied numerically.
Maximum pressure rise and maximum flow rate were
obtained for gap height equal to 0.07, geometric parameters
were held fixed. Only rotational speeds were varied. The
disk diameter of 3 mm, gap height of 210 lm, and compressible air are used to obtain dimensional quantities.
Figure 11 shows maximum pressure rise (at zero flow rate)
variations for rotational speed ranging from 664 to
45,000 rpm. The maximum pressure rise increases almost
quadratically with increasing rotational speed. Previous
published results reported near linear behavior for smaller
range of rotational speed. This quadratic behavior is due to
large range of rotational speed investigated in present
work. Maximum flow rate (zero pressure rise) variations
with rotational speed are shown in Fig. 12. The maximum
flow rate increases almost linearly with increasing rotational speed. In general, higher flow rates and higher

123

1818

Fig. 11 Maximum pressure rise and rotational speed. Disk diameter = 3 mm, gap height = 210 lm, air is the working fluid

Fig. 12 Maximum volume flow rate and rotational speed, Disk

diameter 33 mm, gap height = 210 lm, air is the working fluid

pressure rise can be obtained at greater rotational speeds.

Figure 13 shows the effect of slip values on maximum
pressure rise with rotational speed. It is clear from Fig. 13
that the effect of slip reduced with increasing speed. At
relatively low rotational speed, the viscous forces are relatively significant compared with centrifugal forces. This
explained why the ratio was high at low speed. While at
higher rotational speed, centrifugal forces are larger compared to viscous forces, resulted in ratio approaching unity.

5 Conclusion
The performance of the micro-rotating disk pump with slip
flow for gaseous were investigated numerically. A solution
of 2D axisymmetric Navier-Stokes equations coupled with

123

Microsyst Technol (2010) 16:18111819

Fig. 13 Pressure rise ratio with rotational speed

energy equation were numerically obtained. The effect of

Kn numbers on pump head, and pump performance were
studied separately for various values of mass flow rates.
The moment coefficients were calculated for different flow
parameters. The moment coefficient does not change significantly with changing mass flow rate for given Reynolds
number. However, the moment coefficient decreases with
increasing Knudsen number. This suggest that moment
coefficient is function of Re and Kn.
Pump efficiency varies with mass flowrate and Knudsen
number. Pump efficiency decreases with increasing
Knudsen number. For given Reynolds number and Kn,
maximum efficiency occurs around the half of maximum
flowrate that pump can deliver.
Higher values of Knudsen numbers degraded pump
performance. Present pump is able to pump fluid against
0.278 of non-dimensional external pressure for no slip.
On the other hand, it is able to deliver against only
0.032 of non-dimensional external pressure for Kn = 0.1.
Pump performance decreases smoothly and slowly with
increasing Knudsen number from zero to 0.01. However,
it experiences a steeper degradation when Kn approaches
0.1. The maximum pressure rise increases with increasing rotational speed. The maximum flow rate increases
almost linearly with increasing rotational speed. For
relatively higher value of rotational speed, centrifugal
forces dominated over viscous force so that effect of slip
becomes minimal. For given rotational speed, larger
values of maximum flow rate obtained by increasing gap
height while larger values of maximum pressure rise are
obtained by decreasing gap height. It should be stresses
out that even though the design and implementation of
this configuration is relatively simple; however, new
different configurations should be investigated for those
cases for Kn approaching 0.1.

Microsyst Technol (2010) 16:18111819

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